Light source device and irradiation device

Abstract

To provide a light source device and an irradiation device capable of improving uniformity of illuminance and a spectrum in an irradiation area.SOLUTION: A light source device 1A includes: a first light source unit 10-1 which includes one or more kinds of semiconductor light sources and emits a first ultraviolet ray L1; a second light source unit 10-2 which includes one or more kinds of semiconductor light sources and emits a second ultraviolet ray L2 where at least one of a center wavelength and a spectrum is different from those of the first ultraviolet ray L1; a light tunnel 30 for guiding the first ultraviolet ray L1 and the second ultraviolet ray L2; and a mixing optical system 40 provided inside the light tunnel 30 for mixing the first ultraviolet ray L1 and the second ultraviolet ray L2, and obtaining a third ultraviolet ray L3. An inner surface 30A of the light tunnel 30 is a reflection surface for reflecting the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3, and emits the third ultraviolet ray L3 mixed by the mixing optical system 40 from the light tunnel 30.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a light source device and an illumination device. [Background technology]

[0002] There is known a light source device having an ultraviolet discharge lamp such as a high pressure mercury lamp or a metal halide lamp as a light source. This type of light source device is widely used in various devices such as a light resistance test device for testing the light resistance of an object, a photocuring device for photocuring a photocurable resin, and an ultraviolet light source device mounted on a printing machine for curing an ultraviolet curable ink. Meanwhile, in recent years, in the technical field to which light source devices belong, mercury-containing discharge lamps have been replaced with LEDs (light-emitting diodes) for the purpose of reducing environmental loads, etc. However, since the optical spectrum of an ultraviolet discharge lamp has a continuous spectrum in a relatively wide wavelength range, it may be difficult to replace an ultraviolet discharge lamp with a single type of ultraviolet LED. Therefore, as a light source device that can be used to replace an ultraviolet discharge lamp, a configuration is required that includes multiple types of ultraviolet LEDs with different center wavelengths and obtains a continuous spectrum in a desired wavelength range by mixing and irradiating the ultraviolet LEDs.

[0003] Patent Document 1 discloses a technique for mixing light from different light sources using a beam splitter, while Patent Document 2 discloses a technique for mixing light from different light sources using a dichroic mirror. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-96998 [Patent Document 2] JP 2010-263218 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the conventional technology, the illuminance and the uniformity of the spectrum within the irradiation area where the mixed ultraviolet light is irradiated are not taken into consideration.

[0006] An object of the present disclosure is to provide a light source device and an illumination device that can improve the illuminance and spectral uniformity in an illumination area. [Means for solving the problem]

[0007] A light source device according to one embodiment of the present disclosure comprises a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and emitting a second ultraviolet ray having a central wavelength different from that of the first ultraviolet ray; a light tunnel that guides each of the first ultraviolet ray and the second ultraviolet ray; and a mixing optical system provided inside the light tunnel that combines the first ultraviolet ray and the second ultraviolet ray to obtain a third ultraviolet ray, wherein the inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet ray, the second ultraviolet ray, and the third ultraviolet ray, and the third ultraviolet ray mixed by the mixing optical system is emitted from the light tunnel. Effect of the Invention

[0008] According to one embodiment of the present disclosure, it is possible to improve the illuminance and spectral uniformity within an illuminated area. [Brief description of the drawings]

[0009] [Figure 1] 1 is a perspective view illustrating a schematic example of a configuration of a light source device according to a first embodiment of the present disclosure. [Diagram 2] 2 is a cross-sectional view showing a schematic example of an internal configuration of a light source device. FIG. [Diagram 3] 4A and 4B are diagrams illustrating an example of ultraviolet LEDs included in each of a first light source unit and a second light source unit. [Figure 4] 10 is a plan view showing an example of an LED substrate included in the second light source unit. FIG. [Diagram 5] FIG. 4 is a diagram showing positions of measurement points of a spectrum in an irradiation area. [Figure 6] FIG. 6 is a diagram showing the measurement results of the optical spectrum at each measurement point shown in FIG. 5. [Figure 7] FIG. 13 is a diagram showing measurement points of illuminance measurement in an irradiation area and illuminance measurement values ​​at the measurement points. [Figure 8] FIG. 1 is a diagram showing the conformity of third ultraviolet ray to the JIS wavelength range regulations. [Figure 9] FIG. 11 is a perspective view illustrating a schematic example of a configuration of a light source device according to a second embodiment of the present disclosure. [Figure 10] 2 is a cross-sectional view showing a schematic example of an internal configuration of a light source device. FIG. [Figure 11] 3 is a diagram showing the transmission characteristic and reflection characteristic of a dichroic mirror; [Figure 12] FIG. 4 is a plan view showing an example of two LED boards included in the first light source unit. [Figure 13] FIG. 11 is a diagram showing the measurement results of the optical spectrum at each measurement point in the irradiation area. [Figure 14] FIG. 13 is a diagram showing measurement points of illuminance measurement in an irradiation area and illuminance measurement values ​​at the measurement points. [Figure 15] FIG. 1 is a diagram showing the conformity of third ultraviolet ray to the JIS wavelength range regulations. [Figure 16] FIG. 11 is a perspective view of an irradiation device according to a third embodiment, as viewed from above. [Figure 17] FIG. 2 is a perspective view showing the external configuration of the irradiation device as viewed from below. [Figure 18] FIG. [Figure 19] FIG. 11 is a vertical cross-sectional view of a light source device according to a third embodiment. [Figure 20] FIG. 2 is a plan view of the irradiation device as viewed from the bottom. [Figure 21] FIG. 2 is a perspective view of the irradiation device as viewed from the bottom side. [Figure 22] FIG. 13 is an assembly diagram of the partition unit and the light tunnel. [Figure 23] FIG. 2 is a perspective view of the irradiation device as viewed from the top side. [Figure 24] FIG. 2 is a plan view of the LED board group. [Diagram 25] 13A and 13B are diagrams illustrating modified examples of the arrangement of the LED board group. [Figure 26] FIG. 13 is a diagram showing a modified example of the irradiation device according to the third embodiment. [Figure 27] FIG. 13 is a diagram showing another modified example of the irradiation device according to the third embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, a preferred embodiment of the present disclosure will be described with reference to the drawings. In the drawings, the dimensions and scale of each part may differ from the actual ones, and some parts may be shown diagrammatically to facilitate understanding. In addition, unless otherwise specified in the following description to the effect that the present disclosure is limited, the scope of the present disclosure is not limited to the embodiments described in the following description. The scope of the present disclosure includes the equivalent scope of the embodiments.

[0011] 1. First embodiment Fig. 1 is a perspective view showing an example of the configuration of a light source device 1A according to this embodiment, and Fig. 2 is a cross-sectional view showing an example of the internal configuration of the light source device 1A. The light source device 1A is a device that can be incorporated into various devices such as a light resistance test device, a photocuring device, and a semiconductor process device and used as an alternative light source to an ultraviolet discharge lamp. As shown in Figs. 1 and 2, the light source device 1A of this embodiment includes a first light source unit 10-1 that emits a first ultraviolet ray L1, a second light source unit 10-2 that emits a second ultraviolet ray L2 that is different from the first ultraviolet ray L1 in at least one of the central wavelength and the optical spectrum, a light tunnel 30 that guides each of the first ultraviolet ray L1 and the second ultraviolet ray L2, and a mixing optical system 40 that is provided inside the light tunnel 30 and mixes the first ultraviolet ray L1 and the second ultraviolet ray L2. The third ultraviolet ray L3 mixed by the mixing optical system 40 is irradiated from the light tunnel 30 toward the stage A. An appropriate irradiation object to be irradiated with the third ultraviolet ray L3 is placed on the stage A.

[0012] The light source device 1A of this embodiment includes a first cooling unit 50-1 that cools the first light source unit 10-1 and a second cooling unit 50-2 that cools the second light source unit 10-2. The first cooling unit 50-1 and the second cooling unit 50-2 include one or more types of appropriate cooling means, such as a heat sink, an air-cooled fan, and a water cooler. Although not shown, the light source device 1A includes a light source control device that controls the turning on and off and dimming of the first light source unit 10-1 and the second light source unit 10-2, and a cooling control device that controls the operation of the first cooling unit 50-1 and the second cooling unit 50-2.

[0013] FIG. 3 is a diagram showing an example of ultraviolet LEDs provided in each of the first light source unit 10-1 and the second light source unit 10-2. In order to approximate the spectrum of the ultraviolet discharge lamp to be substituted, the first light source unit 10-1 and the second light source unit 10-2 of the light source device 1A each include one or more types of ultraviolet LEDs that are different from each other in at least one of the central wavelength and the spectrum. The ultraviolet LED is an example of the "semiconductor light source" in this disclosure. An existing accelerated weathering test device using a metal halide lamp as a light source is a device that irradiates an object with light emitted from the metal halide lamp and transmitted through a filter. The light source device 1A of this embodiment realizes the spectrum of light transmitted through a filter in an existing accelerated weathering test device by mixing the emitted light of multiple LEDs with different peak wavelengths. Specifically, in order to reproduce the spectrum, as shown in FIG. 3, the first light source unit 10-1 includes two types of ultraviolet LEDs, a first ultraviolet LED and a second ultraviolet LED, and the second light source unit 10-2 includes four types of ultraviolet LEDs, a third ultraviolet LED, a fourth ultraviolet LED, a fifth ultraviolet LED, and a sixth ultraviolet LED. In this embodiment, the first to sixth ultraviolet LEDs are LEDs with different central wavelengths. That is, as shown in Fig. 3, the first, second, third, fourth, fifth, and sixth ultraviolet LEDs have central wavelengths of 325 nm, 340 nm, 365 nm, 375 nm, 385 nm, and 405 nm, respectively. The ultraviolet rays of the six types of ultraviolet LEDs with different central wavelengths are mixed as the third ultraviolet light L3 by the mixing optical system 40, so that the spectrum of the third ultraviolet light L3 becomes a continuous spectrum with a relatively wide wavelength range. In addition, the number of each of the six types of ultraviolet LEDs and their forward currents are determined so that the spectrum of the third ultraviolet light L3 is close to the spectrum of light from a metal halide lamp that has passed through a filter in an existing accelerated weather resistance test device.

[0014] FIG. 4 is a plan view showing an example of the LED substrate 100 included in the second light source unit 10-2. The LED board 100 includes four types of ultraviolet LEDs, the third ultraviolet LED to the sixth ultraviolet LED, which are included in the second light source unit 10-2, and a mounting board 110 on which these ultraviolet LEDs are mounted. The mounting board 110 is a printed board that is generally rectangular in plan view. The mounting board 110 has each ultraviolet LED mounted within a central region 110R located approximately in the center of the mounting board 110. Within the central region 110R, each type of ultraviolet LED is widely distributed and arranged so that each type of ultraviolet LED is point-symmetrical with respect to the center of the central region.

[0015] As shown in FIG. 1, the first light source unit 10-1 has two LED substrates 100, one of which has a first ultraviolet LED arranged in a central region 110R, and the other of which has a second ultraviolet LED arranged in the central region 110R.

[0016] In this embodiment, the central region 110R is rectangular with sides of approximately 25 mm, and ultraviolet light from each type of ultraviolet LED is emitted from almost the entire surface of the central region 110R. In this embodiment, the first ultraviolet LED to the sixth ultraviolet LED are all packaged LEDs, and are light sources that do not themselves have optical elements such as lenses. Each ultraviolet LED emits ultraviolet light at a relatively wide radiation angle (for example, 120 degrees), and as a result, the radiation angle of the ultraviolet light emitted by the LED substrate 100 is also relatively wide. The radiation angle is assumed to be an appropriate angle of 15 degrees or more and 180 degrees or less. In addition, some or all of the one or more types of LEDs provided in each of the first light source unit 10-1 and the second light source unit 10-2 may be equipped with optical elements, or may be SMD (Surface Mount Device) type, COB (Chip On Board) type, or bullet type LEDs.

[0017] Returning to FIG. 2, the mixing optical system 40 of this embodiment includes a beam splitter 400. The beam splitter 400 of this embodiment is a plate-type optical element, and has optical characteristics of a transmittance of 70% and a reflectance of 30% when the incident angle of the incident light is 45 degrees. The beam splitter 400 is disposed at the intersection Ba where the first optical axis K1 of the first ultraviolet ray L1 and the second optical axis K2 of the second ultraviolet ray L2 are perpendicular to each other, in a position inclined at 45 degrees with respect to the first optical axis K1 and the second optical axis K2. The beam splitter 400 mixes the light component of the first ultraviolet ray L1 that has passed through the beam splitter 400 and the light component of the second ultraviolet ray L2 that has been reflected by the beam splitter 400 to obtain the third ultraviolet ray L3.

[0018] 2, the light tunnel 30 is a hollow cylinder 300 that extends linearly and has an exit port 300Q that emits the third ultraviolet ray L3 at one end 300T1. A first inlet 300M1 that introduces one of the first ultraviolet ray L1 and the second ultraviolet ray L2 opens at the other end 300T2 of the cylinder 300, and a second inlet 300M2 that introduces the other of the first ultraviolet ray L1 and the second ultraviolet ray L2 opens at the side of the cylinder 300.

[0019] In this embodiment, the first light source unit 10-1 is disposed in the first inlet 300M1, and the first ultraviolet ray L1 is introduced from the first inlet 300M1. Meanwhile, the second light source unit 10-2 is disposed in the sub-cylinder 300S extending from the second inlet 300M2, and the second ultraviolet ray L2 is introduced from the second inlet 300M2. In this configuration, the first light source unit 10-1 is installed so that the first optical axis K1 of the first ultraviolet ray L1 roughly coincides with the central axis of the cylinder 300, and the second light source unit 10-2 is installed so that the second optical axis K2 of the second ultraviolet ray L2 is perpendicular to the central axis of the cylinder 300. Then, inside the cylinder 300, as described above, a beam splitter 400 is installed at the intersection Ba of the first optical axis K1 and the second optical axis K2, and the third ultraviolet ray L3 proceeds from the beam splitter 400 toward the exit 300Q.

[0020] In this embodiment, in order to make the distances from the intersection Ba to the first inlet 300M1 and the second inlet 300M2 approximately equal, the second inlet 300M2 is provided with a secondary cylinder 300S extending from the side of the cylinder 300 in a direction perpendicular to the central axis of the cylinder 300, and the second light source unit 10-2 is disposed at the end of the secondary cylinder 300S. The cross-sectional shape and cross-sectional dimensions of the secondary cylinder 300S are approximately equal to those of the cylinder 300.

[0021] In this embodiment, the cross-sectional shape of each of the cylinder 300 and the sub-cylinder 300S, and the opening shapes of each of the first inlet 300M1, the second inlet 300M2, and the outlet 300Q are all square. The inner dimensions of each of cylinder 300 and sub-cylinder 300S are approximately 50 mm on a side, and the distance from first inlet 300M1 to outlet 300Q is 160.5 mm. The distance from intersection Ba to first inlet 300M1 is 65.5 mm, and the distance from intersection Ba to the installation position of second light source unit 10-2 in sub-cylinder 300S is also 65.5 mm. The emission port 300Q is a square with one side measuring 50 mm, similar to the inner dimensions of the cylindrical body 300, and an irradiation area D of predetermined dimensions and a predetermined shape with the first optical axis K1 as the center E is defined at a position 5 mm away from the emission port 300Q. In this embodiment, the irradiation area D is defined as a square range with one side measuring 25 mm.

[0022] The shape and dimensions of the cylinder 300 and the sub-cylinder 300S, as well as the shape and dimensions of the first inlet 300M1, the second inlet 300M2, and the outlet 300Q are set appropriately depending on, for example, the desired shape, dimensions, and illuminance of the irradiation area D.

[0023] In the light tunnel 30 of this embodiment, the cylinder 300 and the sub-cylinder 300S are each formed using a plate material mainly made of a material having a high reflectance such as aluminum, and the inner surface 30A thereof is a reflective surface that reflects ultraviolet rays with a high reflectance. Meanwhile, as described above, the first light source unit 10-1 and the second light source unit 10-2 radiate the first ultraviolet rays L1 and the second ultraviolet rays L2, respectively, at a relatively large radiation angle (e.g., 120 degrees or more). Therefore, inside the light tunnel 30, as shown by the dashed arrow C1 in Fig. 2, the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 each travel while being multiple-reflected on the inner surface 30A. As a result, the third ultraviolet ray L3 becomes an ultraviolet ray in which the ultraviolet rays from the six types of ultraviolet LEDs provided in the first light source unit 10-1 and the second light source unit 10-2 are sufficiently mixed. By irradiating the irradiation area D with the third ultraviolet ray L3, the illuminance and the uniformity of the spectrum in the irradiation area D can be improved. It should be noted that the dashed arrow C1 shown in FIG. 2 conceptually illustrates the state of reflection, and does not indicate the actual trajectory of a light ray.

[0024] Next, the measurement results of the illuminance and the optical spectrum in the irradiation area D will be described.

[0025] Fig. 5 is a diagram showing the positions of measurement points of the optical spectrum in the irradiation area D. Fig. 6 is a diagram showing the measurement results of the optical spectrum at each measurement point shown in Fig. 5. As described above, the irradiation area D in this embodiment is a square with sides of 25 mm, and as shown in Fig. 5, the first measurement point DP1 to the fifth measurement point DP5 are set in this irradiation area D. The first measurement point DP1, the second measurement point DP2, the third measurement point DP3, the fourth measurement point DP4, and the fifth measurement point DP5 correspond to the center, the vicinity of the upper left corner, the vicinity of the lower left corner, the vicinity of the lower right corner, and the vicinity of the upper right corner, respectively, of the irradiation area D. Note that in Fig. 5, the circles surrounding each measurement point indicate the light receiving range of the spectroscopic sensor.

[0026] 6, the relative intensities of the optical spectra measured at the first measurement point DP1 to the fifth measurement point DP5 are all approximately equal, which indicates that the optical spectrum is uniform in the irradiation area D.

[0027] FIG. 7 is a diagram showing measurement points of illuminance measurement in the irradiation area D and the illuminance measurement values ​​at the measurement points. As shown in the figure, a sixth measurement point DP6 to a fourteenth measurement point DP14 are set as measurement points for illuminance measurement in the irradiation area D. The sixth measurement point DP6 to the fourteenth measurement point DP14 correspond to the center, upper left corner, center of the left side, lower left corner, center of the top side, center of the bottom side, upper right corner, center of the right side, and lower right corner of the irradiation area D, respectively. From the illuminance measurement values ​​at each of the positions from the sixth measurement point DP6 to the fourteenth measurement point DP14, the uniformity in the irradiation area D is determined to be 90% or more. When the illuminance measurement values ​​in Figure 7 are calculated according to the formula (uniformity = MIN value / MAX value x 100), the uniformity is approximately 93%, indicating that the illuminance is highly uniform.

[0028] Fig. 8 is a diagram showing the conformity of the third ultraviolet ray L3 to the wavelength range regulation of JIS (Japanese Industrial Standards). Note that such wavelength range regulation is a regulation for the JIS A 1501A method "Accelerated weather resistance test method using metal halide lamps for resin fittings". As shown in the figure, all of the first measurement point DP1 to the fifth measurement point DP5 comply with the JIS wavelength range regulations.

[0029] As described above, the light source device 1A of the present embodiment includes the first light source unit 10-1 including two types of ultraviolet LEDs and emitting the first ultraviolet ray L1, the second light source unit 10-2 including four types of ultraviolet LEDs and emitting the second ultraviolet ray L2 having at least one of the central wavelength and the optical spectrum different from the first ultraviolet ray L1, the light tunnel 30 guiding each of the first ultraviolet ray L1 and the second ultraviolet ray L2, and the mixing optical system 40 provided inside the light tunnel 30 and mixing the first ultraviolet ray L1 and the second ultraviolet ray L2 to obtain the third ultraviolet ray. The inner surface 30A of the light tunnel 30 is a reflective surface that reflects the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3, and emits the third ultraviolet ray L3 mixed by the mixing optical system 40 from the light tunnel 30.

[0030] According to this configuration, the third ultraviolet ray L3 is obtained by mixing ultraviolet rays from a total of six types of ultraviolet LEDs, so the spectrum of the third ultraviolet ray L3 is a continuous spectrum like that of an ultraviolet discharge lamp, and has optical characteristics that can be used as an alternative light source to an ultraviolet discharge lamp. In particular, the light source device 1A does not contain mercury like a mercury discharge lamp, so it can contribute to reducing environmental load. In addition, since the light source device 1A uses a semiconductor light source such as an ultraviolet LED as a light source, it has a relatively long life compared to a discharge lamp, and the frequency of maintenance work such as replacing the discharge lamp can be reduced. Furthermore, because the light source is divided into two, the first light source unit 10-1 and the second light source unit 10-2, even if the number of mounted ultraviolet LEDs increases according to the required illuminance, the installation area for the ultraviolet LEDs in each light source unit can be secured, and the size of the device can be prevented from increasing. Also, because the light source is divided into the first light source unit 10-1 and the second light source unit 10-2, the cooling capacity required for the cooling units (first cooling unit 50-1, second cooling unit 50-2) that cool the individual light source units can be reduced, and the size and cost of the cooling units can be suppressed. In addition, the first ultraviolet light L1, the second ultraviolet light L2, and the third ultraviolet light L3 are mixed together by reflection on the inner surface 30A of the light tunnel 30, thereby improving the uniformity of the illuminance and the spectrum in the irradiation area D.

[0031] In the light source device 1A of this embodiment, the first light source unit 10-1 and the second light source unit 10-2 respectively emit the first ultraviolet ray L1 and the second ultraviolet ray L2 at an emission angle at which multiple reflections occur on the inner surface 30A of the light tunnel 30.

[0032] According to this configuration, multiple reflections of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 are induced on the inner surface 30A of the light tunnel 30, thereby further improving the uniformity of the illuminance and the spectral distribution in the irradiation area D.

[0033] 2. Second embodiment In the first embodiment, a light source device 1A has been described in which the mixing optical system 40 includes a beam splitter 400. In the present embodiment, a light source device 1B will be described in which the mixing optical system 40 includes a dichroic mirror 410. In the description of the second embodiment, the elements described in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

[0034] Fig. 9 is a perspective view that shows a schematic example of the configuration of a light source device 1B according to this embodiment, and Fig. 10 is a cross-sectional view that shows a schematic example of the internal configuration of the light source device 1B. 9 and 10, in the light source device 1B, the dichroic mirror 410 as an example of the mixing optical system 40 is provided inside the light tunnel 30. As in the first embodiment, the dichroic mirror 410 is disposed at an intersection Ba where the first optical axis K1 of the first ultraviolet ray L1 and the second optical axis K2 of the second ultraviolet ray L2 intersect at right angles, in a position inclined at 45 degrees with respect to the first optical axis K1 and the second optical axis K2.

[0035] FIG. 11 is a diagram showing the transmission characteristic and reflection characteristic of the dichroic mirror 410 of this embodiment. Dichroic mirror 410 has a designed incident angle of 45 degrees for transmission and reflection, and has the property of reflecting ultraviolet light in a wavelength band of approximately 356 nm or less and transmitting ultraviolet light in a wavelength band of approximately 356 nm or more, as shown in FIG. 11. 3, the first light source unit 10-1 is provided with an ultraviolet LED having a central wavelength of 340 nm or less, and the first light source unit 10-1 is optimally configured as a light source that utilizes the reflection of the dichroic mirror 410. The second light source unit 10-2 is provided with an ultraviolet LED having a central wavelength of 365 nm or more, and the second light source unit 10-2 is optimally configured as a light source that utilizes the transmission of the dichroic mirror 410.

[0036] Therefore, by making the second ultraviolet ray L2 of the second light source unit 10-2 incident on the first surface 410P1, which receives transmitted light, and making the first ultraviolet ray L1 of the first light source unit 10-1 incident on the second surface 410P2, which receives reflected light, of the first surface 410P1 and second surface 410P2 of the dichroic mirror 410, loss due to the dichroic mirror 410 is reduced, and the third ultraviolet ray L3 is efficiently obtained.

[0037] Here, in this embodiment, the second light source unit 10-2 is not disposed in the second inlet 300M2 formed on the side surface of the light tunnel 30, but the first light source unit 10-1 that emits the first ultraviolet ray L1 having a shorter wavelength than the second ultraviolet ray L2 of the second light source unit 10-2. That is, the dichroic mirror 410 is installed in such a position that the second surface 410P2 faces the side surface of the light tunnel 30 and faces the outlet 300Q. Furthermore, in the light tunnel 30 of this embodiment, the secondary cylinder body 300S is not provided in the second inlet 300M2, and the first light source unit 10-1 is directly disposed in the second inlet 300M2. Therefore, the distance from the first light source unit 10-1 to the outlet 300Q (irradiation area D) is shorter than the distance from the second light source unit 10-2 to the outlet 300Q (irradiation area D).

[0038] In general, semiconductor light sources such as LEDs have lower luminous efficiency as the wavelength of the light they emit becomes shorter, and therefore consume more power to produce a certain amount of light. In contrast, according to the light source device 1B, the first light source unit 10-1, which has a shorter wavelength, is positioned closer to the irradiation area D than the second light source unit 10-2, so that the desired amount of first ultraviolet light L1 can be obtained with less power, thereby realizing a highly efficient light source device 1B.

[0039] FIG. 12 is a plan view showing an example of the two LED substrates 100 included in the first light source unit 10-1. As described above, each of the two LED substrates 100 has a central region 110R, and a plurality of first ultraviolet LEDs are arranged in one central region 110R, and a plurality of second ultraviolet LEDs are arranged in the other central region 110R. In addition, as shown in Fig. 12, the LED substrate 100 of this embodiment is provided with reflectors 120 on both sides of the central region 110R, which reflect the second ultraviolet ray L2 emitted by the second light source unit 10-2 and the first ultraviolet ray L1 emitted by the first light source unit 10-1. The reflector 120 is an example of a "reflecting portion" in this disclosure, and is, for example, a metal plate such as aluminum. Since the dichroic mirror 410 has a relatively high transmittance, a part of the second ultraviolet ray L2 transmitted through the dichroic mirror 410 is incident on the LED substrate 100 of the first light source unit 10-1, as shown by the dashed arrow C2 in Fig. 10. The second ultraviolet ray L2 is reflected by the reflector 120 and emitted from the outlet 300Q as the third ultraviolet ray L3, thereby reducing loss of the second ultraviolet ray L2. The addition of the first ultraviolet ray L1 further increases the efficiency of the light source device 1B.

[0040] Furthermore, even if a portion of the second ultraviolet ray L2 that has passed through the dichroic mirror 410 enters the second inlet 300M2 in which the first light source unit 10-1 is arranged, since the secondary cylinder 300S is not provided, the second ultraviolet ray L2 does not enter the secondary cylinder 300S but is reflected by the reflector 120 installed at the second inlet 300M2. This prevents a decrease in uniformity in the irradiation area D due to a part of the second ultraviolet ray L2 entering the secondary cylinder 300S or being absorbed by the LED substrate 100 of the first light source unit 10-1, and maintains the uniformity of the illuminance. Note that, instead of providing the reflector 120, the same effect can be achieved by using a resist with high reflectivity against ultraviolet rays on the LED substrate 100. Although not shown in FIG. 4, the second light source unit 10-2 may be provided with a reflector such as the reflector 120.

[0041] Next, the measurement results of the illuminance and the optical spectrum in the irradiation area D will be described. The following measurements were performed with the forward current of the third to sixth ultraviolet LEDs included in the second light source unit 10-2 reduced to half that of the first embodiment (to be more precise, 350 mA).

[0042] 13 is a diagram showing the measurement results of the optical spectrum at each measurement point in the irradiation area D. The positions of each measurement point are the same as in the first embodiment. As shown in the figure, in the light source device 1B of this embodiment, similarly to the light source device 1A of the first embodiment, the relative intensities of the optical spectrum measured at each of the first measurement point DP1 to the fifth measurement point DP5 are all approximately equal, and therefore it can be seen that the optical spectrum is uniform in the irradiation area D.

[0043] FIG. 14 is a diagram showing measurement points of illuminance measurement in the irradiation area D and the illuminance measured values ​​at the measurement points. In light source device 1B of this embodiment, similarly to light source device 1A of the first embodiment, the illuminance uniformity in irradiation area D is required to be 90% or more from the illuminance measurement values ​​at each of the sixth measurement point DP6 to the fourteenth measurement point DP14. When the illuminance measurement values ​​in Fig. 14 are calculated according to the formula (uniformity=MIN value / MAX value x 100), the uniformity is approximately 93%, indicating that the illuminance is highly uniform. In addition, even when the forward current of the third ultraviolet LED to the sixth ultraviolet LED in the second light source unit 10-2 is lower than in the first embodiment, illuminance measurement values ​​equivalent to those in the first embodiment are obtained at each of the sixth measurement point DP6 to the fourteenth measurement point DP14, demonstrating that high efficiency is achieved.

[0044] 15 is a diagram showing the conformity of the third ultraviolet ray to the JIS wavelength range regulation. Note that, as in the first embodiment, the wavelength range regulation is the regulation of the JIS A 1501A method "Accelerated weather resistance test method using metal halide lamps for resin fittings." As shown in the figure, in this embodiment as well, like the first embodiment, it is shown that all of the first measurement point DP1 to the fifth measurement point DP5 comply with the JIS wavelength range regulations.

[0045] Furthermore, the inventors performed measurements by shortening the overall length of the cylindrical body 300 (i.e., the distance from the first inlet 300M1 to the outlet 300Q) in the configuration of the light source device 1B. In this case, the distance from the intersection Ba (the second inlet 300M2) to the outlet 300Q is also shortened. As a result of this measurement, it was found that, regardless of whether the total length of the cylindrical body 300 is 140.5 mm (the distance between the intersection point Ba and the exit port 300Q is 75 mm), 120.5 mm (the distance between the intersection point Ba and the exit port 300Q is 55 mm), 100.5 mm (the distance between the intersection point Ba and the exit port 300Q is 35 mm), or 51 mm (the distance between the intersection point Ba and the exit port 300Q is 25 mm), the uniformity of the spectral distribution in the irradiation area D and the state of compliance with the JIS wavelength range regulations are not affected even if the total length of the cylindrical body 300 is shortened.

[0046] On the other hand, when the overall length is shortened, the uniformity of the illuminance is affected due to differences in the positions of the first light source unit 10-1 and the second light source unit 10-2 as viewed from the irradiation area D and an increase in the direct light component that reaches the irradiation area D without being reflected by the inner surface 30A of the light tunnel 30; however, it was found that a uniformity of 90% or more can be obtained at any overall length.

[0047] As described above, the light source device 1B of this embodiment has the same effects as the light source device 1A of the first embodiment.

[0048] In addition, in light source device 1B of the present embodiment, of first light source unit 10-1 and second light source unit 10-2, the light source unit that emits ultraviolet light with a shorter wavelength (i.e., first light source unit 10-1) is disposed at second inlet 300M2.

[0049] According to this configuration, the first light source unit 10-1, which has a shorter wavelength, is positioned closer to the irradiation area D than the second light source unit 10-2, so that the desired amount of light of the first ultraviolet ray L1 can be obtained with less power, thereby realizing a highly efficient light source device 1B.

[0050] In the light source device 1B of this embodiment, of the first light source unit 10-1 and the second light source unit 10-2, the light source unit that is arranged at the second inlet 300M2 (i.e., the first light source unit 10-1) is provided with a reflector 120 that reflects ultraviolet light emitted by the other light source unit (i.e., the second light source unit 10-2).

[0051] This configuration makes it possible to prevent the uniformity from decreasing in the illumination area D, and to maintain the uniformity of the illuminance. Also, the illuminance of the illumination area D can be increased, and a more efficient light source device 1B can be realized.

[0052] In the light source device 1B of this embodiment, the mixing optical system 40 includes a dichroic mirror 410.

[0053] According to this configuration, even when the mixing optical system 40 includes a dichroic mirror 410 having a relatively high transmittance, a light source device 1B can be obtained that maintains uniformity of illuminance and suppresses a decrease in efficiency of the light source device 1B.

[0054] 3. Third embodiment In this embodiment, an irradiation device 1000 will be described. The illumination device 1000 includes components of a plurality of light source devices 1A according to the first embodiment or a plurality of light source devices 1B according to the second embodiment, and achieves uniformity in illuminance and spectrum equivalent to those of the light source devices 1A and 1B while expanding the area of ​​the illumination area D more than the light source device 1A or the light source device 1B alone.

[0055] The irradiation device 1000 will be described in detail below. In this embodiment, an irradiation device 1000 including components of a plurality of light source devices 1B according to the second embodiment will be described. In the description of this embodiment, the components described in the first or second embodiment are given the same reference numerals, and the description thereof will be omitted.

[0056] Fig. 16 is a perspective view of the irradiation device 1000 according to this embodiment as viewed from above. Fig. 17 is a perspective view of the external configuration of the irradiation device 1000 as viewed from below. Fig. 18 is an exploded perspective view of the irradiation device 1000. The irradiation device 1000 includes a cylindrical external housing 2 as shown in FIG. 16 and FIG. 17, and a light source device 1C is provided inside the external housing 2 as shown in FIG. 18. In this embodiment, the cross-sectional shape of the external housing 2 is rectangular, but may be other shapes. The external housing 2 is made of a plate material having high rigidity, such as an alloy plate. A bottom plate 3 is attached to the bottom surface portion 2A of the external housing 2 as shown in FIG. 17, and an exit opening 3A for emitting the third ultraviolet ray L3 is opened in the bottom plate 3. The top surface portion 2B of the external housing 2 is an open end as shown in FIG. 16, and air and the wiring of the LED board can flow between the inside and outside of the external housing 2. In addition, a gripping portion 5 that is gripped by an operator during transportation is provided on the side of the external housing 2.

[0057] FIG. 19 is a vertical cross-sectional view of a light source device 1C according to this embodiment. As shown in FIG. 19, similar to the light source device 1A according to the first embodiment and the light source device 1B according to the second embodiment, the light source device 1C includes a first light source unit 10-1 that emits a first ultraviolet ray L1, a second light source unit 10-2 that emits a second ultraviolet ray L2 that has at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet ray L1, a light tunnel 30 that guides each of the first ultraviolet ray L1 and the second ultraviolet ray L2, and a mixing optical system 40 that is provided inside the light tunnel 30 and mixes the first ultraviolet ray L1 and the second ultraviolet ray L2, and irradiates the third ultraviolet ray L3 mixed by the mixing optical system 40 from the light tunnel 30.

[0058] Similarly to light source device 1B according to the second embodiment, light source device 1C according to the present embodiment includes a dichroic mirror 410 as an example of a mixing optical system 40. Additionally, similar to light source device 1B according to the second embodiment, light source device 1C includes a first light source unit 10-1 disposed at second inlet 300M2 provided on a side surface of light tunnel 30, and a second light source unit 10-2 disposed at first inlet 300M1 provided at end 300T2 of light tunnel 30. A window plate 4 is disposed at the other end 300T1 of the light tunnel 30, and the window plate 4 is made of a material that is transparent to at least the wavelength of the third ultraviolet light L3, such as quartz glass.

[0059] Fig. 20 is a plan view of the irradiation device 1000 viewed from the bottom, and Fig. 21 is a perspective view of the irradiation device 1000 viewed from the bottom. Note that the bottom plate 3 of the irradiation device 1000 and the window plate 4 of the light source device 1C are omitted in Figs. 20 and 21. As shown in Figs. 20 and 21, the light tunnel 30 of the light source device 1C has its interior partitioned into a plurality of (four in this embodiment) cylindrical bodies 300 by partition units 60 each consisting of a plurality of reflectors 61. Each cylindrical body 300 of this embodiment has a configuration similar to that of the cylindrical body 300 of the first and second embodiments. That is, each cylindrical body 300 is cylindrical with a constant cross-sectional area and cross-sectional shape in the axial direction, and the cross-sectional shape is rectangular. The cross-sectional shape of the cylindrical body 300 is not limited to a rectangular shape. Furthermore, the multiple cylindrical bodies 300 included in the light tunnel 30 have the same cross-sectional area, but may have different cross-sectional areas or different cross-sectional shapes.

[0060] 19, in the irradiation device 1000, the second ultraviolet ray L2 is introduced from the second light source unit 10-2 arranged at the first inlet 300M1 into each of the multiple cylinders 300. The irradiation device 1000 also includes a first light source unit 10-1 and a dichroic mirror 410 for each of the multiple cylinders 300, and a second inlet 300M2 is opened for each of the multiple cylinders 300 on the side of the light tunnel 30, and the first light source unit 10-1 is arranged at each second inlet 300M2, and the first ultraviolet ray L1 of the first light source unit 10-1 is introduced from each second inlet 300M2. Inside each cylindrical body 300, the first ultraviolet ray L1 is multiple-reflected while passing through the dichroic mirror 410 and mixed with the second ultraviolet ray L2, and the third ultraviolet ray L3 obtained by mixing, the first ultraviolet ray L1, and the second ultraviolet ray L2 are multiple-reflected while reaching the end portion 300T1 and are emitted to the outside. Therefore, the illuminance and spectral distribution are uniform in each area irradiated by the third ultraviolet ray L3 of each cylindrical body 300. Then, these areas are adjacent to each other to form the irradiation area D of the irradiation device 1000, so that the uniformity of the illuminance and spectral distribution can be maintained while expanding the area of ​​the irradiation area D.

[0061] In addition, by dividing the interior of the light tunnel 30 into multiple cylindrical bodies 300, the cross-sectional area of ​​each cylindrical body 300 is reduced and the number of multiple reflections of the first ultraviolet light L1, the second ultraviolet light L2, and the third ultraviolet light L3 inside each cylindrical body 300 is increased, so that the overall length of the light tunnel 30 can be shortened while maintaining the uniformity of the illuminance and spectral distribution in the irradiation area D.

[0062] Next, the details of the irradiation device 1000 will be described. As described above, the light source device 1C includes a partition unit 60 inside the light tunnel 30, which partitions the interior of the light tunnel 30 into a plurality of cylinders 300. In this embodiment, the parts of the partition unit 60 are fixed to each other and the partition unit 60 is fixed to the light tunnel 30 using an insertion structure between members rather than fastening members such as screws or bolts.

[0063] FIG. 22 is an assembly diagram of the partition unit 60 and the light tunnel 30. As shown in FIG. As shown in the figure, the partition unit 60 includes two rectangular reflectors 61, 61, and an insertion slit 62 is formed in each of the reflectors 61, 61, extending along the central axis of the reflector 61 to the center 61O of the reflector 61. The two reflectors 61 are inserted into each other's insertion slits 62, and the partition unit 60 that divides the light tunnel 30 into four cylinders 300 is assembled by an insertion structure.

[0064] The light tunnel 30 includes two reflectors 31, 31 bent into an L-shape in plan view, and the two reflectors 31, 31 are fastened to each other facing each other to assemble the hollow light tunnel 30 having a rectangular cross section. In detail, the fastening structure of the reflectors 31, 31 includes a bent piece 32 bent outward into an L-shape and an abutment piece 33 that abuts against the bent piece 32 of the other reflector 31 on the edge 31A of the two reflectors 31, 31. The bent piece 32 of one reflector 31 and the abutment piece 33 of the other reflector 31 are firmly fastened together by fastening means such as bolts or screws.

[0065] Further, a plurality of insertion pieces 63 are formed on the edge portion 61A of the reflecting plates 61, 61 constituting the partition unit 60. Meanwhile, in the light tunnel 30, insertion holes 34 into which the insertion pieces 63 of the partition unit 60 are inserted are also formed in the surfaces of the two reflecting plates 31, 31. Then, by fastening the two reflectors 31, 31 together while sandwiching the partition unit 60 so that the insertion piece 63 of the partition unit 60 is inserted into the insertion hole 34 of the reflectors 31, 31, the partition unit 60 is fixed to the light tunnel 30 by an insertion structure.

[0066] In this way, by using a plug-in structure rather than fastening members such as screws or bolts to fix each reflector 61 of the partition unit 60 to each other and to fix the partition unit 60 to the light tunnel 30, low-reflection points due to the fastening members are not included on the inner surface of any of the cylindrical bodies 300 of the light tunnel 30, and loss of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 during multiple reflection is reduced.

[0067] In this embodiment, the dichroic mirror 410 is fixed to each cylinder 300 by an adhesive. In this case, a flange may be provided on the edge of the dichroic mirror 410, and the flange may be fixed to the reflectors 31, 31 of the light tunnel 30 or the reflectors 61, 61 of the partition unit 60 by an insertion structure.

[0068] In addition, in this embodiment, the above-mentioned light tunnel 30 is fixed by fastening a fixing piece 70 to the abutment piece 33 for fastening the reflectors 31, 31 together, and then fastening this fixing piece 70 to the external housing 2, as shown in Figure 18 above.

[0069] Here, similar to the light source device 1A of the first embodiment and the light source device 1B of the second embodiment, the irradiation device 1000 includes a first cooling unit 50-1 that cools the first light source unit 10-1 and a second cooling unit 50-2 that cools the second light source unit 10-2, as shown in FIG. 18. In this embodiment, the first light source unit 10-1 is fixed to the first cooling unit 50-1, and the second light source unit 10-2 is fixed to the second cooling unit 50-2. The first cooling unit 50-1 and the second cooling unit 50-2 are both fixed to the external housing 2, not to the light tunnel 30. Therefore, the loads of the first cooling unit 50-1 and the second cooling unit 50-2, and the first light source unit 10-1 and the second light source unit 10-2 are not applied to the light tunnel 30. This prevents the light tunnel 30 and the partition unit 60 from bending or becoming damaged, even if a low-rigidity material such as aluminum plate is used for the reflectors 31, 31 of the light tunnel 30 and the reflectors 61, 61 of the partition unit 60. Furthermore, since there is no need to increase the rigidity of the light tunnel 30 by, for example, using the partition unit 60, the thickness of each reflector 61, 61 of the partition unit 60 can be made thinner, and the effect on the illuminance and spectral spectrum of shadows cast in the irradiation area D by the thickness of each reflector 61, 61 can be reduced.

[0070] In this embodiment, a water-cooled unit is used as the first cooling unit 50-1, and an air-cooled unit is used as the second cooling unit 50-2. 18, the first cooling unit 50-1 includes a water-cooled heat sink 501A in which cooling water circulates, an inlet port 501B for introducing cooling water into the water-cooled heat sink 501A, and a drain port 501C for draining the cooling water from the water-cooled heat sink 501A, and the first light source unit 10-1 is fixed to the water-cooled heat sink 501A. In the first cooling unit 50-1, the water-cooled heat sink 501A is provided with a plurality of supports 501D, and each support 501D is fixed to a first support plate 80 fixed to a side surface of the external housing 2, thereby fixing the first cooling unit 50-1 to the external housing 2.

[0071] 23 is a perspective view of the irradiation device 1000 as viewed from the top side. Note that in this drawing, the second support plate 81 included in the irradiation device 1000 is omitted. 18, the second cooling unit 50-2 includes one or more (two in this embodiment) air-cooled heat sinks 502A provided with a large number of heat dissipation fins, and an axial fan 502B that blows cooling air to the air-cooled heat sink 502A. In the second cooling unit 50-2, as shown in Fig. 18 and Fig. 23, the air-cooled heat sink 502A is fixed to the external housing 2 by a support rod 502C, and as shown in Fig. 18, the axial fan 502B is fixed to a second support plate 81 fixed to the upper surface 2B of the external housing 2, thereby fixing the second cooling unit 50-2 to the external housing 2.

[0072] As described in the second embodiment, the first light source unit 10-1 consumes more power and generates more heat because it includes LEDs that emit ultraviolet light with a shorter wavelength than the second light source unit 10-2. In addition, the first light source unit 10-1 of this embodiment emits the second ultraviolet light L2 to be introduced into each of the multiple cylindrical bodies 300, so the number and density of ultraviolet LEDs are larger than those of the first light source unit 10-1 of the first and second embodiments, and heat generation also increases significantly. In contrast, in this embodiment, the cooling method for the first light source unit 10-1 is a water-cooling method, which can achieve higher cooling performance than an air-cooling method. Therefore, even if the first light source unit 10-1 generates a large amount of heat, it can be sufficiently cooled, and a decrease in efficiency of the first light source unit 10-1 due to heat generation is suppressed.

[0073] On the other hand, in this embodiment, the second light source unit 10-2, as shown in FIG. 20, has a plurality of LED substrate groups 100G, each of which corresponds one-to-one to one of the plurality of cylindrical bodies 300, and the second ultraviolet ray L2 emitted from the corresponding one of the LED substrate groups 100G is introduced into one cylindrical body 300.

[0074] FIG. 24 is a plan view of the LED board group 100G. One LED substrate group 100G includes a plurality of (six in this embodiment) LED substrates 101. A fastening hole 101H is provided in the surface of each LED substrate 101, and the LED substrate 101 is fastened to a base plate 102 (FIG. 20) by inserting a fastening member such as a screw into the hole 101H. Note that, by applying thermally conductive grease or sandwiching a thermally conductive sheet between the LED substrate 101 and the base plate 102, heat generated from the LEDs is dissipated to an air-cooled heat sink. One LED substrate group 100G corresponds to the LED substrate 100 of the first and second embodiments, and includes four types of ultraviolet LEDs, namely, a third ultraviolet LED, a fourth ultraviolet LED, a fifth ultraviolet LED, and a sixth ultraviolet LED, like the LED substrate 100. The ultraviolet LEDs in the LED substrate 100 may be arranged as appropriate.

[0075] The LED boards 101 have the same shape and dimensions in a plan view (i.e., congruent shapes), and the LED boards 101 of this embodiment include a rectangular portion 103 and an engagement portion 104. The rectangular portion 103 is a portion of the LED board 101 that is rectangular in a plan view.

[0076] On the other hand, the engagement shape portion 104 is a portion that is continuous with one side of the rectangular portion 103. The shape of this engagement shape portion 104 in plan view is linearly symmetrical with respect to the center line 101C of the LED substrate 101, and is shaped to form a receiving portion δ, which is a gap having a shape corresponding to the outline of the engagement shape portion 104, between the engagement shape portion 104 of another horizontally adjacent LED substrate 101. In FIG. 24, the shape of the receiving portion δ is indicated by a double-chain line.

[0077] By providing each LED board 101 with the rectangular portion 103, the LED boards 101 can be arranged side by side with almost no gaps, and the light emitting area of ​​the second light source unit 10-2 can be easily expanded in the horizontal direction. Also, by engaging the engagement shape portion 104 of another LED board 101 in an upside-down position with each receiving portion δ formed by two LED boards 101 arranged side by side, the light emitting area of ​​the second light source unit 10-2 can be easily expanded in the vertical direction.

[0078] Here, the engaging shape portion 104 of this embodiment includes a protrusion 104A and a shoulder portion 104B. The shape of the shoulder portion 104B in plan view is inclined at a predetermined angle α (α=30 degrees in this embodiment) from the rectangular portion 103 to the protrusion portion 104A with respect to the center line 101C, and the shape of the protrusion portion 104A in plan view is a V-shape consisting of two sides 104A1 whose tip portions are inclined at the same angle α as the shoulder portion 104B. Providing each LED board 101 with such an engaging shape portion 104 can increase the variety of arrangements of the LED boards 101. Specifically, depending on how the engaging shape portions 104 of the multiple LED boards 101 are engaged with each other, for example, as shown in arrangement mode A in Fig. 25, two upside-down LED boards 101 can be arranged vertically in a straight line, or as shown in arrangement mode B in Fig. 25, multiple LED boards 101 can be arranged in a star shape.

[0079] As described above, the light source device 1C of the present embodiment includes the partition unit 60 that partitions the inside of the light tunnel 30 into a plurality of cylinders 300. According to this configuration, the illuminance and spectral distribution are uniform in the areas irradiated by the individual cylindrical bodies 300, and by these areas being adjacent to each other to form an irradiation area D, the area of ​​the irradiation area D is expanded, while the illuminance is made higher than that of the light source device 1B of the second embodiment, and the uniformity of the spectral distribution is maintained. The irradiation device 1000 equipped with such light source device 1C has an illuminance (approximately 150 mW / cm) that is approximately three times that of the light source device 1B. 2 ) to be achieved.

[0080] In addition, by dividing the interior of the light tunnel 30 into a plurality of cylinders 300, the cross-sectional area of ​​each cylinder 300 is reduced, and the number of times that the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 are multiple-reflected inside each cylinder 300 is increased. This makes it possible to shorten the overall length of the light tunnel 30 while maintaining the uniformity of the illuminance and spectral distribution in the irradiation area D.

[0081] In the light source device 1C of this embodiment, the partition unit 60 includes a plurality of reflecting plates 61, and the plurality of reflecting plates 61 are fixed to each other by an insert structure. With this configuration, the fastening members do not cause low reflection points on the inner surface of any of the cylindrical bodies 300, and loss of the first ultraviolet ray L1, the second ultraviolet ray L2, and the third ultraviolet ray L3 due to multiple reflections can be reduced.

[0082] The irradiation device 1000 of this embodiment includes a light source device 1C, a first cooling unit 50-1 that cools the first light source unit 10-1, a second cooling unit 50-2 that cools the second light source unit 10-2, and an external housing 2 that houses the light source device 1C, and the first cooling unit 50-1 and the second cooling unit 50-2 are fixed to the external housing 2. With this configuration, even if a low-rigidity material such as aluminum plate is used for the reflectors 31, 31 of the light tunnel 30 and the reflectors 61, 61 of the partition unit 60, bending or damage to the light tunnel 30 and the partition unit 60 is prevented. Furthermore, since there is no need to increase the rigidity of the light tunnel 30 by, for example, using the partition unit 60, the thickness of each reflector 61, 61 of the partition unit 60 can be made thinner, and the effect on the illuminance and spectral spectrum of shadows cast in the irradiation area D by the thickness of each reflector 61, 61 can be reduced.

[0083] In the third embodiment, the illumination device 1000 includes a plurality of light source devices 1A, a plurality of light source devices 1B, or a plurality of light source devices 1C, and the surface area of ​​the illumination area D may be expanded by housing the plurality of light source devices 1A, a plurality of light source devices 1B, or a plurality of light source devices 1C in an external housing 2 with the light tunnels 30 of the light tunnels 30 connected in a contacting state.

[0084] Moreover, the irradiation device 1000 may include elements of a plurality of light source devices 1A according to the first embodiment, instead of the light source device 1B according to the second embodiment. In this case, for example, as shown in FIG. 26, a plurality of (two in the illustrated example) light source devices 1A may be arranged side by side, and the light tunnels 30 of the light source devices 1A may be connected in a state of contact with each other to form an irradiation device 1000A. For example, as shown in FIG. 27, a pair of light source devices 1A may be arranged opposite each other, and the light tunnels 30 of the light source devices 1A may be connected in a state of contact with each other to form an irradiation device 1000B. Moreover, the irradiation device 1000A and the irradiation device 1000B may include an external housing 2, and each light source device 1A may be housed in the external housing 2, and the first cooling unit 50-1 and the second cooling unit 50-2 may be fixed to the external housing 2.

[0085] 4. Variations The following are examples of modified forms that can be added to each of the above-described embodiments. Two or more forms selected from the following examples may be combined as appropriate within the scope of not being mutually contradictory.

[0086] The relative intensity of the spectrum of the third ultraviolet ray L3 may be dynamically changed by the light source control device adjusting the brightness of each type of ultraviolet LED included in the first light source unit 10-1 and the second light source unit 10-2.

[0087] A light source system that illuminates a larger illumination area D may be configured by arranging a plurality of light source devices 1A or a plurality of light source devices 1B in parallel. Moreover, the irradiation area D may be increased by increasing the cross-sectional size of the light tunnel 30 of the light source device 1A or the light source device 1B.

[0088] In each of the first light source unit 10-1 and the second light source unit 10-2, a configuration may be adopted in which a larger number of ultraviolet LEDs are mounted at a higher density on the LED substrate 100 to obtain a higher illuminance.

[0089] The ultraviolet LEDs included in each of the first light source unit 10-1 and the second light source unit 10-2 may be bare chip type instead of package type. In this case, a substrate on which the bare chip type ultraviolet LEDs are mounted may be used as the LED substrate 100.

[0090] The wavelength range of the semiconductor light source included in each of the first light source unit 10-1 and the second light source unit 10-2 is not limited to the range of 325 nm to 405 nm described in the first and second embodiments. That is, the wavelength range of the semiconductor light source may be the UV-C range, the visible light range, or the infrared range of less than 300 nm. [Explanation of symbols]

[0091] 1A...light source device, 1B...light source device, 1C...light source device, 10-1...first light source unit, 2...external housing, 10-2...second light source unit, 50-1...first cooling unit, 50-2...second cooling unit, 30...light tunnel, 30A...inner surface, 40...mixing optical system, 60...compartment unit, 61...reflector, 100...LED board, 110...mounting board, 110R...central region, 120...reflector, 300...cylinder, 300M1...first inlet, 300M2...second inlet, 300Q...exit, 400...beam splitter, 410...dichroic mirror, 1000...irradiation device, D...irradiation area, K1...first optical axis, K2...second optical axis, L1...first ultraviolet ray, L2...second ultraviolet ray, L3...third ultraviolet ray.

Claims

1. a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and configured to emit second ultraviolet light having at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet light; a light tunnel that guides each of the first ultraviolet light and the second ultraviolet light; a mixing optical system provided inside the light tunnel, mixing the first ultraviolet light and the second ultraviolet light to obtain a third ultraviolet light; a partition unit that partitions the inside of the light tunnel into a plurality of cylinders, The inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet ray, the second ultraviolet ray, and the third ultraviolet ray, and the third ultraviolet ray mixed by the mixing optical system is emitted from the light tunnel. Light source device.

2. a light source unit that emits ultraviolet light having a shorter wavelength out of the first light source unit and the second light source unit, and the mixing optical system are provided for each of the plurality of cylinders; A second inlet is opened on a side surface of the light tunnel for each of the plurality of cylinders, and the light source unit is disposed in each of the second inlets. The light source device according to claim 1 .

3. The partition unit comprises: Equipped with a plurality of reflectors, The plurality of reflectors are fixed to each other by an insert structure. The light source device according to claim 1 .

4. a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and configured to emit second ultraviolet light having at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet light; a light tunnel that guides each of the first ultraviolet light and the second ultraviolet light; a mixing optical system provided inside the light tunnel, the mixing optical system mixing the first ultraviolet light and the second ultraviolet light to obtain a third ultraviolet light, an inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet light, the second ultraviolet light, and the third ultraviolet light, and the third ultraviolet light mixed by the mixing optical system is emitted from the light tunnel; the second light source unit includes a plurality of LED substrates that emit the second ultraviolet light, Each of the plurality of LED boards includes a rectangular portion and an engagement portion, The rectangular portion is a portion having a rectangular shape in a plan view, The engagement portion is a portion that is continuous with one side of the rectangular portion, The engaging shape portion of another LED board in an upside-down position engages with a gap between the engaging shape portions of two adjacent LED boards. Light source device.

5. a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and configured to emit second ultraviolet light having at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet light; a light tunnel that guides each of the first ultraviolet light and the second ultraviolet light; a mixing optical system provided inside the light tunnel, the mixing optical system mixing the first ultraviolet light and the second ultraviolet light to obtain a third ultraviolet light, an inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet light, the second ultraviolet light, and the third ultraviolet light, and the third ultraviolet light mixed by the mixing optical system is emitted from the light tunnel; the light tunnel includes a hollow cylinder extending linearly and having an exit port for emitting the third ultraviolet light opening at one end, a first inlet for introducing one of the first ultraviolet ray and the second ultraviolet ray is opened at the other end of the cylindrical body; a second inlet for introducing the other of the first ultraviolet ray and the second ultraviolet ray is opened on a side surface of the cylindrical body; Of the first light source unit and the second light source unit, the light source unit that emits ultraviolet light having a shorter wavelength is disposed at the second inlet, Of the first light source unit and the second light source unit, the light source unit disposed at the second inlet includes a reflecting portion that reflects ultraviolet light emitted by the other light source unit. Light source device.

6. The first light source unit and the second light source unit each include The first ultraviolet light and the second ultraviolet light are emitted within a radiation angle range in which multiple reflection occurs on an inner surface of the light tunnel. The light source device according to any one of claims 1 to 5.

7. The mixing optical system includes a dichroic mirror. The light source device according to any one of claims 1 to 5.

8. A plurality of light source devices according to any one of claims 1 to 5; an external housing that houses the plurality of light source devices whose light tunnels are connected to each other; An irradiation device comprising:

9. A light source device; A first cooling unit; A second cooling unit; an external housing that houses the light source device; The light source device is a first light source unit including one or more types of semiconductor light sources and emitting a first ultraviolet ray; a second light source unit including one or more types of semiconductor light sources and configured to emit second ultraviolet light having at least one of a central wavelength and a spectral spectrum different from that of the first ultraviolet light; a light tunnel that guides each of the first ultraviolet light and the second ultraviolet light; a mixing optical system provided inside the light tunnel, the mixing optical system mixing the first ultraviolet light and the second ultraviolet light to obtain a third ultraviolet light, an inner surface of the light tunnel is a reflective surface that reflects the first ultraviolet light, the second ultraviolet light, and the third ultraviolet light, and the third ultraviolet light mixed by the mixing optical system is emitted from the light tunnel; The first cooling unit cools the first light source unit, The second cooling unit cools the second light source unit, The first cooling unit and the second cooling unit are fixed to the external housing. An irradiation device characterized by:

10. The first cooling unit is water-cooled, The second cooling unit is an air-cooled type, The central wavelength of the first ultraviolet ray is shorter than the central wavelength of the second ultraviolet ray.

10. Irradiation device according to claim 9.

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