Pyrolytic carbon cvd coating furnace exhaust filtering device

Abstract

The utility model discloses a pyrolysis carbon CVD coating furnace tail gas filtering device belongs to chemical vapor deposition (CVD) coating furnace tail gas treatment technical field, its structure includes filter jar body, and the filter jar body is connected with inlet gas filter tube and outlet gas filter tube, and inlet gas filter tube sets up in the lower part of filter jar body, and outlet gas filter tube sets up in the upper part of filter jar body, and be provided with filter body in filter jar body, and filter body includes A board, B board and baffle, A board and B board respectively include a plurality, and set up alternately up and down, and be provided with baffle between adjacent A board and B board, be provided with a plurality of A air holes on A board, be provided with a plurality of B air holes on B board, and A air holes on A board and B air holes on B board are mutually staggered arrangement in horizontal direction. Pyrolysis carbon CVD coating furnace tail gas filtering device of the utility model has solved the uneven distribution of tail gas, low filtering efficiency and other problems of existing tail gas filter tank.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition (CVD) coating furnace tail gas treatment technology, and in particular to a filtration device for tail gas from a pyrolysis carbon CVD coating furnace. Background Technology

[0002] In the production process of pyrolytic carbon CVD coating, the high temperature and high pressure reaction environment causes the raw material gas to undergo complex chemical reactions, forming a pyrolytic carbon coating. However, the exhaust gas produced after the reaction is complex in composition, including unreacted raw material gases (such as methane, hydrogen, etc.), tiny particulate impurities (with particle sizes typically between 0.1 and 10 micrometers) generated during pyrolysis, and potentially harmful byproducts (such as carbon monoxide, nitrogen oxides, etc.).

[0003] Traditional exhaust gas filter canisters suffer from several problems in practical applications: First, the exhaust gas is unevenly distributed within the canister. Existing filter canisters often employ a simple top-intake, bottom-outflow design, leading to localized eddies after the exhaust gas enters the canister. In some areas, the exhaust gas flow is too high, causing the filter material to quickly become clogged and ineffective, while in other areas, the exhaust gas cannot adequately contact the filter material, resulting in insufficient filtration and low overall filtration efficiency. Related experimental data shows that traditional filter canisters can only achieve a filtration efficiency of 60%-70% for particles smaller than 1 micrometer, which is insufficient to meet increasingly stringent environmental protection requirements. Second, the filtration structure is simplistic. Most traditional filter canisters are equipped with only single or double layers of filter material, and the types of materials are limited. They typically only provide basic interception of particulate impurities and have weak adsorption and purification capabilities for harmful gases, failing to effectively intercept and purify impurities and gas components of different particle sizes. Utility Model Content

[0004] The technical objective of this invention is to provide a tail gas filtration device for a pyrolysis carbon CVD coating furnace, addressing the shortcomings of the prior art.

[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: it includes a filter tank body, on which an inlet filter pipe and an outlet filter pipe are connected. The inlet filter pipe is located at the lower part of the filter tank body, and the outlet filter pipe is located at the upper part of the filter tank body. A filter body is provided inside the filter tank body. The filter body includes an A plate, a B plate, and a partition. Multiple A plates and multiple B plates are provided, and they are arranged alternately up and down. A partition is provided between adjacent A plates and B plates. Multiple A-vent holes are provided on the A plate, and multiple B-vent holes are provided on the B plate. The A-vent holes on the A plate and the B-vent holes on the B plate are staggered in the horizontal direction.

[0006] The air intake filter pipe is connected to the filter canister body by a thread and extends into the filter canister body.

[0007] The filter tank body is provided with a top cover, which is connected to the filter tank body by bolts. The top cover is provided with an air outlet, and the air outlet filter pipe is connected to the air outlet.

[0008] The air outlet filter pipe is connected to the air outlet of the top cover by a thread.

[0009] Multiple A-type vent holes on plate A are evenly distributed in a ring in the middle of plate A, and multiple B-type vent holes on plate B are evenly distributed in a ring on the outer periphery of plate B.

[0010] The A plate is provided with multiple A disassembly holes, and the B plate is provided with multiple B disassembly holes.

[0011] The partition is an annular partition.

[0012] Compared with existing technologies, the tail gas filtration device for pyrolysis carbon CVD coating furnace of this utility model has the following outstanding advantages:

[0013] 1) High-efficiency filtration performance: The layered and staggered arrangement of A and B plates greatly increases the contact area and time between the exhaust gas and the filter, significantly improving the interception effect of particulate impurities. The overall filtration efficiency is 30%-50% higher than that of traditional filter canisters, ensuring that exhaust gas emissions meet strict environmental protection standards.

[0014] 2) Convenient maintenance: Each component adopts a modular design, such as the threaded connection between the air inlet filter pipe, the air outlet filter pipe and the filter canister, and the layered structure of the misaligned A plate and B plate inside the filter canister, which facilitates quick disassembly and replacement, reduces the frequency and difficulty of maintenance, and effectively reduces the operating cost of the equipment.

[0015] 3) Reliable sealing: The inlet filter pipe and outlet filter pipe are connected to the filter tank body by threads, ensuring that the entire filter tank system will not leak exhaust gas in the high temperature, high pressure and exhaust gas environment containing corrosive gases, thus ensuring the safety and environmental protection of the production process. Attached Figure Description

[0016] Appendix Figure 1 It is a three-dimensional filtration device for the exhaust gas of a pyrolysis carbon CVD coating furnace. Figure 1 ;

[0017] Appendix Figure 2 It is a three-dimensional filtration device for the exhaust gas of a pyrolysis carbon CVD coating furnace. Figure 2 ;

[0018] Appendix Figure 3 This is a front sectional view of the tail gas filtration device for the pyrolysis carbon CVD coating furnace;

[0019] Appendix Figure 4 It is a three-dimensional filter. Figure 1 ;

[0020] Appendix Figure 5 It is a three-dimensional filter. Figure 2 ;

[0021] Appendix Figure 6 This is a schematic diagram of the filter tank body structure;

[0022] Appendix Figure 7 This is a schematic diagram of the A-plate structure;

[0023] Appendix Figure 8 This is a schematic diagram of the B-plate structure;

[0024] Explanation of reference numerals in the attached drawings: 1. Filter tank body; 2. Inlet filter pipe; 3. Outlet filter pipe; 4. Filter body; 41. Plate A; 411. A air vent; 412. A disassembly hole; 42. Plate B; 421. B air vent; 422. B disassembly hole; 43. Partition plate; 5. Top cover; 51. Air outlet; 6. Bolt. Detailed Implementation

[0025] Refer to the instruction manual appendix Figure 1 To be continued Figure 8 The following is a detailed description of the tail gas filtration device for a pyrolysis carbon CVD coating furnace according to this utility model.

[0026] This utility model discloses a tail gas filtration device for a pyrolysis carbon CVD coating furnace. Its structure includes a filter tank body 1, with an inlet filter pipe 2 and an outlet filter pipe 3 connected to the filter tank body 1. The inlet filter pipe 2 is located at the lower part of the filter tank body 1, and the outlet filter pipe 3 is located at the upper part of the filter tank body 1. A filter body 4 is disposed inside the filter tank body 1. The filter body 4 includes an A plate 41, a B plate 42, and a partition plate 43. Multiple A plates 41 and multiple B plates 42 are included and arranged alternately. A partition 43, which is annular, is provided between adjacent A-plate 41 and B-plate 42. A-plate 41 has multiple A-vent holes 411, evenly distributed in a ring in the center of A-plate 41. B-plate 42 has multiple B-vent holes 421, evenly distributed in a ring around its periphery. The A-vent holes 411 and B-vent holes 421 on A-plate 41 and B-vent holes 421 are horizontally staggered. This staggered arrangement of the A-vent holes 411 and B-vent holes 421 causes the airflow direction to continuously change as the exhaust gas passes through A-plate 41 and B-plate 42, increasing the contact area and contact time between the exhaust gas and A-plate 41 and B-plate 42. This allows the exhaust gas to be more evenly distributed within the filter canister body 1, improving the filtration effect. The aperture of vent A 411 and vent B 421 is preferably 2-3 mm.

[0027] The A plate 41 is provided with multiple A disassembly holes 412, and the B plate 42 is provided with multiple B disassembly holes 422. The A disassembly holes and B disassembly holes facilitate the easy removal of the A plate 41 and the B plate 42.

[0028] The air intake filter pipe 2 is connected to the filter canister body 1 by a thread and extends into the filter canister body 1.

[0029] The filter tank body 1 is provided with a top cover 5, which is detachably and sealed to the filter tank body 1 by bolts 6. The top cover 5 is provided with an air outlet 51, and the air outlet filter pipe 3 is connected to the air outlet 51.

[0030] The air outlet filter pipe 3 is connected to the air outlet 51 of the top cover 5 by a thread.

[0031] One end of the air inlet filter pipe 2 is connected to the exhaust gas outlet of the pyrolysis carbon CVD coating furnace, and the other end extends into the filter tank body 1 through a threaded connection to perform preliminary diversion of the exhaust gas entering the filter tank.

[0032] The filter tank body 1 is a cylindrical sealed container made of high-temperature resistant and corrosion-resistant graphite material.

[0033] The exhaust filter pipe 3 is made of graphite material, with one end connected to the exhaust port on the top of the cover and the other end connected to the exhaust gas collection device.

[0034] In actual use, the exhaust gas generated by the pyrolysis carbon CVD coating furnace first enters the filter tank body 1 through the air inlet filter pipe 2.

[0035] After the exhaust gas enters the filter canister body 1, the airflow direction changes multiple times under the action of the layered A plate 41 and B plate 42, which have A diffuser holes 411 and B diffuser holes 421 arranged vertically and vertically, ensuring full contact with the filtration space inside the filter canister. When the airflow changes direction, particulate impurities in the exhaust gas are intercepted by impacting the A plate 41 and B plate 42 or the inner wall of the filter canister due to inertia. At the same time, the exhaust gas mixes thoroughly with the air inside the canister during the slow flow.

[0036] The exhaust gas, after being initially filtered and dispersed by the filter, continues to rise and reaches the top cover.

[0037] After filtration, the exhaust gas enters the exhaust filter pipe 3 through the outlet at the top of the cover. The exhaust filter pipe 3 then transports the exhaust gas to the exhaust gas collection device for further treatment. Throughout the process, the sealing structure of the exhaust filter pipe ensures that the exhaust gas will not leak, guaranteeing the safety and stability of the treatment process. When maintenance of the filter tank is required, the top cover can be removed for easy cleaning of impurities (carbon deposits formed by exhaust gas deposition) adhering to the inside of the filter tank and on plates A and B.

[0038] The embodiments listed above are for understanding the present utility model only and are not intended to limit the technical solutions described herein. Those skilled in the art can make various changes or modifications based on the technical solutions described in the claims, and all equivalent changes or modifications should be covered within the scope of protection of the claims of the present utility model. Any aspects not detailed in the present utility model are well-known to those skilled in the art.

Claims

1. A filtration device for tail gas from a pyrolysis carbon CVD coating furnace, comprising a filter tank body, characterized in that: The filter tank body is connected to an inlet filter pipe and an outlet filter pipe. The inlet filter pipe is located at the lower part of the filter tank body, and the outlet filter pipe is located at the upper part of the filter tank body. The filter body is provided with a filter element, which includes an A plate, a B plate, and a partition. There are multiple A plates and multiple B plates, which are arranged alternately. A partition is provided between adjacent A plates and B plates. Multiple A-vent holes are provided on the A plate, and multiple B-vent holes are provided on the B plate. The A-vent holes on the A plate and the B-vent holes on the B plate are staggered in the horizontal direction.

2. The tail gas filtration device for a pyrolysis carbon CVD coating furnace according to claim 1, characterized in that: The air intake filter pipe is connected to the filter canister body by a thread and extends into the filter canister body.

3. The tail gas filtration device for a pyrolysis carbon CVD coating furnace according to claim 1, characterized in that: The filter tank body is provided with a top cover, which is connected to the filter tank body by bolts. The top cover is provided with an air outlet, and the air outlet filter pipe is connected to the air outlet.

4. The tail gas filtration device for a pyrolysis carbon CVD coating furnace according to claim 3, characterized in that: The air outlet filter pipe is connected to the air outlet of the top cover by a thread.

5. The tail gas filtration device for a pyrolysis carbon CVD coating furnace according to claim 1, characterized in that: Multiple A-type vent holes on plate A are evenly distributed in a ring in the middle of plate A, and multiple B-type vent holes on plate B are evenly distributed in a ring on the outer periphery of plate B.

6. The tail gas filtration device for a pyrolysis carbon CVD coating furnace according to claim 1, characterized in that: The A plate is provided with multiple A disassembly holes, and the B plate is provided with multiple B disassembly holes.

7. The tail gas filtration device for a pyrolysis carbon CVD coating furnace according to claim 1, characterized in that: The partition is an annular partition.

Images