A kind of aluminum alloy cooling water path wall thickness thinning rate test device for photoetching machine
By designing an aluminum alloy cooling water circuit test device for lithography machines, the problems of water circuit corrosion and wall thickness reduction were solved, enabling the determination of wall thickness reduction rate and life prediction, thus ensuring the accuracy and safety of the test.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- FUDAN UNIVERSITY
- Filing Date
- 2025-08-18
- Publication Date
- 2026-07-21
AI Technical Summary
The aluminum alloy cooling water channels of existing lithography machines are prone to corrosion when in contact with cooling water, leading to blockage and thinning of the channels, posing a risk of perforation, and making it impossible to effectively monitor and predict their lifespan.
A test device was designed, which includes a chiller unit, a test circuit and an aluminum alloy sample tube. The device uses plastic pipes and a sensor monitoring system to detect water quality parameters in real time, simulate flow channel corrosion, and conduct tests through flow control and temperature regulation.
It enables accurate measurement of the wall thickness reduction rate of aluminum alloy cooling water channels, provides support for life prediction, and ensures the accuracy and safety of test results.
Smart Images
Figure CN224535958U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of aluminum alloy cooling water circuit testing technology, specifically relating to a device for testing the wall thickness reduction rate of aluminum alloy cooling water circuit for lithography machines. Background Technology
[0002] With the development of science and technology and society, semiconductor chips are playing an increasingly important role. Semiconductor manufacturing processes consume a large amount of energy and generate a significant amount of heat during production. The lithography machines used in semiconductor production must maintain stable internal system temperatures during manufacturing to prevent yield reductions or even equipment failures caused by overheating. Liquid cooling offers numerous advantages, including high heat dissipation efficiency, good temperature uniformity, low noise, and high space utilization, and is widely used in lithography machine manufacturing. While liquid cooling channels are machined directly into large aluminum alloy blocks, their small aperture, long flow path, and complex structure make conventional surface treatments and other corrosion protection methods ineffective, necessitating direct contact with the cooling water. Although the cooling water used is first-grade deionized water with very low impurity content, corrosion is still unavoidable, often leading to blockages due to corrosion product accumulation. This not only reduces the overall cooling efficiency of the water channel but also easily causes thinning of the channel walls, increasing the risk of perforation. Therefore, a device for testing the wall thickness reduction rate of aluminum alloy cooling water channels in lithography machines is needed. Utility Model Content
[0003] The purpose of this invention is to provide a test device for the wall thickness reduction rate of aluminum alloy cooling water circuits in lithography machines, so as to meet the laboratory requirements for measuring the wall thickness reduction rate of aluminum alloy cooling water circuits and provide support for establishing a life prediction system for aluminum alloy cooling water circuits.
[0004] The technical solution adopted in this utility model is as follows:
[0005] A test device for the wall thickness reduction rate of aluminum alloy cooling water circuit in a lithography machine includes a chiller unit, a test circuit, and an aluminum alloy sample tube. The chiller unit includes a main control panel, a water tank, and a monitoring and control component. The water tank contains circulating water and is connected to an inlet pipe and an outlet pipe. The monitoring and control component includes a flow control valve installed on the inlet pipe and the outlet pipe, a level gauge for monitoring the liquid level of the circulating water in the water tank, a temperature gauge for monitoring the temperature of the circulating water, an aeration device, and a blower. The flow control valve, level gauge, temperature gauge, aeration device, and blower are all electrically connected to the main control panel.
[0006] The test circuit includes an inlet branch pipe connected to the outlet pipe and an outlet branch pipe connected to the inlet pipe. The other end of the inlet branch pipe is connected to an inlet rubber hose, which is connected to one end of an aluminum alloy sample tube via an adapter. The other end of the outlet branch pipe is connected to an outlet rubber hose, which is connected to the other end of the aluminum alloy sample tube via an adapter. Ball valves are installed on both the inlet and outlet branch pipes, and a flow meter is installed on the outlet branch pipe.
[0007] Furthermore, the water tank is also connected to a bypass system, which is equipped with a pH value detection sensor, a conductivity detection sensor, a dissolved oxygen content detection sensor, a calcium ion content detection sensor, and a chloride ion content detection sensor. The pH value detection sensor, conductivity detection sensor, dissolved oxygen content detection sensor, calcium ion content detection sensor, and chloride ion content detection sensor are all electrically connected to the main control panel.
[0008] Furthermore, the test circuit is configured with multiple sets.
[0009] Furthermore, the water tank is also equipped with a water sampling port.
[0010] Furthermore, the inlet pipe, outlet pipe, inlet branch pipe, outlet branch pipe, and adapter are made of plastic.
[0011] Furthermore, the aluminum alloy sample tube is a straight tube, which is formed by connecting multiple short straight tube sections with threads.
[0012] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:
[0013] 1. In this utility model, the chiller unit can adjust and monitor various parameters of the circulating water to meet different test requirements of the aluminum alloy sample tube and ensure that the test is carried out under preset conditions.
[0014] 2. In this utility model, except for the aluminum alloy sample tube, all other parts are made of plastic or rubber to avoid causing pollution of the circulating water and to prevent the precipitation of various metal cations and corrosive anions such as chloride ions and sulfate ions.
[0015] 3. In this utility model, the aluminum alloy sample tube is a straight tube to simulate the corrosion of the flow channel. It is formed by connecting multiple straight tube sections with short threaded connections, which facilitates sampling for characterization and analysis.
[0016] 4. In this utility model, in order to monitor the circulating water quality of the loop in real time, the water tank is also connected to a bypass system, which is equipped with sensors for five indicators: pH value, conductivity, dissolved oxygen content, calcium ion content, and chloride ion content. The values of these indicators can be displayed in real time on the main control panel, so as to respond promptly to changes in water quality in the loop and ensure more accurate test results. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort, wherein:
[0018] Figure 1 This is a schematic diagram of the structure of this utility model;
[0019] Figure 2 This is a threaded assembly diagram for an aluminum alloy sample tube.
[0020] Figure 3 This is a reference image of a physical chiller unit;
[0021] Figure 4 This is a reference diagram of the actual test circuit after it has been built.
[0022] Attached reference numerals: 1-Chiller unit, 2-Inlet pipe, 3-Outlet pipe, 4-Inlet branch pipe, 5-Outlet branch pipe, 6-Inlet rubber hose, 7-Adapter, 8-Outlet rubber hose, 9-Ball valve, 10-Water sampling port. Detailed Implementation
[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0025] It should be noted that the labels and letters in the following figures represent similar items, therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are merely for the purpose of simplifying the description of this utility model and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0027] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0028] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0029] Refer to the instruction manual. Figure 1 ,
[0030] A test device for the wall thickness reduction rate of aluminum alloy cooling water circuit in a lithography machine is disclosed. The test device includes a chiller unit, a test circuit, and an aluminum alloy sample tube. The chiller unit includes a main control panel, a water tank, and a monitoring and control component. The water tank contains circulating water and is connected to an inlet pipe and an outlet pipe. The monitoring and control component includes a flow control valve installed on the inlet pipe and the outlet pipe, a level gauge for monitoring the liquid level of the circulating water in the water tank, a temperature gauge for monitoring the temperature of the circulating water, an aeration device, and a blower. The flow control valve, level gauge, temperature gauge, aeration device, and blower are all electrically connected to the main control panel.
[0031] The test circuit includes an inlet branch pipe connected to the outlet pipe and an outlet branch pipe connected to the inlet pipe. The other end of the inlet branch pipe is connected to an inlet rubber hose, which is connected to one end of an aluminum alloy sample tube via an adapter. The other end of the outlet branch pipe is connected to an outlet rubber hose, which is connected to the other end of an aluminum alloy sample tube via an adapter. Ball valves are installed on both the inlet and outlet branch pipes, and a flow meter is installed on the outlet branch pipe.
[0032] The water tank is also connected to a bypass system, which is equipped with a pH value sensor, a conductivity sensor, a dissolved oxygen content sensor, a calcium ion content sensor, and a chloride ion content sensor. All of these sensors are electrically connected to the main control panel.
[0033] Specifically, the test circuit is configured with multiple sets.
[0034] Specifically, the water tank is also equipped with a water sampling port.
[0035] Specifically, the inlet pipe, outlet pipe, inlet branch pipe, outlet branch pipe, and adapter are made of plastic.
[0036] Specifically, the aluminum alloy sample tube is a straight tube, which is formed by connecting multiple short straight tube sections with threads.
[0037] In this embodiment, the circulating water flow rate is controlled by adjusting the flow control valves at the inlet and outlet of the water tank. The water flow rate (L / min), outlet pressure (bar), and water tank level (cm) can be monitored in real time on the main control panel. To ensure the cleanliness of the circuit, the water tank is made of 316L stainless steel. Each chiller unit has five parallel test circuits. When all five test circuits are open simultaneously, the maximum circulating water flow rate of each branch can reach 16L / min. By installing ball valves on each test circuit, the actual 12L / min requirement of the aluminum alloy piping in the site can be met.
[0038] The chiller unit is equipped with a temperature control system, allowing for temperature adjustment within a range of 9–30℃. To monitor water quality in the loop in real time, the chiller features a bypass system containing sensors for five parameters: pH (0–14), conductivity (0–200 μS), dissolved oxygen (0–20 ppm), calcium ions (0–10 ppm), and chloride ions (0–10 ppm). These parameters are displayed in real-time on the main control panel, enabling timely responses to changes in water quality within the loop. All data is also stored in the main control panel's memory, and historical data can be exported as needed. Considering that detector accuracy may change over time, the detectors in the bypass system are detachable for easy removal for recalibration before being returned to the bypass.
[0039] Water quality parameter adjustment is achieved through a combination of automatic and manual methods. Dissolved oxygen control is automatic; when the dissolved oxygen content falls below a certain critical value, such as 9.0 ppm or 10.0 ppm, the chiller's built-in aeration device automatically activates to ensure the dissolved oxygen content in the water remains within the required control range. Alternatively, placing aeration stones directly into the water tank and keeping them constantly running also ensures that the dissolved oxygen content remains saturated. Temperature is automatically controlled; when the preset upper temperature limit is reached, such as 23°C, the blower automatically activates to cool the water; when the temperature drops to the preset lower temperature limit, such as 19°C, the equipment uses the heat generated during operation to heat the circulating water. Other water quality parameters are manually controlled, such as conductivity. If changes occur with increasing loop operating time, a preset alarm system on the chiller will alert the user. If the conductivity exceeds the set upper limit, primary water is manually added to reduce it; if it falls below the set lower limit, chemical agents are manually added to increase it. For example, pH value. In a non-completely closed loop, the pH value of circulating water usually decreases due to the absorption and dissolution of carbon dioxide, or due to the addition of chemical reagents such as CuCl2. If the pH value drops too much and falls below the lower limit of 5.0, alkaline substances such as NaOH are added appropriately based on calculations to raise the pH value.
[0040] As for calcium and chloride ions, which can be monitored in real time, if only monitoring is required rather than control, then real-time monitoring and reading of historical data are sufficient. If control within a specified range is required, a branch can be added to the circuit as needed, and ion exchange resin or reverse osmosis membrane can be installed for purification. The frequency can be set as needed. Chloride ions will also be sampled and tested weekly to cross-check with the results of real-time sensor monitoring.
[0041] The test loop is used to circulate the circulating water of the chiller unit to achieve the purpose of loop testing. Each test loop has 5 loops connected in parallel, serving as parallel load positions for the aluminum alloy sample tubes. The number of test loops can be easily reduced or increased according to test requirements.
[0042] To ensure that the circulating water is not contaminated and to prevent the precipitation of various metal cations and corrosive anions such as chloride and sulfate ions, all pipe fittings except for the samples are made of plastic polymer materials. For example, the pipes are made of random copolymer polypropylene (PPR). The sample groups are connected by plastic threaded-to-pagoda adapters and rubber hoses. Each sample group is connected to both ends by plastic ball valves for drainage and venting when installing and removing the sample group.
[0043] Preferably, each test loop can adopt a modular design, including straight pipe sections, elbows, valves, tees, and reducing tees, to facilitate connection and replacement, as well as sample loading, sampling, and sample changing operations. The flow rate of the test loop is controlled by a ball valve, and a flow meter is installed on each test loop for real-time flow monitoring. Pyramid-shaped connectors are provided at both ends of the load positions on the test loop to facilitate the connection of various required pipe fittings and samples. The distance between the two ends of the load positions can be adjusted as needed. For ease of operation and overall aesthetics, all five branches of each test loop are mounted on a tool wall using pipe clamps, angle brackets, bolts, etc.
[0044] The load position on each test loop uses a straight aluminum alloy sample tube to simulate corrosion in the flow channel. The dimensions of the straight tube are similar to the actual flow channel setup, measuring 29 × 4.5 mm (outer diameter × wall thickness). To facilitate sampling for characterization analysis, each straight tube is composed of 18 small straight tube segments, each 50 mm in length, connected by threads.
[0045] The above description constitutes an embodiment of this utility model. The foregoing descriptions are preferred embodiments of this utility model. Unless there is a clear contradiction between the preferred embodiments or a premise based on a particular preferred embodiment, the preferred embodiments can be arbitrarily combined and used. The embodiments and specific parameters described are merely for clearly illustrating the verification process of the utility model and are not intended to limit the patent protection scope of this utility model. The patent protection scope of this utility model is still determined by its claims. Similarly, any equivalent structural changes made based on the description and drawings of this utility model should also be included within the protection scope of this utility model.
Claims
1. A device for testing the wall thickness reduction rate of aluminum alloy cooling water channels in a lithography machine, characterized in that, The system includes a chiller unit (1), a test circuit, and an aluminum alloy sample tube. The chiller unit includes a main control panel, a water tank, and a monitoring and control component. The water tank contains circulating water and is connected to an inlet pipe (2) and an outlet pipe (3). The monitoring and control component includes a flow control valve installed on the inlet pipe (2) and the outlet pipe (3), a level gauge for monitoring the level of the circulating water in the water tank, a temperature gauge for monitoring the temperature of the circulating water, an aeration device, and a blower. The flow control valve, level gauge, temperature gauge, aeration device, and blower are all electrically connected to the main control panel. The test circuit includes an inlet branch pipe (4) connected to the outlet pipe (3) and an outlet branch pipe (5) connected to the inlet pipe (2). The other end of the inlet branch pipe (4) is connected to an inlet rubber hose (6). The inlet rubber hose (6) is connected to one end of the aluminum alloy sample tube through an adapter (7). The other end of the outlet branch pipe (5) is connected to an outlet rubber hose (8). The other end of the outlet rubber hose (8) is connected to the other end of the aluminum alloy sample tube through an adapter (7). Ball valves (9) are installed on both the inlet branch pipe (4) and the outlet branch pipe (5). A flow meter is installed on the outlet branch pipe (5).
2. The aluminum alloy cooling water channel wall thickness reduction rate test device for a lithography machine according to claim 1, characterized in that, The water tank is also connected to a bypass system, which is equipped with a pH value sensor, a conductivity sensor, a dissolved oxygen content sensor, a calcium ion content sensor, and a chloride ion content sensor. All of these sensors are electrically connected to the main control panel.
3. A test device for the wall thickness reduction rate of aluminum alloy cooling water circuit in a lithography machine according to claim 1 or 2, characterized in that, The test circuit is configured with multiple sets.
4. The aluminum alloy cooling water channel wall thickness reduction rate test device for a lithography machine according to claim 1, characterized in that, The water tank is also equipped with a water sampling port (10).
5. The aluminum alloy cooling water channel wall thickness reduction rate test device for a lithography machine according to claim 1, characterized in that, The water inlet pipe (2), water outlet pipe (3), water inlet branch pipe (4), water outlet branch pipe (5), and adapter (7) are made of plastic.
6. The aluminum alloy cooling water channel wall thickness reduction rate test device for a lithography machine according to claim 1, characterized in that, The aluminum alloy sample tube is a straight tube, which is formed by connecting multiple short straight tube sections with threads.