Device for fast measuring the angle of a light beam
By combining a shearing interferometer and an inclinometer, the beam angle can be quickly measured, solving the problem of low beam angle measurement efficiency in existing technologies. This enables efficient and low-cost on-site measurement, which is suitable for laser processing and optical assembly.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- NIKA OPTICS (TIANJIN) CO LTD
- Filing Date
- 2025-07-18
- Publication Date
- 2026-07-07
AI Technical Summary
Existing methods for measuring beam angles are cumbersome, time-consuming, and unsuitable for rapid on-site measurements. Traditional shearing interferometers have not been used for rapid beam angle calibration.
By employing a shearing interferometer and an angle measuring tool, and through the 45-degree angle design between the shearing plate and the observation plate, the beam angle is converted into the rotation angle of the shearing interferometer. Combined with an inclinometer, the beam angle can be quickly measured. The device has a simple structure and low cost.
It enables rapid measurement of beam angle, increasing measurement speed by 3 to 5 times and achieving an accuracy of ±0.1°. It is suitable for on-site measurement in laser processing and optical assembly, is easy to operate, and costs only one-fifth of traditional equipment.
Smart Images
Figure CN224471018U_ABST
Abstract
Description
Technical Field
[0001] This solution belongs to the field of optical measurement technology, specifically involving a device for rapidly measuring the angle of a light beam. Background Technology
[0002] In existing technologies, beam angle measurement typically employs precision goniometers, autocollimators, or complex interferometric systems. These methods suffer from drawbacks such as cumbersome operation, time-consuming adjustments, and reliance on high-precision equipment, making them particularly unsuitable for rapid on-site measurement needs. Traditional shearing interferometers are mostly used for wavefront analysis, and no solution has yet been found that utilizes their characteristics for rapid beam angle calibration. Utility Model Content
[0003] This solution aims to overcome at least one of the defects of the prior art and provide a device for rapidly measuring beam angle, overcoming the technical defects of low beam angle measurement efficiency and complex equipment in the prior art.
[0004] To solve the above-mentioned technical problems, the following technical solution is adopted:
[0005] An apparatus for rapidly measuring beam angles includes a shearing interferometer and an angle measuring tool. The shearing interferometer includes a shearing plate and an observation plate marked with a reference line. The angle between the shearing plate and the observation plate is 45 degrees. An intersection line exists between the extended surfaces of the shearing plate and the observation plate facing or away from each other, and this intersection line is perpendicular to the reference line. The shearing plate is used to shear the parallel beam to be measured into a first beam and a second beam and reflect them to the observation plate. The observation plate is used to observe the interference fringes of the first and second beams. The angle measuring tool is used to measure the rotation angle of the shearing interferometer about the normal to the observation plate from an initial attitude to a final attitude. The initial attitude refers to the attitude of the shearing interferometer when the reference line is parallel to the projection of the reference line of the parallel beam to be measured onto the observation plate, and the final attitude refers to the attitude of the shearing interferometer when the interference fringes are parallel to the reference line.
[0006] This solution utilizes a shearing interferometer positioned within the parallel beam to be measured. The beam angle—the angle between the projection of the parallel beam and the reference line onto a plane—is transformed into the rotation angle of the shearing interferometer around the normal to that plane, thus achieving rapid measurement of the beam angle. Compared to traditional measuring equipment, the measurement speed is increased by 3-5 times, and the measurement accuracy reaches ±0.1°. It is suitable for rapid on-site measurement scenarios such as laser processing and optical assembly, and operators can perform the measurement operations without specialized training. Furthermore, this device has a simple structure and its cost is only one-fifth that of traditional measuring equipment.
[0007] The preferred angle measuring tool is an inclinometer, with its axis parallel to the normal of the observation plate. During measurement, the inclinometer's zeroing button can be pressed when the shearing interferometer is in its initial position, and the reading displayed on the inclinometer can be taken when the shearing interferometer is in its final position. This reading represents the rotation angle of the shearing interferometer, which is also the angle of the parallel beam being measured. Compared to a protractor, an inclinometer can measure the rotation angle of the shearing interferometer more quickly, which is beneficial for further improving the measurement speed of the beam angle.
[0008] The shearing interferometer preferably includes a base, on which a shearing plate, an observation plate, and an inclinometer are all mounted. The shearing plate and observation plate are fixedly mounted on the base, which helps ensure that their relative positions are fixed. The inclinometer is also fixedly mounted on the base, which helps ensure that the inclinometer rotates with the shearing interferometer, allowing for rapid measurement of the interferometer's rotation angle.
[0009] The apparatus preferably includes a support. A base is rotatably connected to the support to allow the shearing interferometer to rotate and switch from an initial posture to a final posture. The base is also height-adjustable to the support to adjust the height of the shearing interferometer, ensuring that the parallel beam under test is always incident on the shearing plate and sheared and reflected by the shearing plate to the observation plate.
[0010] The preferred apparatus includes two shearing interferometers: a first shearing interferometer and a second shearing interferometer. The shearing plate and observation plate of the first shearing interferometer are perpendicular to the observation plate of the second shearing interferometer, and vice versa. The side of the shearing plate of the first shearing interferometer facing away from its observation plate faces the side of the shearing plate of the second shearing interferometer facing its observation plate. The initial attitude refers to the attitude of the shearing interferometers when the reference lines of both the first and second shearing interferometers are parallel to the reference line of the parallel beam to be measured. The final attitude refers to the attitude of the shearing interferometers when the interference fringes in the first shearing interferometer are parallel to its reference line, and the interference fringes in the second shearing interferometer are parallel to its reference line. This allows for the simultaneous measurement of the angle between the parallel beam to be measured and the reference line in two mutually perpendicular planes, further improving the speed of beam angle measurement. Using the two measured angles, the parallel beam can be quickly calibrated to be parallel to the reference line.
[0011] For a device equipped with a dual-shear interferometer, the angle measuring tool can be a dual-axis inclinometer. The dual-axis inclinometer has a first axis and a second axis that are perpendicular to each other. The first axis is parallel to the normal of the observation plate of the first shear interferometer, and the second axis is parallel to the normal of the observation plate of the second shear interferometer. Alternatively, the angle measuring tool can consist of two inclinometers, a first inclinometer and a second inclinometer. The axis of the first inclinometer is parallel to the normal of the observation plate of the first shear interferometer, and the axis of the second inclinometer is parallel to the normal of the observation plate of the second shear interferometer. The inclinometer can be mounted on either the first or second shear interferometer, specifically on the base of either the first or second shear interferometer.
[0012] The apparatus preferably includes a base, on which the first and second shearing interferometers are mounted, which helps to ensure that the relative positions of the first and second shearing interferometers are fixed. An inclinometer is mounted on the first shearing interferometer, the second shearing interferometer, or the base to ensure that the inclinometer rotates with the rotation of the two shearing interferometers, so as to quickly measure the rotation angle of the shearing interferometers. The base is rotatably connected to the support, indirectly allowing the first and second shearing interferometers to be rotatably connected to the support, so that the two shearing interferometers can rotate and switch from an initial posture to a final posture. The base is height-adjustable connected to the support, indirectly allowing the first and second shearing interferometers to be height-adjustable connected to the support, so as to adjust the height of the two shearing interferometers and ensure that the parallel beam to be measured is always incident on the shearing plate and sheared and reflected by the shearing plate to the observation plate.
[0013] Compared with existing technologies, the advantages of this solution are as follows: This solution uses a shearing interferometer located in the parallel beam to be measured to transform the beam angle—that is, the angle between the projection of the parallel beam to be measured and the reference line onto a certain plane—into the rotation angle of the shearing interferometer around the normal of that plane, thus achieving the purpose of rapid measurement of the beam angle. Compared with traditional measuring equipment, the measurement speed can be increased by 3 to 5 times, and the measurement accuracy can reach ±0.1°. It is suitable for rapid on-site measurement scenarios such as laser processing and optical assembly, and operators can perform the measurement operation without professional training. In addition, this device has a simple structure and its cost is only one-fifth of that of traditional measuring equipment. Attached Figure Description
[0014] The accompanying drawings are for illustrative purposes only and should not be construed as limiting the scope of this invention. To better illustrate the following embodiments, some components in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product; it is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.
[0015] Figure 1 This is a three-dimensional diagram of a device for rapidly measuring the angle of a light beam.
[0016] Figure 2 This is a side view of a device for quickly measuring the angle of a beam.
[0017] Figures 3-7 This is a top view of a device for quickly measuring the angle of a beam.
[0018] Figure 8 This is a schematic diagram of a device for quickly measuring the angle of a light beam.
[0019] Figure 9 It is a three-dimensional diagram of a device with a double shearing interferometer for rapid measurement of beam angle.
[0020] Figure 10 This is a side view of a device with a double shearing interferometer for rapid measurement of beam angle.
[0021] Figure 11 This is a top view of a device with a double shearing interferometer for rapid measurement of beam angles.
[0022] Figure 12 This is a schematic diagram of a device with a double shearing interferometer for rapid measurement of beam angle.
[0023] Explanation of reference numerals in the attached drawings: Shearing interferometer 100, shearing plate 101, observation plate 102, base 103, base 104, first shearing interferometer 110, second shearing interferometer 120, inclinometer 200, support 300, reference line l 1. Intersection line l 2. Baseline l 3. Detailed Implementation
[0024] To enable those skilled in the art to better understand this solution, the following detailed description is provided in conjunction with specific embodiments.
[0025] Figures 1-12 This diagram illustrates a possible device for rapidly measuring the angle of a beam, used to measure the angle between a parallel beam to be measured and a reference line. For example... Figures 1-2As shown, the device includes a shearing interferometer 100 and an angle measuring tool. The shearing interferometer 100 includes a shearing plate 101 and an observation plate 102 marked with a reference line. The angle between the shearing plate 101 and the observation plate 102 is 45°. The extended surfaces of the shearing plate 101 and the observation plate 102 facing or away from each other have an intersection line, which is perpendicular to the reference line. The shearing plate 101 is used to shear the parallel beam to be measured into a first beam and a second beam and reflect them to the observation plate 102. The observation plate 102 is used to observe the interference fringes of the first beam and the second beam. The angle measuring tool is used to measure the rotation angle of the shearing interferometer 100 about the normal of the observation plate 102 from the initial posture to the final posture. The initial posture refers to the posture of the shearing interferometer 100 when the projection of the reference line and the baseline on the observation plate 102 is parallel. The final posture refers to the posture of the shearing interferometer 100 when the interference fringes are parallel to the reference line.
[0026] The shear plate 101 has a first surface and a second surface that are parallel to each other. The first surface faces the observation plate 102, and the second surface faces away from the observation plate 102. The observation plate 102 has a first surface and a second surface that are parallel to each other. The first surface faces the shear plate 101, and the second surface faces away from the shear plate 101. During measurement, the parallel light beam to be measured first enters the first surface of the shear plate 101 from the side of the observation plate 102 facing the shear plate 101, and then enters the first surface of the observation plate 102 from the shear plate 101. Figure 2 When the parallel beam to be tested is incident on the first surface of the shear plate 101, a portion is directly reflected by the first surface of the shear plate 101 to the observation plate 102 to form the first beam, and the other portion is refracted and then incident on the second surface of the shear plate 101; of the beam incident on the second surface of the shear plate 101, a portion is reflected by the second surface of the shear plate 101 to the observation plate 102 to form the second beam; thus, the shear plate 101 shears the parallel beam to be tested into the first beam and the second beam and reflects them to the observation plate 102.
[0027] The first beam and the second beam interfere with each other, and their interference fringes can be observed on the observation plate 102. The interference fringes are parallel to the reference line if and only if the projection of the parallel beam under test onto the first or second surface of the observation plate 102 is parallel to the reference line, such as... Figure 3 If there is an angle α between the projection of the parallel beam under test onto the first or second surface of the observation plate 102 and the reference line, the larger the angle α, the more pronounced the tilt of the interference fringes, and the denser the fringes become. Figures 4-5 When the included angle α increases in the opposite direction, the interference fringes tilt in the opposite direction, and the fringes become denser, as shown below. Figures 6-7 .like Figure 8As shown, during measurement, the shearing interferometer 100 is first placed in the parallel beam to be measured, making the projections of the reference line and the baseline on the observation plate 102 parallel, thus determining the initial attitude of the shearing interferometer 100. Then, the shearing interferometer 100 is rotated around the normal to the observation plate 102, making the interference fringes parallel to the reference line, thus determining the final attitude of the shearing interferometer 100. Finally, the rotation angle of the shearing interferometer 100 is measured using an angle measuring tool, i.e., the angle β between the projections of the reference line and the baseline on the observation plate 102 in the final attitude, thereby quickly measuring the angle of the parallel beam to be measured, specifically the angle between the parallel beam to be measured and the baseline in a plane parallel to the observation plate 102. To measure the angle between the parallel beam to be measured and the baseline in a specific plane, it is only necessary to make the observation plate 102 parallel to that specific plane.
[0028] An angle measurement tool can be an inclinometer 200 (also known as an angle meter or electronic angle meter), which can be a single-axis inclinometer 200 or a dual-axis inclinometer 200. During the measurement process, the inclinometer 200 is fixed on the shearing interferometer 100, and the axis of the inclinometer 200 is parallel to the normal of the observation plate 102. When the shearing interferometer 100 is in the initial position, press the zeroing button (ZERO) on the inclinometer 200. When the shearing interferometer 100 is rotated, the inclinometer 200 rotates accordingly, and the degree reading displayed on the inclinometer 200 increases accordingly. When the shearing interferometer 100 is in the final position, read the degree reading displayed on the inclinometer 200, which is the rotation angle of the shearing interferometer 100, and also the angle of the parallel beam to be measured. In addition, a protractor can also be used to measure the angle of rotation of a certain edge of the shearing interferometer 100 parallel to the observation plate 102 from the initial posture to the final posture. This angle is the rotation angle of the shearing interferometer 100, which is also the angle of the parallel beam to be measured. Compared with a protractor, the inclinometer 200 can measure the rotation angle of the shearing interferometer 100 more quickly, which is beneficial to further improve the measurement speed of the beam angle.
[0029] The shearing interferometer 100 can be configured with a base 103. The shearing plate 101 and the observation plate 102 are fixedly mounted on the base 103 to ensure that the relative positions of the shearing plate 101 and the observation plate 102 are fixed. The inclinometer 200 can also be fixedly mounted on the base 103 to ensure that the inclinometer 200 rotates with the rotation of the shearing interferometer 100, so as to quickly measure the rotation angle of the shearing interferometer 100.
[0030] The device can be configured with a support 300. A base 103 can be rotatably connected to the support 300, allowing the shearing interferometer 100 to rotate from its initial posture to its final posture. The rotation of the base 103 relative to the support 300 is the same as the rotation of the shearing interferometer 100 relative to the parallel beam under test. The base 103 can also be height-adjustable to the support 300 to adjust the height of the shearing interferometer 100, ensuring that the parallel beam under test is always incident on the shearing plate 101 and sheared and reflected by the shearing plate 101 to the observation plate 102.
[0031] like Figures 9-11 As shown, the device can be configured with two shearing interferometers 100, namely a first shearing interferometer 110 and a second shearing interferometer 120. The shearing plate 101, observation plate 102, and base 103 of the first shearing interferometer 110 can be referred to as the first shearing plate 101, the first observation plate 102, and the first base 103, respectively, and the reference line of the first observation plate 102 can be referred to as the first reference line. The shearing plate 101, observation plate 102, and base 103 of the second shearing interferometer 120 can be referred to as the second shearing plate 101, the second observation plate 102, and the second base 103, respectively, and the reference line of the second observation plate 102 can be referred to as the second reference line. The first shearing plate 101 and the first observation plate 102 are perpendicular to the second observation plate 102, and the second shearing plate 101 and the second observation plate 102 are perpendicular to the first observation plate 102. The second surface of the first shearing plate 101 faces the first surface of the second shearing plate 101, and the first surface of the first shearing plate 101 faces away from the second surface of the second shearing plate 101. In the initial orientation, both the first and second reference lines are parallel to the baseline. In the final orientation, the interference fringes observed on the first observation plate 102 are parallel to the first reference line, and the interference fringes observed on the second observation plate 102 are parallel to the second reference line.
[0032] like Figure 12As shown, during measurement, two relatively fixed shearing interferometers 100 are first placed in the parallel beam to be measured, so that the first reference line and the second reference line are parallel to the baseline, thereby determining the initial attitude of the shearing interferometers 100. Then, the two shearing interferometers 100, which are fixed together, are rotated around the normals of the first observation plate 102 and the second observation plate 102, respectively, so that the interference fringes in the first observation plate 102 are parallel to the first reference line, and the interference fringes in the second observation plate 102 are parallel to the second reference line, thereby determining the final attitude of the shearing interferometers 100. Finally, the rotation angle of the shearing interferometers 100 is measured by the inclinometer 200, thereby quickly measuring the angle of the parallel beam to be measured, specifically the angle between the parallel beam to be measured and the baseline in two mutually perpendicular planes, which are the plane parallel to the first observation plate 102 and the plane parallel to the second observation plate 102, respectively. Therefore, the device with two shearing interferometers 100 can measure the angle between the parallel beam to be measured and the reference line in two mutually perpendicular planes at the same time, further improving the measurement speed of the beam angle. By measuring the two angles, the parallel beam can be quickly calibrated to make it parallel to the reference line.
[0033] The inclinometer 200 can be a dual-axis inclinometer 200. The dual-axis inclinometer 200 has two mutually perpendicular axes, typically labeled as the X-axis and Y-axis. In this paper, one of the X-axis and Y-axis is referred to as the first axis, and the other as the second axis. During measurement, the dual-axis inclinometer 200 is fixed to either the first shearing interferometer 110 or the second shearing interferometer 120. The first axis of the inclinometer 200 is parallel to the normal of the first observation plate 102, and the second axis of the inclinometer 200 is parallel to the normal of the second observation plate 102. When the shearing interferometer 100 is in its initial position, the zeroing button (ZERO) of the inclinometer 200 is pressed. As the shearing interferometer 100 is rotated, the inclinometer 200 rotates accordingly, and the degree reading displayed on the inclinometer 200 increases accordingly. When the shearing interferometer 100 is in its final position, the degree reading displayed on the inclinometer 200 is read; this is the rotation angle of the shearing interferometer 100, and also the angle of the parallel beam to be measured. In addition, the device can also be equipped with two inclinometers 200, namely a first inclinometer 200 and a second inclinometer 200. The axis of the first inclinometer 200 is parallel to the normal of the first observation plate 102, and the axis of the second inclinometer 200 is parallel to the normal of the second observation plate 102. Finally, by reading the degrees displayed by the two inclinometers 200, the angle of the parallel beam to be measured can be obtained.
[0034] The device can be configured with a base 104. A first shearing interferometer 110 and a second shearing interferometer 120 are fixedly mounted on the base 104 to ensure that their relative positions are fixed. Specifically, a first base 103 and a second base 104 are respectively connected to the same surface of the base 104. The base 104 can be rotatably connected to the support 300, indirectly allowing the first shearing interferometer 110 and the second shearing interferometer 120 to be rotatably connected to the support 300, so that the two shearing interferometers 100 can rotate and switch from an initial posture to a final posture. The base 104 can also be height-adjustable connected to the support 300, indirectly allowing the first shearing interferometer 110 and the second shearing interferometer 120 to be height-adjustable connected to the support 300, so as to adjust the height of the two shearing interferometers 100 and ensure that the parallel beam under test can always be incident on the shearing plate 101 and sheared and reflected by the shearing plate 101 to the observation plate 102.
[0035] The inclinometer 200 can be fixedly installed on the first base 103 or the second base 103, thereby directly fixed to the first shear interferometer 110 or the second shear interferometer 120, or it can be fixedly installed on the base 104, thereby indirectly fixed to the first shear interferometer 110 or the second shear interferometer 120, so as to ensure that the inclinometer 200 rotates with the rotation of the two shear interferometers 100, so as to quickly measure the rotation angle of the shear interferometers 100.
[0036] Obviously, the above embodiments of this solution are merely examples for clearly illustrating this solution, and are not intended to limit the specific implementation of this solution. Those skilled in the art can make other variations or modifications based on the above description, and it is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the claims of this solution should be included within the scope of protection of the claims of this solution.
Claims
1. A device for rapidly measuring the angle of a light beam, characterized in that, The apparatus includes a shearing interferometer and an angle measuring tool. The shearing interferometer includes a shearing plate and an observation plate marked with a reference line. The angle between the shearing plate and the observation plate is 45 degrees. The extended surfaces of the shearing plate and the observation plate facing each other or away from each other have an intersection line, which is perpendicular to the reference line. The shearing plate is used to shear the parallel beam to be measured into a first beam and a second beam and reflect them to the observation plate. The observation plate is used to observe the interference fringes of the first beam and the second beam. The angle measuring tool is used to measure the rotation angle of the shearing interferometer around the normal of the observation plate from an initial posture to a final posture. The initial posture refers to the posture of the shearing interferometer when the reference line is parallel to the projection of the reference line of the parallel beam to be measured onto the observation plate. The final posture refers to the posture of the shearing interferometer when the interference fringes are parallel to the reference line.
2. The device for rapidly measuring beam angle according to claim 1, characterized in that, The angle measuring tool is an inclinometer, and the axis of the inclinometer is parallel to the normal of the observation plate.
3. The device for rapidly measuring beam angle according to claim 2, characterized in that, The shearing interferometer also includes a base, on which the shearing plate, the observation plate, and the inclinometer are all mounted.
4. The apparatus for rapidly measuring beam angle according to claim 3, characterized in that, The device further includes a support; the base is rotatably connected to the support, and / or the base is vertically connected to the support.
5. The apparatus for rapidly measuring beam angle according to claim 1, characterized in that, The device includes two shearing interferometers, namely a first shearing interferometer and a second shearing interferometer. The shearing plate and observation plate of the first shearing interferometer are perpendicular to the observation plate of the second shearing interferometer, and the shearing plate and observation plate of the second shearing interferometer are perpendicular to the observation plate of the first shearing interferometer. The side of the shearing plate of the first shearing interferometer facing away from the observation plate of the first shearing interferometer faces the side of the shearing plate of the second shearing interferometer facing the observation plate of the second shearing interferometer. The initial attitude refers to the attitude of the shearing interferometer when the reference lines of both the first and second shearing interferometers are parallel to the reference line of the parallel beam to be measured. The final attitude refers to the attitude of the shearing interferometer when the interference fringes in the first shearing interferometer are parallel to the reference line of the first shearing interferometer, and the interference fringes in the second shearing interferometer are parallel to the reference line of the second shearing interferometer.
6. The apparatus for rapidly measuring beam angle according to claim 5, characterized in that, The angle measuring tool is an inclinometer, which is a dual-axis inclinometer. The dual-axis inclinometer has a first axis and a second axis that are perpendicular to each other. The first axis is parallel to the normal of the observation plate of the first shearing interferometer, and the second axis is parallel to the normal of the observation plate of the second shearing interferometer.
7. The apparatus for rapidly measuring beam angle according to claim 5, characterized in that, The angle measuring tool includes two inclinometers, namely a first inclinometer and a second inclinometer. The axis of the first inclinometer is parallel to the normal of the observation plate of the first shearing interferometer, and the axis of the second inclinometer is parallel to the normal of the observation plate of the second shearing interferometer.
8. The apparatus for rapidly measuring beam angle according to claim 6 or 7, characterized in that, The shearing interferometer also includes a base, the shearing plate and the observation plate are mounted on the base, and the inclinometer is mounted on the base of the first shearing interferometer or the second shearing interferometer.
9. The apparatus for rapidly measuring beam angle according to claim 6 or 7, characterized in that, The device also includes a base, on which the first shearing interferometer and the second shearing interferometer are mounted, and on which the inclinometer is mounted, either on the first shearing interferometer, the second shearing interferometer, or the base.
10. The apparatus for rapidly measuring beam angle according to claim 9, characterized in that, The device further includes a support; the base is rotatably connected to the support, and / or the base is liftably connected to the support.