Wafer transfer robot

Abstract

The utility model relates to wafer handling equipment technical field especially is a kind of wafer handling mechanical arm, including with the first connecting arm of executing mechanism connection and one end with the first connecting arm connection to make the second connecting arm of executing mechanism action, the other end of the second connecting arm is used to be connected with driving mechanism;The first connecting arm includes first base and cover assembly, first waterproof assembly is connected to the first base and cover assembly, and the first waterproof assembly is used to prevent water from seeping into the inside of first connecting arm along the junction of first base and cover assembly;The utility model can improve the waterproof performance of first connecting arm, avoid the inside of mechanical arm rust under humid environment.

Description

Technical Field

[0001] This utility model relates to the field of wafer handling equipment technology, and in particular to a wafer handling robotic arm. Background Technology

[0002] A wafer handling robot is an automated device used in the semiconductor manufacturing process to handle and process fragile and critical wafers. Wafers are the fundamental material in semiconductor chip manufacturing and need to be handled and processed at various stages of the manufacturing process; therefore, specially designed and precisely operated robots are required to accomplish these tasks.

[0003] Patent CN218385170U discloses a robotic arm for handling wafers. This patent achieves convenient and efficient removal of liquid from the wafer surface by rotating the wafer, avoiding the impact of the liquid on the process and damage to the equipment. Furthermore, the cooperation between the rotation mechanism and the clamping mechanism enables convenient and reliable gripping and releasing of the wafer, thereby improving wafer production efficiency. In fact, each single-arm structure of the robotic arm includes a corresponding base and cover plate. The internal structure of each arm can be easily assembled and disassembled by installing or removing the cover plate, ensuring the normal operation of each arm.

[0004] However, since the patent does not include a waterproof structure at the connection between the base and the cover, it cannot prevent moisture from seeping in through tiny gaps. The cyclone effect generated during high-speed rotation will exacerbate moisture intrusion. In long-term humid environments, moisture can easily enter the equipment and cause damage. The equipment is also prone to rust when handled in humid environments. Utility Model Content

[0005] This invention addresses the shortcomings of existing technologies by providing a wafer handling robotic arm that improves the waterproof performance of the first connecting arm, preventing internal corrosion of the robotic arm in humid environments.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] This utility model provides a wafer handling robotic arm for connecting to and driving an actuator to move. It includes a first connecting arm connected to the actuator and a second connecting arm with one end connected to the first connecting arm to enable the actuator to move. The other end of the second connecting arm is used to connect to a drive mechanism.

[0008] The first connecting arm includes a first base and a cover assembly. The first base and the cover assembly are connected to a first waterproof component, which is used to prevent water from seeping into the interior of the first connecting arm along the connection between the first base and the cover assembly.

[0009] The second connecting arm includes a second base and a cover plate. The second base and the cover plate are connected to a second waterproof component, which is used to prevent water from seeping into the interior of the second connecting arm along the connection between the second base and the cover plate.

[0010] The first waterproof component includes a first sealing ring and a first locking member installed circumferentially at the opening end of the first base. The cover component includes a cover plate and a top plate connected to the cover plate. The cover plate is provided with a first receiving cavity. The top end of the first base is inserted into the first receiving cavity. One end of the first sealing ring is tightly fitted to the inner side of the cover plate. The first locking member is used to lock the first base and the cover plate and prevent water from seeping into the first connecting arm along the installation gap of the first locking member.

[0011] The shield is provided with an inspection port and an execution port. The inspection port is equipped with a second sealing ring, and the top plate is sealed to the inspection port through the second sealing ring.

[0012] The second waterproof component includes a third sealing ring and a second locking member installed circumferentially on the open end of the second base. The bottom end of the third sealing ring is tightly fitted to the inner side of the cover plate. The cover plate is provided with a second receiving cavity. The top end of the second base is inserted into the second receiving cavity. The second locking member is used to lock the second base and the cover plate and prevent water from seeping into the second connecting arm along the installation gap of the second locking member.

[0013] The cover plate has a notch at one bottom side, the second base has a water-blocking groove, and the top of the notch extends into the water-blocking groove; the second accommodating cavity has a positioning groove on its inner side, and the second base has a positioning strip that cooperates with the positioning groove.

[0014] The first base is provided with a locking hole, the baffle is provided with a mounting hole, the first locking component includes a first washer and a first locking member, the lower end of the first washer is provided with a first elastic part, the first elastic part is provided with a through hole communicating with the first washer, and the front end of the first locking member passes through the first washer, the through hole and the mounting hole and is threaded into the locking hole.

[0015] The first locking member presses against the first elastic part, and the first elastic part seals the connection between the baffle plate and the first washer to prevent water from seeping into the baffle plate along the connection between the baffle plate and the first washer.

[0016] The first washer has a second elastic part at its upper end, and the second elastic part has an insertion hole that communicates with the first washer. The front end of the first locking member passes through the insertion hole, the first washer, the through hole and the mounting hole and is threaded into the locking hole.

[0017] The first locking member is provided with a pressing part, which presses the first elastic part and the second elastic part together, so that the first elastic part seals the connection between the baffle plate and the first washer, and the second elastic part seals the connection between the first locking member and the first washer, so as to prevent water from seeping into the interior of the first connecting arm.

[0018] The top plate is provided with a straight repair port, which is equipped with a cover. The straight repair port corresponds to the connection between the first connecting arm and the second connecting arm.

[0019] The top plate is provided with a retaining edge located around the straight repair opening, and the cover is provided with a retaining groove, with the retaining edge cooperating with the retaining groove.

[0020] The beneficial effects of this utility model are:

[0021] In practical applications, the actuator is a clamp used to transport materials. The drive mechanism drives the second connecting arm to rotate, which in turn drives the first connecting arm to move, thereby enabling the actuator to move and smoothly transport materials. The first waterproof component prevents water from seeping into the interior of the first connecting arm along the connection between the first base and the cover component, improving the waterproof performance of the first connecting arm and preventing the first connecting arm from rusting in a humid environment. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the wafer handling robotic arm.

[0023] Figure 2 This is an exploded structural diagram of the wafer handling robotic arm.

[0024] Figure 3 This is a schematic diagram of the exploded structure of the second connecting arm.

[0025] Figure 4 This is a schematic diagram of another exploded structure of the second connecting arm.

[0026] Figure 5 This is an exploded view of the installation structure of the first locking component.

[0027] Figure 6 This is a cross-sectional view of the first washer.

[0028] Figure 7 This is a three-dimensional structural diagram of the top plate and the cover.

[0029] Figure 8 This is a structural sectional view of the top plate and the cover.

[0030] 1. First connecting arm;

[0031] 11. First base;

[0032] 111. Locking hole;

[0033] 12. Covering components;

[0034] 121. Shelter; 1211. Inspection port; 1212. Execution port;

[0035] 1213, Second sealing ring; 1214, Mounting hole;

[0036] 122. Top plate; 1221. Straight repair opening; 1222. Edge retaining wall;

[0037] 123. Cover; 1231. Groove;

[0038] 2. Second connecting arm;

[0039] 21. Second base; 211. Water baffle; 212. Positioning strip;

[0040] 22. Cover plate; 221. Notch; 222. Positioning groove;

[0041] 3. First waterproof component;

[0042] 31. First sealing ring; 32. First locking component;

[0043] 321, First washer; 3211, First elastic part; 32111, Through hole; 3212, Second elastic part; 32121, Insertion hole;

[0044] 322. First locking element; 3221. Pressing part;

[0045] 4. Second waterproof component;

[0046] 41. Third sealing ring; 42. Second locking component. Detailed Implementation

[0047] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0048] refer to Figures 1 to 8 As shown, this utility model provides a wafer handling robotic arm for connecting to and driving an actuator. It includes a first connecting arm 1 connected to the actuator and a second connecting arm 2 connected at one end to the first connecting arm 1 to enable the actuator to move. The other end of the second connecting arm 2 is used to connect to a drive mechanism. The first connecting arm 1 includes a first base 11 and a cover assembly 12. The first base 11 and the cover assembly 12 are connected to a first waterproof assembly 3.

[0049] refer to Figure 1 As shown, in practical applications, the actuator is a clamp used to transport materials. The drive mechanism drives the second connecting arm 2 to rotate, which in turn drives the first connecting arm 1 to move, thereby enabling the actuator to move and smoothly transport materials. The first waterproof component 3 prevents water from seeping into the interior of the first connecting arm 1 along the connection between the first base 11 and the cover component 12, thereby improving the waterproof performance of the first connecting arm 1 and preventing the interior of the robotic arm from rusting in a humid environment.

[0050] refer to Figure 1 As shown, in this embodiment, the second connecting arm 2 includes a second base 21 and a cover plate 22. The second base 21 and the cover plate 22 are connected to a second waterproof component 4. The second waterproof component 4 is used to prevent water from seeping into the interior of the second connecting arm 2 along the connection between the second base 21 and the cover plate 22, thereby improving the waterproof performance of the second connecting arm 2 and preventing the second connecting arm 2 from rusting in a humid environment.

[0051] refer to Figure 1 , 2 As shown, in this embodiment, the first waterproof component 3 includes a first sealing ring 31 and a first locking member 32 installed circumferentially at the open end of the first base 11. The covering component 12 includes a cover plate 121 and a top plate 122 connected to the cover plate 121. The cover plate 121 is provided with a first receiving cavity. The top end of the first base 11 is inserted into the first receiving cavity. One end of the first sealing ring 31 is tightly fitted to the inner side of the cover plate 121, effectively sealing the connection between the cover plate 121 and the first base 11, preventing... Water seeps into the first connecting arm 1 through the gap between the baffle plate 121 and the first base 11; the first locking member 32 is used to lock the first base 11 and the baffle plate 121 and prevent water from seeping into the first connecting arm 1 through the installation gap of the first locking member 32. This not only locks the first base 11 and the baffle plate 121, effectively preventing water from seeping between the first base 11 and the baffle plate 121, but also prevents water from seeping into the first connecting arm 1 through the installation gap of the first locking member 32, thereby improving the waterproof performance of the first connecting arm 1.

[0052] refer to Figure 1 , 2 As shown, in this embodiment, the baffle plate 121 is provided with an inspection port 1211 and an execution port 1212. The inspection port 1211 is equipped with a second sealing ring 1213. The top plate 122 is sealed to the inspection port 1211 through the second sealing ring 1213, effectively sealing the connection between the baffle plate 121 and the top plate 122, preventing water from seeping in along the gap between the baffle plate 121 and the top plate 122. The execution port 1212 provides installation space for the actuator and the first connecting arm 1, facilitating the smooth installation of the actuator.

[0053] refer to Figure 1 , 2 As shown, in this embodiment, the second waterproof component 4 includes a third sealing ring 41 and a second locking member 42 installed circumferentially on the open end of the second base 21. The cover plate 22 is provided with a second receiving cavity. The top end of the second base 21 is inserted into the second receiving cavity. The bottom end of the third sealing ring 41 is tightly fitted to the inner side of the cover plate 22, effectively sealing the connection between the cover plate 22 and the second base 21, preventing water from seeping into the second connecting arm 2 along the gap between the cover plate 22 and the second base 21. The second locking member 42 is used to lock the second base 21 and the cover plate 22 and prevent water from seeping into the second connecting arm 2 along the installation gap of the second locking member 42. This not only locks the second base 21 and the cover plate 22, effectively preventing water from seeping between the second base 21 and the cover plate 22, but also prevents water from seeping into the second connecting arm 2 along the installation gap of the second locking member 42, thus improving the waterproof performance of the second connecting arm 2.

[0054] refer to Figure 3 , 4 As shown, in this embodiment, a notch 221 is provided at the bottom of one side of the cover plate 22, and a water-blocking groove 211 is provided on the second base 21. The top end of the notch 221 extends into the water-blocking groove 211, and the corresponding edge of the cover plate 22 is inserted into the water-blocking groove 211 through the notch 221. The bottom of the corresponding edge is lower than the top end of the water-blocking groove 211, so that the water between the notch 221 and the second base 21 is discharged along the water-blocking groove 211. A positioning groove 222 is provided on the inner side of the second accommodating cavity, and a positioning strip 212 is provided on the second base 21. The positioning strip 212 cooperates with the positioning groove 222 to smoothly guide the second base 21 and the cover plate 22 for installation, which is convenient.

[0055] refer to Figure 5 , 6 As shown, in this embodiment, the first base 11 is provided with a locking hole 111, the baffle plate 121 is provided with a mounting hole 1214, the first locking member 32 includes a first washer 321 and a first locking member 322, the lower end of the first washer 321 is provided with a first elastic part 3211, the first elastic part 3211 is provided with a through hole 32111 communicating with the first washer 321, the front end of the first locking member 322 passes through the first washer 321, the through hole 32111 and the mounting hole 1214 and is threaded into the locking hole 111; in actual application, the first locking member 322 is a locking screw, and the first locking member 322 is rotated by an external tool so that the first locking member 322 presses the first elastic part 3211, the first elastic part 3211 seals the connection between the baffle plate 121 and the first washer 321 to prevent water from seeping into the baffle plate 121 along the connection between the baffle plate 121 and the first washer 321.

[0056] refer to Figure 5, 6 As shown, in this embodiment, the upper end of the first washer 321 is provided with a second elastic part 3212. The second elastic part 3212 is provided with an insertion hole 32121 communicating with the first washer 321. The front end of the first locking member 322 passes through the insertion hole 32121, the first washer 321, the through hole 32111, and the mounting hole 1214 and is then threaded into the locking hole 111. In actual application, the first locking member 322 is a locking screw. The first locking member 322 is rotated by an external tool. The first locking member 322 is provided with a pressing part 3221, which presses the first elastic part 3211 and the second elastic part 3212. Part 3212 seals the connection between the first elastic part 3211 and the first gasket 321, and the second elastic part 3212 seals the connection between the first locking member 322 and the first gasket 321 to prevent water from seeping into the interior of the first connecting arm 1. The double waterproof barrier formed by the first elastic part 3211 and the second elastic part 3212 effectively prevents liquid from penetrating into the internal cavity of the first connecting arm 1, thus meeting the sealing performance requirements. Specifically, the second locking member 42 adopts the same structure as the first locking member 32 and effectively prevents liquid from penetrating into the internal cavity of the second connecting arm 2 through the same working principle, thus meeting the sealing performance requirements.

[0057] refer to Figure 7 , 8 As shown in this embodiment, the top plate 122 is provided with a direct maintenance port 1221, and a cover 123 is installed on the direct maintenance port 1221. The direct maintenance port 1221 corresponds to the connection between the first connecting arm 1 and the second connecting arm 2. In actual application, the cover 123 can be removed, and the connection between the first connecting arm 1 and the second connecting arm 2 can be directly maintained through the direct maintenance port 1221. When performing maintenance work, only the cover 123 needs to be removed to quickly carry out the inspection and maintenance operation, realize the rapid access to key components, effectively avoid the time loss and component damage risk caused by disassembling additional parts, significantly improve maintenance efficiency and reduce equipment maintenance costs.

[0058] refer to Figure 7 , 8 As shown, in this embodiment, the top plate 122 is provided with a baffle 1222 located around the straight repair opening 1221, and the cover 123 is provided with a baffle groove 1231. The baffle 1222 and the baffle groove 1231 cooperate to prevent water from flowing in along the straight repair opening 1221 by the baffle 1222, and to block the water outside the straight repair opening 1221 by the cover 123, thereby ensuring the waterproof performance of the top plate 122.

[0059] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A wafer handling robotic arm, used to connect to and drive an actuator, characterized in that, It includes a first connecting arm (1) connected to an actuator and a second connecting arm (2) connected at one end to the first connecting arm (1) to enable the actuator to move, and the other end of the second connecting arm (2) is used to connect to a drive mechanism; The first connecting arm (1) includes a first base (11) and a cover assembly (12). The first base (11) and the cover assembly (12) are connected to a first waterproof assembly (3). The first waterproof assembly (3) is used to prevent water from seeping into the interior of the first connecting arm (1) along the connection between the first base (11) and the cover assembly (12).

2. The wafer handling robotic arm according to claim 1, characterized in that, The second connecting arm (2) includes a second base (21) and a cover plate (22). The second base (21) and the cover plate (22) are connected to a second waterproof component (4). The second waterproof component (4) is used to prevent water from seeping into the interior of the second connecting arm (2) along the connection between the second base (21) and the cover plate (22).

3. The wafer handling robotic arm according to claim 1, characterized in that, The first waterproof component (3) includes a first sealing ring (31) and a first locking member (32) installed circumferentially at the opening end of the first base (11). The cover component (12) includes a cover plate (121) and a top plate (122) connected to the cover plate (121). The cover plate (121) is provided with a first receiving cavity. The top end of the first base (11) is inserted into the first receiving cavity. One end of the first sealing ring (31) is tightly attached to the inner side of the cover plate (121). The first locking member (32) is used to lock the first base (11) and the cover plate (121) and prevent water from seeping into the first connecting arm (1) along the installation gap of the first locking member (32).

4. The wafer handling robotic arm according to claim 3, characterized in that, The shield (121) is provided with an inspection port (1211) and an execution port (1212). The inspection port (1211) is equipped with a second sealing ring (1213). The top plate (122) is sealed to the inspection port (1211) through the second sealing ring (1213).

5. The wafer handling robotic arm according to claim 2, characterized in that, The second waterproof component (4) includes a third sealing ring (41) and a second locking member (42) installed circumferentially at the opening end of the second base (21). The bottom end of the third sealing ring (41) is tightly fitted to the inner side of the cover plate (22). The cover plate (22) is provided with a second receiving cavity. The top end of the second base (21) is inserted into the second receiving cavity. The second locking member (42) is used to lock the second base (21) and the cover plate (22) and prevent water from seeping into the second connecting arm (2) along the installation gap of the second locking member (42).

6. The wafer handling robotic arm according to claim 5, characterized in that, The cover plate (22) has a notch (221) at the bottom of one side, and the second base (21) has a water-blocking groove (211). The top of the notch (221) extends into the water-blocking groove (211). The inner side of the second accommodating cavity has a positioning groove (222), and the second base (21) has a positioning strip (212). The positioning strip (212) cooperates with the positioning groove (222).

7. The wafer handling robotic arm according to claim 3, characterized in that, The first base (11) is provided with a locking hole (111), the baffle plate (121) is provided with a mounting hole (1214), the first locking member (32) includes a first washer (321) and a first locking member (322), the lower end of the first washer (321) is provided with a first elastic part (3211), the first elastic part (3211) is provided with a through hole (32111) communicating with the first washer (321), and the front end of the first locking member (322) passes through the first washer (321), the through hole (32111) and the mounting hole (1214) and is threaded into the locking hole (111); The first locking member (322) presses against the first elastic part (3211), and the first elastic part (3211) seals the connection between the baffle plate (121) and the first washer (321) to prevent water from seeping into the baffle plate (121) along the connection between the baffle plate (121) and the first washer (321).

8. The wafer handling robotic arm according to claim 7, characterized in that, The upper end of the first washer (321) is provided with a second elastic part (3212), and the second elastic part (3212) is provided with an insertion hole (32121) communicating with the first washer (321). The front end of the first locking member (322) passes through the insertion hole (32121), the first washer (321), the through hole (32111) and the mounting hole (1214) and is then threaded into the locking hole (111). The first locking member (322) is provided with a pressing part (3221), which presses the first elastic part (3211) and the second elastic part (3212) so that the first elastic part (3211) seals the connection between the baffle plate (121) and the first washer (321), and the second elastic part (3212) seals the connection between the first locking member (322) and the first washer (321) to prevent water from seeping into the interior of the first connecting arm (1).

9. The wafer handling robotic arm according to claim 3, characterized in that, The top plate (122) is provided with a straight repair port (1221), and a cover (123) is installed on the straight repair port (1221). The straight repair port (1221) corresponds to the connection between the first connecting arm (1) and the second connecting arm (2).

10. The wafer handling robotic arm according to claim 9, characterized in that, The top plate (122) is provided with a retaining edge (1222) located around the straight repair opening (1221), and the cover (123) is provided with a retaining groove (1231), and the retaining edge (1222) cooperates with the retaining groove (1231).

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