Silicon rod diameter detection device and silicon rod conveying system

Abstract

The utility model provides a kind of silicon rod diameter detection device and silicon rod conveying system, silicon rod diameter detection device includes: height sensor component, it is set in the one side of silicon rod transmission path, height sensor component is configured to obtain the height information of silicon rod;At least one group of moving components, each group of moving components includes two moving devices, two moving devices are respectively set in the two sides of silicon rod transmission path, at least one group of moving components is set in the downstream direction of height sensor component, moving device is configured to output end moves along vertical direction;At least one group of ranging components, each group of ranging components includes two ranging sensors, wherein, one ranging sensor is set on each moving device, ranging sensor is configured to obtain the horizontal distance between it and silicon rod at its current moving height.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic material testing, and in particular to a silicon rod diameter testing device and a silicon rod conveying system. Background Technology

[0002] In recent years, fueled by rapid industrial development, favorable policies, and technological advancements, the chip industry has experienced explosive growth, maintaining a high-speed growth rate. Currently, most silicon ingot inspection processes require manual measurement using calipers. However, manual inspection is prone to accidents due to the sharp edges of the silicon ingots, which can easily cause cuts and injuries. Furthermore, manual measurement has a relatively large margin of error. With technological advancements, chip sizes are increasingly larger, and production capacity is ever-increasing. Manual inspection increases safety risks, the number of workers required, and production costs. Therefore, the emergence of automated silicon ingot diameter detection systems is essential.

[0003] Most existing silicon rod diameter detection methods on the market have complex structures, use expensive testing instruments, and can only perform diameter detection, meeting the requirements of a single operation. Therefore, there is an urgent need to develop a more convenient automatic silicon rod diameter detection method to reduce equipment costs and solve production problems. Utility Model Content

[0004] To address the aforementioned technical problems, this utility model provides a silicon rod diameter detection device and a silicon rod conveying system, which can quickly and accurately detect the diameter of silicon rods without direct contact with the silicon rods and without damaging them.

[0005] According to one aspect of the inventive concept of this utility model, a silicon rod diameter detection device is provided, comprising:

[0006] A height sensor assembly is disposed on one side of the silicon rod transport path, and the height sensor assembly is configured to acquire the height information of the silicon rod;

[0007] At least one set of moving components, each set of moving components including two moving devices, the two moving devices being respectively disposed on both sides of the silicon rod transport path, at least one set of moving components being disposed at intervals in the downstream direction of the height sensor assembly, the moving devices being configured to move their output ends in the vertical direction;

[0008] At least one set of ranging components, each set of ranging components including two ranging sensors, wherein one of the ranging sensors is provided on each of the mobile devices, and the ranging sensor is configured to obtain the horizontal distance between itself and the silicon rod at its current moving height.

[0009] According to some embodiments of the present invention, the height sensor assembly includes multiple sets of infrared transmitters and infrared receivers arranged at intervals along the vertical direction, with each set of infrared transmitters and infrared receivers respectively arranged on both sides of the silicon rod transmission path.

[0010] According to some embodiments of the present invention, the moving device includes an electric cylinder, a pneumatic cylinder, and a hydraulic cylinder, and the output end of the moving device is suitable for mounting and fixing the ranging sensor.

[0011] According to some embodiments of the present invention, the ranging sensor includes any of the following: laser ranging sensor, ultrasonic ranging sensor, infrared ranging sensor, radar ranging sensor, and visual ranging sensor.

[0012] According to some embodiments of this utility model, the number of the moving components is 2, 3 or 4 groups.

[0013] According to some embodiments of the present invention, the silicon rod diameter detection device further includes:

[0014] A tray suitable for carrying and securing the silicon rod, the tray being configured to move the silicon rod under the drive of the conveyor line.

[0015] According to some embodiments of the present invention, the width of the tray is less than or equal to the width of the conveyor line.

[0016] According to some embodiments of the present invention, the silicon rod diameter detection device further includes a correction component, the correction component comprising:

[0017] The connecting rod is hinged at one end to the bottom of the groove;

[0018] The telescopic component is hinged at one end to the bottom of the groove and at the other end to the connecting rod;

[0019] A roller or omnidirectional ball is rotatably mounted at the other end of the linkage;

[0020] The correction component is located downstream of one or more of the ranging sensors.

[0021] According to some embodiments of the present invention, the diameter detection device further includes:

[0022] Side plates are disposed on both sides of the conveyor line along the transmission direction of the conveyor line. The inner sidewalls of the two side plates are recessed inward to form grooves extending along the transmission path. The grooves are suitable for concealing the alignment component.

[0023] According to another aspect of the inventive concept of this utility model, a silicon rod conveying system is also provided, including the silicon rod diameter detection device as described in the previous embodiment.

[0024] According to the silicon rod diameter detection device and silicon rod conveying system of the present invention, the approximate range of the height (i.e., diameter) of the silicon rod is obtained by using a height sensor assembly, which guides the adjustment of the moving height of the first set of moving components, and the moving height of the second set of moving components is adjusted by using the data obtained by the previous set of ranging components. Through multiple iterative adjustments, the height of the ranging sensor is made to be approximately consistent with the height of the silicon rod axis, thereby reducing the influence of the curved side of the silicon rod on the diameter measurement and thus improving the measurement accuracy. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the structure of a silicon rod diameter detection device according to an exemplary embodiment of the present invention.

[0026] Figure 2 This is a schematic diagram illustrating the working principle of a silicon rod diameter detection device for measuring diameter according to an exemplary embodiment of the present invention.

[0027] Figure 3 This is a schematic diagram of the measurement results of the first set of ranging components according to an exemplary embodiment of the present invention.

[0028] Figure 4 This is a schematic diagram of the measurement results of the second set of ranging components according to an exemplary embodiment of the present invention.

[0029] Figure 5 This is a schematic diagram of the measurement results of the third set of ranging components according to an exemplary embodiment of the present invention.

[0030] Figure 6 This is a top view of a silicon rod diameter detection device according to an exemplary embodiment of the present invention.

[0031] Figure 7 yes Figure 6 The diagram shows a partial enlarged view of the silicon rod diameter detection device.

[0032] Figure 8 yes Figure 6 The diagram shows a structural schematic of the silicon rod diameter detection device from another perspective.

[0033] The meanings of the reference numerals in the above figures are as follows:

[0034] 1. Height sensor assembly; 2. Moving device; 3. Distance sensor; 4. Conveyor line; 41. Conveyor line body; 42. Side plate; 43. Connecting rod; 44. Telescopic component; 45. Roller; 5. Fixed bracket; 6. Pallet; 7. Fixed base; 8. Silicon rod. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0036] However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In the following detailed description, numerous specific details are set forth to provide a comprehensive understanding of the embodiments of the present invention for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known technologies are omitted in the following description to avoid unnecessarily obscuring the concepts of the present invention.

[0037] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. The term "comprising" as used herein indicates the presence of features, steps, or operations, but does not exclude the presence or addition of one or more other features.

[0038] When using expressions such as "at least one of A, B, and C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, and C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.). Similarly, when using expressions such as "at least one of A, B, or C," the expression should generally be interpreted in accordance with the meaning commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, or C" should include, but is not limited to, systems having A alone, having B alone, having C alone, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.).

[0039] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0040] In related technologies, silicon rods are often cylindrical and transported between processes using conveyor devices. In the silicon rod inspection process, the diameter of the rod is a crucial parameter. Conventional inspection methods involve manual measurement, such as using calipers. This poses safety hazards, as the sharp edges of the rod can easily injure inspectors. Furthermore, inspection must be performed while the rod is stationary, resulting in low efficiency. While some technologies utilize distance sensors, these sensors are mostly used at fixed stations. The misalignment between the distance sensor and the rod's central axis, along with the curvature of the rod's side surface, can affect the measurement results, leading to deviations in the final diameter measurement.

[0041] Figure 1 This is a schematic diagram of the structure of a silicon rod diameter detection device according to an exemplary embodiment of the present invention. Figure 2 This is a schematic diagram illustrating the working principle of a silicon rod diameter detection device for measuring diameter according to an exemplary embodiment of the present invention.

[0042] To solve the above-mentioned technical problems, according to one aspect of the inventive concept of this utility model, such as... Figure 1 and Figure 2 As shown, a silicon rod diameter detection device is provided, including: a height sensor assembly 1, a moving assembly, and a ranging assembly. The height sensor assembly 1 is disposed on both sides of the silicon rod 8's transmission path and is configured to acquire height information of the silicon rod 8. At least one set of moving assemblies, each set including two moving devices 2, are respectively disposed on both sides of the silicon rod 8's transmission path. The at least one set of moving assemblies is spaced downstream of the height sensor assembly 1, and the moving devices are configured to move vertically at their output ends. At least one set of ranging assemblies, each set including two ranging sensors 3, wherein one ranging sensor 3 is disposed on the output end of each moving device 2, and the ranging sensor 3 is configured to acquire the horizontal distance between itself and the silicon rod 8 at its current moving height. The moving height of the moving assembly adjacent to the height sensor assembly 1 matches the height information, and the horizontal distance acquired by each set of ranging assemblies matches the moving height of its downstream adjacent moving assembly.

[0043] In this embodiment, the height sensor assembly 1 is used to obtain the approximate range of the height (i.e., diameter) of the silicon rod 8, which guides the adjustment of the moving height of the first set of moving components. The data obtained by the previous set of ranging components is used to adjust the moving height of the next set of moving components. Through multiple iterative adjustments, the height of the ranging sensor 3 is made to be approximately consistent with the height of the axis of the silicon rod 8, thereby reducing the influence of the curved side of the silicon rod 8 on the diameter measurement and improving the measurement accuracy.

[0044] According to some embodiments of this utility model, it should be noted that the upstream, upstream segment, upstream direction, downstream, downstream segment, and downstream direction involved in the embodiments of this application are all based on the direction of the silicon rod being transported by the conveyor line. That is, for two relative positions, the position that the silicon rod passes through first is the upstream (upstream direction, upstream end) of the position that it passes through later. The vertical direction refers to the height direction, that is, the direction perpendicular to the ground.

[0045] According to some embodiments of the present invention, the silicon rod 8 diameter detection device further includes a conveyor line 4, which is suitable for conveying the silicon rod 8, wherein the height sensor assembly 1 is disposed in the upstream section of the conveyor line 4.

[0046] According to some embodiments of the present invention, the conveyor line 4 can be a belt conveyor line 4, a chain conveyor line or a roller conveyor line.

[0047] In this embodiment, the diameter of silicon rod 8 can be measured during the transfer between the two processes without affecting the normal transfer of silicon rod 8. It is not necessary to keep silicon rod 8 stationary, thus improving work efficiency.

[0048] According to some embodiments of this utility model, the height sensor assembly 1 can be set at any position other than the tail end and inflection point of the conveyor line 4, as long as there is enough space in its downstream area to install the moving assembly. Based on this, the silicon rod diameter detection device provided in this application has high adaptability and can meet the needs of various production lines.

[0049] According to some embodiments of this utility model, such as Figure 1 As shown, when the front end of the silicon rod 8 passes through the height sensor assembly 1, the height sensor assembly 1 obtains approximate height information of the silicon rod. This height information may have a certain error compared to the actual height (diameter) of the silicon rod. This height information is used to guide the first set of moving components downstream of the height sensor assembly 1. The diameter information (i.e., the new height information) measured by the first set of moving components is used to guide the second set of moving components downstream.

[0050] According to some embodiments of this utility model, such as Figure 2 As shown, a moving device 2 is provided on both sides of the silicon rod 8. A distance sensor 3 is provided on each moving device 2. The distance sensors 3 on the left and right sides of the silicon rod measure the distances from them to the surface of the silicon rod 8, which are l1 and l2 respectively. The distance between the two distance sensors 3 is a fixed value L (known). Then the diameter of the silicon rod D = L - (l1 + l2).

[0051] The solution of this application will be further described below with reference to a specific embodiment. It should be noted that this specific embodiment is only for the purpose of enabling those skilled in the art to better understand the solution of this application, and should not be construed as an inappropriate limitation of this application.

[0052] Figure 3 This is a schematic diagram showing the measurement results of the first set of ranging components according to an exemplary embodiment of the present invention. Figure 4 This is a schematic diagram of the measurement results of the second set of ranging components according to an exemplary embodiment of the present invention. Figure 5 This is a schematic diagram of the measurement results of the third set of ranging components according to an exemplary embodiment of the present invention.

[0053] Example 1

[0054] Assuming, such as Figures 3 to 5 As shown, the silicon rod has a diameter of approximately 100 mm. A height sensor is installed at the upstream end of the conveyor line, and a first set of ranging components, a second set of ranging components, and a third set of ranging components are sequentially arranged at intervals downstream of the height sensor.

[0055] The height sensor measures the silicon rod height to be 80mm. The output stroke of the moving device of the first set of ranging components is adjusted so that the lens of the first set of ranging components is at a height of 40mm for measurement. The first estimated diameter of the silicon rod, D = 97.98mm, is calculated using D = L - (l1 + l2). Figure 3 (As shown).

[0056] Adjust the output stroke of the moving device of the second set of ranging components so that the lens height of the second set of ranging components is at a height of 48.99mm for measurement. The first estimated diameter of the silicon rod, D = 99.98mm, is obtained by calculating D = L - (l1 + l2). Figure 4 (As shown).

[0057] Adjust the output stroke of the moving device of the first set of ranging components so that the lens height of the first set of ranging components is at a height of 49.99mm for measurement. The first estimated value of the silicon rod diameter D = 100mm is obtained by calculating D = L - (l1 + l2) (the actual measured value is 99.999998mm ≈ 100mm).

[0058] As can be seen from the above embodiments, by using a height sensor in conjunction with three sets of distance sensors, the diameter of the silicon rod can be obtained automatically, accurately and efficiently, and the influence of the curved surface of the silicon rod side on the measurement results can be eliminated.

[0059] It should be noted that the above technical solution only requires the use of a comparator to determine the direction of the movement, and the output of the previous set of sensors to directly drive the next set of moving devices 2. No complex calculation circuits are needed, and no software development is involved. When the difference in estimated values ​​obtained by two adjacent sets of ranging components is less than a preset threshold, the latter estimated value is output as the diameter of the silicon rod, or the estimated value output by the last set of ranging components is output. This is transmitted to the MES system via electrical control methods such as a PLC, eliminating the need for human intervention, reducing the workload and difficulty for personnel, and improving work efficiency.

[0060] According to some embodiments of the present invention, the silicon rod diameter detection device further includes a controller, which is connected to the silicon rod diameter detection device, the moving component, and the ranging component, respectively, and controls the relevant operations of the moving component through the controller.

[0061] The technical solution of this application can be implemented with only simple circuitry and does not involve any software improvements. For example, the controller described above includes a signal acquisition module, an adder unit, a subtractor unit, and an action control unit.

[0062] The signal acquisition module receives analog signals (such as voltage or current) from the altitude sensor and the distance sensor 3. It includes: an analog front-end conditioning circuit to amplify and filter the sensor outputs (e.g., RC low-pass filtering to eliminate noise); and an ADC (analog-to-digital converter) to convert the analog signals into digital signals (e.g., a 12-bit ADC with a 5V reference voltage).

[0063] The adder and subtractor units calculate the estimated diameter based on the data collected by the two ranging sensors 3.

[0064] The motion control unit controls the output stroke of the moving device 2 based on the diameter estimate calculated by the adder unit and the subtractor unit.

[0065] According to some embodiments of the present invention, the height sensor assembly 1 includes multiple sets of infrared transmitters and infrared receivers arranged at intervals along the vertical direction, with each set of infrared transmitters and infrared receivers respectively arranged on both sides of the silicon rod transmission path.

[0066] In this embodiment, optionally, upright columns can be provided on both sides of the conveyor line 4, and infrared transmitters and receivers can be provided on the two columns respectively. Alternatively, a portal frame can be provided, with infrared transmitters and receivers provided on the two uprights of the portal frame respectively. Further optionally, in the vertical direction, the infrared transmitters or receivers are equidistantly arranged at certain intervals, for example, the distance between two adjacent infrared transmitters (or receivers) is 5mm, 10mm, 15mm, 20mm, 25mm or 30mm.

[0067] According to some embodiments of the present invention, the mobile device 2 includes an electric cylinder, a pneumatic cylinder, and a hydraulic cylinder, and the output end of the mobile device 2 is suitable for mounting a fixed ranging sensor 3.

[0068] According to some embodiments of this utility model, the ranging sensor 3 includes any of the following: a laser ranging sensor, an ultrasonic ranging sensor, an infrared ranging sensor, a radar ranging sensor, and a visual ranging sensor. Preferably, a laser ranging sensor is more effective as the ranging sensor 3.

[0069] According to some embodiments of this utility model, the number of movable components is 2, 3 or 4 groups.

[0070] Figure 6 This is a top view of a silicon rod diameter detection device according to an exemplary embodiment of the present invention. Figure 7 yes Figure 6 The diagram shown is a partial enlarged view of the silicon rod diameter detection device. Figure 8 yes Figure 6 The diagram shows a structural schematic of the silicon rod diameter detection device from another perspective.

[0071] According to some embodiments of this utility model, such as Figures 6 to 8 As shown, the silicon rod diameter detection device also includes a tray 6, which is suitable for carrying and fixing the silicon rod. The tray 6 is configured to move the silicon rod under the drive of the conveyor line 4.

[0072] In this embodiment, the silicon rod 8 is fixed by the tray 6, which can improve the stability during transportation and prevent the instability of the silicon rod 8 from affecting the measurement results.

[0073] According to some embodiments of the present invention, the silicon rod diameter detection device further includes: a fixing seat 7, which is disposed on the tray 6 and has an arc-shaped surface for abutting against the silicon rod. Optionally, the fixing seat 7 can be mounted on the tray 6 or integrally disposed with the tray 6.

[0074] According to some embodiments of the present invention, the width of the tray 6 is less than or equal to the width of the conveyor line 4.

[0075] According to some embodiments of this utility model, when the width of the pallet 6 is equal to the width of the conveyor line 4, or when the width of the pallet 6 is less than the width of the conveyor line 4 but the silicon rod does not deviate, it is not necessary to perform correction work on the pallet 6. At this time, the connecting rod 43, the telescopic member 44 and the roller 45 (or universal ball) are retracted into the above-mentioned groove to prevent the transportation of the pallet 6 from being affected.

[0076] According to some embodiments of this utility model, the silicon rod diameter detection device further includes a correction component, which includes a connecting rod 43, a telescopic member 44, and a roller 45 (or a swivel ball). One end of the connecting rod 43 is hinged to the bottom of the groove; one end of the telescopic member 44 is hinged to the bottom of the groove, and the other end is hinged to the connecting rod 43; the roller 45 or swivel ball is rotatably disposed at the other end of the connecting rod 43. The correction component is located downstream of one or more ranging sensors 3.

[0077] In this embodiment, during the movement of the silicon rods, the pallet 6 may deviate from its designated position (e.g., failure to return to its original position after turning, abnormal wear of belts, rollers, etc.), which will affect the measurement results of the silicon rod diameter and subsequent processes. Therefore, data from two distance sensors 3 is used to determine whether the pallet has deviated (e.g., if the difference between the measurements from the two distance sensors 3 exceeds a preset threshold, the pallet is considered to be deviated). The telescopic component 44 is then guided to extend the connecting rod 43, and the rollers 45 (or omnidirectional balls) are used to straighten the pallet 6.

[0078] According to some embodiments of this utility model, a set of correction components is set downstream of the ranging sensor 3 of each set of ranging components, and the tray is corrected by the cooperation of multiple sets of correction components.

[0079] According to some embodiments of the present invention, the diameter detection device further includes side plates. The side plates are arranged on both sides of the conveying line along the transmission direction of the conveying line. The inner walls of the two side plates are recessed inward to form grooves extending along the transmission path. The grooves are suitable for hiding the alignment components. That is, while protecting the silicon rod (and tray), the side plates can also provide an installation position and protection for the alignment components.

[0080] According to another aspect of the inventive concept of this utility model, a silicon rod conveying system is also provided, including a silicon rod diameter detection device as described in the previous embodiment.

[0081] The embodiments of this utility model have been described in detail above with reference to the accompanying drawings. It should be noted that implementations not illustrated or described in the drawings or the main text of the specification are forms known to those skilled in the art and have not been described in detail. Furthermore, the definitions of the components described above are not limited to the various specific structures, shapes, or methods mentioned in the embodiments, and those skilled in the art can easily modify or substitute them.

[0082] It should also be noted that, in the specific embodiments of this utility model, unless otherwise stated otherwise, the numerical parameters in this specification and the appended claims are approximate values ​​and can be changed according to the desired characteristics obtained from the content of this utility model. Specifically, all numbers used in the specification and claims to indicate dimensions, range conditions, etc., of the composition should be understood to be modified by the term "about" in all cases. Generally, this means that there may be variations of ±10% in some embodiments, ±5% in some embodiments, ±1% in some embodiments, and ±0.5% in some embodiments.

[0083] Those skilled in the art will understand that the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in this utility model. In particular, the features described in the various embodiments and / or claims of this utility model can be combined or combined in various ways without departing from the spirit and teachings of this utility model. All such combinations and / or combinations fall within the scope of this utility model.

[0084] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above description is only a specific embodiment of this utility model and is not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A silicon rod diameter detection device, characterized in that, include: A height sensor assembly is disposed on one side of the silicon rod transport path, and the height sensor assembly is configured to acquire the height information of the silicon rod; At least one set of moving components, each set of moving components including two moving devices, the two moving devices being respectively disposed on both sides of the silicon rod transport path, at least one set of the moving components being disposed in the downstream direction of the height sensor assembly, the moving devices being configured to move their output ends in the vertical direction; At least one set of ranging components, each set of ranging components including two ranging sensors, wherein one of the ranging sensors is disposed on the output end of each of the mobile devices, and the ranging sensor is configured to acquire the horizontal distance between itself and the silicon rod at its current moving height.

2. The silicon rod diameter detection device according to claim 1, characterized in that, The height sensor assembly includes multiple sets of infrared transmitters and receivers spaced apart along the vertical direction, with each set of infrared transmitters and receivers positioned on opposite sides of the silicon rod transmission path.

3. The silicon rod diameter detection device according to claim 1, characterized in that, The moving device includes an electric cylinder, a pneumatic cylinder, and a hydraulic cylinder, and the output end of the moving device is suitable for mounting and fixing the ranging sensor.

4. The silicon rod diameter detection device according to claim 1, characterized in that, The ranging sensor includes any of the following: laser ranging sensor, ultrasonic ranging sensor, infrared ranging sensor, radar ranging sensor, and visual ranging sensor.

5. The silicon rod diameter detection device according to claim 1, characterized in that, The number of the moving components is 2, 3 or 4 groups.

6. The silicon rod diameter detection device according to claim 1, characterized in that, The silicon rod diameter detection device also includes: A tray suitable for carrying and securing the silicon rod, the tray being configured to move the silicon rod under the drive of a conveyor line.

7. The silicon rod diameter detection device according to claim 6, characterized in that, The width of the pallet is less than or equal to the width of the conveyor line.

8. The silicon rod diameter detection device according to claim 6, characterized in that, The silicon rod diameter detection device also includes: Side plates are disposed on both sides of the conveyor line along the transmission direction of the conveyor line, and the inner sidewalls of the two side plates are recessed inward to form grooves extending along the transmission path.

9. The silicon rod diameter detection device according to claim 8, characterized in that, The silicon rod diameter detection device further includes a correction component, which is hidden in the groove. The correction component includes: One end of the connecting rod is hinged to the bottom of the groove; The telescopic component is hinged at one end to the bottom of the groove and at the other end to the connecting rod; A roller or omnidirectional ball is rotatably mounted at the other end of the linkage; The correction component is located downstream of one or more of the ranging sensors.

10. A silicon rod conveying system, characterized in that, The device includes the silicon rod diameter detection device as described in any one of claims 1 to 9.

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