Uniform gas disc micro-porous directional flushing nozzle group

Abstract

The utility model relates to nozzle technical field, concretely is a kind of gas uniformity disc micro -hole directional flushing nozzle group, including support ring, the top of support ring is provided with nozzle assembly;The nozzle assembly includes the gear ring rotationally connected in the top of support ring, the top of gear ring is fixedly connected with rotating ring, rotating ring is rotationally connected with shaft pipe in, the top of shaft pipe is fixedly connected with planet wheel, the bottom of shaft pipe is fixedly connected with spray head, support ring outer fixedly connected with first motor, the drive end of first motor is fixedly connected with driving gear, and driving gear is engaged with gear ring;The top of support ring is provided with even mixing subassembly, and the even mixing subassembly includes driving part and mixing piece, this gas uniformity disc micro -hole directional flushing nozzle group, can effectively solve the problem of gas distribution uniformity deficiency, avoid due to local area gas concentration too high or too low, cause the difference of flushing effect, guarantee flushing effect consistency.

Description

Technical Field

[0001] This utility model relates to the field of nozzle technology, specifically to a gas uniform disk micro-orifice directional flushing nozzle assembly. Background Technology

[0002] The gas uniform disk micro-orifice directional flushing nozzle assembly is used for precise flushing in wafer processing. It can effectively remove contaminants such as particles and residual chemical liquids generated on the wafer surface during processing, ensuring the cleanliness of the wafer surface and improving the quality of subsequent processing and product yield.

[0003] In the wafer processing rinsing process, it is necessary to uniformly mix different components such as inert gases like nitrogen and argon or specific active gases according to process requirements. However, the existing rinsing gas output often faces the problem of insufficient uniformity, with local areas having excessively high or low gas concentrations, affecting the consistency of cleaning effect, and easily leaving contaminants or damaging the wafer. It is necessary to mix the gases to allow different gases to fully blend and improve uniformity. To this end, we propose a gas uniformity disk micro-hole directional rinsing nozzle group. Utility Model Content

[0004] One of the technical problems that this application aims to solve is that the output of rinsing gas often faces the problem of insufficient uniformity, with the gas concentration in some areas being too high or too low, which affects the consistency of the cleaning effect.

[0005] To solve the above technical problems, this application provides a gas uniform disk microporous directional flushing nozzle assembly, including a support ring, and a nozzle assembly is provided on the top of the support ring; The nozzle assembly includes a gear ring rotatably connected to the top of a support ring, a rotating ring fixedly connected to the top of the gear ring, a shaft tube rotatably connected inside the rotating ring, a planetary gear fixedly connected to the top of the shaft tube, a nozzle fixedly connected to the bottom of the shaft tube, a first motor fixedly connected to the outside of the support ring, and a drive gear fixedly connected to the drive end of the first motor, the drive gear meshing with the gear ring. The top of the support ring is provided with a homogenizing component, which includes a driving component and a mixing component.

[0006] In some embodiments, the drive component includes a support frame fixedly connected to the bottom of the rotating ring, a second motor fixedly connected to the bottom of the support frame, a sun gear fixedly connected to the drive end of the second motor, and the sun gear meshing with planet gears.

[0007] In some embodiments, the mixing component includes a disc body fixedly connected to the top of the sun gear, a circular groove is formed on the outer side of the disc body, a plurality of micro holes are formed in the circular groove, a flow ring is sealed and rotated outside the circular groove, a flow tube is fixedly connected outside the flow ring, and an output head is fixedly connected to the outer end of the flow tube. The mixing component also includes an input pipe rotatably connected to the top of the disc body, the top of which is configured as a frustum shape; The flow tube and output head are configured in four groups, and the four output heads are rotatably connected to the four shaft tubes respectively.

[0008] In some embodiments, a movable component is provided on the outer side of the support ring. The movable component includes a first support block and a second support block fixedly connected to both sides of the support ring. A screw is threadedly connected to the first support block, and a limit rod is slidably connected to the second support block.

[0009] In some embodiments, a first support plate and a second support plate are respectively provided at both ends of the screw. A third motor is fixedly connected to the outside of the first support plate. The drive end of the third motor is fixedly connected to one end of the screw. The other end of the screw is rotatably connected to the inside of the second support plate. The limiting rod is fixedly connected between the first support plate and the second support plate. Two mounting brackets are fixedly connected to the top of both the first support plate and the second support plate.

[0010] This utility model has at least the following beneficial effects: By setting up a nozzle assembly, four nozzles can be driven to rotate as a whole and precisely positioned to a designated location, ensuring accurate coverage of the gas spray range. By setting up a mixing component, while driving the disc to rotate at a set speed, the four nozzles are simultaneously driven to rotate. The rotation of the disc causes the gas inside to be agitated, achieving gas mixing. The rotation of the nozzles promotes thorough mixing of the gas inside them, achieving gas mixing within the nozzles. Ultimately, this device can effectively solve the problem of insufficient gas distribution uniformity, avoiding differences in rinsing effect caused by excessively high or low gas concentration in local areas, and ensuring consistent rinsing effect. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the nozzle assembly structure of this utility model; Figure 3 This is a schematic diagram of the homogenization component structure of this utility model; Figure 4 This utility model Figure 3 Enlarged view of point A; Figure 5 This is a schematic diagram of the bottom structure of the hybrid component of this utility model; Figure 6 This is a schematic diagram of the structure of the mobile component of this utility model.

[0012] In the diagram: 1. Support ring; 2. Nozzle assembly; 21. Gear ring; 22. Rotating ring; 23. Shaft tube; 24. Planetary gear; 25. Nozzle; 26. First motor; 27. Drive gear; 3. Mixing assembly; 31. Drive component; 32. Mixing component; 311. Support frame; 312. Second motor; 313. Sun gear; 321. Disc; 322. Circular groove; 323. Micro-hole; 324. Flow ring; 325. Flow pipe; 326. Output head; 327. Input pipe; 4. Moving assembly; 41. First support block; 42. Second support block; 43. Screw; 44. Limiting rod; 45. First support plate; 46. Second support plate; 47. Third motor; 48. Mounting bracket. Detailed Implementation

[0013] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example 1

[0014] Please see Figures 1-6 This utility model provides a technical solution: A gas homogenizing disk microporous directional flushing nozzle assembly includes a support ring 1, and a nozzle assembly 2 is disposed on the top of the support ring 1, wherein: The nozzle assembly 2 includes a gear ring 21 rotatably connected to the top of the support ring 1, a rotating ring 22 fixedly connected to the top of the gear ring 21, a shaft tube 23 rotatably connected inside the rotating ring 22, a planetary gear 24 fixedly connected to the top of the shaft tube 23, a nozzle 25 fixedly connected to the bottom of the shaft tube 23, a first motor 26 fixedly connected to the outside of the support ring 1, a drive gear 27 fixedly connected to the drive end of the first motor 26, and the drive gear 27 meshing with the gear ring 21. like Figure 2 As shown, further, the first motor 26 is started, and the first motor 26 drives the drive gear 27 to rotate, thereby driving the gear ring 21 and the rotating ring 22 to rotate. The rotation of the rotating ring 22 drives the homogenizing component 3 to rotate. The input pipe 327 is fixed and gas is input through the input pipe 327. The gas is mixed evenly through the overall rotation. A homogenizing assembly 3 is provided at the top of the support ring 1. The homogenizing assembly 3 includes a driving component 31 and a mixing component 32, wherein: The driving component 31 includes a support frame 311 fixedly connected to the bottom of the rotating ring 22. A second motor 312 is fixedly connected to the bottom of the support frame 311. A sun gear 313 is fixedly connected to the driving end of the second motor 312. The sun gear 313 meshes with the planet gear 24. like Figure 3 As shown, the second motor 312 further drives the sun gear 313 to rotate, the rotation of the sun gear 313 will drive the disk 321 to rotate, the rotation of the disk 321 will mix the gas evenly, and then output through the flow ring 324 and the flow pipe 325; The mixing component 32 includes a disk body 321 fixedly connected to the top of the sun gear 313. A circular groove 322 is provided on the outer side of the disk body 321. A plurality of micro holes 323 are provided in the circular groove 322. A flow ring 324 is rotatably sealed outside the circular groove 322. A flow tube 325 is fixedly connected to the outside of the flow ring 324. An output head 326 is fixedly connected to the outer end of the flow tube 325. The mixing component 32 also includes an input tube 327 rotatably connected to the top of the disk body 321. The top of the disk body 321 is set in the shape of a frustum. The flow tube 325 and the output head 326 are set in four groups. The four output heads 326 are rotatably connected to four shaft tubes 23 respectively. like Figure 3 As shown, the rotation of the sun gear 313 will drive the planet gear 24 to rotate, thereby driving the nozzle 25 and the shaft tube 23 to rotate. The gas output from the flow pipe 325 will be input into the nozzle 25 through the shaft tube 23 and then sprayed out through the nozzle 25. It should be noted that the micro-hole 323 rotates and engages with the inner side of the flow ring 324, and remains sealed during rotation. This is existing technology and will not be elaborated on here. Similarly, the input tube 327 is rotatably connected to the disc body 321, and remains sealed during rotation. The output head 326 is rotatably connected to the shaft tube 23, and remains sealed during rotation. Example 2

[0015] Please see Figures 1-6 This utility model provides a technical solution: Unlike Embodiment 1, a movable component 4 is provided on the outer side of the support ring 1. The movable component 4 includes a first support block 41 and a second support block 42 fixedly connected to both sides of the support ring 1. A screw 43 is threadedly connected to the first support block 41, and a limit rod 44 is slidably connected to the second support block 42. like Figure 6 As shown, the limiting rod 44 further serves to limit and provide auxiliary support, preventing movement and deviation; The screw 43 is provided with a first support plate 45 and a second support plate 46 at both ends. A third motor 47 is fixedly connected to the outside of the first support plate 45. The drive end of the third motor 47 is fixedly connected to one end of the screw 43. The other end of the screw 43 is rotatably connected to the inside of the second support plate 46. A limiting rod 44 is fixedly connected between the first support plate 45 and the second support plate 46. Two mounting brackets 48 are fixedly connected to the top of both the first support plate 45 and the second support plate 46.

[0016] Working principle: First, the first motor 26 is started. The first motor 26 drives the drive gear 27 to rotate, thereby driving the gear ring 21 and the rotating ring 22 to rotate. The rotation of the rotating ring 22 drives the homogenizing component 3 to rotate. The input pipe 327 is fixed and gas is input through the input pipe 327. The mixture is uniformly mixed by the rotation of the whole assembly. At the same time, the position of the four nozzles 25 can be adjusted by rotating the mixing assembly 3. The second motor 312 is started, which drives the sun gear 313 to rotate. The rotation of the sun gear 313 will drive the disk 321 to rotate. The rotation of the disk 321 will mix the gas evenly, and then output it through the flow ring 324 and the flow tube 325. At the same time, the rotation of the sun gear 313 will drive the planet gear 24 to rotate, thereby driving the nozzle 25 and the shaft tube 23 to rotate. The gas output from the flow tube 325 will be input into the nozzle 25 through the shaft tube 23, and then sprayed out through the nozzle 25. Start the third motor 47, which drives the screw 43 to rotate, thereby driving the support ring 1, nozzle assembly 2 and mixing assembly 3 to move as a whole with the assistance of the limiting rod 44, so that they can be precisely positioned for rinsing and cleaning. The third motor 47 is started, which drives the screw 43 to rotate, thereby driving the support ring 1, nozzle assembly 2 and mixing assembly 3 to move as a whole with the assistance of the limiting rod 44, so that precise positioning can be achieved for rinsing and cleaning.

[0017] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0018] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. A gas uniform disk microporous directional flushing nozzle assembly, comprising a support ring (1), characterized in that: The top of the support ring (1) is provided with a nozzle assembly (2); The nozzle assembly (2) includes a gear ring (21) rotatably connected to the top of the support ring (1), a rotating ring (22) fixedly connected to the top of the gear ring (21), a shaft tube (23) rotatably connected inside the rotating ring (22), a planetary gear (24) fixedly connected to the top of the shaft tube (23), a nozzle (25) fixedly connected to the bottom of the shaft tube (23), a first motor (26) fixedly connected to the outside of the support ring (1), a drive gear (27) fixedly connected to the drive end of the first motor (26), and the drive gear (27) meshing with the gear ring (21). The top of the support ring (1) is provided with a homogenizing component (3), which includes a driving component (31) and a mixing component (32).

2. The gas homogenizing disk microporous directional flushing nozzle assembly according to claim 1, characterized in that: The drive unit (31) includes a support frame (311) fixedly connected to the bottom of the rotating ring (22). A second motor (312) is fixedly connected to the bottom of the support frame (311). A sun gear (313) is fixedly connected to the drive end of the second motor (312). The sun gear (313) meshes with the planet gear (24).

3. The gas homogenizing disk microporous directional flushing nozzle assembly according to claim 1, characterized in that: The mixing component (32) includes a disc (321) fixedly connected to the top of the sun gear (313). A circular groove (322) is provided on the outer side of the disc (321). A plurality of micro holes (323) are provided in the circular groove (322). A flow ring (324) is sealed and rotated outside the circular groove (322). A flow tube (325) is fixedly connected to the outside of the flow ring (324). An output head (326) is fixedly connected to the outer end of the flow tube (325).

4. The gas homogenizing disk microporous directional flushing nozzle assembly according to claim 1, characterized in that: The mixing component (32) also includes an input pipe (327) rotatably connected to the top of the disc body (321), the top of which is frustum-shaped.

5. The gas homogenizing disk microporous directional flushing nozzle assembly according to claim 3, characterized in that: The flow tube (325) and output head (326) are configured in four groups, and the four output heads (326) are rotatably connected to the four shaft tubes (23) respectively.

6. The gas homogenizing disk microporous directional flushing nozzle assembly according to claim 1, characterized in that: A movable component (4) is provided on the outer side of the support ring (1). The movable component (4) includes a first support block (41) and a second support block (42) fixedly connected to both sides of the support ring (1). A screw (43) is threadedly connected to the first support block (41), and a limit rod (44) is slidably connected to the second support block (42).

7. The gas homogenizing disk microporous directional flushing nozzle assembly according to claim 6, characterized in that: The screw (43) is provided with a first support plate (45) and a second support plate (46) at both ends. A third motor (47) is fixedly connected to the outside of the first support plate (45). The driving end of the third motor (47) is fixedly connected to one end of the screw (43). The other end of the screw (43) is rotatably connected to the inside of the second support plate (46). The limiting rod (44) is fixedly connected between the first support plate (45) and the second support plate (46). Two mounting brackets (48) are fixedly connected to the top of the first support plate (45) and the second support plate (46).

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