Sensor, sensor system, and electronic apparatus

Abstract

To provide a sensor, a sensor system, and an electronic apparatus that can improve characteristics.SOLUTION: According to an embodiment, a sensor includes a base body, an inner structure, a fixation part, a movable part supported on the fixation part, a plurality of fixation electrodes, and a plurality of connection members. A fixation part is provided around the inner structure centered on a first center of the inner structure. The movable part includes a first annular part and a first connection part. The first annular part is provided around the fixation part centered on the fixation part. The first connection part connects the first annular part to the fixation part. The plurality of fixation electrodes includes a first fixation electrode and a first opposite fixation electrode. The inner structure includes a first conductive part. The first conductive part includes a first area and a first opposite area. The plurality of connection members include a first connection member and a first opposite connection member. The first connection member electrically connects the first area and the first fixation electrode to each other. The first opposite connection member electrically connects the first opposite area and the first opposite fixation electrode to each other.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] SUMMARY OF THE DISCLOSURE FIELD OF THE DISCLOSURE Embodiments of the invention relate to sensors, sensor systems and electronic devices. [Background technology]

[0002] For example, there is a sensor having a MEMS (Micro Electro Mechanical Systems) structure. In some cases, electronic devices are controlled by the force obtained by the sensor. It is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] U.S. Patent No. 7,040,163 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE DISCLOSURE Embodiments of the present invention provide sensors, sensor systems and electronic devices that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a base including a first surface, an inner structure fixed to the first surface, a fixed portion fixed to the first surface, a movable portion supported by the fixed portion, a plurality of fixed electrodes fixed to the first surface, and a plurality of connecting members. A first gap is provided between the first surface and the movable portion. The fixed portion is provided around the inner structure with a first center of the inner structure in a first plane along the first surface as a center. The movable portion includes a first annular portion and a first connecting portion. The first annular portion is provided around the fixed portion with the fixed portion as a center. The first connecting portion is provided between the fixed portion and the first annular portion. The first connecting portion directly or indirectly connects the first annular portion to the fixed portion. The plurality of fixed electrodes include a first fixed electrode and a first opposing fixed electrode facing the first annular portion. The first center is provided between the first fixed electrode and the first opposing fixed electrode. The inner structure includes a first conductive portion. The first conductive portion includes a first region and a first opposing region. The first center is provided between the first region and the first opposing region. The plurality of connection members include a first connection member and a first opposing connection member. The first connection member electrically connects the first region and the first fixed electrode. The first opposing connection member electrically connects the first opposing region and the first opposing fixed electrode. [Brief description of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Diagram 2] FIG. 2 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Diagram 3] FIG. 3 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Diagram 5] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic view illustrating an electronic device according to the second embodiment. [Figure 9] 9(a) to 9(h) are schematic views illustrating applications of the electronic device according to the embodiment. [Figure 10] 10(a) and 10(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2 and 3 are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2 is a cross-sectional view taken along the line A1-A2 in Fig. 1. Fig. 3 is a cross-sectional view taken along the line A3-A4 in Fig. 1. As shown in FIGS. 1 to 3, a sensor 110 according to the embodiment includes a base body 50s, an inner structure 60, a fixed part 10F, a movable part 10M, a plurality of fixed electrodes 30, and a plurality of connecting members 80.

[0008] 2 and 3, the base 50s includes a first surface 50a. The inner structure 60 is fixed to the first surface 50a. The fixed portion 10F is fixed to the first surface 50a. The movable portion 10M is supported by the fixed portion 10F. The plurality of fixed electrodes 30 are fixed to the first surface 50a.

[0009] 2 and 3, a first gap G1 is provided between the first surface 50a and the movable part 10M. For example, an insulating member 55 is provided on the first surface 50a. The inner structure 60 and the fixed part 10F are provided on the insulating member 55. No insulating member 55 is provided between the first surface 50a and the movable part 10M.

[0010] The movable part 10M is conductive. The movable part 10M may include, for example, conductive silicon. The fixed part 10F is conductive. The fixed part 10F may include, for example, conductive silicon. The fixed part 10F is electrically connected to the movable part 10M. The insulating member 55 may include, for example, silicon oxide.

[0011] 1, the inner structure 60 includes a first center 60C in a first plane PL1 along the first surface 50a. The fixing portion 10F is provided around the inner structure 60 with the first center 60C of the inner structure 60 as the center. The inner structure 60 is, for example, annular.

[0012] The direction perpendicular to the first plane PL1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. The first plane PL1 is parallel to the XY plane.

[0013] As shown in FIG. 1, the movable portion 10M includes a first annular portion 11 and a first connecting portion 21. The movable portion 10M may include a plurality of annular portions 10 and a plurality of connecting portions 20. The plurality of annular portions 10 may include a first annular portion 11 and a second annular portion 12, etc. The plurality of annular portions 10 may include an outer annular portion 10o. The first annular portion 11 may be the outermost of the plurality of annular portions 10. In this case, the first annular portion 11 corresponds to the outer annular portion 10o. The first annular portion 11 may be the innermost of the plurality of annular portions 10.

[0014] The multiple annular portions 10 are provided around the fixed portion 10F with the fixed portion 10F as the center. For example, the first annular portion 11 may be provided around the fixed portion 10F with the fixed portion 10F as the center.

[0015] The first connection portion 21 is included in the multiple connection portions 20. The multiple connection portions 20 connect two of the multiple annular portions 10. The multiple connection portions 20 may be along the radial direction Dr. The first connection portion 21 is provided between the fixed portion 10F and the first annular portion 11. The first connection portion 21 directly or indirectly connects the first annular portion 11 to the fixed portion 10F. In this example, the first connection portion 21 indirectly connects the first annular portion 11 to the fixed portion 10F via the second annular portion 12 and other connection portions 20. The multiple connection portions 20 (including the first connection portion 21) extend, for example, along the radial direction Dr.

[0016] The multiple fixed electrodes 30 include a first fixed electrode 31a and a first opposing fixed electrode 31b. The first fixed electrode 31a and the first opposing fixed electrode 31b face the first annular portion 11. The first fixed electrode 31a and the first opposing fixed electrode 31b may be located either inside or outside the first annular portion 11.

[0017] The first center 60C is provided between the first fixed electrode 31a and the first opposing fixed electrode 31b.

[0018] The inner structure 60 includes a first conductive portion 61L. The first conductive portion 61L includes a first region 61a and a first opposing region 61b. The first center 60C is provided between the first region 61a and the first opposing region 61b.

[0019] The multiple connection members 80 include a first connection member 81a and a first opposing connection member 81b. The first connection member 81a electrically connects the first region 61a and the first fixed electrode 31a. The first opposing connection member 81b electrically connects the first opposing region 61b and the first opposing fixed electrode 31b.

[0020] In the sensor 110, the first fixed electrode 31a and the first opposing fixed electrode 31b are electrically connected to each other via the first connecting member 81a, the first opposing connecting member 81b, and the first conductive portion 61L. These fixed electrodes are electrically connected to each other by the first conductive portion 61L having a small area. For example, even if the size of the sensor 110 is reduced, the intended operation can be stably obtained. According to the embodiment, a sensor capable of improving characteristics can be provided.

[0021] As shown in FIG. 1, a control unit 70 may be provided. The control unit 70 may supply an electric signal including an alternating current between the first conductive portion 61L and the fixed portion 10F. The electric signal causes an electrostatic force of an alternating current to act between the first fixed electrode 31a and the first annular portion 11, and between the first opposing fixed electrode 31b and the first annular portion 11. This allows the movable portion 10M (such as the first annular portion 11) to vibrate. For example, when an external force is applied to the vibrating movable portion 10M (such as the first annular portion 11), the vibration state changes. The change in the vibration state is based on, for example, Coriolis force. The external force can be detected by detecting the change in the vibration state. The movable portion 10M may be vibrated by another fixed electrode included in the multiple fixed electrodes 30, and the first fixed electrode 31a and the first opposing fixed electrode 31b may be used to detect the vibration state.

[0022] As described above, in the embodiment, the inner structure 60 provided inside the fixed portion 10F includes the first conductive portion 61L. Electrical connection is established via two regions (the first region 61a and the first opposing region 61b) included in the first conductive portion 61L. The first conductive portion 61L functions as a relay point for the electrical connection. The small area of ​​the first conductive portion 61L allows efficient electrical connection.

[0023] The plurality of connection members 80 may be, for example, bonding wires. The plurality of connection members 80 may include, for example, at least one selected from the group consisting of gold, silver, copper, and aluminum. The plurality of conductive parts 61 may include, for example, the same material as the material of the movable part 10M.

[0024] The first facing region 61b is electrically connected to the first region 61a. For example, the first facing region 61b may be continuous with the first region 61a. For example, the first conductive portion 61L may be annular with the first center 60C as the center.

[0025] 1, the first conductive portion 61L may further include a first connection region 61c. The first connection region 61c is continuous with the first region 61a and the first opposing region 61b. For example, at least a portion of the first connection region 61c extends along a circumferential direction Dc centered on the first center 60C.

[0026] FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. In FIG. 4, a portion of FIG. 1 is shown enlarged. As shown in FIG. 4, the radial direction Dr passes through the first center 60C and is along the first plane PL1 (XY plane). The length of at least a portion of the first region 61a in the radial direction Dr is defined as a first region length w61a. The length of at least a portion of the first facing region 61b in the radial direction Dr is defined as a first facing region length w61b. The length of at least a portion of the first connection region 61c in the radial direction Dr is defined as a first connection region length w61c. The first region length w61a is longer than the first connection region length w61c. The first facing region length w61b is, for example, longer than the first connection region length w61c.

[0027] By making the first region length w61a and the first opposing region length w61b long, the areas of these regions can be made large. Wires can be easily connected to these regions. Stable connections can suppress noise. For example, good electrical connections can be stably obtained even in small sizes.

[0028] 1, the multiple fixed electrodes 30 may further include a second fixed electrode 32a and a second opposing fixed electrode 32b. The second fixed electrode 32a and the second opposing fixed electrode 32b face the first annular portion 11. The first center 60C is provided between the second fixed electrode 32a and the second opposing fixed electrode 32b.

[0029] The inner structure 60 may further include a second conductive portion 62L. The second conductive portion 62L includes a second region 62a and a second opposing region 62b. The first center 60C is provided between the second region 62a and the second opposing region 62b.

[0030] The multiple connection members 80 include a second connection member 82a and a second opposing connection member 82b. The second connection member 82a electrically connects the second region 62a and the second fixed electrode 32a. The second opposing connection member 82b electrically connects the second opposing region 62b and the second opposing fixed electrode 32b.

[0031] The direction from the first fixed electrode 31a to the first opposing fixed electrode 31b is defined as a first direction Dx1. The direction from the second fixed electrode 32a to the second opposing fixed electrode 32b is defined as a second direction Dx2. The second direction Dx2 intersects with the first direction Dx1. For example, the first fixed electrode 31a and the first opposing fixed electrode 31b can generate vibrations along the first direction Dx1. Or, the first fixed electrode 31a and the first opposing fixed electrode 31b can detect vibrations along the first direction Dx1. For example, the second fixed electrode 32a and the second opposing fixed electrode 32b can generate vibrations along the second direction Dx2. Or, the second fixed electrode 32a and the second opposing fixed electrode 32b can detect vibrations along the second direction Dx2.

[0032] In the first reference example, the first fixed electrode 31a and the first opposing fixed electrode 31b are directly and electrically connected by one connection member. Furthermore, the second fixed electrode 32a and the second opposing fixed electrode 32b are directly and electrically connected by another connection member. In the first reference example, these connection members intersect with each other at the center of the annular portion 10. For example, these connection members are capacitively coupled to generate noise. In the first reference example, the high detection accuracy may become insufficient due to the influence of noise. Furthermore, in the first reference example, if the above connection members come into contact with each other and a short circuit occurs, a malfunction may occur.

[0033] In contrast, in the embodiment, the first fixed electrode 31a and the first opposing fixed electrode 31b are electrically connected via the first conductive portion 61L. The second fixed electrode 32a and the second opposing fixed electrode 32b are electrically connected via the second conductive portion 62L. In these electrical connections, capacitive coupling is suppressed. Noise is suppressed. In the embodiment, high-precision detection is possible. According to the embodiment, it is possible to provide a sensor with improved characteristics. In the embodiment, short circuits are suppressed, and malfunctions are suppressed.

[0034] In one example, the angle between the first direction Dx1 and the second direction Dx2 is greater than or equal to 80 degrees and less than or equal to 100 degrees. The angle between the first direction Dx1 and the second direction Dx2 may be substantially 90 degrees. For example, the angle may be other than 90 degrees. The second direction Dx2 may be inclined with respect to the first direction Dx1.

[0035] The second facing region 62b is electrically connected to the second region 62a. For example, the second facing region 62b may be continuous with the second region 62a.

[0036] The second conductive portion 62L may further include a second connection region 62c. The second connection region 62c is continuous with the second region 62a and the second opposing region 62b. At least a portion of the second connection region 62c extends along a circumferential direction Dc centered on the first center 60C. The second conductive portion 62L may be annular about the first center 60C. For example, the second conductive portion 62L is concentric with the first conductive portion 61L.

[0037] As shown in Fig. 4, the length of at least a portion of the second region 62a in the radial direction Dr is defined as the second region length w62a. The length of at least a portion of the second facing region 62b in the radial direction Dr is defined as the second facing region length w62b. The length of at least a portion of the second connection region 62c in the radial direction Dr is defined as the second connection region length w62c. The second region length w62a is longer than the second connection region length w62c. The second facing region length w62b is, for example, longer than the second connection region length w62c.

[0038] By making the second region length w62a and the second facing region length w62b long, the areas of these regions can be made large. Wires can be easily connected to these regions. Stable connections can suppress noise. For example, good electrical connections can be stably obtained even in small sizes.

[0039] In one example, the first region length w61a is 3 to 4 times the first connection region length w61c. The first facing region length w61b is 3 to 4 times the first connection region length w61c. The first region length w61a may be, for example, 130 μm to 280 μm. The first facing region length w61b may be, for example, 130 μm to 280 μm. The first connection region length w61c may be, for example, 20 μm to 130 μm.

[0040] In one example, the second region length w62a is 3 to 4 times the second connection region length w62c. The second facing region length w62b is 3 to 4 times the second connection region length w62c. The second region length w62a may be, for example, 130 μm to 280 μm. The second facing region length w62b may be, for example, 130 μm to 280 μm. The second connection region length w62c may be, for example, 20 μm to 130 μm.

[0041] At least a portion of the second region 62a may overlap with the first region 61a in the circumferential direction Dc centered on the first center 60C. At least a portion of the second region 62a may overlap with the first opposing region 61b in the circumferential direction Dc. At least a portion of the second opposing region 62b may overlap with the first region 61a in the circumferential direction Dc. At least a portion of the second opposing region 62b may overlap with the first opposing region 61b in the circumferential direction Dc.

[0042] For example, at least a portion of the second region 62a is provided between the first region 61a and the first opposing region 61b in the circumferential direction Dc centered on the first center 60C. For example, at least a portion of the first region 61a is provided between the second region 62a and the second opposing region 62b in the circumferential direction Dc. This makes it easy to provide these large-sized regions in a region with a small area.

[0043] For example, the second conductive portion 62L is concentric with the first conductive portion 61 L. The second conductive portion 62L may be annular with the first center 60C as the center.

[0044] 1, at least a portion of the second fixed electrode 32a is provided between the first fixed electrode 31a and the first opposing fixed electrode 31b in the circumferential direction Dc centered on the first center 60C. At least a portion of the first fixed electrode 31a is provided between the second fixed electrode 32a and the second opposing fixed electrode 32b in the circumferential direction Dc. These fixed electrodes 30 are aligned in the circumferential direction Dc.

[0045] In this example, the second conductive portion 62L is provided between the first center 60C and the first conductive portion 61 L. In an embodiment, the first conductive portion 61L may be provided between the first center 60C and the second conductive portion 62L.

[0046] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. 5, in a sensor 111 according to the embodiment, the multiple fixed electrodes 30 further include a third fixed electrode 33a and a third opposing fixed electrode 33b, etc. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0047] 5, in the sensor 111, the multiple fixed electrodes 30 further include a third fixed electrode 33a and a third opposing fixed electrode 33b. The third fixed electrode 33a and the third opposing fixed electrode 33b face the first annular portion 11.

[0048] The inner structure 60 further includes a third conductive portion 63L. For example, the third conductive portion 63L is between the first center 60C and the second conductive portion 62L. The third conductive portion 63L includes a third region 63a and a third opposing region 63b. The first center 60C is provided between the third region 63a and the third opposing region 63b.

[0049] The multiple connection members 80 further include a third connection member 83a and a third opposing connection member 83b. In FIG. 5, the first connection member 81a, the first opposing connection member 81b, the second connection member 82a, and the second opposing connection member 82b are omitted. The third connection member 83a electrically connects the third region 63a and the third fixed electrode 33a. The third opposing connection member 83b electrically connects the third opposing region 63b and the third opposing fixed electrode 33b. Electrical connection is achieved in a small area.

[0050] At least a portion of the third region 63a may overlap with the second region 62a in the circumferential direction Dc centered on the first center 60C. At least a portion of the third region 63a may overlap with the second opposing region 62b in the circumferential direction Dc. At least a portion of the third opposing region 63b may overlap with the second region 62a in the circumferential direction Dc. At least a portion of the third opposing region 63b may overlap with the second opposing region 62b in the circumferential direction Dc.

[0051] For example, at least a portion of the third region 63a is provided between the second region 62a and the second opposing region 62b in the circumferential direction Dc centered on the first center 60C. For example, at least a portion of the second region 62a is provided between the third region 63a and the third opposing region 63b in the circumferential direction Dc. This makes it easy to provide these large-sized regions in a region with a small area.

[0052] 5, in the sensor 111, the multiple fixed electrodes 30 may further include a fourth fixed electrode 34a and a fourth opposing fixed electrode 34b. The fourth fixed electrode 34a and the fourth opposing fixed electrode 34b face the first annular portion 11.

[0053] The inner structure 60 further includes a fourth conductive portion 64L. For example, the fourth conductive portion 64L is between the first center 60C and the third conductive portion 63L. The fourth conductive portion 64L includes a fourth region 64a and a fourth opposing region 64b. The first center 60C is provided between the fourth region 64a and the fourth opposing region 64b.

[0054] The plurality of connection members 80 may further include a fourth connection member 84a and a fourth opposing connection member 84b. The fourth connection member 84a electrically connects the fourth region 64a and the fourth fixed electrode 34a. The fourth opposing connection member 84b electrically connects the fourth opposing region 64b and the fourth opposing fixed electrode 34b. Electrical connection is achieved in a small area.

[0055] At least a portion of the fourth region 64a may overlap with the third region 63a in the circumferential direction Dc centered on the first center 60C. At least a portion of the fourth region 64a may overlap with the third opposing region 63b in the circumferential direction Dc. At least a portion of the fourth opposing region 64b may overlap with the third region 63a in the circumferential direction Dc. At least a portion of the fourth opposing region 64b may overlap with the third opposing region 63b in the circumferential direction Dc.

[0056] For example, at least a portion of the fourth region 64a is provided between the third region 63a and the third opposing region 63b in the circumferential direction Dc centered on the first center 60C. For example, at least a portion of the third region 63a is provided between the fourth region 64a and the fourth opposing region 64b in the circumferential direction Dc. This makes it easy to provide these large-sized regions in a region with a small area.

[0057] FIG. 6 is a schematic plan view illustrating the sensor according to the first embodiment. 6, in a sensor 112 according to the embodiment, the inner structure 60 further includes a fifth conductive portion 65L. Except for this, the configuration of the sensor 112 may be similar to the configuration of the sensor 111.

[0058] 6, in the sensor 112, the fifth conductive portion 65L includes a fifth region 65a and a fifth opposing region 65b. These regions do not need to be electrically connected. These regions may be used for electrical connection of other electrodes (or the movable portion 10M).

[0059] 6, in this example, the fourth conductive portion 64L further includes another connection region 64d. The other connection region 64d electrically connects the fourth region 64a and the fourth opposing region 64b. The other connection region 64d may be provided between the fifth region 65a and the fifth opposing region 65b. Various modifications may be applied to the inner structure 60.

[0060] FIG. 7 is a schematic plan view illustrating the sensor according to the first embodiment. 7 illustrates a fixed part 10F and a movable part 10M. In the sensor 120 according to the embodiment, at least one of the multiple fixed electrodes 30 includes multiple partial electrodes. The configuration of the sensor 120 other than this may be similar to the configuration of the sensor 110, etc.

[0061] In this example, at least one of the multiple fixed electrodes 30 is a first fixed electrode 31a. The first fixed electrode 31a includes multiple partial electrodes. The multiple partial electrodes include a first partial electrode 30a and a second partial electrode 30b. The first partial electrode 30a and the second partial electrode 30b are aligned in the circumferential direction Dc. In this example, two second partial electrodes 30b are provided. The first partial electrode 30a is provided between the two partial electrodes in the circumferential direction Dc. Different signals may be supplied to the multiple partial electrodes. Signals obtained from the multiple partial electrodes may be processed to perform detection.

[0062] 7, the multiple annular portions 10 include a first annular portion 11, a second annular portion 12, a third annular portion 13, a fourth annular portion 14, a fifth annular portion 15, and a sixth annular portion 16. These annular portions 10 are arranged concentrically.

[0063] 7, the multiple connection portions 20 include a first connection portion 21, a second connection portion 22, and a third connection portion 23. The first connection portion 21 connects the first annular portion 11 and the second annular portion 12 to each other. The second connection portion 22 connects the second annular portion 12 and the third annular portion 13 to each other. The third connection portion 23 connects the third annular portion 13 and the fourth annular portion 14 to each other.

[0064] As shown in FIG. 7, the movable part 10M may further include a first radiating structure 28p. The first radiating structure 28p is connected to one of the plurality of annular parts 10. In this example, the first radiating structure 28p is connected to the fourth annular part 14. The first radiating structure 28p extends from one of the plurality of annular parts 10 along a first radial direction Dr1. The first radiating structure 28p is separated from another one of the plurality of annular parts 10 in the first radial direction Dr1. In this example, the first radiating structure 28p is separated from the fifth annular part 15 in the first radial direction Dr1. The other one of the plurality of annular parts 10 is adjacent to the one of the plurality of annular parts 10 among the plurality of annular parts 10. The other one of the plurality of annular parts 10 is closest to the one of the plurality of annular parts 10 among the plurality of annular parts 10.

[0065] The movable part 10M may further include a second radiating structure 28q. The second radiating structure 28q is connected to the one of the plurality of annular parts 10. The second radiating structure 28q is connected to the fifth annular part 15. The second radiating structure 28q extends from the other one of the plurality of annular parts 10 toward the one of the plurality of annular parts 10 along a first radial direction Dr1. The second radiating structure 28q extends from the fifth annular part 15 toward the fourth annular part 14 along the first radial direction Dr1. The second radiating structure 28q is separated from the first radiating structure 28p in the first radial direction Dr1.

[0066] By providing such a radiating structure, the overall mass distribution can be made uniform without connecting adjacent annular portions 10. This makes it easier to obtain higher characteristics.

[0067] 7, in this example, the direction in which the second connection portion 22 extends (first radial direction Dr1) is aligned with the direction in which the third connection portion 23 extends. For example, a detection signal with high intensity can be easily obtained.

[0068] As shown in FIG. 7 , the movable part 10M may include a first structure 41 connected to the first annular part 11. The first structure 41 functions as, for example, a weight. Noise is further suppressed. In this example, the first structure 41 is provided on the outside of the first annular part 11. The movable part 10M may include a second structure 42. The second structure 42 is provided on the inside of the first annular part 11. The second structure 42 may be connected to the first annular part 11 or the first connection part 21.

[0069] Second embodiment The second embodiment relates to an electronic device. FIG. 8 is a schematic view illustrating an electronic device according to the second embodiment. 8, an electronic device 310 according to an embodiment includes a sensor according to the first embodiment (e.g., sensor 110) and a circuit control unit 170. The circuit control unit 170 can control a circuit 180 based on a signal S1 obtained from the sensor. The circuit 180 is, for example, a control circuit for a driving device 185. According to the embodiment, for example, the circuit 180 for controlling the driving device 185 can be controlled with high accuracy.

[0070] 8, a sensor system 210 according to an embodiment includes a sensor according to the first embodiment (for example, the sensor 110) and a detection target member 81. The sensor 110 is fixed to the detection target member 81. The sensor 110 can detect a signal from the detection target member 81.

[0071] 9(a) to 9(h) are schematic views illustrating applications of the electronic device according to the embodiment. As shown in FIG. 9(a), the electronic device 310 may be at least a part of a robot. As shown in FIG. 9(b), the electronic device 310 may be at least a part of a machine robot installed in a manufacturing plant or the like. As shown in FIG. 9(c), the electronic device 310 may be at least a part of an automatic guided vehicle in a factory or the like. As shown in FIG. 9(d), the electronic device 310 may be at least a part of a drone (unmanned aerial vehicle). As shown in FIG. 9(e), the electronic device 310 may be at least a part of an airplane. As shown in FIG. 9(f), the electronic device 310 may be at least a part of a ship. As shown in FIG. 9(g), the electronic device 310 may be at least a part of a submarine. As shown in FIG. 9(h), the electronic device 310 may be at least a part of a car. The electronic device 310 may include, for example, at least one of a robot and a moving object.

[0072] 10(a) and 10(b) are schematic diagrams illustrating applications of the sensor according to the embodiment. As shown in Fig. 10(a), a sensor 430 according to the embodiment includes the sensor according to the first embodiment and a transmitting / receiving unit 420. In the example of Fig. 10(a), the sensor 110 is depicted as the sensor. The transmitting / receiving unit 420 can transmit a signal obtained from the sensor 110, for example, by at least one of a wireless and a wired method. The sensor 430 is provided, for example, on a slope surface 410 of a road 400 or the like. The sensor 430 can monitor, for example, the state of a facility (for example, infrastructure) or the like. The sensor 430 may be, for example, a state monitoring device.

[0073] For example, the sensor 430 detects a change in the condition of the slope surface 410 of the road 400 with high accuracy. The change in the condition of the slope surface 410 includes, for example, at least one of a change in the inclination angle and a change in the vibration state. A signal (inspection result) obtained from the sensor 110 is transmitted by the transceiver unit 420. The condition of a facility (e.g., infrastructure) can be monitored, for example, continuously.

[0074] As shown in FIG. 10(b), the sensor 430 is provided, for example, in a part of a bridge 460. The bridge 460 is provided on a river 470. For example, the bridge 460 includes at least one of a main girder 450 and a pier 440. The sensor 430 is provided in at least one of the main girder 450 and the pier 440. For example, due to deterioration or the like, the angle of at least one of the main girder 450 and the pier 440 may change. For example, the vibration state of at least one of the main girder 450 and the pier 440 may change. The sensor 430 detects these changes with high accuracy. The detection result can be transmitted to any location by the transmitting / receiving unit 420. Anomalies can be effectively detected.

[0075] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate including a first surface; an inner structure secured to the first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; A plurality of fixed electrodes fixed to the first surface; A plurality of connecting members; Equipped with a first gap is provided between the first surface and the movable portion, the fixing portion is provided around the inner structure with a first center of the inner structure in a first plane along the first surface as a center, the movable portion includes a first annular portion and a first connection portion, The first annular portion is provided around the fixed portion with the fixed portion as a center, The first connection portion is provided between the fixed portion and the first annular portion, the first connection portion directly or indirectly connects the first annular portion to the fixed portion, the plurality of fixed electrodes include a first fixed electrode facing the first annular portion and a first opposing fixed electrode, the first center is provided between the first fixed electrode and the first opposing fixed electrode, the inner structure includes a first conductive portion, the first conductive portion includes a first region and a first opposing region, the first center is provided between the first region and the first opposing region, the plurality of connection members include a first connection member and a first opposing connection member, the first connection member electrically connects the first region and the first fixed electrode; The first opposing connection member electrically connects the first opposing region and the first opposing fixed electrode.

[0076] (Technical proposal 2) The sensor described in Technical Solution 1, wherein the first opposing region is continuous with the first region.

[0077] (Technical proposal 3) the first conductive portion further includes a first connection region; the first connection region is continuous with the first region and the first opposing region, A sensor as described in technical proposal 1 or 2, wherein at least a portion of the first connection region extends along a circumferential direction centered on the first center.

[0078] (Technical proposal 4) A first region length in the radial direction of at least a part of the first region is longer than a first connection region length in the radial direction of the at least a part of the first connection region; a first facing region length in the radial direction of at least a part of the first facing region is longer than the first connection region length; The sensor described in technical proposal 3, wherein the radial direction passes through the first center and is along the first plane.

[0079] (Technical proposal 5) The sensor according to any one of Technical Solutions 1 to 4, wherein the first conductive portion is annular about the first center.

[0080] (Technical proposal 6) the plurality of fixed electrodes include a second fixed electrode facing the first annular portion and a second opposing fixed electrode, the first center is provided between the second fixed electrode and the second opposing fixed electrode, The inner structure further includes a second conductive portion, The second conductive portion further includes a second region and a second opposing region, The first center is provided between the second region and the second opposing region, the plurality of connection members further includes a second connection member and a second opposing connection member, the second connection member electrically connects the second region and the second fixed electrode; The sensor described in Technical Proposal 1 or 2, wherein the second opposing connection member electrically connects the second opposing region and the second opposing fixed electrode.

[0081] (Technical proposal 7) A sensor as described in Technical Proposal 6, wherein a second direction from the second fixed electrode to the second opposing fixed electrode intersects with a first direction from the first fixed electrode to the first opposing fixed electrode.

[0082] (Technical proposal 8) The sensor described in Technical Solution 7, wherein the angle between the first direction and the second direction is greater than or equal to 80 degrees and less than or equal to 100 degrees.

[0083] (Technical proposal 9) The sensor according to any one of Technical Solutions 6 to 8, wherein at least a portion of the second region overlaps with the first region in a circumferential direction centered on the first center.

[0084] (Technical proposal 10) At least a portion of the second region is provided between the first region and the first opposing region in a circumferential direction about the first center, The sensor according to any one of Technical Solutions 6 to 8, wherein at least a portion of the first region is provided between the second region and the second opposing region in the circumferential direction.

[0085] (Technical proposal 11) The sensor according to any one of Technical Solutions 6 to 10, wherein the second facing region is continuous with the second region.

[0086] (Technical proposal 12) the second conductive portion further includes a second connection region; the second connection region is continuous with the second region and the second opposing region, The sensor according to any one of Technical Solutions 6 to 8, wherein at least a portion of the second connection region extends along a circumferential direction centered on the first center.

[0087] (Technical proposal 13) A second region length in the radial direction of at least a part of the second region is longer than a second connection region length in the radial direction of the at least a part of the second connection region; A second facing region length in the radial direction of at least a part of the second facing region is longer than the second connection region length, The sensor described in technical proposal 12, wherein the radial direction passes through the first center and is along the first plane.

[0088] (Technical proposal 14) At least a portion of the second fixed electrode is provided between the first fixed electrode and the first opposing fixed electrode in a circumferential direction about the first center, The sensor according to any one of Technical Solutions 6 to 8, wherein at least a portion of the first fixed electrode is provided between the second fixed electrode and the second opposing fixed electrode in the circumferential direction.

[0089] (Technical proposal 15) The sensor according to any one of Technical Solutions 6 to 14, wherein the second conductive portion is annular about the first center.

[0090] (Technical proposal 16) The sensor according to any one of Technical Solutions 6 to 15, wherein the second conductive portion is provided between the first center and the first conductive portion.

[0091] (Technical proposal 17) the plurality of fixed electrodes further includes a third fixed electrode facing the first annular portion and a third opposing fixed electrode, The inner structure further includes a third conductive portion, the third conductive portion is between the first center and the second conductive portion, the third conductive portion further includes a third region and a third opposing region, the first center is provided between the third region and the third opposing region, the plurality of connection members include a third connection member and a third opposing connection member, the third connection member electrically connects the third region and the third fixed electrode; The sensor according to any one of Technical Solutions 6 to 16, wherein the third opposing connection member electrically connects the third opposing region and the third opposing fixed electrode.

[0092] (Technical proposal 18) the plurality of fixed electrodes further includes a fourth fixed electrode facing the first annular portion and a fourth opposing fixed electrode, the inner structure further includes a fourth conductive portion; the fourth conductive portion is between the first center and the third conductive portion, the fourth conductive portion further includes a fourth region and a fourth opposing region, the first center is provided between the fourth region and the fourth opposing region, the plurality of connection members include a fourth connection member and a fourth opposing connection member, the fourth connection member electrically connects the fourth region and the fourth fixed electrode; The sensor described in Technical Proposal 17, wherein the fourth opposing connection member electrically connects the fourth opposing region and the fourth opposing fixed electrode.

[0093] (Technical proposal 19) A sensor according to Technical Proposal 1; a detection target member to which the sensor is fixed; A sensor system comprising:

[0094] (Technical proposal 20) A sensor according to any one of technical proposals 1 to 18; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

[0095] According to the embodiments, it is possible to provide a sensor, a sensor system, and an electronic device that can improve characteristics.

[0096] In this specification, "vertical" and "parallel" do not only mean strictly vertical and strictly parallel, but also include, for example, variations in the manufacturing process, and may mean substantially vertical and substantially parallel.

[0097] The above describes the embodiment of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor, such as the member, substrate, sensor unit, housing, sensor element, base, fixed unit, movable unit, and control unit, are included in the scope of the present invention as long as a person skilled in the art can implement the present invention in the same way and obtain the same effect by appropriately selecting them from the known range.

[0098] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0099] In addition, all sensors, sensor systems, and electronic devices that can be implemented by a person skilled in the art by appropriate design modifications based on the sensors, sensor systems, and electronic devices described above as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0100] In addition, within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0101] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0102] 10: annular part, 10F: fixed part, 10M: movable part, 10o: outer annular part, 11~16: first to sixth annular part, 20: connection part, 21~23: first to third connection part, 28p, 28q: first and second radiation structures, 30: fixed electrode, 30a, 30b: first and second partial electrodes, 31a to 34a: first to fourth fixed electrodes, 31b to 34b: first to fourth opposing fixed electrodes, 41, 42: first and second structures, 50a: first surface, 50s: base, 55: insulating member, 60: inner structure, 61L to 65L: first to fifth conductive parts, 61a to 64a: first to fourth regions, 61b~64b: 1st~4th opposing area, 61c, 62c: first and second connection regions, 64d: connection region, 70: control unit, 80: connection member, 81: detection target member, 81a-84a: first to fourth connection members, 81b-84b: first to fourth opposing connection members, 110-112, 120: sensor, 170: circuit control unit, 180: circuit, 185: drive device, 210: sensor system, 310: electronic device, 400: road, 410: slope surface, 420: transmitter / receiver, 430: sensor, 440: pier, 450: main girder, 460: bridge, 470: river, Dc: circumferential direction, Dr: radial direction, Dr1: first radial direction, Dx1, Dx2: first and second directions, G1: first gap, PL1: first plane, S1: signal; w61a, w62a: first and second region lengths; w61b, w62b: first and second opposing region lengths; w61c, w62c: first and second connecting region lengths

Claims

1. a substrate including a first surface; an inner structure secured to the first surface; A fixing portion fixed to the first surface; A movable part supported by the fixed part; A plurality of fixed electrodes fixed to the first surface; A plurality of connecting members; Equipped with a first gap is provided between the first surface and the movable portion, the fixing portion is provided around the inner structure with a first center of the inner structure in a first plane along the first surface as a center, The movable portion includes a first annular portion and a first connection portion, The first annular portion is provided around the fixed portion with the fixed portion as a center, The first connection portion is provided between the fixed portion and the first annular portion, the first connection portion directly or indirectly connects the first annular portion to the fixed portion, the plurality of fixed electrodes include a first fixed electrode facing the first annular portion and a first opposing fixed electrode, the first center is provided between the first fixed electrode and the first opposing fixed electrode, The inner structure includes a first conductive portion, the first conductive portion includes a first region and a first opposing region, the first center is provided between the first region and the first opposing region, the plurality of connection members include a first connection member and a first opposing connection member, the first connection member electrically connects the first region and the first fixed electrode; The first opposing connection member electrically connects the first opposing region and the first opposing fixed electrode.

2. The first conductive portion further includes a first connection region, the first connection region is continuous with the first region and the first opposing region, The sensor according to claim 1 , wherein at least a portion of the first connection region extends along a circumferential direction centered on the first center.

3. A first region length in a radial direction of at least a part of the first region is longer than a first connection region length in the radial direction of the at least a part of the first connection region; A first opposing region length in the radial direction of at least a part of the first opposing region is longer than the first connection region length, The sensor of claim 2 , wherein the radial direction passes through the first center and is along the first plane.

4. the plurality of fixed electrodes include a second fixed electrode facing the first annular portion and a second opposing fixed electrode, the first center is provided between the second fixed electrode and the second opposing fixed electrode, The inner structure further includes a second conductive portion, The second conductive portion further includes a second region and a second opposing region, The first center is provided between the second region and the second opposing region, the plurality of connection members further includes a second connection member and a second opposing connection member, the second connection member electrically connects the second region and the second fixed electrode; The sensor according to claim 1 , wherein the second opposing connection member electrically connects the second opposing region and the second opposing fixed electrode.

5. The sensor of claim 4 , wherein a second direction from the second fixed electrode to the second opposing fixed electrode intersects with a first direction from the first fixed electrode to the first opposing fixed electrode.

6. The sensor according to claim 4 , wherein at least a portion of the second region overlaps with the first region in a circumferential direction about the first center.

7. the second conductive portion further includes a second connection region; the second connection region is continuous with the second region and the second opposing region, The sensor according to claim 4 , wherein at least a portion of the second connection region extends along a circumferential direction centered on the first center.

8. A second region length in a radial direction of at least a part of the second region is longer than a second connection region length in the radial direction of the at least a part of the second connection region; A second opposing region length in the radial direction of at least a part of the second opposing region is longer than the second connection region length, The sensor of claim 7 , wherein the radial direction passes through the first center and is along the first plane.

9. A sensor according to claim 1; a detection target member to which the sensor is fixed; A sensor system comprising:

10. A sensor according to claim 1; a circuit control unit capable of controlling a circuit based on a signal obtained from the sensor; Equipped with electronic devices.

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