Adjustment device and method for adjusting a scanner

Abstract

The adjusting device comprises a cylindrical device body, a first adjusting tool having a light transmission surface for use in confirming and adjusting the optical axis of first laser light, and a second adjusting tool which can be detachably arranged coaxially to the first adjusting tool on one end side of the device body and which has a movable link configured in the form of a needle such that the distal end region thereof shows the processing focal point of second laser light.The distance from the laser light emission port to the light transmission surface in a state in which the first adjustment tool has been positioned on the fixture body, and the distance from the laser light emission port to the distal end region of the movable limb in a state in which the second adjustment tool has been positioned on the fixture body, are set to the focal length of the processing focal point of the second laser light emitted by the scanner.

Description

Title of the invention: ADJUSTING DEVICE AND METHOD FOR ADJUSTING A SCANNER TECHNICAL AREA

[0001] The present invention relates to an adjustment device and a method for adjusting a scanner. TECHNICAL BACKGROUND

[0002] A well-known conventional laser processing system performs a process such as welding by irradiating a workpiece with a laser beam. In such laser processing systems, laser heads equipped with galvanometer scanners are widely used to scan the laser beam for processing (see, for example, patent documents 1 and 2). List of cited patent documents Patent document 1: Unexamined Japanese patent application, publication no. 2019-98360 Patent document 2: Unexamined Japanese patent application, publication no. 2004-361862 DISCLOSURE OF THE INVENTION Problems to be solved by the invention

[0003] In a laser processing system, a scanner is mounted on a processing machine shaft, robot arm, or similar device. If the scanner is mounted in a position other than its intended mounting position, a laser beam is projected onto a workpiece for processing, while the processing point (hereinafter also referred to as the "origin") on the workpiece and the focal point (hereinafter also referred to as the "processing focus") of the laser beam are offset from each other. The scanner has a function for scanning the laser beam over a wide area. This means that any deviation in the scanner's mounting position prevents the scanner from drawing a pattern as instructed, resulting in defects such as a distorted processing shape.

[0004] Since the laser beam used for processing is invisible, the shift in the processing focus cannot be visually observed. Traditionally, the processing focus is therefore set using a guide laser beam, a laser distance meter, crossed laser lines, or similar devices to correct the shift. However, due to wavelength differences between the guide laser beam and the processing laser beam, chromatic aberration occurs, causing a focal point shift even when the same focal length is used. A high-precision laser distance meter must be used. Furthermore, depending on the mounting position, it is difficult for the laser distance meter to accurately measure the processing focus of the laser beam.For the method using crossed laser lines, it is difficult to visually confirm the offset of the processing focus unless the crossed laser lines are offset by ±2 mm or more. As described above, with each of these methods, it is difficult to visually confirm the positional offset between the coordinate location on the workpiece and the processing focus of the laser beam. Therefore, it is difficult to make precise adjustments to correct the positional offset between the coordinate location on the workpiece and the processing focus of the laser beam.

[0005] Because of this problem, the aim is to correct the positional offset between the coordinate location on the workpiece and the processing focus of the laser beam in a scanner by means of a more precise adjustment. Means to solve the problems

[0006] An adjustment device according to the present disclosure is an adjustment device for a scanner configured to scan a laser beam over a workpiece, wherein the adjustment device comprises: a tubular device body into which a first laser beam and a second laser beam, emitted from a laser beam emission port of the scanner, are introduced at one end; a first adjustment tool that is attachable to and detachable from an opposite end of the device body, wherein the first adjustment tool has a translucent surface ora surface for checking and adjusting an optical axis of the first laser beam emitted by the scanner; and a second adjusting tool that can be attached to and detached from the opposite end of the device body coaxially to the first adjusting tool, wherein the second adjusting tool includes a movable link with a needle-shaped tip section configured to specify a processing focus of the second laser beam emitted by the scanner, wherein a distance from the laser beam emission port to the transparent surface of the first adjusting tool attached to the device body and a distance from the laser beam emission port to the tip section of the movable link of the second adjusting tool attached to the device body are set equal to a focal length of the processing focus of the second laser beam emitted by the scanner.

[0007] A method for adjusting a scanner according to the present disclosure is a method for adjusting a scanner using the adjustment device disclosed above, wherein the method comprises: a step of attaching the first adjustment tool to the device body mounted on the scanner and checking and adjusting the optical axis of the first laser beam; a step of releasing the first adjustment tool from the device body and adjusting a focal point of the first laser beam; and a step of attaching the second adjustment tool to the device body mounted on the scanner and adjusting a mounting position of the scanner and the processing focus of the second laser beam by bringing the tip section of the movable link into contact with the workpiece. BRIEF DESCRIPTION OF THE DRAWINGS Fig. Figure 1 is a diagram illustrating a configuration of a laser processing system 1; Fig. Figure 2 is a diagram illustrating an optical system of a scanner 30; Fig. Figure 3 is a diagram illustrating a configuration of an adjustment device 100; Fig. Figure 4 is a diagram illustrating a configuration of a device body 110; Fig. 5A is a cross-sectional view of a first setting tool 130 along a central axis CA1; Fig. 5B is a view of the first adjustment tool 130 when viewed from the optical axis direction; Fig. Figure 6 is a cross-sectional view of a second setting tool 150 along a central axis CA2; Fig. Figure 7A is a side view of a movable pin of the second adjusting tool 150 in its most extended position; Fig. Figure 7B is a side view of the movable pin of the second adjusting tool 150 in a partially retracted state; Fig. Figure 8A is a diagram illustrating a method for adjusting the optical axis of a guide laser beam; Fig. Figure 8B is a diagram illustrating a procedure for adjusting the focal point of the guide laser beam; Fig. 9A is a diagram illustrating the adjustment of the optical axis of the guide laser beam; Fig. 9B is a diagram illustrating the adjustment of the optical axis of the guide laser beam; Fig. Figure 10A is a diagram illustrating an adjustment procedure using the adjustment device 100 with the second adjustment tool 150 attached; Fig. Figure 10B is a diagram illustrating an adjustment procedure using the adjustment device 100 with the second adjustment tool 150 attached; Fig. Figure 11 is a diagram illustrating an adjustment procedure using the adjustment device 100 with the second adjustment tool 150 attached; Fig. 12 is a diagram illustrating a device body 120 of a second embodiment; Fig. Figure 13 is a cross-sectional view along line II in Fig. 12; Fig. Figure 14 is a diagram illustrating a fixed stand 4 and a laser processing system 1A including a robot 2; Fig. Figure 15A is a diagram illustrating a function for teaching the processing focus of a laser beam using the laser processing system 1A and the fixed stand 4; Fig. Figure 15B is a diagram illustrating the function for teaching the processing focus of a laser beam using the laser processing system 1A and the fixed stand 4; and Fig. Figure 15C is a diagram illustrating the function for teaching the processing focus of a laser beam using the laser processing system 1A and the fixed stand 4. PREFERRED OPERATING MODE FOR REALIZING THE INVENTION

[0008] The following describes an adjustment device and a method for adjusting a scanner according to an embodiment of the present disclosure. The accompanying drawings are all schematic illustrations. For the sake of clarity and comprehensibility, geometric features of components in the drawings, such as shapes, scales, and aspect ratios, have been altered or exaggerated compared to those of the actual components. (First embodiment)

[0009] Fig. Figure 1 is a diagram illustrating a configuration of a laser processing system 1. Fig. Figure 2 is a diagram illustrating the optical system of a scanner 30. The one in Fig. The laser processing system 1 shown performs a process such as welding on a workpiece W placed on a movable table (not shown) by irradiating the workpiece W with a laser beam. It should be noted that the laser processing system 1 is not limited to the example in which the workpiece W is placed on the movable table.

[0010] As in Fig. Figure 1 shows the laser processing system 1 comprising a laser light source 10, a laser control unit 20, the scanner 30, a scanner control unit 40, a processing machine 50 and a processing machine control unit 60. Fig. Figure 1 shows the scanner 30 with an adjustment device 100 mounted on it (described below). However, the adjustment device 100 is detached from the scanner 30 after the mounting position of the scanner 30 and the focal point of a laser beam have been set.

[0011] The laser light source 10 is a device that, in response to commands from the laser control unit 20 (described below), generates laser beams by laser oscillation using laser oscillators (not shown) inside the laser light source 10. Examples of devices that can be used as the laser light source 10 include a fiber laser oscillator, a pulsed laser oscillator, a direct diode laser (DDL), a CO2 laser oscillator, and a solid-state laser oscillator (YAG laser). The laser light source 10 outputs the generated laser beams to the scanner 30.

[0012] The laser control unit 20 is a controller that manages the operation of the laser light source 10. The laser control unit 20 switches between laser oscillators in the laser light source 10 so that either a laser beam for focus verification (hereinafter also referred to as the "guide laser beam") or a laser beam for processing (hereinafter also referred to as the "process laser beam") is emitted. The guide laser beam is a laser beam in the visible spectrum and is visible to an operator (first laser beam). The process laser beam is a laser beam in an invisible wavelength range and is not visible to the operator (second laser beam). It should be noted that in the following description, both the guide laser beam and the process laser beam can be collectively referred to as the "laser beam".

[0013] The laser control unit 20 sets the laser beam irradiation mode to either a first mode or a second mode. When the laser beam irradiation mode is set to the first mode, the laser light source 10 switches to a laser oscillator that emits the processing laser beam. When the laser beam irradiation mode is set to the second mode, the laser light source 10 switches to a laser oscillator that emits the guidance laser beam.

[0014] The scanner 30 is a device for irradiating the workpiece W with the laser beam emitted by the laser light source 10 through a laser beam emission port 37 (see Fig. 3) Scanner 30 incorporates a galvanometer scanner as a mirror mechanism. As in Fig. As shown in Figure 2, the galvanometer scanner includes a first mirror 31 and a second mirror 32, which sequentially reflect the laser beam emitted by the laser light source 10, and rotary motors 33 and 34, which rotate the respective mirrors about axes X1 and X2. The X-axis and Y-axis positions of the guide laser beam can be adjusted by controlling the directions and magnitudes of rotation of the first mirror 31 and the second mirror 32. Thus, the optical axis of the guide laser beam can be aligned with a center point P of a first adjustment tool 130 (described below).

[0015] The galvanometer scanner also includes a lens 35 and a lens drive mechanism 36. The lens 35 is an optical element that focuses a laser beam R emitted by the laser light source 10. The lens drive mechanism 36 is a device that moves the lens 35 in an optical axis direction. The operation of the lens drive mechanism 36 is controlled by the scanner control unit 40 (described below). The focal point of the laser beam R focused by the lens 35 can be adjusted by moving the lens 35 in the optical axis direction. In the present embodiment, the "optical axis direction" refers to a direction along the optical axis of the laser beam.

[0016] Referring back to Fig. 1 The scanner control unit 40 is a controller that controls the operation of the scanner 30. The scanner control unit 40 reads an application program from a memory unit (not shown) to control the scanner 30 (the rotary motors 33 and 34 and the lens drive mechanism 36) and executes it to scan the laser beam based on a command in cooperation with each hardware component.

[0017] The processing machine 50 has a function for linearly moving the scanner 30. The processing machine 50 includes a processing machine shaft 51, a drive motor 52, and the like. The processing machine shaft 51 is a ball screw connected to the drive motor 52. The scanner 30 is mounted on the processing machine shaft 51. The processing machine 50 moves the scanner 30 in the axial direction of the processing machine shaft 51 by causing the processing machine shaft 51 to rotate (forward or reverse) using the drive motor 52. The processing machine control unit 60 is a controller that controls the operation of the processing machine 50. For processing to be carried out outside the irradiation range of the scanner 30, the processing machine control unit 60 moves the scanner 30 in the axial direction of the processing machine shaft 51.-Control unit 60 moves the scanner 30 to a desired position by causing the rotation of the processing machine shaft 51.

[0018] The following describes a configuration of an adjustment device 100 that is mounted on the scanner 30. Fig. Figure 3 is a diagram illustrating the configuration of the adjusting device 100. Fig. Figure 4 is a diagram illustrating a configuration of a device body 110. Fig. 5A is a cross-sectional view of the first setting tool 130 along a central axis CA1. Fig. 5B is a view of the first adjustment tool 130 when viewed from the optical axis direction. Fig. Figure 6 is a cross-sectional view of a second setting tool 150 along a central axis CA2. Fig. 7A is a side view of a movable pin of the second adjusting tool 150 in its most extended state. Fig. Figure 7B is a side view of the movable pin of the second adjusting tool 150 in a partially retracted state.

[0019] The adjusting device 100 is a device that is detachably mounted on the scanner 30 and is used to adjust the mounting position of the scanner 30 and the focal point of the laser beam. As shown in Fig. Figure 3 shows that the adjusting device 100 comprises the device body 110, the first adjusting tool 130, and the second adjusting tool 150. Depending on the type of work to be performed, either the first adjusting tool 130 or the second adjusting tool 150 is attached to the device body 110. Hereinafter, the first adjusting tool 130 and the second adjusting tool 150 may also be referred to as the "tool".

[0020] The device body 110 is a tubular housing into which the laser beam emission port 37 (see Fig. 3) the scanner's emitted laser beam 30 is introduced. As in Fig. As shown in Figure 4, the device body 110 includes a tubular section 111 and a flange 112. As described below, mounting the adjustment device 100 at a predetermined position on the scanner 30 aligns the central axis CA of the device body 110 with the center of the laser beam emission port 37 of the scanner 30. Hereinafter, a direction along the central axis CA is also referred to as the “axial direction CA”.

[0021] The tubular section 111 is a hollow cylindrical member. The flange 112 is connected at one end (top side in Fig. 4) of the tubular section 111. The flange 112 is a component for mounting the device body 110 in the immediate vicinity of the laser beam emission port 37 of the scanner 30. The tubular section 111 and the flange 112 are, for example, made of a metallic material such as aluminum, steel, or stainless steel. It should be noted that the tubular section 111 and the flange 112 can be formed integrally. A plurality of screw holes 113 are formed in a base section of the flange 112.

[0022] A tool holding section 114 is located at an opposite end (underside in Fig. 4) of the tubular section 111. The tool holding section 114 is a section in which either the first adjusting tool 130 or the second adjusting tool 150 can be detachably placed. The first adjusting tool 130 or the second adjusting tool 150 can be attached to the fixture body 110 by inserting it into the tool holding section 114.

[0023] A pin inspection window 115 is provided near the tool holder section 114. The pin inspection window 115 is an opening that allows visual observation of the movement of a movable pin 153 (described below) of the second setting tool 150 inserted into the tool holder section 114. The pin inspection window 115 opens in the radial direction of the tubular section 111 and extends in the axial direction CA. It is sufficient for the pin inspection window 115 to be provided at a location near the tool holder section 114. However, multiple pin inspection windows 115 can be provided along the outer circumferential surface of the tubular section 111. The function of the pin inspection window 115 is described below.

[0024] As in Fig. Figure 3 shows internally threaded sections 38, which can be engaged with respective locking screws 116 (described below) around the laser beam emission port 37 of the scanner 30. The locking screws 116 are components for fixing the device body 110 to the scanner 30. The device body 110 can be fixed to the scanner 30 by aligning the screw holes 113 provided in the flange 112 of the device body 110 with the internally threaded sections 38 of the scanner 30 and tightening the locking screws 116, which are inserted through the screw holes 113 and engage with the internally threaded sections 38. Consequently, the central axis CA of the device body 110 can be aligned with the center of the laser beam emission port 37 of the scanner 30.

[0025] It should be noted that the device body 110 is not limited to being configured to be mounted in the immediate vicinity of the laser beam emission port 37 of the scanner 30, as long as the central axis CA can be aligned with the center of the laser beam emission port 37 of the scanner 30. For example, the device body 110 can be configured to be mounted in an area surrounding the laser beam emission port 37.

[0026] The first adjustment tool 130 is a tool for checking and adjusting the optical axis of the processing laser beam emitted by the scanner 30. As in Fig. As shown in Figure 5A, the first setting tool 130 includes an insertion section 131, a plate-holding section 132, and a target plate 133. The insertion section 131 is a tubular link that is inserted into the tool-holding section 114 of the fixture body 110. An outer diameter D1 of the insertion section 131 is slightly smaller than an inner diameter d (see Figure 5A). Fig. 4) of the tool holding section 114 of the fixture body 110. As soon as the insertion section 131 is inserted into the tool holding section 114 of the fixture body 110, frictional force is therefore generated between the inner circumferential surface of the tool holding section 114 and the outer circumferential surface of the insertion section 131, which enables the fixture body 110 to hold the first setting tool 130.

[0027] The plate-holding section 132 is a tubular element that holds the target plate 133 (described below). The plate-holding section 132 is partially overlapping at one end with the insertion section 131 in the direction along the central axis CA1 (hereinafter also referred to as the "axial direction CA1"). An outer diameter D2 of the plate-holding section 132 is larger than the outer diameter D1 of the insertion section 131, forming a step 130a in the area where the insertion section 131 and the plate-holding section 132 are connected. When the first setting tool 130 is inserted into the fixture body 110 (tool-holding section 114), one end 114a of the tool-holding section 114 of the fixture body 110 rests against the step 130a. Thus, the first setting tool 130 is held in position at a distal end of the device body 110 (tool holding section 114).

[0028] By attaching the first adjusting tool 130 to the distal end of the fixture body 110, the central axis CA1 of the first adjusting tool 130 can be aligned with the central axis CA of the fixture body 110. Thus, the first adjusting tool 130 is positioned coaxially with the fixture body 110. As shown in Fig. Figure 3 shows a length L in the axial direction CA of the adjusting device 100 with the first adjusting tool 130 attached to the distal end of the device body 110, equal to a working distance (effective distance) of the processing laser beam. The working distance is a focal length of the processing focus (focal point) of the processing laser beam. It should be noted that the insertion section 131 and the plate holding section 132 of the first adjusting tool 130 can be integrally formed.

[0029] The plate-holding section 132 includes a retaining frame 132a at an end opposite it in the axial direction CA1. The target plate 133 is held by the retaining frame 132a. The target plate 133 is a component for aligning the optical axis of the guide laser beam emitted by the scanner 30 with the central axis CA of the device body 110. The target plate 133 is made, for example, of a material transparent to visible light, such as acrylic, polycarbonate, polyethylene terephthalate (PET), or glass. The target plate 133 is attached to a distal end of the plate-holding section 132. The target plate 133 is attached to the distal end of the plate-holding section 132, for example, by bonding it with an adhesive. As shown in Fig. As shown in Figure 5A, the first setting tool 130 has a configuration in which a distal end surface 132b of the plate holding section 132 and a translucent surface 133a of the target plate 133 are located at the same position in the axial direction CA1.

[0030] As in Fig. Figure 5B shows a target mark, combining a cross shape and circles, formed on the translucent surface 133a of the target plate 133. The center point P of the target plate 133 serves as a reference (target center position) to which the optical axes of the guide laser beam and the processing laser beam are aligned. By attaching the first setting tool 130 to the fixture body 110, the center point P of the target plate 133 is aligned with the central axis CA of the fixture body 110. The target mark can be formed on the translucent surface 133a of the target plate 133, for example, by printing or laser engraving. Alternatively, a sticker with the target mark printed on it can be attached to the translucent surface 133a.

[0031] The operator can align the optical axis of the guide laser beam with the center point P of the target plate 133 by adjusting the rotation of the first mirror 31 and the second mirror 32 of the scanner 30 (see Fig. 2) controls or regulates. In this way, the operator can align the optical axis of the processing laser beam (invisible light), which follows the same beam path as the guide laser beam, with the center point P of the target plate 133.

[0032] As in Fig. Figure 5B shows that the target mark includes lines S1 and S2, which pass through the center point P and are orthogonal to each other, and a line S3, which is parallel to line S2. The target mark also includes circles C1 and C2, which are concentric circles centered at the center point P and have different diameters. Aligning the extension direction of the machining center shaft 51 (see Fig. 1) The direction of extension of the straight line S1 or S2 when attaching the first setting tool 130 to the device body 110 facilitates the determination of the direction in which the guide laser beam deviates from the center point P.

[0033] The operator visually observes the guide laser beam from diagonally below the first adjustment tool 130 or projects the guide laser beam onto a wall placed below it (not shown). In this way, the operator can detect any deviation of the optical axis of the guide laser beam projected onto the target plate 133 from the center point P. On the target plate 133, the guide laser beam is projected as a beam circle with a certain degree of dispersion. The dispersion of this beam circle varies depending on the position of the focal point in the optical axis direction. The operator can align the optical axis of the guide laser beam with the center of a beam aperture (laser beam emission port 37) of the scanner 30 by aligning the center of the guide laser beam circle with the center point P of the target plate 133.

[0034] The operator can align the optical axis of the guide laser beam projected onto the target plate 133 with the center point P by controlling the operation of the scanner 30 (galvanometer scanner). Furthermore, an image of the beam circle of the guide laser beam projected onto the target plate 133 is captured using a camera positioned obliquely below it. In this way, the operator can make an adjustment to align the optical axis of the guide laser beam with the center point P while observing the captured image. Simultaneously, the operator can easily determine the direction in which the focal point of the guide laser beam projected onto the target plate 133 deviates from the center point P by checking the position of the line S3 relative to the center point P of the target plate 133.As described above, the operator can check and adjust the optical axis of the guide laser beam using the first adjustment tool 130.

[0035] The second adjustment tool, 150, is a tool for adjusting the position of the processing focus (focal point) of the processing laser beam. As shown in Fig. As shown in Figure 6, the second setting tool 150 comprises an insertion section 151, a base section 152, the movable pin (movable link) 153, and a locking screw 154. The insertion section 151 is a solid cylindrical link that is inserted into the tool-holding section 114 of the fixture body 110. The insertion section 151 has a first through-hole 155 extending along the central axis CA2. The first through-hole 155 is a cylindrical opening that supports the movable pin 153 in a manner that allows movement along the optical axis. The insertion section 151 also has an internal threaded section 156 that can be engaged with the locking screw 154. The internal threaded section 156 extends in a direction orthogonal to the central axis CA2.

[0036] The outer diameter D3 of the insertion section 151 is slightly smaller than the inner diameter d of the tool holding section 114 of the fixture body 110 (see Fig. 4) determined. As soon as the insertion section 151 is inserted into the tool holding section 114 of the fixture body 110, frictional force is therefore generated between the inner circumferential surface of the tool holding section 114 and the outer circumferential surface of the insertion section 151, which enables the fixture body 110 to hold the second setting tool 150.

[0037] By holding the second adjusting tool 150 at the distal end of the tool holding section 114 after adjustment using the first adjusting tool 130, the central axis CA2 of the second adjusting tool 150 can be aligned with the central axis CA of the fixture body 110. Thus, the second adjusting tool 150 is positioned coaxially with the fixture body 110. As shown in Fig. Figure 3 shows the axial length L of the adjusting device 100 with the second adjusting tool 150 attached to its distal end (length when the movable pin 153 is in its most protruding position) equal to the axial length L of the adjusting device 100 with the first adjusting tool 130 attached to its distal end. It should be noted that the insertion section 151 and the base section 152 (described below) of the second adjusting tool 150 can be integrally formed.

[0038] Referring back to Fig. In section 6, the base section 152 is a solid cylindrical element that holds the insertion section 151. The base section 152 has a second through-hole 157 that supports the movable pin 153 in a manner that allows movement in the optical axis direction. The second through-hole 157 is coaxial with the first through-hole 155 in the axial direction CA2. The inner diameter of the first through-hole 155 and the inner diameter of the second through-hole 157 are specified as being equal.

[0039] The movable pin 153 is a component with a needle-shaped tip section 153p configured to indicate the focal point (processing focus) of the processing laser beam. The tip section 153p is in its furthest protruding position from the base section 152 when the movable pin 153 is in its lowest position under its own weight in the direction of gravity. In this state, the tip section 153p of the movable pin 153 indicates the position of the processing focus of the laser beam scanned by the scanner 30 (see Figure 1). Fig. 3) emitted processing laser beam. That is, the length L from the laser beam emission port 37 to the tip section 153p of the movable pin 153 is equal to the focal length of the processing focus of the processing laser beam when the movable pin 153 is in its lowest position in the direction of gravity under its own weight.

[0040] The movable pin 153 comprises a pin body 153a and a head section 153b. The pin body 153a has a needle-shaped tip section 153p. The outer diameter of the pin body 153a is slightly smaller than the inner diameters of the first through-hole 155 and the second through-hole 157. The movable pin 153 is therefore movable in the axial direction CA2, with the pin body 153a located within the first through-hole 155 and the second through-hole 157.

[0041] The head section 153b of the movable pin 153 is essentially a disk-shaped component provided at the proximal end of the pin body 153a. The head section 153b and the pin body 153a are integrally formed. As shown in Fig. 7A shows that when the head section 153b is in contact with an end surface 151a of the insertion section 151, that is, when there is no gap between the head section 153b of the movable pin 153 and the end surface 151a of the insertion section 151, the movable pin 153 is in the state protruding furthest downwards from the second setting tool 150 (base section 152).

[0042] In contrast, as in Fig. Figure 7B shows that when a gap s exists between the head section 153b of the movable pin 153 and the end surface 151a of the insertion section 151, the length by which the movable pin 153 protrudes from the second adjusting tool 150 is shorter by the amount corresponding to the gap s than the length shown in Figure 7B. Fig. 7A shows the most outstanding condition. As in Fig. 7A and Fig. As shown in Figure 7B, the operator can determine whether the movable pin 153 is in the state extending furthest from the base section 152 or not by visually observing through the pin inspection window 115 whether there is a gap between the head section 153b of the movable pin 153 and the end face 151a of the insertion section 151 (hereinafter also referred to as the "gap of the head section of the movable pin").

[0043] Referring back to Fig. 6. The locking screw 154 is a component for enabling or restricting the movement of the movable pin 153 in the axial direction CA2. The locking screw 154 and the internal threaded section 156 of the insertion section 151 form a fixing mechanism for the movable pin 153. The locking screw 154 is, for example, formed from a hexagon socket locking screw. The movement of the movable pin 153 in the axial direction CA2 can be restricted by engaging the locking screw 154 with the internal threaded section 156 of the insertion section 151 and tightening the locking screw 154 to a position in which its tip contacts the movable pin 153 (pin body 153a).

[0044] In a situation where the second adjusting tool 150 is attached to the fixture body 110, for example, tightening the locking screw 154 can prevent the movable pin 153 from coming loose, thus restricting its movement. With the second adjusting tool 150 attached to the fixture body 110, the head of the locking screw 154 is positioned so that it is exposed to the pin inspection window 115 of the fixture body 110. Therefore, with the second adjusting tool 150 attached to the fixture body 110, the operator can insert a fastening tool (for example, a hex key) through the pin inspection window 115 to tighten or loosen the locking screw 154. It should be noted that Fig. 6 The locking screw 154 and the internal thread section 156 are shown, for the sake of clarity, in positions rotated by 90° around the axial direction CA2.

[0045] Furthermore, the movable pin 153, whose movement is restricted by the locking screw 15, is allowed to move in the axial direction CA2 by loosening the locking screw 154 and moving the locking screw 154 to a position where its tip does not contact the movable pin 153. By loosening the locking screw 154 and thus allowing movement of the movable pin 153, the operator can easily perform work to adjust the mounting position of the scanner 30 using the second adjustment tool 150 or to adjust the processing focus of the processing laser beam.

[0046] By attaching the second adjusting tool 150 to the distal end of the fixture body 110, the central axis CA2 of the second adjusting tool 150 can be aligned with the central axis CA of the fixture body 110. Thus, the second adjusting tool 150 is positioned coaxially with the fixture body 110. As shown in Fig. Figure 3 shows the length L in the axial direction CA of the adjusting device 100 with the second adjusting tool 150 attached to the distal end of the device body 110 and in the most extended position of the movable pin 153, equal to the working distance (effective distance) of the processing laser beam. That is, this length is equal to the length L in the axial direction CA of the adjusting device 100 with the first adjusting tool 130 attached to the distal end of the device body 110.

[0047] The following describes a method for adjusting the mounting position of the scanner 30 and the processing focus of the processing laser beam using the adjusting device 100. Fig. Figure 8A is a diagram illustrating a procedure for adjusting the optical axis of the guide laser beam. Fig. Figure 8B is a diagram illustrating a procedure for adjusting the focal point of the guide laser beam. Fig. 9A and Fig. Figure 9B shows diagrams illustrating the adjustment of the optical axis of the guide laser beam. Fig. 10A, Fig. 10B and Fig. Figure 11 are diagrams illustrating an adjustment procedure using the adjustment device 100 with the attached second adjustment tool 150. Of these drawings, [number] show... Fig. 10A and Fig. 10B the processing machine 50 not.

[0048] First, as in Fig. Figure 8A shows the operator attaching the first adjustment tool 130 to the fixture body 110 mounted on the scanner 30 and aligning the optical axis OA of the guide laser beam with the center of the first adjustment tool 130. The operator can align the optical axis OA of the guide laser beam with the center point of the target plate 133 by rotating the first mirror 31 and the second mirror 32 of the scanner 30 (see Figure 8A). Fig. 2) controls or regulates while visually observing the guide laser beam (beam circle), for example, from a position diagonally below the first setting tool 130. In a case where the optical axis OA of the guide laser beam deviates from the center point P of the target plate 133, as in Fig. As shown in Figure 9A, the operator can, for example, align the optical axis OA of the guide laser beam with the center point P of the target plate 133, as shown in Figure 9A. Fig. 9B shown by placing each mirror (see Fig. 2) of the scanner 30 controls or regulates.

[0049] After adjusting the optical axis of the guide laser beam, as in Fig. As shown in Figure 8B, the operator detaches the first setting tool 130 from the fixture body 110 and adjusts the position of the focal point of the guide laser beam using a focus monitor system 70. The focus monitor system 70 includes a focus monitor 71 and a power meter 72. The focus monitor 71 is a device for measuring the beam diameter of a laser beam. The focus monitor 71 is positioned so that the focal point at a working distance WD (for example, 500 mm) of the processing laser beam and the center of the monitor are aligned. The power meter 72 is a device for measuring the output of a laser beam. The power meter 72 is positioned at a predetermined location in the direction in which the guide laser beam is emitted.

[0050] The operator adjusts the position of the focal point so that the beam diameter of the guide laser beam is minimal and the output of the guide laser beam is maximum by adjusting the position of lens 35 (see Fig. 2) of the scanner 30 controls or regulates in the optical axis direction. Thus, the operator can align the focal point of the processing laser beam (invisible light) with the coordinate origin (processing point on the workpiece).

[0051] After setting the optical axis and the focal point of the guide laser beam, the operator detaches the first setting tool 130 from the fixture body 110 mounted on the scanner 30 and attaches the second setting tool 150 instead. Then, as described in Fig. 10A and Fig. Figure 10B shows the operator placing the workpiece W in a working position. After placing the workpiece W in the working position, the operator loosens the locking screw 154 (see Figure 10B). Fig. 6) of the second adjusting tool 150 to allow movement of the movable pin 153 in the optical axis direction.

[0052] As in Fig. Figure 10A shows a case where the distance Lx between the scanner 30 and the workpiece W is equal to the working distance WD (Lx = WD), and the gap s of the head section 153b of the movable pin 153 is zero (s = 0). As shown in Fig. As shown in Figure 10B, in a case where the distance Lx between the scanner 30 and the workpiece W is shorter than the working distance WD (Lx < WD), the head section 153b of the movable pin 153 and the end face 151a of the insertion section 151 have a gap s with a length corresponding to the difference between the distance Lx and the working distance WD (s ≠ 0). Although not shown, in a case where the distance Lx between the scanner 30 and the workpiece W is longer than the working distance WD, the gap s of the head section 153b of the movable pin 153 is zero, and the workpiece W and the tip section 153p (see Figure 10B) Fig. 6) However, the movable pin 153 has a gap of a length corresponding to the difference between the distance Lx and the working distance WD. Thus, as soon as the operator finds any gap by checking the gap of the head section 153b of the movable pin 153 and the gap between the workpiece W and the tip section 153p of the movable pin 153 (hereinafter also referred to as the “gap between the workpiece W and the movable pin 153”), the operator can adjust the mounting position of the scanner 30 relative to the workpiece W by correcting the tilt, position, and the like of the scanner 30 relative to the workpiece W.

[0053] Next, the operator checks whether or not there is a deviation in the mounting position of the machining center shaft 51 of the machining center 50 by moving the scanner 30 with the attached adjusting device 100 (second adjusting tool 150) along the machining center shaft 51, as shown in Fig. 11 shown. In a case where the machining shaft 51 is inclined upwards to the left, as in Fig. As shown in Figure 11, the operator finds, for example, a deviation g with a length corresponding to the inclination of the machine shaft 51 between the workpiece W and the movable pin 153 as a result of moving the scanner 30 along the machine shaft 51 from right to left.

[0054] Although not shown, in a case where the machine tool shaft 51 is inclined downwards to the left, the operator will find a gap of a length corresponding to the inclination of the machine tool shaft 51 between the head section 153b of the movable pin 153 and the end surface 151a (see Fig. 7B) of the insertion section 151 as a result of moving the scanner 30 along the machine shaft 51 from right to left. Thus, as soon as the operator finds any gap by checking the gap of the head section 153b of the movable pin 153 and the gap between the workpiece W and the movable pin 153, he can appropriately adjust the mounting position of the scanner 30 relative to the workpiece W by correcting the inclination of the machine shaft 51.

[0055] As described above, the adjusting device 100 according to the first embodiment allows the operator to check any deviation of the optical axis of the guide laser beam by visual observation by attaching the first adjusting tool 130 to the device body 110 into which the guide laser beam and the processing laser beam are introduced. Furthermore, the adjusting device 100 allows the operator to check any deviation of the mounting position of the scanner 30 and the processing focus of the processing laser beam by visual observation by attaching the second adjusting tool 150 to the device body 110. Thus, the operator can adjust the positional deviation between the coordinate location on the workpiece W and the processing focus of the processing laser beam more precisely by adjusting the scanner 30 using the adjusting device 100 as an adjustment work support tool.

[0056] The first adjustment tool 130 and the second adjustment tool 150 of the adjustment device 100 according to the first embodiment are detachably attached to the common device body 110 mounted on the scanner 30. This configuration can minimize the error of the optical axis of the guide laser beam compared to a configuration in which either an adjustment device prepared by integrating a first adjustment tool 130 with a device body 110, or an adjustment device prepared by integrating a second adjustment tool 150 with a device body 110, is interchangeably mounted on the scanner 30.

[0057] The translucent surface 133a (target plate 133) of the first adjusting tool 130 of the adjusting device 100 according to the first embodiment has a target mark which indicates the target center position (center point P) for the guide laser beam and the processing laser beam. The operator can therefore align the optical axis of the guide laser beam and the optical axis of the processing laser beam precisely at the center of the beam aperture (laser beam emission port 37) of the scanner 30.

[0058] The second adjusting tool 150 of the adjusting device 100 according to the first embodiment includes the movable pin 153. The length L from the laser beam emission port 37 to the tip section 153p of the movable pin 153 is equal to the focal length of the processing focus of the processing laser beam when the movable pin 153 is in its lowest position in the direction of gravity, under its own weight. The operator can therefore adjust the position of the scanner 30 relative to the workpiece W more conveniently by checking the gap of the head section 153b of the movable pin 153 and the gap between the workpiece W and the movable pin 153.

[0059] The second adjusting tool 150 of the adjusting device 100 according to the first embodiment has the locking screw 154 and the internal threaded section 156 as a fixing mechanism that allows the movement of the movable pin 153 in the optical axis direction to be restricted. According to this configuration, the operator can restrict the movement of the movable pin 153 in the axial direction CA2 by tightening the locking screw 154 clockwise to a position in which the locking screw 154 contacts the movable pin 153. Therefore, it can be prevented that the movable pin 153 comes loose in a situation in which, for example, the second adjusting tool 150 is attached to the device body 110. The operator can enable movement of the movable pin 153 in the optical axis direction by loosening the locking screw 154, which is tightened to the position in which the locking screw 154 contacts the movable pin 153.The operator can also replace the movable pin 153 by enabling movement of the movable pin 153 in the optical axis direction.

[0060] The device body 110 of the adjusting device 100 according to the first embodiment includes the pin inspection window (opening) 115, which allows visual observation of the movement of the movable pin 153 of the second adjusting tool 150. The operator can therefore easily check the presence or absence, the amount, or the like of any movement of the movable pin 153 using the second adjusting tool 150 attached to the device body 110. Furthermore, the operator can insert a fastening tool through the pin inspection window 115 using the second adjusting tool 150 attached to the device body 110 to tighten or loosen the locking screw 154. (Second embodiment)

[0061] An adjustment device 100A of a second embodiment differs from that of the first embodiment with respect to the configuration of a device body 120. Apart from this, the adjustment device 100A of the second embodiment has the same configuration as that of the first embodiment. Therefore, only the device body 120 is shown for the second embodiment, and the overall configuration of the adjustment device 100A is not shown. In the description and drawings of the second embodiment, links and other elements that are equivalent to those in the first embodiment are identified with the same reference numerals as in the first embodiment, and descriptions are omitted where they are considered redundant.

[0062] Fig. Figure 12 is a diagram illustrating the device body 120 of the second embodiment. Fig. Figure 13 is a cross-sectional view along line II in Fig. 12. As in Fig. As shown in Figure 12, the device body 120 of the second embodiment comprises a first tubular section 121, a second tubular section 122, and a flange 112. The first tubular section 121 is a hollow cylindrical element arranged on a laser beam input side of the device body 120. The flange 112 is connected at one end (left side in Figure 12) to a Fig. 13) of the first tubular section 121 is connected. The configuration of the flange 112 is the same as in the first embodiment. As in Fig. Figure 13 shows the first tubular section 121 with an internal threaded section 123 which can be engaged with a locking screw 125 (described below).

[0063] The second tubular section 122 is a hollow cylindrical element arranged on a laser beam emission side of the device body 120. A portion of the second tubular section 122 is fitted externally over the first tubular section 121, and the device body 120 of the second embodiment is used in this configuration. The inner diameter of the second tubular section 122 and the outer diameter of the first tubular section 121 are dimensioned to allow smooth movement of the first tubular section 121 within the second tubular section 122.

[0064] The second tubular section 122 has an adjusting screw hole 124 and a pin inspection window 115. The adjusting screw hole 124 is an elongated hole into which the locking screw 125 is inserted. The adjusting screw hole 124 opens radially and extends axially CA. The locking screw 125 is a component for enabling or restricting movement in the axial direction CA of the second tubular section 122, which fits externally over the first tubular section 121. It is sufficient that a mechanism comprising the internally threaded section 123, the adjusting screw hole 124, and the locking screw 125 is provided at least at one location in the device body 120. The configuration of the pin inspection window 115 is the same as in the first embodiment.

[0065] The operator can restrict the movement of the second tubular section 122 in the axial direction CA relative to the first tubular section 121 by inserting the locking screw 125 through the adjusting screw hole 124 of the second tubular section 122 and tightening the locking screw 125, which engages with the internal threaded section 123 of the first tubular section 121, as shown in Fig. Figure 13 shows. Furthermore, the operator can enable movement of the second tubular section 122, whose movement is restricted by the locking screw 125, in the axial direction CA relative to the first tubular section 121 by loosening the locking screw 125.

[0066] The operator can adjust the length L of the adjusting device 100A in the axial direction CA by loosening the locking screw 125, thus allowing movement of the second tubular section 122 in the axial direction CA. After adjusting the length L of the adjusting device 100A in the axial direction CA to a desired dimension, the operator can fix the position of the second tubular section 122 in the axial direction CA by tightening the locking screw 125.

[0067] According to the setting device 100A of the second embodiment, the length of the fixture body 120 is adjustable in the optical axis direction. The operator can therefore perform adjustments without changing the fixture body, even when machining at different working distances. This configuration can minimize the error of the optical axis of the guide laser beam compared to a configuration where different fixture bodies are exchanged depending on the working distance. (Third embodiment)

[0068] The adjusting device 100 of the first embodiment can also be applied to a laser processing system in which a scanner 30 is mounted on a robot arm to perform processing. Fig. Figure 14 is a diagram illustrating a fixed stand 4 and a laser processing system 1A including a robot 2. Fig. Figures 15A to 15C are diagrams illustrating a function for teaching the processing focus of the laser beam using the laser processing system 1A and the fixed stand 4. It should be noted that a robot control device 3 is included. Fig. 15A to 15C is not shown.

[0069] As in Fig. Figure 14 shows that the laser processing system 1A includes the robot 2 and the robot control unit 3. The robot 2 processes a workpiece by irradiating it with a laser beam. The robot 2 is, for example, an articulated robot. The scanner 30 is mounted at a distal end of one arm of the robot 2. The robot 2 can move the scanner 30 to any position within a workspace and orient the scanner 30 in any direction by driving servo motors (not shown) provided on the respective articulation axes. The adjustment device 100 is mounted on the scanner 30. The robot control unit 3 is a controller that controls the operation of the robot 2. The robot control unit 3 is connected to a numerical control unit (not shown) and controls the operation of the robot 2 based on commands issued by the numerical control unit.Control device sent robot command signals.

[0070] The fixed stand 4 is a tool for teaching the robot 2 the machining point (coordinate origin) on the workpiece. In the present embodiment, "teaching" refers to making an adjustment such that, regardless of the orientation of the robot 2, the tip section 153p of the second setting tool 150 coincides with the same point (in the present embodiment, a pin tip 4a of the fixed stand 4). Although not shown, the operator attaches the first setting tool 130 and sets the optical axis and focal point of the laser beam before attaching the second setting tool 150 to the setting device 100, as in the first embodiment.

[0071] To teach the robot 2 the machining point on the workpiece, the robot control unit 3 controls the robot 2 in three or six axes and records a position at which the tip section 153p of the second setting tool 150 coincides with the pin tip of the fixed stand 4. With three-axis control, the focal point (machining focus) of the scanner 30 and the tip section of the second setting tool 150 can be aligned by movement along an X, a Y, and a Z axis (Cartesian coordinate system). With six-axis control, the focal point of the scanner 30 and the tip section of the second setting tool 150 can be aligned not only by movement along the X, Y, and Z axes, but also by movement along a w, a p, and a r axis (rotational axes).

[0072] Fig. Figures 15A to 15C show examples of aligning the tip section of the second setting tool 150 with the pin tip of the fixed stand 4 for different orientations of the robot 2. According to the present embodiment, the operator can more conveniently adjust the position of the scanner 30 relative to the pin tip of the fixed stand 4, which represents the machining point on the workpiece, for any orientation of the robot 2 by adjusting the gap of the head section 153b (see Figure 15A to 15C). Fig. 6) of the movable pin 153 and the gap between the pin tip of the fixed stand 4 and the tip section 153p (see Fig. 6) of the movable pin 153 checked.

[0073] In the laser processing system, where the scanner 30 is mounted on a robot arm for processing, it is possible to teach the robot 2 the processing point (coordinate origin) on the workpiece using the setting device 100 with the first setting tool 130 attached to it. Specifically, it is possible to teach the robot 2 the processing point on the workpiece in different orientations by taking an image of the center of the target mark (target marker) of the first setting tool 130 projected onto the target plate 133 using a camera and recording the position at which the optical axis and the focal point of the guide laser beam coincide with the processing focus of the processing laser beam. (Modifications)

[0074] Although embodiments of the present disclosure have been described above, the present disclosure is not limited to the preceding embodiments. Various modifications, such as additions, replacements, alterations, and partial deletions, may be made to the preceding embodiments, provided that such modifications do not deviate from the core content of the present disclosure or from the core content of the present disclosure as defined by the appended claims or their equivalents. Any of the preceding embodiments may be implemented in combination with one another. For example, the sequence of operations and the sequence of processes mentioned in the preceding embodiments are merely examples, and the present disclosure is not limited to them.

[0075] The preceding embodiments are described by way of an example in which the frictional force generated between the inner circumferential surface of the tool-holding section 114 of the fixture body 110 and the outer circumferential surface of the insertion section of each tool is used to enable the fixture body 110 to hold the tool. However, the structure for enabling the tool to be releasably held by the fixture body 110 is not limited to this example. For instance, interlocking external and internal threads can be formed on the inner circumferential surface of the tool-holding section 114 of the fixture body 110 and on the outer circumferential surface of the insertion section of each tool, enabling the tool to be releasably held by the fixture body 110 by screwing the tool into the tool-holding section 114.Alternatively, the tool holding section 114 of the fixture body 110 and the insertion section of each tool can be detachably coupled using a fastening screw and a nut.

[0076] In some embodiments, the movable pin 153 may be partially or completely colored to make its movement in the optical axis direction more visible. Furthermore, scale markings may be provided on the pin body 153a (see Fig.6) of the movable pin 153 to enable measurement of the amount of movement of the movable pin 153. Furthermore, a contact sensor can be provided on the second adjusting tool 150 to electrically detect the presence or absence of the gap of the movable pin 153. Similarly, a displacement sensor or the like can be provided on the second adjusting tool 150 to electrically measure the amount of movement of the movable pin 153.

[0077] Further remarks regarding the preceding embodiments are disclosed below. (Additional Note 1)

[0078] Adjustment device (100) for a scanner (30) configured to scan a laser beam over a workpiece, the adjustment device comprising: a tubular device body (110) into which a first laser beam and a second laser beam, emitted from a laser beam emission port (37) of the scanner, are introduced at one end; a first adjustment tool (130) that can be attached to and detached from an opposite end of the device body, the first adjustment tool having a translucent surface ora surface (133a) for checking and adjusting an optical axis of the first laser beam emitted by the scanner; and a second adjusting tool (150) that can be attached to and detached from the first adjusting tool at the opposite end of the device body, wherein the second adjusting tool includes a movable link (153) with a needle-shaped tip section (153p) configured to specify a processing focus of the second laser beam emitted by the scanner, wherein a distance from the laser beam emission port to the light-transmitting surface of the first adjusting tool attached to the device body and a distance from the laser beam emission port to the tip section of the movable link of the second adjusting tool attached to the device body are equal to a focal length of the processing focus of the second laser beam emitted by the scanner. (Additional Note 2)

[0079] The translucent surface (133a) of the first setting tool (130) has a target mark that indicates a target center position for the first laser beam and the second laser beam. (Additional Note 3)

[0080] The distance from the laser beam emission port (37) to the tip section (153p) of the movable link (153) of the second setting tool (150) is equal to the focal length of the processing focus of the second laser beam emitted by the scanner (30) when the movable link is in a lowest position in a gravity direction under its own weight. (Additional note 4)

[0081] The second adjusting tool (150) has a fixing mechanism (154 and 156) which allows a restriction of movement of the movable link (153) in an optical axis direction. (Additional note 5)

[0082] The device body (110) has an opening (115) which allows visual observation of the movement of the movable link (153) in the optical axis direction with a second adjusting tool (150) attached to the device body. (Additional Note 6)

[0083] The length of the device body (110) in the optical axis direction is adjustable. (Additional note 7)

[0084] A method for adjusting a scanner using the adjusting device (100) described in any one of Additional Notes 1 to 6, the method comprising: a step of attaching the first adjusting tool to the device body mounted on the scanner and checking and adjusting the optical axis of the first laser beam; a step of releasing the first adjusting tool from the device body and adjusting a focal point of the first laser beam; and a step of attaching the second adjusting tool to the device body mounted on the scanner and adjusting a mounting position of the scanner and the processing focus of the second laser beam by bringing the tip section of the movable link into contact with the workpiece. Reference symbol list 1, 1A Laser processing system 10 Laser light source 20 Laser control or regulating unit 30 scanners 37 Laser beam emission connection 100, 100A Adjustment Device 110 Device bodies 115 pen verification windows 130 first setting tool 133a translucent surface 150 second adjustment tool 153 movable pen 154 Locking screw 156 Internal thread section QUOTES INCLUDED IN THE DESCRIPTION

[0000] This list of documents cited by the applicant was automatically generated and is included solely for the reader's convenience. The list is not part of the German patent or utility model application. The DPMA accepts no liability for any errors or omissions. Cited patent literature

[0000] JP 2019-98360

[0002] JP 2004-361862

[0002]

Claims

[1] Adjustment device for a scanner configured to scan a laser beam over a workpiece, the adjustment device comprising: a tubular device body into which a first laser beam and a second laser beam are introduced at one end, emitted by a laser beam emission port of the scanner; a first adjustment tool that can be attached to and detached from an opposite end of the device body, wherein the first adjustment tool has a translucent area or surface for checking and adjusting an optical axis of the first laser beam emitted by the scanner; and a second adjusting tool that can be attached to and detached from the first adjusting tool at the opposite end of the device body, wherein the second adjusting tool includes a movable link with a needle-shaped tip section configured to specify a processing focus of the second laser beam emitted by the scanner, wherein a distance from the laser beam emission port to the light-transmitting surface of the first adjusting tool attached to the device body and a distance from the laser beam emission port to the tip section of the movable element of the second adjusting tool attached to the device body are set equal to a focal length of the processing focus of the second laser beam emitted by the scanner. [2] Adjustment device according to claim 1, wherein the translucent surface of the first adjustment tool has a target mark indicating a target center position for the first laser beam and the second laser beam. [3] Adjustment device according to claim 1 or 2, wherein the distance from the laser beam emission port to the tip section of the movable element of the second adjustment tool is equal to the focal length of the processing focus of the second laser beam emitted by the scanner when the movable element is in a lowest position in a direction of gravity under its own weight. [4] Adjustment device according to one of claims 1 to 3, wherein the second adjustment tool has a fixing mechanism which allows a restriction of movement of the movable element in an optical axis direction. [5] Adjustment device according to one of claims 1 to 4, wherein the device body has an opening which allows visual observation of the movement of the movable element in the optical axis direction with a second adjustment tool attached to the device body. [6] Adjustment device according to one of claims 1 to 5, wherein a length of the device body is adjustable in the optical axis direction. [7] Method for adjusting a scanner using the adjustment device according to any one of claims 1 to 6, the method comprising: a step of attaching the first adjustment tool to the device body mounted on the scanner and checking and adjusting the optical axis of the first laser beam; a step of releasing the first setting tool from the fixture body and setting a focal point of the first laser beam; and a step of attaching the second setting tool to the fixture body mounted on the scanner and setting a mounting position of the scanner and the processing focus of the second laser beam by bringing the tip section of the movable link into contact with the workpiece.

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