DEVICE AND METHOD WORKING WITH A BEAM OF CHARGED PARTICLES FOR ITS OPERATION

Abstract

A device operating with a beam of charged particles, comprising the following: an optical system designed to irradiate a sample with multiple beams of primary charged particles, an optical parameter setting unit (160) designed to set a parameter of the optical system, a detector (101) designed to individually detect several beams of secondary charged particles emitted by the sample, several storage units (112), each designed to store a signal captured by the detector (101) and converted into a digital pixel in the form of a captured image, an assessment value derivation unit (113) designed to derive an assessment value for the beam of primary charged particles from the acquired image, a GUI (130) designed to display an image and receive input from a user, an image reduction unit (114) designed to reduce the size of the captured image, a display image memory (150) designed to store the image reduced by the image reduction unit (114), and a display control unit (140) designed to simultaneously display several reduced-size images stored in the display image memory (150) and assessment results based on the assessment values ​​side by side on a screen (200) of the GUI (130).

Description

Technical field

[0001] The present invention relates to a device operating with a beam of charged particles, which has several detectors, and to a method for operating it. Technical background

[0002] As a technical background to a multi-detector apparatus operating with a beam of charged particles, JP 2006-190554 A (PTL 1) may be cited. This publication discloses that in an electron microscope equipped with multiple secondary electron detectors or backscattered electron detectors, to enable control of the contrast / brightness of the multiple detectors with a single control operation, a variable contrast coefficient value for each detector is set using a signal strength ratio between the respective detectors, which changes when an observation condition such as an operating distance changes.For example, a relationship between the operating distance and the variable contrast coefficient amount is obtained; with reference to the operating distance read from an observation condition memory, the variable contrast coefficient amount is calculated individually for an upper detector and a lower detector by a coefficient calculation unit; and with reference to a control operation performed by a contrast / brightness operating unit, a contrast change amount is specified individually for each detector by a detector control unit. List of citations from patent literature

[0003] PTL 1: JP 2006-190554 A

[0004] Further examples of conventional particle beam devices are described in DE 11 2015 007 007 T5 and DE 11 2013 005 243 T5. Summary of the invention: Technical problem

[0005] PTL 1 discloses an image adjustment method in which the contrast / brightness of an image obtained by the multiple detectors can be adjusted in a single control operation in the electron microscope equipped with the multiple detectors. However, in the method of PTL 1, images obtained from the detectors are summed and displayed, and parameters are set by a user, so the adjustment can be complex, and the time required for setting the parameters can increase if the parameters are interdependent. For example, in a device operating with multiple beams of charged particles, optical axes of several primary electron beams are controlled by voltages of a multiple aperture arrangement, i.e.,Aperture voltages are set, but the state of an electric field changes when the aperture voltage for a particular ray is changed, thereby affecting other rays. If such parameters are interdependent, it is likely that the parameters will be difficult to define in a single, coherent system.

[0006] The image display settings may be adjusted, and the usability will be impaired.

[0007] One object of the present invention is to solve the aforementioned problem and to provide a device operating with a beam of charged particles and a method for its operation, wherein parameters of several image displays corresponding to the number of detectors are set without discarding an image. Solution to the problem

[0008] To solve the above problem, the present invention provides a device operating with a beam of charged particles and having the features defined in claim 1 or 6.

[0009] In addition, the present invention provides a method for operating a device operating with a beam of charged particles, having the features defined in claim 10, to solve the aforementioned problem. Beneficial effect

[0010] According to the present invention, when the parameters of the device having several detectors and operating with a beam of charged particles are adjusted, the adjustment efficiency can be improved by allowing the adjustment to be made while obtaining an overview of the whole. Brief description of the drawings

[0011] They show: Fig. 1 a schematic diagram of a configuration of a device operating with a beam of charged particles according to embodiment 1, Fig. 2A a diagram of an example of a GUI screen display according to embodiment 1, Fig. 2B a diagram of another example of the GUI screen display according to embodiment 1, Fig. 3 a diagram of an operating sequence with manual parameter setting according to embodiment 1, Fig. 4 a detailed configuration diagram of a storage control device according to embodiment 2, Fig. 5 a diagram of an operating sequence of the storage control unit according to embodiment 2 during automatic parameter setting, Fig. 6A a diagram of an example of a time sequence diagram of scanning and image transmission from the prior art, Fig. 6B a diagram of another example of the timing diagram of scanning and image transmission from the prior art, Fig. 7 a diagram of an example of a timing diagram of scanning and image transmission according to embodiment 2, Fig. 8 a detailed configuration diagram of a storage control device according to embodiment 3, Fig. 9 a diagram of an operating sequence of the storage control unit according to embodiment 3 during automatic parameter setting, Fig. 10 a diagram of an example of a time sequence of scanning and image transmission according to embodiment 3 and Fig. 11 a diagram of an example of a GUI screen display according to embodiment 4. Description of embodiments

[0012] Various embodiments of the present invention are described below with reference to the drawings. In addition, an electron beam is described as an example of a beam of charged particles according to the following embodiments; however, this is not limited to an electron beam, and the invention can also be applied to other beams of charged particles. Design 1

[0013] In embodiment 1, a device operating with a beam of charged particles is described in which optical axes of several primary electron beams are adjusted by a user who performs a manual parameter setting.

[0014] Fig. Figure 1 is a schematic diagram showing a configuration of a device operating with a beam of charged particles according to embodiment 1. The device operating with a beam of charged particles comprises a pixel detection device 100, which has several detectors 101 and several A / D converters 102, a computing device 110, which has memory control units 111, several memories 112, which store detected images, evaluation value derivation units 113, into which images read from the memories 112 are entered, and image reduction units 114, an overall control unit 120, a graphical user interface (GUI) 130, which has a display, a display control unit 140, a display image memory 150, an optical parameter setting unit 160, which sets parameters of optical systems, a scan control unit 170, and a column, which is not shown.Additionally, the A / D converters, the memory control units 111, the multiple memories 112, the evaluation value derivation units 113, and the image reduction units 114 each have systems (hereinafter referred to as channels) of the number (n) of detectors 101, with the systems operating in parallel. The overall control unit 120 stores information received from the GUI 130 in the optical parameter setting unit 160 and stores scan information in the scan control unit 170.

[0015] In Fig. 1. The pixel detection device 100, the optical parameter setting unit 160, and the scan control unit 170 are each equipped with dedicated hardware. The computing device 110, the overall control unit 120, the GUI 130, the display control unit 140, and the display image memory 150 can be equipped with a central processing unit (CPU) of a personal computer (PC), which is equipped with a display, a storage unit or storage device such as volatile memory or a solid-state drive (SSD), a display control unit, and the like. For example, the evaluation value derivation unit 113 and the image reduction unit 114 can be implemented by functions executed by the CPU.

[0016] The Fig. 2A and Fig. Figure 2B shows display examples of a GUI screen of the device operating with a beam of charged particles according to the present embodiment. Fig. 2A shows an example where all nine channels of images are displayed, and Fig. Figure 2B shows another example where four channels, including channels 5, 6, 8 and 9, are selected and displayed.

[0017] A GUI screen 200 has an image display unit 201 for displaying images received from the detectors 101 and evaluation results of a primary electron beam corresponding to the respective detectors, a display selection input unit 202 for selecting an image to be displayed, a parameter selection unit 203 for selecting parameters to be set, a slider input unit 204 for changing parameters, a specific value input unit 205 for an evaluation value for each beam, an automatic setting button 206 for selecting an automatic setting, a manual setting button 207 for selecting a manual setting, and a completion button 208 for entering the completion of a setting.

[0018] This means that the GUI 130 features the display selection input unit 202 for selecting an image to be displayed and the image display unit 201 for displaying a user-selected predefined number of images, along with the corresponding assessment results. This allows the user to make adjustments while viewing all or part of the entire system, thus improving adjustment efficiency. Additionally, the GUI 130 includes the parameter selection unit 203 for selecting a parameter, the slider input unit 204, which is capable of changing a parameter in real time, and the specific value input unit 205 for entering a specified value for an assessment score. This reduces parameter adjustment time.

[0019] Below is a series of parameter setting sequences using an example of a manual setting sequence according to the present embodiment, as shown in Fig. Figure 3 illustrates and describes the process. First, after pressing the Manual Setting button 207, the user selects the channel to be displayed (step 300, hereinafter S300). Because a change in the image can be confirmed by continuously changing the parameters, S300 can be skipped. Next, a parameter setting is performed by changing the aperture voltage corresponding to each channel, which is a setting parameter, using the slider input unit 204 (S301). When the slider input is complete, optical parameter information 161 and scan information 171 are transmitted from the overall control unit 120 to the optical parameter setting unit 160 and the scan control unit 170, respectively, in the manner of a scan procedure, and a one-frame scan of the primary electron beams is performed by the scan control unit 170 (S302).Simultaneously with the scanning, the primary electron beams fall onto a sample for adjusting the optical axis in the column (not shown), and the emitted secondary electron beams enter the detectors 101. An analog signal 103 output by the detector 101 is converted by the A / D converter 102 into a digital pixel value 104 and stored as image information 115 in the memory 112 via the image control unit 111.

[0020] The captured image information 115 is transmitted as image information 116 to the assessment value derivation unit 113 and the image reduction unit 114 of the computing device 110 (S303), and assessment value derivation (S304) and reduction processing (S305) are performed in parallel. A derived assessment value 117 is transmitted to the display control unit 140 (S306), a reduced image 118 is transmitted to the display image memory 150 (S307), and an assessment result and an image of the channel selected by the user via the display control unit 140 are displayed on the GUI screen 200 (S308). Based on this result, the user determines whether to continue parameter setting (S309), and if so, the process returns to (S300). Although not shown, steps (S303) to (S308) are executed for the number of channels.

[0021] Here, a rating-value derivation procedure includes a method in which the roundness of a captured image is used as the rating value, and a method in which a normalized cross-correlation value of the captured image and the golden pattern are used as the rating value, although the rating procedure is not limited to these. Additionally, a function of the image reduction unit 114 is to change the image reduction ratio based on the number of selected channels. For example, it is assumed that the image display unit 201 can display an image size of up to 512 x 512 if a 512 x 512 image is captured for each channel, where, if all nine channels are selected, as shown in Fig. As shown in 2A, each image is reduced to 1 / 3 in both the vertical and horizontal directions (a size of 170 x 170) and transferred to the display image memory 150. Additionally, if four channels are selected, as shown in Fig. As shown in Figure 2B, only the images in the selected channels are reduced to half their size (256 x 256) in both the vertical and horizontal directions and transferred to the display image buffer 150. In any case, multiple images can be viewed in an overview.

[0022] If parameters are interdependent, for example when adjusting the optical axis of the primary electron beams, the parameters can be adjusted according to the present embodiment while viewing an overview of all beam states of the nine channels and furthermore capturing details of the beam states when a specific channel is selected, thus allowing easy verification of the dependency. This improves adjustment efficiency and reduces parameter adjustment time. Additionally, according to the present embodiment, a total of nine channels are used; however, if the number of beams increases and the number of channels also increases, for example to 36, 64, or the like, the configuration according to the present embodiment functions more efficiently.Because the automatic setting button 206 and the manual setting button 207 are located on the GUI screen 200, the user's work efficiency can be further improved.

[0023] According to the embodiment 1 described above, when adjusting interdependent parameters, such as the aperture voltage of a device with multiple detectors and multiple beams of charged particles, the adjustment efficiency can be improved by allowing adjustment while simultaneously viewing an overview of the entire system. Furthermore, scanning, evaluation value derivation, and image display can occur in parallel, preventing the discarding of scanned pixels by overwriting, and the parameter adjustment time can be reduced. Design 2

[0024] In embodiment 2, a device operating with a beam of charged particles is described, wherein the optical axes of several primary electron beams are adjusted by pressing the automatic adjustment button 206 instead of manually adjusting the parameters by a user. The automatic adjustment is described below as a setting procedure in which all parameters are pre-assigned within value ranges, parameter step sizes are pre-defined, and one parameter with a high evaluation value is selected. For example, if the value range of each aperture voltage is set to -100 V to +100 V and the step size is set to 2 V, 100 parameters are assigned to one beam. However, the present embodiment is not limited to the setting procedure described above.

[0025] Fig. Figure 4 shows an example of a detailed configuration of the storage control unit 111. Fig. 1. The digital pixel value 104 output by the A / D converter 102 is written as image information 115 into memory 112 via a write control 400. Additionally, during image transmission, the image information 116 is transferred from memory 112 via a read control 401 to various processing units, such as the evaluation value derivation unit 113.

[0026] The storage control device 111 has a scan pixel counter 403, which counts digital pixels, and a transmitted pixel counter 405, which counts the number of pixels transmitted during an image transmission; it performs a write control to switch a memory that stores an image when a scan completion is detected based on the number of scan pixels output by the scan pixel counter 403 and a predetermined image size; and it performs a read control to switch a memory that reads an image when a transmission completion is detected based on the number of pixels transmitted determined by the transmitted pixel counter 405 and a predetermined image size.

[0027] Below is a method for controlling the parallel execution of scanning and image transmission while preventing the scanned pixels from being discarded by overwriting, with reference to an example of a workflow of the storage control device according to the present embodiment, as shown in Fig. Figure 5 illustrates and describes the process. First, a memory 112 (hereinafter referred to as the write memory), which writes an image obtained by scanning a first frame, and a memory 112 (hereinafter referred to as the read memory), which reads (transmits) the same image, are defined (S500 and S501), and initial values ​​of the optical parameters are set (S502). Scanning is initiated (S503) when the parameter setting is complete, and the memory control unit waits until the scanning is complete (S504). Here, the scan completion detection 402 is performed by comparing the number of scan pixels 407 counted by the scan pixel counter 403 in the memory control unit with the specified image size (the number of pixels). When the number of scan pixels 407 equals the image size, the scanning is completed.

[0028] The write memory is switched when the scan is complete (S505). It is determined whether the scan is the first frame (506). Parameters are changed if the scan is the first frame (S507). The next optical parameter is immediately set in the optical parameter setting unit 160, and the scan (of the second and subsequent frames) is performed. Additionally, if the scan is the first scan, image transmission is initiated when the scan is complete (S509). If the second and subsequent frames are being scanned, the memory control unit waits until image transmission for all channels is complete (S508), and then transmission is initiated. Transmission completion detection 404 is performed by comparing the number of transmitted pixels 408, counted by the transmitted pixel counter 405, with a predetermined, non-displayed image size.When the number of transmitted pixels equals the image size (408), the transmission is complete (here a transmission termination signal 409 = "1"). When the transmission is complete (S510), the read memory is switched (S511), and as per embodiment 1, the process of deriving the assessment value and processing the image reduction is executed and displayed on the GUI screen (S512) to (S517).

[0029] Although not shown, S509 to S517 are executed here for the number of channels in parallel. After the assessments for the second and subsequent frames are completed for all parameters, the setting is completed (S518). If the setting is to be continued, the following parameters are set (S519), the memory controller waits for the completion of the image transmission of all channels (S520), and the next scan is performed when the transmission is complete (S503). During transmission completion detection for all channels, completion is determined when the logical sum 406 of the transmission completion signals 410 of all memory controllers is taken and its output is "1". The next scan is initiated by inputting the output of the logical sum into the scan controller 170 as a trigger.This means that the scan control unit 170 is instructed to initiate scanning based on the transmission completion of the storage control units corresponding to the multiple detectors.

[0030] The Fig. 6A and Fig. Figure 6B shows examples of scanning and image transmission timing diagrams for a prior art configuration. For simplicity, only a single-channel image transmission is shown. Fig. Figure 6A shows an example where the image transfer time is 603 ≤ (parameter setting time 600 + scan time 601), in which case scanning and image transfer can be performed in parallel without any problems. Fig. Figure 6B shows an example where the image transfer time 612 > (parameter setting time 610 + scan time 611). In the prior art configuration, the scanned image is stored in a memory different from the storage used for transfer because the transfer time increases due to waiting for CPU processing or the like. However, if the read memory is used, there may be pixels that cannot be stored in memory (hatched sections 613 and 614 in Figure 6B). Fig. 6B). This leads to the problem that evaluating all images is impossible. The examples show a case where two memory locations are used, but this problem also occurs with a larger number of memory locations.

[0031] Fig. Figure 7 is a time sequence diagram of the scanning and image transmission according to the present embodiment under the same conditions as in Fig. 6B. Examples of image transmission times 702 and 703 for channel 1 and channel 2 are shown after a parameter setting time 700 and a scan time 701. However, the scanning takes place after a scan waiting time 704 until the image transmission of all channels is complete, so it is evident that scanning and image transmission can be performed in parallel without pixels being discarded. According to the present embodiment, scanning and image transmission can be performed in parallel, while a simple configuration prevents pixel discarding. This means that the parameter setting time can be reduced while ensuring image evaluation and assessment for all parameters.

[0032] Additionally, according to the present embodiment, a configuration of two memories is used and the memories are switched; however, in one memory an area can be guaranteed that is capable of storing two images, and the address for writing an image and the address for reading the image can be switched. embodiment 3

[0033] Embodiment 2 shows a method for preventing pixel drop using a two-memory configuration. The present embodiment shows a method in which the overall throughput can be improved by using three or more memories and increasing the time until scan latency occurs.

[0034] Fig. Figure 8 shows a configuration of the memory control device 111, which prevents the discarding of pixels in four memories 112. As from the one in Fig. In four different configurations, a write and read memory mismatch detection 806 is provided, in which write memory information 809 and read memory information 810 are read from a write controller 800 and a read controller 801, respectively, and a mismatch detection signal 811 is output as "1" if the write and read memory do not match, and a mismatch detection signal 811 is output as "0" if the write and read memory do match. Based on an output signal of a logical sum 807 of mismatch detection signals 812 from all channels, a function is provided which consists of initiating the next scan immediately if the memory being used does not match all channels, and waiting to scan if the memory being used matches one of the channels.This means that the memory control unit performs a mismatch detection to determine whether a memory storing an image and a memory reading the image do not match, and, based on the mismatch detection of the memory control unit corresponding to the multiple detectors, instructs the scan control unit 170 to begin scanning. Additionally, in one method, as an example of memory switching according to the present embodiment, a ring buffer in the form of memory 1, memory 2, memory 3, memory 4, and memory 1, ... is switched.

[0035] Fig. Figure 9 is a flowchart according to the present embodiment. Details are omitted because there are steps identical to those in embodiment 2; however, the new steps (S907 and S913) are described. The write memory is switched when the scan is complete, and the read memory is switched when the transfer is complete. Therefore, in step S907, a match check is performed for the memories on all channels, and if a match is found even in one channel, scanning is paused so that scanning and image transfer can be performed without discarding any pixels. Additionally, in step S913, image transfer can be initiated immediately by performing a match check for the memories of each channel in the event of a mismatch. Here, steps S910 to S919 are performed in parallel for the number of channels.

[0036] Fig. Figure 10 is a time-lapse diagram of the scanning and image transmission according to the present embodiment. Channel 2 shows an example of an image transmission period of 1003. As in Fig. As shown in Figure 10, the overall throughput can be improved compared to embodiment 2 because the scan wait operation 1004 can only occur if pixels are discarded. Additionally, during the transmission wait operation 1005, a period of time is waited until the image can be transmitted for each channel. According to the present embodiment, a configuration is used in which one transmittable image is transmitted at a time, but a configuration can also be used in which image transmission occurs by waiting for the completion of image transmission for all channels in order to synchronize the image transmission of all channels. Design 4

[0037] Embodiments 2 and 3 are intended to prevent pixels from being discarded during the scan waiting process, where a dead time occurs between scans. This means that the frame rate is lower than the maximum frame rate (the number of scan frames per unit of time) that would be achieved if scanning were performed without dead time. Fig.11 is a GUI configuration 1100 that shows a user that the frame rate is being reduced. By displaying frame rate reduction information when a scan wait occurs, and also by indicating which channel experiences a long transmission time (1101), it is possible to understand whether the condition setting (size of the image to be scanned, etc.) is suitable for the parameter setting and whether a bottleneck is occurring on a channel, thus improving usability. The display control unit 140 controls the execution of this display 1101 based on the condition of the image stored in the display image memory 150. That is, the display control unit 140 controls the GUI 130 so that it displays frame rate reduction information when a scan pause occurs between scans for each frame.

[0038] Furthermore, the present invention is not limited to the foregoing embodiments and includes various modifications. The foregoing embodiments have been described in detail, for example, to facilitate understanding of the present invention and are not necessarily limited to those that have all the described configurations. Additionally, a part of a configuration of a particular embodiment can be replaced by a configuration of another embodiment, or the configuration of the other embodiment can be added to the configuration of the particular embodiment. Furthermore, a part of the configuration of each embodiment can be added to, removed from, or replaced by another configuration.

[0039] Additionally, some or all of the above configurations, functions, processing units, processing methods, and the like may be implemented by hardware, for example, by design using an integrated circuit. Each of the above configurations, functions, and the like may be implemented by software by interpreting and executing a program that implements the respective functions through a processor. Information in the form of a program, a table, or a file for implementing each of the functions may be stored in a recording device such as volatile memory, a hard disk drive, or a solid-state drive (SSD), or in a recording medium such as a chip card, an SD card, or a DVD.The control lines or information lines shown are considered necessary for the description, although not all control lines or information lines in a product are necessarily shown. In practice, it can be assumed that almost all configurations are interconnected. Reference symbol list 100 pixel capture device 101 Detector 102 A / D converters 103 Analog signal 104 digital pixel value 110 calculating device 111 Control unit 112 storage locations 113 Assessment value derivation unit 114 Image reduction unit 115, 116 Image information 117 Assessment score 118 Reduced Image Information 120 Total control unit 130 GUI 200 GUI screen 201 Image display unit 202 Display selection input unit 203 Parameter selection unit 204 Slider input unit 205 Specific Value Input Unit 206 Automatic setting button 207 Manual setting button 208 End key 140 Display control unit 150 display image memory 160 Optical parameter setting unit 161 optical parameter information 170 Scan control unit 171 Scan information 400 write control 401 Reading control 402 Scan completion confirmation 403 scan pixel counter 404 Transfer Completion Determination 405 transferred pixel counter

Claims

[1] A device operating with a beam of charged particles, comprising the following: an optical system designed to irradiate a sample with multiple beams of primary charged particles, an optical parameter setting unit (160) designed to set a parameter of the optical system, a detector (101) designed to individually detect several beams of secondary charged particles emitted by the sample, several storage units (112), each designed to store a signal captured by the detector (101) and converted into a digital pixel in the form of a captured image, an assessment value derivation unit (113) designed to derive an assessment value for the beam of primary charged particles from the acquired image, a GUI (130) designed to display an image and receive input from a user, an image reduction unit (114) designed to reduce the size of the captured image, a display image memory (150) designed to store the image reduced by the image reduction unit (114), and a display control unit (140) designed to simultaneously display several reduced-size images stored in the display image memory (150) and assessment results based on the assessment values ​​side by side on a screen (200) of the GUI (130). [2] Device operating with a beam of charged particles according to claim 1, which further comprises: a scan control unit (170) designed to generate a scan signal of the beam of primary charged particles and a total control unit (120) designed to specify information entered via the GUI (130) in the optical parameter setting unit (160) and to specify scan information in the scan control unit (170). [3] Device operating with a beam of charged particles according to claim 2, wherein the GUI (130) comprises a display selection input unit (202) by which the image to be displayed is selected and an image display unit (201) on which a predetermined number of images selected by a user and corresponding assessment results are displayed side by side. [4] Device operating with a beam of charged particles according to claim 3, wherein the GUI (130) further comprises a parameter selection unit (203) by which the parameter is selected, a slider input unit (204) by which the parameter can be changed in real time, and a specific value input unit (205) by which a specified amount of the assessment value is entered. [5] Device operating with a beam of charged particles according to claim 4, wherein the GUI (130) further comprises a manual setting button (207) and an automatic setting button (206) by which a user selects a manual setting or an automatic setting. [6] A device operating with a beam of charged particles, comprising the following: an optical system designed to irradiate a sample with multiple beams of primary charged particles, an optical parameter setting unit (160) designed to set a parameter of the optical system, a detector (101) designed to individually detect multiple beams of secondary charged particles emitted by the sample, several storage units (112), each designed to store a signal captured by the detector (101) and converted into a digital pixel in the form of a captured image, an assessment value derivation unit (113) designed to derive an assessment value for the beam of primary charged particles from the acquired image, a GUI (130) designed to receive input from a user, an image reduction unit (114) designed to reduce the size of the captured image, a display image memory (150) designed to store the image reduced by the image reduction unit (114), a display control unit (140) designed to display the image stored in the display image memory (150) and the assessment result based on the assessment value on a screen (200) of the GUI (130), a scan control unit (170) designed to generate a scan signal of the beam of primary charged particles, and a control device (111) designed to control the writing of an image to the storage unit and the reading of the image from the storage unit, wherein the control unit (111) a scan pixel counter (403) designed to count the digital pixels and a transmitted pixel counter (405) designed to count the number of pixels transmitted during an image transmission, a write control is executed to switch the memory unit designed to store the image when a scan completion is detected based on the number of scan pixels output by the scan pixel counter (403) and a predetermined image size, and a read control is executed to switch the memory unit designed to read the image when a transfer completion is determined based on the number of transferred pixels output by the transferred pixel counter (405) and a predetermined image size. [7] Device operating with a beam of charged particles according to claim 6, wherein the scanning control unit (170) is instructed to initiate scanning on the basis of the transmission completion of the control device (111) corresponding to the multiple detectors. [8] Device operating with a beam of charged particles according to claim 6, wherein the control device (111) performs a mismatch determination to establish whether the storage unit designed to store an image and the storage unit designed to read the image are incompatible, and The scanning control unit (170) instructs the control device (111) corresponding to the multiple detectors to initiate scanning based on the non-conformity finding. [9] Device operating with a beam of charged particles according to claim 1, wherein the display control unit (140) controls the GUI (130) so that it displays frame rate reduction information when a scan pause period occurs between scanning for each frame. [10] Method for operating a device operating with a beam of charged particles, wherein the device operating with a beam of charged particles has a GUI (130) designed to display an image and receive input from a user, the operating method comprising: Defining a parameter for an optical system designed to irradiate a sample with multiple beams of primary charged particles, Individual detection of multiple beams of secondary charged particles emitted by the sample, Converting the captured signal into a digital pixel and storing the digital pixel as a captured image, Deriving an assessment value of the beam of primary charged particles based on the captured image and Reducing the size of several captured images and simultaneously displaying the reduced-size images and assessment results based on the assessment values ​​side by side on a GUI screen display (130). [11] Method for operating the device operating with a beam of charged particles according to claim 10, wherein the GUI (130) displays a predetermined number of images issued by a user and corresponding evaluation results side by side. [12] Method for operating the device operating with a beam of charged particles according to claim 11, wherein the GUI (130) is able to change the parameter by selection in real time. [13] Method for operating the device operating with a beam of charged particles according to claim 12, wherein a user can select a manual setting or an automatic setting of the parameter on the GUI (130).

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