Chip preheating furnace structure

Abstract

The utility model relates to chip processing equipment technical field, and disclose a kind of chip preheating furnace structure, it includes shell, the shell one side wall middle part is provided with furnace door, the furnace door middle part is provided with transparent window, the shell one side wall upper portion is provided with fixed plate, the fixed plate middle part is provided with electric push rod on upper position, the electric push rod output end is provided with top cover, the top cover periphery is provided with frame, the frame inner wall is provided with gasket, the first heat insulating plate is connected with the first heat insulating plate by bolt in the top cover lower end, the second heat insulating plate is provided on the shell inner wall. The structure setting of frame, top cover, gasket, first heat insulating plate, electric push rod and fixed plate make preheating furnace upper portion have opening structure, facilitate chip transfer manipulator to take and place chip from the upper portion of preheating furnace, this can make preheating furnace take and place chip more convenient, improve the practicality of preheating furnace.

Description

Technical Field

[0001] This utility model belongs to the technical field of chip processing equipment, specifically a chip preheating furnace structure. Background Technology

[0002] In the chip manufacturing process, the chip needs to be heated. In the complex chip manufacturing process, the chip is preheated in a preheating furnace before heating, then the chip is initially processed, and then further heating and processing are carried out.

[0003] However, the doors of existing chip preheating furnace structures are mostly located on the side of the furnace body, making it inconvenient for the chip transfer robotic arm to pick up and place chips inside the preheating furnace, resulting in poor practicality. Therefore, a new chip preheating furnace structure is proposed here. Utility Model Content

[0004] In view of the above situation and to overcome the defects of the prior art, this utility model provides a chip preheating furnace structure, which effectively solves the problems existing in the existing chip preheating furnace structure.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a chip preheating furnace structure, including an outer shell, a furnace door in the middle of one side wall of the outer shell, a transparent window in the middle of the furnace door, a fixed plate in the upper part of one side wall of the outer shell, an electric push rod in the upper middle part of the fixed plate, a top cover in the output end of the electric push rod, a frame in the periphery of the top cover, a pad in the inner wall of the frame, a first heat insulation plate connected to the lower end of the top cover by bolts, a second heat insulation plate in the inner wall of the outer shell, heating rods in both inner walls of the second heat insulation plate, and a temperature sensor in the lower end of the second heat insulation plate located at the top of the inner wall of the outer shell.

[0006] Preferably, the furnace door is connected to the outer shell by a hinge, and a heat insulation layer is glued to the furnace door. After the furnace door is opened, the chip to be preheated can be placed at the bottom of the preheating furnace, and then the furnace door is closed.

[0007] Preferably, the transparent window is embedded in the middle of the furnace door, the transparent window is made of high-temperature resistant tempered glass, the fixing plate is connected to the side wall of the outer shell by bolts, and the transparent window allows for convenient observation of the preheating furnace from the outside.

[0008] Preferably, the electric push rod is bolted to the fixed plate, and the transmission output end of the electric push rod is bolted to the side wall of the top cover. When the electric push rod is working, it can drive the top cover to move laterally.

[0009] Preferably, side plates are formed on both sides of the top cover, the lower end of the first heat insulation plate is slidably connected to the upper end of the outer shell, the top cover is slidably connected to the inner wall of the gasket, the lower end of the frame is welded to the upper end of the outer shell, and the gasket can ensure the sealing between the top cover and the frame. When the top cover is closed, the first heat insulation plate and the second heat insulation plate can ensure the heat preservation performance of the preheating furnace.

[0010] Preferably, the second heat insulation plate is bonded to the inner wall of the outer shell, the heating rod is connected to the second heat insulation plate by bolts, and the temperature sensor is connected to the second heat insulation plate by screws. When the heating rod is working, it can heat the preheating furnace. The temperature sensor can sense the temperature inside the preheating furnace in real time and feed the sensed information back to the external control device of the preheating furnace.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] In this chip preheating furnace structure, the frame, top cover, gasket, first heat insulation plate, electric push rod and fixing plate are arranged to give the preheating furnace an open structure at the top, which facilitates the chip transfer robot arm to pick up and put down chips from the top of the preheating furnace. This makes it more convenient to pick up and put down chips in the preheating furnace and improves the practicality of the preheating furnace. The gasket can ensure the sealing between the top cover and the frame, and the first heat insulation plate and the second heat insulation plate can ensure the heat preservation performance of the preheating furnace. Attached Figure Description

[0013] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a front sectional view of the present invention;

[0016] Figure 3 This is a schematic diagram of the connection structure between the frame and the top cover in this utility model;

[0017] Figure 4 This is a schematic diagram of the top cover structure in this utility model;

[0018] In the diagram: 1. Outer shell; 2. Furnace door; 3. Transparent window; 4. Fixing plate; 5. Electric push rod; 6. Top cover; 7. Frame; 8. Pad; 9. First heat insulation plate; 10. Second heat insulation plate; 11. Heating rod; 12. Temperature sensor; 13. Side plate. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0020] In this embodiment, by Figure 1-4 The present invention includes an outer shell 1, a furnace door 2 located in the middle of one side wall of the outer shell 1, a transparent window 3 located in the middle of the furnace door 2, a fixing plate 4 located on the upper part of one side wall of the outer shell 1, an electric push rod 5 located near the upper middle of the fixing plate 4, a top cover 6 located at the output end of the electric push rod 5, a frame 7 located around the top cover 6, a pad 8 located on the inner wall of the frame 7, a first heat insulation plate 9 connected to the lower end of the top cover 6 by bolts, a second heat insulation plate 10 located on the inner wall of the outer shell 1, electric heating rods 11 located on both inner walls of the second heat insulation plate 10, and a temperature sensor 12 located at the lower end of the second heat insulation plate 10 located at the top inner end of the outer shell 1.

[0021] The furnace door 2 is connected to the outer shell 1 by a hinge. The furnace door 2 is bonded with a heat insulation layer. After the furnace door 2 is opened, the chip to be preheated can be placed at the bottom of the preheating furnace. Then the furnace door 2 is closed. The transparent window 3 is embedded in the middle of the furnace door 2. The transparent window 3 is made of high temperature resistant tempered glass. The fixing plate 4 is connected to the side wall of the outer shell 1 by bolts. The transparent window 3 allows for easy observation of the preheating furnace from the outside.

[0022] Among them, the electric push rod 5 is connected to the fixed plate 4 by bolts, and the transmission output end of the electric push rod 5 is connected to the side wall of the top cover 6 by bolts. When working, the electric push rod 5 can drive the top cover 6 to move laterally. Side plates 13 are formed on both sides of the top cover 6. The lower end of the first heat insulation plate 9 is slidably connected to the upper end of the outer shell 1. The top cover 6 is slidably connected to the inner wall of the gasket 8. The lower end of the frame 7 is welded to the upper end of the outer shell 1. The gasket 8 can ensure the sealing between the top cover 6 and the frame 7. When the top cover 6 is closed, the first heat insulation plate 9 and the second heat insulation plate 10 can ensure the heat preservation performance of the preheating furnace.

[0023] The second heat insulation plate 10 is bonded to the inner wall of the outer shell 1, the electric heating rod 11 is connected to the second heat insulation plate 10 by bolts, and the temperature sensor 12 is connected to the second heat insulation plate 10 by screws. When working, the electric heating rod 11 can heat the preheating furnace, and the temperature sensor 12 can sense the temperature inside the preheating furnace in real time and feed the sensed information back to the external control equipment of the preheating furnace.

[0024] Working principle: The preheating furnace uses an external power supply and is controlled by an external control device. When the chip is processed in the preheating furnace, the furnace door 2 can be opened and the chip placed in the middle of the bottom of the preheating furnace. Alternatively, the top cover 6 can be opened so that the chip transfer robot can place the chip from the top of the preheating furnace to the middle of the bottom of the preheating furnace. Then, the furnace door 2 or the top cover 6 is closed, and the heating rod 11 is controlled to work, so that the temperature inside the preheating furnace gradually rises. The temperature sensor 12 can sense the temperature inside the preheating furnace in real time and feed back the sensing information to the external control device of the preheating furnace. This makes it easy to control the temperature of the preheating furnace. After the chip preheating is completed, the electric push rod 5 can be controlled to open the top cover 6, and then the chip transfer robot can enter the preheating furnace from the top and take out the chip. The transparent window 3 allows for easy observation of the situation inside the preheating furnace from the outside, as well as the operation of the chip transfer robot inside the preheating furnace.

[0025] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0026] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A chip preheating furnace structure, comprising a shell (1), characterized in that: A furnace door (2) is provided in the middle of one side wall of the outer shell (1). A transparent window (3) is provided in the middle of the furnace door (2). A fixing plate (4) is provided on the upper part of one side wall of the outer shell (1). An electric push rod (5) is provided in the upper part of the middle of the fixing plate (4). A top cover (6) is provided at the output end of the electric push rod (5). A frame (7) is provided around the top cover (6). A pad (8) is provided on the inner wall of the frame (7). A first heat insulation plate (9) is connected to the lower end of the top cover (6) by bolts. A second heat insulation plate (10) is provided on the inner wall of the outer shell (1). Electric heating rods (11) are provided on both inner walls of the second heat insulation plate (10). A temperature sensor (12) is provided at the lower end of the second heat insulation plate (10) located at the top of the inner wall of the outer shell (1).

2. The chip preheating furnace structure according to claim 1, characterized in that: The furnace door (2) is connected to the outer shell (1) by a hinge, and a heat insulation layer is glued to the inner wall of the furnace door (2).

3. The chip preheating furnace structure according to claim 1, characterized in that: The transparent window (3) is embedded in the middle of the furnace door (2). The transparent window (3) is made of high-temperature resistant tempered glass. The fixing plate (4) is connected to the side wall of the outer shell (1) by bolts.

4. The chip preheating furnace structure according to claim 1, characterized in that: The electric push rod (5) is connected to the fixed plate (4) by bolts, and the transmission output end of the electric push rod (5) is connected to the side wall of the top cover (6) by bolts.

5. The chip preheating furnace structure according to claim 1, characterized in that: Side plates (13) are formed on both sides of the top cover (6). The lower end of the first heat insulation plate (9) is slidably connected to the upper end of the outer shell (1). The top cover (6) is slidably connected to the inner wall of the liner (8). The lower end of the frame (7) is welded to the upper end of the outer shell (1).

6. The chip preheating furnace structure according to claim 1, characterized in that: The second heat insulation plate (10) is bonded to the inner wall of the outer shell (1), the heating rod (11) is connected to the second heat insulation plate (10) by bolts, and the temperature sensor (12) is connected to the second heat insulation plate (10) by screws.

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