Method for manufacturing component for manufacturing of silicon watch

Abstract

To propose a method for manufacturing components of a high-quality silicon timepiece.SOLUTION: A method according to the present invention comprises: a) providing a substrate (1) comprising a first silicon layer (2), a second silicon layer (3) and an intermediate silicon oxide layer (4) therebetween; b) etching the first silicon layer (2) to form a timepiece component therein; c) separating a wafer (8) formed by at least all or part of the etched first silicon layer (2) from the substrate (1) to form a timepiece component; d) thermally oxidizing and then deoxidizing the timepiece component; e) forming a silicon oxide layer (10) on the timepiece component by thermal oxidation or deposition; and f) separating the timepiece component from the wafer (8).SELECTED DRAWING: Figure 6

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