Robot system with feed device and feed table device

Abstract

Robot system (60), comprising: a robot (62); a first table (12) on which the robot (62) performs an activity; a second table (16) on which the robot (62) performs an activity; a first feed device (14) which is designed to perform a feed operation of the first table (12); a second feed device (18) designed to perform a feed operation of the second table (16); a coupling element (38, 40, 42, 44) configured to couple the movements of the first feed device (14) and the second feed device (18); and a control device (64) designed to to control a first operation of the robot (62) for the activity and a second operation of the robot (62) different from the first operation, wherein in the second operation the robot (62) actuates an actuating part (46) of the coupling element (38, 40, 42, 44) in order to arrange the first table (12) and the second table (16) in positions corresponding to the activity.

Description

General state of the art 1. Field of invention

[0001] The present invention relates to a robot system with a feed device and a feed table device. 2. Description of the state of the art

[0002] Feed table devices that raise and lower a workpiece table are known (see, for example, JP S60 - 31 950 U, JP S55 - 113 396 A or JP H01 - 115 526 A). A technique that simplifies the design and control sequence of a feed table device is currently desired. Course presentation of the invention

[0003] In one form of the present disclosure, a robot system comprises a robot; a first table on which the robot performs an activity; a second table on which the robot performs an activity; a first feed device configured to perform a feed operation of the first table; a second feed device configured to perform a feed operation of the second table; a coupling element configured to couple the first feed device and the second feed device; and a control device configured to control a first operation of the robot for the activity and a second operation of the robot different from the first operation, wherein in the second operation the robot transmits force to an actuating part of the coupling element in order to position the first table and the second table in positions corresponding to the activity.

[0004] In another form of the present disclosure, a feed table device comprises a first table; a second table; a first feed device configured to move the first table; a second feed device configured to move the second table; and a coupling element configured to effect coupled feed movements of the first feed device and the second feed device under an external driving force, wherein the coupling element has an actuating part configured to be actuated by a robot in order to receive the driving force.

[0005] The present disclosure eliminates the need to create a control sequence for each of several feed devices compared to the conventional design, where a drive device was provided for each of several feed devices, and thus the number of drive devices can be reduced. Consequently, the design and control sequence of the feed table device can be simplified. SIMPLE EXPLANATION OF THE DRAWINGS Fig. Figure 1 is a view of a feed table device according to one embodiment. Fig. 2 is a top-down view of the Fig. 1 shown feed table device. Fig. Figure 3 is a view of a robot system according to one embodiment. Fig. 4 is a flowchart that provides an example of the operational process of the in Fig. The robot system shown in section 3 demonstrates this; Fig. 5 shows the state at the beginning of the process. Fig. 4. Fig. Figure 6 shows the state after completion of a first step S10 in Fig. 5. Fig. Figure 7 is a view explaining the setup state of pallets on a first and a second table when YES was determined in step S6. Fig. Figure 8 is a top-down view of a feed table device according to another embodiment. Fig. Figure 9 is a top-down view of a feed table device according to yet another embodiment. Fig. Figure 10 is a top-down view of a feed table device according to yet another embodiment. Fig. Figure 11 is a rear view of a feed table device according to yet another embodiment. Fig. Figure 12 is a rear view of a feed table device according to yet another embodiment. Fig. 13 is a flowchart that provides an example of the operational process when applying the in Fig. 12 table device shown on the in Fig. The robot system shown is 1. Fig. Figure 14 is a top view of a feed table device according to yet another embodiment and shows the state in which a coupling element has been arranged in an engagement position. Fig. 15 is a view from behind of the in Fig. Feed table device shown in 14. Fig. 16 shows the state in which, during the in Fig. In the feed table device shown in Figure 14, a coupling element was arranged in a separating position. Detailed explanation

[0006] Embodiments of the present disclosure are then explained in detail with reference to the drawings. In the various embodiments explained below, identical elements are designated with the same reference numerals, and repetition of the explanation is omitted. Furthermore, in the following explanation, an orthogonal coordinate system is established in the drawings as the basis for the directions, whereby, for convenience, the positive x-axis direction is designated as right, the positive y-axis direction as front, and the positive z-axis direction as top.

[0007] With reference to Fig. 1 and Fig. Section 2 describes a feed table device 10 according to one embodiment. The feed table device 10 serves to raise and lower pallets on which workpieces are arranged. The workpieces and pallets will be discussed later. The feed table device 10 comprises a first table 12, a first feed device 14, a second table 16, a second feed device 18, a first housing 20, a second housing 22, a top plate 24, a position sensor 26, and a coupling mechanism 28.

[0008] The first housing 20 is hollow, with a through-opening 20b extending in the z-axis direction in its rear surface 20a. The first table 12 is arranged on the rear side of the rear surface 20a of the first housing 20 such that it can move in the z-axis direction. In the present embodiment, the first table 12 is a flat plate element with an approximately rectangular shape, arranged approximately parallel to the xy-plane.

[0009] The second housing 22 is arranged adjacent to the right side of the first housing 20 and has the same structure as the first housing 20. Specifically, the second housing 22 is hollow and has a through-opening 22b extending in the z-axis direction in its rear surface 22a.

[0010] The second table 16 is positioned adjacent to the right side of the first table 12, on the rear side of the rear surface 22a of the second housing 22, such that it can move in the z-axis direction. In the present embodiment, the second table 16 is a flat plate element with the same shape as that of the first table 12.

[0011] The first feed device 14 performs a feed operation of the first table 12 in the z-axis direction. Specifically, the first feed device 14 is a ball screw device with a threaded spindle 30 and a nut element 32. The threaded spindle 30 is a column-shaped element with a central axis line A1, on whose outer circumferential surface a helical thread section is formed. The threaded spindle 30 extends in the z-axis direction such that its central axis line A1 runs approximately parallel to the z-axis, and is thus held in the first housing 20 so that it can rotate about the central axis line A1.

[0012] The nut element 32 is arranged inside the first housing 20, and its rear end 32b is fixed to a front end 12a of the first table 12 through the through-opening 20b of the first housing 20. A threaded opening 32a is formed in the central region of the nut element 32. The threaded spindle 30 is inserted through the threaded opening 32a and engages with the threaded opening 32a.

[0013] In the present embodiment, the nut element 32 and the first table 20 fixed to this nut element 32 are advanced downwards by a clockwise rotation of the threaded spindle 30 (viewed from above). Conversely, the nut element 32 and the first table 20 fixed to this nut element 32 are advanced upwards by a counterclockwise rotation of the threaded spindle 30 (viewed from above). In this way, the first feed device 14 converts the rotary motion of the threaded spindle 30 into a feed motion of the first table 12 in the z-axis direction.

[0014] The second feed device 18 performs a feed operation of the second table 16 in the z-axis direction. Specifically, the second feed device 14 is a ball screw device similar to the first feed device 14, comprising a threaded spindle 34 and a nut element 36. The threaded spindle 34 is a column-shaped element with a central axis A2, on whose outer circumferential surface a helical thread section is formed. The threaded spindle 34 extends in the z-axis direction such that its central axis A2 runs approximately parallel to the z-axis, and is held in the second housing 22 in such a way that it can rotate about the central axis A2.

[0015] The nut element 36 is arranged inside the second housing 22, and its rear end 36b is fixed to a front end 16a of the second table 16 through the through-opening 22b of the second housing 22. A threaded opening 36a is formed in the central region of the nut element 36. The threaded spindle 34 is inserted through the threaded opening 36a and engages with the threaded opening 36a.

[0016] In the present embodiment, the nut element 36 and the second table 16 fixed to this nut element 36 are moved downwards by a clockwise rotation of the threaded spindle 34 when viewed from above. Conversely, the nut element 36 and the second table 22 fixed to this nut element 36 are moved upwards by a counterclockwise rotation of the threaded spindle 34 when viewed from above. In this way, the second feed device 18 converts the rotary motion of the threaded spindle 34 into a feed motion of the second table 16 in the z-axis direction.

[0017] The cover plate 24 is fixed to an upper surface 20c of the first housing 20 and an upper surface 22c of the second housing 22. A first through-opening 24a and a second through-opening 24b are formed in the cover plate 24. The threaded spindle 30 of the first feed device 14 is inserted through the first through-opening 24a, and the threaded spindle 34 of the second feed device 18 is inserted through the second through-opening 24b.

[0018] In the present embodiment, the position sensor 26, which is a proximity switch or the like, detects an object located near its underside (specifically, at a certain distance below the position sensor 26) without contact. The position sensor 26 is located at the upper end of the rear surface 20a of the first housing 20. When the position sensor 26 detects that the object is located near its underside, it outputs a detection signal (that is, the detection signal reaches the ON state).

[0019] The coupling mechanism 28 has a total of four coupling elements 38, 40, 42, and 44. Each of the coupling elements 38, 40, 42, and 44 is a column-shaped gear with a toothed section on its outer circumferential surface. These coupling elements 38, 40, 42, and 44 form a gear train arranged between the threaded spindle 30 of the first feed device 14 and the threaded spindle 34 of the second feed device 18.

[0020] The coupling element 38 is arranged approximately concentrically with the threaded spindle 30 of the first feed device 14, with the central axis line A1 serving as a reference. The threaded spindle 30 extends through the first through-opening 24a formed in the cover plate 24, and its upper end is fixed to the coupling element 38, so that the coupling element 38 and the threaded spindle 30 rotate as a single unit.

[0021] The coupling element 40 is arranged adjacent to the right side of the coupling element 38 and engages with it. The coupling element 40 has a central opening, and a pin 48 is inserted through this central opening. The pin 48 is formed on the cover plate 24 such that it projects from an upper surface 24c of the cover plate 24. The coupling element 40 can rotate about the pin 48.

[0022] In the present embodiment, an actuating element 46 is formed on the coupling element 40. The actuating element 46 is an approximately square, column-shaped element that is formed on the upper surface of this coupling element 40 in such a way that it rotates integrally with the coupling element 40. The actuating element 46 is arranged approximately concentrically with the pin 48 (i.e., the coupling element 40).

[0023] The coupling element 42 is inserted between the coupling element 40 and the coupling element 44 and engages with the coupling elements 40 and 44. The coupling element 42 has a central opening, and a pin 50 is inserted through this central opening. The pin 50 is formed on the cover plate 24 such that it projects from the upper surface 24c of the cover plate 24. The coupling element 42 can rotate around the pin 50.

[0024] In the present embodiment, the number of teeth on the coupling elements 38, 40, 42, and 44 is the same. Consequently, the transmission ratio (i.e., the reduction ratio) of any two meshing coupling elements 38 and 40 and 42, as well as 42 and 44, is one. Furthermore, the range of motion (i.e., the distance of movement in the z-axis direction) of the first table 12 per revolution of the lead screw 30 of the first feed device 14 and the range of motion of the second table 16 per revolution of the lead screw 34 of the second feed device 16 are the same.

[0025] Next, the operation of the feed table device 10 will be explained. The feed table device 10 is driven by a drive force supplied externally (for example, by a robot). Specifically, when the drive force is applied externally to the actuating element 46 and the actuating element 46 is rotated clockwise (viewed from above), the coupling element 40 is rotated clockwise together with the actuating element 46 (viewed from above).

[0026] This rotation of the coupling element 40 causes the coupling elements 38 and 42 to rotate counterclockwise when viewed from above. Together with this rotation of the coupling element 38, the threaded spindle 30 of the first feed device 14 is also rotated counterclockwise when viewed from above, thereby moving the first table 12 upwards.

[0027] The counterclockwise rotation of the coupling element 42 (viewed from above) causes the coupling element 44 to rotate clockwise (viewed from above). This rotation of the coupling element 44, in turn, causes the threaded spindle 34 of the second feed element 18 to rotate clockwise (viewed from above), thereby moving the second table 16 downwards.

[0028] If, on the other hand, the control element 46 (that is, the coupling element 40) is rotated counterclockwise from above by the drive force from the outside, the coupling elements 38 and 42 rotate clockwise from above and the first table 12 is moved downwards, while the coupling element 44 rotates counterclockwise from above and the second table 16 is moved upwards.

[0029] In this way, the coupling elements 38, 40, 42, and 44 couple the first feed device 14 and the second feed device 18 while receiving external drive force, and the first table 12 and the second table 16 are moved in opposite directions. Since the coupling elements 38, 40, 42, and 44 rotate simultaneously with each other in engagement, the first table 12 and the second table 16 move synchronously with each other.

[0030] Furthermore, as described above, the number of teeth on the coupling elements 38, 40, 42, and 44 is the same, and the range of motion of the first table 12 per revolution of the lead screw 30 and the range of motion of the second table 16 per revolution of the lead screw 34 are also the same. Consequently, the first table 12 and the second table 16 move the same distance in the z-axis direction when the coupling mechanism 28 is operated.

[0031] In this way, the multiple feed devices 14 and 18 can be operated in conjunction simply by applying a drive force to a coupling element 40 (the drive unit 46). Compared to the conventional design, where a drive unit (typically a servo motor) was provided for each of the multiple feed devices, this design eliminates the need to prepare a control sequence for the respective drive units, thus reducing the number of drive units required.

[0032] Therefore, the design and control sequence of the feed table device 10 can be simplified. Furthermore, since the coupling mechanism 28 is constructed using coupling elements 38, 40, 42, and 44, which are gears, the design of the coupling mechanism 28 can be simplified, thus reducing manufacturing costs.

[0033] In the present embodiment, a case has been described in which four coupling elements 38, 40, 42 and 44 are formed, but the coupling mechanism 28 can have 2n coupling elements (n is an integer of at least 1). In this case, the first table 12 and the second table 16 can be moved in opposite directions by rotating a coupling element.

[0034] Next, with reference to Fig. 3. A robot system 60 according to one embodiment is described. The robot system 60 comprises a robot 62, a control device 64, and the feed table device 10. The robot is a vertical articulated robot comprising a robot base 66, a rotary body 68, a robot arm 70, a wrist section 72, and an end effector 74.

[0035] The robot base 66 is fixed to the floor of a work cell. The rotating body 68 is rotatable about a vertical axis on the robot base 66. The robot arm 70 has a forearm section 76, which is rotatably attached to the rotating body 68, and an upper arm section 78, which is rotatably attached to the tip of this forearm section 76.

[0036] The wrist section 72 is coupled to the tip end of the upper arm section 78. The end effector 74 is attached to the wrist section 72, and the wrist section 72 rotatably holds the end effector 74. In the present embodiment, the end effector 74 is a robotic hand with several finger parts 80 that can be opened and closed.

[0037] Each of the individual components (the robot base 66, the rotating body 68, the robot arm 70, and the wrist section 72) of the robot 62 contains a servo motor (not shown). A robot coordinate system C is also provided for the robot. R In the present embodiment, the robot coordinate system C is defined. R such that its origin point is located at the robot base 66, the z-axis runs parallel to the vertical direction, and the rotating body 68 rotates about the z-axis.

[0038] The control device 64 has a processor (CPU, GPU) and memory (ROM, RAM, etc.) and controls the robot 62. Specifically, the control device 64 generates commands for the individual servo motors of the robot 62 using the robot coordinate system C. Ras a basis, which drives the individual servomotors and positions the end effector 74 at a target position and in a target orientation. Furthermore, the control device 64 is connected to the position sensor 26 and receives the aforementioned detection signal from this position sensor 26.

[0039] Next, with reference to Fig. 4 to Fig. Section 7 explains the operation of the robot system 60. The one in Fig. The sequence shown in section 4 begins when the control device 64 receives a start-of-operation command from an operator, a higher-level computer, or a robot program. In the present embodiment, at the time of the start of the sequence shown in Fig. 6 shown process as in Fig. Figure 5 shows a total of six pallets P, on which unmachined workpieces (not shown) were arranged, set up on the first table 12. Furthermore, on each of the six pallets P on the first table 12, a total of n MAX Workpieces arranged.

[0040] On the second table, 16, an empty pallet P is set up, on which no workpieces are arranged. At the time of the start of the in Fig. In the sequence shown in Figure 4, the upper surface of the top pallet P on the first table 12 and the upper surface of the top pallet P on the second table 16 are arranged approximately in the same plane. Furthermore, the pallets P have the same shape relative to each other and are equipped with a handle G. The handle G has a shape that can be grasped by the end effector 74.

[0041] In step S1, the control device 64 sets the total number “n” of unmachined workpieces arranged on the top pallet P on the first table 12, which were removed by the robot 62 (that is, the number of times the steps S2 and S3 described later were carried out), to zero (n = 0).

[0042] In step S2, the control device 64 operates the robot 62 and one of the unmachined workpieces is removed from the top pallet P of the pallets P set up on the first table 12. Here, the control device 64 obtains the position data in the robot coordinate system C beforehand. R all workpieces arranged on the top pallet P on the first table 12.

[0043] The position of the top pallet P on the first table 12 is determined by a position detected by the position sensor 26 (for example, a position within 1 mm below the position sensor 26). The individual pallets P are arranged at predefined positions on the first table 12. For example, a holding device (not shown) is provided on the first table 12, and the bottom pallet P placed on the first table 12 is positioned at a predetermined position on the first table 12 by this holding device.

[0044] Furthermore, positioning projections (not shown) are formed on the upper surface of one pallet P, and positioning holes (not shown) are formed in the lower surface of another pallet P, which is placed on top of the first pallet P, to receive these positioning projections. Through the engagement of these positioning projections and positioning holes, the second pallet P is positioned in the same xy-plane as the first pallet P.

[0045] Within each pallet P, pallet clamping devices (not shown) are formed; and the unmachined workpieces are positioned at specific locations within these pallets P by these pallet clamping devices. In this way, the positions of the unmachined workpieces arranged on the respective pallets P can be coordinated with each other in the xy-plane, and the unmachined workpieces that were arranged on the topmost pallet P on the first table 12 are positioned at specific locations in the robot coordinate system C. R arranged. The control device 64 obtains the positions in the robot coordinate system C. R the unprocessed workpieces arranged on the top pallet P and stores them in the memory.

[0046] The control device 64 controls the robot 62 in this step S2 using the position data of an unmachined workpiece on the top pallet P on the first table 12. The robot grasps the unmachined workpiece with the end effector 74 and transports it to a machining center (not shown) located outside the robot system 60, where it is placed. In this way, the robot 62 loads the unmachined workpiece into the machining center, and the machining center then processes this unmachined workpiece. Thus, in step S2, the robot 62 performs a loading operation in which a workpiece is removed from the pallet P on the first table and loaded into the machining center.

[0047] In step S3, the control device 64 operates the robot 62, and the machined workpiece is removed from the machine tool and placed on the pallet P set up on the second table 16. Here, the control device 64 first obtains the position data in the robot coordinate system C. R the position where the machined workpiece is to be placed on the top pallet P on the second table 16.

[0048] The control device 64 removes the workpiece from the machine tool by grasping it with the end effector 74, controls the robot 62 using the arrangement position data, and positions the workpiece at the designated position on the top pallet P on the second table 16. In this way, the robot 62 unloads the workpiece from the machine tool. Thus, in step S3, the robot 62 performs an unloading operation in which the workpiece is unloaded from the machine tool and placed on the pallet P on the second table 16.

[0049] In step S4, the control device 64 increases the total number "n" above by one (that is, n = n + 1). In step S5, the control device 64 determines whether the total number "n" above equals n. MAX has been achieved (that is, n = n MAX ) or not. This “n MAX“ is the total number of unprocessed workpieces that were arranged on the respective pallets P of the first table 12.

[0050] If the control device 64 determines that n = n MAX If the threshold is reached (that is, YES), it proceeds to step S6, whereas on the other hand, if n < n is determined, it does not. MAX (that is, NO) returns to step S2. The control device 64 repeatedly executes the loop of steps S2 to S5 until YES is determined in step S5, and takes the loading and unloading activities with respect to a total of n MAX unprocessed workpieces, which were arranged on the top pallet P on the first table 12, are shown.

[0051] In step S6, the control device 64 determines whether the machining of all unmachined workpieces present at the start of the process is to be carried out. Fig. 4 were set up on the first table 12, (that is, from 6 × n MAX(unprocessed workpieces) is completed or not. For example, the control device 64 counts the number “m” of times for which YES was determined in step S5, and determines in this step S6 whether the number “m” of times has reached the total number “6” of pallets P that were arranged on the first table 12 at the time of the start or not.

[0052] Upon reaching m = 6, the control device 64 determines that the machining of all unmachined workpieces is complete (i.e., YES), and terminates the sequence of Fig. 4. If, on the other hand, m < 6, the control device 64 determines that there are still unprocessed workpieces on the first table 12 (that is, NO), and proceeds to step S7.

[0053] In step S7, the control device 64 operates the robot 62 and transports the top pallet P on the first table 12 to the top pallet P on the second table 16. At the start of step S7, the top pallet P on the first table 12 is empty, containing no unprocessed workpieces. Here, the control device 64 obtains the position data in the robot coordinate system C beforehand. R of the handle G of the top pallet P on the first table 12.

[0054] The control device 64 controls the robot 62 using the position data of the gripper G, grasps the gripper G with the end effector 74 and lifts it, and places this top pallet onto the top pallet P on the second table 16. In this way, the empty top pallet P on the first table 12 is moved by the robot 62 to the top position on the second table 16. Thus, in step S7, the robot 62 performs a pallet transport operation in which a pallet P on the first table 12 is transported to the second table 16.

[0055] As described above, the robot performs the loading activity of step S2, the unloading activity of step S3, and the pallet transport activity of step S6 at the first table 12 and the second table 16. The operation of the robot 62 to perform these activities is referred to as normal operation (first operation).

[0056] In step S8, the control device 64 actuates the coupling elements 38, 40, 42, and 44 via the robot 62, and a feed operation is initiated for the first table 12 and the second table 16. Here, the control device 64 first obtains the position data in the robot coordinate system C. R of the actuating part 46 (for example, its central axis).

[0057] The control device 64 controls the robot 62 in this step S8 using the position data of the actuator 46 and positions the end effector 74 at a gripping position for grasping the actuator 46. When the end effector 74 is positioned at this gripping position, the actuator 46 is located between its finger sections 80. At this time, the end effector 74 can also be positioned relative to the actuator 46 such that two finger sections 80 each face two opposite sides of the rectangular actuator 46.

[0058] Then the control device 64 operates the end effector 74 and the finger parts 80 close. This causes the end effector 74 to grasp the actuating part 46 with the finger parts 80. Subsequently, the control device 64 actuates the robot 62 and the actuating part 46, grasped by the end effector 74, is rotated clockwise when viewed from above.

[0059] This causes the coupling elements 38, 40, 42, and 44 to be brought into contact with each other, as described above, to generate coupled feed movements of the first feed device 14 and the second feed device 18, and the first table 12 is moved upwards and, synchronously, the second table 16 is moved downwards. In this way, the control device 64 controls the robot 62, and the robot 62 is brought into a coupled operation (a second operation) in which the coupling elements 38, 40, 42, and 44 are actuated, as a separate operation from the normal operation of the robot 62.

[0060] In step S9, the control device 64 determines whether the first table 12 and the second table 16 have been positioned by the robot 62 for the next activities (the loading and unloading activities). Specifically, the control device 64 determines whether an output signal has been received from the position sensor 26 or not.

[0061] At the time of completion of step S7 described above, the palette P located at the top of the first table 12 is the second palette P from the top, taken from the in Fig. 5 pallets P shown on the first table 12. Since the top pallet P on the first table 12 is therefore spaced downwards from the detection position of the position sensor 26 at the time of completion of step S7 described above, the detection signal of the position sensor 26 is in the OFF state at the time of completion of step S7.

[0062] When the first table 12 is moved upwards from this state in step S8, and the top pallet P on the first table 12 reaches a position near the underside of the position sensor 26, the position sensor 26 switches the detection signal to the ON state and sends it to the control device 64. The control device 64 determines YES when the detection signal from the position sensor 26 has reached the ON state and proceeds to step S10; if, on the other hand, the detection signal from the position sensor 26 is in the OFF state, step S9 is executed as a loop.

[0063] In this way, by detecting the position of the top pallet P on the first table 12, the position sensor 26 detects the positions of the first table 12 and the second table 16, and controls the control device 64 based on the detection result of the position sensor 26 (i.e., the output signal ON / OFF) the coupling operation of the robot 62.

[0064] In step S10, the control device 64 stops the rotary actuation of the actuator 46 by the robot 62. This causes the coupling mechanism 28, the first table 12, and the second table 16 to stop. The state at this point is in Fig. 6 shown. In the state shown in Fig. As shown in Figure 6, the upper surface of the top pallet P on the first table 12 and the upper surface of the top pallet P on the second table 16 are arranged approximately in the same plane.

[0065] After completing step S10, the control device 64 returns to step S1 and steps S1 to S10 are executed in a loop until YES is determined in step S6. The state at the time YES is determined in step S6 is described in Fig. 7 shown. In the state shown in Fig. As shown in Figure 74, on the one hand an empty pallet P, on which no unmachined workpieces are arranged, is set up on the first table 12, and on the other hand six pallets P, on which machined workpieces have been arranged, are set up on the second table 16.

[0066] In this way, the first table 12 and the second table 16 are positioned at the respective positions corresponding to the operation (loading or unloading) by actuating the coupling elements 38, 40, 42 and 44 during coupling operation by the robot 62. Since the robot 62, which performs the loading and unloading operations, can be used as a drive device to apply the drive force to the feed table device 10, the control sequence and the structure of the robot system 60 can be simplified.

[0067] Furthermore, in the present embodiment, the position sensor 26 detects that the uppermost pallet P on the first table 12 has been positioned at a specific location (i.e., a location near the underside of the position sensor 26), and thereby detects that the first table 12 has been positioned at the location corresponding to the activity (loading or unloading). Based on the detection result of the position sensor 26, the control device 64 then controls the coupling operation of the robot 62. This design allows the control device 64 to position the first table 12 and the second table 16 at the locations corresponding to the activity with high accuracy.

[0068] Furthermore, in the present embodiment, the coupling elements 38, 40, 42, and 44 move the first table 12 and the second table 16 in opposite directions over the same distance. This design allows the upper surface of the top pallet P on the first table 12 and the upper surface of the top pallet P on the second table 16 to be arranged in approximately the same plane at the time of completion of step S10 described above.

[0069] This allows the target position of robot 62 at the time of performing the next step S2 (loading activity) (i.e., the position of an unmachined workpiece located on the top pallet P on the first table 12) and the target position of robot 62 at the time of performing the next step S3 (unloading activity) (i.e., the position of a machined workpiece on the top pallet P on the second table 16) to be kept constant. Consequently, steps S2 and S3 can be performed reliably by robot 62.

[0070] The position sensor 26 can be omitted in the robot system 60. In this case, the relationship between the range of motion of the first table 12 by the first feed device 14, the range of motion of the second table 16 by the second feed device 18, and the actuation range of the actuating part (i.e., the coupling element 40) by the robot 62 is determined in advance.

[0071] For example, this relationship shows the range of motion x of the first table 12 and the second table 16 in the z-axis direction when the actuator 46, viewed from above, has been rotated by a specific angle θ (for example, 1°). Based on this relationship, a target number of rotations (a target rotation angle) is predefined in step S8 when the robot 62 rotates the actuator 46. The control device 62 stores the target number of rotations in its memory beforehand.

[0072] Then, in step S9, the control device 64 determines whether the number of revolutions for which the actuator 46 was rotated by the robot 62 in step S8 has reached the target number of revolutions or not. If the control device 64 determines that the number of revolutions of the actuator 46 has reached the target number of revolutions (i.e., YES), it proceeds to step S10.

[0073] If, on the other hand, the control device 64 determines that the rotational speed of the actuating part 46 has not reached the target rotational speed (i.e., NO), it executes step S9 as a loop. Since the control device can perform the operation of the sequence from step S8 to S7 without using a position sensor 26, the manufacturing costs can be reduced.

[0074] Next, with reference to Fig. 8. A feed table device 90 according to another embodiment is described. The feed table device 90 differs from the table feed device 10 described above in the construction of a coupling mechanism 92. The coupling mechanism 92 has coupling elements 38, 42, 44 and 94. The coupling element 94 is, for example, an annular toothed belt with teeth formed on its inner circumferential surface.

[0075] The coupling element 94 is clamped around the outer circumferential surface of the coupling elements 38 and 42, and the teeth formed on the inner circumferential surface of the coupling element 94 engage with teeth formed on the outer circumferential surface of the coupling elements 38 and 42. This transmits the rotation of the coupling element 38 via the coupling element 94 to the coupling elements 42 and 44. In the present embodiment, the reduction ratio of the rotational speed of the coupling element 38 to the rotational speed of the coupling element 42 is one.

[0076] The actuating element 46 is fixed to the upper surface of the coupling element 38 such that it is arranged approximately concentrically with the coupling element 38, using the axis line A1 as a reference. When the actuating element 46 is rotated about the axis line A1 by applying an external driving force (for example, from the robot 62), the coupling element 92, like the coupling element 28 described above, moves the first table 12 and the second table 16 synchronously in opposite directions.

[0077] Next, with reference to Fig. 9. A feed table device 100 according to yet another embodiment 100 is described. The feed table device 100 differs from the feed table device 10 described above in the construction of a coupling mechanism 102. The coupling mechanism 102 has coupling elements 38, 44 and 104. The coupling element 104 is a column-shaped gear with a central opening, which is inserted between the coupling elements 38 and 44 and engages with the coupling elements 38 and 44.

[0078] The coupling element 104 has a central opening through which a pin 106 is inserted. The pin 106 is formed on the cover plate 24 such that it projects from the upper surface 24c of the cover plate 24. The coupling element 104 can rotate around the pin 106. In the present embodiment, the number of teeth of the coupling element 104 is greater than that of the coupling elements 38 and 44. However, the number of teeth of the coupling element 104 can also be equal to or less than that of the coupling elements 38 and 44. Since the number of teeth of the coupling elements 38 and 44 is the same, the reduction ratio of the number of revolutions of the coupling element 38 and the number of revolutions of the coupling element 44 is one.

[0079] The actuating element 46 is fixed to the upper surface of the coupling element 104 such that it is approximately concentric with the coupling element 104. When the actuating element 46 receives an actuating force from the outside (for example, from the robot 62) and is rotated clockwise when viewed from above, the coupling elements 38 and 44, which engage with the coupling element 104, are each rotated counterclockwise when viewed from above.

[0080] Consequently, in this case, the first table 12 and the second table 16 are moved upwards synchronously. Conversely, if the actuating element 46 is rotated counterclockwise when viewed from above, the first table 12 and the second table 16 are moved downwards synchronously. In this way, the coupling mechanism 102, in the present embodiment, moves the first table 12 and the second table 16 synchronously in the same direction.

[0081] Next, with reference to Fig. 10 describes a feed table device 110 according to yet another embodiment. The feed table device 110 differs from the feed table device 10 described above in the construction of a coupling mechanism 112. The coupling mechanism 112 has coupling elements 38, 44, and 94. The coupling element 94 is clamped around the outer circumferential surface of the coupling elements 38 and 44, and teeth formed on the inner circumferential surface of this coupling element 94 engage with teeth formed on the outer circumferential surface of the coupling elements 38 and 44. This transmits the rotations of the coupling element 38 to the coupling element 44 via the coupling element 94.

[0082] The actuating element 46 is fixed to the upper surface of the coupling element 38 such that it is concentric with the coupling element 38, with the axis line A1 as its reference. When the actuating element 46 receives a drive force from an external source (for example, from the robot 62) and is rotated about the axis line A1, the coupling mechanism 112 moves the first table 12 and the second table synchronously in the same direction.

[0083] Next, with reference to Fig. 11. A feed table device 120 according to yet another embodiment is described. The feed table device 120 differs from the feed table device 10 described above in the construction of a coupling mechanism. The coupling mechanism 122 has coupling elements 38, 40, 42 and 44 and a reduction gear 124.

[0084] The reduction gear 124 is fixed to the cover plate 24 via a mounting element 126 and is positioned above the coupling element 38 such that it is approximately concentric with the coupling element 38, with the axis line A1 serving as a reference. The actuating part 46 is fixed to an input shaft of the reduction gear 124. Conversely, an output shaft 124a of the reduction gear 124 is fixed to the coupling element 38.

[0085] The reduction gear 24 transmits a rotational force to the output shaft 124a and the coupling element 38, while the rotational speed of the actuating element 46 (i.e., the input shaft) is reduced. The torque generated at the coupling element 38 (the output shaft 124a) is increased by the reduction gear 124 relative to the torque of the actuating element 46 (the input shaft).

[0086] The following describes the application of the feed table device 120 according to the present embodiment instead of the feed table device 10 to the [product / service / etc.] in [the following]. Fig. The robot system 60 shown in step 3 is explained. In this case, the control device 64 engages in step S8. Fig. 4 the actuating part 46 of the coupling element 122 with the end effector 74 of the robot 62 and this is rotated about the axis line A1.

[0087] If it is now assumed that the robot 62 operates the actuating part 46 with the same torque as when rotating the actuating part 46 of the in Fig. When the coupling mechanism 28 shown in Figure 3 rotates, the torque generated at the coupling elements 38, 40, 42 and 44 is greater than in the case of coupling mechanism 28. This increase in torque allows the first table 12 and the second table 16 to be moved stably even when pallets P or workpieces with a greater weight have been placed on the first table 12 and the second table.

[0088] If a torque is generated at the coupling element 38 of the coupling mechanism 122 which has the same magnitude as the torque generated by the in Fig. Since the torque required to rotate the actuating part 46 of the coupling mechanism 122 can be reduced, as shown in Figure 3, is generated by actuating the actuating part 38 on the coupling element 38, the torque required to rotate the actuating part 46 of the coupling mechanism 122 can be reduced. Because the drive force applied by the robot 62 to the actuating part 46 can be reduced in this case, the robot 62 can be designed to be smaller or more energy-efficient.

[0089] In this case, the reduction gear 124 acts as a drive force amplification mechanism in the present embodiment, increasing the drive force (torque) applied to the coupling elements 38, 40, 42, and 44. This design allows the first table 12 and the second table 16 to be advanced by the coupling operation of the robot 62 and positioned at the appropriate locations for the task, even if the robot 62 cannot provide a high torque to rotate the end effector 74.

[0090] Next, with reference to Fig. 12. A feed table device 130 according to yet another embodiment is described. The feed table device 130 differs from the feed table device 10 described above in the construction of a coupling mechanism 132. The coupling mechanism 132 has coupling elements 38, 40, 42 and 44 and an auxiliary device 134.

[0091] In the present embodiment, the actuating part 46 is fixed to the upper surface of the coupling element 38. Furthermore, a force receiving element 142, projecting downwards from the lower surface of the coupling element 38, is fixed to this lower surface. The force receiving element 142 is column-shaped and arranged such that it is approximately concentric with the coupling element 38, with the axis line A1 serving as a reference.

[0092] The auxiliary device 134 comprises an electric motor 136 and a torque sensor 138. The electric motor 136 is fixed to the upper surface 24c of the cover plate 24. A column-shaped auxiliary element 140 is fixed to an output shaft of the electric motor 136. The electric motor 136 rotates the auxiliary element 140 about an axis parallel to the axis line A1.

[0093] The torque sensor 138 is inserted between the upper end 30a of the threaded spindle 30 of the first feed device 14 and the force receiving element 142, and the actuating part 46, the coupling element 38, the force receiving element 142, and the threaded spindle 30 rotate as a single unit. When a torque is applied to the actuating part 46 as a driving force, this torque acts on the torque sensor 138 via the coupling element 38 and the force receiving element 142. The torque sensor 138 detects the torque acting on itself about the axis A1.

[0094] The auxiliary element 140 and the force-receiving element 142 meet (engage with each other) in such a way that the rotational force of the auxiliary element 140 is transmitted to the force-receiving element 142. The auxiliary element 140 and the force-receiving element 142 can be, for example, gears or column elements made of a material with a high coefficient of friction (for example, rubber, resin, or the like).

[0095] If the torque detected by the torque sensor 138 exceeds a predefined threshold, the electric motor 136 rotates the auxiliary element 140, and an additional torque is applied by the auxiliary element 140 to the force receiving element 138. The direction in which the electric motor 136 rotates the auxiliary element 140 is set such that the direction of the additional torque applied to the force receiving element 142 coincides with the direction of the torque detected by the torque sensor 138.

[0096] Specifically, it is assumed that the torque sensor 138 has detected a torque that, viewed from above, is directed clockwise. In this case, the electric motor 136 rotates the auxiliary element 140 counterclockwise (viewed from above), and an additional torque is applied by the auxiliary element 140 to the force receiving element 138. As a result, an additional torque, directed clockwise (viewed from above), acts on the force receiving element 142. In this way, the auxiliary device 134 amplifies the driving force (i.e., the torque) applied to the coupling element 38.

[0097] Next, with reference to Fig. 13 the operation in a case explained in which the feed table device 130 is placed on the in instead of the feed table device 10. Fig. The robot system 60 shown in section 3 is used. The process described in Fig. As shown in 13, the processes are the same as in Fig. The four steps are assigned the same step numbers, and a repeated explanation is omitted. When the feed table device 130 is applied to the robot system 60, the electric motor 136 and the torque sensor 138 of the feed table device 130 are connected to the control device 64 in a communication-capable manner.

[0098] After the start of step S8, the control device 64 begins in step S21 by detecting a torque τ using the torque sensor 138. Specifically, the control device 64 sends a torque detection command to the torque sensor 138. When the torque sensor 138 receives the torque detection command from the control device 64, it continuously (for example, periodically) detects the torque τ acting on it and sends this to the control device 64. In this way, the control device 64 obtains the drive force (the torque τ) applied to the actuating part 46 via the torque sensor 138.

[0099] In step S22, the control device 64 determines whether the torque τ last detected by the torque sensor 138 exceeds at least a threshold value τ th has been reached or not. This threshold τ this predetermined by an operator and stored in the memory of the control device 64. If the control device 64 determines that τ ≧ τ th If the condition is met (that is, YES), it proceeds to step S23. If, on the other hand, the control device 64 determines that τ < τ th If the answer is NO, it proceeds to step S24.

[0100] In step S23, the control device 64 operates the electric motor 136. Specifically, the control device 64 determines the direction of rotation of the electric motor 64 based on the direction of the torque τ last detected by the torque sensor 138. The control device 64 then sends an operating command to the electric motor 36. Upon receiving this operating command, the electric motor 136 rotates the auxiliary element 140 in the determined direction of rotation, and an additional torque τ is applied by this auxiliary element 140. a attached to the power receiving element 142.

[0101] The direction of the additional torque τ a The force applied to the force receiving element 142 at this time corresponds to the direction of the torque τ last detected by the torque sensor 138. In this way, a resultant force is obtained from the torque τ applied by the robot 62 to the actuating element 46 and the additional torque τ. a exerted on the coupling element 38 by the electric motor 136.

[0102] If, on the other hand, NO is determined in step S22, the control device 64 stops the operation of the electric motor 136 in step S24 and proceeds to step S9. If the electric motor 136 is stopped at the start of this step S24, the control device 64 maintains the stopped state of the electric motor 136 and proceeds to step S9.

[0103] As described above, the driving force (torque) applied by the robot 62 to the coupling elements 38, 40, 42, and 44 can be amplified by the auxiliary device 134 in the present embodiment. Consequently, the auxiliary device 134 acts as a driving force amplification mechanism, increasing the driving force (torque) applied to the coupling elements 38, 40, 42, and 44. This driving force amplification mechanism allows the first table 12 and the second table 16 to be advanced by the coupling operation of the robot 62 and positioned at the appropriate locations for the task, even if the robot 62 cannot generate a large enough torque to rotate the end effector 74.

[0104] Next, with reference to Fig. 14 to Fig. 16. A feed table device 150 according to yet another embodiment is described. The feed table device 150 differs from the feed table device 10 described above in the construction of a coupling mechanism 152. The coupling mechanism 152 has coupling elements 38, 40, 42 and 44, a drive element 154 and a guide mechanism 158.

[0105] In the present embodiment, the coupling element 42 is arranged so that it can move in the y-axis direction, and the guide mechanism 158 directs the movement of the coupling element 42 in the y-axis direction. Specifically, the coupling element 42 is rotatably mounted on a pin 156. The pin 156 has a main body 156a and a flange region 156b projecting outwards from this main body 156a. The main body 156a is columnar and extends in the z-axis direction.

[0106] The flange area 156b projects from the main body 156a on both the left and right sides.

[0107] A recess 24d is formed in the cover plate 24, extending downwards from the upper surface 24c. The recess 24d has a T-shaped cross-section when viewed from the y-axis direction and extends in the y-axis direction. The lower end of the main body 156a and the flange area 156b of the pin 156 are received in the recess 24d.

[0108] The recess 24d guides the pin 156 in the z-axis direction and prevents the pin 156 from rotating about a central axis of the main body 156a. The upper end of the main body 156a of the pin is inserted through the central opening of the coupling element 42, which can rotate about the main body 156a. Furthermore, the coupling element 42 can move together with the pin 156 in the y-axis direction. In this embodiment, the coupling element 42 is guided in the y-axis direction by the engagement of the flange region 156b of the pin 156 with the recess 24d. Consequently, the flange region 156a and the recess 24d form the guide mechanism 158.

[0109] The drive unit 154 is, for example, an oil-hydraulic or pneumatic cylinder and has a drive shaft 154a. The tip end of the drive shaft 154a is fixed to the main body 156a of the pin 156. The drive unit 154 moves the coupling element 42 by pushing and retracting the drive shaft 154a in the z-axis direction between a Fig. 14 shown intervention positions and one in Fig. 16 shown separation position.

[0110] If the coupling element 42 is in the Fig. When the coupling element 42 is arranged in the engagement position shown in Figure 14, it engages with the adjacent coupling elements 40 and 44 and transmits the rotation of the coupling element 40 to the coupling element 44. If, on the other hand, the coupling element 42 is in the position shown in Figure 14, it engages with the adjacent coupling elements 40 and 44 and transmits the rotation of the coupling element 40 to the coupling element 44. Fig. When the coupling element 42 is arranged in the separation position shown in Figure 16, it is separated from the coupling elements 40 and 44, and the rotation of the coupling element 40 is not transmitted to the coupling element 44. In this way, the coupling element 42 can selectively engage with the coupling elements 40 and 44 in the present embodiment.

[0111] If the feed table device 150 according to this embodiment is placed on the surface instead of the feed table device 10 in Fig. In the robot system 60 shown in Figure 3, the control device 64 controls the drive unit 154, and the coupling element 42 is selectively engaged with the coupling elements 40 and 44 depending on the task. When the coupling element 42 is in the engagement position, both the first table 12 and the second table 16 can be moved, and when the coupling element 42 is in the disengagement position, only the first table 12 can be moved. This design makes it possible to perform even more tasks flexibly.

[0112] In the feed table device 10 described above, one case was explained in which the second table 16 is configured such that it moves downwards in conjunction with a clockwise rotation of the threaded spindle 34 as viewed from above. However, there is no restriction on this, and the second table 16 can also be configured such that it moves upwards in conjunction with a clockwise rotation of the threaded spindle 34 as viewed from above.

[0113] In this case, the coupling mechanism has 28 (2n - 1) coupling elements. For example, it is possible to configure the in Fig. 1. To omit the coupling element 42 shown and to bring the coupling elements 40 and 44 into position. In this case, the threaded spindles 30 and 34, viewed from above, will rotate in the same direction when the coupling element 40 is rotated, and as a result, the first table 12 and the second table 16 can be rotated in opposite directions to each other.

[0114] An optical sensor can also be used in the robot system 60 described above. In this case, the control device 64 can transmit the position data in the robot coordinate system C in step S2 described above. R The unmachined workpieces arranged on the top pallet P on the first table 12 are obtained by taking an image of the workpieces with the optical sensor.

[0115] Furthermore, in step S3 described above, the control device 64 can transfer the position data into the robot coordinate system C. RThe position at which a machined workpiece is to be placed on the top pallet P on the second table 16 can be determined by capturing an image of the top pallet on the second table 16 with the optical sensor. Since, in this case, pallets P and workpieces can be placed at any position on tables 12 and 16, clamping devices for positioning the pallets P and workpieces become unnecessary.

[0116] Furthermore, in step S7, the control device 64 can input the position data into the robot coordinate system C. R The position of the handle G of the top pallet P on the first table 12 is obtained by capturing an image of the top pallet P with the optical sensor. And the control device 64 can, in step S8, transfer the position data into the robot coordinate system C. RThe position of the actuating part 46 is obtained by capturing an image of the actuating part 46 with the optical sensor. In this case, the actuating part 46 can be reliably grasped by the end effector 74 regardless of the rotational angle in which the actuating part 46 is positioned at the time of the start of step S8.

[0117] In feed table device 10, the transmission ratio (reduction ratio) of the coupling elements 38 and 40, 40 and 42, and 42 and 44 can be arbitrary. In feed table device 90, the transmission ratio (reduction ratio) of the coupling elements 38 and 42, and 42 and 44 can be arbitrary. And in feed table devices 100 or 110, the transmission ratio (reduction ratio) of the coupling elements 38 and 44 can be arbitrary. Furthermore, the coupling elements 38, 40, 42, 44, or 104 are not limited to gears but can also be elements made of a material with a high coefficient of friction (rubber, resin, or the like).

[0118] The installation position of the actuating element 46 is not limited to the positions of the embodiments described above. For example, in the feed table device 10, the actuating element 46 can be configured on any of the coupling elements 38, 42, and 44. In the feed table device 120, the actuating element 46 and the reduction gear 124 can be configured on any of the coupling elements 40, 42, and 44. And in the feed table device 130, the actuating element 46, the force receiving element 142, and the auxiliary device 134 can be configured on any of the coupling elements 40, 42, and 44.

[0119] In the feed table device 150, the coupling element 40 can be designed to be movable in the y-axis direction, and the drive element 140 can be configured to advance and retract the coupling element 40. In the embodiments described above, it is also possible to omit pallets P and bring the workpieces into direct contact with specific positions on the table 12 or 16. The table 12 or 16 can have any shape, as long as pallets P or workpieces can be placed on it.

[0120] The position sensor 26 is not limited to a proximity switch; it can also be an element capable of detecting the position (z-axis coordinate, distance from the position sensor 26) of the first table 12 (a pallet on the first table 12) or the second table 16 (a pallet on the second table 16), such as a displacement sensor, a linear scale, or the like. In this case, the control device 64 can determine in step S9 described above whether the detection result of the position sensor (z-axis coordinate, distance) lies within a certain permissible range, and determine YES if it does.

[0121] The feed device 14 or 18 in the robot system 60 does not need to be a ball screw device. For example, the feed devices 14 and 18 can be devices that can transport pallets P or workpieces, such as a belt conveyor. In this case, the coupling elements are designed to be inserted between two belt conveyors and to couple the two belt conveyors. Alternatively, the feed devices 14 and 18 can also be designed to move the tables 12 and 16 along the xy-plane (for example, the x-axis).

[0122] In the robot system 60, a case was described in which the robot 62 loads and unloads workpieces with respect to a processing device, but there is no restriction on this and the robot 62 can, for example, be a robot that loads wafers into and unloads them from a semiconductor processing device, or it can also be a robot that transports elements to any other device.

[0123] The robot 62 is not limited to a vertical articulated robot, but can be any type of robot, such as a horizontal articulated robot, a parallel-jointed robot, or the like. The end effector 74 can also be a structure that, instead of finger parts that can be opened and closed, has, for example, a suction element that can pick up objects. Furthermore, in addition to (or instead of) the finger parts 80 (the suction element), a chuck can also be provided on the end effector 74. For example, this chuck can have an opening that engages with the actuating part 46 by receiving it.

[0124] The properties of the various embodiments described above can also be combined. For example, the one described in Fig. Auxiliary device 134 shown in 12 on the in Fig. The coupling mechanism 122 shown in Figure 11 is used. In this case, the drive force amplification mechanism comprises the reduction gear 124 and the auxiliary device 134. Or, in the case shown in Fig. In the coupling mechanism 92 shown in Figure 8, the coupling element 42 can be designed to be movable, which is shown in Figure 8. Fig. The drive unit 154 shown in Figure 14 is applied to the coupling mechanism 92, and the coupling element 42 is selectively engaged with the coupling element 44.

[0125] The present disclosure has been explained above by means of embodiments, but the embodiments described above do not limit the invention according to the claims.

Claims

[1] Robot system (60), comprising: a robot (62); a first table (12) on which the robot (62) performs an activity; a second table (16) on which the robot (62) performs an activity; a first feed device (14) which is designed to perform a feed operation of the first table (12); a second feed device (18) designed to perform a feed operation of the second table (16); a coupling element (38, 40, 42, 44) configured to couple the movements of the first feed device (14) and the second feed device (18); and a control device (64) designed to to control a first operation of the robot (62) for the activity and a second operation of the robot (62) different from the first operation, wherein in the second operation the robot (62) actuates an actuating part (46) of the coupling element (38, 40, 42, 44) in order to arrange the first table (12) and the second table (16) in positions corresponding to the activity. [2] Robot system (60) according to claim 1, wherein the control device (64) controls the second operation on the basis of a relationship between a range of motion of the first table (12) by the first feed device (14), a range of motion of the second table (16) by the second feed device (18) and an actuation range of the coupling element (38, 40, 42, 44) by the robot (62). [3] Robot system (60) according to claim 1 or 2, further comprising a position sensor (26) configured to detect the position of the first table (12) or the second table (16), wherein the control device (64) controls the second operation based on a detection result of the position sensor (26). [4] Robot system (60) according to one of claims 1 to 3, wherein the coupling element (38, 40, 42, 44) moves the first table (12) and the second table (16) in opposite directions according to the second operation of the robot (62). [5] Robot system (60) according to one of claims 1 to 4, wherein the coupling element (38, 40, 42, 44) moves the first table (12) and the second table (16) by the same distance according to the second operation of the robot (62). [6] Robot system (60) according to any one of claims 1 to 5, wherein the first feed device (14) has a first threaded spindle (30), and the second feed device (18) has a second threaded spindle (34), wherein the coupling element (38, 40, 42, 44) has a gear train (38, 40, 42, 44) which is arranged between the first threaded spindle (30) and the second threaded spindle (34). [7] Feed table device (10), comprising: a first table (12); a second table (16); a first feed device (14) designed to move the first table (12); a second feed device (18) designed to move the second table (16); and a coupling element (38, 40, 42, 44) which is configured to effect coupled feed movements of the first feed device (14) and the second feed device (18) under an external drive force, wherein the coupling element (38, 40, 42, 44) has an actuating part (46) which is configured to be actuated by a robot (62) in order to receive the drive force.

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