Automatic detection bearing table for glass panel

Abstract

The utility model discloses a kind of automatic detection bearing platform of glass panel, including bottom plate, the bottom plate is provided with multiple support columns, multiple support columns top surface is placed and is provided with support platform, the bottom plate below support platform is provided with screw rod linkage lifting platform, the lifting platform of screw rod linkage lifting platform is provided with linkage frame, the linkage frame is provided with several top columns, the support platform corresponding to top column is provided with avoidance through-hole, the support platform surface is provided with vacuum hole.The utility model can cooperate with manipulator to place glass panel, improve automation level.

Description

Technical Field

[0001] This utility model relates to the field of glass panel inspection technology, specifically to an automatic glass panel inspection support platform. Background Technology

[0002] Semiconductor glass panels are a new key material in the field of advanced semiconductor packaging. Using glass as a substrate, through technologies such as integrated glass vias (TGV) and high-density redistribution layers (RDL), they replace traditional organic substrates or silicon interposers for chip interconnection, carrier support, and system integration. They are an important carrier for realizing heterogeneous chip integration and improving chip performance.

[0003] After the glass panel is manufactured, performance and strength testing are required to ensure it meets the reliability requirements of subsequent packaging processes. Traditional testing methods often involve manual loading and unloading combined with fixed testing equipment, which suffers from low efficiency, easy damage to the panel, and insufficient positioning accuracy.

[0004] Of course, with the development of automation technology, replacing manual labor with robotic arms is an inevitable trend. Because glass panels have a certain weight, there is a risk of them falling when the robotic arm picks them up from above. Therefore, in many cases, the method of using a robotic arm to lift and pick up the glass panel from below is chosen for transfer. However, when placing it on the inspection platform, there is placement interference because the robotic arm is below the glass panel.

[0005] Therefore, there is an urgent need for a testing platform that can automatically carry and accurately position glass panels. Summary of the Invention

[0006] The technical problem to be solved by this utility model is to provide an automatic glass panel inspection support platform that can work with a robotic arm to place glass panels and improve the level of automation.

[0007] To solve the above-mentioned technical problems, this utility model provides an automatic glass panel inspection support platform, including a base plate, a plurality of support columns are provided on the base plate, a support platform is placed on the top surface of the plurality of support columns, a screw-driven lifting platform is provided on the base plate below the support platform, a linkage frame is provided on the lifting platform of the screw-driven lifting platform, a plurality of top columns are provided on the linkage frame, an avoidance through hole is provided on the support platform corresponding to the top column, and a vacuum hole is provided on the surface of the support platform.

[0008] Furthermore, each of the four outer peripheries of the base plate is provided with a first positioning wheel, the first positioning wheel is connected to a first lifting cylinder, and the first lifting cylinder is connected to a first horizontal cylinder.

[0009] Furthermore, a second positioning wheel is provided at each of the four corners of the base plate. The second positioning wheel is connected to a second lifting cylinder. The second lifting cylinder is connected to a two-axis horizontal cylinder assembly, which includes an overlapping Y-axis cylinder and an X-axis cylinder.

[0010] Furthermore, the support column includes an upper placement platform and a lower mounting platform. An upper guide sleeve, a double-headed guide rod, and a lower guide sleeve are sequentially arranged between the upper placement platform and the lower mounting platform. A nut head is provided in the middle of the double-headed guide rod. Threaded sections and guide rod sections are provided on the surfaces of the double-headed guide rods on both sides of the nut head. Guide grooves are provided inside both the upper and lower guide sleeves. Internal threads are provided on the inner wall of the guide groove near the groove opening. The guide rod sections extend into the guide groove and cooperate for guidance. The threaded sections are screwed into the internal threads. A fixing nut is also provided on the threaded sections.

[0011] Furthermore, a positioning protrusion is provided at the bottom of the lower mounting platform.

[0012] Furthermore, a photoelectric sensor is also provided on the linkage frame.

[0013] Furthermore, an electrostatic detection sensor is also provided on the linkage frame.

[0014] Furthermore, the linkage frame includes a main square frame beam, within which several secondary beams are provided, and between adjacent secondary beams and between secondary beams and the main square frame beam, several reinforcing beams are provided. Several extension arms are also provided on the outer side of the main square frame beam, and support columns are provided on the main square frame beam, secondary beams, and extension arms.

[0015] The beneficial effects of this utility model are:

[0016] The support platform is effectively fixed by the support columns, and the top column under the support platform can extend through the support platform. During the process of transferring the glass panel, the robotic arm has room to retract. Then the top column descends to place the glass panel on the support platform, thus solving the problem of the robotic arm supporting and transferring the glass panel. It is highly automated and does not require manual intervention for placement.

[0017] The support platform has a vacuum hole for connecting to an external vacuum source. After the glass panel is placed on the support platform, it can be adsorbed and fixed on the support platform by vacuum. The structure is simple, efficient, and convenient for subsequent performance testing or destructive pressure testing. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a structural schematic diagram of the corner of the base plate of this utility model;

[0020] Figure 3 This is a schematic diagram of the first positioning wheel drive part of this utility model;

[0021] Figure 4 This is a schematic diagram of the second positioning wheel drive part of this utility model;

[0022] Figure 5 This is a schematic diagram of the support column structure of this utility model;

[0023] Figure 6 This is a utility model Figure 5 A schematic diagram of the cross-sectional structure;

[0024] Figure 7 This is a schematic diagram of the middle part of the base plate of this utility model;

[0025] Figure 8 This is a structural schematic diagram of the limiting process of the support platform in this utility model. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0027] Reference Figure 1 As shown, one embodiment of the automatic glass panel detection support platform of this utility model includes a base plate 1, on which multiple support columns 2 are provided. A support platform 3 is placed on the top surface of the multiple support columns. The top surfaces of the multiple support columns are adjusted to be on the same plane, thus effectively supporting and stabilizing the support platform. A screw-linked lifting platform 4 is provided on the base plate below the support platform. The screw-linked lifting platform is a prior art technology. Multiple gear screw lifts are connected in series through a transmission rod and driven by a motor to achieve synchronous lifting. A linkage frame 5 is provided on the lifting platform of the screw-linked lifting platform. That is, the lifting action drives the linkage frame to lift. Several top columns 6 are provided on the linkage frame. The support platform corresponding to the top column is provided with clearance through holes 7. Through the lifting of the linkage frame, the top columns lift synchronously. When at the lower limit position, the top of the top column is located below the lower surface of the support platform. When at the upper limit position, the top of the top column passes through the corresponding clearance through hole to the upper surface of the support platform. Vacuum holes are provided on the surface of the support platform. The vacuum holes are connected to the vacuum flow channel inside the support platform. The vacuum flow channel is connected to an external vacuum source to achieve the effect of vacuum adsorption.

[0028] Specifically, the support platform is placed on multiple support columns and is suspended in the air. When the glass panel needs to be inspected, the glass panel is lifted and gripped by a robotic arm and placed above the support platform. At the same time, the screw-driven lifting platform moves, causing the top column to rise and pass through the clearance hole to the top of the support platform. The robotic arm moves downward, so that the lower surface of the glass panel abuts against the top of the top column. After continuing to descend a certain distance, the robotic arm separates from the glass panel, and the glass panel is transferred to the top column. At this point, the robotic arm can move horizontally to pull it away from the glass panel and the support platform. Then, the screw-driven lifting platform descends, causing the glass panel to fall and finally abut against the surface of the support platform. Then, the vacuum source is turned on, adsorbing the glass panel onto the support platform, achieving effective fixation for subsequent inspection.

[0029] During the descent of the top column, the top column may not completely detach from the avoidance through hole, that is, the top part of the top column is inside the fish feeding avoidance through hole, but it is not protruding. The top column can play a horizontal limiting role for the support platform.

[0030] Reference Figures 2 to 4 As shown, since the top column needs to pass through the avoidance through hole, the relative position of the avoidance through hole and the top column is important. Therefore, a structure that can effectively position the support platform is provided to avoid the problem of long-term manual debugging. Specifically, the four outer peripheries of the base plate are provided with first positioning wheels 8, the first positioning wheels are connected to the first lifting cylinder 9, and the first lifting cylinder is connected to the first horizontal cylinder 10.

[0031] The first horizontal cylinders on two opposing sides move in the same direction, forming movement in both the X and Y axes. Initially, all four first horizontal cylinders move relatively far apart. During the positioning phase, they move relatively closer together, converging on the four sides of the support platform to achieve horizontal positioning and fixation. Specifically, the first positioning wheel effectively reduces friction during adjustment, resulting in more accurate positioning of the support platform. A groove can be created on the support platform side corresponding to the first positioning wheel, allowing the first positioning wheel to move into the groove, effectively improving positioning and ensuring alignment accuracy. The first lifting cylinder can move the first positioning wheel upwards or downwards. At the lower limit, the top of the first positioning wheel is lower than the support platform, allowing for horizontal avoidance during placement or replacement operations by lowering the first positioning wheel via the lifting cylinder, making the support platform operation more convenient.

[0032] Since glass panels are typically rectangular, the support platform is also fabricated as a rectangular structure, referring to... Figure 8As shown, two first positioning wheels are provided on each side. Due to the limitation of length and width, the effective movement of the first positioning wheels cannot meet the positioning requirements. Therefore, second positioning wheels 11 are also provided at the four corners of the base plate. The second positioning wheels are connected to the second lifting cylinder 12. The second lifting cylinder is connected to the two-axis horizontal cylinder assembly. The two-axis horizontal cylinder assembly includes a Y-axis cylinder 13 and an X-axis cylinder 14 that are stacked.

[0033] During positioning, the corresponding first positioning wheel is selected based on the length and width dimensions, and works in conjunction with the second positioning wheel to achieve effective fixation. Specifically, the four first positioning wheels in the length direction cooperate in pairs to clamp the support platform along its length. In the width direction, the four second positioning wheels move closer to the side of the support platform for fixation. (Refer to...) Figure 8 As shown, when the support platform is placed vertically, the first positioning wheels on the top and bottom sides move towards the center, while the second positioning wheels at the four corners move to the left and right respectively. When the support platform is placed horizontally, the first positioning wheels on the left and right sides move, while the second positioning wheels at the four corners move downwards and upwards respectively.

[0034] Through the above combination, the positioning needs of the support platform in different placement positions can be met. Its versatility is greatly improved.

[0035] Reference Figure 5 and Figure 6 As shown, the support column includes an upper placement platform 15 and a lower mounting platform 16. An upper guide sleeve 17, a double-headed guide rod 18, and a lower guide sleeve 19 are arranged sequentially between the upper placement platform and the lower mounting platform. A nut head 20 is provided in the middle of the double-headed guide rod. Threaded sections 21 and guide rod sections 22 are provided on the surfaces of the double-headed guide rods on both sides of the nut head. Guide grooves 23 are provided in both the upper and lower guide sleeves. Internal threads are provided on the inner wall of the guide groove near the groove opening. The guide rod sections extend into the guide groove and cooperate for guidance. The threaded sections are screwed into the internal threads. A fixing nut is also provided on the threaded sections.

[0036] The three-section connection structure significantly improves the adjustment accuracy and efficiency of the support column. Specifically, the guide rod section of the double-headed guide rod is located within the guide groove, maintaining axial movement throughout the rotation and lifting process, ensuring high adjustment stability. Furthermore, the top surface of the support column is flat after adjustment and locking, guaranteeing effective support for the platform. Rapid movement can be achieved by rotating the nut head (the double-headed guide rod can have a forward and reverse thread structure), a technique not detailed here. Alternatively, only the upper platform can be rotated for even higher precision adjustment. A positioning protrusion 24 is provided at the bottom of the lower mounting platform, with corresponding holes on the base plate. After insertion, the installation position of the lower mounting platform can be quickly determined, improving assembly convenience.

[0037] Reference Figure 7 As shown, a photoelectric sensor 25 is also installed on the linkage frame to quickly detect the presence or absence of the glass panel, i.e., whether the robot arm has transferred the glass panel onto the top column, and whether the support platform has the glass panel during the detection process. An electrostatic discharge sensor 26 is also installed on the linkage frame to detect the static electricity value on the glass panel. If the static electricity value is too high, static electricity removal is required to avoid interference with subsequent detection and improve the accuracy of the detection data.

[0038] The aforementioned linkage frame includes a main square frame beam 29, within which several secondary beams 261 are arranged. Several reinforcing beams 27 are arranged between adjacent secondary beams and between secondary beams and the main square frame beam. Several extension arms 28 are also arranged on the outer side of the main square frame beam. Support columns are arranged on the main square frame beam, secondary beams, and extension arms. This assembly, achieved through splicing, can significantly reduce manufacturing costs.

[0039] The above embodiments are merely preferred embodiments provided to fully illustrate the present utility model, and the protection scope of the present utility model is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present utility model are all within the protection scope of the present utility model.

Claims

1. An automatic glass panel inspection platform, characterized in that, The system includes a base plate, on which multiple support columns are provided. A support platform is placed on the top surface of the multiple support columns. A screw-driven lifting platform is provided on the base plate below the support platform. A linkage frame is provided on the lifting platform of the screw-driven lifting platform. Several top columns are provided on the linkage frame. A clearance through hole is provided on the support platform corresponding to the top column. Vacuum holes are provided on the surface of the support platform.

2. The automatic glass panel detection support platform as described in claim 1, characterized in that, Each of the four outer peripheries of the base plate is provided with a first positioning wheel, the first positioning wheel is connected to a first lifting cylinder, and the first lifting cylinder is connected to a first horizontal cylinder.

3. The automatic glass panel inspection platform as described in claim 2, characterized in that, The base plate is provided with a second positioning wheel at each of its four corners. The second positioning wheel is connected to a second lifting cylinder. The second lifting cylinder is connected to a two-axis horizontal cylinder assembly. The two-axis horizontal cylinder assembly includes an overlapping Y-axis cylinder and an X-axis cylinder.

4. The automatic glass panel detection support platform as described in claim 1, characterized in that, The support column includes an upper placement platform and a lower mounting platform. An upper guide sleeve, a double-headed guide rod, and a lower guide sleeve are sequentially arranged between the upper placement platform and the lower mounting platform. A nut head is provided in the middle of the double-headed guide rod. Threaded sections and guide rod sections are provided on the surfaces of the double-headed guide rods on both sides of the nut head. Guide grooves are provided inside both the upper and lower guide sleeves. Internal threads are provided on the inner wall of the guide groove near the groove opening. The guide rod sections extend into the guide groove and cooperate for guidance. The threaded sections are screwed into the internal threads. A fixing nut is also provided on the threaded sections.

5. The automatic glass panel inspection platform as described in claim 4, characterized in that, The bottom of the lower mounting platform is provided with a positioning protrusion.

6. The automatic glass panel detection support platform as described in claim 1, characterized in that, The linkage frame is also equipped with photoelectric sensors.

7. The automatic glass panel inspection platform as described in claim 1, characterized in that, An electrostatic detection sensor is also installed on the linkage frame.

8. The automatic glass panel inspection platform as described in claim 1, characterized in that, The linkage frame includes a main square beam, within which several secondary beams are provided. Several reinforcing beams are provided between adjacent secondary beams and between the secondary beams and the main square beam. Several extension arms are also provided on the outer side of the main square beam. Support columns are provided on the main square beam, secondary beams, and extension arms.

Images