A vacuum coating chamber rapid cooling device

Abstract

The utility model relates to a kind of vacuum coating cavity quick cooling device, including vacuum coating cavity, the right side hinged connection sealing door of vacuum coating cavity front end, cooling mounting block is equipped in the left and right sides of vacuum coating cavity, quick connection sliding slot is equipped in the upper and lower sides of the inner wall of cooling mounting block, the inside of cooling mounting block is equipped with split cooling cabin, with the advantages that simple structure, cooling system is maintained easily, effectively protect cavity side wall.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating cavity processing technology, and in particular to a rapid cooling device for vacuum coating cavities. Background Technology

[0002] Vacuum coating chambers, as core equipment for modern material surface treatment, are based on the high pollution and high energy consumption of traditional electroplating and spraying processes. They achieve clean and efficient processing through physical vapor deposition technology in a vacuum environment, covering three major categories: evaporation coating, sputtering coating, and ion plating. The main structure adopts a high-strength polygonal cavity design, with double-opening side doors at both ends, secured with bolts and sealing strips to ensure vacuum stability. The internal dual-set symmetrical hot wire system accelerates the evaporation of the coating material, and the sliding rail-type rotating drum structure, combined with gear drive, enables uniform rotation and coating of the substrate. At the same time, the labyrinth water channel embedded in the outer wall is directly milled into the cavity to form an efficient heat dissipation system. The core technology focuses on temperature field and atmosphere control.

[0003] Chinese utility model patent application number CN202222894738.X discloses a high-precision vacuum coating cavity, belonging to the field of vacuum coating technology. It includes a main body and a side cover plate connected by a rotating shaft. An air inlet pipe and an exhaust pipe are welded to both ends of the main body, respectively. An air inlet fan is installed inside the air inlet pipe, and an exhaust fan is installed inside the exhaust pipe. The airflow directions of the air inlet fan and the exhaust fan are the same. An inner tube and a panel are welded to the side of the inner cavity of the air inlet pipe away from the main body, wherein the panel is disposed between the inner tube and the air inlet fan. The opening of the inner tube faces the inside of the insert plate, and the central end of the insert plate extends away from the inner tube. Three activated carbon plates are installed on the inner wall of the central end of the insert plate. Ventilation holes are provided at both ends of the insert plate. This high-precision vacuum coating chamber forms an air duct that enters from one side and exits from the other for rapid heat dissipation, preventing residual heat on the substrate on the workpiece tray from failing to be removed in time, thus reducing the probability of damage to the substrate due to insufficient heat removal. However, this device has the following problems: firstly, the cooling system is not easy to disassemble and maintain; secondly, the device cannot protect the outer wall of the chamber. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies. By designing a C-shaped cooling mounting block that matches the dimensions of the quick-connect protrusion and quick-connect groove of the split cooling chamber, a sliding snap connection is formed. During operation, installation is completed simply by inserting the quick-connect protrusion into the quick-connect groove, thus solving the technical problem of the cooling system being difficult to disassemble and maintain. Simultaneously, the split cooling chamber, located on the outer wall of the cavity, protects the side wall area of ​​the cavity, addressing the technical problem of the device's inability to protect the outer wall of the cavity.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A rapid cooling device for a vacuum coating cavity includes a vacuum coating cavity, a sealing door hinged to the right front end of the vacuum coating cavity, cooling mounting blocks on both the left and right sides of the vacuum coating cavity, quick-connect sliding grooves on the upper and lower sides of the inner wall of the cooling mounting blocks, and a split cooling chamber inside the cooling mounting blocks.

[0007] As a preferred embodiment, the cooling mounting block is C-shaped overall, with the opening of the C-shape facing backward.

[0008] As a preferred embodiment, the outer side of the split cooling chamber is provided with a copper shell, and quick-connect protrusions are provided at both the upper and lower ends of the outer side of the copper shell. A water outlet is provided on the upper side of the rear end of the outer side of the copper shell, and a water inlet is provided on the lower side of the rear end of the outer side of the copper shell. Metal cooling pipes are evenly distributed inside the copper shell, and the metal cooling pipes are distributed in a serpentine pattern inside the copper shell. The rear flange at the upper end of the metal cooling pipe is connected to the water outlet, and the rear flange at the lower end of the metal cooling pipe is connected to the water inlet.

[0009] As a preferred embodiment, the quick-connect protrusion is adapted to the size of the quick-connect groove.

[0010] As a preferred embodiment, the metal cooling pipe is tightly attached to the inner wall of the copper shell.

[0011] As another preferred embodiment, the outer wall of the vacuum coating cavity is provided with copper alloy layers on the left and right sides.

[0012] The beneficial effects of this utility model are:

[0013] (1) In this utility model, the device sets up separate cooling chambers on the left and right sides of the vacuum coating cavity. Cooling liquid is introduced into the metal cooling pipe through the water inlet. After the cooling liquid absorbs heat in the metal cooling pipe, it flows out from the water outlet. The metal cooling pipe is evenly distributed and closely attached to the inner wall of the copper shell. Copper has good thermal conductivity and can quickly conduct the heat of the vacuum coating cavity to the cooling liquid. At the same time, the outer wall of the vacuum coating cavity is provided with copper alloy layer on the left and right sides, which further enhances the heat conduction efficiency, effectively shortens the cooling time of the vacuum coating cavity, and improves the production efficiency.

[0014] (2) In this utility model, quick-connect sliding grooves are provided on the upper and lower sides of the inner wall of the cooling mounting block, and quick-connect protrusions are provided on the upper and lower ends of the outer side of the split cooling chamber. The quick-connect protrusions are matched with the size of the quick-connect sliding grooves. This quick-connect structure design allows the split cooling chamber to be easily installed into the cooling mounting block without complicated tools and operations. When the split cooling chamber needs to be maintained or replaced, it can also be quickly disassembled without the need to shut down the entire device, thus reducing maintenance time and costs.

[0015] (3) In this utility model, by setting the cooling mounting block with a C-shaped design and an opening facing backward, after installing the split cooling chamber inside the cooling mounting block, an overall closed force-bearing structure can be formed, which effectively protects the side wall of the vacuum coating cavity and forms a cavity side wall protective layer.

[0016] In summary, this device has the advantages of simple structure, easy maintenance of the cooling system, and effective protection of the cavity sidewalls, especially in the field of vacuum coating cavity processing technology. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0019] Figure 2 This is a schematic diagram of the cooling mounting block and the side wall structure of the vacuum coating cavity in this utility model.

[0020] Figure 3 This is a schematic diagram of the split cooling chamber structure in this utility model. Detailed Implementation

[0021] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.

[0022] Example 1

[0023] like Figures 1 to 3 As shown, this utility model provides a rapid cooling device for a vacuum coating chamber, including a vacuum coating chamber 1. The vacuum coating chamber 1 has a vacuum pump interface at its rear end. The vacuum pump interface is used to extract air from inside the vacuum coating chamber 1 to provide a working environment for vacuum coating. The vacuum coating chamber 1 is the core component for vacuum coating operations and generates a large amount of heat during the coating process. The front right side of the vacuum coating chamber 1 is hinged to a sealing door 2. The sealing door 2 ensures the airtightness of the vacuum coating chamber 1 during the coating process, preventing external air from entering and affecting the coating effect. When it is necessary to operate or maintain the inside of the chamber, the sealing door 2 can be opened through the hinge. Cooling mounting blocks 11 are provided on both the left and right sides of the vacuum coating chamber 1. The upper and lower sides of the inner wall of the cooling mounting blocks 11 are provided with quick-connect sliding grooves 111. The cooling mounting blocks 11 have a split cooling chamber 3 inside.

[0024] Furthermore, the cooling mounting block 11 is C-shaped with the C-shaped opening facing backward. This structure allows the cooling mounting block 11 to form a closed, integrated load-bearing structure after the split cooling chamber 3 is installed. The quick-connect slide 111 cooperates with the quick-connect protrusions 32 at the upper and lower ends of the outer side of the split cooling chamber 3, ensuring that the split cooling chamber 3 can be installed securely and conveniently in the cooling mounting block 11. When maintenance or replacement of the split cooling chamber 3 is required, it can also be quickly disassembled without shutting down the entire device, thus reducing maintenance time and costs.

[0025] Furthermore, the outer side of the split cooling chamber 3 is provided with a copper shell 31. The copper shell 31 has excellent thermal conductivity, which can quickly absorb the heat conducted from the vacuum coating chamber 1 through the copper alloy layer 12, and provide a relatively enclosed space for the internal metal cooling pipe 35 to reduce heat loss. The upper and lower ends of the outer side of the copper shell 31 are provided with quick-connect protrusions 32. The upper rear end of the outer side of the copper shell 31 is provided with a water outlet 33. The water outlet 33 is connected to an external coolant recovery device and a solenoid valve through a pipe. The coolant recovery device is equipped with a cooling compressor. The coolant that has absorbed heat flows out from the water outlet 33. The coolant recovery device cools the outflowing high-temperature coolant so that it can be returned to the coolant tank for recycling. The lower rear end of the outer side of the copper shell 31 is provided with a water inlet 34. The water inlet 34 is connected to an external coolant supply water through a pipe. The device typically includes a coolant storage tank, a water pump, and other components. The water pump draws coolant from the coolant tank and delivers it through a pipe to the inlet 34, providing a continuous coolant supply to the split cooling chamber 3. The coolant enters the metal cooling pipes 35 from the inlet 34. The metal cooling pipes 35 are evenly distributed inside the copper shell 31, and the metal cooling pipes 35 are arranged in a serpentine pattern inside the copper shell 31. The upper rear flange of the metal cooling pipe 35 is connected to the outlet 33, and the lower rear flange of the metal cooling pipe 35 is connected to the inlet 34. After the coolant enters the metal cooling pipe 35 from the inlet 34, it absorbs the heat conducted from the vacuum coating chamber 1 through the copper shell 31 during its flow inside the pipe. Because the metal cooling pipes 35 are evenly distributed, they can fully contact the copper shell 31, ensuring efficient heat absorption. The coolant, after absorbing heat, flows out from the outlet 33, completing one cooling cycle.

[0026] Furthermore, the quick-connect protrusion 32 is adapted to the quick-connect slide 111 in size, ensuring that the split cooling chamber 3 can be installed stably and conveniently in the cooling mounting block 11. During installation, simply align the quick-connect protrusion 32 with the quick-connect slide 111 and slide it in to complete the installation of the split cooling chamber 3; disassembly is done in reverse, without the need for complicated tools and operations.

[0027] Furthermore, the metal cooling pipe 35 is tightly attached to the inner wall of the copper shell 31.

[0028] Furthermore, the outer walls of the vacuum coating chamber 1 are provided with copper alloy layers 12 on the left and right sides. Copper alloy has good thermal conductivity, and the heat generated during the coating process will be quickly conducted to the copper alloy layer 12, providing a good heat transfer basis for the subsequent cooling process.

[0029] Working process: First, when the vacuum coating chamber 1 performs vacuum coating on the internal workpiece, the substrate needs to be heated at high temperature. The heating process causes the internal temperature of the vacuum chamber to be too high. At this time, the heat generated during the coating process of the vacuum coating chamber 1 will be quickly conducted to the copper alloy layer 12. The copper alloy layer 12 efficiently conducts the heat to the copper shell 31. The coolant is transported to the water inlet 34 of the split cooling chamber through the pipeline by the water pump. The heat transferred is continuously absorbed by the coolant in the metal cooling pipe 35. Then, the high-temperature coolant after absorbing heat flows out from the water outlet 33 and enters the coolant recovery device. The coolant is circulated in sequence to achieve cooling of the inside of the vacuum coating chamber 1.

[0030] Secondly, the split cooling chamber 3 slides into the quick-connect groove 111 of the cooling mounting block 11 via the quick-connect protrusion 32, forming a closed force-bearing structure. This strengthens the protection of the chamber sidewalls and facilitates disassembly and maintenance. When maintenance or replacement of the split cooling chamber 3 is required, it can be quickly disassembled without shutting down the entire device, reducing maintenance time and costs.

[0031] In the description of this utility model, it should be understood that the terms "front and back", "left and right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0032] Of course, those skilled in the art should understand that the term "a" should be understood as "at least one" or "one or more". That is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple. The term "a" should not be understood as a limitation on the quantity.

[0033] The above description is merely a preferred embodiment of this utility model, but the scope of protection of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art under the technical guidance of this utility model should be included within the scope of protection of this utility model. Therefore, the scope of protection of this utility model should be determined by the scope of the claims.

Claims

1. A rapid cooling device for a vacuum coating cavity, characterized in that: It includes a vacuum coating chamber (1), a sealing door (2) is hinged to the right front end of the vacuum coating chamber (1), cooling mounting blocks (11) are provided on both the left and right sides of the vacuum coating chamber (1), quick-connect sliding grooves (111) are provided on the upper and lower sides of the inner wall of the cooling mounting block (11), and a split cooling chamber (3) is provided inside the cooling mounting block (11).

2. The rapid cooling device for a vacuum coating cavity according to claim 1, characterized in that, The cooling mounting block (11) is C-shaped in general, with the opening of the C-shape facing backward.

3. The rapid cooling device for a vacuum coating cavity according to claim 1, characterized in that, The split cooling chamber (3) is provided with a copper shell (31) on the outside. The upper and lower ends of the copper shell (31) are provided with quick-connect protrusions (32). The upper side of the rear end of the copper shell (31) is provided with a water outlet (33). The lower side of the rear end of the copper shell (31) is provided with a water inlet (34). Metal cooling pipes (35) are evenly distributed inside the copper shell (31). The metal cooling pipes (35) are distributed in a serpentine shape inside the copper shell (31). The rear flange of the upper end of the metal cooling pipe (35) is connected to the water outlet (33). The rear flange of the lower end of the metal cooling pipe (35) is connected to the water inlet (34).

4. The rapid cooling device for a vacuum coating cavity according to claim 3, characterized in that, The quick-connect protrusion (32) is sized to match the quick-connect groove (111).

5. The rapid cooling device for a vacuum coating cavity according to claim 3, characterized in that, The metal cooling pipe (35) is in close contact with the inner wall of the copper shell (31).

6. The rapid cooling device for a vacuum coating cavity according to claim 1, characterized in that, The outer wall of the vacuum coating cavity (1) is provided with copper alloy layers (12) on the left and right sides.

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