Wet cleaning apparatus and wet cleaning system

Abstract

Embodiments of the present disclosure provide a wet cleaning device and a wet cleaning system, which relate to the technical field of semiconductor equipment and are used for saving liquid consumption of lubricating devices. The display panel comprises a conveying device, a cleaning device and a liquid storage device. The conveying device is used for conveying target objects. The cleaning device comprises a cleaning port and a liquid discharge port. The cleaning port is used for outputting a first liquid to the target objects to clean the target objects. The liquid discharge port is used for discharging a second liquid, which is formed after the target objects are cleaned by the first liquid. The liquid storage device is connected with the liquid discharge port of the cleaning device to store the second liquid. The liquid storage device can also output the second liquid to the conveying device to lubricate the conveying device. The wet cleaning device is used for recycling the liquid used for cleaning the target objects.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor equipment technology, and in particular to a wet cleaning device and wet cleaning system. Background Technology

[0002] In display panel manufacturing, such as TFT-LCD, wet cleaning equipment is a key process tool that uses chemical solutions or pure water to clean target objects such as substrates. It mainly includes cleaning machines (removing surface impurities), developing machines (patterning photoresist), etching machines (selectively removing materials), and stripping machines (removing residual photoresist). This equipment achieves precise shaping of each layer of the panel structure through wet processing, and is the core wet processing system ensuring high-quality LCD panel production.

[0003] In the process of cleaning target objects, the conveying device is responsible for transporting the target objects to different devices for corresponding processing. Its lubrication management is crucial to the stability of the conveying device. Since the conveying components (such as rollers and chains) are in a high-humidity environment with splashes of chemical solutions for a long time, the conveying components need to be lubricated to reduce friction and wear, while avoiding contamination of the substrate by the lubricating medium.

[0004] In related technologies, purified water is typically used to lubricate transmission components, resulting in significant water waste. Therefore, water conservation remains a key challenge for green manufacturing. Utility Model Content

[0005] The purpose of this disclosure is to provide a wet cleaning apparatus and system for saving liquid consumption in lubrication devices.

[0006] To achieve the above objectives, the embodiments of this disclosure provide the following technical solutions:

[0007] On one hand, a wet washing device is provided, comprising: a conveying device, a washing device, and a liquid storage device. The conveying device is used to convey the target object.

[0008] The cleaning device includes a cleaning port and a drain port. The cleaning port is used to output a first liquid to the target object for cleaning. The drain port is used to discharge a second liquid, which is the liquid formed after the first liquid cleans the target object. A storage device is connected to the drain port of the cleaning device to store the second liquid, and the storage device can also output the second liquid to a conveying device to lubricate the conveying device.

[0009] In the aforementioned wet cleaning equipment, a conveying device connects the target object to the cleaning port, and the first liquid is used to clean the target object, improving the reliability of subsequent processing. By directionally recycling the second liquid generated during the cleaning process, i.e., waste liquid (such as wastewater after washing or a fully reacted chemical solution), to a storage device and reusing it as a lubricating medium for the conveying device, a closed-loop liquid circulation system is constructed. This avoids resource waste and environmental pollution caused by direct discharge, reduces the additional consumption of pure water or chemical solutions, achieves double reuse of process water and consumables, lowers equipment operating costs, and maintains the stability of lubrication effect.

[0010] In some embodiments, the liquid storage device includes: a first liquid storage element, a first drive assembly, a first pipeline, and a second pipeline.

[0011] The first end of the first pipeline is connected to the drain port of the cleaning device, and the second end of the first pipeline is connected to the first liquid storage device. The input end of the first drive assembly is connected to the first liquid storage device, and the output end of the first drive assembly is connected to the first end of the second pipeline.

[0012] The first drive assembly is used to output the second liquid in the first reservoir to the second pipeline, the second pipeline including at least one second end, the at least one second end of the second pipeline being used to output the second liquid to the conveying device.

[0013] In the above embodiment, the second liquid discharged from the drain port of the cleaning device enters the first storage container through the first pipeline, thereby completing the initial transportation of the second liquid through the first pipeline and storing the second liquid in the first storage container for subsequent use in lubricating the conveying device. Then, the input end of the first drive assembly draws the second liquid from the first storage container and outputs the drawn second liquid to the conveying device through the second pipeline to complete the lubrication of the conveying device. The second pipeline may include at least one second end, through which the second liquid is output, thereby providing timely lubrication for the conveying devices at different locations.

[0014] In some embodiments, the first pipeline includes a first sub-pipeline and a second sub-pipeline. A first end of the first sub-pipeline is connected to the drain port of the cleaning device, a second end of the first sub-pipeline is connected to the first end of the second sub-pipeline, and a second end of the second sub-pipeline is connected to a first liquid storage device.

[0015] The wet washing equipment also includes: a second liquid storage unit, a third pipeline, and a first valve. The first end of the third pipeline is connected to the connection end of the first sub-pipeline and the second sub-pipeline, the second end of the third pipeline is connected to the second liquid storage unit, and the first valve is connected to the second sub-pipeline.

[0016] In the above embodiments, by diverting the second liquid to either the first or second liquid storage unit via the first sub-pipeline, the first valve can dynamically adjust the liquid capacity of the two liquid storage units through on / off control and flow regulation, avoiding the problem of insufficient or excessive capacity in a single liquid storage unit. Simultaneously, the tiered storage design reduces ineffective circulation of the second liquid in the pipeline, and combined with the precise flow control of the first valve, it reduces the risk caused by excessive storage of the second liquid, improves the flexibility of resource allocation, and balances the supply and demand contradictions of the cleaning and lubrication processes.

[0017] In some embodiments, the liquid storage device further includes an overflow pipe, with a first end disposed at a first preset liquid level height in the first liquid storage element, and a second end connected to the second liquid storage element. The overflow pipe is used to drain a portion of the second liquid in the first liquid storage element into the second liquid storage element when the liquid level height in the first liquid storage element is greater than the first preset liquid level height.

[0018] In the above embodiments, when the liquid level in the first liquid storage container exceeds a first preset height due to continuous injection, the overflow pipe transfers the excess second liquid to the second liquid storage container. This active limitation of the first liquid storage container's capacity is achieved through physical liquid level differences, avoiding the risk of liquid leakage due to overfilling of the first container while ensuring that the second liquid storage container always retains sufficient space to receive subsequent cleaning waste liquid. In scenarios where the usage differs significantly between the cleaning and lubrication processes (e.g., the first liquid usage far exceeds the second liquid usage), the load on the two liquid storage containers can be automatically balanced, reducing the frequency of manual intervention and ensuring the stability of continuous production line operation.

[0019] In some embodiments, the liquid storage device further includes a liquid drain pipe, with a first end positioned at a second preset liquid level in the first liquid storage container, and a second end connected to the second liquid storage container. The liquid drain pipe is used to drain a portion of the second liquid from the first liquid storage container into the second liquid storage container when the liquid level in the first liquid storage container is greater than the second preset liquid level. The first preset liquid level is greater than the second preset liquid level.

[0020] In the above embodiments, when the liquid level in the first liquid storage container exceeds the second preset height due to continuous injection, the liquid drain pipe transfers some of the second liquid into the second liquid storage container, thereby controlling the liquid level in the first liquid storage container through the liquid drain pipe. Furthermore, when the liquid drain pipe and overflow pipe work together, the liquid storage device achieves graded regulation and resource optimization of the storage capacity based on dual-level control of the second liquid volume. When the liquid level in the first liquid storage container exceeds the second preset height, the liquid drain pipe preferentially transfers some of the second liquid into the second liquid storage container. If the second liquid storage container is full or the drain pipe's transfer capacity is insufficient, causing the liquid level to continue rising to the first preset height, the overflow pipe intervenes as a secondary protection mechanism, further draining excess liquid into the second liquid storage container, thereby improving the fault tolerance and reliability of the wet cleaning equipment.

[0021] In some embodiments, the liquid storage device further includes a liquid level sensor for detecting the liquid level height in the first liquid storage element.

[0022] In the above embodiment, the liquid level in the first liquid storage device is monitored by detecting the liquid level height in the first liquid storage device using a liquid level sensor.

[0023] In some embodiments, the liquid storage device further includes a leakage sensor for detecting whether the first liquid storage element is leaking.

[0024] In the above embodiments, when the first liquid storage component leaks the second liquid due to aging, damage or loose connection, the leakage sensor can detect in real time whether there is abnormal liquid seepage, and then handle it in a timely manner according to the situation, which significantly reduces the risk of equipment corrosion, environmental pollution or safety accidents caused by liquid leakage and improves the reliability of wet cleaning equipment.

[0025] In some embodiments, the liquid storage device further includes a filter assembly. The filter assembly is disposed on the second pipeline; or disposed between the first end of the second pipeline and the output end of the first drive assembly, and the filter assembly is used to filter the second liquid output by the first drive assembly.

[0026] In the above embodiments, the flowing second liquid is pretreated by a filtration component to intercept particulate matter, sediment, or externally introduced impurities that may exist in the pipeline, thereby ensuring that the purity of the second liquid entering subsequent processes meets the requirements.

[0027] In some embodiments, the wet washing equipment further includes a lubrication assembly connected to a second end of the second pipeline. The lubrication assembly includes multiple liquid outlets, which are corresponding to the conveying device. The lubrication assembly is used to receive a second liquid from a first liquid reservoir and to output the second liquid to the conveying device via the multiple liquid outlets.

[0028] In the above embodiments, the lubrication assembly receives a second liquid from the first reservoir and directionally delivers the liquid to the critical friction points of the conveying device through multiple outlets. By independently corresponding each outlet to a specific lubrication point of the conveying device, the liquid is ensured to be accurately delivered to the friction surface, avoiding the problems of local over- or under-lubrication caused by traditional single-point lubrication. At the same time, the multi-outlet layout adapts to the lubrication needs of complex structures, improves lubrication coverage efficiency, and reduces liquid waste and replenishment frequency.

[0029] In some embodiments, the cleaning device further includes: a liquid supply tank, a fourth pipeline, a fifth pipeline, a second valve, and a third valve. The liquid supply tank stores a first liquid, a first end of the fourth pipeline is connected to the liquid supply tank, and a second end of the fourth pipeline is connected to the cleaning device to supply the first liquid to the cleaning device.

[0030] The first end of the fifth pipeline is connected to the fourth pipeline, and the second end of the fifth pipeline is connected to the second pipeline. The second valve is connected to the second pipeline, and the third valve is connected to the fifth pipeline.

[0031] In the above embodiment, the supply tank provides the cleaning device with a first liquid for cleaning the target object, and outputs the first liquid to the cleaning device through a fourth pipeline. Furthermore, a fifth pipeline can transfer the first liquid from the supply tank to a second pipeline, and then output it to the conveying device for lubrication, thus avoiding the problem of poor lubrication due to insufficient second liquid. A smart switching mechanism for the lubricating medium is constructed through dual-valve coordinated control. When the second liquid level is insufficient or temporary lubrication is required, the controller triggers the third valve to open, maintaining basic lubrication of the conveying device; when the second liquid is available, it is used preferentially for efficient lubrication, improving the reliability of the wet cleaning equipment.

[0032] In some embodiments, the cleaning apparatus further includes a flow meter connected to a second pipeline, the flow meter being used to detect the flow rate of the second liquid in the second pipeline.

[0033] In the above embodiments, the flow rate of the second liquid in the second pipeline can be detected by the flow meter. In some examples, the controller is electrically connected to the flow meter and the first drive assembly. When the controller detects that the flow rate of the second liquid in the second pipeline is too low, the controller will assume that there is too little second liquid in the first reservoir and thus shut down the first drive assembly to avoid damage to the first drive assembly.

[0034] In some embodiments, the cleaning device further includes: a first spraying assembly, a first collection tank, a second driving assembly, and a second spraying assembly. The cleaning ports include a first cleaning port and a second cleaning port, and the drain ports include a first drain port and a second drain port.

[0035] The first spraying assembly is connected to the second end of the fourth pipeline, and the first spraying assembly is provided with a first cleaning port. The first spraying assembly is used to receive the first liquid from the supply tank and spray the first liquid through the first cleaning port.

[0036] The first drain port is connected to the first collection tank, and is used to discharge the first liquid sprayed from the first cleaning port into the first collection tank. The input end of the second drive assembly is connected to the first collection tank, and the output end of the second drive assembly is connected to the second spray assembly, and the second drive assembly is used to output the first liquid in the first collection tank to the second spray assembly.

[0037] The second spraying assembly is provided with a second cleaning port. The second spraying assembly is used to spray the first liquid from the first collection tank through the second cleaning port, and the second drain port is used to discharge the first liquid sprayed by the second cleaning port.

[0038] In the above embodiment, when the target object is conveyed to the first spraying assembly, the first liquid is sprayed onto the target object through the first cleaning port, thereby treating the target object. Then, the first liquid sprayed from the first cleaning port flows through the first drain port to the first collection tank, and the first liquid in the first collection tank is output to the second spraying assembly via the second drive assembly. When the target object is conveyed to the second spraying assembly, the second spraying assembly can use the first liquid in the first collection tank to perform a preliminary wash on the target object, and then discharge the first liquid sprayed from the second cleaning port through the second drain port. This reduces the consumption of fresh liquid and the amount of waste liquid discharged, while enhancing the cleaning effect through the synergistic effect of the two sprays, and reducing the operational costs of manual liquid replenishment and drainage.

[0039] In some embodiments, the cleaning apparatus further includes a second collection tank, a third drive assembly, and a third spraying assembly. The cleaning port also includes a third cleaning port, and the drain port further includes a third drain port.

[0040] The second drain port is connected to the second collection tank, the input end of the third drive component is connected to the second collection tank, and the output end of the third drive component is connected to the third spray component. The third drive component is used to output the first liquid in the second collection tank to the third spray component.

[0041] The third spraying assembly is equipped with a third cleaning port, which is used to spray the first liquid from the second collection tank through the third cleaning port. The third drain port is connected to the first pipeline, and is used to discharge the first liquid sprayed by the third cleaning port into the first pipeline.

[0042] In the above embodiment, when the target object is conveyed to the third spraying assembly, the third spraying assembly can use the first liquid in the second collection tank to perform a preliminary wash on the target object, and then use the third drain port to convey the first liquid sprayed from the second cleaning port to the first storage container. When the target object is conveyed to the third spraying assembly, the system calls upon the first liquid stored in the second collection tank for a preliminary wash, and then directs the used liquid to the first storage container through the third drain port, increasing the number of preliminary washes on the target object and maximizing the utilization efficiency of the first liquid.

[0043] In some embodiments, the number of the second collection tank, the third drive assembly, the second spray assembly, and the second drain outlet are all at least two, and at least two second spray assemblies are sequentially arranged between the first spray assembly and the third spray assembly.

[0044] Each second spraying assembly is provided with a second cleaning port, each second drain port is connected to a corresponding second collection tank, and each second drain port is used to discharge the first liquid sprayed from the second cleaning port of a second spraying assembly to the corresponding second collection tank.

[0045] In two adjacent second spraying components, the second spraying component that is relatively closer to the first spraying component is the upper-level second spraying component, and the second spraying component that is relatively farther away from the first spraying component is the lower-level second spraying component. The input end of each third drive component is connected to the second collection tank corresponding to the upper-level second spraying component, and the output end of each third drive component is connected to the lower-level second spraying component.

[0046] In the above embodiments, when the wet washing equipment requires at least two rough washes on the target object, multiple second collection tanks, a third drive assembly, a second spraying assembly, and a second drain outlet can be set up. The cleaning waste liquid from the previous spraying assembly is stored in the corresponding second collection tank and then transported by the third drive assembly to the next spraying assembly for reuse, forming a closed-loop cycle of "spraying-recycling-re-spraying". Through the above setup, the cleaning effect is enhanced, and the utilization rate of the first liquid is maximized, achieving a dual improvement in cleaning efficiency and resource economy.

[0047] On the other hand, a wet washing system is provided. The wet washing system includes: wet washing equipment and controller as described in any of the above embodiments.

[0048] The above-described wet washing system has the same structure and beneficial technical effects as the wet washing equipment provided in some of the above embodiments, and will not be described again here. Attached Figure Description

[0049] To more clearly illustrate the technical solutions in this disclosure, the accompanying drawings used in some embodiments of this disclosure will be briefly described below. Obviously, the drawings described below are only drawings of some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams and are not intended to limit the actual size of the product, the actual flow of the method, the actual timing of the signals, etc. involved in the embodiments of this disclosure.

[0050] Figure 1 This is a structural diagram of a wet washing system according to some embodiments;

[0051] Figure 2 This is a structural diagram of a wet washing apparatus according to some embodiments;

[0052] Figure 3 This is another structural diagram of a wet washing apparatus according to some embodiments;

[0053] Figure 4 This is another structural diagram of a wet washing apparatus according to some embodiments;

[0054] Figure 5 This is a partial structural diagram of a liquid storage device according to some embodiments;

[0055] Figure 6 This is another partial structural diagram of a liquid storage device according to some embodiments;

[0056] Figure 7 for Figure 6 A side view of the liquid storage device from the left side;

[0057] Figure 8 for Figure 6 Rear view of the liquid storage device from the rear side;

[0058] Figure 9 This is another structural diagram of a wet washing apparatus according to some embodiments. Detailed Implementation

[0059] The technical solutions in some embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments provided in this disclosure are within the scope of protection of this disclosure.

[0060] Unless the context otherwise requires, throughout the specification and claims, the term "comprising" is interpreted as open-ended and encompassing, meaning "including, but not limited to." In the description of the specification, terms such as "some embodiments," "exemplary embodiments," "examples," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this disclosure. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples.

[0061] Hereinafter, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first," "second," "third," or "fourth" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this disclosure, unless otherwise stated, "a plurality of" means two or more.

[0062] In describing some embodiments, the term "connection" and its derivative expressions may be used. The term "connection" should be interpreted broadly; for example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium.

[0063] Exemplary embodiments are described herein with reference to sectional views and / or plan views, which are idealized exemplary drawings. In the drawings, the thickness of layers and the area of ​​regions are enlarged for clarity. Therefore, variations in shape relative to the drawings are contemplated due to, for example, manufacturing techniques and / or tolerances. Thus, exemplary embodiments should not be construed as limited to the shape of the regions shown herein, but rather include shape deviations due to, for example, manufacturing processes.

[0064] In display panel manufacturing, such as TFT-LCD, wet cleaning equipment is a key process tool that uses chemical solutions or pure water to clean target objects such as substrates. It mainly includes cleaning machines (removing surface impurities), developing machines (patterning photoresist), etching machines (selectively removing materials), and stripping machines (removing residual photoresist). This equipment achieves precise shaping of each layer of the panel structure through wet processing, and is the core wet processing system ensuring high-quality LCD panel production.

[0065] In the cleaning process, the conveying device is responsible for transporting the target object to different devices for corresponding processing. Its lubrication management is crucial to the stability of the conveying device. Since the conveying components (such as rollers and chains) are constantly exposed to high humidity and splashing chemical solutions, lubrication is necessary to reduce friction and wear while preventing contamination of the substrate by the lubricating medium. In existing technologies, purified water is typically used to lubricate the conveying components. However, continuously rinsing dynamic components such as conveying rollers and chains with a large flow of purified water can result in water consumption of several tons per hour for a single production line. Furthermore, the water treatment system requires frequent filter replacements and consumes electricity to maintain water quality, essentially creating an inefficient "clean-discharge-re-purify" cycle. This model exacerbates operating costs and becomes a key bottleneck restricting the green upgrading of wet cleaning equipment.

[0066] Figure 1 This is a structural diagram of a wet washing system 1 according to some embodiments.

[0067] In view of this, such as Figure 1 As shown, this application proposes a wet cleaning system 1, including a wet cleaning device 10 and a controller 20. The controller 20 mainly works in conjunction with the cleaning control logic of the wet cleaning device 10, and controls the operation of the wet cleaning device 10 according to the cleaning control logic.

[0068] The wet washing equipment of this application will be described in detail below in conjunction with application scenarios.

[0069] Figure 2 This is a structural diagram of a wet washing apparatus 10 according to some embodiments.

[0070] This application discloses a wet washing device 10, such as... Figure 2As shown, it includes: a conveying device 100, a cleaning device 200, and a liquid storage device 300. The conveying device 100 is used to convey the target object 2.

[0071] The cleaning device 200 includes a cleaning port 2010 and a drain port 2020. The cleaning port 2010 is used to output a first liquid to the target object 2 for cleaning the target object 2. The drain port 2020 is used to discharge a second liquid, which is the liquid formed after the first liquid cleans the target object 2. A liquid storage device 300 is connected to the drain port 2020 of the cleaning device 200 to store the second liquid, and the liquid storage device 300 can also output the second liquid to the conveying device 100 to lubricate the conveying device 100.

[0072] In the above embodiments, Figure 2 The arrows indicate the flow direction of the first or second liquid. When the wet washing equipment 10 starts working, the controller 20 controls the conveying device 100 to convey the target object 2 to the cleaning port 2010 of the washing device 200. The washing device 200 outputs the first liquid through the cleaning port 2010 and cleans the target object 2 with the first liquid. By controlling the conveying device 100 through the controller 20, the target object 2 is automatically docked with the cleaning port 2010, and the target object 2 is cleaned with the first liquid, ensuring the reliability of subsequent processes when treating the target object 2.

[0073] For example, the first liquid can be pure water or a chemical solution. For example, the target object 2 can include a glass substrate, flexible OLED substrate, color filter (CF) substrate, thin film transistor (TFT) array substrate, cover lens, polarizer substrate, etc., used in TFT-LCD manufacturing.

[0074] The second liquid then flows to the drain port 2020 of the cleaning device 200 and enters the storage device 300 through the drain port 2020. When lubrication of the conveying device 100 is required, the controller 20 controls the storage device 300 to output the second liquid to the conveying device 100, thereby achieving lubrication of the conveying device 100. The second liquid can be wastewater after washing or a chemical solution that has undergone complete reaction.

[0075] In some examples, the cleaning device 200 further includes a housing 400, with the conveying device 100 located within the housing 400. A drain port 2020 is located on the housing 400, and its height is at the lowest point of the housing 400 to ensure that the second liquid can flow to the drain port 2020. Exemplarily, the conveying device 100 includes a bearing, a gear, a motor, and a conveyor wheel. The motor's output is connected to the gear, the gear is connected to the bearing, the bearing is mounted on the housing and hinged to it, and the conveyor wheel is connected to the bearing. The conveyor wheel carries the target object. When the conveying device 100 operates, the motor transmits torque to the gear, which in turn transmits the torque to the bearing. The bearing rotates relative to the housing, driving the conveyor wheel to rotate, thereby transporting the target object via the conveyor wheel.

[0076] By directionally recycling the waste liquid generated in the cleaning process (such as wastewater after washing or chemical solution after complete reaction) to the liquid storage device 300 and using it as a lubricating medium in the conveying device 100, a closed-loop liquid circulation system is constructed. This avoids the waste of resources and environmental pollution caused by direct discharge, reduces the additional consumption of pure water or chemical solution, realizes the double reuse of process water and consumables, reduces equipment operating costs, and maintains the stability of lubrication effect.

[0077] Figure 3 This is another structural diagram of a wet washing apparatus 10 according to some embodiments.

[0078] In some embodiments, such as Figure 3 As shown, the liquid storage device 300 includes: a first liquid storage component 3010, a first drive assembly 3020, a first pipeline 3030, and a second pipeline 3040.

[0079] Specifically, the first end 3030A of the first pipeline 3030 is connected to the drain port 2020 of the cleaning device 200, and the second end 3030B of the first pipeline 3030 is connected to the first liquid storage device 3010. The input end of the first drive assembly 3020 is connected to the first liquid storage device 3010, and the output end of the first drive assembly 3020 is connected to the first end 3040A of the second pipeline 3040.

[0080] The first drive assembly 3020 is used to output the second liquid in the first liquid storage 3010 to the second pipeline 3040. The second pipeline 3040 includes at least one second end 3040B, and the at least one second end 3040B of the second pipeline 3040 is used to output the second liquid to the conveying device 100.

[0081] In the above embodiment, the second liquid discharged from the drain port 2020 of the cleaning device 200 enters the first storage container 3010 through the first pipeline 3030, thereby completing the initial transportation of the second liquid through the first pipeline 3030 and storing the second liquid in the first storage container 3010 for subsequent use by the lubrication conveying device 100. For example, the first storage container 3010 can be a transparent water tank with a capacity of 20L to facilitate observation of the second liquid level and subsequent processing based on the level. The first storage container 3010 can also be a storage tank.

[0082] Then, the input end of the first drive component 3020 draws the second liquid from the first liquid reservoir 3010 and outputs the drawn second liquid to the conveying device 100 through the second pipeline 3040 to complete the lubrication of the conveying device 100. For example, the first drive component 3020 is located inside the first liquid reservoir 3010, thus enabling it to directly draw the second liquid located within the first liquid reservoir 3010. Furthermore, the transparent water tank allows for simultaneous observation of the second liquid level and the operating status of the first drive component 3020, improving the convenience of human observation.

[0083] Figure 5 This is a partial structural diagram of a liquid storage device 300 according to some embodiments. Figure 6 This is another partial structural diagram of the liquid storage device 300 according to some embodiments. Figure 7 for Figure 6 A side view of the liquid storage device 300 from the left side. Figure 8 for Figure 6 Rear view of the liquid storage device 300 from the rear side.

[0084] The second conduit 3040 may include at least one second end 3040B, through which a second liquid is output, thereby providing timely lubrication for the conveying device 100 at different locations. In some examples, such as Figure 5 As shown, the second conduit 3040 includes a plurality of second ends 3040B, through which a second liquid is supplied respectively, thereby supplying the second liquid to different locations of the conveying device 100, improving the flexibility of liquid supply. In other examples, such as Figures 6 to 8 As shown, the second conduit 3040 includes a second end 3040B, which simplifies the conduit structure and reduces manufacturing and maintenance costs.

[0085] For example, the first drive component 3020 may be a liquid supply pump, which pressurizes the second liquid in a 20L transparent water tank to 0.15MPa and outputs it to the second end 3040B of the second pipeline 3040 to complete the transfer of the second liquid.

[0086] Figure 4 This is another structural diagram of a wet washing apparatus 10 according to some embodiments.

[0087] In some embodiments, such as Figure 4 As shown, the first pipeline 3030 includes a first sub-pipeline 3031 and a second sub-pipeline 3032. The first end 3031A of the first sub-pipeline 3031 is connected to the drain port 2020 of the cleaning device 200; the second end 3031B of the first sub-pipeline 3031 is connected to the first end 3032A of the second sub-pipeline 3032; and the second end 3032B of the second sub-pipeline 3032 is connected to the first liquid storage device 3010. For example, as... Figures 6 to 8 As shown, the direction of 3032B is the connection end between the second end 3032B of the second sub-pipe 3032 and the first liquid storage device 3010.

[0088] The wet washing equipment 10 also includes: a second liquid storage unit 2030, a third pipeline 3050, and a first valve 2040. The first end 3050A of the third pipeline 3050 is connected to the connection end of the first sub-pipeline 3031 and the second sub-pipeline 3032, the second end 3050B of the third pipeline 3050 is connected to the second liquid storage unit 2030, and the first valve 2040 is connected to the second sub-pipeline 3032.

[0089] The amount of the first liquid required for cleaning the target object 2 differs from the amount of the second liquid required for lubricating the conveying device 100; generally, the amount of the first liquid is greater than that of the second liquid. In the above embodiment, the second liquid flows from the drain port 2020 of the cleaning device 200 through the first sub-pipe 3031 and the third pipe 3050 to the second storage container 2030. The second liquid can also flow from the drain port 2020 of the cleaning device 200 through the first sub-pipe 3031 and the second sub-pipe 3032 to the first storage container 3010. For example, the first sub-pipe 3031 can be a T-junction. The second storage container 2030 can be a storage tank.

[0090] In some examples, the first valve 2040 can control the opening and closing of the second sub-pipe 3032 to control the volume of the second liquid in the first reservoir 3010. In other examples, the first valve 2040 can also control the flow rate of the second liquid through the second sub-pipe 3032 by adjusting its opening size, thereby achieving precise control of the volume of the second liquid in the first reservoir 3010 and the second reservoir 2030.

[0091] By diverting the second liquid through the first sub-pipe 3031 to either the first storage container 3010 or the second storage container 2030, the first valve 2040 can dynamically adjust the liquid capacity of the two storage containers through on / off control and flow regulation, avoiding the problem of insufficient or excessive capacity in a single storage container. Simultaneously, the tiered storage design reduces ineffective circulation of the second liquid in the pipeline. Combined with the precise flow control of the first valve 2040, this reduces the risk caused by excessive storage of the second liquid, improves the flexibility of resource allocation, and balances the supply and demand contradictions between the cleaning and lubrication processes.

[0092] For example, the capacity of the second liquid storage device 2030 is greater than that of the first liquid storage device 3010, thereby facilitating better storage of the second liquid by the second liquid storage device 2030.

[0093] Figure 9 This is another structural diagram of a wet washing apparatus 100 according to some embodiments.

[0094] In some embodiments, such as Figure 5 and Figure 9 As shown, the liquid storage device 300 also includes an overflow pipe 3060. The first end 3060A of the overflow pipe 3060 is located at a first preset liquid level in the first liquid storage component 3010, and the second end 3060B of the overflow pipe 3060 is connected to the second liquid storage component 2030. The overflow pipe 3060 is used to drain a portion of the second liquid from the first liquid storage component 3010 into the second liquid storage component 2030 when the liquid level in the first liquid storage component 3010 is greater than the first preset liquid level.

[0095] During the recovery of the second liquid by the liquid storage device 300, there may be an issue of excessive second liquid in the first liquid storage unit 3010. In the above embodiment, when the liquid level in the first liquid storage unit 3010 exceeds a first preset height due to continuous injection, the overflow pipe 3060 transfers the excess second liquid to the second liquid storage unit 2030. This active limitation of the capacity of the first liquid storage unit 3010 is achieved through physical liquid level difference, avoiding the risk of liquid leakage due to overfilling of the first liquid storage unit 3010, while ensuring that the second liquid storage unit 2030 always retains sufficient space to receive subsequent cleaning waste liquid. In scenarios where the usage differs significantly between the cleaning and lubrication processes (e.g., the usage of the first liquid far exceeds that of the second liquid), the load on the two liquid storage units can be automatically balanced, reducing the frequency of manual intervention and ensuring the stability of continuous production line operation.

[0096] In some examples, the first liquid reservoir 3010 is positioned at a higher height than the second liquid reservoir 2030. During use, the second liquid will flow unidirectionally from the first liquid reservoir 3010 to the second liquid reservoir 2030 due to gravity, thus preventing backflow. In other examples, the overflow pipe 3060 is equipped with a one-way valve, which allows the second liquid in the first liquid reservoir 3010 to flow unidirectionally to the second liquid reservoir 2030, preventing backflow.

[0097] In some embodiments, the liquid storage device 300 further includes a liquid drain pipe 3070. The first end 3070A of the liquid drain pipe 3070 is located at a second preset liquid level height in the first liquid storage component 3010, and the second end 3070B of the liquid drain pipe 3070 is connected to the second liquid storage component 2030. The liquid drain pipe 3070 is used to drain a portion of the second liquid from the first liquid storage component 3010 into the second liquid storage component 2030 when the liquid level in the first liquid storage component 3010 is greater than the second preset liquid level height. The first preset liquid level height is greater than the second preset liquid level height.

[0098] In the above embodiment, when the liquid level in the first liquid storage device 3010 exceeds the second preset height due to continuous injection, the liquid drain pipe 3070 transfers some of the second liquid to the second liquid storage device 2030, thereby controlling the liquid level of the first liquid storage device 3010 through the liquid drain pipe 3070.

[0099] Furthermore, when the liquid drain pipe 3070 and the overflow pipe 3060 work together, the liquid storage device 300 achieves graded regulation and resource optimization of the storage capacity based on dual-level control of the second liquid volume. When the liquid level in the first liquid storage component 3010 exceeds the second preset height, the liquid drain pipe 3070 preferentially transfers a portion of the second liquid to the second liquid storage component 2030. If the second liquid storage component 2030 is full or the drain pipe's transfer capacity is insufficient, causing the liquid level to continue rising to the first preset height, the overflow pipe 3060 intervenes as a secondary protection mechanism to further discharge excess liquid into the second liquid storage component 2030, thereby improving the fault tolerance and reliability of the wet washing equipment 10.

[0100] In some examples, combined Figure 9 The second end 3060B of the overflow pipe 3060 can be connected to the third end 3070C of the liquid drain pipe 3070, which simplifies the pipeline structure and reduces the number of interfaces of the second liquid storage device 2030.

[0101] For example, the first preset liquid level height is two-thirds of the highest liquid level of the first liquid storage component 3010, and the second preset liquid level height is one-third of the highest liquid level of the first liquid storage component 3010.

[0102] In some embodiments, such as Figures 5 to 8 As shown, the liquid storage device 300 also includes a liquid level sensor 3080, which is used to detect the liquid level in the first liquid storage component 3010.

[0103] In the above embodiment, the liquid level in the first liquid storage device 3010 is detected by the liquid level sensor 3080, thereby realizing the monitoring of the liquid level in the first liquid storage device 3010.

[0104] Combination Figure 5 In some examples, the liquid level sensor 3080 may include a glass tube level gauge 3081 and a photoelectric sensor. The two ends of the glass tube level gauge 3081 are connected to the first liquid storage container 3010. The glass tube level gauge 3081 is housed within the photoelectric sensor, which is used to acquire the light intensity reflected by the second liquid within the glass tube level gauge 3081. The glass tube level gauge is a direct-reading liquid level measuring device based on the principle of communicating vessels. Its core principle is to form a closed, interconnected system by connecting a transparent glass tube to the bottom and top of the container being measured. When the liquid in the container is stationary, according to the principle of communicating vessels, the liquid level in the glass tube is consistent with the liquid level in the container. The container's liquid level can be reflected in real time by directly observing the liquid position within the glass tube. The refractive index of the second liquid changes depending on its height. The photoelectric sensor detects the light intensity reflected by the second liquid within the glass tube level gauge 3081 based on this characteristic to determine the refractive index of the second liquid in the glass tube level gauge, thereby acquiring the liquid level of the first liquid storage container 3010. The controller 20 can be electrically connected to the photoelectric sensor and the first valve 2040. The controller 20 determines the liquid level of the first liquid storage component 3010 based on the light intensity detected by the photoelectric sensor and controls the opening and closing of the first valve 2040, thereby realizing dynamic control of the liquid level of the first liquid storage component 3010.

[0105] Combination Figures 6 to 8 In other examples, the level sensor 3080 is a float level gauge 308230, with the float level gauge 3082 housed within the first liquid storage unit 3010. When the liquid level rises, the float inside the float level gauge 3082 rises and falls synchronously with the liquid level. The float level gauge 3082 is electrically connected to the controller 20. When the float rises to a preset position, the float level gauge 3082 triggers a reed switch. The controller 20 receives the signal from the reed switch and subsequently controls the opening and closing of the first valve 2040.

[0106] In some embodiments, such as Figure 9 As shown, the liquid storage device 300 also includes a leakage sensor 3100, which is used to detect whether the first liquid storage component 3010 is leaking.

[0107] In the above embodiments, when the first liquid storage component 3010 leaks the second liquid due to aging, damage or loose connection, the leakage sensor 3100 can detect in real time whether there is abnormal liquid seepage, and then handle it in time according to the situation, which significantly reduces the risk of equipment corrosion, environmental pollution or safety accidents caused by liquid leakage and improves the reliability of the wet washing equipment 10.

[0108] In some examples, such as Figures 6 to 8 As shown, the leak sensor 3100 is connected to the controller 20. When the leak sensor 3100 detects a leak in the first liquid storage unit 3010, the controller 20 will issue an alarm to the operator.

[0109] The wet washing equipment 10 also includes a waterproof enclosure 500, and the first liquid storage component 3010 is located inside the waterproof enclosure 500. In this way, when the first liquid storage component 3010 leaks, the leak can be blocked by the waterproof enclosure 500 before human intervention, so as to avoid the leak affecting the operation of other devices.

[0110] In some embodiments, such as Figures 5 to 8 As shown, the liquid storage device 300 also includes a filter assembly 3090. The filter assembly 3090 is disposed on the second pipeline 3040.

[0111] In the above embodiments, the filter assembly 3090 is capable of filtering the second liquid output to the conveying device 100 to meet the requirements of the liquid for lubricating the conveying device 100.

[0112] In some other embodiments, the filter assembly 3090 may also be disposed between the first end 3040A of the second pipeline 3040 and the output end of the first drive assembly 3020, and the filter assembly 3090 is used to filter the second liquid output by the first drive assembly 3020.

[0113] In the above embodiment, the filter assembly 3090 pre-filters the second liquid output by the first drive assembly 3020 to meet the requirements of the liquid for lubricating the conveying device 100.

[0114] The second liquid is pretreated by the filter assembly 3090 to intercept particulate matter, sediment or externally introduced impurities that may be present in the pipeline, thereby ensuring that the purity of the second liquid entering the subsequent process meets the requirements.

[0115] In some embodiments, such as Figure 9As shown, the wet washing equipment 10 also includes a lubrication assembly 2050, which is connected to the second end 3040B of the second pipeline 3040. The lubrication assembly 2050 includes multiple liquid outlets, which are corresponding to the conveying device 100. The lubrication assembly 2050 is used to receive the second liquid from the first liquid storage unit 3010 and output the second liquid to the transmission device via the multiple liquid outlets.

[0116] In the above embodiment, the lubrication assembly 2050 receives the second liquid from the first liquid reservoir 3010 and directionally delivers the liquid to the key friction points of the conveying device 100 through multiple liquid outlets. By independently corresponding each liquid outlet to a specific lubrication point of the conveying device 100, the liquid is ensured to be accurately delivered to the friction surface, avoiding the problems of local over- or under-lubrication caused by traditional single-point lubrication. At the same time, the multi-outlet layout adapts to the lubrication needs of complex structures, improves lubrication coverage efficiency, and reduces liquid waste and replenishment frequency.

[0117] In some examples, combined Figure 5 The lubrication device may include a fourth valve 2051 and multiple nozzles 2052. The fourth valve 2051 is located on the nozzle 2052 and controls the output flow rate of the nozzle 2052. By controlling the output flow rate of the nozzle 2052 through the fourth valve 2051, the lubrication needs of different locations of the conveyor device 100 can be covered simultaneously, avoiding localized insufficient or excessive lubrication caused by a single outlet. Furthermore, the independent control of the flow rate of each outlet by the fourth valve 2051 can dynamically adjust the supply of liquid according to the different operating conditions of specific lubrication points, reducing secondary liquid consumption while ensuring sufficient lubrication of critical parts. Through the above design, lubrication efficiency and resource utilization are improved, the risk of equipment wear due to insufficient lubrication is reduced, and the multi-outlet design enhances the system's adaptability to the complex structure of the conveyor device 100. Combined with the regulation of the fourth valve 2051, it can quickly respond to the needs of production line layout adjustments or process changes, ensuring long-term stable operation of the equipment and reducing maintenance costs.

[0118] In other examples, the lubrication assembly 2050 can be an array of nozzles, each orifice of which corresponds to the delivery device 100, thereby saving costs while lubricating the delivery device 100.

[0119] In some embodiments, the cleaning device 200 further includes: a liquid supply tank 2060, a fourth pipeline 2070, a fifth pipeline 2080, a second valve 2090, and a third valve 2100. The liquid supply tank 2060 is used to store a first liquid. A first end 2070A of the fourth pipeline 2070 is connected to the liquid supply tank 2060, and a second end 2070B of the fourth pipeline 2070 is connected to the cleaning device 200 to supply the first liquid to the cleaning device 200.

[0120] The first end 2080A of the fifth pipeline 2080 is connected to the fourth pipeline 2070, and the second end 2080B of the fifth pipeline 2080 is connected to the second pipeline 3040. The second valve 2090 is connected to the second pipeline 3040, and the third valve 2100 is connected to the fifth pipeline 2080.

[0121] In the above embodiment, the liquid supply tank 2060 provides the cleaning device 200 with the first liquid for cleaning the target object 2, and outputs the first liquid to the cleaning device 200 through the fourth pipeline 2070.

[0122] In addition, the fifth pipeline 2080 can transfer the first liquid in the liquid supply tank 2060 to the second pipeline 3040, and output it to the conveying device 100 through the second pipeline 3040 to lubricate the conveying device 100, thereby avoiding the problem of poor lubrication effect caused by insufficient second liquid.

[0123] In some examples, controller 20 is connected to a second valve 2090 and a third valve 2100. When the second liquid is insufficient or the first liquid is needed for lubrication, controller 20 opens the third valve 2100, allowing the first liquid to flow into the second pipeline 3040 and lubricate the conveying device 100. When lubrication is achieved using the second liquid, controller 20 opens the second valve 2090, thereby lubricating the conveying device 100 with the second liquid.

[0124] A smart switching mechanism for the lubricating medium is constructed through dual-valve coordinated control. When the second liquid is insufficient or temporary lubrication needs to be replenished, the controller 20 triggers the third valve 2100 to open, maintaining the basic lubrication of the conveying device 100. When the second liquid is available, it is used first for efficient lubrication, improving the reliability of the wet washing equipment 10.

[0125] In some examples, the second conduit 3040 includes a third sub-conduit 3041 and a fourth sub-conduit 3042. The first end 3041A of the third sub-conduit 3041 is connected to the output end of the first drive assembly 3020; the second end 3041B of the third sub-conduit 3041 is connected to the first end 3042A of the fourth sub-conduit 3042; the second end 3042B of the fourth sub-conduit 3042 is connected to the lubrication assembly 2050; and the second end 2080B of the fifth conduit 2080 is connected to the connection end of the third sub-conduit 3041 and the fourth sub-conduit 3042. A second valve 2090 is connected to the third sub-conduit 3041. By placing the second valve 2090 on the third sub-conduit 3041, the lubrication of the conveying device 100 using the first liquid and the lubrication of the conveying device 100 using the second liquid are completely separated. When the second valve 2090 is closed, the third sub-pipe 3041 blocks the flow of the first liquid to the fourth sub-pipe 3042, ensuring that only the second liquid is delivered to the lubrication assembly 2050 via the fourth sub-pipe 3042; conversely, when the second valve 2090 is open, the second liquid can enter the lubrication assembly 2050 along the third sub-pipe 3041 and the fourth sub-pipe 3042, realizing the switching between the first liquid and the second liquid.

[0126] In some embodiments, the cleaning device 200 further includes a flow meter 2110, which is connected to the second pipeline 3040 and is used to detect the flow rate of the second liquid in the second pipeline 3040.

[0127] In the above embodiments, the flow rate of the second liquid in the second pipeline 3040 can be detected by the flow meter 2110. In some examples, the controller 20 is electrically connected to the flow meter 2110 and the first drive assembly 3020. When the controller 20 detects that the flow rate of the second liquid in the second pipeline 3040 is too low, the controller 20 will consider that there is too little second liquid in the first reservoir 3010, and then shut down the first drive assembly 3020 to avoid damage to the first drive assembly 3020.

[0128] In some embodiments, the cleaning device 200 further includes: a first spraying assembly 2120, a first collection tank 2130, a second drive assembly 2140, and a second spraying assembly 2150. The cleaning port 2010 includes a first cleaning port 2010 and a second cleaning port 2010, and the drain port 2020 includes a first drain port 2020 and a second drain port 2020.

[0129] The first spraying assembly 2120 is connected to the second end 2070B of the fourth pipeline 2070, and the first spraying assembly 2120 is provided with a first cleaning port 2010. The first spraying assembly 2120 is used to receive the first liquid from the liquid supply tank 2060 and spray the first liquid through the first cleaning port 2010.

[0130] The first drain port 2020 is connected to the first collection tank 2130, and the first drain port 2020 is used to discharge the first liquid sprayed from the first cleaning port 2010 to the first collection tank 2130. The input end of the second drive assembly 2140 is connected to the first collection tank 2130, and the output end of the second drive assembly 2140 is connected to the second spray assembly 2150, and the second drive assembly 2140 is used to output the first liquid in the first collection tank 2130 to the second spray assembly 2150.

[0131] The second spraying assembly 2150 is provided with a second cleaning port 2010. The second spraying assembly 2150 is used to spray the first liquid from the first collection tank 2130 through the second cleaning port 2010. The second drain port 2020 is used to discharge the first liquid sprayed by the second cleaning port 2010.

[0132] In the above embodiment, when the target object 2 is conveyed to the first spraying assembly 2120, the first liquid is sprayed onto the target object 2 through the first cleaning port 2010, thereby processing the target object 2. Then, the first liquid sprayed from the first cleaning port 2010 flows through the first drain port 2020 to the first collection tank 2130, and the first liquid in the first collection tank 2130 is output to the second spraying assembly 2150 through the second drive assembly 2140.

[0133] When the target object 2 is conveyed to the second spraying assembly 2150, the second spraying assembly 2150 can use the first liquid in the first collection tank 2130 to perform a rough wash on the target object 2, and use the second drain port 2020 to discharge the first liquid sprayed by the second cleaning port 2010.

[0134] By using the liquid in stages and implementing closed-loop recycling, the utilization rate of the first liquid is improved. This reduces the consumption of fresh liquid and the amount of waste liquid discharged, while the synergistic effect of the two sprays enhances the cleaning effect and reduces the operational costs of manual liquid replenishment and drainage.

[0135] In some embodiments, the cleaning device 200 further includes a second collection tank 2160, a third drive assembly 2170, and a third spraying assembly 2180. The cleaning port 2010 further includes a third cleaning port 2010, and the drain port 2020 further includes a third drain port 2020.

[0136] The second drain port 2020 is connected to the second collection tank 2160, the input end of the third drive assembly 2170 is connected to the second collection tank 2160, and the output end of the third drive assembly 2170 is connected to the third spray assembly 2180. The third drive assembly 2170 is used to output the first liquid in the second collection tank 2160 to the third spray assembly 2180.

[0137] The third spraying assembly 2180 is provided with a third cleaning port 2010, which is used to spray the first liquid from the second collection tank 2160 through the third cleaning port 2010. The third drain port 2020 is connected to the first pipeline 3030, and is used to discharge the first liquid sprayed by the third cleaning port 2010 into the first pipeline 3030.

[0138] In the above embodiment, when the target object 2 is conveyed to the third spraying assembly 2180, the third spraying assembly 2180 can use the first liquid in the second collection tank 2160 to perform a rough wash on the target object 2, and use the third drain port 2020 to convey the first liquid sprayed by the second cleaning port 2010 to the first liquid storage unit 3010.

[0139] When the target object 2 is delivered to the third spraying assembly 2180, the system calls the first liquid stored in the second collection tank 2160 for rough washing, and then directs the used liquid to the first storage unit 3010 through the third drain port 2020, increasing the number of rough washes on the target object 2 and maximizing the utilization efficiency of the first liquid.

[0140] In some embodiments, the number of the second collection tank 2160, the third drive assembly 2170, the second spray assembly 2150, and the second drain port 2020 are all at least two, and at least two second spray assemblies 2150 are sequentially arranged between the first spray assembly 2120 and the third spray assembly 2180.

[0141] Each second spraying assembly 2150 is provided with a second cleaning port 2010, each second drain port 2020 is connected to a corresponding second collection tank 2160, and each second drain port 2020 is used to discharge the first liquid sprayed from the second cleaning port 2010 of a second spraying assembly 2150 to the corresponding second collection tank 2160.

[0142] In two adjacent second spraying components 2150, the second spraying component 2150 that is relatively closer to the first spraying component 2120 is the upper-level second spraying component 2150-A, and the second spraying component 2150 that is relatively farther away from the first spraying component 2120 is the lower-level second spraying component 2150-B. The input terminal of each third drive component 2170 is connected to the second collection tank 2160 corresponding to the upper-level second spraying component 2150-A, and the output terminal of each third drive component 2170 is connected to the lower-level second spraying component 2150-B.

[0143] In the above embodiments, when the wet washing equipment 10 needs to perform at least two rough washes on the target object 2, multiple second collection tanks 2160, a third drive assembly 2170, a second spray assembly 2150, and a second drain port 2020 can be set up. The cleaning waste liquid from the previous stage second spray assembly 2150-A is stored in the corresponding second collection tank 2160 and then transported by the third drive assembly 2170 to the next stage second spray assembly 2150-B for reuse, forming a closed-loop cycle of "spraying-recycling-re-spraying". Through the above settings, the cleaning effect is enhanced, the utilization rate of the first liquid is improved, and a dual improvement in cleaning efficiency and resource economy is achieved.

[0144] In some examples, such as Figure 9 As shown in the figure, there are two second spraying components. The first-level second spraying component 2150-A uses the first liquid in the first collection tank 2130 to clean the target object 2, and then transfers the first liquid after cleaning the target object 2 to the corresponding second collection tank 2160-A.

[0145] The next-stage second spraying assembly 2150-B uses the third drive assembly 2170-A to extract the first liquid from the second collection tank 2160-A to clean the target object 2, and then transfers the first liquid after cleaning the target object 2 to the corresponding second collection tank 2160-B. The third spraying assembly 2180 uses the third drive assembly 2170-B to extract the first liquid from the second collection tank 2160-B to clean the target object 2.

[0146] In some embodiments, the wet washing equipment 10 further includes a drying assembly 600 for drying the target object 2 that has been cleaned by the first liquid.

[0147] In some embodiments, the wet cleaning apparatus 10 further includes an infeed component 700 and an outfeed component 800, wherein the infeed component 700 is used to transfer the target object 2 to the cleaning apparatus 200, and the outfeed component 800 is used to transfer the target object 2 out of the cleaning apparatus 200.

[0148] The above description is merely a specific embodiment of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A wet washing device, characterized in that, include: A conveying device used to transport a target object; A cleaning device includes a cleaning port and a drain port, wherein the cleaning port is used to output a first liquid to the target object to clean the target object; The drain port is used to discharge a second liquid, which is the liquid formed after the first liquid cleans the target object; A liquid storage device is connected to the drain port of the cleaning device to store the second liquid; the liquid storage device is also used to output the second liquid to the conveying device to lubricate the conveying device.

2. The wet washing equipment according to claim 1, characterized in that, The liquid storage device includes: a first liquid storage element, a first drive assembly, a first pipeline, and a second pipeline; The first end of the first pipeline is connected to the drain port of the cleaning device, and the second end of the first pipeline is connected to the first liquid storage device; The input end of the first driving component is connected to the first liquid storage device, and the output end of the first driving component is connected to the first end of the second pipeline; the first driving component is used to output the second liquid in the first liquid storage device to the second pipeline; The second conduit includes at least one second end, the at least one second end of the second conduit being used to output the second liquid to the conveying device.

3. The wet washing equipment according to claim 2, characterized in that, The first pipeline includes: a first sub-pipeline and a second sub-pipeline; a first end of the first sub-pipeline is connected to the drain port of the cleaning device, and a second end of the first sub-pipeline is connected to the first end of the second sub-pipeline; a second end of the second sub-pipeline is connected to the first liquid storage device. The liquid storage device further includes a third pipeline, and the wet washing equipment further includes a second liquid storage component and a first valve; the first end of the third pipeline is connected to the connection end of the first sub-pipeline and the second sub-pipeline, and the second end of the third pipeline is connected to the second liquid storage component; The first valve is connected to the second sub-pipeline.

4. The wet washing equipment according to claim 3, characterized in that, The liquid storage device further includes: an overflow pipe; The first end of the overflow pipe is located at the first preset liquid level height in the first liquid storage device, and the second end of the overflow pipe is connected to the second liquid storage device. The overflow pipe is used to drain a portion of the second liquid from the first liquid storage container into the second liquid storage container when the liquid level in the first liquid storage container is greater than the first preset liquid level.

5. The wet washing equipment according to claim 4, characterized in that, The liquid storage device further includes: a liquid drain pipe; The first end of the liquid drain pipe is located at the second preset liquid level height in the first liquid storage device, and the second end of the liquid drain pipe is connected to the second liquid storage device; The liquid drain pipe is used to drain a portion of the second liquid from the first liquid storage device into the second liquid storage device when the liquid level in the first liquid storage device is greater than the second preset liquid level. Wherein, the first preset liquid level height is greater than the second preset liquid level height.

6. The wet washing equipment according to claim 2, characterized in that, The liquid storage device further includes: A liquid level sensor is used to detect the liquid level in the first liquid storage device.

7. The wet washing equipment according to claim 2, characterized in that, The liquid storage device further includes: A leakage sensor is used to detect whether the first liquid storage device is leaking.

8. The wet washing equipment according to claim 2, characterized in that, The liquid storage device further includes: A filter assembly is disposed on the second pipeline, or disposed between the first end of the second pipeline and the output end of the first drive assembly; The filtration assembly is used to filter the second liquid output by the first drive assembly.

9. The wet washing equipment according to claim 2, characterized in that, The wet washing equipment also includes: A lubrication assembly is connected to each of the second ends of the second pipeline; the lubrication assembly includes multiple liquid outlets, which are arranged corresponding to the conveying device; The lubrication assembly is used to receive the second liquid from the first liquid reservoir and to output the second liquid to the transmission device via the plurality of liquid outlets.

10. The wet washing equipment according to claim 2, characterized in that, The cleaning device further includes: a liquid supply tank, a fourth pipeline, a fifth pipeline, a second valve, and a third valve; the liquid supply tank is used to store the first liquid; the first end of the fourth pipeline is connected to the liquid supply tank, and the second end of the fourth pipeline is connected to the cleaning device to supply the first liquid to the cleaning device; The first end of the fifth pipeline is connected to the fourth pipeline, and the second end of the fifth pipeline is connected to the second pipeline; the second valve is connected to the second pipeline, and the third valve is connected to the fifth pipeline.

11. The wet washing equipment according to claim 10, characterized in that, The cleaning device also includes: A flow meter is connected to the second pipeline and is used to detect the flow rate of the second liquid in the second pipeline.

12. The wet washing equipment according to claim 10, characterized in that, The cleaning device further includes: a first spraying assembly, a first collection tank, a second driving assembly, and a second spraying assembly; the cleaning port includes: a first cleaning port and a second cleaning port; the drain port includes: a first drain port and a second drain port; The first spraying assembly is connected to the second end of the fourth pipeline, and the first spraying assembly is provided with the first cleaning port; the first spraying assembly is used to receive the first liquid from the liquid supply tank and spray the first liquid through the first cleaning port; The first drain port is connected to the first collection tank, and the first drain port is used to discharge the first liquid sprayed from the first cleaning port into the first collection tank; The input terminal of the second drive component is connected to the first collection tank, and the output terminal of the second drive component is connected to the second spray component; the second drive component is used to output the first liquid in the first collection tank to the second spray component; The second spraying assembly is provided with a second cleaning port, and the second spraying assembly is used to spray the first liquid from the first collection tank through the second cleaning port; The second drain port is used to discharge the first liquid sprayed from the second cleaning port.

13. The wet washing equipment according to claim 12, characterized in that, The cleaning device further includes: a second collection tank, a third drive assembly, and a third spraying assembly; the cleaning port further includes: a third cleaning port; the drain port further includes: a third drain port; The second drain outlet is connected to the second collection tank; The input end of the third drive component is connected to the second collection tank, and the output end of the third drive component is connected to the third spraying component; the third drive component is used to output the first liquid in the second collection tank to the third spraying component; The third spraying assembly is provided with the third cleaning port, and the third spraying assembly is used to spray the first liquid from the second collection tank through the third cleaning port; The third drain port is connected to the first pipeline, and the third drain port is used to discharge the first liquid sprayed by the third cleaning port into the first pipeline.

14. The wet washing equipment according to claim 13, characterized in that, The number of the second collection tank, the third drive assembly, the second spray assembly, and the second drain port are all at least two, and at least two second spray assemblies are sequentially arranged between the first spray assembly and the third spray assembly; Each of the second spraying components is provided with a second cleaning port; each of the second drain ports is connected to a corresponding second collection tank, and each of the second drain ports is used to discharge the first liquid sprayed from the second cleaning port of a second spraying component to the corresponding second collection tank; In two adjacent second spraying components, the second spraying component that is relatively closer to the first spraying component is the upper-level second spraying component, and the second spraying component that is relatively farther away from the first spraying component is the lower-level second spraying component. The input end of each third drive component is connected to the second collection tank corresponding to the upper-level second spraying component, and the output end of each third drive component is connected to the lower-level second spraying component.

15. A wet washing system, characterized in that, Includes the wet washing equipment and controller as described in any one of claims 1 to 14.

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