Crystal ring control device

Abstract

The application discloses a crystal ring control device, and relates to the technical field of semiconductors. The crystal ring control device comprises a furnace body, the furnace body is provided with a linear light channel and an air extraction flow channel communicated with the linear light channel, a nonlinear crystal is arranged in the linear light channel, a light beam incident to the linear light channel is emitted after passing through the nonlinear crystal, and sealing structures are arranged in the linear light channel and located at opposite sides of the nonlinear crystal respectively. The sealing structures are provided with light transmission regions, the linear light channel and the sealing structures form a sealed chamber, an air extraction device is connected to an opening of the air extraction flow channel, and the sealed chamber is vacuumized through the air extraction device. The crystal ring control device can maintain a dry and clean environment in the crystal furnace through overall sealing and internal low pressure, simplifies the structure of the crystal ring control device and improves the stability of the crystal ring control.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically, to a crystal ring control device. Background Technology

[0002] In the semiconductor industry, nonlinear crystals are commonly used in devices such as lasers for wavelength modulation or frequency conversion. The hygroscopic nature of nonlinear crystals such as lithium borate (LBO), lithium iodate, and lithium cesium borate (CLBO) makes the design of environmental control devices quite stringent.

[0003] In existing technologies, dry, purified gas is typically used for continuous purging to ensure the stable operation of nonlinear crystals. This method requires a long-term, stable gas supply, and fluctuations in the external gas source temperature can affect the heat transfer efficiency of the crystal. When high conversion efficiency and economical lifespan of the crystal are required, the stability requirements for the temperature control system are extremely stringent, making the structure for ensuring the stability of the temperature control system extremely complex. Utility Model Content

[0004] The purpose of this application is to provide a crystal ring control device that can maintain a dry and clean environment inside the crystal furnace through overall sealing and internal low pressure, simplify the crystal ring control structure, and improve the stability of the crystal ring control.

[0005] The embodiments of this application are implemented as follows:

[0006] This application provides a crystal environmental control device, including a furnace body. The furnace body has a linear optical channel and an exhaust channel communicating with the linear optical channel. A nonlinear crystal is placed in the linear optical channel. A light beam incident on the linear optical channel exits after passing through the nonlinear crystal. Sealing structures are respectively located on opposite sides of the nonlinear crystal in the linear optical channel. The sealing structures have light-transmitting areas. The linear optical channel and the sealing structures form a sealed chamber. An exhaust device is connected to the opening of the exhaust channel to evacuate the sealed chamber.

[0007] Optionally, as an implementable method, the linear optical channel includes an input channel, a beam conversion region, and an output channel connected in sequence, the nonlinear crystal is disposed in the beam conversion region, and the exhaust channel is connected to the beam conversion region.

[0008] Optionally, as an implementable method, the sealing structure is provided at both ends of the light input channel and at both ends of the light output channel.

[0009] Optionally, as an implementable method, the sealing structure includes a lens and a sealing gasket, the lens being mounted in the linear optical channel, the linear optical channel having a mounting groove for mounting the sealing gasket, the sealing gasket being embedded in the mounting groove and abutting against the lens.

[0010] Alternatively, as an implementable method, a drying ring is mounted on the side of the lens facing the beam conversion area, and the drying ring is disposed at the joint between the lens and the linear optical path.

[0011] Alternatively, as an implementable approach, the beam conversion region may be detachably mounted with a mounting base through which a nonlinear crystal is mounted.

[0012] Alternatively, as an implementable method, the mounting base is provided with a heater for heating the nonlinear crystal.

[0013] Alternatively, as an implementable approach, the beam conversion area is provided with a humidity detection device.

[0014] Alternatively, as an implementable method, the air extraction channel is connected to the center of the beam conversion region.

[0015] Alternatively, as an implementable method, the air extraction device is equipped with an air pressure detection device.

[0016] The beneficial effects of the embodiments of this application include:

[0017] The crystal environmental control device provided in this application includes a furnace body with a linear optical channel and an exhaust channel connected to the linear optical channel. A nonlinear crystal is placed inside the linear optical channel. The incident light beam from the linear optical channel exits after passing through the nonlinear crystal. Sealing structures are located on opposite sides of the nonlinear crystal within the linear optical channel. Each sealing structure has a light-transmitting area. The linear optical channel and the sealing structures form a sealed chamber. An exhaust device is connected to the opening of the exhaust channel to evacuate the sealed chamber. By forming a sealed chamber with the linear optical channel and the sealing structures, and creating a low-pressure environment through vacuuming, the device effectively isolates the nonlinear crystal from external humid air, providing a stable, dry, and clean working environment for the highly deliquescent nonlinear crystal. This fundamentally solves the performance instability problem caused by crystal deliquescence in existing technologies, ensuring stable long-term operation of the crystal and improving its conversion efficiency and economic lifespan. It eliminates the complex method of continuous purging with drying and purifying gas found in existing technologies, eliminating the need for a long-term stable gas supply and complex temperature control systems to cope with gas source temperature fluctuations. This invention achieves effective control of the crystal's working environment using only a simple sealing structure and a vacuum device, greatly simplifying the overall structure of the crystal environmental control device and reducing manufacturing costs and maintenance difficulty. By reducing interference from external factors (such as gas supply and temperature fluctuations) and ensuring the stable low-pressure environment of the sealed chamber, the stability of the crystal environmental control device is significantly improved. Whether under long-term operation or in the face of environmental changes, it can reliably maintain the crystal's working environment, providing strong support for the stable operation of semiconductor devices. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is one of the structural schematic diagrams of the crystal ring control device provided in the embodiments of this application;

[0020] Figure 2 This is a second schematic diagram of the crystal ring control device provided in the embodiments of this application.

[0021] Icons: 100 - A crystal ring control device; 110 - Furnace body; 111 - Linear optical channel; 1111 - Inlet light channel; 1112 - Beam conversion area; 1113 - Outlet light channel; 112 - Air extraction channel; 120 - Sealing structure; 121 - Lens; 122 - Sealing gasket; 130 - Air extraction device; 140 - Mounting base; 150 - Drying ring; 160 - Air pressure detection device; 200 - Nonlinear crystal. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0024] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0025] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0026] Please refer to Figure 1 and Figure 2This embodiment provides a crystal ring control device 100, including a furnace body 110. The furnace body 110 has a linear optical channel 111 and an exhaust channel 112 connected to the linear optical channel 111. A nonlinear crystal 200 is placed in the linear optical channel 111. The light beam incident on the linear optical channel 111 is emitted after passing through the nonlinear crystal 200. Sealing structures 120 are respectively located on opposite sides of the nonlinear crystal 200 in the linear optical channel 111. The sealing structures 120 have light-transmitting areas. The linear optical channel 111 and the sealing structures 120 form a sealed chamber. An exhaust device 130 is connected to the opening of the exhaust channel 112 to evacuate the sealed chamber.

[0027] Specifically, the furnace body 110 of the crystal environmental control device is equipped with a linear optical channel 111 and an exhaust channel 112 connected to the linear optical channel 111. The linear optical channel 111 is the area where the nonlinear crystal 200 is placed. The light beam incident on the linear optical channel 111 passes through the nonlinear crystal 200 and exits, performing functions such as wavelength modulation or frequency conversion. To effectively control the working environment of the nonlinear crystal 200, a sealing structure 120 is specially provided within the linear optical channel 111. This sealing structure 120 is located on opposite sides of the nonlinear crystal 200 and has a light-transmitting area. This design ensures that the light beam can pass smoothly through the sealing structure 120 while maintaining a sealing effect. The linear optical channel 111 and the sealing structure 120 together form a sealed chamber, enclosing the nonlinear crystal 200 within it. Furthermore, an exhaust device 130 is connected to the opening of the exhaust channel 112. The exhaust device 130 performs a vacuum operation on the sealed chamber, thereby creating a low-pressure environment within the sealed chamber. This low-pressure environment effectively prevents external humid air from entering, maintaining the interior dryness and cleanliness, and providing a stable working environment for the nonlinear crystal 200.

[0028] When the crystal environmental control device is put into use, the nonlinear crystal 200 is first placed in the linear optical channel 111, and then the vacuuming process is started by the vacuum pumping device 130. As the vacuuming process proceeds, the air in the sealed chamber is gradually extracted, and the internal air pressure continuously decreases, forming a low-pressure state. Under this low-pressure environment, the moisture inside the sealed chamber is rapidly removed, reducing humidity, thereby ensuring that the nonlinear crystal 200 is always in a dry and clean environment. At the same time, the light beam incident on the linear optical channel 111 can pass through the light-transmitting area of ​​the sealed structure 120 and irradiate the nonlinear crystal 200, completing the predetermined wavelength modulation or frequency conversion, and finally exiting through the light-transmitting area of ​​the sealed structure 120.

[0029] It should be noted that the air extraction device 130 is detachably installed at the opening of the air extraction channel 112. When the nonlinear crystal 200 in the linear optical channel 111 is in a dry and clean environment, the air extraction device 130 can be removed.

[0030] The crystal environmental control device provided in this application includes a furnace body 110, which has a linear optical channel 111 and an exhaust channel 112 connected to the linear optical channel 111. A nonlinear crystal 200 is placed in the linear optical channel 111. The light beam incident on the linear optical channel 111 is emitted after passing through the nonlinear crystal 200. Sealing structures 120 are respectively located on opposite sides of the nonlinear crystal 200 in the linear optical channel 111. The sealing structures 120 have light-transmitting areas. The linear optical channel 111 and the sealing structures 120 form a sealed chamber. An exhaust device 130 is connected to the opening of the exhaust channel 112 to evacuate the sealed chamber. By forming a sealed chamber with the linear optical channel 111 and the sealing structure 120, and using the vacuum device 130 to create a low-pressure environment, the external humid air can be effectively isolated, providing a stable, dry, and clean working environment for the highly deliquescent nonlinear crystal 200. This fundamentally solves the performance instability problem caused by crystal deliquescence in existing technologies, ensuring that the crystal can work stably for a long time and improving its conversion efficiency and economic lifespan. It abandons the complex method of relying on continuous purging with drying and purifying gas as in existing technologies, eliminating the need for a long-term stable gas supply and the need for a complex temperature control system to cope with the effects of gas source temperature fluctuations. This invention achieves effective control of the crystal's working environment using only a simple sealing structure 120 and vacuum device 130, greatly simplifying the overall structure of the crystal environmental control device and reducing manufacturing costs and maintenance difficulty. Because the interference of external factors (such as gas supply and temperature fluctuations) is reduced, and the low-pressure environment of the sealed chamber remains stable, the stability of the crystal environmental control device is significantly improved. Whether operating for a long time or facing environmental changes, it can reliably maintain the working environment of the crystal, providing a strong guarantee for the stable operation of semiconductor devices.

[0031] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the linear optical channel 111 includes an input optical channel 1111, a beam conversion region 1112, and an output optical channel 1113 connected in sequence. The nonlinear crystal 200 is disposed in the beam conversion region 1112, and the air extraction channel 112 is connected to the beam conversion region 1112.

[0032] During the operation of this crystal-controlled device, the light beam enters through the input channel 1111, undergoes wavelength modulation or frequency conversion in the beam conversion region 1112 via the nonlinear crystal 200, and then exits through the output channel 1113. The exhaust channel 112 is connected to the beam conversion region 1112. When the exhaust device 130 is working, it can directly evacuate the sealed chamber portion where the beam conversion region 1112 is located, rapidly creating a low-pressure environment in the area where the nonlinear crystal 200 is located, effectively isolating it from external humid air.

[0033] By connecting the air extraction channel 112 to the beam conversion area 1112, the core working area of ​​the nonlinear crystal 200 can be precisely vacuumed. Compared with vacuuming the entire linear optical channel 111, the air pressure in the beam conversion area 1112 can be reduced more quickly and effectively, improving the efficiency of low-pressure environment formation. This allows for more efficient isolation of external humid air, providing a more stable, dry, and clean environment for the nonlinear crystal 200 and ensuring its conversion efficiency.

[0034] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, both ends of the light input channel 1111 and the light output channel 1113 are equipped with sealing structures 120. This arrangement allows the light input channel 1111 and the light output channel 1113 to each form a relatively independent sealed space, which, together with the beam conversion area 1112, constitutes a complete and well-sealed chamber. During device operation, it is difficult for outside air to enter through the ports of the light input channel 1111 and the light output channel 1113, further strengthening the sealing protection of the nonlinear crystal 200's operating environment. The sealing structures 120 at both ends of the light input channel 1111 and the light output channel 1113 comprehensively block the path for outside air to enter the sealed chamber, greatly enhancing the overall sealing performance of the device. Compared to setting sealing structures 120 only on both sides of the nonlinear crystal 200, this more effectively prevents the intrusion of humid air, ensures the stability of the internal low-pressure environment, and provides more reliable operating conditions for the nonlinear crystal 200.

[0035] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the sealing structure 120 includes a lens 121 and a sealing gasket 122. The lens 121 is installed within the linear optical channel 111, and a mounting groove for the sealing gasket 122 is provided within the linear optical channel 111. The sealing gasket 122 is embedded in the mounting groove and abuts against the lens 121. During actual installation, the lens 121 transmits light, ensuring that the light beam can pass smoothly through the sealing structure 120; the sealing gasket 122, after being embedded in the mounting groove, tightly abuts against the lens 121, filling the gap between the lens 121 and the linear optical channel 111, forming a good sealing effect and preventing outside air from entering the sealed chamber.

[0036] The combined design of lens 121 and sealing gasket 122 cleverly integrates the two key functions of light transmission and sealing into the sealing structure 120. Lens 121 ensures normal beam transmission without affecting the crystal's modulation or conversion function; sealing gasket 122 ensures the airtightness of the sealed chamber and prevents humid air from entering. The two complement each other to ensure the normal operation of the crystal environmental control device.

[0037] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, a drying ring 150 is installed on the side of lens 121 facing the beam conversion area 1112. The drying ring 150 is located at the joint between lens 121 and linear optical channel 111. The drying ring 150 can absorb any trace amounts of moisture that may remain at the joint between lens 121 and linear optical channel 111, further reducing the humidity in the sealed chamber. It also fills the tiny gaps at the joint to a certain extent, enhancing the sealing effect and ensuring a dry environment inside the sealed chamber. The drying ring 150 is specifically designed to address the potential moisture penetration at the joint between lens 121 and linear optical channel 111, effectively absorbing residual moisture and further reducing the humidity in the sealed chamber. This provides a drier working environment for the nonlinear crystal 200, reducing crystal performance degradation caused by moisture and improving the crystal's working stability and conversion efficiency.

[0038] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the beam conversion area 1112 is detachably equipped with a mounting base 140, through which the nonlinear crystal 200 is mounted. In practical applications, when the nonlinear crystal 200 needs to be replaced, maintained, or adjusted, the mounting base 140 can be easily removed to take out the nonlinear crystal 200; during installation, the nonlinear crystal 200 can also be quickly fixed on the mounting base 140 and then installed into the beam conversion area 1112, making the operation simple and quick. The detachable mounting base 140 design greatly facilitates the replacement and maintenance of the nonlinear crystal 200. When the crystal is damaged, its performance degrades, or a different type of crystal needs to be replaced, there is no need to disassemble the entire device; only the mounting base 140 needs to be removed to complete the crystal replacement, shortening maintenance time, reducing maintenance difficulty and cost, and improving the flexibility of the device.

[0039] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, a heater for heating the nonlinear crystal 200 is provided on the mounting base 140.

[0040] In actual operation, based on the working requirements of the nonlinear crystal 200, a heater is used to heat the crystal, adjusting its operating temperature to maintain it within the optimal operating temperature range, thus ensuring the crystal's conversion efficiency and stability. The heater allows for precise temperature adjustment based on the characteristics and operating requirements of the nonlinear crystal 200. Different nonlinear crystals 200 exhibit different conversion efficiencies at different temperatures. By controlling the heater's power and operating time, the crystal temperature can be maintained at the optimal operating temperature, improving its conversion efficiency and stability, and enhancing the performance of the crystal environmental control device.

[0041] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, a humidity detection device is installed in the beam conversion area 1112.

[0042] During operation, the humidity detection device monitors the humidity in the beam conversion zone 1112 in real time and feeds the data back to the control system. If the humidity exceeds a set threshold, the control system can take timely measures, such as activating the vacuum pump 130 to enhance vacuuming or issuing an alarm to alert personnel for inspection and handling. The humidity detection device accurately monitors the humidity in the beam conversion zone 1112 in real time, allowing operators to understand the humidity status of the nonlinear crystal 200's operating environment at any time. This provides a reliable basis for judging the stability of the crystal's operating environment, facilitating the timely detection of potential humidity problems and enabling appropriate measures to be taken to ensure the normal operation of the crystal. The humidity detection device is a humidity sensor.

[0043] For example, the humidity detection device can also be configured to use a humidity indicator material that changes color according to the humidity of the chamber. The color change of the humidity indicator material is then observed through a transparent observation window in the beam conversion area, and the operating state of the vacuum device 130 is adjusted according to the color of the humidity indicator material. The insoluble nano humidity indicator material is composed of cobalt hexacyanocobalaminate, doped with one or more of the transition metals Cu, Fe, Mn, Ni, or Zn.

[0044] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, when the evacuation device 130 is working, evacuation from the center of the beam conversion zone 1112 allows for more uniform extraction of air from the sealed chamber, preventing localized pressure imbalances, accelerating the formation of a low-pressure environment, improving vacuum efficiency, and ensuring that the nonlinear crystal 200 remains in a stable, low-pressure, and dry environment. This evacuation method optimizes the airflow distribution within the sealed chamber, allowing for smoother airflow during evacuation, reducing airflow resistance and eddy currents, minimizing the impact of evacuation on beam transmission and crystal operation, and improving the overall performance of the crystal environmental control device.

[0045] In one possible embodiment of this application, such as Figure 1 and Figure 2 As shown, the air extraction device 130 is equipped with an air pressure detection device 160.

[0046] A pressure detection device 160 is installed on the extraction device 130. During the operation of the extraction device 130, the pressure detection device 160 can monitor the pressure in the sealed chamber in real time and feed the data back to the control system. By monitoring the pressure, it can be determined whether the working status of the extraction device 130 is normal and whether the low-pressure environment of the sealed chamber meets the set requirements. When the pressure is abnormal, the control system can issue an alarm or take corresponding measures to adjust it in a timely manner. Connecting the pressure detection device 160 to the control system enables precise control of the extraction process. When the pressure does not meet the set requirements, the system can automatically adjust the operating parameters of the extraction device 130 to ensure that the sealed chamber reaches a stable low-pressure environment; when the pressure fluctuates abnormally, the system can issue an alarm in a timely manner and take protective measures to prevent damage to the nonlinear crystal 200 and the device due to pressure problems, thereby improving the safety and reliability of the crystal environmental control device.

[0047] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A crystal control device, characterized by comprising: The device includes a furnace body, which has a linear optical channel and an exhaust channel communicating with the linear optical channel. A nonlinear crystal is placed inside the linear optical channel. A light beam incident on the linear optical channel exits after passing through the nonlinear crystal. Sealing structures are respectively located on opposite sides of the nonlinear crystal within the linear optical channel. The sealing structures have light-transmitting areas. The linear optical channel and the sealing structures form a sealed chamber. An exhaust device is connected to the opening of the exhaust channel to evacuate the sealed chamber.

2. The crystalline climate control device of claim 1, wherein, The linear optical channel includes an input channel, a beam conversion region, and an output channel connected in sequence. The nonlinear crystal is disposed in the beam conversion region, and the air extraction channel is connected to the beam conversion region.

3. The crystalline climate control device of claim 2, wherein, The sealing structure is provided at both ends of the light input channel and at both ends of the light output channel.

4. The crystalline climate control device of claim 2, wherein, The sealing structure includes a lens and a sealing gasket. The lens is installed in the linear optical channel, and the linear optical channel is provided with a mounting groove for installing the sealing gasket. The sealing gasket is embedded in the mounting groove and abuts against the lens.

5. The crystalline climate control device of claim 4, wherein, A drying ring is installed on the side of the lens facing the beam conversion area, and the drying ring is located at the joint between the lens and the linear optical channel.

6. The crystalline climate control device of claim 2, wherein, The beam conversion region is detachably mounted with a mounting base, through which a nonlinear crystal is mounted.

7. The crystal ring control device according to claim 6, characterized in that, The mounting base is equipped with a heater for heating the nonlinear crystal.

8. The crystalline climate control device of claim 2, wherein, The beam conversion area is equipped with a humidity detection device.

9. The crystalline climate control device of claim 2, wherein, The air extraction channel is connected to the middle of the beam conversion area.

10. The crystalline climate control device of claim 1, wherein, The air extraction device is equipped with an air pressure detection device.

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