A tray lifting device for a vacuum transfer chamber

Abstract

The utility model discloses a tray elevating gear for vacuum conveying cavity, including elevating system and sliding magnet subassembly, sliding magnet subassembly sets up in vacuum conveying cavity, and is used for bearing sample tray, elevating system includes the screw rod drive subassembly and first magnet of setting in the inside of vacuum conveying cavity and sets up the bottom outside motor assembly of vacuum conveying cavity, and the output end sealed of motor assembly is through the bottom of vacuum conveying cavity and is connected with screw rod drive subassembly behind, first magnet sets up on screw rod drive subassembly, first magnet and sliding magnet subassembly are mutually attracted through magnetic force coupling effect, to carry out synchronous movement, and then realize that screw rod drive subassembly drives sample tray elevating. The utility model has compact structure, convenient operation, high security and no leakage etc. characteristics, are favorable to keep the vacuum cleanliness in vacuum conveying cavity.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and specifically to a tray lifting device for a vacuum transfer cavity. Background Technology

[0002] Molecular beam epitaxy (MBE) achieves atomic-level precision epitaxial growth using molecular beams in ultra-high vacuum environments, making it particularly suitable for the fabrication of ultrathin layers (such as quantum dots) and low-defect materials. However, its growth rate is low (typically <1 μm / h) and equipment maintenance costs are high, making it difficult to meet the demands of industrial mass production. Metal-organic chemical vapor deposition (MOCVD) efficiently deposits compound semiconductor thin films through pyrolysis reactions, achieving growth rates of 0.05–3 μm / min, and is widely used in the large-scale production of LEDs and laser diodes. For example, AMEC's ​​PRISMO series equipment has enabled the industrialization of GaN-based LEDs through high-precision gas control. However, MOCVD has limitations in interface control precision and impurity residue, restricting its application in advanced devices. By integrating MBE and MOCVD into a multi-cavity system, synergistic effects of "precise interface growth" and "efficient bulk material deposition" can be achieved within the same system. For example, the MBE chamber is used for atomic-level manipulation of quantum well structures, while the MOCVD chamber completes the rapid deposition of thick materials, thus balancing R&D flexibility with mass production efficiency. Through technological integration and industry chain collaboration, the MBE+MOCVD multi-cavity system is expected to become a landmark equipment for next-generation semiconductor manufacturing, supporting breakthroughs in cutting-edge fields such as quantum computing and MicroLED.

[0003] In existing MOCVD and MBE interconnected transfer chambers, the tray lifting device is mainly located on the outer bottom of the transfer chamber. The connecting shaft at the bottom of the sample tray extends through the outside of the transfer chamber and is sealed to the lifting device via a welded bellows to isolate the vacuum environment of the transfer chamber from the atmosphere. When the lifting device drives the welded bellows to extend or retract, the sample tray is lifted or lowered. The main defects of the existing pallet lifting device are: (1) The cost of welded corrugated pipe is expensive, and the welded corrugated pipe and the cavity wall of the transfer chamber need to be connected by flange, which increases the risk of leakage; (2) The connecting shaft at the bottom of the sample tray is too long and will tilt, resulting in inaccurate positioning and friction damage to the corrugated pipe; (3) The growth surface of the MOCVD system faces upward, and the distance between the growth surface and the ground is within the range of convenient manual operation (generally around 1100mm), while the growth surface of the MBE system faces downward, and the source furnace sprays various elements from the growth chamber diagonally downward to the top, so there is a certain height difference between the growth surfaces of the two. For large-sized equipment, the height difference between the two is too large. If the previous corrugated pipe lifting mechanism is still used, then the ground below the lifting mechanism needs to be dug into a pit, otherwise it will interfere with the ground. However, the location of many equipment is under a hollow layer, which is not easy to dig into a pit and the pit part is not easy to maintain. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a tray lifting device for vacuum transfer chamber that is compact in structure, easy to operate, and has high specifications and no leakage, in order to overcome the shortcomings of the existing technology.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: A tray lifting device for a vacuum transfer chamber includes a lifting mechanism and a sliding magnet assembly. The sliding magnet assembly is disposed inside the vacuum transfer chamber and is used to support a sample tray. The lifting mechanism includes a lead screw drive assembly and a first magnet disposed inside the vacuum transfer chamber, and a motor assembly disposed on the bottom outer side of the vacuum transfer chamber. The output end of the motor assembly is sealed through the bottom of the vacuum transfer chamber and connected to the lead screw drive assembly. The first magnet is disposed on the lead screw drive assembly. The first magnet and the sliding magnet assembly attract each other through magnetic coupling to achieve synchronous movement, thereby enabling the lead screw drive assembly to drive the sample tray to lift and lower.

[0006] As a further improvement of this utility model, the sliding magnet assembly includes a second magnet, a support frame, and a claw. The second magnet and the claw are both disposed on the support frame. The claw is used to support the sample tray. The first magnet and the second magnet attract each other through magnetic coupling to move synchronously.

[0007] As a further improvement of this utility model, one end of the claw is connected and fixed to the support frame, and the other end of the claw extends toward the center of the support frame to support the sample tray.

[0008] As a further improvement of this utility model, the first magnet is located above the second magnet, and the height of the second magnet is greater than the height of the claw.

[0009] As a further improvement of this utility model, the bottom of the support frame is also provided with a plurality of guide pulleys, which roll along the inner wall of the vacuum transfer chamber to assist in the lifting and lowering of the support frame.

[0010] As a further improvement of this utility model, the lead screw drive assembly includes a lead screw, a lead screw nut, a first mounting base, a second mounting base, and a support plate; the first mounting base and the second mounting base are respectively installed at the top and bottom of the vacuum transmission chamber, and the two ends of the lead screw are respectively connected to the first mounting base and the second mounting base; the output end of the motor assembly is sealed through the bottom of the vacuum transmission chamber and connected to the lead screw; the lead screw is connected to the support plate through the lead screw nut, and the first magnet is fixed on the support plate; when the motor assembly drives the lead screw to rotate, the lead screw nut drives the support plate to reciprocate up and down, thereby realizing that the first magnet drives the second magnet to reciprocate up and down.

[0011] As a further improvement of this utility model, the lead screw drive assembly also includes a guide shaft and a linear bearing. The two ends of the guide shaft are respectively connected to the first mounting base and the second mounting base, and the guide shaft is connected to the support plate through the linear bearing.

[0012] As a further improvement of this utility model, bearings are provided at the connection points between both ends of the lead screw and the first and second mounting seats.

[0013] As a further improvement of this utility model, both the first magnet and the second magnet are neodymium iron boron magnets.

[0014] Compared with the prior art, the advantages of this utility model are: This invention relates to a tray lifting device for a vacuum transfer chamber. A sliding magnet assembly is installed inside the vacuum transfer chamber to support the sample tray. A motor assembly is positioned on the bottom outer side of the vacuum transfer chamber, with its output end sealed through the bottom of the chamber and connected to a lead screw drive assembly. A first magnet is mounted on the lead screw drive assembly. The first magnet and the sliding magnet assembly attract each other through magnetic coupling, achieving synchronous movement. This enables the lead screw drive assembly to lift and lower the sample tray. Magnetic coupling offers advantages such as avoiding lubrication leakage, reducing friction and wear, high sealing reliability, simplified maintenance, and compatibility. It eliminates the need for periodic lubricant or seal replacement, reducing downtime. Furthermore, magnetic coupling better adapts to vacuum thermal deformation. Temperature fluctuations in the vacuum transfer chamber can affect component dimensions; the non-contact design reduces the risk of jamming due to thermal expansion. Attached Figure Description

[0015] Figure 1 This is a schematic diagram illustrating the structural principle of the pallet lifting device in a specific embodiment of this utility model; Figure 2 This is a schematic diagram of the structural principle of the sliding magnet assembly in a specific embodiment of this utility model.

[0016] Legend: 1. Lifting mechanism; 101. Guide shaft; 102. Linear bearing; 103. Lead screw; 104. Lead screw nut; 105. First magnet; 106. First mounting base; 107. Second mounting base; 108. Motor assembly; 109. Support plate; 2. Sliding magnet assembly; 201. Second magnet; 202. Fixing ring; 203. Support frame; 204. Claw; 205. Guide pulley; 100. Vacuum transfer chamber; 200. Sample tray; 300. Transfer inlet; 400. Transfer outlet; 500. Slide valve. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and specific preferred embodiments, but this does not limit the scope of protection of the present invention.

[0018] In the description of this utility model, it should be understood that the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0019] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0020] Example like Figure 1 and Figure 2 As shown, the tray lifting device for a vacuum transfer chamber of this utility model includes a lifting mechanism 1 and a sliding magnet assembly 2. The sliding magnet assembly 2 is disposed inside the vacuum transfer chamber 100 and is used to support the sample tray 200. There is a height difference between the transfer inlet 300 and the transfer outlet 400 of the vacuum transfer chamber 100. Both the transfer inlet 300 and the transfer outlet 400 are equipped with gate valves 500 to ensure that the vacuum transfer chamber 100 maintains a high vacuum state, and the gate valves 500 can operate normally in an environment of 200°C. After the sample tray 200 has been loaded with wafers in the vacuum transfer chamber 100, the lifting mechanism 1 raises the sample tray 200 to the height position of the transfer outlet 400. The lifting mechanism 1 includes a lead screw drive assembly and a first magnet 105 disposed inside the vacuum transfer chamber 100, and a motor assembly 108 disposed on the bottom outer side of the vacuum transfer chamber 100. The output end of the motor assembly 108 is sealed through the bottom of the vacuum transfer chamber 100 and connected to the lead screw drive assembly. The first magnet 105 is disposed on the lead screw drive assembly. The first magnet 105 and the sliding magnet assembly 2 attract each other through magnetic coupling to perform synchronous movement, thereby realizing the lifting and lowering of the sample tray 200 driven by the lead screw drive assembly.

[0021] In this embodiment, magnetic coupling motion offers advantages such as avoiding lubrication leakage, reducing friction and wear, high sealing reliability, simplified maintenance, and compatibility. It eliminates the need for periodic replacement of lubricants or seals, reducing downtime. Furthermore, magnetic coupling better adapts to vacuum thermal deformation; temperature fluctuations in the vacuum transfer chamber can affect component dimensions, and the non-contact design reduces the risk of jamming due to thermal expansion.

[0022] like Figure 2 As shown, the sliding magnet assembly 2 includes a second magnet 201, a support frame 203, and claws 204. Multiple second magnets 201 and multiple claws 204 are mounted on the annular support frame 203. The claws 204 support the sample tray 200. The first magnet 105 and the second magnets 201 attract each other through magnetic coupling to achieve synchronous movement. Both the first magnet 105 and the second magnet 201 are neodymium iron boron magnets, possessing superior magnetic properties, small size, light weight, and high mechanical strength.

[0023] Furthermore, one end of the claw 204 is connected and fixed to the support frame 203, and the other end of the claw 204 extends toward the center of the support frame 203 to support the sample tray 200. Even further, at the center of the support frame 203, the bottom of the claw 204 can also be connected to a rotating mechanism to allow the sample tray 200 to rotate. The rotating mechanism can adopt a conventional configuration in the art and will not be described in detail here.

[0024] In this embodiment, the first magnet 105 is located above the second magnet 201, and the second magnet 201 is fixed to the support frame 203 by the fixing ring 202. The height of the second magnet 201 is greater than the height of the claw 204 to prevent the sample tray 200 from contacting the lead screw drive assembly and improve the safety of sample transfer.

[0025] like Figure 2 As shown, the bottom of the support frame 203 is also provided with multiple guide pulleys 205. The guide pulleys 205 roll along the inner wall of the vacuum transfer chamber 100 to assist the support frame 203 in lifting and lowering.

[0026] like Figure 1As shown, the lead screw drive assembly includes a lead screw 103, a lead screw nut 104, a first mounting base 106, a second mounting base 107, and a support plate 109. The first mounting base 106 and the second mounting base 107 are respectively installed at the top and bottom of the vacuum transfer chamber 100. The two ends of the lead screw 103 are rotatably connected to the first mounting base 106 and the second mounting base 107 via bearings. The output end of the motor assembly 108 is sealed through the bottom of the vacuum transfer chamber 100 and connected to the lead screw 103 to drive the lead screw 103 to rotate. The lead screw 103 is connected to the support plate 109 via the lead screw nut 104, and the first magnet 105 is fixed on the support plate 109. When the motor assembly 108 drives the lead screw 103 to rotate, the lead screw nut 104 drives the support plate 109 to reciprocate up and down, thereby enabling the first magnet 105 to drive the second magnet 201 to reciprocate up and down, completing the lifting and lowering of the sample tray 200.

[0027] In this embodiment, the support plate 109 can adopt the same annular structure as the support frame 203, and multiple first magnets 105 are provided on the support plate 109. The first magnets 105 correspond one-to-one with the second magnets 201 to improve the stability of the sample tray 200 lifting and lowering. Alternatively, the first magnets 105 can be set at the bottom of the support plate 109, and the first magnets 105 and second magnets 201 can directly contact and attract each other.

[0028] Furthermore, the lead screw drive assembly also includes a guide shaft 101 and a linear bearing 102. The two ends of the guide shaft 101 are connected to the first mounting base 106 and the second mounting base 107, respectively. The guide shaft 101 is connected to the support plate 109 via the linear bearing 102. With the assistance of the guide shaft 101, the stability of the reciprocating lifting and lowering of the first magnet 105 and the second magnet 201 driven by the support plate 109 is improved, enabling precise lifting and lowering of the sample tray 200.

[0029] In this embodiment, the sample tray 200 is attracted and fixed by magnetic coupling between the first magnet 105 and the second magnet 201, thereby realizing the lifting and lowering of the sample tray 200 by the lead screw drive assembly. The sample tray 200 and the lead screw drive assembly are connected in a non-contact manner, avoiding frictional loss and ensuring a high vacuum environment inside the vacuum transfer chamber 100. Moreover, only the motor assembly 108 is installed outside the vacuum transfer chamber 100, which is convenient for maintenance and does not occupy too much space below the vacuum transfer chamber 100, thus reducing the installation and operating costs of the tray lifting device.

[0030] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A tray lifting device for a vacuum transfer chamber, characterized in that, The system includes a lifting mechanism (1) and a sliding magnet assembly (2); the sliding magnet assembly (2) is disposed in the vacuum transfer chamber (100) and is used to carry the sample tray (200); the lifting mechanism (1) includes a screw drive assembly and a first magnet (105) disposed inside the vacuum transfer chamber (100), and a motor assembly (108) disposed on the bottom outer side of the vacuum transfer chamber (100). The output end of the motor assembly (108) is sealed through the bottom of the vacuum transfer chamber (100) and connected to the screw drive assembly. The first magnet (105) is disposed on the screw drive assembly. The first magnet (105) and the sliding magnet assembly (2) attract each other through magnetic coupling to perform synchronous movement, thereby realizing the screw drive assembly driving the sample tray (200) to lift.

2. The tray lifting device for a vacuum transfer chamber according to claim 1, characterized in that, The sliding magnet assembly (2) includes a second magnet (201), a support frame (203), and a claw (204). The second magnet (201) and the claw (204) are both mounted on the support frame (203). The claw (204) is used to support the sample tray (200). The first magnet (105) and the second magnet (201) attract each other through magnetic coupling to move synchronously.

3. The tray lifting device for a vacuum transfer chamber according to claim 2, characterized in that, One end of the claw (204) is connected and fixed to the support frame (203), and the other end of the claw (204) extends toward the center of the support frame (203) to support the sample tray (200).

4. The tray lifting device for a vacuum transfer chamber according to claim 3, characterized in that, The first magnet (105) is located above the second magnet (201), and the height of the second magnet (201) is greater than the height of the claw (204).

5. The tray lifting device for a vacuum transfer chamber according to claim 2, characterized in that, The bottom of the support frame (203) is also provided with a plurality of guide pulleys (205), which roll along the inner wall of the vacuum transfer chamber (100) to assist the support frame (203) in lifting and lowering.

6. The tray lifting device for a vacuum transfer chamber according to any one of claims 1 to 5, characterized in that, The lead screw drive assembly includes a lead screw (103), a lead screw nut (104), a first mounting base (106), a second mounting base (107), and a support plate (109). The first mounting base (106) and the second mounting base (107) are respectively installed at the top and bottom of the vacuum transmission chamber (100). The two ends of the lead screw (103) are respectively connected to the first mounting base (106) and the second mounting base (107). The output end of the motor assembly (108) is sealed through the bottom of the vacuum transmission chamber (100) and then connected to the lead screw (103). The lead screw (103) is connected to the support plate (109) through the lead screw nut (104). The first magnet (105) is fixed on the support plate (109). When the motor assembly (108) drives the lead screw (103) to rotate, the lead screw nut (104) drives the support plate (109) to reciprocate up and down, thereby realizing that the first magnet (105) drives the second magnet (201) to reciprocate up and down.

7. The tray lifting device for a vacuum transfer chamber according to claim 6, characterized in that, The lead screw drive assembly also includes a guide shaft (101) and a linear bearing (102). The two ends of the guide shaft (101) are connected to the first mounting base (106) and the second mounting base (107) respectively. The guide shaft (101) is connected to the support plate (109) through the linear bearing (102).

8. The tray lifting device for a vacuum transfer chamber according to claim 6, characterized in that, Bearings are provided at both ends of the lead screw (103) where it connects to the first mounting base (106) and the second mounting base (107).

9. The tray lifting device for a vacuum transfer chamber according to any one of claims 2 to 5, characterized in that, Both the first magnet (105) and the second magnet (201) are neodymium iron boron magnets.

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