Assembly in a microlithographic projection exposure system

Abstract

The invention relates to an assembly in a microlithographic projection exposure system, the assembly (100, 200, 300, 400) comprising: an optical element (101, 201, 301, 401); at least one weight-force compensation device (110, 210, 310, 410) having a passive magnetic circuit (111, 211, 311, 411) for generating a magnetic field which causes a force for at least partially compensating for the weight force acting on the optical element and having an active component for generating an actively controllable force transmitted to the optical element, the at least one weight-force compensation device (110, 210, 310, 410) being coupled to the optical element (101, 201, 301, 401) by means of an articulatedly mounted pin (115, 215, 315, 415); and at least three Lorentz actuators (120, 130, 220, 230, 320, 330, 340, 420, 430, 440) each designed to exert a controllable force on the optical element, at least one of said Lorentz actuators being fastened directly to the optical element.

Description

[0001] Assembly in a microlithographic

[0002] Projection exposure system

[0003] This application claims priority from German patent application DE 10 2023 206 041.8, filed on June 27, 2023. The content of this DE application is incorporated by reference into the present application text.

[0004] BACKGROUND OF THE INVENTION

[0005] Field of the invention

[0006] The invention relates to an assembly in a microlithographic projection exposure system.

[0007] State of the art

[0008] Microlithography is used to manufacture microstructured components, such as integrated circuits or LCDs. The microlithography process is carried out in a so-called projection exposure system, which has an illumination device and a projection lens. The image of a mask (= reticle) illuminated by the illumination device is projected by the projection lens onto a substrate (e.g., a silicon wafer) coated with a light-sensitive layer (photoresist) and arranged in the image plane of the projection lens in order to transfer the mask structure onto the light-sensitive coating of the substrate. In a projection exposure system designed for EUV (e.g., for wavelengths of approximately 13 nm or approximately 7 nm), mirrors are used as optical components for the imaging process due to the lack of light-transmitting materials. These mirrors can, for example,be mounted on a support frame and be designed to be at least partially manipulable in order to allow movement of the respective mirror in six degrees of freedom (ie with regard to displacements in the three spatial directions x, y and z as well as with regard to rotations R. x , Ry, and Rz around the corresponding axes). This allows for compensation of changes in the optical properties that occur during operation of the projection exposure system, e.g., due to thermal influences.

[0009] For example, it is known to use three actuator arrangements in a projection lens of an EUV projection exposure system for manipulating optical elements such as mirrors in up to six degrees of freedom - as schematically indicated in Fig. 13 - which each have at least two Lorentz actuators 1302 and 1303, 1304 and 1305, or 1306 and 1307 (i.e., each with two actively controllable axes of movement). Furthermore, in the structure of Fig. 13, for each of these actuator arrangements or for each associated force introduction point, a weight force compensation device (also referred to as "MGC" = "Magnetic Gravity Compensator") is provided for each of these actuator arrangements or for each associated force introduction point in order to minimize the energy consumption of the active or controllable actuating elements, so that no permanent energy flow with the associated heat generation is required.The weight compensation device can be adjustable to a certain holding force, which is transmitted to the mirror 1300 via a mechanical element (pin) 1315, 1325, or 1335 that is mechanically coupled to the mirror 1300. Furthermore, it is also known, for example, to design the weight compensation device to additionally exert a controllable force.

[0010] Various approaches are known for connecting the Lorentz actuators and the weight force compensation device. One particular problem that arises during operation is that, depending on the specific configuration, comparatively high parasitic moments or forces are transferred to the mirror, particularly via the Lorentz actuators, which in turn leads to undesirable deformations of the optical effective surface of the mirror in question and thus impairs the performance of the optical system.

[0011] In the course of increasing demands on the projection exposure system with regard to achieved resolution and contrast and the associated increase in numerical apertures and mirror sizes, the coupling of both the Lorentz actuators and the weight force compensation device represents an increasingly demanding challenge.

[0012] For the state of the art, reference is made solely to DE 10 2009 054 549 A1, WO 2012 / 084675 A1, DE 10 2018 202 694 A1 and DE 10 2018 207 949 A1 as examples.

[0013] SUMMARY OF THE INVENTION

[0014] It is an object of the present invention to provide an assembly in a microlithographic projection exposure system which enables actuation of an optical element which is as free from disturbances and deformations as possible while at least largely avoiding the problems described above.

[0015] This object is achieved according to the features of independent claim 1.

[0016] An assembly according to the invention, in particular in a microlithographic projection exposure system, comprises: an optical element; at least one weight force compensation device with

[0017] - a passive magnetic circuit for generating a magnetic field which causes a force to at least partially compensate for the weight force acting on the optical element, and

[0018] - an active component for generating an actively controllable force transmitted to the optical element;

[0019] - wherein the at least one weight force compensation device is coupled to the optical element via an articulated pin;

[0020] • and at least three Lorentz actuators each designed to exert a controllable force on the optical element, wherein at least one of these Lorentz actuators is fixed directly to the optical element.

[0021] According to one embodiment, the active component of the weight force compensation device comprises at least one coil that can be supplied with electrical current. This coil can be arranged in the stray field of the passive magnetic circuit. In further embodiments, the active component can also have mechanically connected additional Lorentz actuators, a unit (e.g., implemented with piezo actuators) for adjusting magnet positions in the passive magnetic circuit, or a device for manipulating the magnetic field strength in the passive magnetic circuit through active temperature variation.

[0022] The invention is based in particular on the concept of designing a weight force compensation device, which is present in an assembly for actuating an optical element (in particular a mirror, e.g. in a microlithographic projection exposure system), for at least partially compensating the weight force acting on the optical element, with an active component provided in addition to an existing passive magnetic circuit for the purpose of generating an actively controllable force transmitted to the optical element. In combination with this "active" design of the weight force compensation device, the invention further includes the principle of designing one or more of the Lorentz actuators designed to exert a controllable force on the optical element with respect to the actuator component (e.g.of the magnet in a magnet-coil pair forming the respective Lorentz actuator) in favor of a direct fixation to the optical element without any articulated connection (e.g. in the form of an articulated pin).

[0023] With the combination described above, the invention takes advantage of the fact that, due to the aforementioned "active" design of the weight force compensation device (i.e., with an active component comprising, for example, a coil that can be supplied with electrical current), a precise force transmission to the optical element along the (vertical) force transmission direction of this active component can be achieved via said weight force compensation device. This relieves the Lorentz actuators of the burden of transmitting static forces to the optical element, so that parasitic forces and moments transmitted to the optical element via the Lorentz actuators are significantly reduced.At the same time, on the Lorentz actuator side – due to the at least partial omission of an articulated pin for their connection – the transmission of parasitic forces and moments, which would occur if connected via flexure joints, is partially or completely avoided. With regard to the connection of the Lorentz actuators to the optical element to be actuated, the disadvantages associated with a connection via flexure joints are thus avoided, and the problems inherently associated with the direct fixation according to the invention (utilizing the "active" design of the weight force compensation device) are minimized.

[0024] According to the invention, the disadvantage of increased expenditure for the increased number of actuators used (including for the active component of the weight force compensation device) as well as associated supply line or amplifier components and required control or regulation electronics is deliberately accepted in order to achieve in return the advantages described above, in particular the reduction of parasitic forces and moments transmitted to the optical element.

[0025] According to one embodiment, at least three, in particular six, of the Lorentz actuators are fixed directly to the optical element (101). In other words, for at least three, in particular six, of the Lorentz actuators, the actuator component (typically the magnet of the magnet-coil pair forming the Lorentz actuator) that is mechanically connected to the optical element and movable together with it is fixed directly to the optical element.

[0026] According to the invention, the weight force compensation device is coupled to the optical element via an articulated pin. Preferably, the natural frequency of this coupling is less than 3 times, in particular less than 2 times, and more particularly less than 1.5 times the control bandwidth.

[0027] According to one embodiment, the assembly has at least two, in particular at least three weight force compensation devices.

[0028] According to one embodiment, the assembly comprises three actuator units, each of these actuator units comprising a weight force compensation device and two Lorentz actuators, these Lorentz actuators and the weight force compensation device each extending towards a common force introduction point.

[0029] According to another embodiment, the assembly comprises three actuator units, each of which comprises a weight force compensation device, a Lorentz actuator, and an inertial actuator. The Lorentz actuator, the inertial actuator, and the weight force compensation device each extend toward a common force introduction point. According to one embodiment, the assembly comprises more than three, in particular more than six Lorentz actuators for exerting a controllable force on the optical element in the vertical direction.

[0030] According to one embodiment, the assembly for exerting a controllable force on the optical element comprises at least three inertial actuators, in particular at least six inertial actuators, for partially decoupling a reaction path associated with the application of the controllable force to the optical element. In this context, reference is made, for example, to DE 10 2016 202 408 A1 and DE 10 2013 201 081 A1.

[0031] According to one embodiment, the assembly further comprises a controller, said controller being designed to separately control the weight force compensation device for exerting static forces and the Lorentz actuators for exerting dynamic forces.

[0032] According to one embodiment, the weight force compensation device is controlled via an integrator branch (I component), and the Lorentz actuators are controlled via a separate PD branch.

[0033] According to one embodiment, the optical element is a mirror.

[0034] The invention further relates to an optical system, in particular of a microlithographic projection exposure apparatus, which has at least one assembly with the features described above.

[0035] Although the invention has been described above - merely by way of example - with reference to an application in optical components for EUV projection exposure systems, an application in optical components for other optical systems, in particular also for higher operating wavelengths, e.g. in DUV projection exposure systems (DUV = deep ultraviolet) with typical wavelength ranges between 240 nm to 255 nm, or for optical systems with operation in a VUV range (vacuum ultraviolet range) lying between EUV and DUV is of course also conceivable.

[0036] Further embodiments of the invention can be found in the description and the dependent claims.

[0037] The invention is explained in more detail below with reference to embodiments shown in the attached figures.

[0038] BRIEF DESCRIPTION OF THE DRAWINGS

[0039] They show:

[0040] Figures 1 - 4c are schematic representations to explain possible embodiments of an assembly according to the invention;

[0041] Figure 5-1 1 schematic representations to explain possible configurations of a control circuit for controlling an assembly according to the invention in different embodiments;

[0042] Figure 12 is a schematic diagram of a projection exposure system designed for operation in the EUV; and

[0043] Figure 13 is a schematic diagram illustrating a conventional setup for manipulating a mirror in six degrees of freedom. DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

[0044] Different embodiments of an assembly according to the invention are described below with reference to the schematic representations in Figs. 1 - 3.

[0045] What these embodiments have in common is that, on the one hand, a weight force compensation device present in the respective assembly for at least partially compensating the weight force acting on an optical element such as a mirror (in addition to the existing passive magnetic circuit) is designed to be “active”, ie with an active component for generating an actively controllable force transmitted to the optical element, and that, on the other hand, in one or more of the Lorentz actuators further designed to exert a controllable force on the optical element, any articulated connection to the optical element (for example in the form of an articulated pin) is dispensed with in favor of a direct fixation on the optical element.

[0046] Fig. 1 shows a schematic representation of an assembly 100 with an optical element 101 in the form of a mirror, a support frame 105, and one of, for example, a total of three actuator units. This actuator unit comprises a weight compensation device 110 and two Lorentz actuators 120, 130 (each consisting of a coil 121 or 131 and a magnet 122 or 132). "ACP" designates a common force introduction point of the Lorentz actuators 120, 130 and the weight compensation device 110. The mechanical connection of the weight compensation device 110 (with a passive magnetic circuit 111 also indicated in Fig. 1) to the optical element 101 is via a pin 115 mounted via solid-state joints.Furthermore, in addition to the passive magnetic circuit 111, the weight force compensation device 110 comprises an active component for generating an actively controllable force on the optical element 101. In the exemplary embodiment (but without the invention being limited thereto), this active component has a coil 112 to which electrical current can be applied, which is arranged in the stray field of the passive magnetic circuit 111. In further embodiments, the active component can also have mechanically connected additional Lorentz actuators, a unit (e.g., designed with piezo actuators) for adjusting magnet positions in the passive magnetic circuit, or a device for manipulating the magnetic field strength in the passive magnetic circuit by actively changing the temperature.

[0047] Unlike the mechanical connection of the weight force compensation device 110, the coupling via the Lorentz actuators 120, 130 is implemented in such a way that in the Lorentz actuators 120, 130, the magnet 122 or 132, which couples to the coil 121 or 131 fixed to the support frame via magnetic forces, is fixed directly and immediately to the optical element 101. The coil and magnet can also be interchanged. Thus, with regard to the Lorentz actuators 120, 130, a mechanically guided, articulated connection of the respective magnets of the Lorentz actuators via an articulated pin is dispensed with in favor of a direct fixation to the optical element 101. As a result, the transmission of parasitic moments via flexural joints is also avoided.

[0048] At the same time, due to the fact that, as a result of the "active" design of the weight force compensation device 110, static forces on the optical element 101 can be "taken over" by said weight force compensation device 110 and the Lorentz actuators 120, 130 are accordingly relieved of the transmission of static forces to the optical element 101, a transmission of parasitic forces and moments, which in principle accompanies the direct fixation of the Lorentz actuators 120, 130 to the optical element 101, is also significantly reduced.

[0049] Furthermore, the "active" design of the weight force compensation device 110 only needs to be used to exert static forces on the optical element 101, with the result that the mechanical connection of the weight force compensation device 110 to the optical element 101 via the articulated pin 115 can be designed to be comparatively soft. In particular, the (actuator) natural frequency of this coupling can be less than 3 times, in particular less than 2 times, and more particularly less than 1.5 times the control bandwidth. The actuator natural frequency is understood to be the natural frequency of the eigenmodes in the effective direction of the actuator, with these eigenmodes being formed from the axial compliance of the pin and its joints and the connected magnetic mass (or coil mass in the case of reversed installation) of the actuator.

[0050] Fig. 2a shows a further embodiment of an assembly 200 according to the invention in a schematic representation, wherein, compared to Fig. 1, analogous or essentially functionally identical components are designated by reference numerals increased by “100”.

[0051] The embodiment according to Fig. 2a differs from that of Fig. 1 in that the Lorentz actuators 220, 230 are arranged at different positions relative to the optical element 201 to be actuated. In particular, the Lorentz actuators 220, 230 can be arranged outside the actuator unit comprising the weight force compensation device 310, wherein the weight force compensation device 210 and the Lorentz actuators 220, 230 preferably continue to have one and the same force introduction point on the mirror (or on bushings mechanically connected to the mirror).

[0052] According to Fig. 2a, the Lorentz actuator 220 is used to exert vertical force, and the Lorentz actuator 230 is used to exert horizontal force. The direct vertical or horizontal fixation of the Lorentz actuators 220, 230 on the optical element 201 - in contrast to the attachment according to Fig. 1 at an angle to the optical element 101 or the pin 115 - makes the use of a corresponding socket ("yoke") unnecessary and thus also enables a comparatively rigid and close mechanical connection to the optical element 201. Furthermore, the positioning, which is independent of the position of the weight force compensation device 210 or the associated actuator unit, also provides additional freedom with regard to placing the Lorentz actuators according to the specific requirements of a possibledesired targeted excitation of certain vibration modes, which results in an even more effective avoidance of undesired deformations of the optical element 210.

[0053] Furthermore, the total number of Lorentz actuators can also be greater than six, whereby one or more of these Lorentz actuators can also differ from the respective weight force compensation device or the other Lorentz actuators with regard to the respective force introduction point. In this case, the invention can again take advantage of the fact that no static forces are exerted on the optical element via the respective Lorentz actuators, so that the exertion of parasitic forces and moments inherent in different force introduction points can be kept negligibly small.

[0054] Furthermore, the placement of the Lorentz actuators according to the invention can be suitably selected such that – according to the well-known concept of "overactuation" – individual vibration modes are specifically excited more or less strongly. In particular, the Lorentz actuators can be positioned such that the tasks inherent in the specific configuration, in particular position control, pre-control of a scanning movement of the optical element, and vibration damping, can be optimally fulfilled.

[0055] Fig. 2b shows an embodiment modified compared to Fig. 2a in that the Lorentz actuators (designated 220' and 230' in Fig. 2b) are also arranged within the actuator unit comprising the weight force compensation device 210.

[0056] Fig. 3a shows a further embodiment of an assembly 300 according to the invention in a schematic representation, wherein, compared to Fig. 1, analogous or essentially functionally identical components are designated by reference numerals increased by “200”.

[0057] The embodiment according to Fig. 3a differs from that of Fig. 1 in that the Lorentz actuators 320, 330, which are arranged at an angle to the optical element 301 or force introduction point, are controlled in opposite directions, with the result that a horizontal force is exerted on the optical element 301 by these two Lorentz actuators 320, 330. According to Fig. 3a, the dynamic vertical force is exerted via a separate Lorentz actuator 340, which is arranged outside the actuator unit comprising the weight force compensation device 310 and the Lorentz actuators 320, 330.

[0058] Fig. 3b shows an embodiment modified from Fig. 3a in that, instead of the "bipod configuration" provided in Fig. 3a, a horizontal Lorentz actuator (designated "320'" in Fig. 3b) is provided. In particular, by dispensing with a vertical Lorentz actuator within the actuator unit comprising the weight force compensation device 310—and thereby correspondingly reducing the installation space required within the actuator unit—a vertical Lorentz actuator 340, as well as other additional actuators, can be placed outside the actuator unit.

[0059] Fig. 4a shows a further embodiment of an assembly 400 in a schematic representation, wherein, compared to Fig. 2a, analogous or essentially functionally identical components are designated by reference numerals increased by “200”.

[0060] The embodiment according to Fig. 4a differs from that of Fig. 2a in that, in addition to the Lorentz actuator 420 provided for exerting vertical force on the optical element 401 and the Lorentz actuator 430 provided for exerting horizontal force, inertial actuators 440, 450 are provided, each of which comprises, in a manner known per se, an auxiliary mass 441 or 451 mechanically connected to the optical element 401 via a spring 442 or 452. The reaction path associated with the application of force to the optical element 401 can be partially interrupted, namely above a certain cutoff frequency (e.g., 50 Hz), via the respective auxiliary mass 441 or 451.

[0061] The above-described use of inertial actuators 440, 450 in an assembly according to the inventive concept is also advantageous in that the fact can be exploited that, as a result of the "active" design of the weight force compensation device 410, the forces lying below the said limit frequency of the inertial actuators 440, 450 can be transmitted by the weight force compensation device 410, so that - unlike is usually the case when using inertial actuators - no additional Lorentz actuators are required for the low-frequency force transmission.

[0062] The overactuation concept described above can also be combined with the use of inertial actuators described in Fig. 4a, resulting in a particularly advantageous implementation of position control, active vibration damping, and scanning motion feedforward control while simultaneously decoupling the reaction path due to inertial actuation and control. A suitable division of tasks can be such that the feedforward forces for a scanning motion are applied via the Lorentz actuators, the active vibration damping is implemented solely by the inertial actuators, and a crossover network is used for position control for the combined use of Lorentz actuators and inertial actuators, in accordance with the known inertial actuation and control concept.The placement of the inertial actuators can thus be selected with a view to the most optimal implementation of position control and active vibration damping, whereas the Lorentz actuators can be positioned independently with a view to the optimal implementation of the scanning motion feedforward control. Fig. 4b shows an embodiment modified from Fig. 4a in that all of the illustrated actuators (i.e., both Lorentz actuators and inertial actuators) are arranged within the actuator unit comprising the weight force compensation device 410.

[0063] Fig. 4c shows an embodiment modified from Fig. 4a in that, according to Fig. 4c (as already in Fig. 4b), both the horizontal Lorentz actuator 430' and the horizontal inertial actuator 450' are arranged within the actuator unit comprising the weight force compensation device 410, whereas a vertical inertial actuator 440, in contrast to Fig. 4b, is arranged outside the actuator unit.

[0064] Suitable controller architectures are described below with reference to Fig. 5-11, via which an assembly according to the invention can be controlled or regulated according to the embodiments described above. An essential feature of the controller architecture according to the invention is the separation of the (particularly vertical) static forces from the (particularly vertical) dynamic forces. As described above, the weight force compensation device is controlled to exert the static forces, whereas the Lorentz actuators are controlled to exert the dynamic forces.

[0065] The controller architecture of Fig. 5 assumes the control of a total of three weight force compensation devices and a total of six Lorentz actuators, with six position sensors (“PS”) also being used. In Fig. 5, “SPG” denotes a setpoint generator. “MS” denotes a coordinate transformation of the sensor signals supplied by the position sensors PS to a reference point to be controlled and a coordinate system. According to Fig. 5, a feedforward control signal for implementing a desired movement of the optical element according to a predetermined trajectory is applied via the Lorentz actuators via a feedforward control branch designated “FF”, thereby relieving the remaining control system of this scanning movement. The implementation of the above-mentioned separation of static and dynamic forces takes place as shown in Fig.5 such that a PID controller is divided into an I component (= integrator branch) and a PD component, whereby the I component is fed to the active weight force compensation device (labeled "aMGC" in Fig. 5) via a suitable coordinate transformation and decoupling matrix GBaMGc. The output of the PD component is in turn fed to the (vertical) Lorentz actuators (labeled "LA" in Fig. 5) via a suitable coordinate transformation and decoupling matrix GBu\. Since the I component of the controller causes the static control error to become zero, the static component of the PD component also becomes zero. The deflection dependence of the force application point and force direction of the Lorentz actuators LA can be compensated for via deflection-dependent gain scheduling of the feedforward control and the coordinate transformation and decoupling matrix.

[0066] In further embodiments, the separation of the static forces from the dynamic forces according to the invention can also be realized via a crossover with a low-pass filter and a high-pass filter (where the sum of the transfer functions of the low-pass and high-pass filters should be approximately one).

[0067] Fig. 6 shows a controller architecture analogous to Fig. 5 for the concept with “overactuation” described above, wherein three weight force compensation devices are still used, but more than six Lorentz actuators are used. Fig. 7 shows a controller architecture with additional consideration of the use of inertial actuators (e.g. according to the embodiment of Fig. 4a). According to Fig. 7, the feedforward signal is applied analogously to Fig. 5 and Fig. 6 via the feedforward branch FF and via the Lorentz actuators LA. In alternative embodiments, the feedforward signal can also be distributed to Lorentz actuators and inertial actuators via an additional crossover network, although in this case larger forces and deflections of the inertial actuators may have to be accepted. If overactuation is implemented, the active vibration damping can be achieved via the inertial actuators alone.The position control can distribute the forces to Lorentz actuators and inertial actuators via an additional crossover according to the well-known inertial actuation and control concept.

[0068] Fig. 8, Fig. 9 and Fig. 11 show controller architectures in which, in contrast to the embodiments described above, the feedforward control branch FF is divided into a "vertical" feedforward control branch FFv and a "horizontal" feedforward control branch FFH to realize a desired movement of the optical element, wherein the signal of the "vertical" feedforward control branch FFv is routed via the active weight force compensation device, whereby parasitic forces and moments can be reduced during the scanning process. The controller architectures according to Fig. 8 and Fig. 11 - in this respect analogous to Fig. 7 - are designed with additional consideration of the use of inertial actuators (e.g., according to the embodiments of Figs. 4a-4c).

[0069] Fig. 10 shows a controller architecture in which a crossover with low-pass filter and high-pass filter is used analogously to Fig. 7, whereby in contrast to Fig. 7 no inertial actuators are present.

[0070] To simplify cabling, the actuators can be controlled via local amplifiers controlled via a fieldbus. In this case, only one fieldbus cable and one power supply cable are required.

[0071] Fig. 12 shows a merely schematic representation of a projection exposure system 1200 designed for operation in the EUV, in which the present invention can be implemented by way of example.

[0072] According to Fig. 12, an illumination device of the projection exposure system 1200 has a field facet mirror 1203 and a pupil facet mirror 1204. The light from a light source unit, which comprises a plasma light source 1201 and a collector mirror 1202, is directed onto the field facet mirror 1203. A first telescope mirror 1205 and a second telescope mirror 1206 are arranged in the light path downstream of the pupil facet mirror 1204. A deflection mirror 1207, operated under grazing incidence, is arranged downstream in the light path. This deflection mirror directs the radiation incident on it onto an object field in the object plane of a projection objective with mirrors 1251-1256, which is only indicated in Fig. 12.At the location of the object field, a reflective structure-bearing mask 1221 is arranged on a mask table 1220, which is imaged by means of a projection lens into an image plane in which a substrate 1261 coated with a light-sensitive layer (photoresist) is located on a wafer table 1260.

[0073] Although the invention has been described with reference to specific embodiments, numerous variations and alternative embodiments will become apparent to those skilled in the art, e.g., by combining and / or interchanging features of individual embodiments. Accordingly, it will be understood by those skilled in the art that such variations and alternative embodiments are encompassed by the present invention, and the scope of the invention is limited only by the appended claims and their equivalents.

Claims

Patent claims 1. An assembly in a microlithographic projection exposure apparatus, the assembly (100, 200, 300, 400) comprising: • an optical element (101, 201, 301, 401); • at least one weight force compensation device (110, 210, 310, 410) with - a passive magnetic circuit (1 1 1 , 21 1 , 31 1 , 41 1 ) for generating a magnetic field which causes a force for at least partially compensating the weight force acting on the optical element (101 , 201 , 301 , 401 ), and - an active component for generating an actively controllable force transmitted to the optical element (101, 201, 301, 401); - wherein the at least one weight force compensation device (110, 210, 310, 410) is coupled to the optical element (101, 201, 301, 401) via an articulated pin (115, 215, 315, 415); and • at least three Lorentz actuators (120, 130, 220, 230, 320, 330, 340, 420, 430, 440) each designed to exert a controllable force on the optical element (101, 201, 301, 401), wherein at least one of these Lorentz actuators is fixed directly to the optical element (101, 201, 301, 401).

2. Assembly according to claim 1, characterized in that the active component comprises at least one coil (112, 212, 312, 412) which can be supplied with electrical current.

3. Assembly according to claim 1 or 2, characterized in that at least three, in particular at least six of these Lorentz actuators (120, 130, 220, 230, 320, 330, 340, 420, 430, 440) are directly attached to the optical element (101 , 201 , 301 , 401 ) are fixed.

4. Assembly according to one of claims 1 to 3, characterized in that a natural frequency of this coupling is less than 3 times, in particular less than 2 times, further in particular less than 1.5 times the control bandwidth.

5. Assembly according to one of the preceding claims, characterized in that it has at least two, in particular at least three such weight force compensation devices (1 10, 210, 310, 410).

6. Assembly according to one of claims 1 to 5, characterized in that it has three actuator units, each of these actuator units having a weight force compensation device and two Lorentz actuators, these Lorentz actuators and the weight force compensation device each extending towards a common force introduction point.

7. Assembly according to one of claims 1 to 5, characterized in that it has three actuator units, each of these actuator units having a weight force compensation device, a Lorentz actuator and an inertial actuator, the Lorentz actuator, the inertial actuator and the weight force compensation device each extending towards a common force introduction point.

8. Assembly according to one of the preceding claims, characterized in that it has more than three, in particular more than six Lorentz actuators for exerting a controllable force on the optical element (101, 201, 301, 401) in the vertical direction.

9. Assembly according to one of the preceding claims, characterized in that it is designed to exert a controllable force on the optical Element (401) has at least three inertial actuators, in particular at least six inertial actuators for partially decoupling a reaction path associated with the exertion of the controllable force on the optical element (401).

10. Assembly according to one of the preceding claims, characterized in that it further comprises a controller, said controller being designed to separately control the weight force compensation device for exerting static forces and the Lorentz actuators for exerting dynamic forces. 1 1. Assembly according to claim 10, characterized in that the control of the weight force compensation device is carried out via an integrator branch (I component) and the control of the Lorentz actuators is carried out via a separate PD branch.

12. Assembly according to one of the preceding claims, characterized in that the optical element (101, 201, 301, 401) is a mirror.

13. Optical system, in particular of a microlithographic projection exposure system, characterized in that it has at least one assembly according to one of the preceding claims.

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