Device for reducing the pressure at the outlet of a vacuum pump

Abstract

An ejector device configured to reduce pressure at a vacuum pump outlet by introducing a gas stream into a process gas outlet stream between the vacuum pump outlet and a gas treatment system for treating the process gas, wherein the ejector device comprises: an inlet section with an inlet for coupling to the vacuum pump outlet; an outlet for coupling to a line providing a fluid connection path to the gas treatment system; a reduced-diameter neck section for accelerating a gas stream from the inlet to the outlet; and a gas stream injector for introducing an injection gas stream into the reduced-diameter neck section.