ONE-END READOUT OF A DIFFERENTIAL MEMS DEVICE
DE602022037417T2Active Publication Date: 2026-05-27INFINEON TECHNOLOGIES AG
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Patent Information
- Authority / Receiving Office
- DE · DE
- Patent Type
- Patents
- Current Assignee / Owner
- INFINEON TECHNOLOGIES AG
- Filing Date
- 2022-04-27
- Publication Date
- 2026-05-27
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