Crucible cooling device for high-purity silicon production

Abstract

The utility model discloses a kind of crucible cooling devices for high-purity silicon preparation, including lower power assembly, sealed cavity, crucible base and crucible body, the lower power assembly is fixedly installed at the lower end surface of sealed cavity, crucible base passes through sealed cavity and is fixedly connected with lower power assembly, the crucible base is provided with crucible body, the crucible base includes gas cooling tray and graphite support rod, the graphite support rod is fixedly connected at the lower end surface of the gas cooling tray, the upper end surface of the gas cooling tray is equipped with the connecting cavity accommodating crucible bottom, the upper end surface of the connecting cavity is equipped with several cooling gas paths, the center of the connecting cavity is equipped with the first gas groove through the gas cooling tray, the central axis of the graphite support rod is equipped with the second gas groove communicated with the first gas groove, the sidewall of the second gas groove is equipped with air inlet groove, the utility model realizes the rapid gas cooling of crucible by the uniform gas distribution passage of the gas cooling tray, and the service life of crucible is improved by starting cooling from the lower part of the crucible.

Description

Technical Field

[0001] This utility model relates to the field of high-concentration silicon purification, and in particular to a crucible cooling device for high-purity silicon preparation. Background Technology

[0002] During the operation of nano-silicon powder production equipment, at the end of each production run, especially when the furnace is unexpectedly shut down, a large amount of molten silicon liquid will remain in the crucible. Due to the characteristics of the thermal field structure, the silicon liquid will solidify from the top surface downwards. The silicon liquid changes from a liquid state to a solid state and its volume increases. Since the top surface has already solidified, the solidified silicon liquid at the bottom will crack the crucible, causing leakage accidents and crucible losses. Utility Model Content

[0003] The main purpose of this invention is to provide a crucible cooling device for the preparation of high-purity silicon, which is used to prevent leakage accidents caused by crucible damage.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] A crucible cooling device for high-purity silicon preparation includes a lower power assembly, a sealed cavity, a crucible base, a heating device, and a crucible body. The lower power assembly is fixedly installed on the lower end face of the sealed cavity. The crucible base passes through the sealed cavity and is fixedly connected to the lower power assembly. The crucible body is mounted on the crucible base, and the heating device is fixedly installed on the crucible base, covering the outside of the crucible body. The crucible base includes a gas equalization cooling tray and a graphite support rod. The graphite support rod is fixedly connected to the lower end face of the gas equalization cooling tray. The upper end face of the gas equalization cooling tray has a connecting cavity for accommodating the bottom of the crucible. The upper end face of the connecting cavity has several cooling gas passages. A first gas groove penetrating the gas equalization cooling tray is opened in the center of the connecting cavity. A second gas groove communicating with the first gas groove is opened on the central axis of the graphite support rod. An air inlet groove is opened on the side wall of the second gas groove, and an air inlet device is connected to the air inlet groove.

[0006] Furthermore, the lower power assembly includes a rotary motor, a lifting device, and a sealed bellows. The rotary motor is fixedly installed on the lifting device, and the output end of the rotary motor is fixedly connected to the graphite support rod. The output end of the rotary motor and the outer ring surface of the graphite support rod are fitted with a sealed bellows. The two ends of the sealed bellows are respectively fixedly installed on the rotary motor and the sealing cavity. There is a certain gap between the inner wall of the sealed bellows and the outer ring surface of the graphite support rod and the output end of the rotary motor. An air inlet is fixedly opened on the side wall of the sealed bellows.

[0007] Furthermore, the upper end face of the sealed cavity is fixedly provided with an exhaust port, a gas inlet and a vacuum port. The vacuum port is fixedly connected to a vacuum pumping device, the exhaust port is fixedly installed with an electromagnetic control valve, the gas inlet is fixedly connected to an inert gas conveying device, and the lower end face of the sealed cavity is provided with a lifting connection port for the graphite support rod to pass through.

[0008] Furthermore, a fixed graphite ring is fixedly provided at the connection between the lifting connection port and the graphite support rod. A connecting ring groove is provided on the inner ring surface of the fixed graphite ring, and a flexible graphite sealing ring is fixedly installed in the connecting ring groove. The inner ring surfaces of the flexible graphite sealing ring and the fixed graphite ring are tightly slidably connected to the outer ring surface of the graphite support rod.

[0009] Furthermore, the cooling air path includes several transverse air paths and several longitudinal air paths, which are interconnected with each other.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0011] This invention utilizes a unique cooling structure to achieve bottom-up cooling of the molten silicon inside the crucible, preventing the crucible from cracking due to the cooling of the molten silicon. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the front cross-sectional structure of this utility model;

[0013] Figure 2 This is a three-dimensional cross-sectional view of the crucible base of this utility model.

[0014] Figure label:

[0015] 1. Lower power assembly; 2. Sealed bellows; 3. Graphite support rod; 4. Gas-cooled tray; 5. Crucible body; 6. Fixed graphite ring; 7. Flexible graphite sealing ring; 8. Silicon raw material; 9. Heating device; 10. Sealed cavity; A1. Air inlet; A2. Gap; A3. Air inlet groove; A4. Second air groove; A5. Cooling air passage; B1. First air groove. Detailed Implementation

[0016] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby providing a clearer and more definite definition of the scope of protection of the present invention.

[0017] See Figure 1-2As shown, a crucible cooling device for high-purity silicon preparation includes a lower power assembly, a sealed cavity, a crucible base, a heating device, and a crucible body. The sealed cavity is a sealed tank. An exhaust port, a gas inlet, and a vacuum port are fixedly opened on the upper end face of the sealed cavity. A vacuum device is fixedly connected to the vacuum port. An electromagnetic control valve is fixedly installed on the exhaust port. An inert gas delivery device is fixedly connected to the gas inlet. A lifting connection port for a graphite support rod to pass through is opened on the lower end face of the sealed cavity.

[0018] The crucible base includes a gas equalization cooling tray and a graphite support rod. The graphite support rod is fixedly connected to the lower end face of the gas equalization cooling tray. The upper end face of the gas equalization cooling tray has a connecting cavity for accommodating the bottom of the crucible. A lower connecting through hole is fixedly opened on the lower end face of the sealing cavity. The graphite support rod passes through the lower connecting through hole and is fixedly connected to the lower power assembly. The lower power assembly includes a rotary motor and a lifting device. The rotary motor is fixedly installed on the lifting device. The output end of the rotary motor is fixedly connected to the graphite support rod. A sealing bellows is fitted on the output end of the rotary motor and the outer ring surface of the graphite support rod. The two ends of the sealing bellows are fixedly installed on the rotary motor and the sealing cavity, respectively. There is a certain gap between the inner wall of the sealing bellows and the outer ring surface of the graphite support rod and the output end of the rotary motor for gas flow. An air inlet is fixedly opened on the side wall of the sealing bellows.

[0019] The crucible body is mounted on the top of the crucible base via a connecting cavity. A heating device is fixedly installed on the crucible base and covers the outside of the crucible body. The heating device heats and melts the crucible and the silicon raw material inside the crucible to form molten silicon. Several cooling gas passages are opened on the upper end face of the connecting cavity. A first gas groove is opened in the center of the connecting cavity, penetrating the gas equalization cooling tray. A second gas groove is opened on the central axis of the graphite support rod, communicating with the first gas groove. An air inlet groove is opened on the side wall of the second gas groove, and an air inlet device is connected to the air inlet groove.

[0020] A fixed graphite ring is fixedly provided at the connection between the lifting connection port and the graphite support rod. A connecting ring groove is opened on the inner ring surface of the fixed graphite ring. A flexible graphite sealing ring is fixedly installed in the connecting ring groove. The inner ring surfaces of the flexible graphite sealing ring and the fixed graphite ring are tightly slidably connected to the outer ring surface of the graphite support rod.

[0021] The cooling air path includes several transverse air paths and several longitudinal air paths, which are interconnected.

[0022] In operation, the sealed cavity is kept sealed, and an internal vacuum is created using a vacuum pump. The lower power unit is activated to control the crucible's rotation and height adjustment. When the furnace is shut down, cooling inert gas is introduced through the inlet. The gas enters the inlet groove of the graphite support rod through the rear gap gas channel, and then enters the cooling gas path along the second gas groove. The cooling gas path is evenly distributed across the entire 4-stage uniform cooling tray, uniformly cooling the lower part of the crucible body. This forces the molten silicon to solidify from bottom to top, thus solving the problem of the molten silicon solidifying from top to bottom and cracking the crucible.

[0023] The above description is only a preferred embodiment of the present utility model. The protection scope of the present utility model is not limited to the above embodiments. Any equivalent modifications or changes made by those skilled in the art based on the content disclosed in the present utility model should be included in the protection scope recorded in the claims.

Claims

1. A crucible cooling device for high-purity silicon preparation, comprising a lower power assembly (1), a sealed cavity (10), a crucible base, a heating device (9), and a crucible body (5), characterized in that: The lower power assembly (1) is fixedly installed on the lower end face of the sealed cavity (10). The crucible base passes through the sealed cavity (10) and is fixedly connected to the lower power assembly (1). The crucible body (5) is mounted on the crucible base. A heating device (9) is fixedly installed on the crucible base and covers the outside of the crucible body (5). The crucible base includes a gas equalization cooling tray (4) and a graphite support rod (3). The graphite support rod is fixedly connected to the lower end face of the gas equalization cooling tray (4). (3) The upper end face of the gas equalization cooling tray (4) is provided with a connecting cavity for accommodating the bottom of the crucible. The upper end face of the connecting cavity is provided with several cooling air passages (A5). The center of the connecting cavity is provided with a first air groove (B1) that penetrates the gas equalization cooling tray (4). The central axis of the graphite support rod (3) is provided with a second air groove (A4) that communicates with the first air groove (B1). The side wall of the second air groove (A4) is provided with an air inlet groove (A3). The air inlet groove (A3) is connected to an air inlet device.

2. The crucible cooling device for high-purity silicon preparation according to claim 1, characterized in that: The lower power assembly (1) includes a rotary motor, a lifting device and a sealed bellows (2). The rotary motor is fixedly installed on the lifting device. The output end of the rotary motor is fixedly connected to the graphite support rod (3). The sealed bellows (2) is sleeved on the output end of the rotary motor and the outer ring surface of the graphite support rod (3). The two ends of the sealed bellows (2) are fixedly installed on the rotary motor and the sealed cavity (10) respectively. There is a certain gap (A2) between the inner wall of the sealed bellows (2) and the outer ring surface of the graphite support rod (3) and the output end of the rotary motor. An air inlet (A1) is fixedly opened on the side wall of the sealed bellows (2).

3. The crucible cooling device for high-purity silicon preparation according to claim 1, characterized in that: The upper end face of the sealed cavity (10) is fixedly provided with an exhaust port, a gas inlet and a vacuum port. The vacuum port is fixedly connected to a vacuum device, the exhaust port is fixedly installed with an electromagnetic control valve, the gas inlet is fixedly connected to an inert gas delivery device, and the lower end face of the sealed cavity (10) is provided with a lifting connection port for the graphite support rod (3) to pass through.

4. The crucible cooling device for high-purity silicon preparation according to claim 3, characterized in that: A fixed graphite ring (6) is fixedly provided at the connection between the lifting connection port and the graphite support rod (3). A connecting ring groove is provided on the inner ring surface of the fixed graphite ring (6). A flexible graphite sealing ring (7) is fixedly installed in the connecting ring groove. The inner ring surfaces of the flexible graphite sealing ring (7) and the fixed graphite ring (6) are tightly slidably connected to the outer ring surface of the graphite support rod (3).

5. The crucible cooling device for high-purity silicon preparation according to claim 1, characterized in that: The cooling air passage (A5) includes several transverse air passages and several longitudinal air passages, which are interconnected.

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