A transfer cavity with substrate position detection

Abstract

The utility model discloses a transmission cavity cavity with substrate position detection, including docking cavity body, upper cavity cover and lower cavity cover, docking cavity body is annular structure and is presented regular polygon to cross section, and it is equipped with docking interface in each side surface, the inside of upper cavity cover is equipped with reflector along its upper edge circumference direction, and two reflectors are correspondingly set up in the left and right two end positions close to docking interface in each docking interface, and the lower outside of lower cavity cover is equipped with substrate detection subassembly along its edge circumference direction, and each substrate detection subassembly is equipped with a regression type photoelectric sensor, is equipped with monitoring mouth on lower cavity cover, and the lower side of lower cavity cover is equipped with mounting hole and suction hole. The utility model has the advantages of: through the setting of multiple docking interfaces, realize that this transmission cavity cavity connects multiple different function cavities, realizes the conversion handling of substrate among multiple different function cavities, and the structure of this transmission cavity cavity is simple, and transmission handling function is strong, and transmission efficiency is high, and the precision is high.

Description

Technical Field

[0001] This utility model relates to the technical field of panel transmission industry, specifically to a transmission cavity with substrate position detection. Background Technology

[0002] In the semiconductor industry, automated substrate transfer systems have replaced traditional manual operations, becoming an indispensable part of the manufacturing process. Panels belong to the semiconductor display field. When the panel substrate is transferred from the transfer cavity to the processing cavity, the transfer of the substrate needs to be detected to avoid inaccurate transfer positions caused by misalignment of the transfer direction, which could affect subsequent substrate processing (such as film deposition / epitaxy / etching processes). Existing transfer cavities have relatively complex structures and are mostly single-transfer systems, resulting in low transfer efficiency. Utility Model Content

[0003] The purpose of this invention is to provide a transmission cavity with substrate position detection to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a transmission cavity with substrate position detection, comprising a docking cavity body, an upper cavity cover, and a lower cavity cover. The docking cavity body is an annular structure with a regular polygonal cross-section, and each side of the annular structure has a docking interface. The upper cavity cover and the lower cavity cover both have circular cross-sections. The upper cavity cover has a reflector plate that mates with the docking interface along its upper circumferential direction. Two reflectors plate are correspondingly provided above each docking interface, and the two reflectors plate are positioned at the left and right ends near the docking interface. The lower cavity cover has a substrate detection assembly that mates with the reflector plate along its lower outer circumferential direction. The substrate detection assembly is arranged one-to-one with the reflector plate. Each substrate detection assembly has a regression photoelectric sensor. The lower cavity cover has a monitoring port for light beam passage at the position corresponding to the regression photoelectric sensor. The reflector plate is used for reflecting the light beam from the regression photoelectric sensor. The lower cavity cover has a mounting hole for installing a vacuum manipulator and a vacuum extraction hole for evacuation.

[0005] In a further optimization, the substrate detection assembly includes a second flange mounted on the monitoring port, with a second observation window connected to the lower end of the second flange, and the regression photoelectric sensor disposed below the second observation window.

[0006] Further optimization involves connecting a mounting plate to the lower part of the second flange, which is fixed to the second flange by a clamp, and a Z-shaped mounting bracket for mounting a regression photoelectric sensor is connected to the lower part of the mounting plate.

[0007] Further optimization involves providing an air inlet below the lower cavity cover, with the air inlet connected to a third flange and the air extraction port connected to a fourth flange.

[0008] Further optimization involves connecting each reflector to a mounting base located on the inner side of the upper cavity cover.

[0009] Further optimization involves providing at least one observation window above the middle of the relative position of each of the interfaces, with the observation window located on the upper cavity cover.

[0010] Further optimization involves providing a first flange above the upper cavity cover corresponding to each observation window position, with a first observation window above each first flange, and several double-jaw calipers connecting the first flange and the corresponding first observation window.

[0011] Further optimization includes a lifting ring at the top center of the upper cavity cover, several lifting lugs along the outer side of the upper cavity cover, and several lifting ring blocks on the outer sides of the docking cavity body, the upper cavity cover, and the lower cavity cover.

[0012] Further optimization involves providing several reinforcing blocks on the inner side of the docking cavity body.

[0013] Further optimization involves the docking cavity body having a regular octagonal cross-section, eight docking interfaces, and sixteen reflector and substrate detection components.

[0014] Beneficial effects: The transmission cavity with substrate position detection of this utility model, through the setting of multiple interfaces, realizes the connection of the transmission cavity to multiple different functional cavities, realizing the conversion and transportation of the substrate between multiple different functional cavities; through the structural setting of the substrate detection component and the reflector, it realizes the detection of whether the substrate has passed through a certain interface; specifically, the regressive photoelectric sensor emits a light beam from bottom to top, which is reflected back to the regressive photoelectric sensor by the reflector. When a substrate passes through, the light beam is blocked by the substrate, resulting in a reduction in the amount of light emitted back to the regressive photoelectric sensor, thereby determining that a substrate has passed through; and the two regressive photoelectric sensors can detect the two opposite edges of the substrate. By the time difference of the substrate traveling between the two regressive photoelectric sensors, the offset of the substrate can be detected.

[0015] The transmission cavity has a simple structure, strong transmission and handling capabilities, and high transmission efficiency and precision. Attached Figure Description

[0016] Figure 1 This is an exploded structural diagram of the transmission cavity with substrate position detection disclosed in the embodiment of this utility model.

[0017] Figure 2This is an isometric structural diagram of the transmission cavity with substrate position detection disclosed in the embodiment of this utility model.

[0018] Figure 3 This is a front view schematic diagram of the transmission cavity with substrate position detection disclosed in the embodiment of this utility model;

[0019] Figure 4 This is a schematic diagram of the upper cavity cover disclosed in the embodiment of this utility model;

[0020] Figure 5 This is a schematic diagram of the installation structure of the first observation window disclosed in an embodiment of the present utility model;

[0021] Figure 6 This is a schematic diagram of the structure of the lower cavity cover disclosed in the embodiment of this utility model;

[0022] Figure 7 This is a schematic diagram of the substrate detection assembly disclosed in the embodiments of this utility model;

[0023] Figure 8 This is a schematic diagram of the transmission state structure of the substrate and the transmission cavity as disclosed in the embodiment of this utility model.

[0024] Figure Labels

[0025] 1-Mating cavity body, 11-Mating interface, 12-Reinforcing block, 2-Upper cavity cover, 21-Reflector plate, 22-Mounting base, 23-Observation window, 24-First flange, 25-First observation window, 26-Double claw clamp, 27-Lifting ring, 28-Lifting lug, 3-Lower cavity cover, 31-Mounting hole, 32-Substrate detection assembly, 321-Second flange, 322-Mounting plate, 323-Clamping plate, 324-Second observation window, 325-Mounting bracket, 326-Regression type photoelectric sensor, 33-Air inlet, 34-Ejection port, 35-Monitoring port, 36-Third flange, 37-Fourth flange. Detailed Implementation

[0026] The following are specific embodiments of the present invention, which are described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0027] like Figure 1-7As shown, a transmission cavity with substrate position detection includes a docking cavity body 1, an upper cavity cover 2, and a lower cavity cover 3. The docking cavity body 1 is an annular structure with a regular polygonal cross-section, and each side of it is provided with a docking interface 11. The upper cavity cover 2 and the lower cavity cover 3 are both circular in cross-section. The interior of the upper cavity cover 2 is provided with a reflector 21 that mates with the docking interface 11 along its upper edge circumferential direction. Two reflectors 21 are provided above the corresponding position of each docking interface 11, and the two reflectors 21 are respectively arranged at the left and right ends near the docking interface 11. The lower cavity cover... The lower outer side of the 3 is provided with a substrate detection assembly 32 that cooperates with the reflector 21 along its circumferential direction. The substrate detection assembly 32 is arranged in a one-to-one correspondence with the reflector 21. Each substrate detection assembly 32 is provided with a regression photoelectric sensor 326. The lower cavity cover 3 is provided with a monitoring port 35 for the light beam to pass through at the position corresponding to the regression photoelectric sensor 326. The reflector 21 is used to reflect the light beam of the regression photoelectric sensor 326. The lower cavity cover 3 is provided with a mounting hole 31 for the installation of a vacuum robot and a vacuum hole 334 for vacuuming.

[0028] In this application, the docking cavity body 1, the upper cavity cover 2, and the lower cavity cover 3 form a transfer cavity for the transfer of substrates in the panel industry. The docking cavity body 1 has a regular polygonal structure, and the docking interfaces 11 on each side are used to connect different functional cavities. The substrates are transferred to different functional cavities through the docking interfaces 11 of the transfer cavity. The lower cavity cover 3 is provided with mounting holes 31, which facilitate the installation of a vacuum robot. The vacuum robot is used to transport the substrates delivered to the transfer cavity and to the different functional cavities connected to the transfer cavity. A vacuum vent 334 is provided below the lower cavity cover 3. A vacuum pump is connected to the vacuum vent 334 to evacuate the transfer cavity, enabling the substrates to be transferred in a vacuum environment. In a vacuum environment, gas molecule interference can be effectively removed, preventing dust, particulate matter, and gaseous contaminants from entering the process cavity and ensuring a clean working environment.

[0029] In this application, a substrate detection component 32 is provided on the lower cavity cover 3 for detecting substrates passing through that position, and can determine which interface 11 the substrate passes through and the offset of the substrate during passage. Specifically, this is achieved by the cooperation of a return-type photoelectric sensor 326 of the substrate detection component 32 and a reflector 21. The return-type photoelectric sensor 326 can emit a light beam upward and illuminate the reflector 21. The reflector 21 reflects the light beam back to the return-type photoelectric sensor 326, thereby detecting the passage of the substrate and the offset of the substrate's movement direction. The monitoring port 35 is used to receive the light beam emitted by the return-type photoelectric sensor 326 and the returned light beam. If a substrate passes through an interface 11, the light beam emitted by the return-type photoelectric sensor 326 at the corresponding position below the interface 11 will be blocked by the substrate, resulting in a reduction in the amount of light received by the return-type photoelectric sensor 326 for a certain period of time, thus enabling the determination that the substrate has passed through the interface 11. When a substrate passes through, the light beam passes through the substrate twice (emission and reflection). Because the substrate's passage increases the amount of light it blocks, the amount of light emitted and reflected by the photodetector 326 decreases, thus determining whether a substrate has passed. Simultaneously, since the two reflectors 21 are positioned near the left and right ends of the interface 11, and the photodetector 326 corresponds to each other, it can detect the left and right edges of the substrate passing through the interface 11. By measuring the time difference of the substrate's passage through the two photodetectors 326, the offset in the substrate's direction of movement can be detected.

[0030] like Figure 7 As shown, in one embodiment of this application, the substrate detection assembly 32 includes a second flange 321 mounted on the monitoring port 35. A second observation window 324 is connected to the lower end of the second flange 321, and a regression photoelectric sensor 326 is disposed below the second observation window 324. The second flange 321 is mounted on the monitoring port 35 on the lower cavity cover 3, facilitating the installation of both the second observation window 324 and the regression photoelectric sensor 326. The second observation window 324 not only seals the orifice of the second flange 321 but also allows the light beam from the regression photoelectric sensor 326 to pass through.

[0031] Furthermore, a mounting plate 322 is connected below the second flange 321. The mounting plate 322 is fixed to the second flange 321 by a clamping plate 323. Below the mounting plate 322 is a U-shaped mounting bracket 325 for mounting the regression photoelectric sensor 326. That is, the clamping plate 323 fixes the mounting plate 322 to the second flange 321, clamping the end face of the second flange 321 from above and below, thus securing the mounting plate 322. The mounting plate 322 is used to mount the mounting bracket 325, which is used to mount the regression photoelectric sensor 326. The mounting bracket 325 is U-shaped, facilitating the placement of the regression sensor 326 below the second observation window 324. It also has a simple structure and reduces obstruction of the second observation window 324.

[0032] like Figure 1-2 As shown, in another embodiment of this application, an air inlet 33 is provided below the lower cavity cover 3. The air inlet 33 is connected to a third flange 36, and an air extraction port 334 is connected to a fourth flange 37. The third flange 36 facilitates the connection of a gas source, such as a nitrogen source or other inert gas source, and the gas from the gas source enters the transmission cavity through the air inlet 33. The fourth flange 37 is used to connect a vacuum pump, which evacuates the transmission cavity through the air extraction port 334 to achieve vacuum environment operation.

[0033] like Figure 4 As shown, in another embodiment of this application, each reflector 21 is connected to a mounting base 22, which is disposed on the inner side of the upper cavity cover 2. That is, the mounting base 22 is used to install and fix the reflector 21, and facilitates the installation and replacement of the reflector 21.

[0034] like Figure 2 , Figure 4 As shown, in another embodiment of this application, at least one observation window 23 is provided above the middle of the relative position of each interface 11, and the observation window 23 is disposed on the upper cavity cover 2. The observation window 23 facilitates the observation of the situation inside the transmission cavity, and the situation inside the transmission cavity can be observed from above the upper cavity cover 2.

[0035] like Figure 5 As shown, further, a first flange 24 is provided above the upper cavity cover 2 at the position corresponding to each observation window 23, and a first observation window 25 is provided above each first flange 24. Several double-jaw calipers 26 are connected between the first flange 24 and the corresponding first observation window 25.

[0036] The first flange 24 is installed on the observation window 23. The first flange is used for the installation of the first observation window 25. The first observation window 25 is fixed to the first flange 24 by a double-jaw caliper 26. The fixing method is simple and easy. The distance between the two calipers can be adjusted by rotating the bolt, and the first observation window 25 can be quickly fixed to the first flange 24.

[0037] like Figure 2 As shown, in another embodiment of this application, a lifting ring 27 is provided at the center of the upper cavity cover 2, and several lifting lugs 28 are provided along the outer side of the upper cavity cover 2. Several lifting ring blocks are provided on the outer sides of the docking cavity body 1, the upper cavity cover 2, and the lower cavity cover 3. The lifting ring 27 and lifting lugs 28 facilitate the lifting of the upper cavity cover 2, making it convenient to transport the upper cavity cover 2. The lifting ring blocks on the docking cavity body 1, the upper cavity cover 2, and the lower cavity cover 3 facilitate the hoisting and transport of the docking cavity body 1, the upper cavity cover 2, and the lower cavity cover 3.

[0038] like Figure 1 As shown, in another embodiment of this application, a plurality of reinforcing blocks 12 are provided on the inner side of the docking cavity body 1, which can enhance the structural strength of the docking cavity body 1. Among them, the reinforcing blocks 12 are provided at the turning corners of the docking cavity body 1, and also on the upper and lower sides of the docking interface 11, thereby greatly improving the strength of the docking cavity body 1 and ensuring the stability of the transmission cavity.

[0039] like Figure 1-2 , Figure 8 As shown, in another embodiment of this application, the cross-section of the docking cavity body 1 is a regular octagonal structure, with eight docking interfaces 11, and sixteen reflectors 21 and substrate detection components 32. One of the eight docking interfaces 11 is the substrate inlet, and the other seven are used to connect seven cavities with different functions, realizing multi-purpose use of one cavity and improving the transmission capacity of the transmission cavity. There are sixteen reflectors 21 and sixteen substrate detection components 32, corresponding to eight docking interfaces 11. That is, every two reflectors 21 and two substrate detection components 32 correspond to one docking interface 11, realizing the detection of which docking interface 11 the substrate passes through and the detection of the offset of the substrate's movement direction, ensuring accurate transmission of the substrate.

[0040] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A transmission cavity with substrate position detection, characterized in that: The assembly includes a docking cavity body (1), an upper cavity cover (2), and a lower cavity cover (3). The docking cavity body (1) is an annular structure with a regular polygonal cross-section, and each side of it is provided with a docking interface (11). The upper cavity cover (2) and the lower cavity cover (3) are both circular in cross-section. The upper cavity cover (2) has a reflector plate (21) that mates with the docking interface (11) along its upper edge circumferential direction inside. Two reflector plates (21) are provided above the corresponding position of each docking interface (11), and the two reflector plates (21) are respectively located at the left and right ends near the docking interface (11). The lower cavity cover (3) has a reflector plate (21) located on its lower outer side along its edge. A substrate detection assembly (32) is provided in the circumferential direction to cooperate with the reflector (21). The substrate detection assembly (32) and the reflector (21) are arranged in a one-to-one correspondence. Each substrate detection assembly (32) is provided with a regression photoelectric sensor (326). The lower cavity cover (3) is provided with a monitoring port (35) for the passage of light beams at the position corresponding to the regression photoelectric sensor (326). The reflector (21) is used to reflect the light beams of the regression photoelectric sensor (326). The lower cavity cover (3) is provided with a mounting hole (31) for the installation of a vacuum manipulator and an air extraction hole (334) for vacuuming.

2. The transmission cavity with substrate position detection according to claim 1, characterized in that: The substrate detection assembly (32) includes a second flange (321) mounted on the monitoring port (35), the lower end of the second flange (321) is connected to a second observation window (324), and the regression photoelectric sensor (326) is disposed below the second observation window (324).

3. The transmission cavity with substrate position detection according to claim 2, characterized in that: A mounting plate (322) is connected to the lower part of the second flange (321). The mounting plate (322) is fixed to the second flange (321) by a clamp (323). A zig-shaped mounting bracket (325) for mounting a regression photoelectric sensor (326) is connected to the lower part of the mounting plate (322).

4. The transmission cavity with substrate position detection according to claim 1, characterized in that: The lower cavity cover (3) is provided with an air inlet (33) below it. The air inlet (33) is connected to a third flange (36), and the air extraction hole (334) is connected to a fourth flange (37).

5. A transmission cavity with substrate position detection according to claim 1, characterized in that: Each of the reflectors (21) is connected to a mounting base (22), which is located on the inside of the upper cavity cover (2).

6. The transmission cavity with substrate position detection according to claim 1, characterized in that: At least one observation window (23) is provided above the middle of the relative position of each of the interfaces (11), and the observation window (23) is provided on the upper cavity cover (2).

7. A transmission cavity with substrate position detection according to claim 6, characterized in that: A first flange (24) is provided above the upper cavity cover (2) at the position corresponding to each observation window (23). A first observation window (25) is provided above each first flange (24). Several double-jaw calipers (26) are connected between the first flange (24) and the corresponding first observation window (25).

8. The transmission cavity with substrate position detection according to claim 1, characterized in that: The upper cavity cover (2) has a lifting ring (27) in the middle above it, and the outer side of the upper cavity cover (2) has several lifting lugs (28) along its side. The outer sides of the docking cavity body (1), the upper cavity cover (2) and the lower cavity cover (3) are all provided with several lifting ring blocks.

9. A transmission cavity with substrate position detection according to claim 1, characterized in that: The inner side of the docking cavity body (1) is provided with several reinforcing blocks (12).

10. A transmission cavity with substrate position detection according to claim 1, characterized in that: The cross-section of the docking cavity body (1) is a regular octagonal structure, there are eight docking interfaces (11), and there are sixteen reflector plates (21) and substrate detection components (32).

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