Microwave plasma chemical vapor deposition machine (100 KW)

CN310008764SActive Publication Date: 2026-05-29BEIJING ZUOWEN TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
BEIJING ZUOWEN TECH CO LTD
Filing Date
2025-10-28
Publication Date
2026-05-29

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Abstract

1. The name of the design product: microwave plasma chemical vapor deposition machine (100KW). 2. The use of the design product: for chemical vapor deposition. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view 1.
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