Scanner device, ophthalmic device and method for operating the same

Abstract

A scanner device 100 for an ophthalmic device and a method for operating the same are described. The scanner device is provided with an input optic 110 for at least one laser beam 140; a first scanner 130a and a second scanner 130b, which are arranged downstream of the input optic in the direction of propagation of the laser beam and are each configured to deflect the laser beam in a direction lateral, in particular perpendicular, to its direction of propagation; and a scan optic 150, which is arranged downstream of the first and second scanners in the direction of propagation of the laser beam and is configured to focus the laser beam onto a plurality of predetermined target points of an image field 160. At least one focusing optical element 172 is provided downstream of the first scanner and the second scanner in the direction of propagation of the laser beam.The laser beam is imaged onto a curved intermediate image 174 for the image field 160.

Description

[0001] The invention relates to a scanner device for an ophthalmological device, an ophthalmological device for forming cuts in an eye using laser radiation, a method for operating the same, and a computer program product.

[0002] Scanner devices for ophthalmic procedures, e.g., for corneal surgery using a femtosecond laser beam, are known. DE 102011006085 A1 discloses a scanner device with a focusing optic whose position relative to the eye can be changed in order to shift the focus position of the laser beam from the cornea to the lens. US2008 / 0186551 A1 describes a scanner device that is Fig. Figure 1 is shown schematically. The scanner device 10 has an input optic 11 with an axially displaceable optical element 12, also called a z-scanner, deflecting optical elements 13a and 13b, and a focusing optic 15. The laser beam 14 can be deflected laterally by the deflecting optical elements 13a and 13b, which in Fig. Figure 1 is schematically illustrated with two laterally shifted beams of the laser beam 14. Between the optical elements 13a and 13b, as shown in Fig. Figure 1 shows a pupil optic 17 with optical elements (shown as lines) for shaping the laser beam 14. The movable optical element 12 of the input optic 11 allows the focus of a laser beam 14 at the eye to be moved axially. In a neutral position of the z-scanner 12, the laser beam is parallel to the first optical element 13a and also parallel to the second optical element 13b. In a position of the z-scanner that deviates from the neutral position, the laser beam is convergent or divergent to optical element 13a and is guided convergently or divergently by the pupil optic to optical element 13b, respectively, thereby generating a planar intermediate image between optical elements 13a and 13b. The focusing optic 15 with optical elements (shown as lines) focuses the collimated incident laser beam 14 onto a point in a target area of ​​the eye.When the angle of incidence of the laser beam 14 is changed, its focus moves on a planar image field 16 perpendicular to the optical axis of the laser beam 14. In order to create a section in the eye with a typical curvature, e.g., the natural curvature of the eye, the optical element 12 is axially displaced such that the laser focus can follow a path curved away from the focusing optics 15. The displacement of the optical element 12 occurs at a speed and with a stroke range that result in inertia and a large installation space for the scanner device.

[0003] The object of the invention is to provide a scanner device for an ophthalmic device and a method for operating the same, with which focused laser radiation can be provided simply, in a space-saving and fast manner.

[0004] The invention is characterized in the independent claims. The dependent claims relate to preferred embodiments.

[0005] One embodiment relates to a scanner device for an ophthalmological device, in particular for an ophthalmological device for forming cuts in an eye using laser radiation.The scanner device is provided with an input optic for at least one laser beam; a first scanner and a second scanner, which are provided downstream of the input optic in the direction of propagation of the laser beam and are each configured to deflect the laser beam in a direction lateral, in particular perpendicular, to its direction of propagation, wherein the second scanner is arranged downstream of the first scanner in the direction of propagation of the laser beam and the direction of deflection of the second scanner is at an angle, in particular perpendicular, to the direction of deflection of the first scanner; and a scan optic, which is provided downstream of the first and second scanners in the direction of propagation of the laser beam and is configured to focus the laser beam onto a plurality of predetermined target points of an image field, in particular an image field in a target area of ​​an eye.In the direction of propagation of the laser beam between the first and second scanners, at least one focusing optical element is provided, which is designed to direct the laser beam towards the second scanner. The input optics are designed and / or adjustable to focus the laser beam onto the first scanner in such a way that the laser beam is focused in the direction of propagation, either in front of or behind the focusing optical element, onto a curved intermediate image for the image field.

[0006] With the scanner device of embodiments, the laser beam can be focused onto a plurality of predetermined target points of a curved image field based on the already curved intermediate image. The generated intermediate image can thus define a curvature and / or bulge suitable for the application of the laser beam, i.e., a fully pre-formed curvature and / or bulge, or an incompletely or sectionally pre-formed curvature and / or bulge. The input optics can track the laser focus in the z-direction without a z-scanner, e.g., using a fixed lens of the input optics instead, or without a z-scanner during section generation for the individual laser spots used to create the section, or with a z-scanner operating with a small stroke range and / or at a low speed, e.g.,The system uses a lens in the input optics that is movable in the z-direction, and projects an image onto a desired curved scan path and / or scan surface, particularly a desired curved scan path and / or scan surface. Furthermore, due to the aggregating optical element between the first scanner (also called the x- or y-scanner) and the second scanner (also called the y- or x-scanner), the space required and / or the number of optical elements between the first and second scanners can be reduced. The scanner device can therefore be designed with a space-saving construction and / or low weight. In addition, the scanner device can operate at high speed. Because of the curved intermediate image, desired shaped and / or variably shaped image fields, especially curved image fields, can be easily generated.to create curved cutting paths or cutting surfaces in an eye and / or parallel to the surface of a curved or flat contact element.

[0007] In various embodiments, the scanner device can be designed and / or operated with or without at least one z-scanner. A z-scanner can be understood as an optical element for adjusting or shifting at least one focus of the laser beam parallel to its propagation direction, e.g., a lens that can be shifted in or parallel to the propagation direction of the laser beam, also called the z-direction. In some embodiments, a z-scanner can be provided in the input optics for varying the curvature, in particular the radius of curvature, of the intermediate image and the image field in the target area of ​​the eye. A z-scanner can also be provided in the scan optics for varying the distance of the image field in the target area of ​​the eye from the scan lens.

[0008] At least one z-scanner, in particular a movable optical element, can be provided in the input optics and / or in the scan optics and / or at another position in the laser beam path for moving or adjusting at least one focus of the laser beam parallel to its propagation direction. At least one of the z-scanners of the input optics can be designed and / or adjustable and / or used to vary the curvature of the intermediate image and the image field in the target area of ​​the eye. At least one of the z-scanners of the scan optics can be designed and / or adjustable and / or used to vary the curvature of the image field in the target area of ​​the eye. At least one of the z-scanners of the scan optics can be designed and / or adjustable or used to vary the distance of the image field in the target area of ​​the eye from the scan lens.At least one of the z-scanners of the input optics and / or the scan optics and / or at the other position in the laser beam path can be designed and / or adjusted and / or used for individual, independent adjustment of the z-position of one or more laser spots in the image field or in another target area of ​​the eye, e.g., for an access section from an outer surface of the eye to a section path or surface, or for generating astigmatic lenticules. However, due to the predefined or preset curvature of the image field, the z-travel of the z-scanner required for generating an astigmatic surface is small.

[0009] The second scanner can be configured to direct and / or deflect the laser beam towards the scanning optics. The scanner device can further be used for a laser beam provided as a single spot, i.e., a single beam, and / or as a multi-spot, i.e., multiple beams, where a spot, also called a laser spot, can be understood as the laser focus on a target point.

[0010] The converging optical element can be configured to focus the laser beam towards the second scanner. This allows the laser beam to strike the second scanner without collimation. Furthermore, the converging optical element can be configured to collimate the laser beam onto the second scanner, particularly when the first scanner is illuminated convergently. The converging optical element can be a reflective optical element. The converging and / or reflective optical element can be a curved mirror whose curvature is twice that of the intermediate image when the light is collimated. The input optics can be configured and / or adjustable to image the laser beam onto the first scanner divergently, collimatedly, and / or convergently. In this way, variations in the curvature of the intermediate image and / or the image field can be achieved.The input optics can be configured to image the laser beam onto the first scanner divergently, collimated, and / or convergently in at least one operating mode. The input optics can be operated in at least one operating mode. The input optics, the first scanner, and the focusing optical element can be configured to image the laser beam onto the second scanner divergently and / or collimatedly.

[0011] These measures, individually or in combination, allow the scan optics and / or the optics between the first and second scanners, also known as the pupil optics, to be designed with a small number of components, particularly for small laser foci and a resulting high numerical aperture. Furthermore, the curved intermediate image can be generated in the pupil optics, i.e., between the first and second scanners. This results in a simple design, low weight, and a compact scanner device.

[0012] The input optics can be designed and / or adjusted such that the laser beam is projected onto the first scanner divergently or collimated, and the curved intermediate image is formed between the collecting optical element and the second scanner. The curved intermediate image can have edges that curve towards the first and / or second scanner. In other words, the intermediate image can be curved away from the collecting optical element. For example, the first scanner can be illuminated with the laser beam divergently or collimated, the intermediate image can be positioned between the collecting optical element and the second scanner, the second scanner can be illuminated with the laser beam divergently, the intermediate image can have its edges curved towards the second scanner, and the image field can have its edges curved away from the scanning lens.In another example, the first scanner can be illuminated convergently with the laser beam, the intermediate image can be positioned between the first scanner and the collecting optical element, the second scanner can be illuminated collimated with the laser beam, the intermediate image can be curved towards the first scanner, and the image field can be flat or curved with its edges towards the scanning lens.

[0013] With embodiments of the scanner device, it is possible to illuminate the first scanner convergently, collimatedly, and / or divergently. In particular, the first scanner can be illuminated convergently, collimatedly, and / or divergently sequentially. Embodiments of the scanner device can further enable the generation of rotationally symmetric curved sections, in particular section surfaces and / or section paths, in the eye. This can be achieved without requiring a z-scanner in the input optics to be tracked in the z-direction for the individual laser spots used to generate the section during section generation. The curvature, in particular the radius of curvature, of an entire section, section surface, and / or section path can be predefined and / or adjusted in the input optics. This is achieved, in particular, by predefined or adjusting the divergence of the laser beam projected onto the first scanner.The scan optics can shift the z-position of an entire section, but preferably, the scan optics do not adjust the z-position of individual laser spots during section generation. This eliminates the need for a z-scanner to adjust the focus position of individual laser spots during section generation for rotationally symmetrical sections.

[0014] Furthermore, the image field can have a negative Petzval radius. In other words, the image field of the scanning optics can be curved away from the scanning optics, such that its Petzval radius is negative, i.e., < 0.

[0015] The intermediate image and / or the image field can have a curvature corresponding to the curvature of a contact element on the eye side. Alternatively, the intermediate image and / or the image field can have a curvature corresponding to the mean curvature of a predetermined mean cutting path or surface to be generated in the eye by the laser beam. In this way, the image field of the scan optics can be shaped and / or varied to suit the application of the laser beam.

[0016] The input optics can be designed and / or adjustable to generate different radii, also called radii of curvature, of the intermediate image and / or the image field and / or the cutting path or surface. For example, several positions of a z-scanner, e.g., an optical element such as a lens that can be moved in or parallel to the direction of propagation of the laser beam, can be provided and / or adjustable in the input optics to achieve different radii of the cutting path or surface at the eye. The input optics can have at least one optical element, in particular a lens that can be moved parallel to the direction of propagation of the laser beam, designed to change the radius, also called the radius of curvature, of the intermediate image and / or the image field and / or the cutting path or surface.

[0017] The scanning optics can be designed and / or adjustable to generate at least partially different radii of the image field and / or the cutting path or surface. The scanning optics can include at least one optical element, in particular a lens that is movable parallel to the direction of propagation of the laser beam and is designed to at least partially change the radius of the image field and / or the cutting path or surface.

[0018] The input optics and / or the scan optics can each have at least one movable optical element for shifting at least one focus of the laser beam parallel to its propagation direction. With one of the movable optical elements of the input optics, the radius of the intermediate image, and thus of the image field and / or the section path or section surface, can be changed as described above. With one of the movable optical elements of the scan optics, the radius of the image field and / or the section path or section surface can be changed as described above. With one of the movable optical elements of the input optics and / or the scan optics, the positions of individual laser spots in the z-direction can be adjusted independently of each other during section generation. Thus, the radius of the image field and / or the axial position of the image field at the eye can be adjusted.

[0019] The input optics can be designed to compensate for optical aberrations of the converging optical element. The input optics can also be designed to (pre-)compensate for spherical aberration, coma, and / or astigmatism, which can arise, for example, from a concave mirror. These measures, individually or in combination, allow the laser beam to strike the second scanner convergently, collimated, or divergently. In this way, sections with different radii and / or depths can be performed in the eye at high speed, even without an additional scanner that adjusts the focus of the laser beam parallel to its propagation direction, or without activating the additional scanner.

[0020] Furthermore, at least one additional scanner, also called a z-scanner, can be provided for adjusting at least one focus of the laser beam parallel to its propagation direction within the image field. This scanner can be located in the input optics and / or the scan optics and / or at another position in the laser beam path. The at least one additional scanner can be one of the movable optical elements of the input optics and / or the scan optics, e.g., at least one lens. The input optics can have lenses with small diameters that can be moved axially quickly. The scan optics can have lenses with larger diameters than the input optics due to the deflection of the laser beam by the x- / y scanners. Therefore, the z-position of the image field in the eye can be changed more quickly with the input optics than with the scan optics.

[0021] The focusing optical element can be configured at least partially as a concave mirror, in particular as a front-surface mirror, and / or as a segment, in particular a strip-shaped segment, of a concave mirror. A reflective surface of the concave mirror can be configured at least partially as a spherical or toric mirror. Due to the at least partial or segmented configuration of the focusing optical element as a concave mirror, it is possible to generate the curved intermediate image in the pupil optics, in particular in front of the second scanner, and / or to ensure that the laser beam strikes the second scanner divergently.

[0022] The first and second scanners can be arranged at a distance from each other of between 1 and 3 times, preferably a maximum of 2 or 1.5 times, the diameter of the laser beam, particularly a collimated one, on either the first or second scanner. This distance can be understood as the distance from the center of one scanner to the center of the other. The beam diameter on the first and / or second scanner can each be between 5 mm and 20 mm, preferably between 10 mm and 18 mm. The radius of curvature of the concave mirror can be between 10 and 30 times, preferably between 15 and 25 times, the diameter of the laser beam, particularly a collimated one, on either the first or second scanner.Furthermore, the first and second scanners can be arranged at a distance from the concave mirror that deviates from the radius of the concave mirror by less than or equal to 20%, preferably less than or equal to 15%, more preferably less than or equal to 10%. This distance can be understood as the distance from the scanner center to the vertex of the concave mirror. Thus, the first and second scanners can be located close to each other, positioned near the center of curvature of the concave mirror, and / or at a distance from the concave mirror that deviates, for example, from the radius of the concave mirror by less than 15%.

[0023] The first and second scanners can be positioned centrally within the concave mirror and / or at the center of curvature of the concave mirror. The concave mirror can be designed to create at least one focus of the laser beam at half its radius of curvature. In the direction of laser beam propagation, additional optical elements can be provided between the first and second scanners to guide the laser beam efficiently from the first to the second scanner. Optical compensation elements with cylindrical or cubic shapes can be provided in the direction of laser beam propagation upstream of the first scanner to compensate for unwanted deviations of the laser beam. These measures enable a simple and space-saving design with a small number of optical components in the scanner device, particularly in the pupil optics.

[0024] The scanner device can include a control unit for controlling the first and second scanners and / or at least one element selected from which at least one further scanner, the optical element for changing the radius of the intermediate image and / or the image field, and the movable optical element for shifting at least one focus of the laser beam parallel to the propagation direction. The control unit can be wirelessly or via a wired data connection to the first scanner, the second scanner, and / or the at least one further scanner. The first scanner, the second scanner, and / or the at least one further scanner, in particular their actuators, can each be configured to be controlled independently of one another.

[0025] One embodiment relates to an ophthalmological device for forming incisions in an eye using laser radiation, with a scanner device according to one of the above embodiments or variations thereof.

[0026] Another embodiment relates to a method for operating a device according to one of the foregoing embodiments or variations thereof, with - Introducing at least one laser beam into the scanner device by means of the input optics; - multiple deflection of the laser beam, at least by means of the first scanner, in a direction lateral, in particular perpendicular, to its propagation direction, wherein the first scanner deflects the laser beam in the direction of the at least one collecting optical element; - Directing the laser beam towards the second scanner using the collecting optical element; and - Focusing the laser beam onto a plurality of predetermined target points of an image field using the scanning optics; wherein the input optics image the laser beam onto the first scanner in such a way that the laser beam is imaged in the direction of propagation in front of or behind the collecting optical element onto a curved intermediate image for the image field.

[0027] The method can include generating at least one laser beam, e.g., by means of a laser source. The method can include deflecting the laser beam multiple times by means of the second scanner in a direction lateral, in particular perpendicular, to its propagation direction. The method can be used, in particular, to operate a scanner device according to one of the preceding embodiments or variations thereof. The second scanner can direct the laser beam in the direction of the scan optics.

[0028] The collecting optical element can focus the laser beam towards the second scanner. The collecting optical element can collimate the laser beam onto the second scanner. The collecting optical element can at least partially reflect the laser beam. The input optics can image the laser beam onto the first scanner divergently, collimated, and / or convergently. The input optics can be configured to image the laser beam onto the first scanner divergently, collimated, and / or convergently. The input optics can image the laser beam onto the first scanner divergently, collimated, and / or convergently in at least one operating mode. The input optics can be operated in at least one operating mode. The laser beam can be imaged onto the second scanner divergently and / or collimated, in particular by means of the input optics, the first scanner, and the collecting optical element.

[0029] The laser beam can be imaged divergently onto the first scanner, and the curved intermediate image can be formed between the converging optical element and the second scanner. The curved intermediate image can have edges curved towards either the first or second scanner. The image field can have a negative Petzval radius. The intermediate image and / or the image field can have a curvature corresponding to the ocular curvature of a contact element used to contact an eye. The intermediate image and / or the image field can have a curvature corresponding to the mean curvature of a predetermined mean slice path or surface to be generated in an eye by the laser beam.

[0030] Different radii of the intermediate image and / or the image field and / or the intersection path or intersection surface can be generated. The input optics can be adjusted to generate different radii of the intermediate image and / or the image field and / or the intersection path or intersection surface.

[0031] The at least one optical element of the input optics, in particular a lens of the input optics that is movable parallel to the propagation direction of the laser beam, can change the radius of the intermediate image and / or the image field and / or the intersection path or intersection surface. The scanning optics can be adjusted to generate at least partially different radii of the image field and / or the intersection path or intersection surface. The at least one optical element of the scanning optics can at least partially change the radius of the image field and / or the intersection path or intersection surface. The at least one movable optical element of the input optics and / or the scanning optics can shift at least one focus of the laser beam parallel to its propagation direction. Thus, the entire image field at the eye can be shifted. The laser beam can be imaged convergently, collimated, or divergently onto the first scanner.The input optics can compensate for optical aberrations of the converging optical element. For example, spherical aberration, coma, and / or astigmatism, which occur particularly at concave mirrors, can be compensated for.

[0032] The at least one additional scanner can adjust at least one focus of the laser beam parallel to its propagation direction in the image field.

[0033] The concave mirror can focus the laser beam at least once at half its radius of curvature. In the direction of laser beam propagation between the first and second scanners, additional optical elements can be used to guide the laser beam from the first to the second scanner in a space-saving manner. In the direction of laser beam propagation in front of the first scanner, undesired deviations of the laser beam can be compensated for using optical compensation elements with cylindrical or cubic shapes.

[0034] Another embodiment relates to a planning method for generating control data for a scanner device and / or an ophthalmological device according to one of the preceding embodiments and variations thereof, in particular control data for executing a method for operation according to one of the preceding embodiments and variations thereof, wherein control data for controlling the first and the second scanner and / or at least one element selected from the at least one further scanner, the optical element for changing the radius of the intermediate image and / or the image field and the movable optical element for moving at least one focus of the laser beam parallel to the direction of propagation are generated.Another embodiment relates to a planning device for generating control data for a scanner device and / or an ophthalmological device according to one of the preceding embodiments and variations thereof, in particular control data for executing a method for operation according to one of the preceding embodiments and variations thereof. The planning method can be executed by the planning device according to one of the preceding embodiments and variations thereof. The planning device can, for example, be the control unit of the scanner device or be data-conductingly connected to the control unit via an interface. The control data can be transmitted to the control unit via the interface.

[0035] Another embodiment relates to a therapeutic method for forming incisions in an eye using laser radiation with a scanner device and / or an ophthalmological device according to one of the above embodiments and variations thereof, comprising at least one method according to one of the above embodiments and variations thereof.

[0036] One embodiment relates to a computer program product comprising one or more program modules that cause the scanner device according to one of the preceding embodiments or variations thereof, or the ophthalmic device according to one of the preceding embodiments, to perform steps of the method according to one of the preceding embodiments or variations thereof, in particular when the program modules are loaded into a memory of the scanner device or the ophthalmic device or the control unit.

[0037] The foregoing embodiments of the method for operating a device or variations thereof can each achieve the same advantages, operating modes and / or functions as the foregoing embodiments of the scanner device and / or the ophthalmic device and variations thereof, in particular with identical and / or analogous features.

[0038] It is understood that the features mentioned above and those to be explained below can be used not only in the combinations given, but also in other combinations or on their own, without leaving the scope of the present invention.

[0039] The invention is explained in more detail below with reference to exemplary embodiments and the accompanying drawings, which also disclose essential features of the invention. These exemplary embodiments serve only for illustration and are not to be interpreted as limiting. For example, a description of an exemplary embodiment with a plurality of elements or components is not to be interpreted as meaning that all of these elements or components are necessary for implementation. Rather, other exemplary embodiments may also contain alternative elements and components, fewer elements or components, or additional elements or components. Elements or components of different exemplary embodiments may be combined with one another unless otherwise specified. Modifications and variations described for one of the exemplary embodiments may also be applicable to other exemplary embodiments.To avoid repetition, identical or corresponding elements in different figures are designated with the same reference symbols and are not explained multiple times. The figures show: Fig. 1 schematically a scanner device 10 of the state of the art; Fig. 2a and Fig. 2b schematically as an example a scanner device 100 and a method for operating the same; Fig. 3 schematically an ophthalmological device 200 with a modification of the scanner device 100; Fig. 4a and Fig. 4b each schematically shows a section of the example of scanner device 100; and Fig. 5a to 5c each schematically illustrate an exemplary operation of the scanner device 100.

[0040] In the Fig. Figures 1 to 5c schematically represent optical elements only by their respective principal plane. In embodiments and examples, the scanning optics can be referred to as focusing optics or as a scanning lens. The propagation direction of the laser beam can have successive, different direction vectors; that is, the term propagation direction can include changes in the laser beam's direction. The term "curvature" or "curved" can be understood or referred to as "curvature" or "arched." The term "parallel to the propagation direction" can be understood synonymously with, or include, the term "in the propagation direction."

[0041] In embodiments and examples, the term scanner can be understood as an optical element movable at a speed of 50 to 5000 Hz, equipped with at least one actuator, e.g., one or more piezo or galvo actuators. The movement of the scanner causes the focus of a laser beam moved by the optical element to move in its direction of propagation, e.g., in the case of a z-scanner, or laterally to its direction of propagation, e.g., in the case of an x- or y-scanner. A lens that can be moved parallel to the (local) direction of propagation and adjusts the divergence of the laser beam can be used as a z-scanner, for example. A deflecting mirror that can be tilted about a tilting axis can be used as an x- or y-scanner, for example.

[0042] In embodiments and examples, the term "curvature" can be understood as mean curvature. Furthermore, in embodiments and examples, the term "curvature" can be understood as mean curvature. For example, toric surfaces are cut with the laser beam to correct astigmatism. In such a case, a z-scanner can, in particular, define an x-direction and a y-direction depending on the current azimuth angle, e.g., by moving it slightly around its center position. In such a case, a z-scanner can, in particular, have different settings depending on the current azimuth angle in the eye (determined relative to a center position of the x- and y-scanners as the coordinate origin), which describes a placement in the x-direction and y-direction, e.g., by moving the z-scanner slightly axially around its center position.

[0043] Fig. Figure 2a shows, as an example, a scanner device 100. The scanner device 100 has an input optic 110 for a laser beam 140, which is generated by a laser source (not shown). In the direction of propagation of the laser beam 140 behind the input optic 110, the scanner device 100 has an x-scanner 130a designed as a tiltable mirror and a y-scanner 130b designed as a tiltable mirror. The y-scanner 130b is arranged behind the x-scanner 130a in the direction of propagation of the laser beam 140. With the x- and y-scanners 130a and 130b, the laser beam 140 can be deflected laterally to its direction of propagation, which in Fig. Figure 2a schematically illustrates this with two laterally shifted beams of the laser beam 140. The direction of deflection of the y-scanner 130b is perpendicular to the direction of deflection of the x-scanner 130a. The x and y directions are in Fig. 2a is not shown due to the simplified, non-perspective representation.

[0044] In the direction of propagation of the laser beam 140 behind the y-scanner 130b, a focusing optic 150 is provided as a scanning optic. The focusing optic 150 with optical elements (schematically represented as lines) focuses the collimated incident laser beam 140 in a z-direction onto a target point in a target area, e.g., an area of ​​the eye to be treated with laser surgery.

[0045] Between the x-scanner 130a and the y-scanner 130b, a converging optical element 172 is provided in a pupil optic 170, which is designed to direct the laser beam 140 towards the y-scanner 130b. In the present example, the converging optical element 172 is designed as a reflective optical element, specifically as a curved mirror whose curvature corresponds to twice the desired curvature of the intermediate image 174.

[0046] A method for operating the scanner device 100 is described in Fig. Figure 2b shows that in the operation of the scanner device 100, the generated laser beam 140 is introduced into the scanner device 100 by means of the input optics 110 in step S1. In step S2, the laser beam 140 is deflected laterally, in this example perpendicularly, to its direction of propagation by means of the x-scanner 130a and optionally the y-scanner 130b, in each of two directions, wherein the x-scanner 130a directs the laser beam in the direction of the at least one reflective optical element 172. By means of the at least one reflective optical element 172, the laser beam 140 is directed in the direction of the y-scanner 130b in step S3. The y-scanner 130b directs the laser beam towards the scan optics 150. In step S4, the laser beam 140 is focused by means of the scan optics 150 onto a plurality of predetermined target points.The input optics focus the laser beam onto the first scanner in step S1 such that the laser beam is projected onto a curved intermediate image 174 for the image field, either in front of or behind the collecting optical element 172 in the direction of propagation. Due to the curved intermediate image 174, when the angle of incidence of the laser beam 140 incident on the scan optics 150 is changed, its focus moves on a curved image field 160. Therefore, the target points lie on the curved image field 160. If the curvature of the image field 160 corresponds to the curvature of a desired laser surgical incision in an eye, a rotationally symmetric curved incision can be made in the eye with the laser beam 140 without a z-scanner.

[0047] To generate toric cross-sectional surfaces, as may be necessary for the correction of astigmatism, small axial movements of z-scanners provided in the input optics 110 and / or in the scan optics 150, as described by way of example below, and / or small changes in the input divergence can be made in steps S2 and / or S4.

[0048] In one example, the input optics 110 are configured to collimate the laser beam onto the x-scanner 130a. In other examples, the input optics 110 are configured to diverge or converge the laser beam onto the x-scanner. The imaging of the laser beam onto the x-scanner 130a can be achieved, for example, by a correspondingly imaging, non-movable lens in the input optics.

[0049] In an exemplary operation, the x-scanner 103a is illuminated divergently or collimated with the laser beam 140. When a new target point of the laser beam 140 is to be set in the x-direction, the x-scanner 130a deflects the laser beam 140 accordingly in the x-direction. The laser beam 140 is focused by the reflective optical element 172 onto the curved intermediate image 174 in front of the y-scanner 130b. Behind the intermediate image 174, the laser beam 140 is imaged divergently onto the y-scanner 130b. When a new target point of the laser beam 140 is to be set in the y-direction, the y-scanner 130b deflects the laser beam 140 accordingly in the y-direction.

[0050] Fig. Figure 3 schematically shows an example of an ophthalmological device 200 for creating incisions in an eye using laser radiation. In this example, the ophthalmological device 200 includes a laser source 190, configured to generate the laser beam 140, and a modification of the scanner device 100 with a z-scanner 120. The input optics 110, arranged behind the laser source 190, contain the z-scanner 120, which is configured as an optical element that is axially displaceable, i.e., parallel to or in the propagation direction of the laser beam, in this case a lens that influences the divergence of the laser beam 140. By displacing or moving the z-scanner 120, i.e., its lens, parallel to or in the propagation direction of the laser beam, the focus of the laser beam 140 is shifted parallel to the z-direction.Thus, depending on the z-position of the z-scanner 120, the laser beam 140 can be collimated, divergent, or convergently projected onto the x-scanner 130a. This allows different curvatures of the intermediate image and the image field to be set, depending on the z-position of the z-scanner 120. By moving the lens in the z-scanner 120, the curvature of the intermediate image, and therefore also the curvature of the image field at the eye, is changed.

[0051] In Fig. Figure 3 further shows a control unit 180 of the scanner device 100, which is wirelessly or wired connected to the actuators of the x-, y- and / or z-scanners 130a, 130b and 120. The control unit 180 is in Fig. 2a not shown. In the present example, the control unit 180 is designed as the central control unit of the device 200.

[0052] In an exemplary operation of the scanner device 100, the image field 160 is formed by divergent or collimated imaging of the laser beam onto the x-scanner with a curvature that corresponds to the curvature of a contact element used to contact an eye. By adapting the curvature of the image field 160 to the contact element, e.g., a contact lens, the displacement of the z-scanner 120 can be reduced compared to a scanner device in which no curved intermediate image 174 is generated: With a processing diameter of, for example, 10 mm and a contact lens radius of 10 mm, a z-scanner without the curved intermediate image 174 would have to achieve a travel distance in the z-direction during the generation of a section that corresponds to 1.3 mm at the eye. For a contact glass radius of 20 mm, this would result in a travel distance of 0.635 mm, and for a radius of 50 mm, the travel distance would have to be 0.25 mm.However, if the image field 160 is precisely curved to this radius using the curved intermediate image 174, then the necessary path of the z-scanner 120 in the z-direction during section generation is zero. In this case, the individual z-position of the laser spots, i.e., their respective positions in the z-direction, does not need to be individually adjusted by a z-scanner during section generation.

[0053] One application in ophthalmic surgery is the creation of a so-called flap incision. A flap incision with a radius of curvature can be created using the aforementioned exemplary radius of the image field 160 without a z-scanner and / or without individual adjustment of the respective z-position of laser spots in the image field by the z-scanner 120, or an additional z-scanner is only required for the edge incision, but not for the incision of the flap surface that runs parallel to the contact lens surface.

[0054] Another application of ophthalmic surgery is the creation of a so-called lenticule in the corneal tissue. A lenticule is bounded by two cut surfaces with two different cut radii, i.e., radii of curvature. By varying the curvature of the image field 160, which is determined by adjusting the z-scanner of the input optics 110 in the z-direction, both cut radii can be scanned with fixed z-positions of the z-scanner 120.

[0055] The center thickness of the lenticule can be adjusted in the scan lens using a focusing lens, such as that of a z-scanner. By adjusting the input optics 110, i.e., in this example, by moving the lens in the z-scanner 120, the radius of curvature of the image field 160 in the eye can be set for each section. The axial position, i.e., the z-position, of the sections to be generated can be adjusted in the scan lens 150. The respective section itself can be generated without the z-scanner 120 having to individually track, i.e., adjust, the z-positions of the individual laser spots of the section.

[0056] According to another example, the z-scanner 120 is designed such that it, and in particular its lens, can be moved for sections in the cornea with different geometries. By adjusting the curvature of the image field using the curved intermediate image 174, the travel distance of the z-scanner 120 is reduced to a distance which, especially considering a depth-of-image scale between the z-scanner and the eye, corresponds to the thickness of the cornea of ​​approximately 500 µm. Compared to the example above with a contact lens radius of 10 mm, the necessary travel distance is therefore not 1.3 mm + 0.5 mm = 1.8 mm, but a maximum of 0.5 mm.

[0057] Fig. 4a and Fig. Figure 4b schematically illustrates, as an example, a section of the scanner device 100 in which the collecting optical element 172 is a concave mirror. In this example, the concave mirror 172 is designed as a strip-shaped segment of a concave front surface mirror. Fig. Figure 4a shows the concave mirror 172 with the x-scanner 130a and the y-scanner 130b in a perspective view, with the y-scanner 130b positioned behind the x-scanner 130a. Fig. Figure 4b shows the concave mirror 172 with the x-scanner 130a and the y-scanner 130b in a comparison to Fig. 4a Perspective view rotated by an approximately 90° angle, in which the concave mirror 172 is recognizable as a strip.

[0058] The x-scanner 130a and the y-scanner 130b are arranged as close together as possible in the region of the center of curvature of the concave mirror 172 and realize tilting axes arranged at 90° to each other. In the example of the Fig. 4a and Fig. In step 4b, the x-scanner 130a is collimated and illuminated with the laser beam 140. The concave mirror 172 creates a focus at half its radius of curvature. After the focus, the light travels divergently back towards the center of curvature onto the y-scanner 130b.

[0059] In an exemplary operation of the scanner device 100, as in Fig. As illustrated in Figure 4a, the laser beam 140 is collimated by the input optics 110 and focused onto the x-scanner 130a. When the tiltable mirror of the x-scanner 130a is in its neutral position, a beam 140a is deflected onto the central region of the concave mirror 172. When the mirror 130a is deflected in one direction, a beam 140b is deflected onto a region of the concave mirror 172 below its central region. If the mirror 130a is deflected in the opposite direction, a beam 140c is deflected onto a region of the concave mirror 172 above its central region. The beams 140a, 140b, and 140c are reflected by the concave mirror 172 towards the tiltable mirror of the y-scanner 130b, which is shown in the illustration of Figure 4a. Fig. 4a is located behind mirror 130a in the immediate vicinity of the center of curvature of concave mirror 172. Approximately halfway along the radius of curvature of concave mirror 172, a focus is formed in a curved plane for each beam of light 140a to 140c, thereby generating the curved intermediate image 174. Behind the intermediate image 174, the beams of light 140a to 140c are directed divergently onto mirror 130b, which, from the perspective of the Fig. Figure 4b is recognizable, showing only the central beam 140a. The beams 140a to 140c are superimposed at the concave mirror 172; they meet again at the scanner 130b, as shown in the image. Fig. 4a is shown. The beam of light 140a is directed from mirror 130b onto the scanning optics 150 (not in Fig. 4b) guided and, if desired, deflected. In the representation of the Fig. 4b the beam of light 140a is directed from the mirror 130b to the scanning optics upwards out of the plane of the drawing. Fig. 4b out.

[0060] The concave mirror 172 can have a rectangular edge shape and a surface shape that deviates from a sphere, for example, being toric, which is particularly advantageous. Furthermore, the arrangement of the x- and y-scanners 130a and 130b can include additional optical deflection elements to arrange the x- and y-scanners 130a and 130b appropriately in space. Fig. 4a and Fig. Figure 4b shows that the scanner device 100 not only contains a small number of optical elements, but also requires little installation space. Residual errors of the generated beams 140a to 140c can be compensated by optical compensation elements with cylindrical or cubic shape, which are arranged in front of the x-scanner 130a.

[0061] Fig. Figure 5a shows an exemplary operation of the scanner device 100 when the laser beam 140 is projected divergently from the input optics onto the x-scanner 130a. Due to the divergent illumination of the x-scanner 130a, a curved intermediate image 174 of the deflected beam bundles 140a to 140c is formed in the direction of propagation of the laser beam behind the concave mirror 172 and in front of the y-scanner 130b. This is shown in Fig. 5a The beam 140a incident in the central region of the concave mirror 172 and the beam 140b incident in an outer region of the concave mirror are projected at two different deflections. These are imaged divergently onto the y-scanner 130b behind the intermediate image 174 in the direction of propagation of the laser beam, from where they are deflected into the scan optics 150. The scan optics 150, which in Fig. 5a to 5c, simplified as a line, focus the beams 140a to 140c onto the image field 160. The image field 160 is curved away from the scanning lens 150 at its edges. The curvature of the image field 160 corresponds to a desired curvature of a section to be performed in an eye.

[0062] Fig. Figure 5b shows an exemplary operation of the scanner device 100 when the laser beam 140 is collimated and projected from the input optics onto the x-scanner 130a, as also in connection with the example of the Fig. 4a and Fig. 4b described. Due to the collimated illumination of the x-scanner 130a, a curved intermediate image 174 of the deflected beam bundles 140a to 140c is formed behind the concave mirror 172 and in front of the y-scanner 130b in the direction of propagation of the laser beam. The intermediate image 174 is located further away from the scanner 130b than in the example of Fig. 5a. The intermediate image 174 is generated here at approximately half the radius of curvature of the concave mirror 172, i.e., approximately midway between the concave mirror 172 and the scanner 130b. Furthermore, the intermediate image 174 is generated here with a larger radius of curvature compared to the intermediate image 174 of the Fig. 5a. The beam bundles 140a to 140c are imaged divergently in the direction of propagation of the laser beam behind the intermediate image 174 onto the y-scanner 130b, from which they are deflected into the scan optics 150. The scan optics 150 focuses the beam bundles 140a to 140c onto the image field 160. The image field 160 is curved away from the scan lens 150 at its edges. The image field 160 is imaged with a larger radius of curvature compared to the intermediate image 174. Fig. 5a trained.

[0063] Fig. Figure 5c shows an exemplary operation of the scanner device 100 when the laser beam 140 is convergently imaged from the input optics onto the x-scanner 130a. Due to the convergent illumination of the x-scanner 130a, a curved intermediate image 174 of the deflected beam bundles 140a to 140c is formed in the direction of propagation of the laser beam in front of the concave mirror 172, i.e., between the x-scanner 130a and the concave mirror 172. These are reflected by the concave mirror 172 and collimated by the concave mirror 172 before being imaged onto the y-scanner 130b, from which they are deflected into the scan optics 150. The scan optics 150 focuses the beam bundles 140a to 140c onto the image field 160. The image field 160 is either flat or curved at its edges towards the scan lens 150.

[0064] Does the input optics of the scanner device 100 contain the z-scanner 120, as shown in Fig. As shown in Figures 5a to 5c, the divergence of the laser beam 140 can be variably adjusted using the input optics. By adjusting the z-scanner 120, i.e., by moving or repositioning its lens in the direction of propagation of the laser beam, the focus of the laser beam 140 is shifted in the z-direction. Thus, depending on the z-position of the z-scanner 120, the laser beam 140 can be collimated, divergent, or convergent onto the x-scanner 130a. This results in different curvatures of the intermediate image 174 and the image field 160, depending on the z-position of the z-scanner 120. Adjusting the z-scanner changes the radius of curvature of the image field 160. A radius of curvature of a cutting path to be performed on the eye or a curvature of a cutting surface to be performed on the eye is scanned with a fixed z-position of the z-scanner 120.For example, a cut that limits a lenticule towards the anterior surface of the cornea can be performed with a z-scanner setting of 120 according to . Fig. 5a, and a cut that limits the lenticule towards the retina can be made with a setting of the z-scanner 120 according to Fig. 5b. Additionally, the scan lens 150 can include an axially movable lens or a z-scanner to vary the distance of the image field 160 from the lens and to vary the depth of a cut to be made in the eye. QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] DE 102011006085 A1

[0002] US 2008 / 0186551 A1

[0002]

Claims

[1] Scanner device (100) for an ophthalmic device (200), in particular for an ophthalmic device for forming sections in an eye using laser radiation, with - an input optic (110) for at least one laser beam (140); --a first scanner (130a) and a second scanner (130b) which are provided downstream of the input optics (110) in the direction of propagation of the laser beam and are each configured to deflect the laser beam in a direction lateral, in particular perpendicular, to its direction of propagation, wherein the second scanner (130b) is arranged downstream of the first scanner (130a) in the direction of propagation of the laser beam and the direction of deflection of the second scanner is at an angle, in particular perpendicular, to the direction of deflection of the first scanner; and - a scanning optic (150) which is provided in the direction of propagation of the laser beam behind the first and the second scanner and is designed to focus the laser beam on a plurality of predetermined target points of an image field (160), in particular an image field in a target area of ​​an eye; characterized by , that in the direction of propagation of the laser beam (140) between the first scanner (130a) and the second scanner (130b) at least one collecting optical element (172) is provided, which is designed to direct the laser beam towards the second scanner (130b); and the input optics are designed and / or adjustable to image the laser beam onto the first scanner (130a) in such a way that the laser beam is imaged in the direction of propagation in front of or behind the collecting optical element (172) onto a curved intermediate image (174) for the image field (160). [2] Device according to claim 1, wherein the collecting optical element is designed to focus the laser beam in the direction of the second scanner; and / or wherein the collecting optical element is configured to collimate the laser beam onto the second scanner; and / or wherein the collecting optical element (172) is designed as a reflective optical element; and / or wherein the input optics (110) are designed and / or adjustable to image the laser beam divergently, collimatedly and / or convergently onto the first scanner (130a); and / or wherein the input optics (110), the first scanner (130b) and the collecting optical element (172) are configured to divergently and / or collimately image the laser beam onto the second scanner (130b). [3] Device according to one of the preceding claims, wherein the input optics (110) are designed and / or adjustable such that the laser beam is imaged divergently onto the first scanner (130a) and the curved intermediate image (174) is formed between the converging optical element (172) and the second scanner (130b); and / or wherein the curved intermediate image has edges that are curved in the direction of the first scanner or the second scanner (130b); and / or where the image field (160) has a negative Petzval radius; and / or wherein the intermediate image (174) and / or the image field (160) has a curvature corresponding to the ocular curvature of a contact element for contacting an eye; and / or wherein the intermediate image and / or the image field has a curvature corresponding to the mean curvature of a predetermined mean cutting path or cutting surface to be generated with the laser beam in an eye. [4] Device according to any one of the preceding claims, wherein the input optics (110) are designed and / or adjustable to generate different radii of the intermediate image (174) and / or the image field (160) and / or the cutting path or cutting surface; and / or wherein the input optics (110) comprises at least one optical element, in particular a lens movable parallel to the direction of propagation, which is designed to change the radius of the intermediate image and / or the image field and / or the cutting path or cutting surface; and / or wherein the scanning optics (150) are designed and / or adjustable to generate at least partially different radii of the image field and / or the cutting path or cutting surface; and / or wherein the scanning optics (150) comprises at least one optical element, in particular a lens movable parallel to the direction of propagation, which is designed to at least partially change the radius of the image field and / or the cutting path or cutting surface; and / or wherein the input optics (110) and / or the scan optics (150) each have at least one movable optical element (120) for moving at least one focus of the laser beam parallel to its propagation direction; and / or wherein the input optics (110) are designed to compensate for optical aberrations of the converging optical element, in particular spherical aberration, coma and / or astigmatism. [5] Device according to one of the preceding claims, wherein at least one further scanner is provided for adjusting at least one focus of the laser beam parallel to its propagation direction in the image field (160), in particular in the input optics and / or the scan optics (150). [6] Device according to one of the preceding claims, wherein the collecting optical element (172) is at least partially designed as a concave mirror, in particular as a front surface mirror, and / or as a segment, in particular a strip-shaped segment, of a concave mirror, and / or wherein a reflective surface of the concave mirror is at least partially spherical or toric. [7] Device according to claim 6, wherein the first scanner and the second scanner are arranged at a distance from each other which is between 1 and 3 times, preferably a maximum of 2 times or 1.5 times, the diameter, in particular a collimated diameter, of the laser beam on one of the first or second scanners; and / or wherein the radius of curvature of the concave mirror is between 10 and 30 times, preferably between 15 and 25 times, a diameter, in particular a collimated diameter, of the laser beam on one of the first or second scanners; and / or wherein the first scanner and the second scanner are arranged at a distance from the concave mirror which deviates from the radius of the concave mirror by less than or equal to 20%, preferably less than or equal to 15%, more preferably less than or equal to 10%; and / or wherein the first and second scanners (130am 130b) are arranged centrally in the concave mirror (172) and / or at the center of curvature of the concave mirror; and / or wherein the concave mirror (172) is configured to form at least one focus of the laser beam at half its radius of curvature; and / or wherein, in the direction of propagation of the laser beam, further optical elements are provided between the first and the second scanners for space-saving guidance of the laser beam from the first to the second scanner; and / or where, in the direction of propagation of the laser beam, optical compensation elements with a cylindrical or cubic shape are provided in front of the first scanner to compensate for unwanted deviations of the laser beam. [8] Device according to one of the preceding claims, wherein a control device (180) is provided for controlling the first and the second scanner and / or at least one element selected from the at least one further scanner, the optical element for changing the radius of the intermediate image and / or the image field and the movable optical element for moving at least one focus of the laser beam parallel to the propagation direction. [9] Ophthalmological device (200) for forming incisions in an eye using laser radiation, comprising a scanner device (100) according to one of the preceding claims. [10] Method for operating a device (100; 200) according to one of the preceding claims, with - Introducing at least one laser beam (140) into the scanner device (100) by means of the input optics (110) (S1); - multiple deflection of the laser beam at least by means of the first scanner (130a) in a direction lateral, in particular perpendicular, to its propagation direction, wherein the first scanner deflects the laser beam in the direction of the at least one collecting optical element (172) (S2); - Directing the laser beam by means of the collecting optical element (172) towards the second scanner (130b) (S3); and - Focusing the laser beam onto a plurality of predetermined target points of an image field (160) by means of the scanning optics (150) (S4); wherein the input optics (110) maps the laser beam onto the first scanner (130a) such that the laser beam is imaged in the direction of propagation in front of or behind the collecting optical element (172) onto a curved intermediate image (174) for the image field (160). [11] Method according to claim 10, wherein the collecting optical element focuses the laser beam towards the second scanner; and / or wherein the collecting optical element collimates the laser beam onto the second scanner; and / or wherein the collecting optical element (172) reflects the laser beam at least partially; and / or wherein the input optics (110) image the laser beam onto the first scanner (130a) in a divergent, collimated and / or convergent manner; and / or the input optics (110) are adjusted to image the laser beam onto the first scanner (130a) divergently, collimated and / or convergently; and / or wherein the laser beam is imaged divergently and / or collimated onto the second scanner, in particular by means of the input optics (110), the first scanner (130b) and the collecting optical element (172).. [12] Method according to one of the preceding claims 10 and 11, wherein the laser beam is imaged divergently onto the first scanner (130a) and the curved intermediate image (174) is formed between the converging optical element (172) and the second scanner (130b); and / or wherein the curved intermediate image is formed with edges that are curved towards the first scanner or the second scanner; and / or where the image field is formed with a negative Petzval radius; and / or wherein the intermediate image and / or the image field are formed with a curvature corresponding to the ocular curvature of a contact element for contacting an eye; and / or wherein the intermediate image and / or the image field is formed with a curvature corresponding to the mean curvature of a predetermined mean cutting path or cutting surface to be generated with the laser beam in an eye. [13] Method according to any one of claims 10 to 12 above, wherein different radii of the intermediate image (174) and / or the image field (160) and / or the cutting path or cutting surface are generated; and / or wherein the input optics (110) are adjusted to generate different radii of the intermediate image (174) and / or the image field (160) and / or the intersection path or intersection surface; and / or wherein the at least one optical element of the input optics changes the radius of the intermediate image and / or the image field and / or the intersection path or intersection surface; and / or wherein the scanning optics (150) are adjusted to produce at least partially different radii of the image field and / or the cutting path or cutting surface; and / or wherein the at least one optical element of the scanning optics at least partially changes the radius of the image field and / or the scanning path or surface; and / or wherein the at least one movable optical element of the input optics and / or the scan optics each displaces at least one focus of the laser beam parallel to its direction of propagation; and / or wherein the laser beam is imaged convergently, collimated, or divergently onto the first scanner; and / or where optical imaging errors of the collecting optical element, in particular spherical aberration, coma and / or astigmatism, are compensated by means of the input optics. [14] Method according to any one of the preceding claims 10 to 13, wherein the at least one further scanner adjusts at least one focus of the laser beam parallel to its propagation direction in the image field. [15] Method according to any one of the preceding claims 10 to 14, wherein the collecting optical element is at least partially designed as a concave mirror, in particular as a front-surface mirror, and / or as a segment, in particular a strip-shaped segment, of a concave mirror, and / or wherein a reflective surface of the concave mirror is at least partially spherical or toric. [16] Method according to claim 15, wherein the first scanner and the second scanner are arranged at a distance from each other which is between 1 and 3 times, preferably a maximum of 2 times or 1.5 times, the diameter, in particular a collimated diameter, of the laser beam on one of the first or second scanners; and / or wherein the radius of curvature of the concave mirror is between 10 and 30 times, preferably between 15 and 25 times, a diameter, in particular a collimated diameter, of the laser beam on one of the first or second scanners; and / or wherein the first scanner and the second scanner are arranged at a distance from the concave mirror which deviates by less than or equal to 20%, preferably less than or equal to 15%, more preferably less than or equal to 10%, from the radius of the concave mirror; and / or wherein the first and second scanners are arranged centrally in the concave mirror and / or at the center of curvature of the concave mirror; and / or wherein the concave mirror forms at least one focus of the laser beam at half its radius of curvature; and / or wherein, in the direction of propagation of the laser beam between the first and second scanners, the laser beam is guided from the first to the second scanner in a space-saving manner by means of further optical elements; and / or where, in the direction of propagation of the laser beam, undesirable deviations of the laser beam are compensated in front of the first scanner by means of optical compensation elements with cylindrical or cubic shape. [17] Planning method for generating control data for a device according to any one of claims 1 to 9, in particular control data for carrying out a method according to any one of claims 10 to 16, wherein control data for controlling the first and second scanners and / or at least one element selected from the at least one further scanner, the optical element for changing the radius of the intermediate image and / or the image field and the movable optical element for moving at least one focus of the laser beam parallel to the propagation direction are generated. [18] Therapeutic method for forming incisions in an eye using laser radiation with a device (100; 200) according to any one of claims 1 to 9, comprising at least one method according to any one of claims 10 to 17. [19] Computer program product comprising one or more program modules that cause the scanner device according to one of claims 1 to 8 or the ophthalmic device according to claim 9 to perform steps of the method according to one of claims 10 to 18, in particular when the program modules are loaded into a memory of the scanner device or the ophthalmic device or the control unit.

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