High-precision inching module

Abstract

The utility model aims at providing a kind of high-precision inching module with stable structure, high guiding precision, with multi-dimensional high-precision fine adjustment ability.The utility model includes pedestal, installation platform, Z-axis inching assembly being arranged on pedestal, X-Y axis two-way inching assembly being arranged on installation platform and stage being arranged on X-Y axis two-way inching assembly, Z-axis inching assembly drives X-Y axis two-way inching assembly and stage to move up and down along Z-axis direction, X-Y axis two-way inching assembly is composed of manual sliding table structure and electric sliding table structure being arranged along X-axis direction and Y-axis direction orthogonally, for driving stage to move along X-axis direction and Y-axis direction respectively, realize high-precision micro-displacement adjustment of stage in three-dimensional direction.The utility model relates to precision adjusting mechanism technical field.

Description

Technical Field

[0001] This utility model relates to the field of precision adjustment mechanism technology, and in particular to a high-precision inching module. Background Technology

[0002] Currently, in precision testing, optical measurement, and optical component assembly, the adjustment method using a mounting platform and drive mechanism is widely used to achieve position and attitude adjustment of the measured part or optical element. However, existing multi-dimensional adjustment platforms generally suffer from insufficient accuracy. Common structures can only provide single-axis or two-dimensional translation functions, making it difficult to simultaneously handle planar displacement adjustment in the X and Y axes and micro-tilt adjustment in the TX and TY axes on the same platform. This structural limitation is particularly evident in applications requiring high-precision alignment of optical axes or specific planes, often necessitating multiple disassemblies or reliance on external auxiliary equipment, increasing operation time and introducing cumulative errors. Furthermore, some platforms suffer from insufficient rigidity or improper arrangement of guide components, leading to slight swaying or deviation during adjustment, affecting repeatability and measurement consistency.

[0003] In terms of position detection, existing multi-dimensional adjustment platforms mostly rely on mechanical scales or low-precision sensors for travel reference, lacking integrated high-precision detection devices. This makes it difficult to monitor and control minute vertical displacements in real time and stably. This not only limits further improvements in adjustment accuracy but also affects their reliability in applications such as high-precision detection and closed-loop control. Furthermore, some platforms use a single drive method, making it difficult to balance rapid adjustment with precise micro-adjustments within a limited space. They are also prone to wear and tear and gaps during long-term operation, leading to decreased accuracy and increased maintenance frequency. Therefore, there is an urgent need for a stable, highly accurate, multi-dimensional high-precision fine-tuning module with high-precision displacement detection capabilities to overcome these shortcomings. Utility Model Content

[0004] To address the shortcomings of the existing technology, this utility model provides a high-precision inching module, aiming to solve the problems of insufficient multi-dimensional adjustment accuracy, poor guiding stability, and lack of high-precision displacement detection in the existing technology.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: a high-precision inching module, including a base, a mounting platform, a Z-axis inching component, an XY-axis bidirectional inching component mounted on the mounting platform, and a platform disposed on the XY-axis bidirectional inching component. The Z-axis inching component is mounted on the base, and the mounting platform is fixedly connected to the sliding component of the Z-axis inching component. The Z-axis inching component is used to drive the XY-axis bidirectional inching component and the platform to move up and down along the Z-axis direction. The XY-axis bidirectional inching component is used to drive the platform to move bidirectionally along the X-axis and Y-axis directions respectively, so as to realize high-precision micro-displacement adjustment of the platform in the X-axis and Y-axis directions.

[0006] Based on the above structural design, the beneficial effects of this utility model are as follows: By mounting the Z-axis inching component on the base and fixing the mounting platform to the sliding part of the Z-axis inching component, high-precision up-and-down fine adjustment of the stage and its supporting components in the Z-axis direction is achieved, which can meet the vertical displacement control requirements in precision assembly or testing processes; at the same time, by setting the XY-axis bidirectional inching component on the mounting platform, the stage can be adjusted in both directions in the X and Y axes respectively, thereby achieving high-precision, multi-degree-of-freedom displacement control in three dimensions, effectively improving operational flexibility and adjustment accuracy. The overall structure is compact, the transmission chain is short, and the cumulative error during the movement process is reduced, making it suitable for precision machining, microscopic observation, optical debugging and other scenarios with extremely high alignment accuracy requirements.

[0007] Furthermore, the Z-axis inching assembly includes a linear slide rail, a linear slider, a sliding support plate, a gas spring, and a voice coil motor for driving the Z-axis inching assembly to move slightly along the Z-axis direction. The linear slide rail is fixedly installed on the inner wall of one side of the base along its length direction. A linear slider is provided on the corresponding side of the mounting platform. The linear slider is slidably connected to the linear slide rail. The gas spring is provided on the other side of the base along its length direction, with one end fixedly connected to the base and the other end fixedly connected to the mounting platform. The sliding support plate is provided in the width direction of the base. Linear sliders are provided at both ends of the base in the width direction. A linear slide rail is provided on the outer side of the sliding support plate and slidably engages with the linear slider. The mounting platform is fixedly connected to the sliding support plate by screws.

[0008] Furthermore, the XY-axis bidirectional inching assembly includes at least two manual slide structures vertically stacked on the mounting platform. The two manual slide structures are orthogonally arranged. Each manual slide structure includes a base fixedly mounted on the mounting platform and an elongated hole on one side of the base. The bottom end of the elongated hole is fixedly connected to the base. A limiting pin passes through the opening of the elongated hole. The limiting pin is used to limit the maximum movement distance of the upper cover relative to the base, and the limiting pin is fastened to the upper cover by threaded engagement. A limiting block is provided on the other side of the base corresponding to the elongated hole. The limiting block is fixedly mounted on the base. A lead screw drive device passes through the limiting block, and its output end is connected to a slider. The slider is fixed on one side of the upper cover and is used to drive the upper cover to move linearly along the base. The lead screw drive device controls the upper cover to achieve precise displacement adjustment by rotation.

[0009] Based on the above, the manual slide structure forms an integral load-bearing foundation through the fixed connection between the base and the mounting platform. The cooperation between the elongated hole and the limiting pin limits the maximum stroke of the upper cover relative to the base, preventing over-displacement during adjustment. The threaded fastening structure between the limiting pin and the upper cover ensures the stability of the limiting position. The limiting block on the other side of the base and the lead screw drive device passing through it form a stable lead screw guide support. The lead screw is connected to the slider on one side of the upper cover. When the lead screw rotates, it drives the slider to move linearly along the base through the threaded cooperation with the slider, thereby driving the upper cover to produce a precise linear displacement relative to the base. Through the cooperation of the above components, the upper cover can be adjusted with high precision in one direction within a controlled range on the fixed mounting platform.

[0010] Two manual slide structures are vertically stacked on the mounting platform and arranged orthogonally to each other in the guiding direction. The lower manual slide achieves linear adjustment along one direction (X-axis), and the upper manual slide achieves linear adjustment along the direction perpendicular to it (Y-axis). Through this orthogonal stacked structure, the independent manual precision displacement adjustment of the adjusted component in both the X-axis and Y-axis directions can be achieved on the same mounting platform, thereby improving the overall two-dimensional position adjustment capability and operation accuracy.

[0011] Furthermore, the XY-axis bidirectional inching assembly also includes at least two electric slide structures vertically stacked on the manual slide structure. The two electric slide structures are arranged orthogonally to each other. Each electric slide structure includes a base fixed on the lower structure, a parabolic contour guide rail set on the base, a slide that slides with the guide rail, and an electric drive device that drives the slide to move along the guide rail. The two electric slide structures are arranged in different directions, and the upper structure is adjusted in attitude by the slight lifting and lowering of the slides in different directions.

[0012] Based on the above, the electric slide table structure forms an integral load-bearing foundation through the fixed connection between the base and the lower structure. The parabolic contour guide rail is installed on the base and forms a curved sliding fit with the slide table, ensuring the stability and accuracy of the slide table's movement trajectory during the guiding process. The slide table is connected to the electric drive device. When the drive device pushes the slide table along the guide rail, the slide table, guided by the parabolic contour guide rail, achieves a slight height change at one end, thereby causing a slight tilt adjustment of the upper structure mounted on it.

[0013] Two motorized sliding table structures are vertically stacked on top of a manual sliding table structure, with their guide directions orthogonal to each other. The lower motorized sliding table adjusts the attitude in one direction, while the upper motorized sliding table adjusts the attitude in a direction perpendicular to it. Through this orthogonal arrangement and sequential stacking, independent micro-tilt adjustment of the upper structure in two different directions can be achieved on the same mounting platform, forming an overall dual-axis attitude adjustment capability.

[0014] Furthermore, a platform is provided above the electric slide structure, and a positioning groove is provided on the platform. The positioning groove matches the outer contour of the reference plate in shape and size. The reference plate is embedded in the positioning groove and fixedly connected to the mounting plate.

[0015] Furthermore, the base includes a grating ruler, which is disposed between the base and the mounting platform. The fixed ruler body of the grating ruler is fixedly connected to the base, and the movable reading head of the grating ruler is fixedly connected to the mounting platform. The fixed ruler body and the movable reading head are arranged relatively parallel to each other.

[0016] Based on the above, the fixed ruler of the grating ruler forms a stable measurement reference through a fixed connection with the base, and the movable reading head moves synchronously with the platform when the platform moves vertically through a fixed connection with the mounting platform. The fixed ruler and the movable reading head are arranged in parallel relative to each other, ensuring the matching accuracy of the two during the relative sliding process. Thus, the consistency of the measurement spacing and the reading accuracy are maintained when the platform moves vertically. Through the relative matching of the fixed ruler and the movable reading head, continuous position detection and accurate displacement acquisition are realized during the vertical displacement process of the mounting platform.

[0017] Furthermore, each of the four corners of the base is provided with screws for fixed connection with the mounting surface. The mounting structure of the screws can be adjusted according to the angle of the mounting surface to ensure that the base is in a horizontal position.

[0018] Based on the above, by setting screws at the four corners of the base for fixed connection with the mounting surface, and adopting an installation structure that can be adjusted according to the angle of the mounting surface, the base can be precisely leveled on different angles or uneven mounting surfaces, thereby ensuring that the base is in a horizontal position. This structure effectively avoids the problem of reduced platform movement accuracy caused by the tilt of the mounting surface, improves the stability of the overall system and the measurement or processing accuracy, is suitable for various installation environments, and expands the scope of application of this utility model. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2 This is a structural schematic diagram from another perspective of the present invention;

[0021] Figure 3 This is a structural diagram of a manual slide table;

[0022] Figure 4 This is a structural diagram of the manual slide structure from another perspective;

[0023] Figure 5 This is a detailed structural diagram of the electric slide table. Detailed Implementation

[0024] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0025] like Figures 1-5 As shown, this utility model is a high-precision inching module, including a base 1, a mounting platform 2, a Z-axis inching component 3, an XY-axis bidirectional inching component 4 mounted on the mounting platform 2, and a platform 5 disposed on the XY-axis bidirectional inching component 4. The Z-axis inching component 3 is mounted on the base 1, and the mounting platform 2 is fixedly connected to the sliding component of the Z-axis inching component 3. The Z-axis inching component 3 is used to drive the XY-axis bidirectional inching component 4 and the platform 5 to move up and down along the Z-axis. The XY-axis bidirectional inching component 4 is used to drive the platform 5 to move bidirectionally along the X-axis and Y-axis directions respectively, so as to realize high-precision micro-displacement adjustment of the platform 5 in the X-axis and Y-axis directions.

[0026] During use, the two manual slide structures 41 in the XY-axis bidirectional inching assembly 4 first achieve precise adjustment of the upper component of the mounting platform 2 in planar position. The two manual slide structures 41 are vertically stacked on the mounting platform 2, with their guide directions orthogonal to each other. The lower manual slide achieves linear adjustment in the X-axis direction, and the upper manual slide achieves linear adjustment in the Y-axis direction. Each manual slide structure 41 includes a base 411 fixedly installed on the mounting platform 2, and an elongated hole 41 is provided on one side of the base 411. 2. A limiting pin 413 is inserted through the elongated hole 412. The limiting pin 413 is fixed to the upper cover 414 by threads and limits its maximum stroke relative to the base 411. A limiting block 415 is provided on the other side of the base 411. A screw drive device 416 is inserted in the limiting block 415. The output end of the screw drive device 416 is connected to a slider 417. The slider 417 is fixed on one side of the upper cover 414. Rotating the screw can drive the upper cover 414 to move precisely in a straight line along the base 411, thereby achieving unidirectional precision displacement.

[0027] After the planar position adjustment is completed, the attitude adjustment is achieved through the electric slide structure 42. Two electric slide structures 42 are vertically stacked on the upper manual slide structure 41, with the guide directions being orthogonal to each other. Each electric slide structure 42 includes a base 421 fixed on the lower structure, a parabolic contour guide rail 422 arranged on the base 421, a slide 423 that slides with the guide rail 422, and an electric drive device 424 that drives the slide 423 to move along the guide rail 422. When the electric drive device 424 pushes the slide 423 to move along the parabolic guide rail 422, the slide 423 produces a slight rise and fall, thereby causing the upper structure to tilt in the corresponding direction. The orthogonal arrangement of the two electric slides 42 can realize the independent micro-tilt adjustment of the upper structure in two directions to meet the requirements of high-precision leveling.

[0028] A platform 5 is fixed above the electric slide structure 42. The platform 5 is provided with a positioning groove 51 that matches the outer contour of the reference plate 52. The reference plate 52 is embedded in the positioning groove 51 and fixedly connected to the platform 5, thereby maintaining a stable positioning relationship. In order to achieve high-precision displacement detection, a grating ruler 11 is provided on the base 1. The grating ruler 11 is arranged between the base 1 and the mounting platform 2. Its fixed ruler body is fixedly connected to the base 1, and its movable reading head is fixedly connected to the mounting platform 2. The two are arranged relatively parallel. When the mounting platform 2 moves vertically under the guidance of the Z-axis inching component 3, the reading head slides synchronously along the fixed ruler body to realize continuous monitoring and data acquisition of the vertical displacement of the platform.

[0029] Through the above structure and workflow, this utility model can realize manual precision adjustment of the installation platform in the X and Y axis directions, as well as electric micro-tilt adjustment in the TX and TY directions, and achieve high-precision displacement detection by combining with a grating ruler, thereby meeting the requirements of high-precision applications such as optical inspection and precision measurement.

[0030] Finally, it should be emphasized that the above description is not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A high-precision inching module, characterized in that: The device includes a base (1), a mounting platform (2), a Z-axis inching assembly (3), an XY-axis bidirectional inching assembly (4) mounted on the mounting platform (2), and a platform (5) mounted on the XY-axis bidirectional inching assembly (4). The Z-axis inching assembly (3) is mounted on the base (1), and the mounting platform (2) is fixedly connected to the sliding component of the Z-axis inching assembly (3). The Z-axis inching assembly (3) is used to drive the XY-axis bidirectional inching assembly (4) and the platform (5) to move up and down along the Z-axis. The XY-axis bidirectional inching assembly (4) is used to drive the platform (5) to move bidirectionally along the X-axis and Y-axis directions, respectively, so as to realize the high-precision micro-displacement adjustment of the platform (5) in the X-axis and Y-axis directions.

2. The high-precision inching module according to claim 1, characterized in that: The Z-axis inching assembly (3) includes a linear slide rail (31), a linear slider (32), a sliding support plate (33), a gas spring (34), and a voice coil motor (35) for driving the Z-axis inching assembly (3) to move slightly along the Z-axis direction. The linear slide rail (31) is fixedly installed on the inner wall of one side of the base (1) along its length direction. The corresponding side of the mounting platform (2) is provided with a linear slider (32). The linear slider (32) is slidably connected to the linear slide rail (31). The gas spring (34) The sliding plate (33) is located on the other side of the base (1) along its length, with one end fixedly connected to the base (1) and the other end fixedly connected to the mounting platform (2). The sliding plate (33) is located in the width direction of the base (1). Linear sliders (32) are respectively provided at both ends of the base (1) along its width direction. A linear slide rail (31) is provided on the outer side of the sliding plate (33) and slides in cooperation with the linear slider (32). The mounting platform (2) is fixedly connected to the sliding plate (33) by screws.

3. The high-precision inching module according to claim 1, characterized in that: The XY-axis bidirectional inching assembly (4) includes at least two manual slide structures (41) vertically stacked on the mounting platform (2). The two manual slide structures (41) are arranged orthogonally to each other. Each manual slide structure (41) includes a base (411) fixedly mounted on the mounting platform (2) and an elongated hole (412) on one side of the base (411). The bottom end of the elongated hole (412) is fixedly connected to the base (411). A limiting pin (413) is inserted through the opening of the elongated hole (412). The limiting pin (413) is used to limit the upper cover (414) relative to the base (411). The maximum moving distance is determined by the limit pin (413) being threaded onto the upper cover (414). A limit block (415) is provided on the other side of the base (411) corresponding to the elongated hole (412). The limit block (415) is fixedly installed on the base (411). The screw drive device (416) passes through the limit block (415), and its output end is connected to the slider (417). The slider (417) is fixed on one side of the upper cover (414) and is used to drive the upper cover (414) to move linearly along the base (411). The screw drive device (416) controls the upper cover (414) to achieve precise displacement adjustment by rotating it.

4. A high-precision inching module according to claim 1, characterized in that: The XY-axis bidirectional inching assembly (4) further includes at least two electric slide structures (42) vertically stacked on the manual slide structure (41). The two electric slide structures (42) are arranged in an orthogonal direction. Each electric slide structure (42) includes a base (421) fixed on the lower structure, a parabolic contour guide rail (422) set on the base, a slide (423) that slides with the guide rail, and an electric drive device (424) that drives the slide (423) to move along the guide rail. The two electric slide structures (42) are arranged in different directions. The upper structure is adjusted in posture by the slight lifting of the slide (423) in different directions.

5. A high-precision inching module according to claim 1, characterized in that: A platform (5) is provided above the electric slide structure (42). A positioning groove (51) is provided on the platform (5). The positioning groove (51) matches the outer contour of the reference plate (52) in shape and size. The reference plate (52) is embedded in the positioning groove (51) and fixedly connected to the platform (5).

6. A high-precision inching module according to claim 1, characterized in that: The base (1) includes a grating ruler (11), which is disposed between the base (1) and the mounting platform (2). The fixed ruler body of the grating ruler (11) is fixedly connected to the base (1), and the movable reading head of the grating ruler (11) is fixedly connected to the mounting platform (2). The fixed ruler body and the movable reading head are arranged relatively parallel to each other.

7. A high-precision inching module according to claim 1, characterized in that: The base (1) is provided with screws (12) at each of its four corners for fixed connection with the mounting surface. The mounting structure of the screws (12) can be adjusted according to the angle of the mounting surface to ensure that the base (1) is in a horizontal position.

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