Coupling and z-axis motion device

Abstract

The utility model provides a kind of coupling and Z-axis movement device;The coupling includes an adjusting member and two shaft coupling members;The axial two sides of the adjusting member are movably connected with one shaft coupling member respectively;Each of the shaft coupling members is used to be releasably connected with a shaft body;After the adjusting member is driven to rotate, it drives two shaft coupling members to move towards or away from each other along the axial direction of the coupling, so that the shaft coupling members are disengaged or engaged with the shaft body;The Z-axis movement device includes a housing and a coupling;The coupling is arranged in the housing and is releasably connected with the shaft body;The top of the Z-axis movement device is used to support a magnetic levitation device.The utility model can realize the quick disassembly and assembly of the coupling and the shaft body, thereby simplifying the disassembly and assembly process, improving work efficiency, and avoiding affecting the magnetic levitation device.

Description

Technical Field

[0001] This utility model relates to the field of coupling manufacturing, specifically to a coupling and a Z-axis motion device. Background Technology

[0002] In semiconductor wafer manufacturing processes, some semiconductor equipment employs Z-axis motion devices, which can move around the Z-axis, providing higher load-bearing capacity and stability to meet the requirements of these high-precision devices. For example... Figure 1 As shown, the prior art relates to a Z-axis motion device, whose top supports a magnetic levitation device 1. This Z-axis motion device includes a housing 2, shafts 3, and a coupling 4. The coupling 3 is installed inside the housing 2 and connected to two shafts 3, and is fixed to the shafts 3 by screws. In actual production, the coupling 4 frequently requires maintenance; however, the screws fixing the coupling 4 to the shafts 3 are prone to stripping, increasing maintenance difficulty. Furthermore, replacing the coupling 4 requires first removing the fixing screws and then separating the coupling 4 from the shafts 3. However, the limited operating space inside the housing 2 makes this operation difficult and time-consuming. Additionally, the magnetic levitation device 1 will sink if it loses the support of the coupling 4 for an extended period. After replacing the coupling 4, the horizontal position needs to be readjusted, increasing downtime and reducing production efficiency. Utility Model Content

[0003] The purpose of this utility model is to provide a coupling and a Z-axis motion device to solve the problems of existing couplings being difficult to disassemble and assemble, taking a long time to disassemble and assemble, and easily causing the magnetic levitation device to sink.

[0004] To achieve the above objectives, this utility model provides a coupling, including an adjusting member and two coupling members; one of the coupling members is movably connected to each of the two axial sides of the adjusting member; each coupling member is releasably connected to a shaft; after the adjusting member is driven to rotate, it drives the two coupling members to move towards each other or away from each other along the axial direction of the coupling, so that the coupling members are disengaged from or engaged with the shaft.

[0005] Optionally, each of the couplings includes a first structural member and a second structural member axially connected; each first structural member is axially located between the adjusting member and the second structural member; each first structural member is movably connected to the adjusting member; and each second structural member is releasably connected to the shaft.

[0006] Optionally, the first structural member and the second structural member in the same coupling are connected by a concave-convex fit.

[0007] Optionally, the first structural member has a first flange on its end face facing the second structural member, and a first mounting groove is formed on the outer side of the first flange. The second structural member has a boss on its end face facing the first structural member, and a second mounting groove is provided on the boss. The second mounting groove is connected to the first flange, and the portion of the boss divided by the second mounting groove is connected to the first mounting groove.

[0008] Optionally, the second structural member is used for a concave-convex connection with the shaft.

[0009] Optionally, the second structural member has a second flange on its end face away from the first structural member, a third mounting groove is formed on the outer side of the second flange, and a mounting groove is provided at one end of the shaft, with the second flange engaging with the mounting groove.

[0010] Optionally, the two couplings are mutually circumferentially positioned by a guide structure, and are allowed to move relative to each other in the axial direction by the guide structure.

[0011] Optionally, the guiding structure includes a guide block, a first guide groove, and a second guide groove; the guide block and the first guide groove are both disposed on the first structural member and are spaced apart along the circumference of the first structural member; the second guide groove is disposed on the second structural member; the positions of the first guide groove and the second guide groove in the same coupling member correspond to each other and correspond to the positions of the guide block in the coupling member on the opposite side.

[0012] Optionally, the edge of the second structural member is provided with a guide insertion structure extending toward the first structural member. A notch is formed on the outer side of the guide insertion structure, the notch constitutes the second guide groove, and the guide insertion structure is used to be inserted into the first guide groove. The guide block is used to slide along the second guide groove.

[0013] Optionally, each of the two sides of the adjusting member is provided with a threaded rod, and each of the first structural members is provided with an axially penetrating threaded hole. Each of the threaded rods passes through the corresponding threaded hole and is threadedly connected to the corresponding first structural member.

[0014] Optionally, the adjusting member is provided with an anti-slip structure.

[0015] To achieve the above objectives, this utility model also provides a Z-axis motion device, including a housing and any of the couplings described above; the coupling is disposed within the housing and releasably connected to the shaft; the top of the Z-axis motion device is used to support a magnetic levitation device.

[0016] As described above, this utility model provides a coupling and a Z-axis motion device, which have at least the following beneficial effects:

[0017] The aforementioned coupling allows the two coupling components to move towards or away from each other via a rotating adjustment component. When the two coupling components move towards each other, they can disengage from the shaft, allowing the entire coupling to be removed from the gap between the two shafts. When the two coupling components move away from each other, they can be assembled and engaged with the shaft. Furthermore, when the coupling is applied to a Z-axis motion device, it can be completely locked under the gravity of the magnetic levitation device, fixing the shaft and the coupling and achieving torque transmission.

[0018] This configuration makes the installation and disassembly of the coupling simple and quick, enabling rapid disassembly and assembly of the coupling and shaft, greatly simplifying the disassembly and assembly process and improving work efficiency; it also avoids the problem of the magnetic levitation device sinking due to the lack of coupling support for a long time, avoids the step of recalibrating the horizontal position, shortens downtime, and improves production efficiency. Attached Figure Description

[0019] Those skilled in the art will understand that the accompanying drawings are provided to better understand the present invention and do not constitute any limitation on the scope of the present invention.

[0020] Figure 1 This is a schematic diagram of an existing Z-axis motion device. The invisible parts inside the diagram are represented by dashed lines.

[0021] Figure 2 An exploded view of the coupling provided in a preferred embodiment of this utility model;

[0022] Figure 3 for Figure 2 Assembly diagram of the coupling;

[0023] Figure 4 for Figure 3 A schematic diagram of the structure of the coupling after connecting the shaft;

[0024] Figure 5 This is a schematic diagram of the shaft structure provided in a preferred embodiment of the present invention.

[0025] Appendix Figure 2-5 The markings in the diagram are explained as follows: 10-shaft, 111-assembly groove, 11-adjusting component, 111-anti-slip structure, 112-threaded rod, 12, 13-two couplings, 121-threaded hole, 122-guide block, 123-first guide groove, 124-first flange, 125-first mounting groove, 13-second structural component, 131-second guide groove, 132-guide insertion structure, 133-bore, 134-second mounting groove, 135-second flange, 136-third mounting groove, 14-first structural component, 15-second structural component. Detailed Implementation

[0026] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the drawings only show components related to this utility model and are not drawn according to the actual number, shape, and size of the components in implementation. In actual implementation, the type, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex.

[0027] Furthermore, while each embodiment described below possesses one or more technical features, this does not imply that users of this utility model must simultaneously implement all technical features in any embodiment, or can only separately implement some or all technical features in different embodiments. In other words, provided it is feasible, those skilled in the art can selectively implement some or all technical features in any embodiment, or selectively implement a combination of some or all technical features in multiple embodiments, based on the disclosure of this utility model and depending on design specifications or implementation requirements, thereby increasing the flexibility in implementing this utility model.

[0028] As used herein, the singular forms “a,” “an,” and “the” include plural objects, and the plural form “a plurality” includes two or more objects, unless otherwise expressly indicated. As used herein, the term “or” is generally used to include the meaning of “and / or,” unless otherwise expressly indicated, and the terms “install,” “connect,” and “link” should be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection. Connections can be mechanical or electrical. Connections can be direct or indirect through an intermediate medium, and can be internal communication between two elements or an interaction between two elements. Relational terms such as “first,” “second,” and “third,” etc., are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor do they indicate relative importance or implicitly specify the number of indicated technical features. Those skilled in the art will understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0029] To make the objectives, advantages, and features of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clearly illustrate the objectives of the embodiments of this utility model.

[0030] One of the purposes of this utility model is to provide a coupling that reduces the difficulty of maintenance, simplifies the disassembly and assembly process, and improves work efficiency.

[0031] The second objective of this utility model is to provide a Z-axis motion device, in which a coupling is integrated inside the housing of the Z-axis motion device. The coupling is installed between two shafts in an adjustable manner, which facilitates its disengagement or engagement with the shafts and avoids affecting the magnetic levitation device at the top of the Z-axis motion device.

[0032] The following description is in conjunction with the accompanying drawings.

[0033] Reference Figures 2 to 5 As shown, this utility model provides a rigid coupling with a split design. More specifically, the coupling includes an adjusting member 11 and two coupling members 12 and 13; each coupling member 12 and 13 is releasably connected to a shaft 10, meaning the coupling can connect two shafts 10 simultaneously. The coupling is configured such that when the adjusting member 11 is driven to rotate, it causes the two coupling members 12 and 13 to move in opposite directions (i.e., inward) or outward along the axial direction of the coupling, thereby disengaging or engaging the coupling members 12 and 13 with the shaft 10. Figure 3 In the diagram, the double-headed arrow M indicates the direction of movement of the two couplings 12 and 13.

[0034] Therefore, when the two couplings 12 and 13 are driven inward by the adjusting member 11, they can be disengaged from the shaft 10, and the coupling can be removed from the gap between the two shafts 10; conversely, when the two couplings 12 and 13 are driven outward by the adjusting member 11, they can be assembled and engaged with the shaft 10.

[0035] Reference Figure 4 As shown, this type of coupling connects two shafts 10 through two coupling parts 12 and 13. When one shaft 10 rotates, the rotational motion is transmitted to the other shaft 10 through the coupling, thereby realizing the transmission of force.

[0036] Because the two couplings 12 and 13 are releasable connections to the shaft 10, they can be selectively engaged or disengaged, allowing for quick assembly or disassembly of the coupling. When applied to a Z-axis motion device, the coupling can be locked under the gravity of the magnetic levitation device, fixing the shaft 10 and the coupling and enabling torque transmission.

[0037] As can be seen, this coupling, through its unique disassembly and assembly method, makes the installation and disassembly process simple and quick, enabling rapid disassembly and assembly of the coupling and shaft 10. This design avoids the cumbersome screw fixing method in traditional couplings, greatly simplifying the disassembly and assembly process and improving work efficiency. At the same time, it also avoids the problem of the magnetic levitation device sinking due to the lack of coupling support for a long time, thus eliminating the need for recalibrating the horizontal position, thereby shortening downtime and improving production efficiency.

[0038] This utility model also provides a Z-axis motion device, which includes a housing and a coupling disposed within the housing. The coupling is releasably connected to the shaft 10, and the top of the Z-axis motion device is used to support a magnetic levitation device. (This part can be found in [reference needed]). Figure 1 As shown. Furthermore, a maintenance window can be provided on the housing for maintenance personnel to install and remove the coupling. This Z-axis motion device can be used in various semiconductor devices, such as annealing equipment, etc., and is not specifically limited to any particular application.

[0039] In some implementations, the two couplings 12 and 13 are individual parts rather than assembled from multiple structural components.

[0040] In this embodiment, each of the two couplings 12 and 13 includes a first structural member 14 and a second structural member 15 axially connected. Each first structural member 14 is axially located between the adjusting member 11 and the second structural member 15. Each first structural member 14 is movably connected to the adjusting member 11. Each second structural member 15 is releasably connected to the shaft body 10. Thus, each coupling 12 and 13 is assembled from two structural members in a detachable manner. When any coupling 12 or 13 needs to be replaced, only one structural member needs to be replaced for reuse, significantly reducing costs, facilitating manufacturing, and simplifying maintenance.

[0041] The second structural component 15 can also limit the first structural component 14 and provide stable support, while also serving as an auxiliary torque transmitter and distributing the load to a certain extent, reducing the risk of coupling damage. The second structural component 15 can also compensate for the displacement of the first structural component 14 when the distance between the two shafts 10 is large, effectively lengthening the coupling and enabling it to be used in more application scenarios.

[0042] Therefore, the second structural member 15 in each coupling 12, 13 is assembled and connected to the first structural member 14, so that the second structural member 15 moves along with the first structural member 14, that is, each coupling 12, 13 moves together as a whole. It should also be understood that the entire coupling can rotate synchronously with the rotation of the coaxial body 10. That is to say, there is no circumferential displacement between the adjusting member 11, the first structural member 14 and the second structural member 15, and during operation, due to the vertical installation, the gravity of the magnetic levitation device is used to press the entire coupling together to prevent axial displacement.

[0043] The adjusting element 11 can be configured as a knob for easy operation, which is particularly suitable for small-scale applications limited by Z-axis motion devices. Preferably, the adjusting element 11 is provided with an anti-slip structure 111 to increase friction and facilitate better user operation. The anti-slip structure 111 is typically designed with grooves, which increase the contact area between the hand and the adjusting element 11, thereby providing better rotational operation. It should be noted that the grooves on the adjusting element 11 can be arranged longitudinally and / or laterally, which is not required. Furthermore, the form of the anti-slip structure 111 includes, but is not limited to, grooves.

[0044] The adjusting element 11 is threadedly engaged with the two couplings 12 and 13, respectively, to control the two couplings 12 and 13 to move in opposite directions or in opposite directions, and to achieve precise fine-tuning. Of course, in addition to the threaded engagement, those skilled in the art can easily use other engagement methods based on common sense to achieve the opposite or in opposite movements of the two couplings 12 and 13.

[0045] Reference Figure 2 As shown, in this embodiment, the adjusting member 11 has a threaded rod 112 on each side, and the threaded rods 112 on both sides are threadedly connected to the two couplings 12 and 13 in a one-to-one correspondence. It should be understood that the thread directions of the threaded rods 112 on both sides are opposite, allowing for movement in opposite directions. Therefore, the two couplings 12 and 13 have axially penetrating threaded holes 121, and the threaded rods 112 on both sides pass through the corresponding threaded holes 121 to threadly connect to the corresponding couplings 12 and 13. This design is the simplest, thereby reducing costs.

[0046] Specifically, the first structural member 14 is provided with a threaded hole 121, through which it is fitted onto the threaded rod 112 and slides along the bolt rod 112. In this case, the second structural member 15 may not be connected to the adjusting member 11. However, in other cases, the second structural member 15 may also be provided with a threaded hole 121 and fitted onto the threaded rod 112.

[0047] The two couplings 12 and 13 may have the same or different structures. Preferably, they have the same structure to reduce the number of parts, lower costs, and make the assembly and disassembly process easier. Therefore, in this embodiment, the two first structural members 14 have the same structure, and the two second structural members 15 also have the same structure.

[0048] In some embodiments, the two couplings 12 and 13 are mutually circumferentially positioned by a guide structure, and the guide structure also allows relative axial movement between them. That is, the two couplings 12 and 13 do not undergo relative displacement in the circumferential direction, but can slide axially during assembly or disassembly. In practice, the guide structure can limit the circumferential position between the two couplings 12 and 13 through various measures, and no particular limitation is made thereto.

[0049] Reference Figure 2 As shown, in this embodiment, the guiding structure includes a guide block 122, a first guide groove 123, and a second guide groove 131. The guide block 122 and the first guide groove 123 are both disposed on the first structural member 14 and are spaced apart along the circumference of the first structural member 14. The positions of the guide block 122 and the first guide groove 123 are preferably symmetrical. The second guide groove 131 is disposed on the second structural member 15. The positions of the first guide groove 123 and the second guide groove 131 in the same coupling member 12 or 13 correspond to the positions of the guide block 122 in the coupling member 12 or 13 on the opposite side.

[0050] Based on this, the two first structural members 14 can be positioned circumferentially by the mutual engagement of the guide block 122 and the first guide groove 123, ensuring that the two first structural members 14 can rotate synchronously and guiding them to slide in a predetermined direction. Conversely, the first structural member 14 and the second structural member 15 on the opposite side can be positioned circumferentially by the mutual engagement of the guide block 122 and the second guide groove 131, ensuring that the second structural member 15 and the first structural member 14 can rotate synchronously and guiding them to slide together in a predetermined direction. This guiding and limiting method has a simple overall structure, is easy to manufacture, and is convenient to use.

[0051] Optionally, the edge of the second structural member 15 is provided with a guide insertion structure 132 extending toward the first structural member 14. A notch is formed on the outer side of the guide insertion structure 132, constituting a second guide groove 131. The guide insertion structure 132 can be inserted into an adjacent first guide groove 123, while the guide block 122 on the opposite side is directly inserted into the second guide groove 131 on the opposite side. Thus, the guide insertion structure 132 of the second structural member 15 covers the first guide groove 123 of the adjacent first structural member 14, while the guide block 122 of the opposite first structural member 14 slides directly within the second guide groove 131 of the opposite second structural member 15.

[0052] In some embodiments, the first structural member 14 and the second structural member 15 in the same coupling 12 and 13 are connected by a concave-convex fit, which not only prevents relative displacement between the two but also facilitates their assembly and disassembly.

[0053] Reference Figure 2 As shown, in this embodiment, the end face of the first structural member 14 facing the second structural member 15 is provided with a first flange 124, and a first mounting groove 125 is formed on the outer side of the first flange 124; the end face of the second structural member 15 facing the first structural member 14 is provided with a boss 133, the boss 133 is a cylinder, and a second mounting groove 134 is provided on the boss 133; the second mounting groove 134 is engaged with the first flange 124, and the portion of the boss 133 divided by the second mounting groove 134 is engaged with the first mounting groove 125. In this way, a tight connection can be achieved between the first structural member 14 and the second structural member 15, while facilitating their disassembly and assembly.

[0054] In some embodiments, the second structural member 15 is used for a concave-convex connection with the shaft 10.

[0055] Reference Figure 2 As shown, in this embodiment, the end face of the second structural member 15 facing away from the first structural member 14 is provided with a second flange 135, and a third mounting groove 136 is formed on the outer side of the second flange 135. (See also...) Figure 5 As shown, one end of the shaft 10 is provided with a mounting groove 111. Thus, the second structural member 15 is fitted onto the shaft 10 via a third mounting groove 136, and the shaft 10 and the second flange 135 of the second structural member 15 form a tight fit through the mounting groove 111, achieving force transmission. This mounting groove 11 also limits the insertion depth of the shaft 10. This design ensures torque carrying capacity and mechanical strength through structural simplification.

[0056] It should also be noted that this application does not impose any special restrictions on the processing method, material, size, and shape of the adjusting component 11, the first structural component 14, and the second structural component 15. These can all be adjusted and set according to actual needs. Generally, the adjusting component 11, the first structural component 14, and the second structural component 15 are all integrally designed and can be integrally injection molded.

[0057] The working principle and disassembly / assembly method of the coupling in this application will be further explained below with some specific examples.

[0058] The working principle of the coupling is as follows: when one of the shafts 10 rotates, it will drive the second structural component 15 through the second flange 135. The second structural component 15 will drive the two first structural components 14 through the guide block 122 on it. The first structural component 14 on the opposite side will drive the other shaft 10 through the first flange 124 on it, thus realizing the transmission of force.

[0059] The coupling is disassembled and assembled as follows: When disassembling and replacing, there is no need to disassemble the shaft 10. Simply rotate the adjusting component 11 to move the two coupling parts 12 and 13 inward to reset them, and then the coupling can be taken out from the gap between the two shafts 10. When assembling, rotate the adjusting component 11 in the opposite direction to move the two coupling parts 12 and 13 outward. Continue to move until they are close to the end face of the shaft 10. At this time, under the pressure of gravity of the magnetic levitation device, the position is completely locked, and the shaft 10 and the coupling are fixed.

[0060] In summary, this utility model provides a coupling that allows the two coupling parts 12 and 13 to move towards or away from each other by rotating the adjusting member 11. This eliminates the need to disassemble the entire Z-axis motion device during maintenance; simply rotating the adjusting member 11 adjusts the distance between the two coupling parts 12 and 13, enabling the coupling to be disassembled or installed. This avoids the need to use screws to fix the shaft 10 and the coupling, reducing maintenance difficulty and time. It also prevents the magnetic levitation device from sinking and allows for timely replacement of the coupling during maintenance and inspection, preventing unexpected machine downtime and improving production efficiency.

[0061] It should be understood that the above embodiments specifically disclose the features of the preferred embodiments of this utility model, enabling those skilled in the art to better understand this utility model. Those skilled in the art should understand that, based on the disclosure of this application, appropriate modifications can be easily made to this utility model to achieve the same purpose and / or the same advantages as the disclosed embodiments. Those skilled in the art should also recognize that such similar structures do not depart from the scope of this utility model, and that they can be changed, substituted, and modified in various ways without departing from the scope of this utility model.

Claims

1. A coupling, characterized in that, It includes an adjusting member and two couplings; each of the two couplings is movably connected to one of the two axial sides of the adjusting member; each coupling is releasably connected to a shaft; when the adjusting member is driven to rotate, it causes the two couplings to move towards each other or away from each other along the axial direction of the coupling, so that the couplings are disengaged from or engaged with the shaft.

2. The coupling according to claim 1, characterized in that, Each of the couplings includes a first structural member and a second structural member that are axially connected; each first structural member is axially located between the adjusting member and the second structural member; each first structural member is movably connected to the adjusting member; and each second structural member is releasably connected to the shaft.

3. The coupling according to claim 2, characterized in that, The first and second structural components in the same coupling are connected by a concave-convex fit.

4. The coupling according to claim 3, characterized in that, The first structural member has a first flange on its end face facing the second structural member, and a first mounting groove is formed on the outer side of the first flange. The second structural member has a boss on its end face facing the first structural member, and a second mounting groove is provided on the boss. The second mounting groove is connected to the first flange, and the portion of the boss divided by the second mounting groove is connected to the first mounting groove.

5. The coupling according to claim 2, characterized in that, The second structural component is used for a concave-convex connection with the shaft.

6. The coupling according to claim 5, characterized in that, The second structural member has a second flange on its end face away from the first structural member, and a third mounting groove is formed on the outer side of the second flange. One end of the shaft is provided with a mounting groove, and the second flange is connected to the mounting groove.

7. The coupling according to claim 2, characterized in that, The two couplings are mutually circumferentially positioned by a guide structure, and are allowed to move relative to each other in the axial direction by the guide structure.

8. The coupling according to claim 7, characterized in that, The guiding structure includes a guide block, a first guide groove, and a second guide groove; the guide block and the first guide groove are both disposed on the first structural member and are spaced apart along the circumference of the first structural member; the second guide groove is disposed on the second structural member; the positions of the first guide groove and the second guide groove in the same coupling member correspond to each other and correspond to the positions of the guide block in the coupling member on the opposite side.

9. The coupling according to claim 8, characterized in that, The edge of the second structural member is provided with a guide insertion structure extending toward the first structural member. A notch is formed on the outer side of the guide insertion structure, which constitutes the second guide groove. The guide insertion structure is used to be inserted into the first guide groove, and the guide block is used to slide along the second guide groove.

10. The coupling according to claim 2, characterized in that, Each of the two sides of the adjusting member is provided with a threaded rod, and each of the first structural members is provided with an axially penetrating threaded hole. Each of the threaded rods passes through the corresponding threaded hole and is threadedly connected to the corresponding first structural member.

11. The coupling according to claim 1 or 2, characterized in that, The adjusting component is equipped with an anti-slip structure.

12. A Z-axis motion device, characterized in that, It includes a housing and a coupling as described in any one of claims 1-11; the coupling is disposed within the housing and releasably connected to the shaft; the top of the Z-axis motion device is used to support the magnetic levitation device.

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