A daf film uniform coating and attaching device

By incorporating an electrostatic eliminator and a dust extraction component into the DAF film lamination device, the problem of dust adsorption during DAF film lamination is solved, resulting in tighter film bonding and improved encapsulation quality and stability.

CN224463350UActive Publication Date: 2026-07-07上海矽怡科技有限公司

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
上海矽怡科技有限公司
Filing Date
2025-07-14
Publication Date
2026-07-07

AI Technical Summary

Technical Problem

In existing technologies, DAF films are prone to attracting dust due to surface electrostatic attraction during lamination, leading to bubbles and voids, which affect encapsulation performance and stability, and increase defect rate and production costs.

Method used

A DAF film uniform coating and bonding device is used, an electrostatic eliminator is set up to eliminate static electricity on the film surface, and a dust collection component is used to effectively collect dust, ensuring the cleanliness of the film material, preventing dust blockage, and improving the tightness of the bonding.

Benefits of technology

It effectively eliminates static electricity that attracts dust, reduces bubbles and voids, improves packaging yield, and enhances bonding quality and reliability.

✦ Generated by Eureka AI based on patent content.

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  • Figure CN224463350U_ABST
    Figure CN224463350U_ABST
Patent Text Reader

Abstract

This utility model relates to the field of DAF film lamination technology and discloses a DAF film uniform coating and lamination device, including a housing. A lamination operating table is installed at the bottom of the housing. A feeding roller and a receiving roller are arranged above the lamination operating table and mounted on the inner wall of the housing. An electrostatic eliminator is arranged above the feeding roller and the receiving roller and mounted on the inner wall of the housing. A pressure roller is arranged above the lamination operating table and mounted on the inner wall of the housing. A dust collection component is arranged above the pressure roller and the receiving roller. The dust collection component includes a dust inlet, a dust collection chamber above the dust inlet, a dust filter installed inside the dust collection chamber, and an air suction duct at the top of the dust collection chamber, with a fan connected to the outside of the air suction duct. This DAF film uniform coating and lamination device, by arranging a dust collection component above the pressure roller and the receiving roller, sucks any dust that may remain on the film surface into the dust collection chamber, ensuring that there is no dust obstruction when the film material is laminated to the component, resulting in a tighter lamination.
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Description

Technical Field

[0001] This utility model relates to the field of DAF film bonding technology, and in particular to a device for uniformly coating and bonding DAF film. Background Technology

[0002] DAF film, or die bond film, is mainly composed of a first adhesive layer, a second adhesive layer, an intermediate layer, and a high thermal conductivity resin layer. The first adhesive layer protects the wafer, the second adhesive layer improves conductivity, the intermediate layer provides support, and the high thermal conductivity resin layer aids in heat dissipation. During semiconductor packaging, DAF film allows the wafer to be cut, separated, and peeled off together during laser dicing, and the cut wafer remains adhered to the film without scattering. Furthermore, it possesses excellent isolation properties, good thermal conductivity, and corrosion resistance, making it a preferred material for high-demand semiconductor packaging processes and a suitable replacement for die bond adhesives.

[0003] Existing technology publication number CN214692554U discloses an automatic wafer DAF film application device, which includes a DAF film separation device and a DAF film application device. The DAF film separation device includes a feeding reel, a receiving reel, a main roller, and a separating blade. The feeding reel is drivenly connected to both the receiving reel and the main roller, and the feeding and receiving reels rotate in the same direction, while the feeding and main roller rotate in opposite directions. One of the feeding and receiving reels is connected to a power unit. The DAF film application device is located below the DAF film separation device and can extend and retract from below the main roller. The DAF film application device includes a suction cup, the shape and size of which correspond to the wafer. This automatic wafer DAF film application device can not only automatically separate the release film and the DAF film, but also accurately apply the DAF film to the wafer and the support ring, reducing the labor intensity of workers and improving production efficiency.

[0004] Regarding the aforementioned and existing related technologies, the inventors believe that the following drawbacks often exist: During the bonding of DAF films, dust may be attracted due to electrostatic attraction on the film surface. This can cause dust to become trapped between the DAF film and the component, forming bubbles or voids, affecting the bonding tightness, and thus reducing the electrical performance and thermal conductivity after encapsulation. Simultaneously, dust can also cause film material misalignment and wrinkles, damaging the film structure, affecting the stability of subsequent bonding processes, and even causing short circuits or open circuits in the components, increasing the defect rate and production costs. Utility Model Content

[0005] The technical problem to be solved by this utility model is that the existing technology has the disadvantage that dust is easily attracted by surface electrostatics during the bonding of DAF film, which leads to air bubbles and thus reduces the performance of the component. To this end, we propose a DAF film uniform coating and bonding device.

[0006] To achieve the above objectives, this application adopts the following technical solution: a DAF film uniform coating and bonding device, comprising a housing, a bonding operation table installed at the bottom of the housing, a feeding roller and a receiving roller arranged above the bonding operation table, the feeding roller and the receiving roller being installed on the inner wall of the housing, an electrostatic eliminator arranged above the feeding roller and the receiving roller, the electrostatic eliminator being installed on the inner wall of the housing, a pressure roller arranged above the bonding operation table, the pressure roller being installed on the inner wall of the housing, a dust collection component arranged above the pressure roller and the receiving roller, the dust collection component including a dust suction port, the lower part of the dust suction port being directly opposite the gap between the pressure roller and the receiving roller, a dust collection chamber arranged above the dust suction port, a dust filter screen installed inside the dust collection chamber, an air suction duct arranged at the top of the dust collection chamber, and a fan connected to the outside of the air suction duct.

[0007] Preferably, the outer layer of the roller is wrapped with rubber.

[0008] Preferably, the outer shell includes a housing, with slide rails provided on both sides near the bottom. Slide grooves are provided on the upper end of the housing on both sides of the slide rails. Scrapers are provided between the slide grooves. A spring is installed at one end of the slide groove. One end of the spring is fixed to the inner wall of the lower end of the slide groove, and the other end of the spring is connected to one end of the scraper in the slide groove. The scraper is installed at a lower position between the roller and the receiving roller.

[0009] Preferably, the bonding operation table includes a table body, which is disposed at the lower end of the roller and the receiving roller. The table body is disposed close to the roller. Sliders are installed on both sides of the table body and are installed in the slide rail. A displacement nut is installed at the bottom of the table body. A motor is disposed on the outside of the housing. A threaded rod is installed at one end of the motor and is installed in the displacement nut.

[0010] Preferably, the dust suction port and the dust collection chamber are connected by screws.

[0011] Preferably, the feeding roller includes a roller body 1, which is mounted on the inner wall of the outer shell. A motor 2 is mounted on one end of the roller body 1, and a gear 1 is mounted between the motor 2 and the roller body 1. The receiving roller includes a roller body 2, and a gear 2 is mounted on one end of the roller body 2. Gear 1 and gear 2 are on the same side, and gear 1 and gear 2 are connected by a belt drive.

[0012] The technical effects and advantages of this utility model are as follows:

[0013] In this invention, a dust collection component is installed above the middle of the roller and the take-up roller, effectively collecting dust and further ensuring the cleanliness of the bonding process. The dust collection device sucks dust from bottom to top, drawing any dust that may remain on the film surface into the dust collection box. After entering the dust collection box, the dust is adsorbed onto the adhesive filter screen, which prevents the dust from being dispersed again. This ensures that there is no dust obstruction when the film material is bonded to the component, resulting in a tighter bond, reducing air bubbles and voids, and improving the packaging yield.

[0014] In this invention, an electrostatic eliminator is installed after the feeding roller to eliminate static electricity on the film surface, preventing the effect of static electricity attracting dust. The electrostatic eliminator releases positive and negative ions to neutralize the static electricity of the film material, causing dust to lose its adsorption force, reducing dust adhesion to the film surface, providing a clean film material for subsequent lamination, reducing lamination defects caused by dust, and improving lamination quality and reliability. Attached Figure Description

[0015] The disclosure of this utility model is illustrated with reference to the accompanying drawings. It should be understood that the drawings are for illustrative purposes only and are not intended to limit the scope of protection of this utility model. In the drawings, the same reference numerals are used to refer to the same parts:

[0016] Figure 1 This is a schematic diagram of the overall three-dimensional structure of the present invention. Figure 1 ;

[0017] Figure 2 This is a schematic diagram of the overall three-dimensional structure of the present invention. Figure 2 ;

[0018] Figure 3 This is a schematic diagram of the internal side view of the outer shell of this utility model;

[0019] Figure 4 This is a schematic diagram of the scraper installation structure of this utility model;

[0020] Figure 5 This is a three-dimensional structural diagram of the internal structure of the outer shell of this utility model;

[0021] Figure 6 This is a schematic diagram of the internal side view of the dust collection component of this utility model;

[0022] Figure 7 This is a schematic diagram of the installation structure for the rotating roller of this utility model.

[0023] Legend: 1. Outer shell; 11. Housing; 12. Slide rail; 13. Slide groove; 14. Spring; 2. Fitting operating table; 21. Table body; 22. Slider; 23. Displacement nut; 24. Threaded rod; 25. Motor 1; 3. Feeding roller; 31. Roller body 1; 32. Gear 1; 33. Motor 2; 4. Receiving roller; 41. Roller body 2; 42. Gear 2; 5. Roller roller; 6. Dust collection component; 61. Dust collection port; 62. Dust collection chamber; 63. Adhesive filter screen; 64. Air suction duct; 65. Fan; 7. Static eliminator; 8. Scraper. Detailed Implementation

[0024] It is readily understood that, based on the technical solution of this utility model, those skilled in the art can propose various interchangeable structural methods and implementations without altering the essential spirit of this utility model. Therefore, the following detailed embodiments and accompanying drawings are merely illustrative descriptions of the technical solution of this utility model and should not be considered as the entirety of this utility model or as limitations or restrictions on the technical solution of this utility model.

[0025] Reference Figures 1-2 As shown, this utility model provides a technical solution: a DAF film uniform coating and bonding device, comprising: a housing 1, a bonding operation table 2 movably installed at the bottom of the housing 1, a feeding roller 3 and a receiving roller 4 arranged above the bonding operation table 2, the feeding roller 3 and the receiving roller 4 being rotatably mounted on the inner wall of the housing 1, an electrostatic eliminator 7 being arranged above the feeding roller 3 and the receiving roller 4, the electrostatic eliminator 7 being fixedly mounted on the inner wall of the housing 1, a pressure roller 5 being bonded above the bonding operation table 2, the pressure roller 5 being rotatably mounted on the inner wall of the housing 1, the outer layer of the pressure roller 5 being wrapped with rubber, the pressure roller 5 being close to but not in contact with the receiving roller 4, the pressure roller 5 being closer to the edge of the housing 1, and a dust suction component 6 being arranged above the pressure roller 5 and the receiving roller 4.

[0026] Reference Figures 3-5 As shown in this embodiment: the outer shell 1 includes a shell 11, and slide rails 12 are provided on both sides of the shell 11 near the bottom. The slide rails 12 are at the same height as the center of the operating table 2. Slide grooves 13 are provided on the upper end of the shell 11 of the two slide rails 12. The slide grooves 13 are inclined at 45 degrees. Scrapers 8 are provided between the two slide grooves 13. The scrapers 8 can move along the slide grooves 13. A spring 14 is fixedly installed at one end of the slide groove 13. One end of the spring 14 is fixed to the inner wall of the lower end of the slide groove 13. The other end of the spring 14 is connected to one end of the scraper 8 that moves in the slide groove 13. The scraper 8 is installed at a lower position between the roller 5 and the take-up roller 4, and the scraper 8 is in close contact with the take-up roller 4. As the inner diameter of the take-up roller 4 continues to increase, the scraper 8 will slide along the slide groove 13, thereby buffering the pressure between the scraper 8 and the take-up roller 4.

[0027] Reference Figures 3-5As shown in this embodiment: the bonding operation table 2 includes a table body 21, which is located at the lower end of the roller 5 and the receiving roller 4. The table body 21 is tightly attached to the roller 5. Slider 22 is installed on both sides of the table body 21 by screws. The slider 22 is installed in the slide rail 12 and can move within the slide rail 12. A displacement nut 23 is installed at the bottom of the table body 21 by welding. A motor 25 is installed on the outside of the housing 11. A threaded rod 24 is fixedly installed at one end of the motor 25. The threaded rod 24 is threadedly installed in the displacement nut 23. The threaded rod 24 is rotatably mounted on the housing 11. The motor 25 drives the threaded rod 24 to rotate, causing the displacement nut 23 to move on the threaded rod 24, thereby causing the slider 22 to move within the slide rail 12, realizing the contraction and movement of the bonding operation table 2.

[0028] Reference Figures 6-7 As shown in this embodiment: the dust collection component 6 includes a dust collection port 61, which is directly below the gap between the roller 5 and the receiving roller 4. The dust collection port 61 is funnel-shaped, and a dust collection chamber 62 is provided on the upper part of the dust collection port 61. The dust collection port 61 and the dust collection chamber 62 are connected by screws. A dust filter 63 is installed inside the dust collection chamber 62 by screws. The dust filter 63 is made of silicone coated PET board material. A suction duct 64 is provided on the top of the dust collection chamber 62, and a fan 65 is connected to the outside of the suction duct 64.

[0029] Reference Figure 7 As shown in this embodiment: the feeding roller 3 includes a roller body 31, which is rotatably mounted on the inner wall of the housing 11. A motor 33 is mounted on one end of the roller body 31, and a gear 32 is installed between the motor 33 and the roller body 31. The receiving roller 4 includes a roller body 41, and a gear 42 is fixedly mounted on one end of the roller body 41. The gear 32 and the gear 42 are on the same side and are connected by a belt drive. The motor 33 drives the gear 32 to rotate, which in turn drives the roller body 31 to rotate. The gear 32 drives the gear 42 to rotate via the belt drive, which in turn drives the roller body 41 to rotate, thus achieving synchronous rotation of the roller body 31 and the roller body 41.

[0030] Working principle: During use, the DAF film roll is placed on the unloading roller 3, releasing the DAF film from the top of the unloading roller 3. The film then passes downwards between the take-up roller 4 and the pressure roller 5, and is wound up by the take-up roller 4. When bonding begins, the element to be bonded is placed in the fixed bonding position on the bonding operating table 2. Motor 25 is started, causing the bonding operating table 2 to move inwards along the slide rail 12 until the fixed bonding position of the bonding operating table 2 is aligned with the middle of the take-up roller 4 and the pressure roller 5. Motor 33 is then started, causing rollers 31 and 41 to rotate synchronously. At this time, the static eliminator 7 is activated. When the DAF film to be bonded is conveyed to the lower end of the static eliminator 7, the positive and negative ions released by the static eliminator 7 neutralize the static electricity of the film material, eliminating static electricity on the film surface. Electricity; As the DAF film to be bonded is conveyed to the lower end of the dust collection component 6, the fan 65 is started, causing the dust collection component 6 to suck up dust from bottom to top, sucking in any dust that may remain on the film surface into the dust collection chamber 62, so that the dust is adsorbed onto the dust filter 63 for collection after entering the dust collection chamber 62; When the DAF film to be bonded continues to be conveyed to the scraper 8 position, the DAF film is scraped off by the scraper 8 and dispersed to the bottom of the roller 5. As the roller 5 rotates, it is pressed onto the bonding operation table 2, and the release film of the DAF film is wound up by the take-up roller 4. As the roller 5 rotates and presses the DAF film, the motor 25 is started again, so that the bonding operation table 2 moves outward synchronously, thereby making the DAF film completely bonded to the surface of the component.

[0031] The technical scope of this utility model is not limited to the content described above. Those skilled in the art can make various modifications and variations to the above embodiments without departing from the technical concept of this utility model, and all such modifications and variations should fall within the protection scope of this utility model.

Claims

1. A device for uniformly coating and bonding DAF film, characterized in that, The device includes an outer casing: a bonding operation platform is installed at the bottom of the casing; a feeding roller and a receiving roller are arranged above the bonding operation platform and mounted on the inner wall of the casing; an electrostatic eliminator is arranged above the feeding roller and the receiving roller and mounted on the inner wall of the casing; a pressure roller is arranged above the bonding operation platform and mounted on the inner wall of the casing; a dust collection component is arranged above the pressure roller and the receiving roller, the dust collection component includes a dust suction port, the lower part of the dust suction port is directly opposite the gap between the pressure roller and the receiving roller; a dust collection chamber is arranged above the dust suction port, a dust filter is installed inside the dust collection chamber, and an air suction duct is arranged at the top of the dust collection chamber, with a fan connected to the outside of the air suction duct.

2. The DAF film uniform coating and bonding device according to claim 1, characterized in that: The outer layer of the roller is wrapped with rubber.

3. The DAF film uniform coating and bonding device according to claim 1, characterized in that: The outer casing includes a housing, with slide rails on both sides near the bottom. Slide grooves are formed on the upper end of the housing on both sides of the slide rails. Scrapers are arranged between the slide grooves. A spring is installed at one end of the slide groove. One end of the spring is fixed to the inner wall of the lower end of the slide groove. The other end of the spring is connected to one end of the scraper in the slide groove. The scraper is installed at a lower position between the roller and the receiving roller.

4. The DAF film uniform coating and bonding device according to claim 3, characterized in that: The bonding operation table includes a table body, which is located at the lower end of the roller and the receiving roller. The table body is closely attached to the roller. Sliders are installed on both sides of the table body and are installed in the slide rail. A displacement nut is installed at the bottom of the table body. A motor is installed on the outside of the housing. A threaded rod is installed at one end of the motor and is installed in the displacement nut.

5. The DAF film uniform coating and bonding device according to claim 1, characterized in that: The dust suction port and the dust collection chamber are connected by screws.

6. The DAF film uniform coating and bonding device according to claim 1, characterized in that: The feeding roller includes a roller body 1, which is mounted on the inner wall of the outer shell. A motor 2 is mounted on one end of the roller body 1, and a gear 1 is mounted between the motor 2 and the roller body 1. The receiving roller includes a roller body 2, and a gear 2 is mounted on one end of the roller body 2. The gear 1 and gear 2 are on the same side, and the gear 1 and gear 2 are connected by a belt drive.