Calibration apparatus for a measurement device, and method for calibrating a measurement device

Abstract

The invention relates to a calibration apparatus for a measurement device and to a method for calibrating the measurement device for the purpose of analysing materials or layer thicknesses using a calibration apparatus (11), consisting of a housing (12) with a carrier (18) comprising a plurality of sections (28, 29, 30), wherein at least one calibration standard (34) is provided in at least one section (28), having a drive (16) which can be used to alternately or successively transfer the sections (28, 29, 30) of the carrier (18) into a measurement position (49), having a controller (17) which controls the drive (16) to move the carrier (18), and having a data interface (26) which is connected to the controller (17) and is provided for the purpose of communicating with the measurement device (42).

Description

[0001] Calibration device for a measuring device and method for calibrating a measuring device

[0002] The invention relates to a calibration device for a measuring device and a method for calibrating a measuring device with such a calibration device for material or layer thickness analysis.

[0003] DE 10 2005 054 589 B4 discloses a calibration device for calibrating measuring instruments for the non-destructive measurement of the thickness of thin layers. This calibration device comprises a carrier plate made of a base material and several calibration standards mounted on the carrier plate. The individual calibration standards have differing layer thicknesses to which the measuring instrument is to be calibrated. The measuring instrument is placed on a stand on the carrier plate, and the measuring probe of the measuring instrument is placed successively on the selected calibration standards to perform the calibration. This calibration can increase the measuring accuracy of the measuring instrument. After calibrating the measuring instrument, the individual measurements are performed on the measuring objects according to the measuring task.

[0004] Furthermore, measuring devices are known that enable material analysis using X-ray fluorescence, for example, to determine different proportions of elements in a material or coating. Furthermore, measuring devices using X-ray fluorescence enable layer thickness analysis. Such measuring devices for material or layer thickness analysis, which feature an X-ray fluorescence device, require calibration.

[0005] Due to the multiple measurements performed on differing calibration standards and the subsequent reconstruction time, the calibration of such measuring devices requires an increased calibration time, which requires the operator of such a measuring device to measure a given batch of measurement objects. Furthermore, manual calibration by applying the calibration standard may carry the risk of the calibration not being performed at the isocenter of the measuring device, which can lead to calibration errors that reduce measurement quality.

[0006] The invention is based on the object of proposing a calibration device for a measuring device for material analysis or layer thickness analysis, which enables improved calibration to increase the measurement accuracy of the calibrated measuring devices. Furthermore, the invention is based on the object of proposing a method for calibrating a measuring device for material or layer thickness analysis, which enables increased calibration precision and improved measurement accuracy of the measuring device for the subsequent measurement task.

[0007] The object underlying the invention is achieved by a calibration device for a measuring device, in particular an X-ray fluorescence measuring device, for material analysis or layer thickness analysis, which has a housing with a carrier which comprises a plurality of sections, wherein at least one calibration standard is provided in at least one section, and with a drive by means of which the sections of the carrier can be transferred alternately or successively into a measuring position and with a control provided in the housing which controls the drive for positioning the carrier in the measuring position and with a data interface by means of which the control of the calibration device communicates with a data interface of a control device of the measuring device to be calibrated.

[0008] The calibration device is preferably designed separately from the measuring device and / or as a separate component from the measuring device. Such a calibration device enables at least one section of the carrier, which accommodates or has a calibration standard, to be transferred into a measuring position on or in the measuring device in order to subsequently perform a measurement of the measuring device to be calibrated, in which the X-ray radiation of the measuring device is directed at the calibration standard to record a calibration value.Through communication between the measuring device and the calibration device via the respective data interface, the control system in the calibration device can successively or alternately move the carrier with respect to its sections into the respective measuring position. This allows, for example, a corresponding number and / or selection of calibration standards, which were selected by the control system of the measuring device based on the subsequent measuring task, to be successively moved into the measuring position in order to calibrate the measuring device. This ensures that the calibration standard arranged at least in the section of the carrier can be moved into the measuring position with repeatable accuracy, so that the measurement in the measuring device is aligned to the center of the calibration standard or the isocenter for calibration.This allows for improved calibration and thus more precise measurement accuracy for the measuring device being calibrated. After calibrating the measuring device, the calibration fixture can be used for a subsequent measuring device to be calibrated.

[0009] Preferably, the carrier comprises several sections arranged in a row, which can be successively moved into the measuring position. This allows for simple control of the calibration device and time-saving calibration using measuring instruments.

[0010] Advantageously, each section of the carrier can be provided with an identification code that can be read by an optical camera of the calibration device or the measuring device, and the controller can move the respective identified section into the measuring position. This preferably individualized identification code can be, for example, a QR code or a one-dimensional code, such as a barcode, as well as any desired number and / or numeric combination. By detecting the identification code in the optical camera, the respective calibration standard assigned to the section can then be selected and moved into the measuring position for calibrating the measuring device. This can increase the process reliability for calibrating the measuring device.Alternatively, it can be provided that the drive for controlling a travel movement of the carrier of the calibration device has a position sensor and one of the sections is aligned with the position sensor in a start position or initial position and the other sections can be controlled in a defined manner and moved into the respective measuring position by detecting the angle of rotation or increments of the position sensor. This can enable alternative control and alignment of the individual sections of the carrier to the measuring position. Furthermore, it can alternatively be provided that the carrier has an indexing which is queried by the control system in the housing and from this a zero position or a start position is detected in order to subsequently move the respective section into the measuring position based on the travel movement of the carrier, knowing the respective position of the sections in relation to one another.

[0011] According to a preferred embodiment of the calibration device, the carrier is designed as a rotating disk having several sections distributed around its circumference. These sections are preferably shaped like a slice of cake.

[0012] Advantageously, the sections arranged around the circumference are evenly distributed on the support. For example, two, four, six, eight, or twelve sections can be provided on one support to accommodate a minimum number of calibration standards. For example, for the material analysis of a precious metal, such as for determining the components or elements in fine gold, calibration standards made of the pure elements gold, silver, platinum, lead, and / or chromium can be provided.

[0013] According to a further preferred embodiment of the carrier, individual sections are provided with a receptacle for positioning a calibration standard. Such calibration standards are preferably manufactured in accredited test laboratories and provided as a coated base material or consisting of a film. The carrier can be individually equipped with such calibration standards for the respective calibration task. For the correct arrangement of the calibration standards in the section, a receptacle for aligning the calibration standard is preferably provided. Alternatively, a support surface on which the calibration standard can be positioned can be formed in the section of the carrier.

[0014] Furthermore, the carrier can be provided with a predetermined number of sections or with a fixed configuration of different calibration standards in all sections. Thus, a pre-assembled carrier or a pre-assembled calibration device can be designed for specific measurement tasks of the measuring device.

[0015] Furthermore, it can preferably be provided that the carrier is interchangeable with the drive in the housing. This allows for quick and easy conversion of the calibration device to different calibration tasks. Advantageously, a storage space can be provided in the housing in which the individual carriers can be stored.

[0016] According to a further preferred embodiment of the calibration device, the carrier has a pinhole in at least one section. This allows, for example, a measurement object to be aligned with the pinhole and a measurement to be performed by the measuring device. Subsequently, the carrier plate is transferred to another measuring position, in which the section of the carrier arranged in the measuring position is positioned with a calibration standard or a verification standard that is not used for calibration. This allows a comparison to be made between the measured values ​​of the measurement object, the calibration standard, and / or the verification standard in order to determine whether the measurement performed for the measurement objects lies within a defined limit range or below a predetermined threshold value.Furthermore, it can preferably be provided that the carrier has a pinhole covered with a film in at least one of the sections. In particular, the film is designed as a Mylar film. This allows even small measurement objects, whose surface area is smaller than the pinhole, to be placed in the section. Such Mylar films are invisible to X-rays, meaning that the Mylar film does not contain any components that could impair the primary radiation and the secondary radiation emitted by the measurement object in the X-ray fluorescence range.

[0017] The support of the calibration device is preferably made of a material that is low-reflection, particularly non-reflection, and / or at least low-absorption, particularly non-absorption, for X-rays. In particular, a plastic material free of additives is provided. For example, the support can be made of a thermoplastic material, particularly polyethylene, polycarbonate, or polymethyl methacrylate.

[0018] The data interface provided on the housing of the calibration device is preferably designed for wireless communication with the measuring device to be calibrated. Common standards, such as Wi-Fi or Bluetooth, or the like, can be used. Alternatively, the data interface on the housing of the calibration device can also be designed for wired communication with the measuring device. This can, for example, be known USB interfaces and their variants.

[0019] Furthermore, it is preferably provided that the carrier is accommodated in the housing by an axis rotatable to an X / Y plane, which can be rotated parallel to a measuring surface of the measuring device. This allows the individual sections to be gradually transferred to a measuring point in the measuring surface of the measuring device, which is exposed to X-ray radiation by an X-ray fluorescence device in the measuring device. Furthermore, it is preferably provided that the carrier protrudes with an arc-segment-shaped section from an end face of the housing. This protruding arc-segment-shaped section can be aligned to a measuring point in the measuring surface of the measuring device. The calibration standard, the identification code, the pinhole and / or the pinhole covered with a film are provided in the respective section of the arc-segment-shaped section that protrudes from the housing.Alternatively, the carrier can be arranged so that it can rotate completely within the housing in an X / Y plane and is arranged parallel to the measuring surface of the measuring device. Advantageously, the housing has a housing opening on the wall section facing the measuring surface of the measuring device.

[0020] Furthermore, it is preferably provided that the housing of the calibration device has a support surface or support points, and the plane of the support surface or the support point and a measuring point or a measuring surface of the calibration standard or the measurement object on or on the carrier have a distance of less than 10 mm, preferably less than 5 mm, preferably less than 3 mm. Particularly for calibration standards with thin layers that are used for calibration, a short distance is advantageous for achieving maximum intensity in the secondary radiation.

[0021] According to a further preferred embodiment of the calibration device, the calibration standards are designed as pure elements or as layered elements consisting of a base material and a coating. For a precious metal such as gold, pure elements are understood to mean a purity of more than 99% gold. The same applies to other precious metals.

[0022] The object underlying the invention is further achieved by a method for calibrating a measuring device for material or layer thickness analysis, in particular an X-ray fluorescence measuring device, in which a measuring task to be subsequently carried out is called up and selected in a control device of the measuring device and in which a calibration device according to one of the previously described embodiments is transferred to a calibration position for the measuring device and in which individual calibration standards arranged in the sections of the carrier are moved to a measuring position,in which the selected section of the carrier is aligned to the measuring point on the measuring surface of the measuring device, and in which measurement data from the calibration standards arranged in the respective sections of the carrier are forwarded to a control device, and a calibration value is determined from the measurement data of each calibration standard, and in which the standard values ​​stored in the control device are compared with the recorded calibration values, and correction values ​​for subsequent measuring tasks are determined and used as a basis. This method has the advantage that the operating personnel can attend to other activities during the calibration of the measuring device, since the calibration of the measuring device for the subsequent measuring task is carried out by the calibration device. This also eliminates operating errors.For example, by swapping calibration standards or not aligning them in the isocenter of the measuring point on the measuring surface of the measuring device.

[0023] Preferably, the at least one section of the carrier of the calibration device is aligned with the measuring point of the measuring device for assuming the calibration position. Preferably, the calibration device can be positioned on the measuring surface of the measuring device in order to subsequently adjust the alignment of the at least one section of the carrier with respect to the measuring point on the measuring surface of the measuring device.

[0024] In particular, the alignment of the calibration standard in the carrier section to the measuring point on the measuring surface of the measuring device is indicated by a positioning laser on the measuring device or shown on a display of the measuring device using a measuring image camera that captures the measuring point. This makes it easy to ensure that the calibration position is maintained.

[0025] Furthermore, it is preferably provided that communication is established between the calibration device and the measuring device in the calibration position via the data interface of the calibration device and the control device in the measuring device. For example, it can be provided that an active coupling, in particular with wireless communication, is required when the calibration device is initially positioned relative to the measuring device. During a subsequent or further calibration, secure and wireless communication can be established independently between the calibration device and the measuring device. Alternatively, the communication can be wired.

[0026] A further preferred embodiment of the method provides that the control device of the measuring device selects the number and / or the respective calibration standards to be used for calibration based on the selected measurement task. This can prevent confusion of calibration standards or incorrect calibration due to a reduced number of calibration standards.

[0027] According to a preferred embodiment of the method, a carrier equipped with calibration standards is selected for the subsequent measurement task of the measuring device. The carrier can be permanently provided in a pre-assembled calibration device. The calibration device can also be equipped with a selected carrier comprising a sorting of calibration standards, or the selected sections of the carrier can be equipped with predetermined calibration standards. In series production, it can be provided for quality control purposes, for example, that several pre-assembled calibration devices are used in order to save time in preparing the calibration device for the calibration task.Alternatively, it can also be provided that, for individual and a large number of different measuring tasks, the calibration device is selected with a carrier in which the individual sections can be individually equipped with calibration standards.

[0028] Furthermore, it is preferably provided that the at least one predetermined number of sections are recorded with the respective calibration standards of the calibration device and stored in the control device of the measuring device.

[0029] Furthermore, it is preferably provided that, for the calibration of the measuring device, the control of the calibration device is controlled by the control unit of the measuring device, and preferably the calibration standards selected for the measuring task are successively moved into the measuring position. This allows for a secure and traceable calibration.

[0030] In particular, it is provided that after the calibration of the measuring device has been performed using at least one calibration standard of the calibration device, a verification standard that was not used for the calibration of the measuring device is transferred to the measuring position, and the calibration value is compared with the verification value of the verification standard. This allows an additional comparison of the completed calibration to be performed. In particular, it can be monitored whether external influences, such as temperature fluctuations, occurred during the calibration of the measuring device that could have led to a falsification of the calibration of the measuring device.

[0031] Furthermore, it is preferably provided that after the verification value has been recorded, a measurement object is measured by placing it on a pinhole or a pinhole covered with a film of the carrier. Subsequently, a reference value is recorded, and then a difference between the verification value and the reference value is determined. If the reference value is less than a specified threshold, the calibration can be completed, and the measuring device can then be controlled for the measurement task. If the reference value is greater than a specified threshold, a request to repeat the calibration can be issued.

[0032] According to a further advantageous embodiment of the method, the calibration device can comprise a measuring support that is positioned behind the carrier in a primary beam directed onto the carrier, and the carrier, with a pinhole and at least a predetermined number of sections with calibration standards, is moved to the measuring position for calibration after one or more measurements of measurement objects on the measuring support. This arrangement enables, for example, calibration to be carried out automatically after each measurement or after a predetermined number of measurements during testing of a batch of measurement objects, in order to initiate recalibration in the event of a possible deviation of the measuring device.

[0033] Furthermore, it can preferably be provided that the carrier arranged in the calibration device is exchanged and a changer for measuring objects is inserted. Such a changer for measuring objects is designed analogously to the carrier, but a predetermined number of measuring objects can be placed on it, so that a consecutive measurement of measuring objects can be controlled automatically by the measuring device via the calibration device.

[0034] The invention, as well as further advantageous embodiments and developments thereof, are described and explained in more detail below with reference to the examples shown in the drawings. The features shown in the description and the drawings can be used individually or in any combination according to the invention. They show:

[0035] Figure 1 is a schematic side view of a calibration device, Figure 2 is a schematic top view of a calibration device according to Figure 1,

[0036] Figure 3 is a schematic top view of a support of the calibration device according to Figure 1,

[0037] Figure 4 is a schematic sectional view of a section of the carrier according to Figure 3,

[0038] Figure 5 is a schematic sectional view along the line VV of the carrier in Figure 3,

[0039] Figure 6 is a schematic side view of the calibration device in a calibration position relative to the measuring device,

[0040] Figure 7 is a schematic side view of an alternative embodiment to Figure 6, and

[0041] Figure 8 is a schematic side view of a further alternative embodiment to Figure 6.

[0042] Figure 1 shows a schematic side view of a calibration device 11. Figure 2 shows a top view of the calibration device 11. This calibration device 11 comprises a housing 12. On an underside of the housing 12, a support surface or support points 14, which lie in a support plane 24, are provided for positioning on a surface. The housing 12 comprises a drive 16, in particular an electric motor, which is rotatably driven by a controller 17. This drive 16 controls a travel movement of a carrier 18 relative to the housing 12. This carrier 18 has a base body 19, which is designed, for example, in the form of a rotating disk. The axis of rotation 20 of the carrier 18 is preferably aligned perpendicular to the support plane 24 of the support points 14.The carrier 18 is arranged in a position relative to the housing 12 such that an arcuate segment-shaped section 21 of the carrier 18 protrudes relative to an end face 22 or a front side of the housing 12. The further part of a carrier 18 is positioned within an open receptacle 23 in the housing 12. It is preferably provided that a distance A between the carrier 18 or an underside of the carrier 18 and a support plane 24 formed by the support points 14 or a support surface of the housing 12 has a distance that is less than 10 mm, preferably less than 5 mm, in particular less than 3 mm.

[0043] A data interface 26 is provided on or in the housing 12 of the calibration device 11 and is connected to the controller 17. The data interface 26 can have a mechanically designed plug-in connection for wired communication and / or for a power supply. The data interface 26 can also be designed as a wireless communication interface. In this case, the calibration device 11 can have a separate power supply connected to a power grid or be operated with accumulators.

[0044] The carrier 18 of the calibration device 11 according to Figures 1 and 2 is shown in a plan view in Figure 3. This carrier 18 has a plurality of sections 28. These sections 28 are preferably evenly distributed around the circumference. In this case, the sections 28 can be of the same size. For example, they can be pie-shaped. This section 28 of the carrier 18 can be equipped with a calibration standard 34. This calibration standard 34 can be permanently integrated into the carrier 18. Alternatively, a receptacle 35 can be provided in the section 28 for positioning the calibration standard 34. This receptacle 35 can be designed in the form of a recess, as shown in Figure 4, which shows a sectional view along the line IV-IV in Figure 3. A calibration standard 34 can be inserted into this receptacle 34. Furthermore, the carrier 18 can also be designed to hold a measurement object.For example, in this case it can be a section 29 which comprises a pinhole 31 which is covered by a film, in particular Mylar film 32, as shown in Figure 4. Thus, a measurement object which is smaller in diameter than the pinhole 31 can be placed on the upper side of the carrier 18 or the film 32. Furthermore, a section 30 can be formed in the carrier 18, as shown in a sectional view along the line VV according to Figure 3 in Figure 5. This section 30 can consist of only one pinhole 31. The pinhole 31 represents a through-bore with a free passage. The sectional view along the line VV according to Figure 3 shows an alternative embodiment and arrangement of the calibration standard 34 relative to the carrier 18. In this arrangement, the calibration standard 34 is firmly arranged or integrated into the base body 19 of the carrier 18.

[0045] The carrier 18 is rotatably mounted about the vertical axis 20. It can be provided that the carrier 18 is arranged interchangeably in the housing 12 and can be coupled to the drive 16. For example, the carrier 18 can have an indexing device so that it can be connected to a drive shaft of the drive 16 in a defined orientation. The drive 16 itself can comprise a position sensor so that the location and position of the indexing of the drive shaft is known to the controller 17. As a result, a defined positioning of the individual sections 28, 29, 30 in a measuring position 49 (Figures 2 and 6) can be controlled by means of the controller 17 of the calibration device 11. In this measuring position 49, a sufficient area of ​​each section 28, 29, 30 of the carrier 18 protrudes relative to the end face 22 of the housing 12.

[0046] The base body 19 of the carrier 18 is preferably made of a thermoplastic material without additives that lead to absorption and / or reflection of X-rays. Polyethylene, polycarbonate, or polymethyl methacrylate is preferred.

[0047] The calibration standard 34 can be designed as a so-called pure element to calibrate a measuring device 42, in particular an X-ray fluorescence measuring device according to Figure 6, for material analysis. Such pure elements can consist of precious metals with a very high degree of purity. The calibration standard 34 can also be designed as a base body with a coating to calibrate the measuring device 42 for layer thickness analysis. The calibration standard 34 can include an identification code, such as a QR code or barcode.

[0048] Figure 6 shows a schematic side view of the measuring device 42. This measuring device 42 is an X-ray fluorescence measuring device. This measuring device 42 comprises an X-ray fluorescence device 43, which includes a beam generation source 44 for generating X-rays, and at least one detector 46. The beam generation source 44 emits primary radiation 45, which is directed onto a measuring point 47 on a measuring surface 48 of the measuring device 42. The secondary radiation 52 emitted by a measurement object 51 resting on the measuring point 47 or a calibration standard 34 on the carrier 18 is detected by the detector 46 to determine measured values. These measured values ​​are forwarded to a control device 54 of the measuring device 42. This control device 54 is connected to a data interface 55.

[0049] Furthermore, an optical device 56 is schematically shown in the measuring device 42. This optical device 56, in particular a camera, captures images of the measuring point 47 via a mirror (not shown in detail) that is coupled into the beam path in order to take pictures of the measuring point 47.

[0050] The calibration device 11 is separate from the measuring device 42, in particular the measuring device 42 for layer thickness analysis. The calibration device 11 can be used for the sequential calibration of multiple measuring devices 42. The calibration device 11 is designed to be detachable from the measuring device 42. The calibration device 11 is a standalone unit. To calibrate the measuring device 42, the calibration device 11 is transferred to a calibration position 58 on or in the measuring device 42. In this calibration position 58, the calibration device 11 is preferably positioned on the measuring surface 48 of the measuring device 42. An arc-segment-shaped section 21 of the carrier 18 protrudes from the housing 12 of the calibration device 11 and is aligned with the measuring point 47 of the measuring device 42, so that the primary radiation generated by the radiation source 44 impinges on the sections 28, 29, 30 of the carrier 18, which can be aligned with the measuring point 47.

[0051] To align the calibration device 11 with the measuring point 47 in the measuring device 42, a positioning laser provided on or in the measuring device 42 or the optical device 56 can be provided. In the case of the optical device 56, the position of the section 28 of the carrier 18 with respect to the measuring point 47 is output, for example, on a display 57 of the measuring device 42. An acoustic signal can also be output.

[0052] In the calibration position 58, a wireless or wired communication is also established between the controller 17 of the calibration device 11 and the control device 54 of the measuring device 42.

[0053] Calibration of the measuring device 42 by the calibration device 11 can be performed as follows: On a control panel 59 of the measuring device 42, which can also be designed separately from the measuring device 42 in the form of a portable communication device, in particular a tablet, a measurement task to be subsequently performed by the measuring device 42 is selected via operating software in the control device 54. The control device 54 outputs the corresponding number of calibration standards 34 and / or the types of calibration standards 34 for this purpose.

[0054] The calibration device 11 can comprise a prefabricated carrier 18, which, among other things, contains the calibration standards 34 required for the calibration task. Alternatively, a carrier 18 can be equipped with corresponding calibration standards 34. Alternatively, the carrier 18 can be replaced with another carrier for the housing 12 of the calibration device 11, which contains the calibration standards for the subsequent measurement task.

[0055] The controller 17 of the calibration device 11 then transmits information about the sections 28, 29, 30 of the carrier 18 aligned with the measuring point 47 in a measuring position 49 to the control device 54 of the measuring device 42. Subsequently, the control device 54 of the measuring device 42 starts the calibration process, in which the individual sections 28, 29, 30 are selected in order to perform the corresponding measurements for the calibration. For example, several sections 28, each with different calibration standards 34, are controlled. From the position detection of the sections 28, 29, 30 relative to the measuring position 49, the calibration standard 34 can be assigned to the measured values ​​for determining the calibration value.

[0056] The respective section 28, 29, 30 in the measuring position 49 can be identified by the control system 17, provided that the carrier 18 has been aligned with the drive 16 in the calibration device 11. Likewise, an identification code of the calibration standard 34 or in the section 28, 29, 30 can be queried by the measuring device 42 or the calibration device 11 for identification purposes.

[0057] After the predetermined number of calibration standards 34 have been measured for the subsequently selected measurement task and calibration values ​​have been recorded for each of them, these are compared with the standard values ​​stored in the control device 57, and correction values ​​are then determined, which are taken into account in the subsequent measurement of measurement objects. The calibration device 11 can be removed from the calibration position 58 for the subsequent measurement task, which is carried out with the measuring device 42. The measurement objects can then be placed one after the other on the measuring point 47, and individual measurements can be carried out and saved. Alternatively, it can also be provided that the carrier 18 is replaced by a changer for holding measurement objects in the calibration device 11.Subsequently, the further clocking or positioning of the measuring objects on the changer can be controlled by the controller 17 of the calibration device 11 or by the control device 54.

[0058] The calibration of the measuring device 42 by the calibration device 11 can also include a further step. After the calibration values ​​have been recorded from the predetermined number of calibration standards 34 in the respective sections 28 of the carrier 18, the carrier 18 can be moved, for example with section 29 or section 30, into the measuring position 49. Subsequently, a reference object is placed on the pinhole 31 or on a film 32 covering the pinhole 31, and a measurement is performed. This reference object or this reference standard has not previously been used to calibrate the measuring device 42. However, this reference object is standardized like the calibration standards 34. The determined reference value can then be compared with the calibration value. If a difference value greater than a predetermined threshold value results, a new calibration would have to be performed.If this difference value is smaller than a threshold, the calibration can be considered to have been carried out correctly.

[0059] Figure 7 shows an alternative embodiment of the calibration device 11 in the calibration position 58 relative to the measuring device 42. In this calibration device 11, a measuring support 62 is provided adjacent to the carrier 18. This measuring support 62 can be detachably fastened to an end face 22 of the housing 12. The measuring support 62 preferably comprises a pinhole 31, which is in particular covered with a film 32, on which the measuring object 51 can be positioned. The film 32 is preferably a Mylar film. After calibrating the measuring device 42 with the calibration device 11, the calibration device 11 remains in the calibration position 58 relative to the measuring device 42. The carrier 18 is aligned with the section 30 toward the measuring point 47. The primary radiation of the X-ray fluorescence device 43 strikes directly the underside of the film 32 of the measuring support 62, on which the measuring object 51 rests.The resulting measured values ​​can be recorded directly by the detector 46. If calibration is to be performed between one measurement or a plurality of measurements of a batch of measurement objects 51, the calibration device 11 can be controlled so that the individual sections 28 are positioned at the measuring point 47 for the recording of calibration values. This arrangement allows, for example, a calibration, a measurement, and a calibration, etc. to be performed. It can also be provided that a calibration, a predetermined number of measurements, and another calibration are performed.

[0060] Figure 8 shows a further schematic sectional view of an alternative embodiment of the measuring device 42 and the calibration device 11. In this embodiment, the calibration device 11 is integrated into the measuring device 42. The carrier 18 of the calibration device 11 is positioned below the measuring surface 48, i.e., between the measuring point 47 and the X-ray fluorescence device 43. All of the aforementioned embodiments and alternatives are also possible in this alternative embodiment. This arrangement has the particular advantage that, with very thin foils used for the calibration standard 34, a small distance to the X-ray fluorescence device 43 is created, thereby enabling maximum intensity for signal acquisition for evaluating the measured values.For equipping the carrier 18 and / or replacing it, the measuring surface 48 can, for example, be at least partially hinged or removable, so that easy accessibility to the calibration device 11 integrated in the measuring device 42 is provided.

Claims

AMENDED CLAIMS received by the International Bureau on 30 October 2023 (30.10.2023) Claims Calibration device for a measuring device (42) for material analysis or layer thickness analysis, - with a housing (12), - with a carrier (18) comprising a plurality of sections (28, 29, 30), wherein at least one calibration standard (34) is provided in at least one section (28), - with a drive (16) by which the sections (28, 29, 30) of the carrier (18) can be transferred alternately or successively into a measuring position (49), - with a control (17) which controls the drive (16) for the movement of the carrier (18), and - with a data interface (26) which is connected to the controller (17) and which communicates with a data interface (55) of the measuring device (42) to be calibrated. Calibration device according to claim 1, characterized in that the carrier (18) has a plurality of sections (28, 29, 30) arranged in a row, which can be transferred to the measuring position (49). Calibration device according to one of the preceding claims, characterized in that at least one section (28, 29, 30) of the carrier (18) has an identification code which can be read by an optical device on the housing (12) or on the measuring device (42), and the respective identified section (28, 29, 30) can be transferred to the measuring position (49) by the controller (17). AMENDED SHEET (ARTICLE 19) . Calibration device according to one of the preceding claims, characterized in that the drive (16) has a position sensor and one of the sections (28, 29, 30) is aligned with the position sensor in a start position and the individual sections (28, 29, 30) can be transferred into the measuring position (49) in a defined manner by the detection of the angle of rotation or increments by the position sensor. . Calibration device according to one of the preceding claims, characterized in that the carrier (18) has a base body (19) which is designed as a rotating disk which has a plurality of sections (28, 29, 30) distributed over the circumference, and preferably a plurality of sections (28, 29, 30) are provided arranged uniformly distributed over the circumference. .Calibration device according to one of the preceding claims, characterized in that the carrier (18) has a receptacle (35) for positioning the calibration standard (34) or has a support surface for a measurement object in at least one section (28). Calibration device according to one of the preceding claims, characterized in that the carrier (18) has a fixed arrangement of calibration standards (34) in the sections (28). Calibration device according to one of the preceding claims, characterized in that the carrier (18) is provided in the housing (12) so as to be exchangeable for the drive (16). Calibration device according to one of the preceding claims, characterized in that the carrier (18) has a pinhole (31) in the section (29), and preferably the carrier (18) has a pinhole covered with a film (32) in the section (29). AMENDED SHEET (ARTICLE 19) (31), in particular a pinhole diaphragm (31) covered with a Mylar foil. Calibration device according to one of the preceding claims, characterized in that the base body (19) of the carrier (18) is formed from a material which is low-reflection, in particular reflection-free, and / or low-absorption, in particular absorption-free, for X-ray radiation, and the base body (19) is made in particular from polyethylene, polycarbonate or polymethyl methacrylate. Calibration device according to one of the preceding claims, characterized in that the data interface (26) in the housing (12) is designed for wireless or wired communication with the measuring device (42). Calibration device according to one of the preceding claims, characterized in that the carrier (18) is rotatably mounted in the housing (12) by a vertical axis and is received in an X / Y plane parallel to the measuring surface (48) of the measuring device (42). Calibration device according to one of the preceding claims, characterized in that the carrier (18) protrudes with an arc-segment-shaped section (21) from an end face (22) of the housing (12) or that the carrier (18) is provided entirely within the housing (12) and the sections (28, 29, 30) of the carrier (18) are accessible from the outside through a housing opening in the housing (12).Calibration device according to one of the preceding claims, characterized in that the housing (12) has a support surface or support points (14) which form a support plane (24) and that a measuring point or a measuring surface of the calibration standard (34) or of the measuring object (51) is on, on or in the carrier. AMENDED SHEET (ARTICLE 19) (18) has a distance of less than 10 mm, preferably 5 mm, particularly preferably less than 3 mm, from the support plane (24). Calibration device according to one of the preceding claims, characterized in that the at least one calibration standard (34) is designed as a pure element or as a layer element consisting of a base material and a coating. Method for calibrating a measuring device (42) for material analysis or layer thickness analysis, - in which a measuring task to be subsequently carried out is selected in a control device (54) of the measuring device (42), - in which a calibration device (11) according to one of claims 1 to 17 is arranged in a calibration position (58) relative to the measuring device (42) to be calibrated, and - in which, for the calibration of the measuring device (42), a data interface (26) of the calibration device (11) communicates with a data interface (55) of the measuring device (42). Method according to claim 16, characterized in that individual calibration standards (34) arranged in the sections (28, 29, 30) of the carrier (18), which are selected for the subsequent measurement output by the control device (54), are moved in the calibration device (11) into a measuring position (49) relative to the measuring device (42), and a calibration measurement is performed. - that the measured data are forwarded from the calibration standard (34) arranged in the respective section of the carrier (18) to the control device (54) and a calibration value is determined from each calibration standard (34), and AMENDED SHEET (ARTICLE 19) - that the standard values ​​stored in the control device (54) are compared with the calibration values, and correction values ​​for the subsequent measurement task for the measuring device (42) are determined and used as a basis. Method according to claim 16 or 17, characterized in that at least one section (28, 29, 30) of the carrier (18) of the calibration device (11) is aligned in the calibration position (58) with respect to a measurement point (47) in a measurement surface (48) of the measuring device (42). Method according to claims 16 to 18, characterized in that the alignment of the calibration device (11) in the calibration position (58) is carried out using a positioning laser of the measuring device (42) or using a measurement image of an optical device (56) of the measuring device (42).Method according to one of claims 16 to 19, characterized in that in the calibration position (58) between the calibration device (11) and the measuring device (42), communication is established via the data interface (26) of the calibration device (11) and a data interface (55) of the measuring device (42). Method according to one of claims 16 to 20, characterized in that a displacement movement of the carrier (18) of the calibration device (11) for positioning the respective calibration standard (34) in the measuring position (49) is controlled by the control device (56) on the basis of the selected measuring task, the number and / or the respective type of calibration standards (34). Method according to one of claims 16 to 21, characterized in that a carrier (18) equipped with calibration standards (34) is selected or that the carrier (18) is equipped with the respective selected calibration standards (34). AMENDED SHEET (ARTICLE 19)Method according to one of claims 16 to 22, characterized in that for the calibration of the measuring device (42), the control (17) of the calibration device (11) is controlled by the control unit (54), and preferably the calibration standards (34) selected for the measuring task are successively moved into the measuring position (49). Method according to one of claims 16 to 23, characterized in that after the calibration of the measuring device (42) has been carried out using the calibration standards (34) of the calibration device (11), a verification standard is transferred to the measuring position (49), which was not used for the calibration of the measuring device (42), and a verification value is recorded from the verification standard, and that the measured value of the calibrated measuring device (42) is compared with the verification value of the verification standard.Method according to claim 24, characterized in that after the detection of the verification value, a measurement is carried out on a reference object by placing it on a pinhole in a section. (30) or on a pinhole diaphragm covered with the film (32) (31) is measured in a section (29) of the carrier (18) and subsequently a reference value of the reference object is compared with the verification value and if a resulting difference value is greater than a, preferably selectable, threshold value, a recalibration is started. Method according to one of claims 16 to 25, characterized in that a primary beam (45) is directed onto the carrier (18) of the calibration device (11) in the calibration position (58) and a measuring support (62) for arranging a measuring object is positioned behind it in the beam direction of the primary beam (45) and that the carrier (18) is provided with a section (29) with a pinhole (31) spanned by a film (32) or with a section (30) with a pinhole (31) for the detection of a AMENDED SHEET (ARTICLE 19) The measured value from the measurement object is positioned at the measuring point (47) and, after one or more measurements on measurement objects with at least one section (28) having a calibration standard (34), is moved to the measuring point (47) for the calibration of the measuring device (42). Method according to one of claims 16 to 26, characterized in that in the calibration device (11), which is preferably arranged in the calibration position (58), the carrier (18) is exchanged after the calibration and a changer for receiving measurement objects is inserted into the calibration device (11) and a sequential positioning of the measurement objects in the measuring position (49) for the measurement of the measurement objects is carried out by the calibration device (11). AMENDED SHEET (ARTICLE 19)

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