A single crystal furnace cooling water pipeline system and a single crystal furnace

Abstract

The utility model provides a single crystal furnace cooling water pipeline system, including furnace cover cooling water branch, furnace body cooling water branch and furnace bottom cooling water branch, furnace cover cooling water branch, furnace body cooling water branch and furnace bottom cooling water branch at least two cooling water branch series connection of branch. The utility model has the advantages of reducing the water cooling pipeline of partial pressure, thus reducing the operation power of the water pump of providing total water pressure, and further reducing the crystal pulling power consumption of the single crystal furnace.

Description

Technical Field

[0001] This utility model belongs to the field of Czochralski single crystal technology, and in particular relates to a cooling water pipeline system for a single crystal furnace and a single crystal furnace. Background Technology

[0002] Some components of each single crystal furnace, such as the furnace body (main furnace chamber), furnace cover, and furnace bottom (main furnace chamber extension), have a double-layer structure with nested inner and outer shells. Copper electrodes are located inside the furnace bottom. The heat dissipation of these components is mainly achieved through water-cooled pipes. The pipes for the furnace body, furnace cover, and furnace bottom are located between the inner and outer shells, while the pipes for the copper electrodes are located below the copper electrodes. These pipes are connected to a water distributor, which divides the main water path into several parallel paths to dissipate heat from the furnace body, furnace cover, furnace bottom, and each copper electrode. The water distributor is connected to a water pump, which provides water pressure to allow cooling water to flow within the aforementioned structural components that require heat dissipation.

[0003] Specifically, the furnace body, furnace cover, furnace bottom, and copper electrodes each have one inlet and one outlet. Branch outlets of the water distributor correspond to each inlet, circulating within each component before flowing out through their respective outlets. Finally, the water is collected by another water distributor. All these water paths are achieved through pipes installed inside and outside these components, forming the cooling water piping system for this single-crystal furnace. This cooling water piping structure requires a high-power water pump during actual use. Summary of the Invention

[0004] In view of the above problems, this utility model provides a single crystal furnace cooling water pipeline system and a single crystal furnace to solve the above or other problems existing in the prior art.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a single crystal furnace cooling water pipeline system, including a furnace cover cooling water branch, a furnace body cooling water branch, and a furnace bottom cooling water branch, wherein at least two cooling water branches among the furnace cover cooling water branch, the furnace body cooling water branch, and the furnace bottom cooling water branch are connected in series.

[0006] Furthermore, at least two of the cooling water branches among the furnace cover cooling water branch, the furnace body cooling water branch, and the furnace bottom cooling water branch are connected in series through the first connecting pipe.

[0007] Furthermore, the furnace bottom cooling water branch includes a furnace bottom cooling pipe located inside the furnace bottom body and two furnace bottom water inlets located on the furnace bottom body, the two furnace bottom water inlets being connected to the furnace bottom cooling pipe respectively; the furnace body cooling water branch includes a furnace body cooling pipe located inside the furnace body and two furnace body water inlets located on the furnace body, the two furnace body water inlets being connected to the furnace body cooling pipe respectively; one of the furnace bottom water inlets and one of the furnace body water inlets are connected through a first connecting pipe.

[0008] Furthermore, the furnace cover cooling water branch includes a furnace cover cooling pipe located inside the furnace cover body and two furnace cover water inlets located on the furnace cover body. The two furnace cover water inlets are respectively connected to the furnace cover cooling pipe; one of the furnace cover water inlets is connected to another furnace body water inlet or another furnace bottom water inlet through a second connecting pipe.

[0009] Furthermore, the single crystal furnace cooling water piping system also includes multiple copper electrode cooling water branches, of which at least two copper electrode cooling water branches are connected in series.

[0010] Furthermore, the copper electrode cooling water branch includes an electrode cooling pipe located inside the electrode body and two electrode water inlets located at one end of the electrode body, with the two electrode water inlets respectively connected to the electrode cooling pipe; in at least two copper electrode cooling water branches, one of the electrode water inlets of one copper electrode cooling water branch is connected to one of the electrode water inlets of another copper electrode cooling water branch through a third connecting pipe.

[0011] Furthermore, the furnace bottom cooling water branch includes a furnace bottom cooling pipe located inside the furnace bottom body, a furnace bottom water inlet located on the furnace bottom body, and a furnace bottom end opening located on the side of the furnace bottom body facing the furnace body. The furnace bottom water inlet and the furnace bottom end opening are respectively connected to the furnace bottom cooling pipe. The furnace body cooling water branch includes a furnace body cooling pipe located inside the furnace body, a furnace body water inlet located on the furnace body, and a first furnace body end opening located on the side of the furnace body facing the furnace bottom. The furnace body water inlet and the first furnace body end opening are respectively connected to the furnace body cooling pipe. When the furnace bottom body and the furnace body are in contact, the furnace bottom end opening is connected to the first furnace body end opening.

[0012] Furthermore, at least a portion of the first connecting pipe along its length is a flexible structure, and the length of the first connecting pipe is not less than 4m.

[0013] Furthermore, one end of the first connecting pipe is inserted into the furnace bottom water inlet, and the other end is inserted into the furnace body water inlet.

[0014] A single crystal furnace includes a furnace cover, a furnace body, and a furnace bottom. The furnace cover is provided with a furnace cover cooling water branch in the single crystal furnace cooling water pipeline system described above. The furnace body is provided with a furnace body cooling water branch in the single crystal furnace cooling water pipeline system described above. The furnace bottom is provided with a furnace bottom cooling water branch in the single crystal furnace cooling water pipeline system described above.

[0015] By adopting the above technical solution, in the single crystal furnace cooling water pipeline system, at least two cooling water branches among the furnace cover cooling water branch, furnace body cooling water branch and furnace bottom cooling water branch are connected in series, turning three cooling water branches into two or one cooling water branch. At least two copper electrode cooling water branches among multiple copper electrode cooling water branches (the number of copper electrode cooling water branches is set to N, where N is an integer and N is greater than or equal to 2) are connected in series, turning N cooling water branches into N-1 cooling water branches. This reduces the number of water cooling pipelines with pressure division, thereby reducing the operating power of the water pump that provides the total water pressure, and thus achieving the goal of reducing the crystal pulling power consumption of the single crystal furnace. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of a single crystal furnace cooling water pipeline system according to an embodiment of the present invention;

[0017] Figure 2 This is another structural schematic diagram of the single crystal furnace cooling water pipeline system according to one embodiment of the present invention;

[0018] Figure 3 This is another structural schematic diagram of the cooling water pipeline system of a single crystal furnace according to an embodiment of the present invention.

[0019] In the diagram: 1. Furnace cover cooling water branch; 2. Furnace body cooling water branch; 3. Furnace bottom cooling water branch; 4. Inlet water distributor; 5. Outlet water distributor; 6. Copper electrode cooling water branch; 10. Furnace cover inlet; 11. Furnace cover outlet; 12. Furnace cover end opening; 13. Furnace cover flange structure; 20. Furnace body inlet; 21. Furnace body outlet; 22. Furnace body end opening; 23. Furnace body flange structure; 30. Furnace bottom inlet; 31. Furnace bottom outlet; 32. Furnace bottom end opening; 33. Furnace bottom flange structure. Detailed Implementation

[0020] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0021] Figures 1-3 The diagram shows structural schematics of some embodiments of the present invention. These embodiments all relate to a single crystal furnace cooling water pipeline system and a single crystal furnace, used to cool the single crystal furnace and electrodes during the crystal pulling process. At least two cooling water branches from the furnace cover cooling water branch, the furnace body cooling water branch, and the furnace bottom cooling water branch are connected in series, and at least two copper electrode cooling water branches from multiple copper electrode cooling water branches are connected in series. This reduces the operating power of the water pump that provides the total water pressure and reduces the crystal pulling power consumption of the single crystal furnace. The furnace bottom mentioned below is a furnace body extension section well known to those skilled in the art, and will be referred to as the furnace bottom in the following description.

[0022] A single crystal furnace cooling water piping system, such as Figure 1-3 As shown, the furnace includes a furnace cover cooling water branch 1, a furnace body cooling water branch 2, and a furnace bottom cooling water branch 3. The furnace cover cooling water branch 1 is used to cool the furnace cover, the furnace body cooling water branch 2 is used to cool the furnace body, and the furnace bottom cooling water branch 3 is used to cool the furnace bottom. At least two of the furnace cover cooling water branch 1, furnace body cooling water branch 2, and furnace bottom cooling water branch 3 are connected in series. That is, the furnace cover cooling water branch 1 and the furnace body cooling water branch 2 are connected in series, or the furnace body cooling water branch 2 and the furnace bottom cooling water branch 3 are connected in series, or the furnace cover cooling water branch 1 and the furnace bottom cooling water branch 3 are connected in series, or the furnace cover cooling water branch 1, the furnace body cooling water branch 2, and the furnace bottom cooling water branch 3 are connected in series sequentially. The connection can be selected according to actual needs.

[0023] Compared with the existing parallel connection of furnace cover cooling water branch 1, furnace body cooling water branch 2 and furnace bottom cooling water branch 3, connecting at least two cooling water branches in series among furnace cover cooling water branch 1, furnace body cooling water branch 2 and furnace bottom cooling water branch 3 reduces the number of cooling water branches with pressure division, thus reducing the operating power of the water pump that provides total water pressure, thereby reducing the crystal pulling power consumption of the single crystal furnace.

[0024] In some feasible embodiments, at least two of the following cooling water branches—furnace cover cooling water branch 1, furnace body cooling water branch 2, and furnace bottom cooling water branch 3—are connected in series via a first connecting pipe. For example... Figure 1 As shown, Figure 1 The diagram illustrates the series connection of furnace body cooling water branch 2 and furnace bottom cooling water branch 3. When connected in series, furnace bottom cooling water branch 3 includes a furnace bottom cooling pipe located inside the furnace bottom body and two furnace bottom inlets located on the furnace bottom body, each connected to the furnace bottom cooling pipe. Furnace body cooling water branch 2 includes a furnace body cooling pipe located inside the furnace body and two furnace body inlets located on the furnace body, each connected to the furnace body cooling pipe. One furnace bottom inlet is connected to the other furnace body inlet via a first connecting pipe, thus achieving the series connection of furnace body cooling water branch 2 and furnace bottom cooling water branch 3. For ease of description, the two furnace bottom inlets are defined as furnace bottom inlet 30 and furnace bottom outlet 31, and the two furnace body inlets are defined as furnace body inlet 20 and furnace body outlet 21.

[0025] Specifically, the furnace body outlet 21 of the furnace body cooling water branch 2 is connected to the furnace bottom inlet 30 of the furnace bottom cooling water branch 3 through a first connecting pipe to form a new cooling water branch. Cooling water enters from the furnace body inlet 20 of the furnace body cooling water branch 2, flows through the furnace body cooling pipe, the first connecting pipe and the furnace bottom cooling pipe, and flows out from the furnace bottom outlet 31 of the furnace bottom cooling water branch 3. Alternatively, the furnace body inlet 20 of the furnace body cooling water branch 2 is connected to the furnace bottom outlet 31 of the furnace bottom cooling water branch 3 through a first connecting pipe to form a new cooling water branch. Cooling water enters from the furnace bottom inlet 30 of the furnace bottom cooling water branch 3, flows through the furnace bottom cooling pipe, the first connecting pipe and the furnace body cooling pipe, and flows out from the furnace body outlet 21 of the furnace body cooling water branch 2. When the first connecting pipe is connected to the furnace bottom inlet and the furnace body inlet, one end of the first connecting pipe is inserted into the furnace bottom inlet, and the other end is inserted into the furnace body inlet. Specifically, one end of the first connecting pipe is connected to the furnace bottom inlet via a pagoda connector, and the other end of the first connecting pipe is connected to the furnace body inlet via a pagoda connector. This ensures that the first connecting pipe will disconnect from the pagoda connector when subjected to external pulling force, preventing breakage or damage to the first connecting pipe. This extends the service life of the first connecting pipe and keeps the interface of the first connecting pipe functional, allowing operators to quickly reconnect the first connecting pipe to the furnace body inlet or the furnace bottom inlet in case of emergency.

[0026] When the furnace cover cooling water branch 1 is connected in series with the furnace body cooling water branch 2 or the furnace bottom cooling water branch 3, the furnace cover cooling water branch 1 includes a furnace cover cooling pipe located inside the furnace cover body and two furnace cover water inlets located on the furnace cover body. The two furnace cover water inlets are respectively connected to the furnace cover cooling pipe. One of the furnace cover water inlets is connected to the other furnace body water inlet or the other furnace bottom water inlet through a second connecting pipe, thereby realizing the series connection of the furnace cover cooling water branch 1 with the furnace body cooling water branch 2 or the series connection of the furnace cover cooling water branch 1 with the furnace bottom cooling water branch 3. For ease of description, the two furnace cover water inlets are defined as the furnace cover inlet 10 and the furnace cover outlet 11.

[0027] Specifically, when the furnace cover cooling water branch 1 and the furnace body cooling water branch 2 are connected in series, the furnace cover outlet 11 of the furnace cover cooling water branch 1 is connected to the furnace body inlet 20 of the furnace body cooling water branch 2 through the second connecting pipe to form a new cooling water branch. Cooling water enters from the furnace cover inlet 10 of the furnace cover cooling water branch 1, flows through the furnace cover cooling pipe, the second connecting pipe and the furnace body cooling pipe, and flows out from the furnace body outlet 21 of the furnace body cooling water branch 2. Alternatively, the furnace cover inlet 10 of the furnace cover cooling water branch 1 is connected to the furnace body outlet 21 of the furnace body cooling water branch 2 through the second connecting pipe to form a new cooling water branch. Cooling water enters from the furnace body inlet 20 of the furnace body cooling water branch 2, flows through the furnace body cooling pipe, the second connecting pipe and the furnace cover cooling pipe, and flows out from the furnace cover outlet 11 of the furnace cover cooling water branch 1. When the second connecting pipe is connected to the furnace cover water inlet and the furnace body water inlet, one end of the second connecting pipe is inserted into the furnace cover water inlet, and the other end is inserted into the furnace body water inlet. Specifically, one end of the second connecting pipe is connected to the furnace cover water inlet via a pagoda connector, and the other end of the second connecting pipe is connected to the furnace body water inlet via a pagoda connector. This ensures that the second connecting pipe will disconnect from the pagoda connector when subjected to external pulling force, preventing breakage or damage to the second connecting pipe and extending its service life.

[0028] When the furnace cover cooling water branch 1 and the furnace bottom cooling water branch 3 are connected in series, the furnace cover outlet 11 of the furnace cover cooling water branch 1 is connected to the furnace bottom inlet 30 of the furnace bottom cooling water branch 3 through the second connecting pipe, forming a new cooling water branch. Cooling water enters from the furnace cover inlet 10 of the furnace cover cooling water branch 1, flows through the furnace cover cooling pipe, the second connecting pipe and the furnace bottom cooling pipe, and flows out from the furnace bottom outlet 31 of the furnace bottom cooling water branch 3. Alternatively, the furnace cover inlet 10 of the furnace cover cooling water branch 1 is connected to the furnace bottom outlet 31 of the furnace bottom cooling water branch 3 through the second connecting pipe, forming a new cooling water branch. Cooling water enters from the furnace bottom inlet 30 of the furnace bottom cooling water branch 3, flows through the furnace bottom cooling pipe and the furnace cover cooling pipe, and flows out from the furnace cover outlet 11 of the furnace cover cooling water branch 1. When the second connecting pipe is connected to the furnace cover water inlet and the furnace bottom water inlet, one end of the second connecting pipe is inserted into the furnace cover water inlet, and the other end is inserted into the furnace bottom water inlet. Specifically, one end of the second connecting pipe is connected to the furnace cover water inlet via a pagoda connector, and the other end of the second connecting pipe is connected to the furnace bottom water inlet via a pagoda connector. This ensures that the second connecting pipe will disconnect from the pagoda connector when subjected to external pulling force, preventing breakage or damage to the second connecting pipe and extending its service life.

[0029] When the furnace cover cooling water branch 1, the furnace body cooling water branch 2, and the furnace bottom cooling water branch 3 are connected in series, the outlet of the furnace cover cooling water branch 1 is connected to the inlet of the furnace body cooling water branch 2 through a second connecting pipe, and the outlet of the furnace body cooling water branch 2 is connected to the inlet of the furnace bottom cooling water branch 3 through a first connecting pipe, forming a new cooling water branch. Cooling water enters from the furnace cover inlet 10 of the furnace cover cooling water branch 1, flows through the furnace cover cooling pipe, the second connecting pipe, the furnace body cooling pipe, the first connecting pipe, and the furnace bottom cooling pipe, and exits from the furnace bottom cooling water branch 3. The water flows out from the bottom outlet 31 of the cooling water branch 3, or the inlet of the furnace cover cooling water branch 1 is connected to the outlet of the furnace body cooling water branch 2 through the second connecting pipe, and the inlet of the furnace body cooling water branch 2 is connected to the outlet of the bottom cooling water branch 3 through the first connecting pipe, forming a new cooling water branch. The cooling water enters from the bottom inlet 30 of the bottom cooling water branch 3, flows through the bottom cooling pipe, the first connecting pipe, the furnace body cooling pipe, the second connecting pipe and the furnace cover cooling pipe, and flows out from the furnace cover outlet 11 of the furnace cover cooling water branch 1.

[0030] Both the first and second connecting pipes mentioned above are rubber hoses. The material of the first and second connecting pipes is rubber, so that both the first and second connecting pipes can be bent. The pipe diameter is 3 / 4 inch, which are commercially available products. The selection should be made according to actual needs, and no specific requirements are made here.

[0031] Both the first and second connecting pipes mentioned above have at least a flexible structure along their length, so that both the first and second connecting pipes can be bent. Specifically, the structure of the first and second connecting pipes can be a structure in which metal pipes and rubber pipes are spaced apart along the length and interlocked. For example, the part of the first connecting pipe near the furnace body and the furnace bottom body uses a metal pipe of the same material as the water inlet to achieve a fixed connection with the water inlet, and a rubber pipe is inserted between the two metal pipes.

[0032] The lengths of the first and second connecting pipes mentioned above are both no less than 4m, so that when the single crystal furnace is disassembled, the lengths of the first and second connecting pipes can meet the requirements for separating the furnace cover, furnace body and furnace bottom. The furnace cover, furnace body and furnace bottom can also be separated without disassembling the first or second connecting pipes.

[0033] When the furnace body and the furnace bottom body are separated, the first connecting pipe may be in an extended state and is easily pulled by external forces from people or equipment passing by. One end of the first connecting pipe is connected to the furnace bottom water inlet through a pagoda connector, and the other end is connected to the furnace body water inlet through a pagoda connector. This allows the first connecting pipe to disconnect from the pagoda connector when it is pulled by external forces. At this time, the interface of the first connecting pipe remains functional so that the operator can quickly reconnect the first connecting pipe to the furnace body water inlet or the furnace bottom water inlet in an emergency.

[0034] In some other feasible embodiments, when at least two of the cooling water branches in the furnace cover cooling water branch 1, the furnace body cooling water branch 2, and the furnace bottom cooling water branch 3 are connected in series, they are not connected through external pipelines, so as to simplify the overall cooling water branch connection structure of the single crystal furnace, such as... Figure 2 and Figure 3 As shown, Figure 2 This shows the case where the furnace body cooling water branch 2 and the furnace bottom cooling water branch 3 are connected in series. Figure 3 The diagram shows the connection of furnace body cooling water branch 2 and furnace cover cooling water branch 1 in series.

[0035] In these embodiments, the furnace bottom cooling water branch 3 includes a furnace bottom cooling pipe disposed inside the furnace bottom body, a furnace bottom water inlet disposed on the furnace bottom body, and a furnace bottom end opening 32 disposed on the side of the furnace bottom body facing the furnace body. The furnace bottom water inlet and the furnace bottom end opening 32 are respectively connected to the furnace bottom cooling pipe. The furnace bottom end opening 32 is disposed on the furnace bottom flange structure 33 of the furnace bottom body. The furnace body cooling water branch 2 includes a furnace body cooling pipe disposed inside the furnace body body, a furnace body water inlet disposed on the furnace body body, and a furnace bottom end opening 32 disposed on the side of the furnace body facing the furnace bottom. The furnace body end opening 22 (i.e., the first furnace body end opening) is located on the furnace body flange structure 23 at the end of the furnace body facing the furnace bottom. When the furnace body body and the furnace bottom body abut against each other, the furnace bottom flange structure 33 abuts against the furnace body flange structure 23 at the end of the furnace body facing the furnace bottom. The furnace bottom end opening 32 is connected to the furnace body end opening 22, realizing the series connection of the furnace bottom cooling water branch 3 and the furnace body cooling water branch 2.

[0036] Specifically, the aforementioned furnace bottom cooling water branch 3 is installed on the furnace bottom. The furnace bottom includes a furnace bottom body and a furnace bottom flange structure 33 located at the end of the furnace bottom body facing the furnace body. The furnace bottom water inlet and the furnace bottom cooling pipe are both installed on the furnace body. The furnace bottom end opening 32 is located on the furnace bottom flange structure 33. The furnace bottom body includes an inner furnace bottom shell and an outer furnace bottom shell, with a gap between them. The furnace bottom cooling pipe is fixedly installed within the gap between the inner and outer furnace bottom shells. The method of fixing the furnace bottom cooling pipe within the gap between the inner and outer furnace bottom shells is existing technology and is not specifically required here. A through hole is opened at a corresponding position on the outer furnace bottom shell to form a furnace bottom water inlet, which is connected and communicates with the furnace bottom cooling pipe.

[0037] A furnace bottom flange structure 33 is provided at the end of the inner shell facing the furnace body and the end of the outer shell facing the furnace body to seal the corresponding ends of the inner shell and the outer shell. The furnace bottom flange structure 33 is arranged along the circumferential direction of the inner shell, that is, the furnace bottom flange structure 33 is a ring structure. The inner diameter of the furnace bottom flange structure 33 is adapted to the radial dimension of the inner shell, and the outer diameter of the furnace bottom flange structure 33 is larger than the radial dimension of the outer shell, so that the outer peripheral side of the furnace bottom flange structure 33 protrudes from the outer shell. The cross-sectional shape of the furnace bottom flange structure 33 is preferably square. Along the axial direction of the inner shell of the furnace bottom, a furnace bottom end opening 32 is provided on the end face of the furnace bottom flange structure 33 that is not connected to the inner shell and outer shell of the furnace bottom. The furnace bottom end opening 32 is a through hole that passes through the furnace bottom flange structure 33. The furnace bottom end opening 32 is connected and communicates with the furnace bottom cooling pipe and is used to connect with the furnace body cooling water branch 2. The furnace bottom water inlet, the furnace bottom cooling pipe and the furnace bottom end opening 32 form a cooling water flow channel.

[0038] The aforementioned furnace cooling water branch 2 is installed on the furnace body. The furnace body includes the furnace body itself and the furnace body flange structure 23 located at both ends of the furnace body axially. The furnace body cooling pipe is located inside the furnace body. The furnace body water inlet and the furnace body cooling pipe are both located on the furnace body. The furnace body end opening 22 is located on the furnace body flange structure 23. The number and location of the furnace body end opening 22 are selected according to whether the furnace body cooling water branch 2 is connected to the furnace cover cooling water branch 1 and / or the furnace bottom cooling water branch 3, so as to realize different series cooling water branches.

[0039] The aforementioned furnace body includes an inner shell and an outer shell, with a gap between them. The furnace cooling pipes are fixedly installed within this gap. The method by which these cooling pipes are wound and fixed within the gap is existing technology and is not specifically required here. A through hole is made at a corresponding position on the outer shell to form a furnace water inlet, which is connected and communicates with the furnace cooling pipes.

[0040] Furnace body flange structures 23 are respectively provided at both ends of the inner shell and the outer shell of the furnace body to seal the corresponding ends of the inner shell and the outer shell of the furnace body. The furnace body flange structure 23 is arranged along the circumferential direction of the inner shell of the furnace body, that is, the furnace body flange structure 23 is a ring structure. The inner diameter of the furnace body flange structure 23 is adapted to the radial dimension of the inner shell of the furnace body, and the outer diameter of the furnace body flange structure 23 is larger than the radial dimension of the outer shell of the furnace body, so that the outer peripheral side of the furnace body flange structure 23 protrudes from the outer shell of the furnace body. The cross-sectional shape of the furnace body flange structure 23 is preferably square. Along the axial direction of the inner shell of the furnace, a furnace end opening 22 is provided on the end face of the furnace flange structure 23 that is not connected to the inner shell and outer shell of the furnace. (One furnace end opening 22 is provided on the end face of the furnace flange structure 23 facing the furnace bottom. For ease of description, this furnace end opening 22 is defined as the first furnace end opening. Another furnace flange structure 23 has a furnace end opening 22 on the end face of the furnace cover. For ease of description, this furnace end opening 22 is defined as the second furnace end opening.) The furnace end opening 22 is a through hole that passes through the furnace flange structure 23. The furnace end opening 22 is connected and communicates with the furnace cooling pipe. The furnace water inlet, the furnace cooling pipe and the furnace end opening 22 form a cooling water flow channel.

[0041] The aforementioned furnace cover includes a furnace cover body and a furnace cover flange structure 13 located at the end of the furnace cover body. The furnace cover cooling pipes are located inside the furnace cover body. Both the furnace cover inlet and the furnace cover cooling pipes are located on the furnace cover body. The furnace cover end opening 12 is located on the furnace cover flange structure 13. The aforementioned furnace cover body includes an inner furnace cover shell and an outer furnace cover shell, with a gap between them. The furnace cover cooling pipes are fixedly installed within this gap. The method of fixing the furnace cover cooling pipes within the gap is existing technology and is not specifically required here. A through hole is opened at a corresponding position on the furnace cover shell to form a furnace cover inlet, which is connected and communicates with the furnace cover cooling pipes.

[0042] A furnace cover flange structure 13 is provided at the corresponding free ends of the inner and outer shells of the furnace cover to seal the corresponding ends of the inner and outer shells. The furnace cover flange structure 13 is arranged along the circumferential direction of the inner shell, that is, the furnace cover flange structure 13 is a ring structure. The inner diameter of the furnace cover flange structure 13 is adapted to the radial dimension of the inner shell, and the outer diameter of the furnace cover flange structure 13 is larger than the radial dimension of the outer shell, so that the outer peripheral side of the furnace cover flange structure 13 protrudes from the outer shell. The cross-sectional shape of the furnace cover flange structure 13 is preferably square. Along the axial direction of the inner shell, a furnace cover end opening 12 is provided on the end face of the furnace cover flange structure 13 that is not connected to the inner and outer shells. The furnace cover end opening 12 is a through hole that passes through the furnace cover flange structure 13. The furnace cover end opening 12 is connected and communicates with the furnace cover cooling pipe. The furnace cover water inlet, the furnace cover cooling pipe, and the furnace cover end opening 12 form a cooling water flow channel.

[0043] The inner and outer diameters of the aforementioned furnace cover flange structure 13, furnace body flange structure 23, and furnace bottom flange structure 33 are all the same, so that the furnace cover, furnace body, and furnace bottom can be assembled to form a single crystal furnace structure.

[0044] In this structure, the furnace cover cooling water branch 1 and the furnace bottom cooling water branch 3 cannot be connected in series. The furnace cover cooling water branch 1 and the furnace body cooling water branch 2 are connected in series, or the furnace body cooling water branch 2 and the furnace bottom cooling water branch 3 are connected in series, or the furnace cover cooling water branch 1, the furnace body cooling water branch 2 and the furnace bottom cooling water branch 3 are connected in series sequentially.

[0045] When the furnace bottom cooling water branch 3 is connected in series with the furnace body cooling water branch 2, that is, when the furnace bottom flange structure 33 abuts against the furnace body flange structure 23 facing the furnace bottom end on the furnace body, the furnace bottom end opening 32 is connected to the furnace body end opening 22 (first furnace body end opening) on ​​the furnace body flange structure 23 facing the furnace bottom end on the furnace body. Under this series structure, the furnace body flange structure 23 facing the furnace cover end on the furnace body does not have a furnace body end opening 22.

[0046] When the furnace cover cooling water branch 1 and the furnace body cooling water branch 2 are connected in series, that is, when the furnace cover flange structure 13 abuts against the furnace body flange structure 23 facing the furnace cover end on the furnace body, the furnace cover end opening 12 is connected to the furnace body end opening 22 (second furnace body end opening) on ​​the furnace body flange structure 23 facing the furnace cover end on the furnace body. Under this series structure, the furnace body flange structure 23 facing the furnace bottom end on the furnace body does not have a furnace body end opening 22.

[0047] When the furnace cover cooling water branch 1, the furnace bottom cooling water branch 3, and the furnace body cooling water branch 2 are connected in series, that is, when the furnace bottom flange structure 33 abuts against the furnace body flange structure 23 facing the furnace bottom on the furnace body, and the furnace cover flange structure 13 abuts against the furnace body flange structure 23 facing the furnace cover on the furnace body, the furnace bottom end opening 32 is connected to the furnace body end opening 22 (first furnace body end opening) on ​​the furnace body flange structure 23 facing the furnace bottom on the furnace body, and the furnace cover end opening 12 is connected to the furnace body end opening 22 (second furnace body end opening) on ​​the furnace body flange structure 23 facing the furnace cover on the furnace body. Under this series structure, both furnace body flange structures 23 on the furnace body are provided with furnace body end openings 22.

[0048] When the furnace cover, furnace body, and furnace bottom are installed, the furnace cover flange structure 13 fits tightly with the corresponding furnace body flange structure 23, and the furnace bottom flange structure 33 fits tightly with the corresponding furnace body flange structure 23. A sealing ring is set at the contact point between the furnace bottom end opening 32 and the furnace body end opening 22, and a sealing ring is set at the contact point between the furnace cover end opening 12 and the furnace body end opening 22. Alternatively, the furnace bottom end opening 32 and the furnace body end opening 22 are plugged in, and the furnace cover end opening 12 and the furnace body end opening 22 are plugged in, so as to ensure that there is no leakage at the connection point between the furnace cover end opening 12 and the corresponding furnace body end opening 22, and no leakage at the connection point between the furnace bottom end opening 32 and the corresponding furnace body end opening 22, so as to ensure the normal operation of the single crystal furnace.

[0049] In a further optimized version, the cooling water piping system of the single crystal furnace also includes multiple copper electrode cooling water branches 6. The copper electrode cooling water branches 6 are used to cool the copper electrodes. At least two of the multiple copper electrode cooling water branches 6 are connected in series. It can be two copper electrode cooling water branches 6 connected in series, or three copper electrode cooling water branches 6 connected in series, or four copper electrode cooling water branches 6 connected in series, depending on the actual needs.

[0050] The copper electrode cooling water branch 6 includes an electrode cooling pipe located inside the electrode body and two electrode inlets located at one end of the electrode body. The two electrode inlets are respectively connected to the electrode cooling pipe. In at least two copper electrode cooling water branches 6, one electrode inlet of one copper electrode cooling water branch 6 is connected to one electrode inlet of another copper electrode cooling water branch 6 via a third connecting pipe. For ease of description, the two electrode inlets are defined as an inlet and an outlet, respectively. When two copper electrode cooling water branches 6 are connected in series via a third connecting pipe, the outlet of the first copper electrode cooling water branch 6 and the inlet of the second copper electrode cooling water branch 6 are connected through the third connecting pipe. Cooling water enters the electrode cooling pipe from the inlet of the first copper electrode cooling water branch 6, flows out from the outlet of the first copper electrode cooling water branch 6, passes through the third connecting pipe and the inlet of the second copper electrode cooling water branch 6, enters the electrode cooling pipe inside the second copper electrode, and flows out from the outlet of the second copper electrode cooling water branch 6, forming a new cooling water branch. This process is similar for connecting multiple copper electrode cooling water branches 6 in series. The number of copper electrode cooling water branches 6 connected in series is selected according to actual needs and is not specifically required here.

[0051] The third connecting pipe mentioned above is a rubber hose, a commercially available product. It should be selected according to actual needs, and no specific requirements are given here.

[0052] In some other feasible embodiments, the furnace cover cooling water branch 1, the furnace body cooling water branch 2, and the furnace bottom cooling water branch 3 are connected in series to form a first series branch, and multiple copper electrode cooling water branches 6 are connected in series to form a second series branch. The first series branch and the second series branch are connected in series, that is, the furnace cover cooling water branch 1, the furnace body cooling water branch 2, the furnace bottom cooling water branch 3, and multiple copper electrode cooling water branches 6 are connected in series in sequence to form a cooling water branch.

[0053] In a further optimized version, the cooling water pipeline system of the single crystal furnace also includes an inlet water distributor 4, which is connected to the inlet of each non-connected cooling water branch. The cooling water from the main inlet pipeline enters each non-connected cooling water branch through the inlet water distributor 4.

[0054] The cooling water pipeline system of the single crystal furnace also includes a water outlet distributor 5, which is connected to the outlet of each non-connected cooling water branch. The cooling water from each non-connected cooling water branch enters the main water outlet pipeline through the water outlet distributor 5.

[0055] The following is a specific embodiment for illustration.

[0056] In this embodiment, as Figure 1As shown, the furnace body cooling water branch 2 and the furnace bottom cooling water branch 3 are connected in series. There are four copper electrode cooling water branches 6, which are connected in series. In this case, the single crystal furnace cooling water pipeline system has three cooling water branches: the furnace cover cooling water branch 1, the furnace body cooling water branch 2 and the furnace bottom cooling water branch 3 connected in series, and the four copper electrode cooling water branches 6 connected in series. For ease of description, the furnace cover cooling water branch 1 is referred to as branch A, the furnace body cooling water branch 2 and the furnace bottom cooling water branch 3 connected in series are referred to as branch B, and the four copper electrode cooling water branches 6 connected in series are referred to as branch C. The inlets of branch A, branch B and branch C are respectively connected to the inlet water separator 4, and the outlets of branch A, branch B and branch C are respectively connected to the outlet water separator 5.

[0057] In this structure, the cooling water piping system of the single crystal furnace has both series-connected cooling water branches (such as the furnace body cooling water branch 2 and furnace bottom cooling water branch 3 connected in series in branch B, and the four copper electrode cooling water branches 6 connected in series in branch C) and parallel-connected cooling water branches (such as branch A, branch B and branch C), which reduces the pressure-dividing water cooling pipes, reduces the operating power of the water pump that provides the total water pressure, and reduces the crystal pulling power consumption of the single crystal furnace.

[0058] A single crystal furnace includes a furnace cover, a furnace body, and a furnace bottom. The furnace cover is provided with a furnace cover cooling water branch in the single crystal furnace cooling water pipeline system described above. The furnace body is provided with a furnace body cooling water branch in the single crystal furnace cooling water pipeline system described above. The furnace bottom is provided with a furnace bottom cooling water branch in the single crystal furnace cooling water pipeline system described above.

[0059] By adopting the above technical solution, in the single crystal furnace cooling water pipeline system, at least two cooling water branches among the furnace cover cooling water branch, furnace body cooling water branch and furnace bottom cooling water branch are connected in series, turning three cooling water branches into two or one cooling water branch. At least two copper electrode cooling water branches among multiple copper electrode cooling water branches (the number of copper electrode cooling water branches is set to N, where N is an integer and N is greater than or equal to 2) are connected in series, turning N cooling water branches into N-1 cooling water branches. This reduces the number of water cooling pipelines with pressure division, thereby reducing the operating power of the water pump that provides the total water pressure, and thus achieving the goal of reducing the crystal pulling power consumption of the single crystal furnace.

[0060] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A cooling water piping system for a single crystal furnace, characterized in that: It includes a furnace cover cooling water branch, a furnace body cooling water branch, and a furnace bottom cooling water branch, wherein at least two of the furnace cover cooling water branch, the furnace body cooling water branch, and the furnace bottom cooling water branch are connected in series.

2. The single crystal furnace cooling water piping system according to claim 1, characterized in that: At least two of the cooling water branches, namely the furnace cover cooling water branch, the furnace body cooling water branch, and the furnace bottom cooling water branch, are connected in series via a first connecting pipe.

3. The single crystal furnace cooling water piping system according to claim 2, characterized in that: The furnace bottom cooling water branch includes a furnace bottom cooling pipe located inside the furnace bottom body and two furnace bottom water inlets located on the furnace bottom body, with the two furnace bottom water inlets respectively connected to the furnace bottom cooling pipe; the furnace body cooling water branch includes a furnace body cooling pipe located inside the furnace body and two furnace body water inlets located on the furnace body, with the two furnace body water inlets respectively connected to the furnace body cooling pipe; one of the furnace bottom water inlets and one of the furnace body water inlets are connected through the first connecting pipe.

4. The single crystal furnace cooling water pipeline system according to claim 3, characterized in that: The furnace cover cooling water branch includes a furnace cover cooling pipe located inside the furnace cover body and two furnace cover water inlets located on the furnace cover body. The two furnace cover water inlets are respectively connected to the furnace cover cooling pipe. One of the furnace cover water inlets is connected to another furnace body water inlet or another furnace bottom water inlet via a second connecting pipe.

5. The single crystal furnace cooling water piping system according to any one of claims 1-4, characterized in that: The single crystal furnace cooling water pipeline system also includes multiple copper electrode cooling water branches, of which at least two are connected in series.

6. The single crystal furnace cooling water piping system according to claim 5, characterized in that: The copper electrode cooling water branch includes an electrode cooling pipe located inside the electrode body and two electrode water inlets located at one end of the electrode body. The two electrode water inlets are respectively connected to the electrode cooling pipe. In at least two copper electrode cooling water branches, one electrode water inlet of one copper electrode cooling water branch is connected to one electrode water inlet of another copper electrode cooling water branch through a third connecting pipe.

7. The cooling water piping system for a single crystal furnace according to claim 1, characterized in that: The furnace bottom cooling water branch includes a furnace bottom cooling pipe located inside the furnace bottom body, a furnace bottom water inlet located on the furnace bottom body, and a furnace bottom end opening located on the side of the furnace bottom body facing the furnace body. The furnace bottom water inlet and the furnace bottom end opening are respectively connected to the furnace bottom cooling pipe. The furnace body cooling water branch includes a furnace body cooling pipe located inside the furnace body, a furnace body water inlet located on the furnace body, and a first furnace body end opening located on the side of the furnace body facing the furnace bottom. The furnace body water inlet and the first furnace body end opening are respectively connected to the furnace body cooling pipe. When the furnace bottom body abuts against the furnace body, the furnace bottom end opening is connected to the first furnace body end opening.

8. The single crystal furnace cooling water piping system according to claim 3, characterized in that: At least a portion of the first connecting pipe along its length is a flexible structure, and the length of the first connecting pipe is not less than 4m.

9. The single crystal furnace cooling water piping system according to claim 8, characterized in that: One end of the first connecting pipe is inserted into the bottom water inlet of the furnace, and the other end is inserted into the water inlet of the furnace body.

10. A single crystal furnace, comprising a furnace lid, a furnace body, and a furnace bottom, characterized in that: The furnace cover is provided with a furnace cover cooling water branch in the single crystal furnace cooling water pipeline system as described in any one of claims 1-9, the furnace body is provided with a furnace body cooling water branch in the single crystal furnace cooling water pipeline system as described in any one of claims 1-9, and the furnace bottom is provided with a furnace bottom cooling water branch in the single crystal furnace cooling water pipeline system as described in any one of claims 1-9.

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