DEVICE AND METHOD FOR PACKAGING, HANDLING OR TESTING SENSORS
Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- ROSEMOUNT AEROSPACE INC
- Filing Date
- 2018-04-16
- Publication Date
- 2026-06-10
AI Technical Summary
MEMS devices, such as pressure sensors, are difficult to package, handle, and test due to their small size, which is labor-intensive and challenging.
A method involving encapsulation of wire bonds, separation of sensor assemblies, and use of a flexible substrate array with an enclosure for simultaneous handling and testing of multiple sensors, facilitated by a test sheet that allows for pressurization of the sensor interior.
Facilitates easier handling and testing of MEMS devices by reducing time, cost, and labor through simultaneous processing of multiple sensors, enhancing efficiency and ease of integration into guide wires.