A three-dimensional force sensor
By employing an independent chip-type force-sensitive core in the three-dimensional force sensor to detect force along the X, Y, and Z directions, the problems of low accuracy, large temperature drift, and poor creep resistance of existing sensors are solved, achieving high-precision and low-interference force detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- NANJING YUANGAN MICROELECTRONICS CO LTD
- Filing Date
- 2025-09-05
- Publication Date
- 2026-07-07
AI Technical Summary
Existing three-dimensional force sensors suffer from low accuracy, large temperature drift, and poor creep resistance.
It adopts a three-dimensional force sensor design, which uses an independent chip-type force-sensitive core to detect force in the X, Y and Z directions respectively. The chip-type force sensor achieves high precision, low temperature drift and strong anti-creep capability.
It improves the accuracy of force detection, simplifies the decoupling operation of forces in the direction of interference, significantly enhances the decoupling accuracy, and overcomes the shortcomings of traditional strain gauge sensors.
Smart Images
Figure CN224471171U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of force sensor technology, and in particular to a three-dimensional force sensor. Background Technology
[0002] In existing technologies, three-dimensional force sensors primarily employ strain gauge measurement methods for detection. These sensors indirectly measure the magnitude and direction of external forces by monitoring changes in the resistance of strain gauges. However, strain gauge-based three-dimensional force sensors suffer from several significant drawbacks. First, they exhibit low detection accuracy. The sensitivity of strain gauges is limited and susceptible to factors such as material nonlinearity and mechanical hysteresis, leading to substantial deviations between the measured results and the true values, making it difficult to meet the demands of high-precision force detection. Second, they suffer from severe temperature drift. The resistive characteristics of strain gauges are sensitive to temperature changes; fluctuations in ambient temperature introduce significant signal drift, requiring complex temperature compensation algorithms, which increases system complexity and cost. Third, they have poor creep resistance. After prolonged stress, the sensitive element of the strain gauge sensor undergoes creep, causing the sensor's output signal to drift and affecting detection accuracy. Utility Model Content
[0003] Based on the above, the purpose of this utility model is to provide a three-dimensional force sensor that solves the problems of poor accuracy, large temperature drift, and poor creep resistance of existing three-dimensional force sensors.
[0004] To achieve the above objectives, the present invention adopts the following technical solution:
[0005] A three-dimensional force sensor, comprising:
[0006] The mounting base defines a mounting cavity within it;
[0007] The force-bearing component has one end extending into the mounting cavity and is capable of moving a first preset displacement, a second preset displacement, and a third preset displacement along a first direction, a second direction, and a third direction, respectively, wherein the first direction, the second direction, and the third direction are perpendicular to each other.
[0008] A first force-sensitive core is disposed on the force-receiving member or in the mounting cavity. When the force-receiving member is subjected to a first force in the first direction, it moves along the first direction to abut against the first force-sensitive core and transmits the first force to the first force-sensitive core. The first force-sensitive core is capable of detecting the first force.
[0009] The second force-sensitive core is disposed on the force-receiving member or in the mounting cavity. When the force-receiving member is subjected to a second force in the second direction, it moves along the second direction to abut against the second force-sensitive core and transmits the second force to the second force-sensitive core. The second force-sensitive core can detect the second force.
[0010] A third force-sensitive core is disposed on the force-receiving member or in the mounting cavity. When the force-receiving member is subjected to a third force in the third direction, it moves along the third direction to abut against the third force-sensitive core and transmits the third force to the third force-sensitive core. The third force-sensitive core is capable of detecting the third force.
[0011] Among them, the first force-sensitive core, the second force-sensitive core and the third force-sensitive core are all chip-type force sensors.
[0012] As a preferred embodiment of a three-dimensional force sensor, the force-receiving component includes a cover plate, a connecting core, and a first abutting member. The cover plate is located on one side of the mounting base and fixed to one end of the connecting core. The first abutting member is sleeved on the other end of the connecting core. The mounting cavity includes a first movable cavity, a second movable cavity, and a third movable cavity connected in sequence. The connecting core is located within the first movable cavity, the second movable cavity, and the third movable cavity. The first abutting member is located within the third movable cavity. The first force-sensitive core and the second force-sensitive core are both disposed within the third movable cavity and face the first abutting member. When the cover plate is subjected to the first force or the second force, the cover plate can drive the first abutting member to abut against the first force-sensitive core or the second force-sensitive core through the connecting core.
[0013] As a preferred embodiment of a three-dimensional force sensor, the diameters of the first movable cavity and the third movable cavity are both larger than the diameter of the second movable cavity. The connecting core includes a connecting inner core, a connecting post, and a limiting block connected in sequence. The first abutting member is provided with a through hole with a diameter smaller than that of the limiting block. The connecting post passes through the through hole. The connecting inner core is located in the first movable cavity and its diameter is larger than that of the second movable cavity. The limiting block is disposed at the end of the connecting post opposite to the connecting inner core and located in the third movable cavity.
[0014] As a preferred embodiment of a three-dimensional force sensor, the first abutting member includes an abutting block, two first abutting brackets, and two second abutting brackets. The abutting block is provided with the through hole. The two first abutting brackets are disposed on opposite sides of the abutting block along the first direction, and the two second abutting brackets are disposed on opposite sides of the abutting block along the second direction. There are two first force-sensitive cores and two second force-sensitive cores. Each first abutting bracket extends along the first direction and corresponds to one first force-sensitive core, and each second abutting bracket extends along the second direction and corresponds to one second force-sensitive core.
[0015] As a preferred embodiment of a three-dimensional force sensor, the first abutting member further includes two first abutting blocks and two second abutting blocks. Each first abutting block is disposed at the end of a first abutting bracket and corresponds to a first force-sensitive core. When the measured value of the first force-sensitive core reaches a first preset pressure, the end face of the first abutting block or the first abutting bracket abuts against the inner wall of the mounting cavity.
[0016] Each of the second abutting blocks is disposed at the end of a second abutting bracket and corresponds to a second force-sensitive core. When the measured value of the second force-sensitive core reaches the second preset pressure, the end face of the second abutting block or the second abutting bracket abuts against the inner wall of the mounting cavity.
[0017] As a preferred embodiment of a three-dimensional force sensor, the force-receiving component further includes a second abutment member, which is fixed to the cover plate. There are two third force-sensitive cores, which are respectively disposed on both sides of the second abutment member along the second direction. When the force-receiving component is subjected to the third force, the abutment member can abut against the third force-sensitive core.
[0018] As a preferred embodiment of a three-dimensional force sensor, the second abutment includes an annular pressure plate and a sleeve. The sleeve is fixed to the cover plate and sleeved on the outside of the connecting core. The annular pressure plate is fixedly disposed on the outside of the sleeve. One of the third force-sensitive cores is disposed opposite the sleeve, and the other third force-sensitive core is disposed opposite the annular pressure plate. When the force-receiving member is subjected to the third force, one of the annular pressure plate and the sleeve can abut against the corresponding third force-sensitive core.
[0019] As a preferred embodiment of a three-dimensional force sensor, the mounting cavity further includes a fourth movable cavity, a first mounting groove, and a second mounting groove. The fourth movable cavity is simultaneously connected to the first movable cavity, the first mounting groove, and the second mounting groove. The fourth movable cavity is used to accommodate the annular pressure plate. The first mounting groove is located at the bottom of the fourth movable cavity and contains a third force-sensitive core. The second mounting groove contains another third force-sensitive core.
[0020] As a preferred embodiment of a three-dimensional force sensor, the annular pressure plate includes an annular pressure sheet and an annular pressure block. The annular pressure sheet is located in the fourth movable cavity and can move along the third direction. The annular pressure block is disposed on the upper end face of the annular pressure sheet and can abut against the third force-sensitive core. When the measured value of the third force-sensitive core reaches the third preset pressure, the annular pressure sheet abuts against the upper or lower wall surface of the fourth movable cavity.
[0021] As a preferred embodiment of a three-dimensional force sensor, the chip-type force sensor includes a core base, a force-sensitive chip, and a force-sensitive membrane. The force-sensitive membrane is fixed on the core base, and the two together form a liquid cavity. The liquid cavity is filled with a hydraulic medium. The force-sensitive chip is fixed on the bottom wall of the liquid cavity. The force-sensitive chip is capable of detecting the force transmitted to the hydraulic medium through the force-sensitive membrane.
[0022] The beneficial effects of this utility model are as follows:
[0023] The force-receiving component of the three-dimensional force sensor disclosed in this utility model can move along a first direction, a second direction, and a third direction respectively. The first force-sensitive core can detect the first force acting on the force-receiving component along the first direction, the second force-sensitive core can detect the second force acting on the force-receiving component along the second direction, and the third force-sensitive core can detect the third force acting on the force-receiving component along the third direction. The first, second, and third force-sensitive cores in this utility model are all chip-type force sensors, which have the characteristics of high detection accuracy, strong anti-creep capability, and small temperature drift. It overcomes the technical bias of the prior art that can only use strain gauge sensors to measure three-dimensional forces. The force signals in each direction are sensed separately by independently configured chip-type force sensors. Compared with traditional strain gauge sensors, this structure makes the decoupling operation of forces in the interference direction simpler and significantly improves the decoupling accuracy. Attached Figure Description
[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.
[0025] Figure 1 This is a cross-sectional view of the three-dimensional force sensor provided in a specific embodiment of this utility model;
[0026] Figure 2 This is a cross-sectional view of the mounting base of the three-dimensional force sensor provided in a specific embodiment of this utility model;
[0027] Figure 3 This is a schematic diagram of the first contacting member, the first force-sensitive core, and the second force-sensitive core of the three-dimensional force sensor provided in a specific embodiment of this utility model;
[0028] Figure 4 This is a schematic diagram of the first contact member of the three-dimensional force sensor provided in a specific embodiment of this utility model;
[0029] Figure 5 This is a cross-sectional view of a chip-type force sensor of a three-dimensional force sensor provided in a specific embodiment of this utility model.
[0030] In the picture:
[0031] 1. Mounting base; 10. Mounting cavity; 101. First movable cavity; 102. Second movable cavity; 103. Third movable cavity; 104. Fourth movable cavity; 105. First mounting slot; 106. Second mounting slot; 11. Base; 12. Intermediate connecting seat; 13. Upper seat;
[0032] 201. Core base; 2010. Liquid chamber; 202. Force-sensitive chip; 203. Force-sensitive membrane; 21. First force-sensitive core; 22. Second force-sensitive core; 23. Third force-sensitive core;
[0033] 31. Cover plate; 32. Connecting core; 321. Connecting inner core; 322. Connecting post; 323. Limiting block; 33. First abutting member; 331. Abutting block; 3310. Through hole; 332. First abutting bracket; 333. Second abutting bracket; 334. First abutting pressure block; 335. Second abutting pressure block; 34. Second abutting member; 341. Circular pressure plate; 3411. Circular pressure sheet; 3412. Circular pressure block; 342. Sleeve;
[0034] 4. PCB. Detailed Implementation
[0035] To make the technical problems solved by this utility model, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of this utility model will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0036] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.
[0037] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0038] This embodiment provides a three-dimensional force sensor, such as... Figures 1 to 5 As shown, the device includes a mounting base 1, a force-receiving component, a first force-sensitive core 21, a second force-sensitive core 22, and a third force-sensitive core 23. The mounting base 1 defines a mounting cavity 10. One end of the force-receiving component extends into the mounting cavity 10 and is capable of moving a first preset displacement along a first direction, a second preset displacement along a second direction, and a third preset displacement along a third direction, respectively. The first direction, the second direction, and the third direction are perpendicular to each other. Figure 1As shown, in this embodiment, the first direction, second direction, and third direction are the X-axis direction, Y-axis direction, and Z-axis direction, respectively. The first force-sensitive core 21 is disposed within the mounting cavity 10. When the force-bearing component receives a first force in the first direction, the component moves along the first direction to abut against the first force-sensitive core 21, transmitting the first force to the first force-sensitive core 21, which can detect the first force. The second force-sensitive core 22 is disposed within the mounting cavity 10. When the force-bearing component receives a second force in the second direction, the component moves along the second direction to abut against the second force-sensitive core 22, transmitting the second force to the second force-sensitive core 22, which can detect the second force. The third force-sensitive core 23 is disposed within the mounting cavity 10. When the force-bearing component receives a third force in the third direction, the component moves along the third direction to abut against the third force-sensitive core 23, transmitting the third force to the third force-sensitive core 23, which can detect the third force. The first force-sensitive core 21, the second force-sensitive core 22, and the third force-sensitive core 23 are all chip-type force sensors. It should be noted that in other embodiments of this invention, the first force-sensitive core 21, the second force-sensitive core 22, and the third force-sensitive core 23 can also be disposed on a force-receiving component. When the force-receiving component is subjected to a first force, a second force, or a third force, the first force-sensitive core 21, the second force-sensitive core 22, or the third force-sensitive core 23 can abut against the inner wall of the mounting cavity 10, thereby achieving the measurement of the first force, the second force, or the third force.
[0039] Specifically, such as Figure 5 As shown, the chip-type force sensor of this embodiment includes a core base 201, a force-sensitive chip 202, and a force-sensitive membrane 203. The force-sensitive membrane 203 is fixed on the core base 201, and the two together form a liquid cavity 2010. The liquid cavity 2010 is filled with a hydraulic medium. The force-sensitive chip 202 is fixed on the bottom wall of the liquid cavity 2010. The force-sensitive chip 202 can detect the force transmitted to the hydraulic medium through the force-sensitive membrane 203. In this embodiment, the hydraulic medium is silicone oil or other incompressible and stable liquids, which are filled according to actual needs. It should be noted that in other embodiments of this utility model, the structure of the chip-type force sensor is not limited to the above limitation. It can also be a ceramic capacitive pressure core including the force-sensitive chip 202 or other chip-type force sensors including the force-sensitive chip 202, which are selected according to actual needs.
[0040] Furthermore, in this embodiment, the core base 201 of the first force-sensitive core 21, the second force-sensitive core 22, and the third force-sensitive core 23 are all cylindrical in shape, and the shape of the core base 201 is designed according to the actual installation space. In other embodiments of this utility model, the shape of the core base 201 of the first force-sensitive core 21, the second force-sensitive core 22, and the third force-sensitive core 23 is not limited to the above limitation. For example, the shape of the core base 201 of the third force-sensitive core 23 can also be annular, depending on the actual installation needs, which will not be elaborated here.
[0041] The force-receiving component of the three-dimensional force sensor provided in this embodiment can move along the first direction, the second direction, and the third direction, respectively. The first force-sensitive core 21 can detect the first force acting on the force-receiving component along the first direction, the second force-sensitive core 22 can detect the second force acting on the force-receiving component along the second direction, and the third force-sensitive core 23 can detect the third force acting on the force-receiving component along the third direction. Since the first force-sensitive core 21, the second force-sensitive core 22, and the third force-sensitive core 23 are all chip-type force sensors, they have the characteristics of high detection accuracy, strong anti-creep capability, and small temperature drift. This overcomes the technical bias of the prior art, which can only use strain gauge sensors to measure three-dimensional forces. The force signals in each direction are sensed separately by independently configured chip-type force sensors. Compared with traditional strain gauge sensors, this structure makes the decoupling operation of forces in the interference direction simpler and significantly improves the decoupling accuracy.
[0042] like Figure 1 and Figure 2 As shown, the force-bearing component in this embodiment includes a cover plate 31, a connecting core 32, and a first abutting member 33. The cover plate 31 is located on one side of the mounting base 1 and fixed to one end of the connecting core 32. The first abutting member 33 is sleeved on the other end of the connecting core 32. The mounting cavity 10 includes a first movable cavity 101, a second movable cavity 102, and a third movable cavity 103 connected in sequence. The connecting core 32 is located in the first movable cavity 101, the second movable cavity 102, and the third movable cavity 103. The first abutting member 33 is located in the third movable cavity 103. The first force-sensitive core 21 and the second force-sensitive core 22 are both disposed in the third movable cavity 103 and are directly opposite the first abutting member 33. When the cover plate 31 is subjected to a first force in a first direction, the cover plate 31 can drive the first abutting member 33 to abut against the first force-sensitive core 21 through the connecting core 32, so as to transmit the first force to the first force-sensitive core 21, thereby the first force-sensitive core 21 measures the first force; when the cover plate 31 is subjected to a second force in a second direction, the cover plate 31 can drive the first abutting member 33 to abut against the second force-sensitive core 22 through the connecting core 32, so as to transmit the second force to the second force-sensitive core 22, thereby the second force-sensitive core 22 measures the second force.
[0043] Specifically, the first movable cavity 101, the third movable cavity 103, and the second movable cavity 102 are all cylindrical cavities, and the diameters of the first movable cavity 101 and the third movable cavity 103 are both larger than the diameter of the second movable cavity 102. Figure 1 As shown, the connecting core 32 includes a connecting inner core 321, a connecting post 322, and a limiting block 323 connected in sequence, as follows: Figure 4 As shown, the first abutment 33 is provided with a through hole 3310, and the connecting post 322 is provided through the through hole 3310. The cross-sections of the through hole 3310 and the limiting block 323 are both square, and the side length of the through hole 3310 is smaller than the side length of the limiting block 323. The first abutment 33 is sleeved on the connecting post 322. The connecting inner core 321 is located in the first movable cavity 101, and the diameter of the connecting inner core 321 is larger than the diameter of the second movable cavity 102, so as to limit the distance of the connecting core 32 moving downward along the Z-axis. The limiting block 323 is provided at the end of the connecting post 322 away from the connecting inner core 321 and located in the third movable cavity 103. The side length of the limiting block 323 is larger than the side length of the through hole 3310, so as to limit the distance of the connecting core 32 moving upward along the Z-axis. In other embodiments of this utility model, the cross-sectional shape of the through hole 3310 and the limiting block 323 can also be circular, the diameter of the through hole 3310 is smaller than the diameter of the limiting block 323, and the cross-sectional shape of the first active cavity 101, the second active cavity 102 and the third active cavity 103 is not limited to the circle of this embodiment, but can also be square or other shapes. When the cross-section is square, the side length of the second active cavity 102 is smaller than the side length of the first active cavity 101 and the third active cavity 103.
[0044] like Figure 4 As shown, the first abutting member 33 of this embodiment includes an abutting block 331, two first abutting brackets 332, and two second abutting brackets 333. The abutting block 331 is provided with the aforementioned through hole 3310. The two first abutting brackets 332 are disposed on opposite sides of the abutting block 331 along a first direction, and the two second abutting brackets 333 are disposed on opposite sides of the abutting block 331 along a second direction. There are two first force-sensitive cores 21 and two second force-sensitive cores 22. Each first abutting bracket 332 extends along the first direction and corresponds to one first force-sensitive core 21, and each second abutting bracket 333 extends along the second direction and corresponds to one second force-sensitive core 22. The cross-sectional shape of the abutting block 331 in this embodiment is square, and the cross-sectional shape of the first abutting brackets 332 and the second abutting brackets 333 is rectangular. In other embodiments, the cross-section of the abutment block 331 may be circular, hexagonal, octagonal or other shapes, and the first abutment bracket 332 and the second abutment bracket 333 may be cylindrical brackets or brackets of other shapes, depending on actual needs.
[0045] like Figure 4 As shown, the first abutting member 33 in this embodiment further includes two first abutting blocks 334 and two second abutting blocks 335. Each first abutting block 334 is disposed at the end of a first abutting bracket 332 and corresponds to a first force-sensitive core 21. When the measured value of the first force-sensitive core 21 reaches a first preset pressure, the end face of the first abutting block 334 abuts against the inner wall of the mounting cavity 10. Each second abutting block 335 is disposed at the end of a second abutting bracket 333 and corresponds to a second force-sensitive core 22. When the measured value of the second force-sensitive core 22 reaches a second preset pressure, the end face of the second abutting block 335 abuts against the inner wall of the mounting cavity 10.
[0046] In this embodiment, both the first abutting block 334 and the second abutting block 335 are abutting blocks, each including an abutting piece and an abutting boss. The abutting boss of the first abutting block 334 corresponds to the first force-sensitive core 21, and the abutting boss of the second abutting block 335 corresponds to the second force-sensitive core 22. Specifically, when detecting the first force in the first direction, the first abutting block 334 can transmit the first force to the first force-sensitive core 21. The force-sensitive membrane 203 of the first force-sensitive core 21 undergoes slight deformation under pressure. The hydraulic medium transmits the first force to the force-sensitive chip 202. When the abutting piece of the first abutting block 334 abuts against the inner wall of the mounting cavity 10, the force-sensitive membrane 203 of the first force-sensitive core 21 reaches its maximum deformation, and the first force reaches the first preset pressure. At this time, the measured value of the first force-sensitive core 21 is at its maximum. When detecting the second force in the second direction, the second abutting block 335 can transmit the second force to the second force-sensitive core 22. The force-sensitive membrane 203 of the second force-sensitive core 22 undergoes slight deformation under pressure. The hydraulic medium transmits the second force to the force-sensitive chip 202. When the abutting piece of the second abutting block 335 abuts against the inner wall of the mounting cavity 10, the force-sensitive membrane 203 of the second force-sensitive core 22 reaches its maximum deformation, and the second force reaches the second preset pressure. At this time, the measured value of the second force-sensitive core 22 is the maximum. In this embodiment, the first preset pressure is the maximum range of the first force-sensitive core 21, and the second preset pressure is the maximum range of the second force-sensitive core 22. The specific values of the first preset pressure and the second preset pressure are set according to actual needs.
[0047] It should be noted that in other embodiments of this utility model, if the first abutting block 334 is a circular boss and its cross-sectional area is smaller than that of the first abutting bracket 332, when the end face of the first abutting bracket 332 abuts against the inner wall of the mounting cavity 10, the measured value of the first force-sensitive core 21 reaches the first preset pressure, so as to limit the force-sensitive membrane 203 of the first force-sensitive core 21 from being subjected to a greater first force and undergoing more severe deformation; if the second abutting block 335 is a circular boss and its cross-sectional area is smaller than that of the second abutting bracket 333, when the end face of the second abutting bracket 333 abuts against the inner wall of the mounting cavity 10, the measured value of the second force-sensitive core 22 reaches the second preset pressure, so as to limit the force-sensitive membrane 203 of the second force-sensitive core 22 from being subjected to a greater second force and undergoing more severe deformation.
[0048] like Figure 1 As shown, the force-bearing component in this embodiment also includes a second abutment 34, which is fixed on the cover plate 31. There are four third force-sensitive cores 23, two of which are disposed on one side of the second abutment 34 along a third direction, and the other two are disposed on the other side of the second abutment 34 along a third direction. When the force-bearing component is subjected to a third force, the second abutment 34 can abut against the third force-sensitive cores 23 to transmit the third force to the third force-sensitive cores 23, and then the third force-sensitive cores 23 measure the third force. Specifically, the second abutting member 34 in this embodiment includes an annular pressure plate 341 and a sleeve 342. The sleeve 342 is fixed on the cover plate 31 and sleeved on the outside of the connecting core 32. The annular pressure plate 341 is fixed on the outside of the sleeve 342. Two third force sensitive cores 23 are arranged opposite the sleeve 342, and the other two third force sensitive cores 23 are arranged opposite the annular pressure plate 341. When the force-bearing member is subjected to a third force, one of the annular pressure plate 341 and the sleeve 342 can abut against the corresponding third force sensitive core 23.
[0049] like Figure 2 As shown, the mounting cavity 10 in this embodiment further includes a fourth movable cavity 104, a first mounting groove 105, and a second mounting groove 106. The fourth movable cavity 104 communicates with the first movable cavity 101, the first mounting groove 105, and the second mounting groove 106. The fourth movable cavity 104 is used to accommodate the annular pressure plate 341. The first mounting groove 105 is located at the bottom of the fourth movable cavity 104 and contains two third force-sensitive cores 23. The second mounting groove 106 contains two more third force-sensitive cores 23. Specifically, in this embodiment, the first mounting groove 105 and the second mounting groove 106 are both cylindrical grooves, and the third force-sensitive cores 23 are columnar cores.
[0050] It should be noted that in other embodiments of this utility model, the number of third force-sensitive cores 23 can also be two. Each third force-sensitive core 23 is a circular ring core. The two third force-sensitive cores 23 are respectively disposed on both sides of the second abutment member 34 along the third direction, and both third force-sensitive cores 23 correspond to the circular pressure plate 341. The two third force-sensitive cores 23 are respectively disposed on the upper and lower sides of the circular pressure plate 341 along the Z-axis direction. When the force-bearing member is subjected to an upward third force along the Z-axis direction, the circular pressure plate 341 abuts against the upper third force-sensitive core 23, which can detect the upward third force along the Z-axis direction. When the force-bearing member is subjected to a downward third force along the Z-axis direction, the circular pressure plate 341 abuts against the lower third force-sensitive core 23, which can detect the downward third force along the Z-axis direction.
[0051] Specifically, such as Figure 1 As shown, the aforementioned annular pressure plate 341 includes an annular pressure plate 3411 and an annular pressure block 3412. The annular pressure plate 3411 is located within the fourth movable cavity 104 and can move along a third direction. The annular pressure block 3412 is disposed on the upper end face of the annular pressure plate 3411 and can abut against the third force-sensitive core 23. When the measured value of the third force-sensitive core 23 reaches the third preset pressure, the annular pressure plate 3411 abuts against the upper or lower wall surface of the fourth movable cavity 104. Specifically, when the upper surface of the annular pressure plate 3411 of the annular pressure plate 341 abuts against the upper wall surface of the fourth movable cavity 104, the force-sensitive membrane 203 of the third force-sensitive core 23 is compressed and reaches its maximum deformation, and the third force reaches the third preset pressure; or, the lower surface of the annular pressure plate 3411 of the annular pressure plate 341 abuts against the lower wall surface of the fourth movable cavity 104, at which time the measured value of the third force-sensitive core 23 is at its maximum. It should be noted that the third preset pressure in this embodiment is the maximum range of the third force-sensitive core 23. The maximum range is set according to actual needs and is not limited here.
[0052] like Figure 1 As shown, the three-dimensional force sensor in this embodiment also includes a PCB 4, which is electrically connected to the first force-sensitive core 21, the second force-sensitive core 22, and the third force-sensitive core 23, respectively. Figure 2 As shown, the mounting base 1 in this embodiment includes a base 11, an intermediate connecting base 12, and an upper base 13 that are fixedly connected in sequence from bottom to top.
[0053] When assembling the three-dimensional force sensor, firstly, the PCB 4 is fixed to the upper base 13, and the sleeve 342 is fixed to the cover plate 31. The two third force-sensitive cores 23 are then fixed into the two second mounting slots 106 respectively. Next, the annular pressure plate 341 is assembled at a specific position on the sleeve 342, and the sleeve 342 is inserted into the upper base 13. Then, the connecting inner core 321 with the connecting post 322 is fixed to the cover plate 31, and the other two third force-sensitive cores 23 are fixed into the two first mounting slots 106 of the intermediate connecting base 12 respectively. Within 05, the intermediate connecting seat 12 and the upper seat 13 are then fixedly connected. Next, the two first force-sensitive cores 21 and the two second force-sensitive cores 22 are fixed onto the intermediate connecting seat 12. At the same time, the first abutment 33 is sleeved on the connecting post 322, and the limiting block 323 is fixedly installed on the connecting post 322, so that the first abutment 33 faces the first force-sensitive cores 21 and the second force-sensitive cores 22. Finally, the base 11 and the intermediate connecting seat 12 are fixed together to complete the entire assembly. It should be noted that the above installation steps are only one installation method provided in this embodiment, and can be adjusted according to actual needs. It is not limited here.
[0054] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.
Claims
1. A three-dimensional force sensor, characterized in that, include: The mounting base defines a mounting cavity within it; The force-bearing component has one end extending into the mounting cavity and is capable of moving a first preset displacement, a second preset displacement, and a third preset displacement along a first direction, a second direction, and a third direction, respectively, wherein the first direction, the second direction, and the third direction are perpendicular to each other. A first force-sensitive core is disposed on the force-receiving member or in the mounting cavity. When the force-receiving member is subjected to a first force in the first direction, it moves along the first direction to abut against the first force-sensitive core and transmits the first force to the first force-sensitive core. The first force-sensitive core is capable of detecting the first force. The second force-sensitive core is disposed on the force-receiving member or in the mounting cavity. When the force-receiving member is subjected to a second force in the second direction, it moves along the second direction to abut against the second force-sensitive core and transmits the second force to the second force-sensitive core. The second force-sensitive core can detect the second force. A third force-sensitive core is disposed on the force-receiving member or in the mounting cavity. When the force-receiving member is subjected to a third force in the third direction, it moves along the third direction to abut against the third force-sensitive core and transmits the third force to the third force-sensitive core. The third force-sensitive core is capable of detecting the third force. Among them, the first force-sensitive core, the second force-sensitive core and the third force-sensitive core are all chip-type force sensors.
2. The three-dimensional force sensor according to claim 1, characterized in that, The force-bearing component includes a cover plate, a connecting core, and a first abutting member. The cover plate is located on one side of the mounting base and fixed to one end of the connecting core. The first abutting member is sleeved on the other end of the connecting core. The mounting cavity includes a first movable cavity, a second movable cavity, and a third movable cavity that are connected in sequence. The connecting core is located in the first movable cavity, the second movable cavity, and the third movable cavity. The first abutting member is located in the third movable cavity. The first force-sensitive core and the second force-sensitive core are both disposed in the third movable cavity and face the first abutting member. When the cover plate is subjected to the first force or the second force, the cover plate can drive the first abutting member to abut against the first force-sensitive core or the second force-sensitive core through the connecting core.
3. The three-dimensional force sensor according to claim 2, characterized in that, The diameters of the first movable cavity and the third movable cavity are both larger than the diameter of the second movable cavity. The connecting core includes a connecting inner core, a connecting post, and a limiting block connected in sequence. The first abutting member has a through hole with a diameter smaller than that of the limiting block. The connecting post passes through the through hole. The connecting inner core is located in the first movable cavity and its diameter is larger than that of the second movable cavity. The limiting block is disposed at the end of the connecting post opposite to the connecting inner core and located in the third movable cavity.
4. The three-dimensional force sensor according to claim 3, characterized in that, The first abutting member includes an abutting block, two first abutting brackets, and two second abutting brackets. The abutting block is provided with the through hole. The two first abutting brackets are disposed on opposite sides of the abutting block along the first direction, and the two second abutting brackets are disposed on opposite sides of the abutting block along the second direction. There are two first force-sensitive cores and two second force-sensitive cores. Each first abutting bracket extends along the first direction and corresponds to one first force-sensitive core, and each second abutting bracket extends along the second direction and corresponds to one second force-sensitive core.
5. The three-dimensional force sensor according to claim 4, characterized in that, The first abutting member further includes two first abutting blocks and two second abutting blocks. Each first abutting block is disposed at the end of a first abutting bracket and corresponds to a first force-sensitive core. When the measured value of the first force-sensitive core reaches a first preset pressure, the end face of the first abutting block or the first abutting bracket abuts against the inner wall of the mounting cavity. Each of the second abutting blocks is disposed at the end of a second abutting bracket and corresponds to a second force-sensitive core. When the measured value of the second force-sensitive core reaches the second preset pressure, the end face of the second abutting block or the second abutting bracket abuts against the inner wall of the mounting cavity.
6. The three-dimensional force sensor according to claim 2, characterized in that, The force-bearing component further includes a second abutment, which is fixed to the cover plate. There are two third force-sensitive cores, which are respectively disposed on both sides of the second abutment along the second direction. When the force-bearing component is subjected to the third force, the abutment can abut against the third force-sensitive core.
7. The three-dimensional force sensor according to claim 6, characterized in that, The second abutment includes an annular pressure plate and a sleeve. The sleeve is fixed to the cover plate and sleeved on the outside of the connecting core. The annular pressure plate is fixed on the outside of the sleeve. One of the third force-sensitive cores is positioned opposite the sleeve, and the other third force-sensitive core is positioned opposite the annular pressure plate. When the force-bearing member is subjected to the third force, one of the annular pressure plate and the sleeve can abut against the corresponding third force-sensitive core.
8. The three-dimensional force sensor according to claim 7, characterized in that, The mounting cavity further includes a fourth movable cavity, a first mounting groove, and a second mounting groove. The fourth movable cavity is connected to the first movable cavity, the first mounting groove, and the second mounting groove. The fourth movable cavity is used to accommodate the annular pressure plate. The first mounting groove is located at the bottom of the fourth movable cavity and contains a third force-sensitive core. The second mounting groove contains another third force-sensitive core.
9. The three-dimensional force sensor according to claim 8, characterized in that, The annular pressure plate includes an annular pressure sheet and an annular pressure block. The annular pressure sheet is located in the fourth movable cavity and can move along the third direction. The annular pressure block is disposed on the upper end face of the annular pressure sheet and can abut against the third force-sensitive core. When the measured value of the third force-sensitive core reaches the third preset pressure, the annular pressure sheet abuts against the upper or lower wall surface of the fourth movable cavity.
10. The three-dimensional force sensor according to claim 1, characterized in that, The chip-type force sensor includes a core base, a force-sensitive chip, and a force-sensitive membrane. The force-sensitive membrane is fixed on the core base, and the two together form a liquid cavity. The liquid cavity is filled with a hydraulic medium. The force-sensitive chip is fixed on the bottom wall of the liquid cavity. The force-sensitive chip can detect the force transmitted to the hydraulic medium through the force-sensitive membrane.