A burner fixing device for a vertical deposition furnace

Abstract

The utility model discloses a kind of torch fixing device for vertical deposition furnace, including with the torch of reaction kettle, the outside of torch is equipped with heat shield on reaction kettle, the outside of torch is sequentially equipped with pressing plate and fixing device from below to above, one side of the fixing device is provided with adjusting plate, one end of the adjusting plate and pressing plate is connected with same adjusting connection component, and the adjusting plate is rotatably connected with the adjusting connection component, the lower end of the adjusting connection component is provided with cross-shaped sliding table, for the angle and position adjustment of torch, the heat shield includes quartz ring and ceramic seat, the ceramic seat is penetrated with reaction kettle, the ceramic seat is T-shaped structure, the quartz ring is located reaction kettle outside, the pressing plate is attached with the ceramic seat. The torch fixing device has adjusting structure, and position and angle adjustment can be carried out for torch.

Description

Technical Field

[0001] This utility model relates to a blowtorch fixing device, and more particularly to a blowtorch fixing device for a vertical deposition furnace. Background Technology

[0002] Quartz glass, known in the industry as the "King of Glass," is made from natural crystalline quartz or silicon compounds, melted at high temperatures in a clean environment. There are many ways to classify quartz glass. Based on the different manufacturing methods, it can be divided into natural quartz glass and synthetic quartz glass. Natural quartz glass is made by melting natural quartz raw materials, while synthetic quartz glass is synthesized through chemical vapor deposition using silicon-containing compounds (SiCl4 or other silicides). In addition, it can be classified according to appearance, spectral characteristics, and manufacturing process. The internationally accepted classification method for quartz glass in academic and industrial fields is based on its manufacturing process. According to different manufacturing processes and properties, transparent quartz glass can generally be divided into the following four categories:

[0003] ① Transparent quartz glass made from natural quartz by electrofusion in a vacuum or inert gas environment;

[0004] ② Transparent quartz glass obtained by melting natural quartz with a burner flame;

[0005] ③ Synthetic quartz glass prepared by hydrolysis reaction of SiCl4 in an oxyhydrogen flame;

[0006] ④ Synthetic quartz glass prepared by pyrolysis of SiCl4 in a plasma flame.

[0007] Chemical vapor deposition (CVD) is a widely used technology in material synthesis and processing. The process involves using a gas as a precursor, where the gas phase reacts and interacts with a solid substrate, depositing a thin layer on the substrate surface to achieve material preparation or surface finishing. CVD is also a crucial method for manufacturing quartz glass due to its simplicity, controllability, readily available and inexpensive raw materials, and ability to produce large-sized quartz glass ingots. Currently, the main methods for melting synthetic quartz glass ingots are horizontal and vertical deposition furnace CVD. Horizontal CVD, unable to produce large, heavy quartz glass ingots and characterized by low furnace temperature, high energy consumption, and low efficiency, has been gradually replaced by vertical CVD. In existing vertical deposition furnace chemical vapor deposition technology, the main process involves burning hydrogen and oxygen in a burner to generate water vapor, which then reacts with gaseous silicon-containing compounds in the burner feed pipe to produce silica particles. These silica particles are then directly deposited onto a base rod to form a quartz glass dome. During the deposition of the quartz glass dome, the high-temperature molten quartz glass dome is forced by centrifugal force and gravity to gradually diffuse from the center towards the edges, thus growing and forming a larger diameter quartz glass dome.

[0008] The burner (quartz glass torch, or torch for short) is installed at the pre-drilled hole at the top of the reactor. The torch nozzle is inside the reactor, and the torch tail is inside the upper furnace, connected to the gas supply pipe. The distance from the torch nozzle to the deposition surface driven by the gas, the torch nozzle angle, and the location of the raw material deposition growth point all have a decisive influence on the efficiency and morphology of product growth.

[0009] The overall temperature inside the deposition reactor exceeds 1600℃, and the temperature at the connection point between the blowtorch and the gas supply pipeline above the insulation layer is also >100℃. Therefore, once the blowtorch ignition temperature rises, it cannot be adjusted again to accommodate process adjustments required during product growth. Cooling down and readjusting the blowtorch would consume a significant amount of time; the entire heating and cooling process of the reactor takes approximately 50 hours before production can commence. Furthermore, the surface deposition process doesn't cool down sufficiently before growth begins, requiring the entire initial stage to restart, which is detrimental to continuous processing. Based on these reasons, it is necessary to design a blowtorch fixing device for a vertical deposition furnace with an adjustable structure that allows for adjustment of the blowtorch's position and angle. Utility Model Content

[0010] In view of the above-mentioned problems in the existing technology, the purpose of this utility model is to provide a blowtorch fixing device for a vertical deposition furnace, which realizes the purpose of adjusting the position and angle of the blowtorch.

[0011] To achieve the above objectives, the technical solution of this utility model is as follows:

[0012] A torch fixing device for a vertical deposition furnace includes a torch penetrating a reaction vessel. A heat insulation sleeve is fitted over the torch on the reaction vessel. A pressure plate and a fixing device are sequentially fitted over the torch from bottom to top. An adjusting plate is provided on one side of the fixing device. One end of the adjusting plate and the pressure plate is connected to the same adjusting connection assembly, and the adjusting plate is rotatably connected to the adjusting connection assembly. A cross-shaped slide is provided at the lower end of the adjusting connection assembly for adjusting the angle and position of the torch.

[0013] Preferably, the heat insulation sleeve includes a quartz ring and a ceramic seat, the ceramic seat penetrates the reactor, the ceramic seat has a T-shaped structure, the quartz ring is located outside the reactor, and the pressure plate is attached to the quartz ring.

[0014] Preferably, a gap is provided between the pressure plate and the blowtorch for adjusting the angle of the blowtorch.

[0015] Preferably, the fixing device includes a bonding plate and a claw fixed to the adjusting plate. Both ends of the claw are provided with tightening seats, and the tightening seats are screwed to the bonding plate with the same bolt for fixing the blowtorch.

[0016] Preferably, the claw has movable grooves on both sides, and a clamping plate is provided on the side of the movable groove near the adjusting plate. The two clamping plates are symmetrically located between the blowtorch and the claw.

[0017] Preferably, the adjusting connection assembly includes a horizontal seat fixedly connected to the pressure plate and an adjusting shaft fixedly connected to the adjusting plate. Both the horizontal seat and the adjusting shaft are provided with an extension plate on their outer sides. The ends of the two extension plates are provided with the same slider, and the slider is slidably connected to the cross-shaped slide table for adjusting the front, back, left and right positions of the blowtorch.

[0018] Preferably, both the adjusting shaft and the slider are provided with drive gears, and the two drive gears are fitted with the same chain. The end of the drive gear on the slider is provided with a rotating structure, and the rotation range of the adjusting shaft relative to the horizontal seat is -°, which is used for adjusting the angle of the blowtorch.

[0019] Preferably, the cross-shaped slide table includes two vertically distributed slide rails, one of which slides on the other, and the ends of the slide rails are provided with a driving structure.

[0020] Compared with existing technologies, the torch fixing device for vertical deposition furnaces provided by this utility model has an adjustable structure, which allows for adjustment of the torch's position and angle. Specifically, by setting a heat insulation sleeve on the reactor of the vertical deposition furnace, the torch mounting end can be set on the reactor. The pressure plate provides a certain degree of sealing to the quartz ring of the heat insulation sleeve, providing favorable conditions for adjusting the position and angle of the torch in the middle of the heat insulation sleeve and the pressure plate. Then, through the limiting of the external fixing device of the torch, the torch can be remotely driven by the adjusting connection component to rotate the adjusting plate 0-20° to adjust the torch's operating angle. Finally, by connecting the adjusting connection component with the cross-shaped slide, the torch can be easily adjusted in four directions (front, back, left, and right) within a certain range of 0-30mm, ensuring uniform heating of the grinding surface and increasing the flexibility of the torch position adjustment.

[0021] Furthermore, the installation of movable grooves and clamps in the fixing device can increase the clamping structure between the blowtorch and the jaws, reduce the gap between the jaws and the blowtorch, improve the clamping firmness, and increase the safety of adjusting the position and angle of the blowtorch, which is very beneficial to the production of quartz glass weights.

[0022] It should be understood that the general descriptions and details herein are exemplary and illustrative only and are not intended to limit this disclosure.

[0023] This application provides an overview of various implementations or exemplary embodiments of the technology described in this disclosure, and is not a full disclosure of the entire scope or all features of the disclosed technology. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of the torch fixing device for the vertical deposition furnace of this utility model.

[0025] Figure 2 This is a schematic diagram of the cross-shaped slide in the torch fixing device for the vertical deposition furnace of this utility model;

[0026] Figure 3 This is a partial structural diagram of the adjusting and connecting components in the torch fixing device for the vertical deposition furnace of this utility model.

[0027] Figure 4 This is a schematic diagram of the fixing device in the torch fixing device for the vertical deposition furnace of this utility model;

[0028] Figure 5 This is an exploded view of the fixing device in the torch fixing device for the vertical deposition furnace of this utility model.

[0029] Key reference numerals:

[0030] 1. Blowtorch; 2. Quartz ring; 3. Ceramic base; 4. Pressure plate; 5. Fixing device; 6. Adjustment connection assembly; 7. Cross-shaped slide; 8. Slide rail; 9. Drive structure; 10. Horizontal seat; 11. Adjusting shaft; 12. Extension plate; 13. Slider; 14. Rotating structure; 15. Claw; 16. Adhesive plate; 17. Adjusting plate; 18. Clamping plate; 19. Tightening seat; 20. Drive gear; 21. Chain. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the embodiments of this disclosure will be described in more detail below with reference to the accompanying drawings. Note: The described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0032] As attached Figure 1 To be continued Figure 5 As shown in the embodiment of this utility model, a torch fixing device for a vertical deposition furnace is provided. Currently, the preparation of quartz glass mostly adopts hydrogen-oxygen flame chemical vapor deposition synthesis. The working principle is as follows: purified hydrogen gas is used as the driving gas to carry out high-purity silicon tetrachloride vapor and transport it to the hydrogen-oxygen torch 1. When hydrogen and oxygen burn, water vapor is formed. The water vapor and silicon tetrachloride vapor undergo a hydrolysis reaction to form silicon dioxide and hydrogen chloride. The silicon dioxide formed by the hydrolysis reaction is transported by the torch 1 to the rotating base quartz base. The continuous heating by the hydrogen-oxygen flame of the torch 1 causes the silicon dioxide to begin to grow on the base surface in a semi-molten state. As silicon dioxide is continuously deposited, the base gradually grows taller and larger. By controlling a certain temperature and the descent speed of the base, a high-purity synthetic quartz base of a certain height and diameter is finally grown.

[0033] However, the relationship between the temperature inside the equipment cavity, the growth rate of the grinding wheel, and the descent speed of the base grinding wheel must be perfectly matched to ensure uniform growth. During production, the pressure and air velocity in the exhaust pipe significantly affect the temperature inside the cavity, making it difficult to control the stability of this relationship. When the base grinding wheel reaches a certain distance during its descent, the deposition temperature needs to be adjusted to ensure stable product surface growth. The factors controlling the temperature in the deposition area are: blowtorch 1 gas flow rate / blowtorch 1 deposition distance / blowtorch 1 deposition angle / blowtorch 1 deposition point. Among these, adjusting the blowtorch 1 gas flow rate has a significant impact on the edge of the grinding wheel. For example, excessively high temperatures can cause the grinding wheel surface to sag, hindering height growth; excessively low temperatures can result in burrs and large particles growing on the edge of the grinding wheel. Therefore, adjusting the blowtorch 1 deposition position / blowtorch 1 deposition angle / blowtorch 1 deposition distance will yield better results. Therefore, the proposed fixing device 5 of this utility model replaces the original fixed torch 1 mounting base. During the production process, the torch 1 can be adjusted to match the deposition conditions for different deposition time periods. This can solve the abnormal situation caused by uneven temperature and temperature deviation between the middle and the edge after the diameter of the grinding wheel grows to a certain width.

[0034] First, a heat insulation sleeve for the torch 1 to pass through can be installed on the reactor of the vertical reactor as the mounting end of the torch 1. Then, a pressure plate 4 and a fixing device 5 are sequentially fitted around the outside of the torch 1 from bottom to top. The pressure plate 4 partially seals the heat insulation sleeve, and the fixing device 5 is fixed to the torch 1. An adjusting plate 17 is provided on one side of the fixing device 5. The same adjusting connection assembly 6 is connected to one end of the adjusting plate 17 and the pressure plate 4. By adjusting the angle of the automatically adjusting plate 17 driven by the connecting assembly 6, the angle of the fixing device 5 and the torch 1 can be adjusted. Figure 2 As shown, finally, a cross-shaped slide 7 is provided at the lower end of the adjusting connection assembly 6. The cross-shaped slide 7 includes two cross-shaped slide rails 8. The linear motion technology of existing linear guides is applied. The ends of the slide rails 8 are driven by a drive structure 9, such as a motor drive. The upper slide rail 8 is connected to the sliding slider 13 of the lower slide rail 8. The linear motion technology of existing slide rails 8 is applied. The two slide rails 8 can move linearly in their respective directions to adjust the position of the blowtorch 1 in four directions: front, back, left, and right.

[0035] It is worth noting that, for example Figure 4 As shown, in some embodiments, the heat insulation sleeve includes a quartz ring 2 and a ceramic seat 3. The ceramic seat 3 can be a T-shaped structure, and the ceramic seat 3 penetrates through the reactor. The wider end is placed on the outside of the reactor, and the quartz ring 2 is placed at the end of the ceramic seat 3 away from the reactor. By utilizing the ceramic material of the ceramic seat 3 and the quartz material of the quartz ring 2, the blowtorch 1 can be limited while being heat-insulated, increasing the fire resistance of the heat insulation sleeve. Finally, the adjustment range of the blowtorch 1 is limited by the pressure plate 4 attached to the quartz ring 2, and the blowtorch 1 is sealed to a certain extent.

[0036] Furthermore, a gap is left between the pressure plate 4 and the blowtorch 1 to provide room for adjustment of the angle and position of the blowtorch 1.

[0037] When limiting and fixing the blowtorch 1, such as Figure 4 and 5 As shown, in some embodiments, the fixing device 5 can use a bonding plate 16 and a claw 15 fixed to the adjusting plate 17. The torch 1 is located between the two structures. When the torch 1 is installed with the fixing device 5, a tightening seat 19 can be provided at both ends of the claw 15. A bolt is inserted into the bonding plate 16, and then the bolt is threaded through the tightening seat 19 so that the bonding plate 16 presses the torch 1 and limits it between the claw 15 and the bonding plate 16, thereby fixing the position of the torch 1.

[0038] Secondly, in some embodiments, movable slots can be opened on both sides of the claw 15, and a clamping plate 18 can be set on the side of the movable slot near the adjusting plate 17. The clamping plate 18 is made of elastic metal material and has an arc-shaped structure. The two clamping plates 18 are symmetrically positioned between the blowtorch 1 and the claw 15. When the blowtorch 1 is placed between the two clamping plates 18, the elasticity of the two clamping plates 18 can simultaneously squeeze the blowtorch 1 in the middle, restricting the position of the blowtorch 1. Furthermore, the clamping plate 18 is positioned between the claw 15 and the blowtorch 1, which can increase the firmness of the fixing device 5 in limiting the blowtorch 1 and perform horizontal clamping.

[0039] To achieve angle adjustment of blowtorch 1, such as Figure 3 As shown, in some embodiments, the adjusting connection assembly 6 can be fixed to the horizontal seat 10 on the pressure plate 4 and the adjusting shaft 11 fixed to the adjusting plate 17. The horizontal seat 10 and the adjusting shaft 11 are flush. An extension plate 12 is provided on the outer side of both the horizontal seat 10 and the adjusting shaft 11 so that the angle adjusting device is located away from the mounting end of the blowtorch 1. The same slider 13 is provided at the ends of the two extension plates 12 to facilitate the sliding connection between the slider 13 and the cross-shaped slide table 7. By using the adjustment of the two slide rails 8 on the cross-shaped slide table 7 in four directions, the position of the blowtorch 1 can be adjusted in the range of 0-30MM, and the position of the blowtorch 1 can be adjusted in the front, back and left and right directions.

[0040] To facilitate the adjustment of the angle of the torch 1 by the connecting component 6, such as Figure 3As shown, in some embodiments, drive gears 20 can be provided on both the adjusting shaft 11 and the slider 13. The same chain 21 is sleeved on the outside of the two drive gears 20. Then, a rotating structure 14 is provided at the end of the drive gear 20 on the slider 13. The rotating structure 14 can be a structure such as a motor. In order to reduce the influence of high temperature on the rotating structure 14, the rotation of the drive gear 20 by the rotating structure 14 can drive the chain 21 to rotate, thereby driving the adjusting shaft 11 to rotate at an angle, so that the adjusting shaft 11 can rotate within the range of 0-20° relative to the horizontal seat 10, thereby realizing the angle adjustment of the blowtorch 1.

[0041] Of course, the above description is the preferred embodiment of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this utility model, and these improvements and modifications are also considered to be within the protection scope of this utility model.

Claims

1. A torch fixing device for a vertical deposition furnace, comprising a torch (1) penetrating through the reactor, characterized in that, A heat insulation sleeve is provided on the outside of the blowtorch (1) on the reactor. A pressure plate (4) and a fixing device (5) are sequentially provided on the outside of the blowtorch (1) from bottom to top. An adjustment plate (17) is provided on one side of the fixing device (5). One end of the adjustment plate (17) and the pressure plate (4) are connected to the same adjustment connection assembly (6). The adjustment plate (17) is rotatably connected to the adjustment connection assembly (6). A cross-shaped slide (7) is provided at the lower end of the adjustment connection assembly (6) for adjusting the angle and position of the blowtorch (1).

2. The torch fixing device for a vertical deposition furnace as described in claim 1, characterized in that, The heat insulation sleeve includes a quartz ring (2) and a ceramic seat (3). The ceramic seat (3) penetrates the reactor and has a T-shaped structure. The quartz ring (2) is located outside the reactor, and the pressure plate (4) is attached to the quartz ring (2).

3. The torch fixing device for a vertical deposition furnace as described in claim 2, characterized in that, A gap is provided between the pressure plate (4) and the blowtorch (1) for adjusting the angle of the blowtorch (1).

4. The torch fixing device for a vertical deposition furnace as described in claim 1, characterized in that, The fixing device (5) includes a bonding plate (16) and a claw (15) fixed to the adjusting plate (17). Both ends of the claw (15) are provided with tightening seats (19). The tightening seats (19) and the bonding plate (16) are connected by the same bolt for fixing the blowtorch (1).

5. The torch fixing device for a vertical deposition furnace as described in claim 4, characterized in that, Both sides of the claw (15) are provided with movable grooves, and a clamping plate (18) is provided on the side of the movable groove near the adjusting plate (17). The two clamping plates (18) are symmetrically located between the blowtorch (1) and the claw (15).

6. The torch fixing device for a vertical deposition furnace as described in claim 1, characterized in that, The adjustment connection assembly (6) includes a horizontal seat (10) fixed to the pressure plate (4) and an adjustment shaft (11) fixed to the adjustment plate (17). Both the horizontal seat (10) and the adjustment shaft (11) are provided with an extension plate (12) on their outer sides. The ends of the two extension plates (12) are provided with the same slider (13), and the slider (13) is slidably connected to the cross-shaped slide (7) for adjusting the position of the torch (1) in the front, back, left and right directions.

7. The torch fixing device for a vertical deposition furnace as described in claim 6, characterized in that, Both the adjusting shaft (11) and the slider (13) are provided with driving gears (20). The two driving gears (20) are fitted with the same chain (21). The end of the driving gear (20) on the slider (13) is provided with a rotating structure (14). The rotation range of the adjusting shaft (11) relative to the horizontal seat (10) is 0-20°, which is used for the angle adjustment of the blowtorch (1).

8. The torch fixing device for a vertical deposition furnace as described in claim 7, characterized in that, The cross-shaped slide (7) includes two vertically distributed slide rails (8), one of which slides on the other slide rail (8), and the end of the slide rail (8) is provided with a drive structure (9).

Images