A forming jig applied to double-sided nanoimprinting
By designing a molding fixture, the problem of cumbersome double-sided nanoimprinting operations was solved, achieving simplified processes and efficient production while ensuring product quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- BIEL OPTIC HUIZHOU
- Filing Date
- 2025-07-10
- Publication Date
- 2026-07-10
AI Technical Summary
Existing technologies require nanoimprinting on both sides separately when preparing products with nanoscale fine structures on both sides. This process is cumbersome, time-consuming, and has low production efficiency.
By employing a molding fixture comprising a first fixing component and a second fixing component, and through the arrangement of the support component, the first fixing component, and the second fixing component, double-sided nanoimprinting can be performed without flipping, simplifying the operation process and shortening the nanoimprinting time.
It enables double-sided nano-imprinting without flipping the product, simplifying the operation process, improving production efficiency, avoiding product scratches and deformation, and ensuring the quality of texture forming.
Smart Images
Figure CN224480649U_ABST
Abstract
Description
Technical Field
[0001] This application belongs to the field of nanoimprinting auxiliary technology, specifically relating to a molding fixture for double-sided nanoimprinting. Background Technology
[0002] In the field of nanofabrication, nanoimprint lithography has become one of the key technologies for the fabrication of micro and nanostructures due to its advantages of high resolution and low cost. Among existing technologies, single-layer nanoimprint lithography is relatively mature and can meet the manufacturing needs of some single-surface nanostructures.
[0003] However, when it is necessary to prepare products with nanoscale fine structures on both sides, the traditional process usually adopts the method of performing nanoimprinting on both sides separately. In the process of implementing double-sided nanoimprinting, the first layer that has been completed by nanoimprinting must be flipped over before the second layer is imprinted. The operation is cumbersome, time-consuming and the production efficiency is greatly reduced. Utility Model Content
[0004] To address the shortcomings of the prior art, this application provides a molding fixture for double-sided nanoimprinting. By setting up a first fixing component and a second fixing component, double-sided nanoimprinting can be performed without flipping the fixture. The overall operation process is simple, effectively shortening the nanoimprinting time and thus improving production efficiency.
[0005] The technical effects to be achieved in this application are realized through the following aspects:
[0006] This application provides a molding fixture for double-sided nanoimprinting, comprising:
[0007] A first fixing component includes a support member and two opposing first fixing members. The support member has an imprinting operation hole. The first fixing members are located on both sides of the imprinting operation hole and are opposite to the support member. The first fixing members are used to fix an upper texture template.
[0008] The second fixing component is provided corresponding to the imprinting operation hole. The upper end surface of the second fixing component is flush with the upper end surface of the support member. The second fixing component is used to fix the lower texture template.
[0009] In some implementations, the second fixing component includes a second fixing member and an adjusting member, the second fixing member being connected to the adjusting member, and the outer edge of the second fixing member forming an adjusting area with the inner wall of the embossing operation hole.
[0010] In some implementations, the second fixing component further includes a positioning post that protrudes from the second fixing component.
[0011] In some implementations, at least one positioning post is provided, and a plurality of positioning posts constitute a positioning group, which is located on one side of the second fixing member.
[0012] In some implementations, the second fastener includes a second body and a second pin, with second fixing holes at the four corners of the second body that are adapted to the second pin.
[0013] In some implementations, the second fastener further includes a second adhesive layer, which is disposed opposite to each other on both sides of the second body.
[0014] In some implementations, the adjusting element is a micrometer slide adjusting element.
[0015] In some implementations, the first fastener includes a first body and a first pin, and the two ends of the body are provided with first fixing holes that are adapted to the first pin.
[0016] In some implementations, the first fastener further includes a first adhesive layer disposed on the side of the first body facing the support.
[0017] In some implementations, the support member is hinged to the first fixing member on one side.
[0018] In summary, this application has at least the following advantages:
[0019] 1. The molding fixture for double-sided nanoimprinting provided in this application, through the setting of a first fixing component and a second fixing component, places the upper texture template between the first fixing component and the support component and fixes it with the first fixing component. At the same time, the lower texture template is fixed by the second fixing component. A PET film coated with adhesive on both sides is placed between the lower texture template and the upper texture template. The molding fixture sequentially places and fixes the materials required for nanoimprinting, and finally performs simultaneous double-sided nanoimprinting on the materials. After the imprinting is completed, the first fixing component is opened and the imprinted PET film is removed. This eliminates the need to perform nanoimprinting operations on both sides separately, simplifies the operation process, greatly shortens the nanoimprinting time, and effectively improves production efficiency.
[0020] 2. The molding fixture for double-sided nanoimprinting provided in this application, with the first fixing component and the second fixing component, eliminates the need to place the already imprinted side on the platform when performing the second nanoimprinting, thus avoiding the risk of scratches, tears and deformation of the product and effectively ensuring the molding quality of the texture. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the molding fixture in Embodiment 1 of this application.
[0022] Figure 2 This is a schematic diagram showing the structure of the second fixing component in Embodiment 2 of this application.
[0023] Figure 3 This is a structural schematic diagram of the second fixing component shown in Embodiment 3 of this application.
[0024] Figure 4 This is a structural schematic diagram of the first fixing component shown in Embodiment 3 of this application.
[0025] Marked in the image:
[0026] 1. First fixing component; 11. Support component; 111. Imprinting operation hole; 12. First fixing component; 121. First body; 122. First pin; 123. First fixing hole; 2. Second fixing component; 21. Second fixing component; 211. Second body; 212. Second pin; 213. Second fixing hole; 214. Second adhesive layer; 22. Adjusting component; 23. Positioning post. Detailed Implementation
[0027] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. The described embodiments are only some embodiments of this application, not all embodiments.
[0028] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.
[0029] Example 1:
[0030] Please see the appendix Figure 1 This application discloses a molding fixture for double-sided nanoimprinting, comprising a first fixing component 1 and a second fixing component 2. The first fixing component 1 includes a support member 11 and a first fixing component 12 disposed opposite to it. The support member 11 has an imprinting operation hole 111. The first fixing component 12 is disposed on both sides of the imprinting operation hole 111 and opposite to the support member 11; the first fixing component 12 is used to fix an upper texture template. The second fixing component 2 is disposed corresponding to the imprinting operation hole 111, and its upper end surface is flush with the upper end surface of the support member 11; the second fixing component 2 is used to fix a lower texture template.
[0031] The molding fixture for double-sided nanoimprinting in this embodiment has the following double-sided nanoimprinting process: First, the upper texture template is fixed by the first fixing member 12, and the upper texture template is positioned between the support member 11 and the first fixing member 12. Next, the lower texture template is fixed by the second fixing member 2, and glue is applied to the upper end of the lower texture template. Then, the PET film is placed on the glue of the lower texture template, and glue is applied to the upper end of the PET film. Then, the upper texture template is placed on the glue on the upper end of the PET film. Finally, the PET film in the molding fixture is simultaneously nanoimprinted on both sides through the processes of rolling glue, imprinting, and LED-UV lamp curing. After the nanoimprinting is completed, the upper texture template in the first fixing member 12 is opened, and the PET film is taken out for subsequent continuous nanoimprinting operations.
[0032] With the above setup, during the nanoimprinting process, a molding fixture is used to place a PET film coated with adhesive on both sides between the upper and lower texture templates for imprinting. This eliminates the need to perform nanoimprinting on both sides separately, making the operation simple and convenient, greatly shortening the nanoimprinting time and effectively improving production efficiency.
[0033] In addition, this structure can prevent the side that has completed nanoimprinting from being placed on the platform, thereby avoiding the risk of scratches, tears and deformation of the product, and effectively ensuring the forming quality of the texture.
[0034] Example 2:
[0035] The difference between this embodiment and Embodiment 1 is that, please refer to... Figure 2 The second fixing component 2 in this embodiment includes a second fixing member 21 and an adjusting member 22. The second fixing member 21 is connected to the adjusting member 22, and the outer edge of the second fixing member 21 forms an adjusting area with the inner wall of the embossing operation hole 111.
[0036] The adjustment area is used for fine-tuning of the second fixing member 21. Preferably, the adjustment member 22 is a micrometer slide adjustment member 22, and the micrometer slide can adopt a structure that can realize translational adjustment of the X and Y axes and angle adjustment of the R axis in the existing technology. Specifically, the adjustment principles of the X and Y axes are similar, both of which are driven by a micrometer and the movement direction is limited by a high-precision guide rail to achieve linear translation; the two usually adopt a "stacked structure", that is, the Y-axis slide is fixed on the base and the X-axis slide is mounted on the Y-axis slide, or vice versa, and the independent adjustment does not interfere with each other. The R-axis adjustment requires the addition of a rotary platform on the basis of the X / Y axis slide. Its core is the combination of the rotary axis system and the angle adjustment mechanism to realize the function. Specifically, the rotary axis system can be realized by combining any one of the existing precision spindle bearings or air static pressure shaft systems with the rotation center positioning. The angle adjustment mechanism employs either a micrometer-push type or a worm gear drive. The micrometer-push type uses adjusting lugs on the edge of the rotating platform, with the micrometer screw pushing the lugs and a spring for resetting. For example, two micrometers can be symmetrically arranged, and the platform can be rotated by adjusting them in opposite directions. The worm gear drive connects the worm to the micrometer, with the worm wheel fixed to the rotating platform. Rotating the micrometer causes the worm to rotate, which in turn is converted into platform rotation via the worm wheel.
[0037] By employing the combination of adjusting component 22 and second fixing component 21, the second fixing component 21 is used to fix the lower texture template, and the position of the lower texture template can be adjusted by adjusting component 22, allowing for precise alignment with the upper texture template to ensure the relative positional accuracy of the double-sided nanostructure. This effectively improves the alignment accuracy of the lower and upper texture templates, ensures product yield, and enables the application and promotion of double-sided nanoimprint technology in large-scale industrial production.
[0038] In some embodiments, the second fixing component 2 further includes a positioning post 23, which protrudes from the second fixing component 21. This arrangement allows the upper and lower texture templates to be inserted into the positioning post 23 for initial positioning, significantly reducing alignment deviations in the early stages of alignment. This facilitates precise alignment through minor adjustments using the adjusting component 22, effectively improving alignment accuracy and further ensuring production yield.
[0039] In some embodiments, at least one positioning post 23 is provided, and a plurality of positioning posts 23 constitute a positioning group, which is located on one side of the second fixing member 21. Preferably, two positioning posts 23 are provided. By setting the positioning group on one side of the second fixing member 21, not only can the initial positioning be satisfied, but it also facilitates the fine-tuning of the position of the adjusting member 22 on the lower texture template, ensuring smooth position adjustment. In addition, during the gluing process, the positioning post 23 can be pulled out, or the length involved in the roller can be shortened to ensure independent operation of gluing and initial positioning, ensuring smooth operation.
[0040] Example 3:
[0041] The difference between this embodiment and Embodiment 1 is that, please refer to... Figure 3 The second fixing member 21 in this embodiment includes a second body 211 and a second pin 212. The four corners of the second body 211 are provided with second fixing holes 213 that are adapted to the second pin 212.
[0042] In this embodiment, the second fixing member 21 fixes the lower texture template on the second body 211 by placing the lower texture template on the second body 211 and then fixing the lower texture template on the second body 211 with the second pin 212, thereby fixing the four corners of the lower texture template and effectively ensuring the placement stability of the lower texture template.
[0043] In some embodiments, the second fastener 21 further includes a second adhesive layer 214, which is disposed opposite to the second body 211 on both sides. The second adhesive layer 214 is a high-temperature adhesive layer, specifically a structure composed of any of the following: silicone adhesives, high-temperature modified epoxy resin adhesives, or polyimide-based adhesives in the prior art.
[0044] Specifically, a second adhesive layer 214 is used to further fix the lower texture template, preventing the lower texture template from shifting during the imprinting process, effectively ensuring the stability of the lower texture template, and thus ensuring the imprinting quality.
[0045] In some embodiments, see Figure 4 The first fixing member 12 includes a first body 121 and a first pin 122. The two ends of the body are provided with first fixing holes 123 that are adapted to the first pin 122. There are two first fixing members 12.
[0046] Specifically, by placing the upper texture template at the lower end of the first body 121 and fixing it to the first body 121 with the first pin 122, the four corners of the upper texture template are fixed, thereby achieving the stability of the upper texture template placement and further ensuring the accuracy of the alignment between the upper and lower texture templates.
[0047] In some preferred embodiments, the first fastener 12 further includes a first adhesive layer disposed on the side of the first body 121 facing the support member 11. The first adhesive layer is a high-temperature adhesive layer, specifically a structure composed of any of the following: silicone adhesives, high-temperature modified epoxy resin adhesives, or polyimide-based adhesives in the prior art.
[0048] Specifically, the first adhesive layer can further fix the upper texture template, avoid the phenomenon of displacement during the nanoimprinting process, ensure the stability of the upper texture template, further ensure the accuracy of the alignment between the upper and lower texture templates, and ensure the quality of nanoimprinting.
[0049] In some embodiments, the support member 11 is hinged to a first fixing member 12 on one side. Preferably, a hinge mechanism can be used to achieve the hinged connection.
[0050] Specifically, after the imprinting is completed, the first fixing member 12 can be manually opened, allowing the upper texture template to rotate around the hinge as the axis of rotation, separating it from the lower texture template. This design facilitates the removal of the imprinted PET film after the nanoimprinting is completed.
[0051] In addition, in this structure, only the positioning of the upper and lower texture templates needs to be completed initially. Subsequent nanoimprinting with the same requirements can be used directly without re-alignment, which is suitable for mass production and further improves production efficiency.
[0052] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0053] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0054] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0055] In this application, unless otherwise expressly specified and limited, "above or below" a first feature may include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on" a first feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" a first feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0056] Although the description of this application has been made in conjunction with the specific embodiments described above, it is obvious to those skilled in the art that many substitutions, modifications, and variations can be made based on the above description. Therefore, all such substitutions, modifications, and variations are included within the spirit and scope of the appended claims.
Claims
1. A molding fixture for double-sided nanoimprinting, characterized in that, include: The first fixing component (1) includes a support member (11) and a first fixing member (12) disposed opposite to it. The support member (11) has an imprinting operation hole (111). The first fixing member (12) is disposed on both sides of the imprinting operation hole (111) and is opposite to the support member (11). The first fixing member (12) is used to fix the upper texture template. The second fixing component (2) is provided corresponding to the imprinting operation hole (111). The upper end surface of the second fixing component (2) is flush with the upper end surface of the support (11). The second fixing component (2) is used to fix the lower texture template.
2. The molding fixture for double-sided nanoimprinting according to claim 1, characterized in that, The second fixing component (2) includes a second fixing member (21) and an adjusting member (22). The second fixing member (21) is connected to the adjusting member (22). The outer edge of the second fixing member (21) and the inner wall of the embossing operation hole (111) form an adjustment area.
3. The molding fixture for double-sided nanoimprinting according to claim 2, characterized in that, The second fixing component (2) also includes a positioning post (23), which is inserted and protrudes from the second fixing component (21).
4. The molding fixture for double-sided nanoimprinting according to claim 3, characterized in that, At least one positioning post (23) is provided, and a plurality of positioning posts (23) constitute a positioning group, which is located on one side of the second fixing member (21).
5. The molding fixture for double-sided nanoimprinting according to claim 2, characterized in that, The second fastener (21) includes a second body (211) and a second pin (212). The second body (211) has a second fixing hole (213) at each of its four corners that is adapted to the second pin (212).
6. The molding fixture for double-sided nanoimprinting according to claim 5, characterized in that, The second fastener (21) further includes a second adhesive layer (214), which is disposed opposite to the second body (211) on both sides.
7. The molding fixture for double-sided nanoimprinting according to claim 2, characterized in that, The adjusting component (22) is a micrometer slide adjusting component (22).
8. The molding fixture for double-sided nanoimprinting according to claim 1, characterized in that, The first fastener (12) includes a first body (121) and a first pin (122), and the two ends of the body are provided with first fixing holes (123) that are adapted to the first pin (122).
9. The molding fixture for double-sided nanoimprinting according to claim 8, characterized in that, The first fastener (12) further includes a first adhesive layer, which is disposed on the side of the first body (121) facing the support (11).
10. The molding fixture for double-sided nanoimprinting according to claim 1, characterized in that, The support member (11) is hinged to the first fixing member (12) on one side.