Atomic layer deposition equipment

CN309990691SActive Publication Date: 2026-05-19HUZHOU QUAIL FIRE PHOTOELECTRIC CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
HUZHOU QUAIL FIRE PHOTOELECTRIC CO LTD
Filing Date
2025-10-21
Publication Date
2026-05-19

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Abstract

1. Name of the product in this design: Atomic Layer Deposition Equipment. 2. Application of this design: This design is used in atomic layer deposition equipment for coating the electron transport layer (ETL), hole transport layer (HTL), buffer layer, and encapsulation layer of perovskite solar cells. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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