A dry cleaning apparatus

Abstract

This application relates to the field of solar cell production equipment technology, and more particularly to a dry cleaning equipment. The dry cleaning equipment includes a cleaning furnace, an ionization device, an extraction assembly, and a flow guide. The cleaning furnace has a cleaning chamber for placing a graphite boat. The cleaning furnace has an opening communicating with the cleaning chamber, and a furnace door is provided at the opening. The side wall of the cleaning furnace opposite the opening is a first side wall, which has an inlet and an outlet. The ionization device is connected to the inlet and is used to ionize and generate cleaning gas, allowing the cleaning gas to enter the cleaning chamber through the inlet. The extraction assembly is connected to the outlet and is used to extract the cleaning gas, allowing it to leave the cleaning chamber through the outlet. The flow guide is disposed inside the cleaning furnace, with one end connected to the inlet. The flow guide guides the cleaning gas flowing into the cleaning chamber from the inlet through the entire graphite boat, achieving a cleaner cleaning of the graphite boat using less cleaning gas.

Description

Technical Field

[0001] This application relates to the field of solar cell production equipment technology, and in particular to a dry cleaning equipment. Background Technology

[0002] In the solar cell production process, the graphite boat serves as the carrier for silicon wafer coating. During production, as the graphite boat is reused, its surface is continuously coated with different layers of film. When this film reaches a certain thickness, it affects the effectiveness of the solar cell coating process. Therefore, the graphite boat needs to be cleaned and maintained regularly.

[0003] The cleaning methods for graphite boats are mainly divided into wet cleaning and dry cleaning. Wet cleaning has low cleaning efficiency, is time-consuming, requires the use of chemicals, poses safety hazards, and increases the cost of waste liquid treatment. Dry cleaning, on the other hand, involves applying an electric field to the process gas to ionize it into plasma. The charged particles in the plasma bombard the surface of the graphite boat under the influence of the electric field, reacting chemically with the contaminants on the surface and converting them into a gaseous state. The gaseous state is then removed by a mechanical pump, thus cleaning the surface of the graphite boat.

[0004] However, dry cleaning also has its problems. Due to the large size and complex structure of the graphite boat, the range of action of a single plasma is limited. Furthermore, the plasma density is low and the distribution is uneven, making it impossible for the plasma to be evenly distributed throughout the cleaning chamber of the graphite boat, resulting in poor cleaning effect. Utility Model Content

[0005] This application discloses a dry cleaning device that allows cleaning gas to completely pass through the entire graphite boat, thereby accelerating the cleaning efficiency of the graphite boat and enabling the graphite boat to be cleaned more thoroughly with less cleaning gas.

[0006] To achieve the above objectives, this application discloses a dry cleaning apparatus for cleaning graphite boats, the dry cleaning apparatus comprising:

[0007] A cleaning furnace has a cleaning chamber inside, which is used to place a graphite boat. The cleaning furnace has a furnace opening that communicates with the cleaning chamber. A furnace door is provided at the furnace opening. The side wall of the cleaning furnace opposite to the furnace opening is a first side wall. An air inlet and an air outlet are provided on the first side wall.

[0008] An ionization device is connected to the air inlet and is used to ionize and generate cleaning gas so that the cleaning gas can enter the cleaning chamber through the air inlet.

[0009] An air extraction assembly is connected to the air outlet and is used to extract the cleaning gas so that the cleaning gas can leave the cleaning chamber through the air outlet.

[0010] A flow guide is disposed inside the cleaning furnace, with one end of the flow guide connected to the air inlet. The flow guide is used to guide the cleaning gas flowing into the cleaning chamber from the air inlet through the entire graphite boat.

[0011] As an optional implementation, the guide is a cylindrical structure extending through both ends along the first direction, forming a receiving cavity for accommodating the graphite boat. The first end of the guide is connected to the first sidewall and communicates with the air inlet. The second end of the guide has a first gap with the furnace door. Along the second direction, the guide has a second gap with the inner wall of the cleaning chamber. The second direction is perpendicular to the first direction. The first gap communicates with the second gap, and the second gap communicates with the air outlet.

[0012] As an optional implementation, the flow guide includes a connecting portion and a supporting portion arranged sequentially along the first direction. The supporting portion has the receiving cavity. The connecting portion is connected between the first sidewall and the supporting portion. A gas channel is formed in the connecting portion. The gas channel has a gas inlet and a diffuser port arranged at intervals along the first direction. The gas inlet and the air inlet are connected. The diffuser port is connected to the receiving cavity. The area of ​​the diffuser port is larger than the area of ​​the gas inlet.

[0013] As an optional implementation, the minimum distance between the guide member and the inner wall of the cleaning chamber is 5cm to 10cm.

[0014] As an optional implementation, the minimum distance between the second end of the flow guide and the furnace door is 5cm to 10cm.

[0015] As an optional implementation, the air extraction assembly includes a vacuum pump and an air extraction pipe, one end of which is connected to the vacuum pump and the other end of which is connected to the air outlet. The vacuum pump is used to extract the cleaning gas.

[0016] As an optional implementation, the suction pipe includes two pipes and the outlet also includes two outlets. The first end of each suction pipe is connected to each outlet, and the two outlets are respectively located on both sides of the inlet.

[0017] As an optional implementation, the air extraction assembly further includes a manifold, one end of which is connected to the second end of the two air extraction pipes, and the other end of which is connected to the vacuum pump. The manifold is provided with a control valve to control the opening and closing of the manifold.

[0018] As an optional implementation, the dry cleaning equipment further includes a detection element disposed on the manifold and configured to detect the pressure within the manifold. The control valve is electrically connected to the detection element and configured to control the opening and closing of the manifold based on the pressure within the manifold.

[0019] As an optional implementation, the dry cleaning equipment further includes a seal disposed between the guide member and the first sidewall to prevent the cleaning gas from leaking from the air inlet to the outside of the dry cleaning equipment.

[0020] Compared with the prior art, the beneficial effects of this application are:

[0021] The dry cleaning equipment provided in this embodiment has an air inlet and an air outlet on the first side wall. This means the cleaning gas cannot completely pass through the entire graphite boat before being extracted from the cleaning chamber, resulting in incomplete cleaning or wasting excessive cleaning gas. This embodiment, by incorporating a flow guide, ensures that the cleaning gas flowing into the cleaning chamber from the air inlet passes through the entire graphite boat before exiting from the air outlet. This guarantees that the cleaning gas covers all parts of the graphite boat, allowing for more concentrated and rapid action on the surface for cleaning. This reduces the time wasted due to irregular gas flow within the cleaning chamber, improving the utilization rate of the cleaning gas and the cleaning efficiency of the graphite boat. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the dry cleaning equipment disclosed in an embodiment of this application;

[0024] Figure 2 This is another structural schematic diagram of the dry cleaning equipment disclosed in the embodiments of this application;

[0025] Figure 3 This is a schematic diagram of a connecting portion disclosed in an embodiment of this application;

[0026] Figure 4 This is a schematic diagram showing an omitted portion of the structure of the dry cleaning equipment disclosed in the embodiments of this application.

[0027] Explanation of reference numerals in the attached figures:

[0028] 100 - Dry cleaning equipment; 1 - Cleaning furnace; 1a - Cleaning chamber; 1b - Furnace opening; 11 - Furnace door; 12 - First side wall; 12a - Air inlet; 12b - Air outlet; 2 - Ionization device; 3 - Evacuation assembly; 31 - Vacuum pump; 32 - Evacuation pipe; 33 - Manifold; 331 - Control valve; 4 - Guide component; 4a - Receiving cavity; 4b - First gap; 4c - Second gap; 41 - Connecting part; 41a - Gas inlet; 41b - Diffuser; 42 - Bearing part; 5 - Detection component; 6 - Graphite boat; d1 - Minimum distance between the guide component and the inner wall of the cleaning chamber; d2 - Minimum distance between the second end of the guide component and the furnace door; X - First direction. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] In this application, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "vertical," "horizontal," "lateral," and "longitudinal" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0031] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0032] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0033] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0034] In the semiconductor and photovoltaic manufacturing fields, plasma-enhanced chemical vapor deposition (PECVD) is widely used for the fabrication of functional thin films on silicon wafers. The graphite boat, as the core carrier of the silicon wafer, holds the wafer and exposes it to a plasma environment during the process. Due to the wide-area film formation characteristics of PECVD, the non-wafer-shielded areas of the graphite boat inevitably deposit the same film layer as the silicon wafer surface. With repeated use of the graphite boat, the film layer gradually thickens, leading to problems such as stress accumulation and localized electric field distortion. This can cause arcing, abnormal high-frequency discharges, and even silicon wafer contamination or equipment damage during the process. Therefore, regular cleaning and maintenance of the graphite boat are necessary.

[0035] The cleaning methods for graphite boats are mainly divided into wet cleaning and dry cleaning. Wet cleaning has low cleaning efficiency, is time-consuming, requires the use of chemicals, poses safety hazards, and increases the cost of waste liquid treatment. Dry cleaning, on the other hand, involves placing the graphite boat to be cleaned into the cleaning furnace through the furnace door. An electric field is applied to the process gas, ionizing it into plasma. The charged particles in the plasma bombard the surface of the graphite boat under the influence of the electric field, reacting chemically with the contaminants on the surface and converting them into a gaseous state. The gaseous state is then removed by a mechanical pump, thus cleaning the surface of the graphite boat.

[0036] However, dry cleaning also has its problems. Due to the large size and complex structure of the graphite boat, the range of action of a single plasma is limited. Furthermore, the plasma density is low and the distribution is uneven, making it impossible for the plasma to be evenly distributed throughout the cleaning chamber of the graphite boat, resulting in poor cleaning effect.

[0037] Based on this, this application discloses a dry cleaning device. The guide component allows the cleaning gas to pass completely through the entire graphite boat, thereby accelerating the cleaning efficiency of the graphite boat and enabling the graphite boat to be cleaned more thoroughly with less cleaning gas.

[0038] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0039] Please see Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of the structure of the dry cleaning equipment 100 disclosed in an embodiment of this application. Figure 2 This is another structural schematic diagram of the dry cleaning equipment 100 disclosed in this application embodiment. This application embodiment discloses a dry cleaning equipment 100, which includes a cleaning furnace 1, an ionization device 2, an air extraction assembly 3, and a flow guide 4. A cleaning chamber 1a is formed inside the cleaning furnace 1 for placing a graphite boat 6. The cleaning furnace 1 has a furnace opening 1b communicating with the cleaning chamber 1a, and a furnace door 11 is provided at the furnace opening 1b. The side wall of the cleaning furnace 1 opposite to the furnace opening 1b is a first side wall 12, and the first side wall 12 is provided with an air inlet 12a and an air outlet 12b. The ionization device 2 and the air inlet 12a are connected to the furnace opening 1b. The air inlet 12a is connected to the ionization device 2, which is used to ionize and generate cleaning gas so that the cleaning gas can enter the cleaning chamber 1a through the air inlet 12a; the air extraction assembly 3 is connected to the air outlet 12b, which is used to extract the cleaning gas so that the cleaning gas can leave the cleaning chamber 1a through the air outlet 12b; the guide member 4 is set in the cleaning furnace 1, one end of the guide member 4 is connected to the air inlet 12a, and the guide member 4 is used to guide the cleaning gas flowing into the cleaning chamber 1a from the air inlet 12a through the entire graphite boat 6.

[0040] Since it is inconvenient to set the air inlet 12a and the air outlet 12b on the furnace door 11, the air inlet 12a and the air outlet 12b are usually set on the first side wall 12. Therefore, the cleaning gas cannot completely pass through the entire graphite boat 6 and will be drawn out into the cleaning chamber 1a, which makes the graphite boat 6 not cleaned thoroughly, or wastes too much cleaning gas to clean the graphite boat 6.

[0041] In this embodiment, by setting the guide component 4, the cleaning gas flowing into the cleaning chamber 1a from the air inlet 12a passes through the entire graphite boat 6 and is then discharged from the air outlet 12b. This ensures that the cleaning gas can cover all parts of the graphite boat 6, and that the gas can act on the surface of the graphite boat 6 more concentratedly and quickly to clean it. This reduces the time wasted by the irregular flow of gas in the cleaning chamber 1a, and improves the utilization rate of the cleaning gas and the cleaning efficiency of the graphite boat 6.

[0042] On the one hand, the guide component 4 directs the cleaning gas directly onto the graphite boat 6, avoiding ineffective diffusion of the gas within the cleaning chamber 1a. This allows the cleaning gas to more fully contact and react with impurities on the surface of the graphite boat 6, improving the utilization rate of the cleaning gas. On the other hand, the extraction component 3 continuously extracts the cleaning gas, creating a stable airflow within the cleaning chamber 1a. This continuously carries away impurities and reaction products generated during the cleaning process, preventing these substances from accumulating on the surface of the graphite boat 6. Consequently, the cleaning gas can continuously and effectively contact and interact with the surface of the graphite boat 6, further accelerating the cleaning efficiency.

[0043] As an optional implementation method, combined with Figure 1 and Figure 2 The guide member 4 is a cylindrical structure that extends through both ends along the first direction X. The cylindrical structure forms a receiving cavity 4a, which is used to receive the graphite boat 6. The first end of the guide member 4 is connected to the first side wall 12 and communicates with the air inlet 12a. The second end of the guide member 4 has a first gap 4b between it and the furnace door 11. Along the second direction, the guide member 4 has a second gap 4c between it and the inner wall of the cleaning cavity 1a. The second direction is perpendicular to the first direction X. The first gap 4b and the second gap 4c communicate with each other. The second gap 4c communicates with the air outlet 12b.

[0044] After the cleaning gas enters the receiving cavity 4a of the guide member 4 through the air inlet 12a, it can smoothly pass through the entire graphite boat 6, then enter the second gap 4c through the first gap 4b, and finally exit from the air outlet 12b. The entire process forms a complete and smooth airflow circulation path, ensuring that the cleaning gas can flow in an orderly manner within the cleaning cavity 1a, avoiding turbulence or dead zones in the gas within the cavity, and ensuring the stability and effectiveness of the cleaning process.

[0045] Because the cleaning gas can circulate along a predetermined path, it can fully contact all parts of the graphite boat 6. Within the receiving cavity 4a, the gas directly acts on the surface of the graphite boat 6 for cleaning; when the cleaning gas passes through the second gap 4c, it ensures that it has completely passed through all areas of the graphite boat 6, thereby improving the overall cleaning uniformity of the graphite boat 6 and avoiding the problem of incomplete cleaning in some areas.

[0046] During its flow, the cleaning gas carries away impurities washed off the surface of the graphite boat 6. Through the channel formed by the first gap 4b and the second gap 4c, these impurities are quickly carried out of the cleaning chamber 1a, preventing them from re-adhering to the graphite boat 6 within the chamber. This improves the cleaning effect, allowing the graphite boat 6 to be cleaned more thoroughly. Continuous airflow circulation constantly refreshes the cleaning gas within the cleaning chamber 1a. Fresh cleaning gas enters through the inlet 12a, reacts with the graphite boat 6, and is discharged through the outlet 12b, ensuring that the cleaning gas maintains high activity and cleaning capacity throughout the cleaning process, further enhancing the cleaning effect on the graphite boat 6.

[0047] Optionally, the first end of the guide member 4 is connected to the first side wall 12 by a screw, which is simple in structure. The screw passes through the first side wall 12 and the first end of the guide member 4, and the head of the screw is located outside the cleaning chamber 1a, which is convenient for disassembly.

[0048] Optionally, support blocks are provided between the guide member 4 and the graphite boat 6, and between the guide member 4 and the bottom of the inner wall of the cleaning chamber 1a, to provide effective support for the placement of the graphite boat 6 and ensure the stability of the graphite boat 6.

[0049] In some embodiments, combined with Figure 3 , Figure 3 This is a schematic diagram of a connecting part disclosed in an embodiment of this application. The guide member 4 includes a connecting part 41 and a supporting part 42 arranged sequentially along the first direction X. The supporting part 42 has a receiving cavity 4a. The connecting part 41 is connected between the first side wall 12 and the supporting part 42. A gas channel is formed in the connecting part 41. The gas channel has a gas inlet 41a and a diffuser 41b arranged at intervals along the first direction X. The gas inlet 41a is connected to the air inlet 12a. The diffuser 41b is connected to the receiving cavity 4a. The area of ​​the diffuser 41b is larger than the area of ​​the gas inlet 41a.

[0050] When the cleaning gas enters the gas channel from the inlet 12a and flows from the smaller gas inlet 41a to the larger diffuser 41b, diffusion occurs. This diffusion allows the cleaning gas to enter the receiving cavity 4a of the support part 42 more evenly, and thus act more evenly on the graphite boat 6 within the receiving cavity 4a. Compared to a design without this diffusion structure, it avoids the cleaning gas from concentrating in a certain area, thereby ensuring that all parts of the graphite boat 6 are thoroughly cleaned, improving the uniformity of cleaning. The evenly distributed cleaning gas around the graphite boat 6 can more comprehensively contact and react with impurities on the surface of the graphite boat 6, effectively removing contaminants from the surface of the graphite boat 6. Especially for some graphite boats with complex shapes or porous structures, the evenly diffused cleaning gas can better penetrate into various gaps and pores, enhancing the cleaning effect, reducing cleaning dead zones, and making the cleaning of the graphite boat 6 more thorough.

[0051] It should be noted that the connecting part 41 can be in the shape of a frustum or a pyramid, so that the inner wall area of ​​the connecting part 41 gradually increases from the gas inlet 41a to the diffuser 41b, which enables the cleaning gas to diffuse more evenly from the gas inlet 41a to the receiving cavity 4a. The cleaning gas can achieve a smooth transition during the flow process, avoiding resistance and turbulence caused by sudden changes in airflow, and ensuring that the cleaning gas can flow smoothly from the air inlet 12a into the receiving cavity 4a.

[0052] Optionally, combined Figure 4 , Figure 4 This is a schematic diagram of the structure of the dry cleaning equipment disclosed in the embodiments of this application, with the minimum distance d1 between the guide member 4 and the inner wall of the cleaning chamber 1a being 5cm to 10cm.

[0053] If the distance between the guide element 4 and the inner wall of the cleaning chamber 1a is too small, the second gap 4c will become narrower. When the cleaning gas flows from the first gap 4b into the second gap 4c, the narrowing of the channel will cause a significant increase in airflow resistance. The cleaning gas will have difficulty flowing smoothly through the second gap 4c to the outlet 12b, which may create turbulence or local high-pressure areas in the gap, disrupting the normal circulation path of the cleaning gas and affecting the comprehensive coverage and continuous cleaning effect of the cleaning gas on the graphite boat 6. Moreover, the narrow gap is not conducive to the discharge of impurities generated during the cleaning process. The impurities that are cleaned are prone to accumulate in the gap, which may not only re-adhere to the graphite boat 6, reducing the cleaning effect, but may also block the gap over time, further hindering airflow and ultimately affecting the normal operation of the entire dry cleaning equipment 100.

[0054] When the distance between the guide member 4 and the inner wall of the cleaning chamber 1a is too large, the second gap 4c will become very wide. On the one hand, this will reduce the space of the receiving chamber 4a, resulting in a smaller cleaning space for the graphite boat 6. This not only makes it difficult to place and remove the graphite boat 6, but also reduces the cleaning efficiency of the graphite boat 6. On the other hand, with the cleaning gas diffusing in such a spacious space, some of the cleaning gas may flow meaninglessly in the cleaning chamber 1a without participating in the cleaning process of the graphite boat 6, thus wasting the cleaning gas and increasing the cleaning cost.

[0055] Within this distance range, the cleaning gas can act more concentratedly on the graphite boat 6, improving the utilization rate of the cleaning gas. This avoids the waste caused by excessive gas dispersion and ensures sufficient contact between the cleaning gas and the surface of the graphite boat 6, promoting the efficient cleaning reaction, reducing cleaning costs, and improving cleaning efficiency.

[0056] In some embodiments, combined with Figure 4 The minimum distance d2 between the second end of the guide 4 and the furnace door 11 is 5cm to 10cm.

[0057] When the distance between the second end of the guide member 4 and the furnace door 11 is too small, the first gap 4b will become narrow. This will significantly increase the resistance of the cleaning gas flowing from the cavity 4a of the guide member 4 into the first gap 4b, making it difficult for the cleaning gas to flow smoothly. The airflow may form turbulence in the narrow gap, and cannot flow orderly to the second gap 4c and the outlet 12b according to the predetermined path, thus affecting the cleaning effect of the cleaning gas on the graphite boat 6, resulting in insufficient cleaning of some areas of the graphite boat 6. Moreover, the narrow first gap 4b is not conducive to the discharge of impurities generated during the cleaning process. Impurities are prone to accumulate in this gap and may re-adhere to the graphite boat 6, causing cleaning residue, reducing the cleaning quality of the graphite boat 6, and long-term accumulated impurities may also block the first gap 4b, destroy the entire airflow circulation system, and affect the normal operation of the equipment.

[0058] When the distance between the guide 4 and the inner wall of the cleaning chamber 1a is too large, the second gap 4c will become very wide. The cleaning gas will diffuse in the excessively wide space, resulting in an overly dispersed gas distribution. Some cleaning gas may flow meaninglessly in the cleaning chamber 1a without participating in the cleaning process of the graphite boat 6, thus wasting cleaning gas and increasing cleaning costs.

[0059] Within this distance range, the cleaning gas can act more concentratedly on the graphite boat 6, improving the utilization rate of the cleaning gas. This avoids waste caused by excessive gas dispersion, while ensuring sufficient contact between the cleaning gas and the surface of the graphite boat 6, promoting efficient cleaning reaction, reducing cleaning costs, and improving cleaning efficiency.

[0060] As an optional implementation, the air extraction assembly 3 includes a vacuum pump 31 and an air extraction pipe 32. One end of the air extraction pipe 32 is connected to the vacuum pump 31, and the other end is connected to the air outlet 12b. The vacuum pump 31 is used to extract cleaning gas.

[0061] The vacuum pump 31 is a device capable of generating negative pressure to achieve a suction function, providing powerful suction. Connecting the vacuum pump 31 to the outlet 12b of the cleaning furnace 1 via the suction pipe 32, it can quickly and effectively extract the cleaning gas from the cleaning chamber 1a, ensuring the gas flows out of the cleaning chamber 1a along the designed path through the outlet 12b, thus maintaining gas circulation within the cleaning chamber 1a. The combined structure of the vacuum pump 31 and the suction pipe 32 is relatively simple and easy to install. The vacuum pump 31 can typically be placed in a suitable location near the cleaning equipment and connected to the cleaning furnace 1 via the suction pipe 32, without requiring complex installation processes or special spatial layouts. This structure also facilitates maintenance and repair. When the suction assembly 3 malfunctions, it is easy to inspect, repair, or replace the vacuum pump 31 or the suction pipe 32 individually, reducing equipment maintenance costs and downtime, and improving the overall operating efficiency of the equipment.

[0062] In some embodiments, the suction pipe 32 includes two pipes and the outlet 12b also includes two outlets. The first end of each suction pipe 32 is connected to each outlet 12b, and the two outlets 12b are respectively disposed on both sides of the inlet 12a.

[0063] Two suction pipes 32 and two outlets 12b provide two independent discharge channels for the cleaning gas in the cleaning chamber 1a. Compared to a single suction pipe 32 and outlet 12b, this dual-channel design significantly increases the suction flow rate, allowing the cleaning gas to be discharged from the cleaning chamber 1a more quickly. During the cleaning process, a large amount of cleaning gas, after making full contact with the graphite boat 6, can be simultaneously extracted through the outlets 12b and suction pipes 32 on both sides, greatly shortening the residence time of the cleaning gas in the cleaning chamber 1a and improving the efficiency of the entire cleaning process.

[0064] Furthermore, the symmetrical layout of the air extraction system helps to create a more balanced airflow distribution within the cleaning chamber 1a. After the cleaning gas has completely passed through the entire graphite boat 6, it can diffuse evenly to both sides and then be extracted from the air outlets 12b on both sides. This avoids situations where the cleaning gas concentration in some areas is too high or too low due to uneven airflow distribution, ensuring that all parts of the graphite boat 6 are thoroughly and evenly cleaned, thus improving the consistency of the cleaning effect.

[0065] In some possible implementations, the pumping assembly 3 further includes a manifold 33, one end of which is connected to the second end of the two pumping pipes 32, and the other end of which is connected to the vacuum pump 31. A control valve 331 is provided on the manifold 33 to control the opening and closing of the manifold 33.

[0066] This structure simplifies the connection between the pumping assembly 3 and the vacuum pump 31, reduces the number of interfaces on the vacuum pump 31, and lowers the installation complexity and connection cost. Simultaneously, it makes the overall layout of the pumping system more compact and rational, facilitating the overall arrangement and maintenance of the equipment. By combining the gas from the two pumping pipes 32 through the manifold 33 before delivering it to the vacuum pump 31, the space-consuming issues that might arise from directly connecting the two pumping pipes 32 to the vacuum pump 31 are avoided. In space-constrained working environments, this compact design better adapts to site conditions and improves the space utilization rate of the equipment.

[0067] Optionally, the dry cleaning equipment 100 also includes a detection element 5, which is disposed on the manifold 33 and configured to detect the pressure inside the manifold 33. A control valve 331 is electrically connected to the detection element 5 and configured to control the opening and closing of the manifold 33 according to the pressure inside the manifold 33.

[0068] During the cleaning process, if the pressure inside the manifold 33 exceeds the safe range due to certain reasons (such as poor air extraction or excessive air intake), the detection element 5 will transmit a pressure signal to the control valve 331. The control valve 331 will automatically respond according to the preset program, adjusting the opening degree or even closing the manifold 33 in a timely manner to prevent excessive pressure from damaging the vacuum pump 31, the extraction pipe 32, and other related components, thereby extending the service life of the equipment and reducing the maintenance cost.

[0069] As an optional implementation, the dry cleaning equipment 100 also includes a seal disposed between the guide member 4 and the first sidewall 12 to prevent cleaning gas from leaking from the air inlet 12a to the outside of the dry cleaning equipment 100.

[0070] The seal effectively fills any gaps that may exist at the connection between the two components. When the cleaning gas enters the guide member 4 from the ionization device 2 through the inlet 12a, without the seal, some gas may leak out of the dry cleaning equipment 100 through the gaps around the inlet 12a. The presence of the seal greatly reduces the possibility of such leakage, ensuring that the cleaning gas enters the cleaning chamber 1a through the guide member 4 along the designed path to clean the graphite boat 6, thereby improving the utilization rate of the cleaning gas, avoiding resource waste, and reducing cleaning costs.

[0071] Optionally, sealing elements are provided between the exhaust pipe 32 and the first side wall 12, between the ionization device 2 and the first side wall 12, and between the furnace door 11 and the furnace opening 1b to ensure good sealing during the cleaning process of the graphite boat 6.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A dry cleaning apparatus for cleaning graphite boats, characterized in that, The dry cleaning equipment includes: A cleaning furnace has a cleaning chamber inside, which is used to place a graphite boat. The cleaning furnace has a furnace opening that communicates with the cleaning chamber. A furnace door is provided at the furnace opening. The side wall of the cleaning furnace opposite to the furnace opening is a first side wall. An air inlet and an air outlet are provided on the first side wall. An ionization device is connected to the air inlet and is used to ionize and generate cleaning gas so that the cleaning gas can enter the cleaning chamber through the air inlet. An air extraction assembly is connected to the air outlet and is used to extract the cleaning gas so that the cleaning gas can leave the cleaning chamber through the air outlet. A flow guide is disposed inside the cleaning furnace, with one end of the flow guide connected to the air inlet. The flow guide is used to guide the cleaning gas flowing into the cleaning chamber from the air inlet through the entire graphite boat.

2. The dry cleaning equipment according to claim 1, characterized in that, The flow guide is a cylindrical structure extending through both ends along a first direction, forming a receiving cavity for accommodating the graphite boat. The first end of the flow guide is connected to the first sidewall and communicates with the air inlet. The second end of the flow guide has a first gap with the furnace door. Along a second direction, the flow guide has a second gap with the inner wall of the cleaning chamber. The second direction is perpendicular to the first direction. The first gap communicates with the second gap, and the second gap communicates with the air outlet.

3. The dry cleaning equipment according to claim 2, characterized in that, The flow guide includes a connecting part and a supporting part arranged sequentially along the first direction. The supporting part has the receiving cavity. The connecting part is connected between the first sidewall and the supporting part. A gas channel is formed in the connecting part. The gas channel has a gas inlet and a diffuser arranged at intervals along the first direction. The gas inlet and the air inlet are connected. The diffuser is connected to the receiving cavity. The area of ​​the diffuser is larger than the area of ​​the gas inlet.

4. The dry cleaning equipment according to claim 2, characterized in that, The minimum distance between the guide element and the inner wall of the cleaning chamber is 5cm to 10cm.

5. The dry cleaning equipment according to claim 2, characterized in that, The minimum distance between the second end of the flow guide and the furnace door is 5cm to 10cm.

6. The dry cleaning equipment according to claim 1, characterized in that, The air extraction assembly includes a vacuum pump and an air extraction pipe. One end of the air extraction pipe is connected to the vacuum pump, and the other end is connected to the air outlet. The vacuum pump is used to extract the cleaning gas.

7. The dry cleaning equipment according to claim 6, characterized in that, The suction pipe includes two parts, and the outlet also includes two parts. The first end of each suction pipe is connected to each outlet, and the two outlets are respectively located on both sides of the inlet.

8. The dry cleaning equipment according to claim 7, characterized in that, The air extraction assembly also includes a manifold, one end of which is connected to the second end of the two air extraction pipes, and the other end of which is connected to the vacuum pump. A control valve is provided on the manifold to control the opening and closing of the manifold.

9. The dry cleaning equipment according to claim 8, characterized in that, The dry cleaning equipment also includes a detection element disposed on the manifold. The detection element is configured to detect the pressure inside the manifold. The control valve is electrically connected to the detection element and is configured to control the opening and closing of the manifold according to the pressure inside the manifold.

10. The dry cleaning equipment according to claim 5, characterized in that, The dry cleaning equipment also includes a seal, which is disposed between the guide and the first sidewall to prevent the cleaning gas from leaking from the air inlet to the outside of the dry cleaning equipment.

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