High-temperature atmosphere sintering furnace for ito target material

Abstract

This utility model discloses a high-temperature atmosphere sintering furnace for ITO target materials, including a furnace chamber assembly and a heating assembly. The furnace chamber assembly includes a furnace shell. The heating assembly includes multiple insulating rods that are attached to the furnace shell and distributed along the axial direction of the furnace shell, and the insulating rods are fixedly connected to the furnace shell. The heating assembly also includes multiple insulating rings that are attached to the insulating rods and distributed along the circumferential direction of the furnace shell, and the insulating rings are fixedly connected to the insulating rods. The beneficial effect of the high-temperature atmosphere sintering furnace for ITO target materials disclosed in this utility model is that by alternately wrapping the strip-shaped heating elements around the insulating terminals and distributing them evenly, the temperature uniformity within the furnace chamber is improved, and the heating elements are avoided from being densely packed on the inner wall of the furnace shell, thus saving material consumption.

Description

Technical Field

[0001] This utility model belongs to the field of target material processing, specifically relating to a high-temperature atmosphere sintering furnace for ITO target materials. Background Technology

[0002] The utility model patent with publication number CN207365687U and subject name "ITO target sintering furnace" has IPC classification number F27B5 / 04. Its technical solution discloses "a furnace frame consisting of a lower support and an upper support, with a furnace body mounted on the upper support and an insulation layer installed inside the furnace body; a positioning guide rail is installed on the lower support of the furnace frame, and a lifting frame that moves up and down on the positioning guide rail is installed in the furnace frame between the positioning guide rails for placing the ITO target blank to be sintered; the furnace body is also equipped with an atmosphere control system for introducing oxygen into the furnace chamber, a heating control system for controlling the heating temperature inside the furnace chamber, and a main controller for coordinating the operation of the atmosphere control system and the heating control system."

[0003] Therefore, the above utility model patents have disclosed one technical solution for ITO target sintering furnaces. However, the technical solutions disclosed in these utility model patents focus on rapidly raising or lowering the temperature inside the furnace, without further addressing issues such as improving temperature uniformity within the furnace and saving material usage, thus requiring further improvement. Utility Model Content

[0004] This utility model addresses the shortcomings of the existing technology by providing a high-temperature atmosphere sintering furnace for ITO target materials.

[0005] This utility model adopts the following technical solution: a high-temperature atmosphere sintering furnace for ITO target materials, comprising a furnace chamber assembly and a heating assembly, wherein:

[0006] The furnace assembly includes the furnace shell;

[0007] The heating element includes multiple insulating rods that are attached to the furnace shell and distributed along the axial direction of the furnace shell, and the insulating rods are fixedly connected to the furnace shell;

[0008] The heating element also includes multiple insulating rings, which are attached to the insulating rod and distributed along the circumferential direction of the furnace shell. The insulating rings are fixedly connected to the insulating rod.

[0009] The heating element also includes multiple insulating terminals, which are evenly distributed along the circumferential direction of the insulating ring. The insulating terminals are fixedly connected to the insulating ring. A strip heating element is provided between two adjacent insulating rings. The strip heating element is connected end to end and alternately wraps around the insulating terminals of two adjacent insulating rings.

[0010] As a preferred technical solution of the above technical solutions, the insulating terminal is provided with a positioning rod and a first end and a second end sleeved and fixedly connected to the positioning rod. The first end and the second end are integrally formed, and there is a groove between the first end and the second end. The strip heating body is embedded in the groove.

[0011] As a preferred technical solution to the above technical solutions, the strip heating element contains an embedded resistance wire.

[0012] As a preferred technical solution to the above technical solutions, the resistance wire is made of silicon molybdenum material.

[0013] As a preferred technical solution to the above technical solutions, the ITO target high-temperature atmosphere sintering furnace also includes an exhaust assembly, which is located at the top of the furnace shell and connected to the furnace shell.

[0014] The high-temperature atmosphere sintering furnace for ITO sputtering targets disclosed in this utility model has the following advantages: by alternating and uniformly distributing strip heating elements around the insulating terminals, the temperature uniformity within the furnace chamber is improved, avoiding the need for heating elements to be densely packed on the inner wall of the furnace shell, thus saving material usage. Furthermore, the insulating terminals have grooves to facilitate the fixing and tensioning of the strip heating elements, ensuring structural stability and ease of installation. In addition, the strip heating elements using silicon molybdenum resistance wire can stably achieve a high-temperature environment of 1700℃, meeting the requirements for ITO sputtering target sintering. Attached Figure Description

[0015] Figure 1 This is a perspective view of this application.

[0016] Figure 2 This is a three-dimensional view from another perspective of this application.

[0017] Figure 3 This is the main view of this application.

[0018] Figure 4 This is a side view of this application.

[0019] Figure 5 Is Figure 1 A schematic diagram of the structure with a partial section on the base.

[0020] Figure 6 yes Figure 5 A magnified view of a portion of region A.

[0021] Figure 7 This is a perspective view of the heating component of this application.

[0022] Figure 8 yes Figure 7 A magnified view of a portion of region B.

[0023] The reference numerals in the attached drawings include: 100-furnace assembly; 110-furnace shell; 200-exhaust assembly; 300-heating assembly; 310-insulating rod;

[0024] 320 - Insulating ring; 330 - Strip heating element; 340 - Insulating terminal; 341 - Positioning rod; 342 - First end; 343 - Second end; 344 - Groove. Detailed Implementation

[0025] This utility model discloses a high-temperature atmosphere sintering furnace for ITO target materials. The following description, in conjunction with a preferred embodiment (Example 1), is shown in the accompanying drawings. Figures 1 to 8 The specific embodiments of this utility model will be further described below.

[0026] See attached diagram. Figures 1 to 8 , Figures 1 to 4 The high-temperature atmosphere sintering furnace for ITO targets is shown from different perspectives. Figure 5 The internal structure of the high-temperature atmosphere sintering furnace for ITO targets is shown. Figure 6 The internal partial structure of the ITO target high-temperature atmosphere sintering furnace is shown. Figure 7 The heating element is shown. Figure 8 A partial structure of the heating component is shown.

[0027] Example 1.

[0028] Preferably, the ITO target high-temperature atmosphere sintering furnace includes a furnace chamber assembly 100 and a heating assembly 300, wherein:

[0029] The furnace assembly 100 includes a furnace shell 110;

[0030] The heating element 300 includes a plurality of insulating rods 310, which are attached to the inner wall of the furnace shell 100 and distributed along the axial direction of the furnace shell 100. The insulating rods 310 are fixedly connected to the inner wall of the furnace shell 110.

[0031] The heating element 300 also includes a plurality of insulating rings 320, which are attached to the insulating rod 310 (on the side away from the furnace shell 100) and distributed along the circumferential direction of the furnace shell 110. The insulating rings 320 are fixedly connected to the insulating rod 310.

[0032] The heating element 300 also includes multiple insulating terminals 340. The insulating terminals 340 are evenly distributed along the circumferential direction of the insulating ring 320. The insulating terminals 340 are fixedly connected to the insulating ring 320. A strip heating element 330 is provided between two adjacent insulating rings 320. The strip heating element 330 is connected end to end and alternately wraps around the insulating terminals 340 of two adjacent insulating rings 320. This makes the strip heating element 330 as evenly distributed as possible in the area near the inner wall of the furnace shell 100, so that the temperature rise inside the furnace shell 100 is as consistent as possible. At the same time, it avoids the heating element (not necessarily the strip heating element 330) being densely packed on the inner wall of the furnace shell 100, thereby saving the total amount of heating element used.

[0033] It is worth mentioning that "the strip heating element 330 is connected end to end and alternately wraps around the insulating terminals 340 of two adjacent insulating rings 320" means that, assuming the two adjacent insulating rings 320 are an upper insulating ring and a lower insulating ring, the insulating terminal 340 located on the upper insulating ring is the upper insulating terminal, and the insulating terminal 340 located on the lower insulating ring is the lower insulating terminal, then the strip heating element 330 located between the upper insulating ring and the lower insulating ring first wraps around any one of the upper insulating terminals of the upper insulating ring, and then extends to the lower insulating terminal located on the lower insulating ring that is axially adjacent to the upper insulating terminal, until the strip heating element 330 wraps around the lower insulating terminal, while the strip heating element 330 is kept taut between the upper insulating terminal and the lower insulating terminal; and so on.

[0034] The insulating terminal 340 is provided with a positioning rod 341 and a first end 342 and a second end 343 sleeved and fixedly connected to the positioning rod 341. The first end 342 and the second end 343 are integrally formed, and a groove 344 is provided between the first end 342 and the second end 343 so that the strip heating element 330 is embedded in the groove 344.

[0035] The strip heating element 330 has an embedded resistance wire to provide a high-temperature environment inside the furnace shell 100.

[0036] The resistance wire is made of silicon molybdenum material to provide the high-temperature environment (e.g., 1700°C) required for the preparation of the ITO target.

[0037] The ITO target high-temperature atmosphere sintering furnace also includes an exhaust assembly 200, which is located on top of the furnace shell 110 and docked with the furnace shell 110.

[0038] It is worth mentioning that the specific structure and other technical features of the exhaust component 200 involved in this utility model patent application should be regarded as prior art. The specific structure, working principle and possible control methods and spatial arrangement of these technical features can be conventionally selected in the field and should not be regarded as the inventive point of this utility model patent. This utility model patent will not elaborate further.

[0039] For those skilled in the art, modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A high-temperature atmosphere sintering furnace for ITO target materials, characterized in that, Includes furnace components and heating components, wherein: The furnace assembly includes the furnace shell; The heating element includes multiple insulating rods that are attached to the furnace shell and distributed along the axial direction of the furnace shell, and the insulating rods are fixedly connected to the furnace shell; The heating element also includes multiple insulating rings, which are attached to the insulating rod and distributed along the circumferential direction of the furnace shell. The insulating rings are fixedly connected to the insulating rod. The heating element also includes multiple insulating terminals, which are evenly distributed along the circumferential direction of the insulating ring. The insulating terminals are fixedly connected to the insulating ring. A strip heating element is provided between two adjacent insulating rings. The strip heating element is connected end to end and alternately wraps around the insulating terminals of two adjacent insulating rings.

2. The high-temperature atmosphere sintering furnace for ITO target material according to claim 1, characterized in that, The insulating terminal is provided with a positioning rod and sleeved and fixedly connected to the first end and the second end of the positioning rod. The first end and the second end are integrally formed, and there is a groove between the first end and the second end. The strip heating body is embedded in the groove.

3. The high-temperature atmosphere sintering furnace for ITO sputtering targets according to claim 1, characterized in that, The strip heating element contains an embedded resistance wire.

4. The high-temperature atmosphere sintering furnace for ITO sputtering targets according to claim 3, characterized in that, The resistance wire is made of silicon molybdenum material.

5. The high-temperature atmosphere sintering furnace for ITO sputtering targets according to claim 1, characterized in that, The ITO target high-temperature atmosphere sintering furnace also includes an exhaust assembly, which is located at the top of the furnace shell and connected to the furnace shell.

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