XY stage

Abstract

To suppress upsizing of an XY stage while cost increase is suppressed.SOLUTION: An XY stage includes: a first shaft and a second shaft that are hollow and arranged in a first direction; a third shaft and a fourth shaft arranged in a second direction; a first moving part, a second moving part, a third moving part, and a fourth moving part guided to the first shaft, the second shaft, the third shaft and the fourth shaft; a first connection member connecting the first moving part and the second moving part; a second connection member connecting the third moving part and the fourth moving part; a fifth shaft which is arranged in the first direction inside the first shaft and transmits power moving the third moving part, the fourth moving part and the second connection member in the second direction; a sixth shaft which is arranged in the second direction and transmits power to move the first moving part, the second moving part and the first connection member in the first direction; and a fifth moving part which is supported by the first connection member movably in the second direction and is supported by the second connection member movably in the first direction.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to an XY stage. [Background technology]

[0002] An XY stage is known that performs two-dimensional positioning by stacking stages that move in the X-axis and Y-axis directions. For example, an XY stage is known that includes two X-axis slide shafts arranged in the X-axis direction, two X-axis timing belts stretched in parallel to the X-axis slide shafts, and a Y-axis unit that is fixed to the two X-axis timing belts and moves along the two X-axis slide shafts (see, for example, Patent Document 1). In this XY stage, the two X-axis timing belts are driven by two motors. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2002-239208 A Summary of the Invention [Problem to be solved by the invention]

[0004] If two X-axis timing belts are driven by different motors, control to match the timing is required. In addition, providing two motors leads to increased costs. In response to this, it is possible to drive two X-axis timing belts with one motor. In this case, for example, a shaft for transmitting power in the Y-axis direction is arranged, and two X-axis timing belts are hung on two pulleys provided coaxially with the power transmission shaft, thereby driving two X-axis timing belts with one motor. Furthermore, it is possible to drive the XY stage with two motors by using a similar configuration for the stage in the Y-axis direction. This can suppress an increase in costs. However, since it becomes necessary to arrange shafts for transmitting power in the X-axis direction and the Y-axis direction, respectively, there is a risk that the XY stage will become large. This can make it difficult to install the XY stage in a narrow space, for example.

[0005] The present disclosure has been made in consideration of the various circumstances described above, and has an object to prevent an increase in cost and an increase in size of the XY stage. [Means for solving the problem]

[0006] One aspect of the present disclosure is a movable movable body including a hollow first shaft arranged in a first direction, a second shaft arranged in the first direction, a third shaft and a fourth shaft arranged in a second direction perpendicular to the first direction, a first moving part guided by the first shaft and moving in the first direction, a second moving part guided by the second shaft and moving in the first direction, a third moving part guided by the third shaft and moving in the second direction, a fourth moving part guided by the fourth shaft and moving in the second direction, a first connecting member connecting the first moving part and the second moving part, and a second moving part connecting the third moving part and the fourth moving part. a second connecting member connecting a third moving portion and a fourth moving portion; a fifth shaft arranged in the first direction inside the first shaft, the fifth shaft rotating about a rotation center in the first direction by a driving force from a first driving portion to transmit a force moving the third moving portion, the fourth moving portion, and the second connecting member in the second direction; a sixth shaft arranged in the second direction, rotating about a rotation center in the second direction by a driving force from a second driving portion to transmit a force moving the first moving portion, the second moving portion, and the first connecting member in the first direction; a fifth moving part that is movably supported by the first connecting member and that is movably supported by the second connecting member in the first direction. Effect of the Invention

[0007] According to the present disclosure, it is possible to suppress an increase in cost and an increase in size of the XY stage. [Brief description of the drawings]

[0008] [Figure 1] FIG. 2 is a perspective view showing a schematic configuration of a stage according to the embodiment. [Diagram 2] 1 is a top view of a stage according to an embodiment. [Diagram 3] 4 is a diagram showing a first block according to the embodiment as viewed from above in the Z-axis direction. FIG. [Figure 4] 4 is a cross-sectional view of a first block according to the embodiment, seen from the front side in the Y-axis direction. FIG. [Diagram 5] 4 is a cross-sectional view of a first block according to the embodiment, seen from the right side in the X-axis direction. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The XY stage according to one embodiment of the present disclosure is a stage capable of moving a fifth moving part to any position on the XY plane. The XY stage according to the present disclosure can be used in, for example, a machine tool or a game machine such as a crane game. The first shaft, the second shaft, and the fifth shaft are parallel shafts arranged in a first direction. The third shaft, the fourth shaft, and the sixth shaft are parallel shafts arranged in a second direction. The first direction and the second direction are orthogonal to each other, for example, the first direction is the X-axis direction and the second direction is the Y-axis direction.

[0010] The first shaft is a shaft that guides the first moving part, the second shaft is a shaft that guides the second moving part, the third shaft is a shaft that guides the third moving part, and the fourth shaft is a shaft that guides the fourth moving part. The fifth shaft is a shaft that moves the third moving part and the fourth moving part in the second direction by rotating around the first direction as a rotation center. The third moving part and the fourth moving part are configured to move in the second direction by the same amount at this time. Therefore, when the fifth shaft rotates, the second connecting member connected to the third moving part and the fourth moving part moves in the second direction while maintaining a state in which they are arranged parallel to the first direction. Similarly, the sixth shaft is a shaft that moves the first moving part and the second moving part in the first direction by rotating around the second direction as a rotation center. The first moving part and the second moving part are configured to move in the first direction by the same amount at this time. Therefore, when the sixth shaft rotates, the first connecting member connected to the first moving part and the second moving part moves in the first direction while maintaining a state in which they are arranged parallel to the second direction.

[0011] Here, the fifth moving part is supported by the first connecting member so as to be movable in the second direction, and is supported by the second connecting member so as to be movable in the first direction. Therefore, when the sixth shaft rotates and the first connecting member moves in the second direction, the first connecting member pushes the fifth moving part in the second direction, causing the fifth moving part to move in the second direction along the second connecting member. Similarly, when the fifth shaft rotates and the second connecting member moves in the first direction, the second connecting member pushes the sixth moving part in the first direction, causing the sixth moving part to move in the first direction along the first connecting member. Therefore, by controlling the driving force transmitted from the first driving part to the fifth shaft, the position of the fifth moving part in the second direction can be controlled. Similarly, by controlling the driving force transmitted from the second driving part to the sixth shaft, the position of the fifth moving part in the first direction can be controlled.

[0012] Here, the first shaft guides the first moving part, and the fifth shaft passes through the inside of the first shaft. Therefore, it is possible to reduce the size of the XY stage compared to a case where the fifth shaft is disposed outside the first shaft. Also, the first moving part and the second moving part are moved by a driving force from a single second driving part, and the third moving part and the fourth moving part are moved by a driving force from a single first driving part. Since the moving part can be moved by the above-mentioned method, an increase in costs can be suppressed.

[0013] The third shaft may be hollow, and the sixth shaft may be disposed inside the third shaft. That is, the third shaft may guide the third moving part as in the first shaft, and the sixth shaft may pass through the third shaft. This allows the XY stage to be further miniaturized.

[0014] The rotational speed controller may further include a first belt that is stretched around the first pulley and the second pulley and is tensioned in the first direction, and the first belt is connected to the first moving part, a second belt that is stretched around the third pulley and the fourth pulley and is tensioned in the first direction, and the second belt is connected to the second moving part, a third belt that is stretched around the fifth pulley and the sixth pulley and is tensioned in the second direction, and the third belt is connected to the third moving part, and a fourth belt that is stretched around the seventh pulley and the eighth pulley and is tensioned in the second direction, and the fourth belt is connected to the fourth moving part, and the first pulley and the third pulley are disposed on the sixth shaft, and the fifth pulley and the seventh pulley are disposed on the fifth shaft. In this way, the fifth shaft is rotated by the driving force of the first driving part, so that the fifth pulley and the seventh pulley can be rotated, and the third belt and the fourth belt can be moved in the second direction. As a result, the third moving part and the fourth moving part can be moved in the second direction, and the fifth moving part can be moved in the second direction. Similarly, by rotating the sixth shaft by the driving force of the second driving unit, the first pulley and the third pulley can be rotated, and therefore the first belt and the second belt can be moved in the first direction, thereby moving the first moving unit and the second moving unit in the first direction, and therefore moving the fifth moving unit in the first direction.

[0015] The output shaft of the first drive unit may be arranged in the first direction, and the stage may further include a ninth pulley arranged on the output shaft of the first drive unit, a tenth pulley arranged on the fifth shaft, and a fifth belt wound around the ninth pulley and the tenth pulley. In this way, the length of the entire XY stage in the first direction can be shortened compared to a case where the output shaft of the first drive unit is directly connected to the fifth shaft. This allows the stage to be made smaller in size in the first direction. The second drive unit may also be configured in a similar manner. This allows the XY stage to be made smaller in size in the second direction.

[0016] Also, a block may be further provided that supports one end side of the first shaft and supports one end side of the fifth shaft via a bearing. By providing such a block, the positioning of the first shaft and the fifth shaft becomes easy. The other end side of the first shaft and the other end side of the fifth shaft can be supported by providing a similar block. Furthermore, the third shaft and the sixth shaft can be supported by providing a similar block. Also, one block may support both the shaft arranged in the first direction and the shaft arranged in the second direction. For example, one block may be provided at each of the four corners of the XY stage.

[0017] The first shaft and the fifth shaft may be arranged so that the central axis of the first shaft coincides with the central axis of the fifth shaft. By making the central axes coincident, the inner diameter of the first shaft and the outer diameter of the fifth shaft can be made relatively close to each other. In other words, the gap between the first shaft and the fifth shaft can be made small, so that, for example, the diameter of the first shaft can be made small, and the XY stage can be made smaller and lighter.

[0018] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings. However, unless otherwise specified, the dimensions, materials, shapes, and relative positions of the components described in the embodiments are not intended to limit the scope of the disclosure. Forms can be combined wherever possible.

[0019] <Embodiment> Fig. 1 is a perspective view showing a schematic configuration of a stage 1 according to an embodiment, and Fig. 2 is a top view of the stage 1 according to the embodiment.

[0020] The stage 1 has a first shaft 11, a second shaft 12, a third shaft 13, and a fourth shaft 14. When the entire stage 1 is viewed from above, the first shaft 11, the second shaft 12, the third shaft 13, and the fourth shaft 14 are arranged to form a rectangle. The stage 1 also has a first block 21, a second block 22, a third block 23, and a fourth block 24. The first block 21, the second block 22, the third block 23, and the fourth block 24 are portions that come into contact with and are fixed to other members when the stage 1 is fixed to another member. The first block 21, the second block 22, the third block 23, and the fourth block 24 may be fixed to other members via brackets or the like. When the stage 1 is viewed from above, the first block 21, the second block 22, the third block 23, and the fourth block 24 are respectively arranged at the four corners of the stage 1 in a clockwise direction.

[0021] In the following description, an XYZ orthogonal coordinate system is set, and the position of each member is described with reference to this XYZ orthogonal coordinate system. The long side direction of the stage 1 is the X-axis direction, the short side direction of the stage 1 is the Y-axis direction, and the direction perpendicular to the XY plane is the Z-axis direction. The X-axis direction is an example of the first direction, and the Y-axis direction is an example of the second direction. The upper side of the Z-axis direction in FIG. 1 is the upper side of the stage 1, and the lower side of the Z-axis direction in FIG. 1 is the lower side of the stage 1. The left side of the X-axis direction in FIG. 2 is the left side of the stage 1, and the right side of the X-axis direction in FIG. 2 is the right side of the stage 1. The first block 21 and the second block 22 side in the Y-axis direction in FIG. 2 is the back side of the stage 1, and the third block 23 and the fourth block 24 side in the Y-axis direction in FIG. 2 is the front side of the stage 1.

[0022] The first block 21, the second block 22, the third block 23, and the fourth block 24 are members formed by, for example, cutting out a block of metal, but are not limited to this and may be members made of, for example, resin. The first block 21, the second block 22, the third block 23, and the fourth block 24 are formed into a quadrangular prism shape and are arranged so that each face is parallel to the XY plane, the XZ plane, or the YZ plane.

[0023] The first shaft 11 and the second shaft 12 are disposed in the X-axis direction. The first shaft 11 and the second shaft 12 are disposed at the same position (may be at the same height) in the Z-axis direction. The third shaft 13 and the fourth shaft 14 are disposed in the Y-axis direction. The third shaft 13 and the fourth shaft 14 are disposed at the same position (may be at the same height) in the Z-axis direction. The third shaft 13 and the fourth shaft 14 are disposed below the first shaft 11 and the second shaft 12 in the Z-axis direction. The first shaft 11, the second shaft 12, the third shaft 13, and the fourth shaft 14 have, for example, a cylindrical outer surface, but the shape of the outer surface is not limited thereto as long as the shape can guide the first moving section 31, the second moving section 32, the third moving section 33, and the fourth moving section 34 described later. For example, a spline may be formed on the outer surface.

[0024] One end of the first shaft 11 is inserted into and fixed to a through hole formed in the first block 21 in the X-axis direction. This will be described later. The other end of the first shaft 11 is inserted into and fixed to a through hole formed in the second block 22 in the X-axis direction. Similarly, one end of the second shaft 12 is inserted into and fixed to a through hole formed in the fourth block 24 in the X-axis direction, and the other end of the second shaft 12 is inserted into and fixed to a through hole formed in the third block 23 in the X-axis direction. One end of the third shaft 13 is inserted into and fixed to a through hole formed in the second block 22 in the X-axis direction. The other end of the third shaft 13 is inserted into and fixed in a through hole formed in the Y-axis direction of the third block 23. In addition, one end of the fourth shaft 14 is inserted into and fixed in a through hole formed in the Y-axis direction of the first block 21, and the other end of the fourth shaft 14 is inserted into and fixed in a through hole formed in the Y-axis direction of the fourth block 24.

[0025] The first shaft 11 is a hollow shaft, and a fifth shaft 15 for transmitting power is disposed in the hollow portion (inside) of the first shaft 11. The fifth shaft 15 is supported by the first block 21 and the second block 22 via bearings disposed in through holes formed in the first block 21 and the second block 22, respectively. The fifth shaft 15 also passes through the first block 21 and the second block 22. Similarly, the third shaft 13 is a hollow shaft, and a sixth shaft 16 for transmitting power is disposed in the hollow portion (inside) of the third shaft 13. The sixth shaft 16 is supported by the second block 22 and the third block 23 via bearings disposed in through holes formed in the second block 22 and the third block 23, respectively. The sixth shaft 16 also passes through the second block 22 and the third block 23.

[0026] The first shaft 11, the second shaft 12, the third shaft 13, the fourth shaft 14, the fifth shaft 15, and the sixth shaft 16 are all members made of, for example, metal, but may be members made of, for example, resin. In the present embodiment, the first shaft 11 and the fifth shaft 15 are configured to coincide with each other, and the third shaft 13 and the sixth shaft 16 are configured to coincide with each other. However, it is not essential that these central axes coincide with each other, and the central axes may be arranged with a shift. The second shaft 12 and the fourth shaft 14 may be hollow or solid, like the first shaft 11 and the third shaft 13. The fifth shaft 15 and the sixth shaft 16 may also be hollow or solid.

[0027] A first pulley 41 is disposed on the sixth shaft 16 on the rear side of the second block 22 in the Y-axis direction. The first pulley 41 is a pulley that rotates integrally with the sixth shaft 16 around the central axis of the sixth shaft 16. A second pulley 42 that pairs with the first pulley 41 is disposed on the rear side of the first block 21 in the Y-axis direction. The second pulley 42 is a pulley that rotates around the Y-axis direction. The first pulley 41 and the second pulley 42 are disposed at the same position in the Y-axis direction and the Z-axis direction, and are disposed offset in the X-axis direction.

[0028] A third pulley 43 is disposed on the sixth shaft 16 on the front side in the Y-axis direction of the third block 23. The third pulley 43 is a pulley that rotates integrally with the sixth shaft 16 around the central axis of the sixth shaft 16. A fourth pulley 44 that pairs with the third pulley 43 is disposed on the front side in the Y-axis direction of the fourth block 24. The fourth pulley 44 is a pulley that rotates around the Y-axis direction. The third pulley 43 and the fourth pulley 44 are disposed at the same position in the Y-axis direction and the Z-axis direction, and are disposed offset in the X-axis direction.

[0029] A fifth pulley 45 is disposed on the fifth shaft 15 to the right of the second block 22 in the X-axis direction. The fifth pulley 45 is a pulley that rotates integrally with the fifth shaft 15 around the central axis of the fifth shaft 15. A sixth pulley 46 that pairs with the fifth pulley 45 is disposed to the right of the third block 23 in the X-axis direction. The sixth pulley 46 is a pulley that rotates around the X-axis direction. The fifth pulley 45 and the sixth pulley 46 are disposed at the same position in the X-axis direction and the Z-axis direction, and are disposed offset in the Y-axis direction.

[0030] A seventh pulley 47 is disposed on the fifth shaft 15 to the left of the first block 21 in the X-axis direction. The seventh pulley 47 is a pulley that rotates integrally with the fifth shaft 15 around the central axis of the fifth shaft 15. An eighth pulley 48 that pairs with the seventh pulley 47 is disposed to the left of the fourth block 24 in the X-axis direction. The eighth pulley 48 is a pulley that rotates around the X-axis direction. The seventh pulley 47 and the eighth pulley 48 are disposed at the same position in the X-axis direction and the Z-axis direction, and are disposed offset in the Y-axis direction.

[0031] In this embodiment, all the pulleys have the same outer diameter. In this embodiment, the rotation axes of the second pulley 42 and the fourth pulley 44 coincide with the central axis of the fourth shaft 14. However, this configuration is not essential, and the rotation axes of the second pulley 42 and the fourth pulley 44 do not have to coincide with the central axis of the fourth shaft 14. A circular first belt 61 is wound around the second pulley 42 and the first pulley 41 in the X-axis direction. A circular second belt 62 is wound around the fourth pulley 44 and the third pulley 43 in the X-axis direction.

[0032] In this embodiment, the rotation axes of the sixth pulley 46 and the eighth pulley 48 coincide with the central axis of the second shaft 12. However, this configuration is not essential, and the rotation axes of the sixth pulley 46 and the eighth pulley 48 do not have to coincide with the central axis of the second shaft 12. A circular third belt 63 is wound around the fifth pulley 45 and the sixth pulley 46 in the Y-axis direction. A circular fourth belt 64 is wound around the seventh pulley 47 and the eighth pulley 48 in the Y-axis direction.

[0033] A first moving part 31 movable in the direction of its central axis (X-axis direction) is disposed on the first shaft 11. A second moving part 32 movable in the direction of its central axis (X-axis direction) is disposed on the second shaft 12. A third moving part 33 movable in the direction of its central axis (Y-axis direction) is disposed on the third shaft 13. A fourth moving part 34 movable in the direction of its central axis (Y-axis direction) is disposed on the fourth shaft 14. The first moving part 31, the second moving part 32, the third moving part 33, and the fourth moving part 34 are configured to include, for example, linear bushings, but are not limited thereto, and may be configured to include, for example, members that move while sliding.

[0034] The first moving portion 31 is fixed to the first belt 61 via a first fixed portion 311. The second moving portion 32 is fixed to the second belt 62 via a second fixed portion 321. The third moving portion 33 is fixed to the third belt 63 via a third fixed portion 331. The fourth moving portion 34 is fixed to the fourth belt 64 via a fourth fixed portion 341.

[0035] One end of a first connection member 71 arranged in the Y-axis direction is connected to the first moving section 31. The other end of the first connection member 71 is connected to the second moving section 32. One end of a second connection member 72 arranged in the X-axis direction is connected to the third moving section 33. The other end of the second connection member 72 is connected to the fourth moving section 34. The first connection member 71 is arranged above the second connection member 72 in the Z-axis direction. In the XY plane, the fifth moving section 35 is arranged at a location where the first connection member 71 and the second connection member 72 intersect. The fifth moving section 35 is formed with a through hole for passing the first connection member 71 and the second connection member 72 through. The first connection member 71 and the second connection member 72 are passed through this through hole, so that the fifth moving section 35 is supported by the first connection member 71 and the second connection member 72. For example, linear bushings are arranged in the two through holes of the fifth moving section 35. A guide unit 81 is connected to the fifth moving unit 35 to guide and protect the electric wires extending from the fifth moving unit 35. An example of the guide unit 81 is a Cableveyor (registered trademark). For example, if the fifth moving unit 35 is provided with a device that moves in the Z-axis direction, a motor for moving the device in the Z-axis direction is attached to the fifth moving unit 35. An electric wire for supplying power to the motor is connected to the guide unit 81. Can be passed inside.

[0036] The fifth shaft 15 is driven by a first motor 91. The sixth shaft 16 is driven by a second motor 92. The first motor 91 and the second motor 92 are electric motors that are operated by supplying electric power. The supply of electric power to the first motor 91 and the second motor 92 may be performed by a controller or by human operation. The first motor 91 is an example of a first drive unit, and the second motor 92 is an example of a second drive unit.

[0037] Here, Fig. 3 is a view of the first block 21 according to the embodiment as viewed from above in the Z-axis direction. Fig. 4 is a cross-sectional view of the first block 21 according to the embodiment as viewed from the front side in the Y-axis direction. Fig. 5 is a cross-sectional view of the first block 21 according to the embodiment as viewed from the right side in the X-axis direction.

[0038] The first block 21 is fixed to the first bracket 101 at the lower side in the Z-axis direction, and the second bracket 102 is fixed at the upper side. This fixing is performed by, for example, a bolt. The second bracket 102 is bent at a right angle downward in the Z-axis direction at the left end in the X-axis direction. The first bracket 101 is bent at a right angle upward in the Z-axis direction, abutting against the second bracket 102 at the left end in the X-axis direction. The first bracket 101 and the second bracket 102 are fixed by, for example, a bolt at the portion where the second bracket 102 is bent. The first block 21 has a first through hole 103 formed in the X-axis direction, and a second through hole 104 formed in the Y-axis direction. The second through hole 104 is formed below the first through hole 103 in the Z-axis direction.

[0039] 4, the first through hole 103 is formed so that the diameter is larger on the left and right sides in the X-axis direction than on the center side. As a result, two steps are formed in the first through hole 103. The first shaft 11 is inserted from the right side in the X-axis direction of the first through hole 103, and the end of the first shaft 11 abuts against the step on the right side in the X-axis direction formed in the first through hole 103. The inner diameter of the opening on the right side of the first through hole 103 is approximately equal to the outer diameter of the first shaft 11, and is configured so that the first shaft 11 inserted into the first through hole 103 does not wobble.

[0040] The fifth shaft 15 disposed in the hollow portion of the first shaft 11 is supported by two bearings 105. The two bearings 105 are fitted into the first through hole 103 from the left side in the X-axis direction so that the rotation axis is disposed in the X-axis direction, and abut against a step formed in the first through hole 103 on the left side in the X-axis direction. The number of bearings 105 is not limited to two, and may be one. The seventh pulley 47 is disposed to the left of the bearing 105 in the X-axis direction. The seventh pulley 47 is fixed to the fifth shaft 15 by a fixing device 106. In addition, to the left of the seventh pulley 47 in the X-axis direction, the fifth shaft 15 protrudes to the left of the second bracket 102 in the X-axis direction through a through hole formed in the second bracket 102. A tenth pulley 50 that pairs with a ninth pulley 49 described later is disposed there. The tenth pulley 50 is fixed to the fifth shaft 15 by a fixing device 107. The tenth pulley 50 is a pulley that rotates integrally with the fifth shaft 15 around the central axis of the fifth shaft 15. Note that the method of fixing the seventh pulley 47 and the tenth pulley 50 is not limited to this, and they can be fixed by other known methods.

[0041] The first motor 91 is disposed below the first block 21 in the Z-axis direction. The first motor 91 is fixed to a third bracket 108. The third bracket 108 is fixed to the second bracket 102. A bolt 109 is disposed between the third bracket 108 and the second bracket 102 for adjusting the relative positions of the third bracket 108 and the second bracket 102 in the Z-axis direction. The bolt 109 controls the tension of a fifth belt 65, which will be described later. is adjustable.

[0042] The output shaft 911 of the first motor 91 is disposed so as to face the left side in the X-axis direction, and penetrates the second bracket 102 and the third bracket 108 in the X-axis direction. The ninth pulley 49 is disposed on the output shaft 911 of the first motor 91 on the left side of the second bracket 102 in the X-axis direction. The ninth pulley 49 is fixed to the output shaft 911 of the first motor 91 by a fixing device 110, and rotates together with the output shaft 911 of the first motor 91. The ninth pulley 49 and the tenth pulley 50 are disposed at the same position in the X-axis direction and the Y-axis direction, and are disposed with a shift in the Z-axis direction. A circular fifth belt 65 is hung on the ninth pulley 49 and the tenth pulley 50. This fifth belt 65 is stretched in the Z-axis direction. When the first motor 91 is operated, power is transmitted to the fifth shaft 15 via the fifth belt 65, and the fifth shaft 15 rotates.

[0043] 1 and 2, the second motor 92 is disposed on the rear side in the Y-axis direction and on the left side in the X-axis direction from the second block 22. The output shaft of the second motor 92 is disposed so as to face the front side in the Y-axis direction, and the eleventh pulley 51 is disposed on this output shaft. The eleventh pulley 51 rotates integrally with the output shaft of the second motor 92. The twelfth pulley 52 that pairs with the eleventh pulley 51 is disposed on one end side (the rear side in the Y-axis direction) of the sixth shaft 16. The eleventh pulley 51 and the twelfth pulley 52 are disposed at the same position in the Y-axis direction and the Z-axis direction, and are disposed with a shift in the X-axis direction. A circular sixth belt 66 is wound around the eleventh pulley 51 and the twelfth pulley 52. ​​The sixth belt 66 is stretched in the X-axis direction. When the second motor 92 is operated, power is transmitted to the sixth shaft 16 via the sixth belt 66, and the sixth shaft 16 rotates.

[0044] The second motor 92 is disposed in a structure different from that of the first motor 91. As shown in FIG. 1, the output shaft of the second motor 92 is disposed so as to extend from the rear side to the front side in the Y-axis direction. The second motor 92 is disposed to the left of the sixth shaft 16 in the X-axis direction. However, the second motor 92 is the same in that it transmits power from the second motor 92 to the sixth shaft 16 via the sixth belt 66. The arrangement of the first motor 91 and the second motor 92 can be changed depending on the location where the stage 1 is installed.

[0045] 5, the second through hole 104 is formed so that the diameters on the left and right sides in the Y-axis direction are larger than the diameters on the center side. As a result, two steps are formed in the second through hole 104. The fourth shaft 14 is inserted from the front side in the Y-axis direction of the second through hole 104, and the end of the fourth shaft 14 abuts against the step on the front side in the Y-axis direction formed in the second through hole 104. The inner diameter of the opening on the front side in the Y-axis direction of the second through hole 104 is approximately equal to the outer diameter of the fourth shaft 14, and is configured so that the fourth shaft 14 inserted into the second through hole 104 does not rattle.

[0046] A pulley shaft 111 is inserted from the back side in the Y-axis direction of the second through hole 104. The pulley shaft 111 has a central axis disposed in the Y-axis direction and serves as a rotation shaft of the second pulley 42. The pulley shaft 111 is supported by a bearing 112 fitted into the second through hole 104. The bearing 112 is fitted into the second through hole 104 from the back side in the Y-axis direction so that the rotation shaft is disposed in the Y-axis direction, and abuts against a step formed in the second through hole 104 on the back side in the Y-axis direction. The pulley shaft 111 protrudes further back in the Y-axis direction than the first block 21, and is supported at its back end by a fourth bracket 113. This fourth bracket 113 is fixed to the first block 21. The second pulley 42 is disposed on the pulley shaft 111 between the bearing 112 and the fourth bracket 113. The second pulley 42 is fixed to the pulley shaft 111 by a fixing device 114. The method of fixing the second pulley 42 is not limited to this, and it may be fixed by other known methods. The shaft 14 and the pulley shaft 111 may be formed integrally.

[0047] In the second block 22, the first shaft 11 and the fifth shaft 15 are supported by a structure similar to that of the first shaft 11 and the fifth shaft 15 in the first block 21. The fifth pulley 45 is disposed on the fifth shaft 15 by a structure similar to that of the seventh pulley 47.

[0048] In the second block 22, the third shaft 13 and the sixth shaft 16 are supported by a structure similar to that of the first shaft 11 and the fifth shaft 15 in the first block 21. In addition, the twelfth pulley 52 and the first pulley 41 are disposed on the sixth shaft 16 by a structure similar to that in which the tenth pulley 50 and the seventh pulley 47 are disposed on the fifth shaft 15.

[0049] In the third block 23, the third shaft 13, the sixth shaft 16, and the second shaft 12 are supported by a structure similar to that of the first shaft 11, the fifth shaft 15, and the fourth shaft 14 in the first block 21. The third pulley 43 is disposed on the sixth shaft 16 by a structure similar to that of the seventh pulley 47 being disposed on the fifth shaft 15. The sixth pulley 46 is disposed on the third block 23 by a structure similar to that of the second pulley 42 being disposed on the first block 21.

[0050] In the fourth block 24, the second shaft 12 and the fourth shaft 14 are supported by a structure similar to that of the fourth shaft 14 in the first block 21. The fourth pulley 44 and the eighth pulley 48 are disposed in the fourth block 24 by a structure similar to that in which the second pulley 42 is disposed in the first block 21.

[0051] In the stage 1 configured in this manner, by operating the first motor 91, power is transmitted from the output shaft 911 of the first motor 91 to the ninth pulley 49, the fifth belt 65, the tenth pulley 50, and the fifth shaft 15 in this order, and the fifth shaft 15 rotates. Furthermore, by the rotation of the fifth shaft 15, the seventh pulley 47 and the fifth pulley 45 rotate. By the rotation of the seventh pulley 47, the fourth belt 64 and the eighth pulley 48 rotate. Between the first block 21 and the fourth block 24, by the fourth belt 64 moving in the Y-axis direction, the fourth moving part 34 connected via the fourth fixed part 341 also moves in the Y-axis direction together with the fourth belt 64. Similarly, by the rotation of the fifth pulley 45, the third belt 63 and the sixth pulley 46 rotate. Between the second block 22 and the third block 23, by the third belt 63 moving in the Y-axis direction, the third moving part 33 connected via the third fixed part 331 also moves in the Y-axis direction together with the third belt 63. Here, because the seventh pulley 47 and the fifth pulley 45 rotate in the same direction at the same speed, the fourth belt 64 and the third belt 63 move in the same direction at the same speed. Therefore, the fourth moving section 34 and the third moving section 33 move in the same direction at the same speed, so the second connecting member 72 moves in the Y-axis direction while maintaining a state parallel to the X-axis direction. This second connecting member 72 pushes the fifth moving section 35 in the Y-axis direction, causing the fifth moving section 35 to move in the Y-axis direction.

[0052] Therefore, the position of the fifth moving unit 35 in the Y-axis direction can be controlled by controlling the rotation direction and rotation angle of the first motor 91. In addition, the movement speed of the fifth moving unit 35 in the Y-axis direction can be controlled by controlling the rotation speed of the first motor 91.

[0053] In addition, by operating the second motor 92, power is transmitted from the output shaft of the second motor 92 to the eleventh pulley 51, the sixth belt 66, the twelfth pulley 52, and the sixth shaft 16 in this order, causing the sixth shaft 16 to rotate. Furthermore, the rotation of the sixth shaft 16 causes the first pulley 41 and the third pulley 43 to rotate. The rotation of the first pulley 41 causes the first The first belt 61 and the second pulley 42 rotate. Between the first block 21 and the second block 22, the first belt 61 moves in the X-axis direction, and the first moving part 31 connected via the first fixed part 311 also moves in the X-axis direction together with the first belt 61. Similarly, the third pulley 43 rotates, and the second belt 62 and the fourth pulley 44 rotate. Between the third block 23 and the fourth block 24, the second belt 62 moves in the X-axis direction, and the second moving part 32 connected via the second fixed part 321 also moves in the X-axis direction together with the second belt 62. Here, since the first pulley 41 and the third pulley 43 rotate in the same direction at the same speed, the first belt 61 and the second belt 62 move in the same direction at the same speed. Therefore, since the first moving part 31 and the second moving part 32 move in the same direction at the same speed, the first connecting member 71 moves in the X-axis direction while maintaining a parallel state to the Y-axis direction. The first connecting member 71 pushes the fifth moving portion 35 in the X-axis direction, whereby the fifth moving portion 35 moves in the X-axis direction.

[0054] Therefore, the position of the fifth moving unit 35 in the X-axis direction can be controlled by controlling the rotation direction and rotation angle of the second motor 92. In addition, the movement speed of the fifth moving unit 35 in the X-axis direction can be controlled by controlling the rotation speed of the second motor 92. Note that, by simultaneously operating the first motor 91 and the second motor 92, the fifth moving unit 35 can also be moved in the X-axis direction and the Y-axis direction simultaneously.

[0055] Here, in the stage 1 according to this embodiment, the fifth shaft 15 is disposed inside the hollow first shaft 11. Also, the sixth shaft 16 is disposed inside the hollow third shaft 13. Therefore, the first shaft 11 has a function of guiding the first moving part 31 in the X-axis direction and a function of storing the fifth shaft 15 inside. Similarly, the third shaft 13 has a function of guiding the third moving part 33 in the Y-axis direction and a function of storing the sixth shaft 16 inside. Then, compared with the case where the fifth shaft 15 is disposed outside the first shaft 11 and the sixth shaft 16 is disposed outside the third shaft 13, the stage 1 can be made smaller. Therefore, the stage 1 can be installed in a narrower space. Also, the first motor 91 and the second motor 92 can be operated to move the fifth moving part 35 on the XY plane via each pulley and each belt, so that an increase in costs can be suppressed.

[0056] In addition, since the output shaft 911 of the first motor 91 is not directly connected to the fifth shaft 15, but transmits power via the ninth pulley 49, the fifth belt 65, and the tenth pulley 50, it is possible to reduce the size of the stage 1 in the X-axis direction compared to a case where they are directly connected. Similarly, the output shaft of the second motor 92 is not directly connected to the sixth shaft 16, but transmits power via the eleventh pulley 51, the sixth belt 66, and the twelfth pulley 52, so it is possible to reduce the size of the stage 1 in the Y-axis direction.

[0057] Moreover, by aligning the central axis of the first shaft 11 with the central axis of the fifth shaft 15, it is possible to reduce the diameter of the first shaft 11. Moreover, by aligning the central axis of the third shaft 13 with the central axis of the sixth shaft 16, it is possible to reduce the diameter of the third shaft 13. As a result, it is possible to reduce the size and weight of the stage 1.

[0058] In this embodiment, for example, the first moving part 31 is fixed to the first belt 61 via the first fixed part 311. The first moving part 31 is moved in the X-axis direction by moving the first belt 61 in the X-axis direction. However, the method of moving the first moving part 31 is not limited to this. For example, the first moving part 31 may be moved by arranging a ball screw in the X-axis direction instead of the first belt 61 and arranging a ball screw nut on the first fixed part 311. In this case, the driving force of the sixth shaft 16 may be transmitted to the ball screw by, for example, a bevel gear. The second moving part 32, the third moving part 33, and the fourth moving part 34 are also configured in a similar manner. It is possible.

[0059] In this embodiment, the fifth shaft 15 is disposed inside the first shaft 11, and the sixth shaft 16 is disposed inside the third shaft 13, but both of these configurations are not essential, and it is sufficient to have either one of the configurations. By having either one of the configurations, it is possible to reduce the size of the stage 1. [Explanation of symbols]

[0060] DESCRIPTION OF SYMBOLS 1 stage, 11 first shaft, 12 second shaft, 13 third shaft, 14 fourth shaft, 15 fifth shaft, 16 sixth shaft, 31 first moving section, 32 second moving section, 33 third moving section, 34 fourth moving section, 35 fifth moving section, 71 first connecting member, 72 second connecting member, 91 first motor, 92 second motor

Claims

1. A hollow first shaft disposed in a first direction; A second shaft disposed in the first direction; A third shaft and a fourth shaft arranged in a second direction perpendicular to the first direction; A first moving portion that moves in the first direction while being guided by the first shaft; A second moving portion that is guided by the second shaft and moves in the first direction; A third moving portion that is guided by the third shaft and moves in the second direction; a fourth moving portion that is guided by the fourth shaft and moves in the second direction; A first connecting member that connects the first moving portion and the second moving portion; A second connection member that connects the third movement portion and the fourth movement portion; a fifth shaft disposed in the first direction inside the first shaft, the fifth shaft rotating about the first direction by a driving force from a first driving unit to transmit a force that moves the third moving unit, the fourth moving unit, and the second connecting member in the second direction; a sixth shaft disposed in the second direction, the sixth shaft rotating about the second direction by a driving force from a second driving unit to transmit a force that moves the first moving unit, the second moving unit, and the first connecting member in the first direction; a fifth moving portion supported by the first connecting member so as to be movable in the second direction and supported by the second connecting member so as to be movable in the first direction; An XY stage equipped with

2. The third shaft is formed to be hollow, The sixth shaft is disposed inside the third shaft. The XY stage according to claim 1 .

3. a first belt that is stretched around a first pulley and a second pulley and tensioned in the first direction, the first belt being connected to the first moving portion; a second belt that is stretched around a third pulley and a fourth pulley and tensioned in the first direction, the second belt being connected to the second moving portion; a third belt that is stretched around a fifth pulley and a sixth pulley and tensioned in the second direction, the third belt being connected to the third moving portion; a fourth belt that is wound around a seventh pulley and an eighth pulley and stretched in the second direction, the fourth belt being connected to the fourth moving portion; Further comprising: the first pulley and the third pulley are disposed on the sixth shaft; the fifth pulley and the seventh pulley are disposed on the fifth shaft; The XY stage according to claim 1 .

4. An output shaft of the first drive unit is disposed in the first direction, A ninth pulley disposed on an output shaft of the first drive unit; a tenth pulley disposed on the fifth shaft; a fifth belt that is wound around the ninth pulley and the tenth pulley; The XY stage of claim 1 further comprising:

5. 2. The XY stage according to claim 1, further comprising a block that supports one end side of the first shaft and supports one end side of the fifth shaft via a bearing.

6. The first shaft and the fifth shaft are arranged so that a central axis of the first shaft and a central axis of the fifth shaft coincide with each other. The XY stage according to claim 1 .

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