A medicine collection cup with cleaning and purging functions

Abstract

This utility model provides a liquid collection cup with cleaning and purging functions, relating to the field of wafer manufacturing technology. It includes: a collection cup body; a cleaning and purging integrated component installed at the cup opening; an air inlet and a water inlet of the cleaning and purging integrated component connected to an air inlet pipe and a water inlet pipe, respectively; and an air outlet and a water outlet of the cleaning and purging integrated component facing the central axis of the collection cup body. The beneficial effect is that by integrating the cleaning layer and the purging layer into the cup opening of the collection cup body, the cleaning water flow and the purging airflow are directly sprayed towards the central axis of the collection cup. This design significantly shortens the physical distance between the cleaning / purging component and the nozzle. After the nozzle returns to its original position, residual liquid can be removed and the nozzle surface dried simultaneously through the integrated cleaning and purging action. This avoids the space redundancy of traditional split structures and significantly improves cleaning efficiency and chamber cleanliness.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and in particular to a liquid collection cup with cleaning and purging functions. Background Technology

[0002] In wafer manufacturing, if dust particles or metallic contaminants adhere to the wafer surface, it will directly cause short circuits or open circuits in the internal circuitry of the chip, resulting in integrated circuit failure. Therefore, chemical cleaning of the wafer is necessary before critical processes such as high-temperature diffusion and ion implantation. In traditional cleaning processes, after the nozzles of the spray arm spray the cleaning solution onto the wafer, residual solution easily remains on its surface. This residue not only contaminates the chamber environment but also affects the uniformity of subsequent wafer cleaning. Existing technology addresses the residue problem by adding an independent cleaning structure to the collection cup (CUP) at the nozzle homing position. However, this structure occupies a large space and is far from the nozzle, resulting in low cleaning efficiency and difficulty in completely removing residue. Utility Model Content

[0003] To address the problems existing in the prior art, this utility model provides a medicine collection cup with cleaning and purging functions, comprising:

[0004] The collection cup body has a cleaning and purging integrated component installed at its mouth. The air inlet and water inlet of the cleaning and purging integrated component are connected to the air inlet pipe and water inlet pipe, respectively. The air outlet and water outlet of the cleaning and purging integrated component face the central axis of the collection cup body.

[0005] Preferably, the integrated cleaning and purging component includes:

[0006] The integrated body has a longitudinally distributed cleaning layer and a purging layer, and a cleaning channel is provided on the central axis of the integrated body.

[0007] The inlet of the cleaning layer is connected to the inlet pipe, and the outlet of the cleaning layer is arranged circumferentially along the inner wall of the cleaning channel and facing the central axis of the collection cup body.

[0008] The air inlet of the purge layer is connected to the air inlet pipe, and the air outlet of the purge layer is arranged circumferentially along the inner wall of the cleaning channel and facing the central axis of the collection cup body.

[0009] Preferably, the water outlet of the cleaning layer and the air outlet of the purging layer are both on the same horizontal cross section.

[0010] Preferably, the water outlet of the cleaning layer and the air outlet of the purging layer are arranged alternately.

[0011] Preferably, the cleaning layer includes:

[0012] A water channel is arranged around the outer wall of the integral body, and the water inlet of the water channel is connected to the water inlet pipe;

[0013] Multiple water outlet channels, each water outlet channel corresponding to one water outlet and the water outlet connected to the water flow channel.

[0014] Preferably, the purging layer includes:

[0015] An airflow channel is arranged around the outer wall of the integral body, and the air inlet of the airflow channel is connected to the air inlet pipe;

[0016] Multiple air outlet channels, each corresponding to one air outlet and connected to the air flow channel.

[0017] Preferably, the top opening of the integral body is connected to the cleaning channel via an inclined wall.

[0018] Preferably, a pipe fixing component is provided between the air inlet pipe and the water inlet pipe and the collection cup body.

[0019] Preferably, the outer wall of the collecting cup body is provided with a liquid receiving groove that communicates with the interior of the collecting cup body.

[0020] The above technical solution has the following advantages or beneficial effects:

[0021] This invention proposes a liquid collection cup integrating cleaning and purging functions. By integrating the cleaning layer and purging layer into the cup opening of the collection cup body, the cleaning water flow and purging airflow are directly sprayed towards the central axis of the collection cup. This design significantly shortens the physical distance between the cleaning / purging components and the nozzle. After the nozzle returns to its original position, residual liquid can be removed and the nozzle surface dried simultaneously through integrated cleaning and purging actions. This avoids the space redundancy of traditional split structures and significantly improves cleaning efficiency and the cleanliness of the chamber environment. Attached Figure Description

[0022] Figure 1 A front view of a medicine collection cup with cleaning and purging functions is shown in a preferred embodiment of the present invention.

[0023] Figure 2 for Figure 1 A schematic diagram of the cross-section along the AA direction;

[0024] Figure 3 A side view of a medicine collection cup with cleaning and purging functions is shown in a preferred embodiment of the present invention.

[0025] Figure 4 for Figure 3 A schematic diagram of the cross-section along the BB direction;

[0026] Figure 5 A front view of a medicine collection cup with cleaning and purging functions is shown in a preferred embodiment of the present invention.

[0027] Figure 6 for Figure 5 A schematic diagram of the cross-section along the CC direction;

[0028] Figure 7 A side view of a medicine collection cup with cleaning and purging functions is shown in a preferred embodiment of the present invention.

[0029] Figure 8 for Figure 7 A schematic diagram of the cross-section along the DD direction. Detailed Implementation

[0030] The present invention will now be described in detail with reference to the accompanying drawings and specific embodiments. The present invention is not limited to this embodiment; other embodiments that conform to the spirit of the present invention may also fall within its scope.

[0031] In a preferred embodiment of this utility model, based on the above-mentioned problems existing in the prior art, a medicine collection cup with cleaning and purging functions is provided, such as... Figure 1-8 As shown, it includes:

[0032] The collection cup body 1 has a cleaning and purging integrated component 2 installed at its mouth. The air inlet and water inlet of the cleaning and purging integrated component 2 are connected to the air inlet pipe 3 and the water inlet pipe 4, respectively. The air outlet and water outlet of the cleaning and purging integrated component 3 face the central axis of the collection cup body 1.

[0033] Specifically, addressing the issue of large size in existing cleaning equipment, this embodiment integrates the cleaning layer and the purging layer into the cup opening of the collection cup body 1, allowing the cleaning water flow and purging airflow to be sprayed directly towards the central axis of the collection cup. This design significantly reduces the physical distance between the cleaning / purging components and the nozzle. After the nozzle returns to its original position, residual liquid can be removed and the nozzle surface dried simultaneously through integrated cleaning and purging actions. This avoids the space redundancy of traditional split structures and significantly improves cleaning efficiency and the cleanliness of the chamber environment.

[0034] Specifically, the aforementioned beneficial effects are mainly achieved through the following aspects:

[0035] 1. Integrated design: By integrating cleaning and purging functions into one unit, the space occupied by traditional split structures is reduced, and it is adapted to the compact layout of wafer equipment.

[0036] 2. Directional spray: The design of the air outlet and water outlet facing the central axis allows the cleaning water flow and purging airflow to directly cover the nozzle residue area (i.e., the HOME position), improving cleaning efficiency and drying effect.

[0037] 3. Synchronous operation: The integrated structure supports simultaneous cleaning and purging, avoiding time wastage during step-by-step operations and improving process efficiency.

[0038] The preferred embodiment of this utility model is as follows: Figure 1-8 The cleaning and purging unit 2 shown includes:

[0039] The integrated body 21 has a longitudinally distributed cleaning layer 22 and a purging layer 23, and a cleaning channel 24 is provided on the central axis of the integrated body 21.

[0040] The inlet of the cleaning layer 22 is connected to the inlet pipe 4, and the outlet 221 of the cleaning layer 22 is arranged circumferentially along the inner wall of the cleaning channel 24 and facing the central axis of the collection cup body 1.

[0041] The air inlet of the purge layer 23 is connected to the air inlet pipe 3, and the air outlet 231 of the purge layer 23 is arranged circumferentially along the inner wall of the cleaning channel 24 and facing the central axis of the collection cup body 1.

[0042] Specifically, in this embodiment, a cleaning layer 22 and a purging layer 23 are vertically integrated in the integral body 21, with a cleaning channel 24 provided along the central axis; the water outlets of the cleaning layer 22 and the air outlets of the purging layer 23 are distributed circumferentially along the inner wall of the cleaning channel 24 and face the central axis. The advantage of this layered integration method is that:

[0043] 1. Functional separation and synergy: Vertical stratification enables independent flow channels for cleaning fluid and gas, avoiding cross-contamination. At the same time, concentrated spraying through the central cleaning channel enhances the fluid impact force.

[0044] 2. Precise coverage: The circumferentially distributed water outlets and air outlets ensure that the cleaning / blowing range covers the entire outer surface of the nozzle, eliminating the blind spots of traditional single-point spraying.

[0045] 3. Channel optimization: The central cleaning channel serves as the core of fluid guidance, reducing turbulence and improving the stability of the spray path.

[0046] In a preferred embodiment of this utility model, the water outlet 221 of the cleaning layer 22 and the air outlet 231 of the purging layer 23 are both located on the same horizontal cross section.

[0047] In a preferred embodiment of this utility model, the water outlet 221 of the cleaning layer 22 and the air outlet 231 of the purging layer 23 are arranged alternately.

[0048] Specifically, such as Figure 2 ,4 As shown in Figures 6 and 8, in this embodiment, the water outlet 221 of the cleaning layer 22 and the air outlet 231 of the purging layer 23 are located at the same horizontal cross-section, which can produce a synergistic effect. The cleaning liquid and gas are sprayed on the same plane, forming a "liquid-gas mixed impact", which enhances the peeling effect on stubborn residues. It can also achieve uniform coverage, and the consistency of the horizontal cross-section ensures that the nozzle is subjected to uniform force in the circumferential direction, avoiding the problem of uneven cleaning / drying caused by height differences. In addition, it can simplify the structure, reduce the vertical space occupation, and further optimize the compactness of the integrated component.

[0049] The alternating arrangement of the water outlet 221 of the cleaning layer 22 and the air outlet 231 of the purging layer 23 enhances coverage. The alternating arrangement allows the liquid flow and air flow to complement each other in space, forming a cleaning / purging network without dead angles. The alternating impact of liquid and air can disrupt the adhesion interface of residues (such as surface tension), improving the thoroughness of cleaning.

[0050] The preferred embodiment of this utility model is as follows: Figure 2 , 4 As shown, the cleaning layer 22 includes:

[0051] Water flow channel 222 is arranged around the outer wall of the integral body 21, and the water inlet of water flow channel 222 is connected to water inlet pipe 4;

[0052] Multiple water outlet channels 223, each water outlet channel 223 corresponds to a water outlet 221 and the water outlet is connected to the water flow channel 222.

[0053] The preferred embodiment of this utility model is as follows: Figure 6 , 8 As shown, the purge layer 23 includes:

[0054] Airflow channel 232 is arranged around the outer wall of integral body 21, and air inlet of airflow channel 232 is connected to air inlet pipe 3;

[0055] Multiple air outlet channels 233, each air outlet channel 233 corresponds to an air outlet 231 and the air outlet 231 is connected to the air flow channel 232.

[0056] Specifically, such as Figure 1-8 As shown, in the cleaning layer 22, the water outlet 221 is connected to the water flow channel through the water outlet channel 223. In the purging layer 23, the air outlet 231 is connected to the air flow channel 232 through the air outlet channel 233. The air outlet channel 233 is set obliquely downward, and the water outlet channel 223 is set horizontally to realize the arrangement of the water outlet 221 and the air outlet 231 with the same cross section and alternating arrangement in the aforementioned embodiment.

[0057] The preferred embodiment of this utility model is as follows: Figure 4As shown, the top opening of the integral body 21 is connected to the cleaning channel 24 by an inclined wall 25.

[0058] Specifically, in this embodiment, an opening is provided in the integral body to increase the range of receiving the leaking liquid from the nozzle, and the inclined wall can play a guiding role to collect the liquid medicine received by the collection cup into the collection cup.

[0059] The preferred embodiment of this utility model is as follows: Figure 1 As shown, a pipe fixing component 5 is provided between the air inlet pipe 3 and the water inlet pipe 4 and the collection cup body 1.

[0060] The preferred embodiment of this utility model is as follows: Figure 1-4 As shown, the outer wall of the collection cup body 1 is provided with a liquid receiving groove 6 that communicates with the interior of the collection cup body 1.

[0061] Specifically, in this embodiment, a liquid receiving groove is provided on the outer wall of the collecting cup body, which communicates with the inside of the collecting cup body. Moreover, the length direction of the liquid receiving groove is the same as the movement trajectory of the nozzle towards the collecting cup. This allows the liquid dripping from the nozzle to be received during the movement of the nozzle towards the collecting cup, reducing the possibility of the liquid contaminating other equipment.

[0062] The above are merely preferred embodiments of the present utility model and are not intended to limit the implementation methods and protection scope of the present utility model. Those skilled in the art should realize that any equivalent substitutions and obvious changes made using the content of this specification and illustrations should be included within the protection scope of the present utility model.

Claims

1. A liquid medicine collecting cup with cleaning and blowing functions, characterized in that, include: The collection cup body has a cleaning and purging integrated component installed at its mouth. The air inlet and water inlet of the cleaning and purging integrated component are connected to the air inlet pipe and water inlet pipe, respectively. The air outlet and water outlet of the cleaning and purging integrated component face the central axis of the collection cup body.

2. The primary container according to claim 1, wherein The integrated cleaning and purging component includes: The integrated body has a longitudinally distributed cleaning layer and a purging layer, and a cleaning channel is provided on the central axis of the integrated body. The inlet of the cleaning layer is connected to the inlet pipe, and the outlet of the cleaning layer is arranged circumferentially along the inner wall of the cleaning channel and facing the central axis of the collection cup body. The air inlet of the purge layer is connected to the air inlet pipe, and the air outlet of the purge layer is arranged circumferentially along the inner wall of the cleaning channel and facing the central axis of the collection cup body.

3. The drip chamber of claim 2 wherein, The water outlet of the cleaning layer and the air outlet of the purging layer are both located on the same horizontal cross section.

4. The primary container according to claim 3, wherein The water outlets of the cleaning layer and the air outlets of the purging layer are arranged alternately.

5. The primary container according to claim 2, wherein The cleaning layer includes: A water channel is arranged around the outer wall of the integral body, and the water inlet of the water channel is connected to the water inlet pipe; Multiple water outlet channels, each water outlet channel corresponding to one water outlet and the water outlet connected to the water flow channel.

6. The primary container according to claim 2, wherein The purging layer includes: An airflow channel is arranged around the outer wall of the integral body, and the air inlet of the airflow channel is connected to the air inlet pipe; Multiple air outlet channels, each corresponding to one air outlet and connected to the air flow channel.

7. The drip chamber of claim 2 wherein, The top opening of the integral body is connected to the cleaning channel via an inclined wall.

8. The primary container according to claim 1, wherein A pipe fixing component is provided between the air inlet pipe and the water inlet pipe and the collection cup body.

9. The primary container according to claim 1, wherein The outer wall of the collection cup body is provided with a liquid receiving groove that communicates with the interior of the collection cup body.

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