Vibration dampers and vibration reduction systems

Abstract

This application relates to a vibration damper and a vibration damping system, belonging to the field of precision vibration damping technology. It includes a base plate and a top plate spaced apart from each other, a vibration damping cavity, a sensor assembly, and a motor assembly disposed between the base plate and the top plate. The top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity. The vibration damping cavity is sealed to form a sealed cavity. The sensor assembly and the motor assembly are disposed within the sealed cavity. The sensor assembly is configured to detect the movement of the top plate, and the motor assembly is configured to drive the top plate to move. This achieves the integration of the core components of the vibration damper that provide active vibration damping within the sealed cavity. The sealed cavity effectively prevents external environmental corrosion of the internal components. Therefore, this design is particularly suitable for scenarios with extremely stringent environmental requirements, such as high temperature and high humidity, and vacuum environments. Furthermore, even in harsh environments, ordinary devices can be used without special treatment, greatly simplifying the maintenance and use of the equipment.

Description

Technical Field

[0001] This application relates to the field of precision vibration reduction technology, specifically to a vibration damper and a vibration reduction system. Background Technology

[0002] With the continuous improvement of the precision of ultra-precision machining equipment and measuring instruments, the vibration of their working environment is increasingly demanding of low amplitude and low frequency, which places more stringent requirements on the vibration reduction performance of vibration damping tables. Traditional passive vibration isolation technology, consisting of a mass-spring-damper system, cannot meet the vibration reduction requirements of ultra-precision equipment due to the inherent contradiction between the low-frequency vibration transmissibility and the high-frequency vibration attenuation rate. Therefore, there is an urgent need for new technologies and methods to improve this situation.

[0003] Active vibration damping is a crucial technology for solving the aforementioned problems. Active vibration damping systems generally consist of a combination of passive vibration isolation elements and active actuators, such as active vibration dampers composed of air springs and voice coil motors in parallel, active vibration dampers composed of vibration-damping rubber and piezoelectric ceramics, and active vibration dampers combining air springs and pneumatic actuators. These types of active vibration dampers can achieve both low-frequency suppression and high-frequency isolation.

[0004] However, when the aforementioned active vibration dampers are used in harsh environments (such as high temperature and humidity environments or vacuum environments), their performance is often affected, and they may even fail to function properly. Therefore, there is an urgent need for an active vibration damper that can be used in harsh environments to meet the high-precision vibration reduction requirements of ultra-precision equipment under various complex working conditions. Utility Model Content

[0005] The purpose of this application is to provide a vibration damper and a vibration damping system to meet the requirements of vibration damper use in harsh environments such as high temperature, high humidity, and vacuum, thereby ensuring the stability and reliability of the vibration damper.

[0006] This application provides a vibration damper, which includes a bottom plate and a top plate arranged at relative intervals, a vibration damping cavity, a sensor assembly, and a motor assembly disposed between the bottom plate and the top plate; wherein, the top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity, the vibration damping cavity is sealed to form a sealed cavity, the sensor assembly and the motor assembly are disposed in the sealed cavity, and the sensor assembly is configured to detect the movement of the top plate, and the motor assembly is configured to drive the top plate to move.

[0007] The vibration damping cavity has an opening at its top; the vibration damper also includes a support plate located between the bottom plate and the top plate, the support plate is fixed to the top plate and is spaced apart from the inner bottom wall of the sealed cavity; and the support plate is connected to the side wall of the vibration damping cavity in a way that it can move along the depth direction of the vibration damping cavity and seals the top opening of the vibration damping cavity. The sensor assembly and the motor assembly are both connected to the support plate.

[0008] The vibration damper also includes a sealing diaphragm, an outer pressure member for the sealing diaphragm, and an inner pressure member for the sealing diaphragm. The sealing diaphragm is disposed on the end face of the side wall of the vibration damping cavity facing the top plate and on the surface of the support plate facing the top plate. The sealing diaphragm covers the gap area between the side wall of the vibration damping cavity and the support plate. The outer pressure member for the sealing diaphragm is disposed on the end face of the side wall of the vibration damping cavity facing the top plate and seals the portion of the sealing diaphragm covering the side wall of the vibration damping cavity with the side wall of the vibration damping cavity. The inner pressure member for the sealing diaphragm is disposed on the surface of the support plate facing the top plate and seals the portion of the sealing diaphragm covering the support plate with the support plate.

[0009] The sidewall of the vibration damping cavity is divided into at least one sidewall segment along the depth direction of the vibration damping cavity, and at least one sidewall segment includes a target sidewall segment, which is a bellows.

[0010] The damping cavity has an opening at its bottom end; a through hole is provided on the side of the bottom plate facing the top plate, corresponding to the area of ​​the bottom opening of the damping cavity, and the through hole is connected to the space inside the sealed cavity; the damper also includes a bottom sealing plate, which is connected to the bottom plate and seals the bottom opening of the damping cavity.

[0011] The sensor assembly includes a speed sensor mounting housing, a vertical speed sensor, and a horizontal speed sensor. The speed sensor mounting housing is fixed to the top plate, and the vertical and horizontal speed sensors are installed inside the speed sensor mounting housing.

[0012] The sensor assembly includes a displacement sensor mounting bracket, a displacement sensor sensing element, a vertical displacement sensor, and a horizontal displacement sensor. The displacement sensor mounting bracket is fixed to the inner bottom wall of the sealed cavity. The displacement sensor sensing element is fixed to the top plate. The vertical displacement sensor is mounted on the displacement sensor mounting bracket and cooperates with the displacement sensor sensing element to detect the vertical displacement of the top plate relative to the bottom plate. The horizontal displacement sensor is mounted on the displacement sensor mounting bracket and cooperates with the displacement sensor sensing element to detect the horizontal displacement of the top plate relative to the bottom plate.

[0013] The motor assembly includes a motor mounting bracket, a stator, and a mover. The motor mounting bracket is fixed to the inner bottom wall of the sealed cavity, and one of the stator and the mover is fixed to the motor mounting bracket, while the other is fixed to the top plate.

[0014] The vibration damper also includes a signal input / output structure, which is located in a sealed cavity and fixed to the inner wall of the vibration damping cavity. The signal input / output structure is a conditioning plate or a flange.

[0015] This application also provides a vibration reduction system, which includes the vibration damper described above.

[0016] The beneficial effects of this application are as follows: The vibration damper and vibration damping system provided by this application, the vibration damper is applied to the vibration damping system, by integrating the core components (i.e., sensor assembly and motor assembly) of the vibration damper that provide active vibration damping function inside the sealed cavity, the sealed cavity can effectively prevent the external environment from corroding the built-in components, greatly enhancing the reliability and stability of the vibration damper. Therefore, this design is particularly suitable for scenarios with extremely strict environmental requirements, such as high temperature and high humidity, vacuum environment, etc., and even in harsh environments, ordinary devices can be used without special treatment, thereby greatly simplifying the maintenance and use of the equipment, and providing an ideal solution for high-demand working conditions. Attached Figure Description

[0017] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0018] Figure 1 This is a three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application;

[0019] Figure 2 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application;

[0020] Figure 3 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application;

[0021] Figure 4 This is a cross-sectional structural schematic diagram of the vibration damper provided in the embodiments of this application;

[0022] Figure 5 This is a three-dimensional structural diagram of a portion of the vibration damper provided in the embodiments of this application;

[0023] Figure 6 This is a side view of a portion of the structure of the vibration damper provided in the embodiments of this application;

[0024] Figure 7 This is a schematic diagram of another side view of a portion of the structure of the vibration damper provided in the embodiments of this application;

[0025] Figure 8 This is a schematic diagram of another side view of a portion of the structure of the vibration damper provided in the embodiments of this application;

[0026] Figure label:

[0027] 10-Vibration damper; 100-Vibration damping cavity; 101-Side wall; 102-Air inlet / outlet; 103 / 104-Opening; 100A-Sealed cavity; F1-Inner bottom wall; 11-Bottom plate; 111-Through hole; 12-Top plate; 14-Bottom sealing plate; 15-First sealing ring; 16-Second sealing ring; 17-Mounting plate; 15-Support plate; 151-Protrusion; 31-Sealing membrane; 32-Outer pressure component of sealing membrane; 33-Inner pressure component of sealing membrane; 200-Sensor assembly; 200A-Displacement sensor Device assembly; 210-Displacement sensor mounting bracket; 211-Horizontal displacement sensor; 212-Vertical displacement sensor; 213-Displacement sensor sensing element; 200B-Velocity sensor assembly; 220-Velocity sensor mounting housing; 221-Velocity sensor; 300-Motor assembly; 311-Stator; 312-Motor; 313-Motor mounting bracket; 314-Connecting plate; 400-Signal input / output structure; 400A-Conditioning plate; M1-First step surface; M2-Second step surface. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this application and are not intended to limit this application.

[0029] In the following description, the connection of the second component to the first component may include embodiments in which the second component is directly connected to the first component, and may also include embodiments in which the second component is connected to the first component via an additional component, such that the second component is not directly connected to the first component.

[0030] In the following description, the connection between the second component and the first component may include embodiments in which the second component is directly connected to the first component, and may also include embodiments in which the second component is connected to the first component via an additional component, thereby preventing the second component from being directly connected to the first component.

[0031] When describing the structure of a component, when referring to a layer or region as being "above" or "on top of" another layer or region, it can mean that it is directly above the other layer or region, or that it contains other layers or regions between itself and the other layer or region. Furthermore, if the component is flipped, the layer or region will be located "below" or "under" the other layer or region. Additionally, the features, structures, or characteristics described below can be combined in any suitable manner in one or more embodiments.

[0032] Furthermore, the directional terms mentioned in the embodiments of this application, such as [up], [down], [front], [back], [left], [right], [inner], [outer], [side], etc., are only for reference to the accompanying drawings. Therefore, the directional terms used are for illustrating and understanding the embodiments of this application, and not for limiting the embodiments of this application. In the various drawings, structurally similar units are represented by the same reference numerals. For clarity, the various parts in the drawings are not drawn to scale. In addition, some related parts may not be shown in the drawings.

[0033] The following detailed description is based on specific embodiments. It should be noted that the sequence numbers of the following embodiments are not intended to limit the preferred order of the embodiments.

[0034] Please see Figures 1 to 8 , Figure 1 This is a three-dimensional structural diagram of the vibration damper provided in the embodiments of this application. Figure 2 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application. Figure 3 This is another three-dimensional structural schematic diagram of the vibration damper provided in the embodiments of this application. Figure 4 This is a cross-sectional structural schematic diagram of the vibration damper provided in the embodiments of this application. Figure 5 This is a three-dimensional structural diagram of a portion of the vibration damper provided in the embodiments of this application. Figure 6 This is a side view schematic diagram of a portion of the structure of the vibration damper provided in the embodiments of this application. Figure 7 This is a schematic diagram of another side view of a portion of the structure of the vibration damper provided in the embodiments of this application. Figure 8 This is a schematic diagram of another side view of a portion of the structure of the vibration damper provided in an embodiment of this application. For example... Figures 1 to 8As shown, the vibration damper 10 includes a base plate 11 and a top plate 12 arranged at intervals, a vibration damping cavity 100, a sensor assembly 200, and a motor assembly 300 disposed between the base plate 11 and the top plate 12. The top plate 12 is connected to the vibration damping cavity 100 in a manner movable along the depth direction of the vibration damping cavity 100. The vibration damping cavity 100 is sealed to form a sealed cavity 100A. The sensor assembly 200 and the motor assembly 300 are disposed within the sealed cavity 100A. The sensor assembly 200 is configured to detect the movement of the top plate 12, and the motor assembly 300 is configured to drive the top plate 12 to move.

[0035] It should be noted that the vertical direction in this embodiment can refer to any direction perpendicular to the horizontal plane, and the horizontal direction in this embodiment can refer to any direction parallel to the horizontal plane. Specifically, the depth direction of the vibration damping cavity 100 can be parallel to the vertical direction.

[0036] In this embodiment, as Figure 4 As shown, in the above-mentioned vibration damper 10, the vibration damping cavity 100 can provide a sealed cavity 100A. The sealed cavity 100A can be the vibration damping cavity 100 directly, or it can be formed by sealing the vibration damping cavity 100. Specifically, the air pressure in the sealed cavity 100A is adjustable. When the top plate 12 moves along the depth direction of the vibration damping cavity 100, the vertical dimension of the sealed cavity 100A can be reduced to increase the air pressure in the sealed cavity 100A, or the vertical dimension of the sealed cavity 100A can be increased to decrease the air pressure in the sealed cavity 100A. Thus, the sealed cavity 100A can perform vertical vibration damping on the top plate 12.

[0037] For example, such as Figure 2 and Figure 4 As shown, the side wall 101 of the aforementioned damping cavity 10 can be provided with an air inlet / outlet 102. The air inlet / outlet 102 connects the space inside the sealed cavity 100A with the outside and is used to inflate or deflate the sealed cavity 100A, thereby regulating the air pressure inside the sealed cavity 100A. By adjusting the air pressure inside the sealed cavity 100A, the movement state of the top plate 12 can be further adjusted, thereby improving the performance of the damper 10.

[0038] Specifically, the vibration damper 10 can have an operating state and a non-operating state. Furthermore, when the vibration damper 10 is in the operating state, the aforementioned sealed cavity 100A is filled with gas, causing the top plate 12 to float under the pressure of the gas within the sealed cavity 100A. When the top plate 12 is in the floating state, if the top plate 12 is subjected to vertical disturbance, the top plate 12 will move along the depth direction of the vibration damping cavity 100, thereby achieving vertical vibration damping of the top plate 12 through changes in the gas pressure within the sealed cavity 100A.

[0039] When the shock absorber 10 is not in operation, the air pressure in the sealed cavity 100A is too low to cause the top plate 12 to float. At this time, the top plate 12 is in a descending state and is supported by other components and structures inside the shock absorber 10.

[0040] It should be noted that, in this embodiment, by integrating the core components (i.e., the sensor assembly 200 and the motor assembly 300) of the vibration damper 10 for providing active vibration damping function inside the sealed cavity 100A, the sealed cavity 100A can effectively prevent the external environment from corroding the built-in components. This greatly enhances the reliability and stability of the vibration damper 10 and makes the vibration damper 10 suitable for scenarios with extremely strict environmental requirements, such as high temperature and high humidity, vacuum environment, etc., and can meet the high-precision vibration damping requirements of ultra-precision equipment under various complex working conditions.

[0041] In some embodiments, such as Figure 4 As shown, the top end of the aforementioned damping cavity 100 may be provided with an opening 103, that is, the aforementioned damping cavity 100 may be a cavity with an opening at the top, and the top opening 103 of the damping cavity 100 is opposite to the top plate 12. Correspondingly, the aforementioned damper 10 may also include a support plate 15, which is located between the bottom plate 11 and the top plate 12, fixed to the top plate 12, and spaced apart from the inner bottom wall surface F1 of the sealed cavity 100A. Furthermore, the support plate 15 is connected to the side wall 101 of the damping cavity 100 in a manner that allows it to move along the depth direction of the damping cavity 100, and seals the top opening 103 of the damping cavity 100.

[0042] Furthermore, the aforementioned sensor assembly 200 and motor assembly 300 can both be connected to the support plate 15, thereby enabling the aforementioned sensor assembly 200 and motor assembly 300 to be indirectly connected to the top plate 12 through the support plate 15.

[0043] Specifically, such as Figure 4 As shown, the support plate 15 has a first surface (i.e., upper surface) facing away from the inner bottom wall surface F1 of the sealing cavity 100A and a second surface (i.e., lower surface) facing towards the inner bottom wall surface F1 of the sealing cavity 100A. Furthermore, a protrusion 151 is formed in the central region of the first surface of the support plate 15, protruding in a direction away from the inner bottom wall surface F1 of the sealing cavity 100A. The top plate 12 is fixed above the protrusion 151 of the support plate 15, for example, by means of screws.

[0044] In some specific embodiments, such as Figure 4As shown, in order to seal the top opening 103 of the damping cavity 100 by the support plate 15, the damper 10 may further include a sealing membrane 31, an outer pressure member 32 for the sealing membrane, and an inner pressure member 33 for the sealing membrane. The sealing membrane 31 is disposed on the end face (i.e., the upper end face) of the side wall 101 of the damping cavity 100 facing the top plate 12 and on the surface (i.e., the upper surface) of the support plate 15 facing the top plate 12. The sealing membrane 31 covers the gap area between the side wall 101 of the damping cavity 100 and the support plate 15. Specifically, the orthographic projection of the sealing membrane 31 on the bottom plate 11 can completely cover the orthographic projection of the gap area on the bottom plate 11. An external sealing membrane pressure member 32 is disposed on the end face of the side wall 101 of the vibration damping cavity 100 facing the top plate 11, and seals the portion of the sealing membrane 31 covering the side wall 101 of the vibration damping cavity 100 (i.e., the portion directly above the side wall 101 of the vibration damping cavity 100) to the side wall 101 of the vibration damping cavity 100. An internal sealing membrane pressure member 33 is disposed on the surface of the support plate 15 facing the top plate 12, and seals the portion of the sealing membrane 31 covering the support plate 15 (i.e., the portion directly above the support plate 15) to the support plate 15. In this way, the support plate 15 and the sealing membrane 31 together seal the top opening 103 of the vibration damping cavity 100.

[0045] The sealing membrane 31 may be made of a flexible material to ensure that the support plate 15 can move along the depth direction of the vibration damping cavity 100.

[0046] In other embodiments, in the vibration damper 10 described above, the sidewall 101 of the damping cavity 100 can be divided into at least one sidewall segment along the depth direction of the damping cavity 100, and the at least one sidewall segment includes a target sidewall segment, which is a bellows. In some examples, the sidewall 101 of the damping cavity 100 can be divided into one sidewall segment along the depth direction (i.e., vertically) of the damping cavity 100; that is, the sidewall 101 of the damping cavity 100 is the target sidewall segment, in other words, the sidewall 101 of the damping cavity 100 can be a bellows. In other examples, the sidewall 101 of the vibration damping cavity 100 may be divided into multiple sidewall segments along the depth direction (i.e., vertical direction) of the vibration damping cavity 100, and the target sidewall end may specifically be the sidewall segment located at the top of the sidewall 101 of the vibration damping cavity 100 and / or the sidewall segment located at the bottom of the sidewall 101 of the vibration damping cavity 100.

[0047] Thus, by setting all or part of the sidewall 101 of the vibration damping cavity 100 as a bellows, the vertical dimension of the sidewall 101 of the vibration damping cavity 100 can be adjusted, and the air pressure inside the sealed cavity 100A will change with the vertical dimension of the sidewall 101. Specifically, if the vertical dimension of the sidewall 101 of the vibration damping cavity 100 decreases, the corresponding air pressure inside the sealed cavity 100A will increase; if the vertical dimension of the sidewall 101 of the vibration damping cavity 100 increases, the corresponding air pressure inside the sealed cavity 100A will decrease. This allows for the absorption of vibration energy and improves the vibration damping effect. Furthermore, the bellows structure has good axial flexibility, allowing the top plate 12 to move vertically above the vibration damping cavity 100 without compromising the sealing performance of the sealed cavity 100A, further ensuring the sealing reliability of the sealed cavity 100A.

[0048] Furthermore, it should be noted that compared to the design scheme that uses the support plate 15 and the sealing membrane 31 together to seal the top opening 103 of the vibration damping cavity 100, ensuring that the support plate 15 can move along the depth direction of the vibration damping cavity 100 with the top plate 12, there are certain drawbacks. Specifically, the sealing membrane 31 has poor stability in a vacuum environment and is prone to failure. More seriously, the sealing membrane 31 may release a certain amount of gas during the failure process. This gas will not only disrupt the stability of the vacuum environment but may also cause varying degrees of pollution to the vacuum environment, thereby affecting the normal operation and performance of the entire system.

[0049] In this embodiment, the design scheme of setting all or part of the sidewall 101 of the vibration damping cavity 100 as a bellows can avoid the use of the sealing membrane 31, thereby avoiding the problem of the sealing membrane 31 failing in a vacuum environment, and further improving the applicability and reliability of the vibration damper 10 in a vacuum environment.

[0050] For example, the aforementioned bellows can be made of metal, such as stainless steel, which has high corrosion resistance and mechanical strength, enabling it to maintain stable performance under complex environmental conditions. The metal bellows also possesses excellent sealing characteristics, eliminating the need for an additional sealing diaphragm 31, thereby further simplifying the overall design of the vibration damper 10 and reducing maintenance costs. Simultaneously, this structure effectively enhances the axial compensation capability of the vibration damper 10, adapting to a wider range of displacement changes and improving the dynamic response performance of the system. By eliminating the vulnerable component of the sealing diaphragm 31, the reliability of the vibration damper 10 during long-term operation is significantly improved, making it particularly suitable for harsh working environments such as vacuum, high temperature, or high corrosiveness. Furthermore, the metal bellows exhibits excellent high-temperature resistance, maintaining structural integrity under extreme temperature conditions and ensuring stable operation of the vibration damper 10 in high-temperature environments. Simultaneously, the metal bellows also possesses good fatigue resistance, capable of withstanding frequent expansion and contraction deformation over extended periods without damage, further extending the service life of the vibration damper. This structural design not only improves the adaptability of the vibration damper to complex environments but also effectively reduces the system's maintenance frequency and operating costs, enhancing the overall stability and safety of operation. By using a metal bellows as part of the sidewall 101 of the damping cavity 100, the overall sealing performance of the damper 10 is significantly enhanced, while its stability and reliability under extreme conditions are improved.

[0051] In the above embodiments, such as Figure 4 As shown, in the above-mentioned vibration damper 10, the bottom end of the damping cavity 100 may be provided with an opening 104, that is, the above-mentioned damping cavity 100 may be a cavity with an opening at the bottom end. Accordingly, as Figure 3 and Figure 4 As shown, a through hole 111 can be provided on the side of the base plate 11 facing the top plate 12, corresponding to the area of ​​the bottom opening 104 of the vibration damping cavity 100. The through hole 111 is connected to the space inside the sealed cavity 100A to expose the devices (such as the sensor assembly 200 and the motor assembly 300) inside the sealed cavity 100A, so as to disassemble and assemble the devices inside the sealed cavity 100A.

[0052] Accordingly, such as Figure 3 and Figure 4 As shown, the vibration damper 10 may further include a bottom sealing plate 14, which is used to cover the through hole 111 opened on the bottom plate 11 to ensure the sealing performance of the sealing cavity 100A. Specifically, the bottom sealing plate 14 is connected to the bottom plate 11 and seals the bottom opening 104 of the vibration damping cavity 100.

[0053] In some examples, such as Figure 3 and Figure 4As shown, at least a portion of the bottom sealing plate 14 is accommodated within the through hole 111 and connected to the bottom plate 11, and the bottom sealing plate 14 is spaced apart from the vibration damping cavity 100. Specifically, as... Figure 4 As shown, the inner wall of the through hole 111 may be provided with a first stepped surface M1. The first stepped surface M1 is opposite to the surface (i.e., the upper surface) of the bottom sealing plate 14 facing the vibration damping cavity 100, and the edge area of ​​the bottom sealing plate 14 may be fixed on the first stepped surface M1 to achieve the connection between the bottom sealing plate 14 and the bottom plate 11. Furthermore, a first sealing ring 15 may be provided between the edge area of ​​the bottom sealing plate 14 and the first stepped surface M1 to enhance the sealing performance between the bottom sealing plate 14 and the bottom plate 11 and ensure the sealing performance of the sealing cavity 100A.

[0054] In some examples, such as Figure 4 As shown, the inner wall of the through hole 111 may be provided with a second stepped surface M2. The second stepped surface M2 is opposite to the end face (i.e., bottom face) of the vibration damping cavity 100 facing the base plate 11, and the bottom face of the vibration damping cavity 100 may be fixed on the second stepped surface M2 to achieve the connection between the vibration damping cavity 100 and the base plate 11. Furthermore, a second sealing ring 16 may be provided between the bottom face of the vibration damping cavity 100 and the second stepped surface M2 to enhance the sealing performance between the vibration damping cavity 100 and the base plate 11, ensuring the sealing performance of the sealing cavity 100A.

[0055] In this way, not only can the sealing performance of the sealing cavity 100A be effectively ensured to meet the expected standards, but it also makes it easier for staff to maintain and replace the components inside the sealing cavity 100A, providing a strong guarantee for the long-term stable operation of the vibration damper 10.

[0056] In practical implementation, considering the poor stability of the first sealing ring 15 and the second sealing ring 16 in a vacuum environment, which are prone to failure, and the potential release of gas during failure, these gases can not only disrupt the stability of the vacuum environment but also cause varying degrees of pollution, thus affecting the normal operation and performance of the entire system. Therefore, to improve the applicability and reliability of the vibration damper 10 in a vacuum environment, the first sealing ring 15 and the second sealing ring 16 can be replaced with metal sealing sheets (e.g., copper-based sealing sheets). Metal sealing sheets have good high-temperature resistance and airtightness, maintaining a long-term stable sealing effect in a vacuum environment while avoiding the potential gas release problem of traditional sealing rings in a vacuum environment. Furthermore, metal sealing sheets have high mechanical strength, capable of withstanding large pressure differences and temperature changes, thereby further improving the sealing reliability and overall performance of the vibration damper 10 under complex working conditions.

[0057] It should be noted that when the bottom end of the aforementioned damping cavity 100 is closed, the inner bottom wall surface F1 of the aforementioned sealing cavity 100A is the inner bottom wall surface of the damping cavity 100. When the bottom end of the aforementioned damping cavity 100 is open, the inner bottom wall surface F1 of the aforementioned sealing cavity 100A is provided by a structure that seals the bottom opening of the aforementioned damping cavity 100 (e.g., the bottom plate 11 and / or the bottom sealing plate 14).

[0058] In some specific embodiments, such as Figure 4 and Figure 5 As shown, the vibration damper 10 may further include a mounting plate 17, which is fixed to the inner bottom wall surface F1 of the sealing cavity 100A and is used to support or fix the components inside the sealing cavity 100A. The mounting plate 17 can be connected to the inner bottom wall surface F1 of the sealing cavity 100A by bolts, welding or other suitable fixing methods to ensure its stability during the operation of the vibration damper 10. In addition, the mounting plate 17 helps to improve the compactness and overall rigidity of the internal structure of the vibration damper 10, further optimizing its vibration damping performance. In some embodiments, the mounting plate 17 can also be integrated with the bottom sealing plate 14 to reduce the number of parts, improve assembly efficiency and enhance sealing reliability. The integrated design of the mounting plate 17 and the bottom sealing plate 14 not only simplifies the assembly process of the vibration damper 10, but also effectively reduces the sealing risks that may be caused by the connection gaps between multiple independent components. In addition, this integrated structure also exhibits better structural stability and fatigue durability when subjected to vibration loads, thereby further improving the overall performance and service life of the vibration damper 10.

[0059] In the above embodiments, such as Figures 4 to 8 As shown, the sensor assembly 200 may include a displacement sensor assembly 200A and / or a velocity sensor assembly 200B, wherein the displacement sensor assembly 200A is configured to detect the displacement of the top plate 12, and the velocity sensor assembly 200B is configured to detect the velocity of the top plate 12.

[0060] In some examples, such as Figure 5 As shown, the displacement sensor assembly 200A may include a horizontal displacement sensor 211 and a vertical displacement sensor 212. The horizontal displacement sensor 211 is used to detect the horizontal displacement of the top plate 12, and the vertical displacement sensor 212 is used to detect the vertical displacement of the top plate 12.

[0061] Specifically, such as Figure 5As shown, the displacement sensor assembly 200A may further include a displacement sensor mounting bracket 210 and a displacement sensor sensing element 213. The displacement sensor mounting bracket 210 is fixed to the inner bottom wall surface F1 of the sealed cavity 100A, for example, it can be fixed to the mounting plate 17. The displacement sensor sensing element 213 is fixed to the top plate 12, for example, it can be fixed to the support plate 15, so that the displacement sensor sensing element 213 is connected to the top plate 12 through the support plate 15, thereby enabling the displacement sensor sensing element 213 to move together with the top plate 12.

[0062] Furthermore, the aforementioned vertical displacement sensor 212 is mounted on the displacement sensor mounting bracket 210 and cooperates with the displacement sensor sensing element 213 to detect the vertical displacement of the top plate 12 relative to the bottom plate 11. The aforementioned horizontal displacement sensor 211 is mounted on the displacement sensor mounting bracket 210 and cooperates with the displacement sensor sensing element 213 to detect the horizontal displacement of the top plate 12 relative to the bottom plate 11. Exemplarily, the sensing ends of both the horizontal displacement sensor 211 and the vertical displacement sensor 212 are positioned towards the displacement sensor sensing element 213 to detect the horizontal and vertical displacements of the displacement sensor sensing element 213, respectively, thereby obtaining the horizontal and vertical movement displacements of the top plate 12.

[0063] In some examples, such as Figure 6 As shown, the speed sensor assembly 200B may include a speed sensor 221, which is fixed to the top plate 12 and configured to detect the movement speed of the top plate 12. Specifically, the speed sensor 221 may include a horizontal speed sensor and a vertical speed sensor, wherein the horizontal speed sensor is used to detect the horizontal movement speed of the top plate 12, and the vertical speed sensor is used to detect the vertical movement speed of the top plate 12.

[0064] Specifically, such as Figure 6 As shown, the speed sensor assembly 200B may also include a speed sensor mounting housing 220, which is fixed to the top plate 12, for example, it may be fixed to the support plate 15, so that the speed sensor mounting housing 220 is connected to the top plate 12 through the support plate 15, thereby enabling the speed sensor mounting housing 220 to move together with the top plate 12.

[0065] Furthermore, the speed sensor 221 is mounted in the speed sensor mounting housing 220, for example, it can be embedded inside the speed sensor mounting housing 220 so that the speed sensor 221 can move together with the speed sensor mounting housing 220.

[0066] Thus, through the installation of the aforementioned sensor assembly 200, the motion state of the top plate 12, including displacement and velocity, can be monitored in real time, providing accurate feedback signals for the control of the vibration damper 10 and helping to further improve the vibration damping effect and adaptability of the vibration damper 10. At the same time, the installation of these sensors also facilitates the monitoring and maintenance of the vibration damper 10's operating status by personnel, ensuring its long-term stable operation.

[0067] In the above embodiments, such as Figure 5 As shown, the motor assembly 300 may include a stator 311 and a mover 312. One of the stator 311 and the mover 312 is fixed to the inner bottom wall surface F1 of the sealed cavity 100A, for example, it may be fixed to the mounting plate 17. The other of the stator 311 and the mover 312 is fixed to the top plate 12, for example, it may be fixed to the support plate 15. Furthermore, the mover 312 may be configured to move relative to the stator 311 in a predetermined direction to achieve the active vibration damping function of the vibration damper 10. The predetermined direction may include both horizontal and vertical directions, that is, the mover 312 may move both horizontally and vertically relative to the stator 311. In some embodiments, the motor assembly 300 may be specifically a bidirectional motor.

[0068] Specifically, such as Figure 5 As shown, the motor assembly 300 may also include a motor mounting bracket 313, which is fixed to the inner bottom wall surface F1 of the sealed cavity 100A. For example, it may be fixed to the mounting plate 17. The stator 311 included in the motor assembly 300 may be mounted on the motor mounting bracket 313 so that the stator 311 is fixed to the inner bottom wall surface F1 of the sealed cavity 100A through the motor mounting bracket 313.

[0069] Specifically, such as Figure 5 As shown, the motor assembly 300 may also include a connecting plate 314, which is fixed to the top plate 12, for example, it may be fixed to the support plate 15. The mover 312 included in the motor assembly 300 may be fixed to the connecting plate 314, so that the mover 312 is fixed to the top plate 12 through the connecting plate 314.

[0070] Thus, through the arrangement of the motor assembly 300, the mover 312 can drive the connecting plate 314 and the top plate 12 to move relative to the stator 311 in a predetermined direction, thereby realizing the active control function of the vibration damper 10. Furthermore, the connecting plate 314 and the top plate 12 can be connected by threaded fasteners to ensure a stable connection and facilitate assembly. In addition, the motor assembly 300 can also work in conjunction with the sensor assembly 200, controlling the movement of the mover 312 based on the motion state information collected by the sensor assembly 200, thereby achieving intelligent vibration damping adjustment and improving the response speed and control accuracy of the vibration damper 10. In practical applications, the synergistic effect of the motor assembly 300 and the sensor assembly 200 is particularly important. The sensor assembly 200 collects the vibration signals received by the vibration damper 10 in real time and transmits these signals to the control system. After analyzing and processing the signals according to a preset algorithm, the control system sends corresponding control commands to the motor assembly 300, thereby driving the mover 312 to move precisely horizontally or vertically relative to the stator 311 to counteract the effects of external vibrations. This closed-loop control mechanism can not only effectively improve the response sensitivity of the vibration damper 10, but also enhance its adaptability under complex working conditions, ensuring the stability and reliability of equipment operation.

[0071] In practical implementation, the installation method and location layout of the motor assembly 300 must fully consider the mechanical distribution characteristics of the overall structure of the vibration damper 10 to ensure balanced force distribution and avoid local stress concentration. For example, such as Figures 5 to 8 As shown, within the sealed cavity 100A, the motor assembly 300 can be positioned at the center of the horizontal direction within the sealed cavity 100A. Furthermore, the displacement sensor assembly 200A and the velocity sensor assembly 200B can be positioned on opposite sides of the motor assembly 300 along the horizontal direction, respectively. This achieves a balanced distribution of the sensor assembly 200 and the motor assembly 300 within the sealed cavity 100A, thereby further optimizing the overall mechanical performance and vibration reduction effect of the vibration damper 10. In addition, this layout also helps reduce mutual interference caused by vibration, improving the measurement accuracy and response speed of the sensor assembly 200 and the motor assembly 300.

[0072] In the above embodiments, such as Figure 2 as well as Figures 4 to 8 As shown, the above-mentioned vibration damper 10 may also include a signal input / output structure 400. The signal input / output structure 400 is disposed in the sealed cavity 100A and is used to transmit signals inside the sealed cavity 100A to the outside, and to transmit signals from the outside to the sealed cavity 100A, so as to realize signal interaction between the device inside the sealed cavity 100A and the external device.

[0073] Specifically, the signal input / output structure 400 can be fixed to the inner wall of the vibration damping cavity 100 and can communicate with the motor assembly 300 and the sensor assembly 200 to ensure the normal operation of the devices inside the sealed cavity 100A in a sealed environment. Simultaneously, the signal input / output structure 400 also integrates waterproof, dustproof, and anti-interference designs to ensure that the vibration damper 10 can stably complete bidirectional signal transmission even under harsh operating conditions. By adopting the above structural design, the signal input / output structure 400 can achieve efficient and reliable internal and external signal interaction while ensuring the stability of the internal environment of the sealed cavity 100A, thus providing solid technical support for the intelligent control of the vibration damper 10. Furthermore, the signal input / output structure 400 can also support the adaptation and conversion of various communication protocols, further improving the compatibility and coordination capabilities between the vibration damper 10 and external devices.

[0074] In some examples, such as Figure 2 as well as Figures 4 to 8 As shown, the signal input / output structure 400 described above can specifically be a conditioning board 400A.

[0075] The conditioning board 400A integrates signal conditioning circuitry and a communication interface. The signal conditioning circuitry amplifies and filters the analog signals acquired by the sensor assembly 200 to improve signal accuracy and anti-interference capabilities. The communication interface supports multiple communication protocols, such as RS485 and CAN bus, for data exchange with various external devices. The design of the conditioning board 400A fully considers the space constraints and electromagnetic compatibility requirements within the sealed cavity 100A, ensuring stable and reliable operation even in confined spaces. Furthermore, the conditioning board 400A is easy to maintain and upgrade. When the communication protocol needs to be changed or upgraded, only the communication interface module on the conditioning board 400A needs to be replaced, without disassembling or making large-scale modifications to the entire shock absorber 10. This modular design not only improves the flexibility and scalability of the shock absorber 10 but also effectively reduces subsequent maintenance costs. It is fixedly installed on the inner wall of the sealed cavity 100A.

[0076] Furthermore, the side wall 101 of the vibration damping cavity 100 can be provided with a through hole corresponding to the position of the conditioning plate 400A to expose the signal output interface and signal input receiver of the conditioning plate 400A, which facilitates the access and fixation of external cables. At the same time, a sealing ring or waterproof connector is provided at the through hole to maintain the protection level inside the sealed cavity 100A.

[0077] In practical implementation, to improve the applicability and reliability of the vibration damper 10 in a vacuum environment, the conditioning plate 400A can be replaced with a flange (e.g., a welded flange). Compared to the conditioning plate 400A, the flange connection structure has superior environmental adaptability and can more effectively cope with various adverse effects caused by temperature and humidity changes and external mechanical stress. This replacement method can not only significantly enhance the operational stability of the vibration damper 10 in complex environments, but also further improve its reliability during long-term use, ensuring that the vibration damper 10 maintains a high-efficiency and stable operating state under various working conditions.

[0078] In this way, all components of the vibration damper 10 are cleverly integrated inside the sealed cavity 100A, with only the necessary air inlet / outlet 102 and the signal input and output interfaces of the conditioning plate 400A remaining externally. This achieves full internal component integration, resulting in an exceptionally clean and compact appearance and significantly improving space utilization. Furthermore, under the same external dimensions, this fully internal design not only achieves higher load-bearing capacity but also effectively reduces overall stiffness, ensuring the stability and reliability of the equipment during operation. It is particularly noteworthy that this fully internal design is especially suitable for applications with extremely stringent environmental requirements, such as high-temperature and high-humidity environments, and vacuum environments. Because all components are housed within the entire unit, even in harsh environments such as high-temperature and high-humidity conditions and vacuum, ordinary components can be used without special treatment, greatly simplifying equipment maintenance and operation, and providing an ideal solution for demanding working conditions.

[0079] In the above embodiments, the vibration damper 10 can be used as a vibration damping platform for vibration damping of precision equipment such as semiconductor equipment and / or precision machine tools.

[0080] As can be seen from the above, the vibration damper provided in this embodiment includes a bottom plate and a top plate arranged at relatively intervals, as well as a vibration damping cavity, a sensor assembly, and a motor assembly disposed between the bottom plate and the top plate. The top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity. The vibration damping cavity is sealed to form a sealed cavity. The sensor assembly and the motor assembly are disposed within the sealed cavity. The sensor assembly is configured to detect the movement of the top plate, and the motor assembly is configured to drive the top plate to move. This achieves the integration of the core components of the vibration damper that provide active vibration damping function inside the sealed cavity. The sealed cavity can effectively prevent the external environment from corroding the internal components, greatly enhancing the reliability and stability of the vibration damper. Therefore, this design is particularly suitable for scenarios with extremely strict environmental requirements, such as high temperature and high humidity, vacuum environments, etc. Moreover, even in harsh environments, ordinary devices can be used without special treatment, thereby greatly simplifying the maintenance and use of the equipment and providing an ideal solution for demanding working conditions.

[0081] This application also provides a vibration reduction system, which includes the vibration damper of any of the above embodiments.

[0082] Specifically, in this vibration reduction system, the vibration damper includes a bottom plate and a top plate arranged at relative intervals, as well as a vibration damping cavity, a sensor assembly, and a motor assembly disposed between the bottom plate and the top plate. The top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity. The vibration damping cavity is sealed to form a sealed cavity. The sensor assembly and the motor assembly are disposed within the sealed cavity, and the sensor assembly is configured to detect the movement of the top plate, while the motor assembly is configured to drive the top plate to move.

[0083] Specifically, the vibration damping system may also include a load, which can be fixed above the top plate of the vibration damper, thereby achieving vibration damping of the load.

[0084] For example, the load can be a semiconductor device, a precision machine tool, or other precision equipment.

[0085] In some embodiments, the vibration damping system may include multiple vibration dampers (e.g., at least three), and the vibration damping system may also include a workbench mounted above the multiple vibration dampers, so that the height of the workbench at the location of each vibration damper can be detected by a sensor, and based on the detection results of the sensor, the output of the motor in the vibration damper and / or the air intake and exhaust of the sealed cavity can be controlled so that the workbench is always in a horizontal state.

[0086] It should be noted that the vibration reduction system provided in this application embodiment, because it is equipped with the vibration damper provided in this application embodiment, can achieve the beneficial effects that any vibration damper provided in this application embodiment can achieve, as detailed in the previous embodiments, and will not be repeated here.

[0087] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A damper characterized by, It includes a base plate and a top plate that are spaced apart from each other, as well as a vibration damping cavity, a sensor assembly, and a motor assembly disposed between the base plate and the top plate; The top plate is connected to the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity. The vibration damping cavity is sealed to form a sealed cavity. The sensor assembly and the motor assembly are disposed in the sealed cavity. The sensor assembly is configured to detect the movement of the top plate, and the motor assembly is configured to drive the top plate to move.

2. The damper of claim 1, wherein The top end of the vibration damping cavity is provided with an opening; the vibration damper also includes a support plate located between the bottom plate and the top plate, the support plate being fixed to the top plate and spaced apart from the inner bottom wall of the sealed cavity; Furthermore, the support plate is connected to the side wall of the vibration damping cavity in a manner that allows it to move along the depth direction of the vibration damping cavity, and seals the top opening of the vibration damping cavity. Both the sensor assembly and the motor assembly are connected to the support plate.

3. The damper of claim 2, wherein The vibration damper further includes a sealing diaphragm, an outer sealing diaphragm pressure member, and an inner sealing diaphragm pressure member. The sealing diaphragm is disposed on the end face of the side wall of the vibration damping cavity facing the top plate and on the surface of the support plate facing the top plate. The sealing diaphragm covers the gap area between the side wall of the vibration damping cavity and the support plate. The outer sealing diaphragm pressure member is disposed on the end face of the side wall of the vibration damping cavity facing the top plate and seals the portion of the sealing diaphragm covering the side wall of the vibration damping cavity with the side wall of the vibration damping cavity. The inner sealing diaphragm pressure member is disposed on the surface of the support plate facing the top plate and seals the portion of the sealing diaphragm covering the support plate with the support plate.

4. The damper of claim 1, wherein The sidewall of the vibration damping cavity is divided into at least one sidewall segment along the depth direction of the vibration damping cavity, and the at least one sidewall segment includes a target sidewall segment, which is a bellows.

5. The damper of claim 1, wherein The bottom end of the vibration damping cavity is provided with an opening; a through hole is provided on the side of the bottom plate facing the top plate in the area corresponding to the bottom opening of the vibration damping cavity, and the through hole is connected to the space inside the sealed cavity; The vibration damper also includes a bottom sealing plate, which is connected to the base plate and seals the bottom opening of the vibration damping cavity.

6. The damper of claim 1, wherein The sensor assembly includes a speed sensor mounting housing, a vertical speed sensor, and a horizontal speed sensor, wherein the speed sensor mounting housing is fixed to the top plate, and the vertical speed sensor and the horizontal speed sensor are mounted inside the speed sensor mounting housing.

7. The damper of claim 1, wherein The sensor assembly includes a displacement sensor mounting bracket, a displacement sensor sensing element, a vertical displacement sensor, and a horizontal displacement sensor. The displacement sensor mounting bracket is fixed to the inner bottom wall of the sealed cavity. The displacement sensor sensing element is fixed to the top plate. The vertical displacement sensor is mounted on the displacement sensor mounting bracket and cooperates with the displacement sensor sensing element to detect the vertical displacement of the top plate relative to the bottom plate. The horizontal displacement sensor is mounted on the displacement sensor mounting bracket and cooperates with the displacement sensor sensing element to detect the horizontal displacement of the top plate relative to the bottom plate.

8. The damper of claim 1, wherein The motor assembly includes a motor mounting bracket, a stator, and a mover. The motor mounting bracket is fixed to the inner bottom wall of the sealed cavity. One of the stator and the mover is fixed to the motor mounting bracket, and the other is fixed to the top plate.

9. The damper of claim 1, wherein The vibration damper also includes a signal input / output structure, which is located in the sealed cavity and fixed to the inner wall of the vibration damping cavity. The signal input / output structure is a conditioning plate or a flange.

10. A vibration damping system, characterized by Includes the vibration damper as described in any one of claims 1 to 9.

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