Vacuum pump and assembly method

The vacuum pump design addresses issues of clearance control and assembly robustness by using separate closing flanges with thrust elements, enhancing pumping performance and mechanical integrity while simplifying assembly and reducing costs.

FR3169505A1Pending Publication Date: 2026-06-12PFEIFFER VACUUM SAS

Patent Information

Authority / Receiving Office
FR · FR
Patent Type
Applications
Current Assignee / Owner
PFEIFFER VACUUM SAS
Filing Date
2024-12-11
Publication Date
2026-06-12

AI Technical Summary

Technical Problem

Existing dry vacuum pumps face challenges in achieving good pumping performance due to difficulties in controlling clearances and assembly robustness, particularly in multi-stage pumps where axial clearance is required to prevent over-constraint, leading to potential reductions in pumping efficiency and increased manufacturing complexity.

Method used

The vacuum pump design incorporates separate closing flanges with thrust elements to ensure planar contact between half-shells and supports, allowing for controlled clearances and robust assembly, minimizing the need for enlarged stages and reducing heat exchange, while maintaining mechanical integrity.

Benefits of technology

This design enhances pumping performance by ensuring precise control of clearances and mechanical robustness, simplifies assembly, reduces manufacturing costs, and allows for thermal decoupling between parts, thereby improving overall efficiency and reducing the risk of deformation.

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Abstract

A vacuum pump comprising two half-shells (3, 4) assembled together, at least one support (8, 9) in planar contact with an axial end of a half-shell (4), at least one closing flange (5, 6) separate from the at least one support (8, 9), being arranged opposite the support (8, 9) and being mounted for axial translation between the support (8, 9) and the axial end of the half-shell (4), and at least one thrust element (22; 28) exerting a thrust force on the closing flange (5, 6) to push the closing flange (5, 6) against the half-shell (4). Abbreviated figure: Figure 2
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Description

Title of the invention: Vacuum pump and mounting method Technical field of the invention

[0001] The present invention relates to a dry vacuum pump, in particular a multi-stage dry vacuum pump, such as a Roots or Claw type pump. The invention also relates to a method for mounting such a vacuum pump. Technical background

[0002] Multistage dry vacuum pumps comprise several pumping stages in series through which a gas to be pumped circulates between a suction and a discharge port. Among known vacuum pumps, a distinction is made between rotary lobe pumps, also known as "Roots" pumps, and claw pumps, also known as "Claw" pumps. These vacuum pumps are called "dry" because, during operation, the rotors rotate inside a stator without any mechanical contact between themselves or with the stator, thus eliminating the need for oil in the pumping stages.

[0003] To allow both machining and assembly and ensure good sealing, dry vacuum pump stators are for example made up of the axial assembly of several stator slices, assembled along their respective transverse walls, with interposition of sealing elements.

[0004] Other vacuum pump structures feature a stator in half-shells closed at the axial ends by two end pieces with interposed sealing elements. The assembly of such a pump is much faster, less expensive, and the pumping performance can be increased.

[0005] In a known configuration, the end pieces form "bearing supports" because they receive bearings through which the rotor shafts can rotate.

[0006] The end pieces are positioned relative to a half-shell by means of positioning pins interposed between the half-shell and a respective end piece, at the transverse bearing walls of the half-shell and the opposing end piece. The end pieces are then fixed to the half-shell using several screws, tightened in particular on either side of each pin. The contact between the end pieces and the half-shell, achieved at the level of the flat transverse bearing walls, allows for a robust and statically determinate assembly.

[0007] However, this assembly requires sufficient axial clearance at another face of the half-shell, between a transverse face of each end piece and the half-shell, on both the first-stage pumping side and the last-stage pumping side, to prevent the system from becoming over-constrained. This axial clearance necessitates The half-shells are closed by transverse walls at their axial ends to seal the pumping stages airtight. However, these walls are difficult to manufacture without frontal access for the tool.

[0008] Another problem is that, since the positions of the end pieces and shafts are referenced to one of the half-shells, it may be necessary, during the assembly of the other half-shell, to provide slightly wider pumping stages to ensure the absence of axial contact between the shafts and this other half-shell. These stage enlargements may risk reducing pumping performance, particularly on thin, high-pressure stages. Summary of the invention

[0009] An object of the present invention is to provide a vacuum pump exhibiting good pumping performance due to good control of clearances and whose assembly is mechanically robust.

[0010] To this end, the invention relates to a vacuum pump comprising: - two half-shells fitting together, - at least one support in planar contact with an axial end of a half-shell, characterized in that the vacuum pump comprises: - at least one separate closing flange, at least one support, arranged opposite the support and mounted to move axially between the support and the axial end of the half-shell, and - at least one thrust element exerting a thrust force on the closing flange to push the closing flange against the half-shell.

[0011] The closing flange, in pressure against the half-shell, makes it possible to avoid hyperstaticity of the system while allowing a planar contact between several surfaces of the half-shell and different parts of the closing flange-support sub-assembly.

[0012] The assembly allows good mechanical robustness because the flat contact between the half-shell and at least one support allows the at least one support to be fixed to the half-shell by screwing without risk of deformation, guaranteeing control of the plays.

[0013] Each half-shell is positioned directly on at least one support, therefore with respect to the same origin and independently of each other. Consequently, it is not necessary to provide larger stages for one of the half-shells, which improves pumping performance.

[0014] The axial clearance between the support and the closing flange also provides thermal decoupling between the two parts, significantly limiting heat exchange between the half-shells and the supports that can receive the bearings. It is then possible to heat the half-shells further if necessary.

[0015] Moreover, this solution is inexpensive because the number of parts in the vacuum pump is limited.

[0016] The vacuum pump may comprise a single support-flange closure subassembly according to the invention at one axial end of the vacuum pump or the vacuum pump may comprise two flange closure-support subassemblies according to the invention, one subassembly being arranged at each axial end of the vacuum pump.

[0017] The vacuum pump may further include one or more of the features described below, taken alone or in combination.

[0018] At least one thrust element may include an elastic member interposed between the closing flange and the support, configured to stress the closing flange against the half-shell.

[0019] At least one thrust element may include a cylindrical pin inserted in an additional housing provided on one side in the support and on the other side in the opposite closing flange, the closing flange being able to slide along at least one cylindrical pin.

[0020] The elastic element may include at least one elastic washer or at least one spring or at least one sleeve made of elastomeric material mounted on the cylindrical pin.

[0021] At least one thrust element may include an adjusting screw tightened in a tapped hole in the support, one end of the adjusting screw bearing against the closing flange.

[0022] The vacuum pump may include a sealing gasket interposed between the closing flange and the support.

[0023] The vacuum pump may include at least one positioning pin interposed between the half-shell and a support for positioning and at least one screw tightening the support on the half-shell for holding in position.

[0024] The half-shells define for example at least two pumping stages arranged axially one behind the other, a closing flange closing transversely a pumping stage located at an axial end of the vacuum pump, by planar contact between planar transverse support walls of the closing flange and the half-shell.

[0025] The supports can carry respective bearings in which the rotor shafts are likely to rotate.

[0026] The invention also relates to a method for mounting a vacuum pump as described above, in which: - at least one support is held in position against the half-shell, using at least one positioning pin, with at least one closing flange mounted to move axially between the support and an axial end of the half-shell. shell, at least one thrusting element exerting a thrust force on the closing flange against the half-shell, - then we screw in at least one screw tightening the support onto the half-shell to hold it in position. Brief description of the figures

[0027] Other advantages and features will become apparent upon reading the description of the invention, as well as the accompanying drawings in which:

[0028] [Fig-1] Fig. 1 is a very schematic side view representation of an example of vacuum pump.

[0029] [Fig.2] The [Fig.2] shows an exploded view of elements of the vacuum pump of the [Fig.1].

[0030] [Fig.3] The [Fig.3] shows elements of the [Fig.2] with one axial end of the vacuum pump in the assembled state and the other axial end in the exploded state.

[0031] [Fig.4] [Fig.4] shows the elements of [Fig.3] in the assembled state.

[0032] [Fig. 5] [Fig. 5] shows the elements of [Fig. 4] with the supports, the flanges of closure and the transparent half-shell.

[0033] [Fig.6] The [Fig.6] shows a cross-sectional and top view of the elements of the [Fig.4].

[0034] [Fig.7] [Fig.7] shows an enlarged view of a detail circled on [Fig.6].

[0035] [Fig.8] Fig.8 shows a view analogous to Fig.6 for another example of manufacturing of the elastic components of the thrust elements.

[0036] [Fig.9] Fig.9 shows a cross-sectional and top view of the vacuum pump for another example of an embodiment of the thrust elements.

[0037] In these figures, identical elements bear the same reference numbers. Detailed description

[0038] The following embodiments are examples. Although the description refers to one or more embodiments, this does not necessarily mean that each reference relates to the same embodiment, or that the features apply only to a single embodiment. Simple features of different embodiments can also be combined or interchanged to provide other embodiments, without departing from the scope of the invention as defined by the claims.

[0039] A primary vacuum pump is defined as a positive displacement vacuum pump configured to draw in, transfer, and then discharge a gas to be pumped at atmospheric pressure or above. The rotors of the primary vacuum pump may be of the Roots or Claw type. The rotors are mounted on two shafts driven by a motor of the primary vacuum pump. A primary vacuum pump is also configured to be able to be started at atmospheric pressure.

[0040] A Roots vacuum pump (also called a "Blower" in English, Roots compressor, or "Booster" in English) is defined as a positive displacement vacuum pump configured to draw in, transfer, and then discharge a gas using two Roots rotors. The Roots vacuum pump is mounted upstream and in series with a primary vacuum pump. The rotors are mounted on two shafts driven by a motor of the Roots vacuum pump.

[0041] The term "upstream" refers to an element that is positioned before another element relative to the direction of flow of the pumped gases. Conversely, the term "downstream" refers to an element positioned after another element relative to the direction of flow of the pumped gases. The arrows F in [Fig. 1] indicate the direction of flow of the pumped gases.

[0042] The axial direction L is defined as the longitudinal direction of the vacuum pump in which the rotor shafts extend. The transverse direction T is the direction perpendicular to the axial direction L. The transverse plane (T, V) is the plane perpendicular to the longitudinal plane (L, T).

[0043] The terms "above", "below", "high", "low", "superior", "lower" are defined with respect to the vertical or gravity direction, with respect to the orientation of the vacuum pump 1 placed on the ground or on a chassis.

[0044] The invention applies to any type of dry vacuum pump, that is to say, having two or more pumping stages, such as having two to ten pumping stages. This vacuum pump may be a primary vacuum pump having a plurality of pumping stages and configured to discharge the pumped gases at atmospheric pressure, or a vacuum pump, known as a Roots pump or Roots compressor, with two to three pumping stages which, in operation, is connected in series and upstream of a primary vacuum pump and whose discharge pressure is that obtained by the primary vacuum pump.

[0045] Fig. 1 shows a diagram of such a vacuum pump 1.

[0046] The vacuum pump 1 comprises a stator 2 comprising at least a first and a second complementary half-shells 3, 4 assembling together and at least one closing flange 5, 6 to close the axial ends of the half-shells 3, 4.

[0047] At least one closing flange 5, 6 may be flat or partially flat. In particular, at least one closing flange 5, 6 may have a nose 7 (projecting part) engaging axially in the half-shells 3, 4 at the axial ends of the half-shells 3, 4 to close them, particularly in the case where the vacuum pump 1 has a one-piece, three-dimensional seal 18, as will be seen later. The nose 7 is, for example, a flat, oblong structure through which the shaft passage holes pass.

[0048] The half-shells 3, 4 of the stator 2 can define at least two pumping stages T1-T6 arranged axially one behind the other and mounted in series between an orifice suction 11 and a discharge port 12 of the vacuum pump 1, such as between two and ten pumping stages (six in the illustrative example). The pumping stages T1-T6 are axially separated from each other by a transverse interstage wall 13 of the respective half-shells 3, 4.

[0049] The vacuum pump 1 also includes two rotor shafts 14 configured to rotate in the pumping stages T1-T6 so that the rotors 14 drive a gas to be pumped between the suction port 11 and the discharge port 12 ([Fig. 1]).

[0050] The rotors may, for example, have lobes with identical profiles, for example, of the "Roots" type with two or more lobes, or of the "Claw" type, or of another similar positive displacement vacuum pump principle. The shafts carrying the rotors are driven by a motor M located, for example, next to the discharge stage T6 at one axial end of the vacuum pump 1.

[0051] Each pumping stage receives two coupled rotors 14, the pumping stages comprising a respective inlet and outlet. When the rotor shafts 14 rotate in opposite directions about their respective axis of rotation, the gas drawn in from the inlet is trapped in the volume generated by the rotors 14 and the stator 2, and is then carried by the rotors 14 to the next stage.

[0052] The successive pumping stages T1-T6 are connected in series one after the other by respective transfer channels 15 connecting the outlet of the preceding pumping stage to the inlet of the following pumping stage. The transfer channels 15 are, for example, arranged on one side and / or the other of the pumping stage. The openings of the transfer channel halves 15 are visible on the lower half-shell 4 in Figures 2 to 4. This is the lower half-shell 4 in which the outlets of the pumping stages T1-T6 are located, here designated as the second half-shell.

[0053] The inlet of the first pumping stage Tl communicates with the suction port 11. The outlet of the last pumping stage T6 communicates with the discharge port 12. The axial dimensions of the rotors and pumping chambers (and therefore the flow rates generated) are, for example, equal or decreasing with the pumping stages, the pumping stage Tl located on the side of the suction port 11 receiving the rotors with the largest axial dimension and presenting the largest flow rate generated.

[0054] These vacuum pumps are called "dry" because in operation, the rotors rotate inside the stator 2 without any mechanical contact between them or with the stator 2, which makes it possible not to use oil in the pumping stages.

[0055] The half-shells 3, 4 are assembled together according to an assembly surface 16. The assembly surface 16 passes for example through a median longitudinal plane of the dry vacuum pump 1 which contains for example the axes of rotation of the rotor shafts 14.

[0056] The pumping stages T1-T6, the interstage transverse walls 13 and the transfer channels 15 are partly formed in the first half-shell 3 and partly in the second half-shell 4.

[0057] According to one embodiment, a closing flange 6 transversely closes the last pumping stage T6 located at the axial end of the vacuum pump 1, by planar contact between a planar transverse support wall of the closing flange 6 and a planar transverse support wall 4a of the half-shell 4, here between a planar transverse support wall 7a of a nose 7 of the closing flange 6 and a planar transverse support wall 4a of the half-shell 4 (figures 6 and 7).

[0058] According to one embodiment, another closing flange 5 transversely closes the first pumping stage Tl located at the other axial end of the vacuum pump 1, by planar contact between a planar transverse bearing wall of the closing flange 5 and a planar transverse bearing wall 4a of the half-shell 4, for example here between a planar transverse bearing wall 7a of a nose 7 of the closing flange 5 and a planar transverse bearing wall 4a of the half-shell 4 ([Fig.6]).

[0059] The planar contact between the closing flange 5, 6 and the half-shell 4 minimizes leakage and thus ensures good pumping performance, including at the pumping stages T1, T6 located at the axial ends of the half-shell 4, without the need to machine transverse closing walls at the axial ends of the half-shells 3, 4. The pumping stages T1, T6 located at the axial ends can be made by front machining, which is simpler, less expensive and allows for relatively thin pumping stages.

[0060] Sealing grooves 17 can be provided in the half-shells 3, 4 at the level of the assembly surface 16 and in the closing flanges 5, 6 for example here at the level of the noses 7, to receive at least one sealing element, such as a sealing gasket 18.

[0061] The sealing gasket 18 is for example three-dimensional and made of a single piece. It comprises for example two annular end parts mounted on the noses 7 and interposed between the closing flanges 5, 6 and the half-shells 3, 4, as well as two stringers connecting the annular end parts, the stringers being interposed between the half-shells 3, 4 ([Fig.2]).

[0062] According to another embodiment, the sealing joint 18 is made of several parts that can be joined (butted end to end), or the sealing element is made of jointing compound. In particular, in these cases, the closing flanges 5, 6 may not have a nose.

[0063] The stator 2 of the vacuum pump 1 also includes at least one support 8, 9, arranged opposite the closing flange 5, 6. The support 8, 9 can carry bearings 19 respective, such as bearings, in which the shafts of the rotors 14 are likely to rotate.

[0064] The support 8, 9 and the closing flange 5, 6 are separate elements. For example, there is an axial clearance of between 0.15 mm and 0.25 mm, such as 0.2 mm, between the closing flange 5, 6 and the support 8, 9.

[0065] Holes are of course provided in the transverse interstage walls 13 of the half-shells 3, 4 separating the pumping stages T1-T6, in the closing flanges 5, 6 and in the supports 8, 9 for the passage of the rotor shafts 10.

[0066] The vacuum pump 1 may include a sealing gasket 23, for example an annular one, interposed between the closing flange 5, 6 and the support 8, 9, for example received in a groove in the support 8, 9 and surrounding the shaft passage holes and at least one thrust element 22 (which will be described later). The sealing gasket 23 provides a seal between the support 8, 9 and the closing flange 5, 6 to prevent, in particular, the trapping of gases or particles between the parts. It is dimensioned to take into account the axial clearance between the support 8, 9 and the closing flange 5, 6.

[0067] At least one support 8, 9 is in planar contact with an axial end of a half-shell 4, here the second half-shell or lower shell. More precisely, a planar transverse bearing wall 8a, 9a of the support 8, 9 is in planar contact against a planar transverse bearing wall of an axial end of a half-shell 4. The planar surfaces in contact are shown in [Fig. 5] by hatching.

[0068] The supports 8, 9 and the axial ends of the half-shell 4 may have flat transverse bearing walls 8a, 9a, 4b extending well beyond the pumping stages in the transverse plane to optimize the contact surfaces.

[0069] For each subassembly, the vacuum pump 1 includes, for example, at least one, such as two, positioning pins 20 interposed between the half-shell 4 and the support 8, 9 for positioning (or MIP) and at least one screw 21 clamping the support 8, 9 on the half-shell 4 for holding in position (or MAP), such as at least one pair of screws 21 clamped on either side of each positioning pin 20 and here two other screws 21 distributed between the pairs of screws.

[0070] The closing flange 5, 6 is mounted movably in axial translation between the support 8, 9 and the axial end of the half-shell 4.

[0071] As more clearly seen in Figures 2, 3 and 6, the vacuum pump 1 further comprises at least one thrust element 22 exerting a thrust force on the closing flange 5, 6 to push the closing flange 5, 6 against the half-shell 4.

[0072] For example, there are two thrust elements 22 per closing flange-support subassembly, the thrust elements 22 being interposed between the support 8, 9 and the closing flange 5, 6, for example arranged on either side of the shaft passage holes.

[0073] According to an example of an embodiment more clearly visible in [Fig.7], at least one thrust element 22 comprises a cylindrical pin 24 inserted in an additional housing provided on the one hand in the support 8, 9 and on the other hand, in the opposite closing flange 5, 6, to guide the movement of the closing flange 5, 6 in axial translation, the closing flange 5, 6 being able to slide along at least one cylindrical pin 24.

[0074] The housing for the support 8, 9 can be through-hole to facilitate assembly. The housing for the closing flange 5, 6 can be blind, to form a stop for the cylindrical pin 24. The closing flange 5, 6 can thus slide along at least one respective cylindrical pin 24, here two since two thrust elements 22 are interposed between the supports 8, 9 and the closing flanges 5, 6.

[0075] According to one embodiment, at least one thrust element 22 comprises an elastic member 25 interposed between the closing flange 5, 6 and the support 8, 9, and configured to stress the closing flange 5, 6 against the half-shell 4.

[0076] According to one embodiment, the elastic element 25 comprises at least one elastic washer mounted on the cylindrical pin 24, in particular convex such as conical, for example metallic such as steel, in particular a "Belleville" washer. There are, for example, at least two elastic washers stacked in opposition (also called "series stacking") on each cylindrical pin 24, here three elastic washers.

[0077] The closing flange 5, 6 is not fixed to the support 8, 9 but is simply pushed under the constraint of the thrust elements 22 against the half-shell 4, the closing flange 5, 6 being able to slide along the cylindrical pins 24. This makes it possible to press the closing flanges 5, 6 against the half-shell 4 to make them almost independent of the supports 8, 9. The assembly is also mechanically very robust since the contact between the support 8, 9 and the half-shell 4 can be made at the level of flat transverse bearing walls.

[0078] The vacuum pump 1 may comprise a single support subassembly 8 or 9 - closing flange 5 or 6 according to the invention at one axial end of the vacuum pump 1. Alternatively, and as shown in the figures, the vacuum pump 1 may comprise two closing flange - support subassemblies according to the invention, one subassembly being arranged at each axial end of the vacuum pump 1.

[0079] During assembly, for each sub-assembly of support 8 or 9 - closing flange 5 or 6 at an axial end of the vacuum pump 1, at least one support 8, 9 is held in position against the half-shell 4, using the positioning pins 20, at least one closing flange 5, 6 being mounted to move axially between the support 8, 9 and the axial end of the half-shell 4, here the nose 7 of at least one closing flange 5, 6 engaging axially in the half-shells 3, 4 at the axial ends of the half-shells 3, 4, at least one thrust element 22 exerting a thrust force on the closing flange 5, 6 against the half-shell 4.

[0080] Then the screws 21 tightening the support 8, 9 on the half-shell 4 for holding in position.

[0081] The closing flange 5, 6, in pressure against the half-shell 4, makes it possible to avoid hyperstaticity of the system while allowing a planar contact between several surfaces of the half-shell 4 and different parts of the closing flange-support sub-assembly.

[0082] The assembly allows good mechanical robustness by being isostatic because the planar contact between the half-shell 4 and at least one support 8, 9 allows the support to be fixed to the half-shell 4 by screwing without risk of deformation, guaranteeing control of the plays.

[0083] The positioning of each half-shell 4 is carried out directly on the supports 8, 9, therefore with respect to the same origin and independently of each other. It is therefore not necessary to provide larger stages for the other half-shell 5, which improves pumping performance.

[0084] The axial clearance between the support 8, 9 and the closing flange 5, 6 also provides thermal decoupling between the two parts, significantly limiting heat exchange between the half-shells 3, 4 and the supports 8, 9 that can receive the bearings. It is then possible to heat the half-shells 3, 4 further if necessary.

[0085] Moreover, this solution is inexpensive because the number of parts of the vacuum pump 1 is limited.

[0086] Although figures 2 to 7 illustrate elastic members 25 of thrust elements 22 made by elastic washers, other embodiments are of course possible.

[0087] An elastic element 27 according to another example mounted on the cylindrical pin 24 may include at least one spring or at least one sleeve made of elastomeric material as illustrated in [Fig.8].

[0088] The other features of this embodiment example are similar to the embodiment examples previously described.

[0089] Fig. 9 shows another example of the realization of the thrust elements 28.

[0090] In this example, at least one thrust element 28 exerting a thrust force on the closing flange 5, 6 to push the closing flange 5, 6 against the half-shell 4 is achieved by an adjusting screw (also called a "jack-mounted screw" or "jack screw"). Each thrust element 28 comprises a screw tightened adjustment in a respective tapped hole of the support 8, 9 and whose end comes to rest against the closing flange 5, 6.

[0091] To facilitate assembly, the holes for the adjusting screws can pass axially through the supports 8, 9.

[0092] Tightening the adjustment screws exerts a pushing force on the closing flanges 5, 6, the adjustment screws being put under tension by the threads of the supports 8,9.

[0093] The other features of this embodiment example are similar to the embodiment examples previously described.

Claims

Demands

1. Vacuum pump (1) comprising: - two half-shells (3, 4) assembling together, - at least one support (8, 9) in planar contact with an axial end of a half-shell (4), characterized in that the vacuum pump (1) comprises: - at least one closing flange (5, 6) distinct from at least one support (8, 9) arranged opposite the support (8, 9) and being mounted movably in axial translation between the support (8, 9) and the axial end of the half-shell (4), and - at least one thrust element (22; 28) exerting a thrust force on the closing flange (5, 6) to push the closing flange (5, 6) against the half-shell (4).

2. Vacuum pump (1) according to claim 1, characterized in that at least one thrust element (22) comprises an elastic member (25; 27) interposed between the closing flange (5, 6) and the support (8, 9), configured to stress the closing flange (5, 6) against the half-shell (4).

3. Vacuum pump (1) according to any one of the preceding claims, characterized in that at least one thrust element (22) comprises a cylindrical pin (24) inserted in an additional housing provided on the one hand in the support (8, 9) and on the other hand in the opposite closing flange (5, 6), the closing flange (5, 6) being able to slide along at least one cylindrical pin (24).

4. Vacuum pump (1) according to claims 2 and 3, characterized in that the elastic element (25; 27) comprises at least one elastic washer or at least one spring or at least one sleeve made of elastomeric material mounted on the cylindrical pin (24).

5. Vacuum pump (1) according to claim 1, characterized in that at least one thrust element (28) comprises an adjusting screw tightened in a tapped hole in the support (8, 9), one end of the adjusting screw bearing against the closing flange (5, 6).

6. Vacuum pump (1) according to any one of the preceding claims, characterized in that it comprises a sealing gasket (23) interposed between the closing flange (5, 6) and the support (8, 9).

7. Vacuum pump (1) according to any one of the preceding claims, characterized in that it comprises at least one positioning pin (20) interposed between the half-shell (4) and a support (8, 9) for positioning and at least one screw (21) clamping the support (8, 9) on the half-shell (4) for holding in position.

8. Vacuum pump (1) according to any one of the preceding claims, characterized in that the half-shells (3, 4) define at least two pumping stages (T1-T6) arranged axially one behind the other, a closing flange (5, 6) closing transversely a pumping stage (T1, T6) located at an axial end of the vacuum pump (1), by planar contact between planar transverse support walls (7a, 4a) of the closing flange (5, 6) and the half-shell (4).

9. Vacuum pump (1) according to any one of the preceding claims, characterized in that the supports (8, 9) carry respective bearings (19) in which the shafts of the rotors (14) are capable of rotating.

10. Vacuum pump (1) according to any one of the preceding claims, characterized in that at least one closing flange (5, 6) has a nose (7) engaging axially in the half-shells (3, 4) at the axial ends of the half-shells (3, 4).

11. Method of mounting a vacuum pump (1) according to claim 7 in which: - at least one support (8, 9) is held in position against the half-shell (4), using at least one positioning pin (20), at least one closing flange (5, 6) being mounted movably in axial translation between the support (8, 9) and an axial end of the half-shell (4), at least one thrust element (22) exerting a thrust force on the closing flange (5, 6) against the half-shell (4), - then at least one screw (21) is screwed tightening the support (8, 9) on the half-shell (4) for holding in position.