A high-precision cutting device for laser micro-hole array of a glass substrate

Abstract

The utility model relates to glass substrate processing technical field, concretely is a kind of glass substrate laser micro-hole array high-precision cutting device, including processing box body, the inside fixed mounting of processing box body has laser micro-hole cutting mechanism, the below of laser micro-hole cutting mechanism is provided with support platform, the top of support platform is symmetrically provided with two hydraulic clamping mechanisms, processing box body is provided with processing filter mechanism, processing filter mechanism includes multiple fixed mounting in the air pipe of processing box body bottom and both sides.The utility model is provided with processing filter mechanism, can be absorbed filtration treatment to the tiny particulate matter generated in the processing below and both sides of processing box body, rely on multidirectional suction can avoid the cleaning of tiny particulate matter to appear omission, to this comprehensive processing of tiny particulate matter, avoid tiny particulate matter to be inhaled inside human body and cause harm.

Description

Technical Field

[0001] This utility model relates to a high-precision laser micro-hole array cutting device for glass substrates, belonging to the field of glass substrate processing technology. Background Technology

[0002] Glass substrates are thin glass sheets with extremely high surface flatness. Their main components are silicate complex salts (such as silicon dioxide and aluminum oxide), which are bonded together by ionic bonds to form a high-strength network structure. Due to their physical stability, electrical properties and optical characteristics, they have become the core material for display technology and semiconductor packaging.

[0003] Laser micro-hole array processing on glass substrates is a key technological breakthrough driven by the trends of miniaturization, high frequency, and high-density integration in semiconductor chips. Its core purpose is to meet the high-precision and high-performance connection requirements of advanced electronic packaging for circuit boards. However, laser micro-hole array processing on glass substrates generates tiny particles. Due to their small size, these particles can disperse throughout the processing environment. Commonly used laser micro-hole array cutting devices cannot completely handle these tiny particles during processing, which can then enter the human body through the respiratory system, posing a health hazard to workers.

[0004] Therefore, there is an urgent need to improve a high-precision laser micro-hole array cutting device for glass substrates to solve the above-mentioned problems. Utility Model Content

[0005] The purpose of this invention is to provide a high-precision laser micro-hole array cutting device for glass substrates. By setting up a processing and filtering mechanism, it can absorb and filter the tiny particles generated during processing from the bottom and sides of the processing chamber. Relying on multi-directional absorption, it can avoid the omission of tiny particles during cleaning, thereby comprehensively treating the tiny particles and preventing them from being inhaled into the human body and causing harm.

[0006] To achieve the above objectives, the main technical solutions adopted by this utility model include:

[0007] A high-precision laser micro-hole array cutting device for glass substrates includes a processing box. A laser micro-hole cutting mechanism is fixedly installed inside the processing box. A support platform is provided below the laser micro-hole cutting mechanism. Two hydraulic clamping mechanisms are symmetrically arranged above the support platform. A processing and filtering mechanism is provided on the processing box. The processing and filtering mechanism includes multiple air ducts fixedly installed at the bottom and sides of the processing box. Support frames are fixedly installed on both sides of the air ducts. Fans are fixedly installed at the bottom of the two support frames. A filter box is provided between the air ducts and the fans. Polyester fiber filter bags are fixedly installed inside the filter box. Two electrostatic dust collectors are symmetrically fixedly installed on the inner wall of the filter box and below the polyester fiber filter bags.

[0008] Preferably, a fixing plate is fixedly installed on one side of the support frame, and a screw connected by threads is provided on the fixing plate. A fastening block is movably installed at one end of the screw, and the fastening block is slidably connected to the fixing plate. Fastening grooves are provided on both sides of the filter box.

[0009] Preferably, a plurality of push rods are uniformly fixedly installed on the surface of the other end of the screw, and the surface of the push rods is provided with anti-slip texture.

[0010] Preferably, the inner side of the support frame is provided with multiple positioning grooves, and the surface of the filter box is fixedly installed with multiple positioning rods that are adapted to the positioning grooves.

[0011] Preferably, the bottom of the support frame is provided with bolts, and the bolts are threaded to both the support frame and the fan.

[0012] Preferably, the top of the support platform is provided with multiple sliding grooves, and multiple sliders fixedly connected to the bottom of the hydraulic clamping mechanism are slidably installed inside the sliding grooves. A support plate is fixedly installed on one side of the hydraulic clamping mechanism, and a support rod is movably installed on one side of the support plate. A toothed block is fixedly installed at one end of the support rod, and a spring is fixedly installed between the toothed block and the inner wall of the support plate. A toothed plate is fixedly installed on the surface of the support platform.

[0013] Preferably, a window frame is fixedly installed on the sealed door on the front of the processing box, and an observation window is fixedly installed inside the window frame.

[0014] This utility model has at least the following beneficial effects:

[0015] By configuring the filtration mechanism, the fine particles generated during processing can be absorbed and filtered from the bottom and sides of the processing chamber. The fan generates suction, and the ductwork draws in the fine particles. The sucked-in particles enter the filter chamber and are filtered by polyester fiber filter bags and electrostatically adsorbed by an electrostatic precipitator. This multi-directional suction ensures that no fine particles are missed during cleaning, thus comprehensively treating the fine particles and preventing them from being inhaled and causing harm to the human body. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0017] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0018] Figure 2 This is a top view showing the separation of the duct and filter box structures of this utility model;

[0019] Figure 3 This is a top view showing the fan and filter box structures separated according to this utility model;

[0020] Figure 4 For the present utility model Figure 3 Enlarged view of point A in the middle;

[0021] Figure 5 This is a schematic diagram of the tooth block and tooth plate structure of this utility model.

[0022] In the diagram, 1. Processing box; 2. Laser micro-hole cutting mechanism; 3. Support platform; 4. Hydraulic clamping mechanism; 5. Processing and filtration mechanism; 6. Air duct; 7. Support frame; 8. Fan; 9. Filter box; 10. Polyester fiber filter bag; 11. Electrostatic precipitator; 12. Fixing plate; 13. Screw; 14. Fastening block; 15. Fastening groove; 16. Push rod; 17. Positioning groove; 18. Positioning rod; 19. Bolt; 20. Slide groove; 21. Slider; 22. Support plate; 23. Support rod; 24. Tooth block; 25. Spring; 26. Tooth plate; 27. Window frame; 28. Observation window. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0024] like Figures 1-5 As shown in the figure, this embodiment provides a high-precision cutting device for laser micro-hole array on glass substrate.

[0025] A high-precision laser micro-hole array cutting device for glass substrates includes a processing box 1. A laser micro-hole cutting mechanism 2 is fixedly installed inside the processing box 1. A support platform 3 is arranged below the laser micro-hole cutting mechanism 2. Two hydraulic clamping mechanisms 4 are symmetrically arranged above the support platform 3. A processing and filtering mechanism 5 is arranged on the processing box 1. The processing and filtering mechanism 5 includes multiple air ducts 6 fixedly installed on the bottom and sides of the processing box 1. Support frames 7 are fixedly installed on both sides of the air ducts 6. Fans 8 are fixedly installed at the bottom of the two support frames 7. A filter box 9 is arranged between the air ducts 6 and the fans 8. Polyester fiber filter bags 10 are fixedly installed inside the filter box 9. Two electrostatic dust collectors 11 are symmetrically fixedly installed on the inner wall of the filter box 9 and below the polyester fiber filter bags 10.

[0026] By setting up the filtration mechanism 5, the fine particles generated during processing can be absorbed and filtered from the bottom and sides of the processing chamber 1. The fan 8 generates suction and the duct 6 is used to draw in the fine particles. The drawn-in fine particles enter the filter chamber 9 and are filtered by the polyester fiber filter bag 10 and electrostatically adsorbed by the electrostatic dust collector 11. The multi-directional suction can avoid any omissions in the cleaning of fine particles, thus comprehensively treating the fine particles and preventing them from being inhaled into the human body and causing harm.

[0027] In this embodiment, as Figures 1-5 As shown, a fixing plate 12 is fixedly installed on one side of the support frame 7. A screw 13 connected by threads is provided on the fixing plate 12. A fastening block 14 is movably installed at one end of the screw 13 and is slidably connected to the fixing plate 12. Fastening grooves 15 are provided on both sides of the filter box 9. Multiple push rods 16 are evenly fixedly installed on the surface of the other end of the screw 13, and the surface of the push rods 16 is provided with anti-slip texture. Multiple positioning grooves 17 are provided on the inner side of the support frame 7. Multiple positioning rods 18 that are compatible with the positioning grooves 17 are fixedly installed on the surface of the filter box 9.

[0028] The filter box 9 is fixed by means of a fixed plate 12, screw 13, fastening block 14, and fastening groove 15. The screw 13 drives the fastening block 14 and fastening groove 15 to connect and fix the filter box 9. This facilitates the disassembly of the filter box 9 to remove the fine particles filtered on the polyester fiber filter bag 10 and the electrostatic precipitator 11. Specifically, the disassembly is performed by rotating the screw 13, which moves the fastening block 14 through the thread between the screw 13 and the fixed plate 12, thus separating the fastening block 14 from the fastening groove 15. When installing the filter box 9, after placing the filter box 9 between the air duct 6 and the fan 8, the screw 13 is rotated in the opposite direction to push the fastening block 14 to move until the fastening block 14 is fully engaged. Once inserted into the fastening groove 15, the filter box 9 can be fixed. The operation is simple and allows for quick assembly and disassembly. The push rod 16 facilitates the rotation of the screw 13 during assembly and disassembly. The positioning groove 17 and positioning rod 18 provide positioning for the filter box 9. During installation, the filter box 9 is inserted between the air duct 6 and the fan 8 by sliding the positioning groove 17 and positioning rod 18. The positioning groove 17 and positioning rod 18 ensure that the filter box 9 fits tightly against the air duct 6 and the fan 8. At the same time, the fastening groove 15 is aligned with the fastening block 14, allowing the fastening block 14 to be accurately inserted into the fastening groove 15.

[0029] In this embodiment, as Figures 1-5 As shown, the bottom of the support frame 7 is provided with bolts 19, and the bolts 19 are threadedly connected to the support frame 7 and the fan 8. The top of the support platform 3 is provided with multiple sliding grooves 20. Multiple sliders 21 that are fixedly connected to the bottom of the hydraulic clamping mechanism 4 are slidably installed inside the sliding grooves 20. A support plate 22 is fixedly installed on one side of the hydraulic clamping mechanism 4. A support rod 23 is movably installed on one side of the support plate 22. A toothed block 24 is fixedly installed at one end of the support rod 23. A spring 25 is fixedly installed between the toothed block 24 and the inner wall of the support plate 22. A toothed plate 26 is fixedly installed on the surface of the support platform 3. A window frame 27 is fixedly installed on the sealing door on the front of the processing box 1. An observation window 28 is fixedly installed inside the window frame 27.

[0030] By using bolts 19, the fan 8 is mounted on the support frame 7, allowing the fan 8 to be disassembled from the support frame 7 for easy disassembly and maintenance in case of failure. Through the arrangement of the slide groove 20, slider 21, support plate 22, support rod 23, toothed block 24, spring 25, and toothed plate 26, two hydraulic clamping mechanisms 4 are connected to the slider 21 within the slide groove 20, enabling the two hydraulic clamping mechanisms 4 to move. This allows for adjustment of the spacing to facilitate clamping and fixing glass substrates of different sizes. After adjustment, the toothed block 24 is pushed to engage with the toothed plate 26 and secured by the elastic support of the spring 25, thus fixing the adjusted hydraulic clamping mechanism 4 and preventing movement during cutting. With the window frame 27 and observation window 28, to prevent small particles from scattering outwards, the sealing door on the front of the processing box 1 is closed during processing. The observation window 28 allows for viewing the glass substrate cutting process when the box is closed.

[0031] In this embodiment, as Figures 1-5 As shown in the figure, the working process of the high-precision laser micro-hole array cutting device for glass substrates provided in this embodiment is as follows:

[0032] After the glass substrate is placed between the two hydraulic clamping mechanisms 4, the hydraulic clamping mechanisms 4 are activated by an external hydraulic transmission system to clamp and fix the glass substrate. Then, the laser micro-hole cutting mechanism 2 is activated to perform laser micro-hole array processing on the glass substrate. Then, the fan 8 is connected to an external power source and started to generate suction. The fan 6 is used to suck up the tiny particles generated during the cutting process. The sucked-up tiny particles enter the filter box 9 and are filtered by the polyester fiber filter bag 10 and electrostatically adsorbed by the electrostatic dust collector 11. The multi-directional suction can avoid the omission of tiny particles, thus comprehensively treating the tiny particles. At the same time, the laser micro-hole cutting mechanism 2 and the hydraulic clamping mechanism 4 are existing technologies and have not been modified. Therefore, the specific structure and operation method are not described in detail.

[0033] The foregoing description illustrates and describes several preferred embodiments of the present invention. However, as previously stated, it should be understood that the present invention is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the inventive concept described herein through the foregoing teachings or techniques or knowledge in related fields. Any modifications and variations made by those skilled in the art that do not depart from the spirit and scope of the present invention should be within the protection scope of the appended claims.

Claims

1. A high-precision laser micro-hole array cutting device for glass substrates, comprising a processing box (1), wherein a laser micro-hole cutting mechanism (2) is fixedly installed inside the processing box (1), a support platform (3) is provided below the laser micro-hole cutting mechanism (2), and two hydraulic clamping mechanisms (4) are symmetrically arranged above the support platform (3), characterized in that: The processing box (1) is provided with a processing and filtration mechanism (5). The processing and filtration mechanism (5) includes multiple air ducts (6) fixedly installed at the bottom and sides of the processing box (1). Support frames (7) are fixedly installed on both sides of the air ducts (6). Fans (8) are fixedly installed at the bottom of the two support frames (7). A filter box (9) is provided between the air ducts (6) and the fans (8). A polyester fiber filter bag (10) is fixedly installed inside the filter box (9). Two electrostatic precipitators (11) are symmetrically fixedly installed on the inner wall of the filter box (9) and below the polyester fiber filter bag (10).

2. The high-precision laser micro-hole array cutting device for glass substrates according to claim 1, characterized in that: A fixing plate (12) is fixedly installed on one side of the support frame (7). A screw (13) is provided on the fixing plate (12) and connected by a thread. A fastening block (14) is movably installed at one end of the screw (13) and is slidably connected to the fixing plate (12). Fastening grooves (15) are provided on both sides of the filter box (9).

3. The high-precision laser micro-hole array cutting device for glass substrates according to claim 2, characterized in that: Multiple push rods (16) are uniformly fixed on the surface of the other end of the screw (13), and the surface of the push rods (16) is provided with anti-slip texture.

4. The high-precision laser micro-hole array cutting device for glass substrates according to claim 1, characterized in that: The inner side of the support frame (7) is provided with multiple positioning grooves (17), and multiple positioning rods (18) that are compatible with the positioning grooves (17) are fixedly installed on the surface of the filter box (9).

5. The high-precision laser micro-hole array cutting device for glass substrates according to claim 1, characterized in that: The bottom of the support frame (7) is provided with bolts (19), and the bolts (19) are threadedly connected to the support frame (7) and the fan (8).

6. The high-precision laser micro-hole array cutting device for glass substrates according to claim 1, characterized in that: The top of the support platform (3) is provided with multiple sliding grooves (20). Multiple sliders (21) that are fixedly connected to the bottom of the hydraulic clamping mechanism (4) are slidably installed inside the sliding grooves (20). A support plate (22) is fixedly installed on one side of the hydraulic clamping mechanism (4). A support rod (23) is movably installed on one side of the support plate (22). A toothed block (24) is fixedly installed at one end of the support rod (23). A spring (25) is fixedly installed between the toothed block (24) and the inner wall of the support plate (22). A toothed plate (26) is fixedly installed on the surface of the support platform (3).

7. The high-precision laser micro-hole array cutting device for glass substrates according to claim 1, characterized in that: A window frame (27) is fixedly installed on the sealed door on the front of the processing box (1), and an observation window (28) is fixedly installed inside the window frame (27).

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