Compliance unit

Abstract

To provide a table unit which enables a table support part to be returned to an original point position relative to a base member without fail.SOLUTION: A compliance unit 10 includes a base member 12, a table support part 14, a compliance mechanism 16, and a table unit 18. The base member is provided with a second fluid pressure cylinder 112 which presses a second pressing part 114 to the table unit in a state that the table support part is returned to an original point position relative to the base member by a first fluid pressure cylinder to return the table unit from an inclined position where a table plate 82 of the table unit inclines relative to an XY plane to an original point position where the table plate is arranged along the XY plane.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present disclosure relates to a compliance unit.

Background Art

[0002] For example, Patent Document 1 discloses a compliance unit including a base member, a table support portion, a compliance mechanism, and a table unit. The table support portion is movable in the X and Y directions with respect to the base member. The compliance mechanism is interposed between the base member and the table support portion so as to be movable in the X and Y directions with respect to the base member and the table support portion. The table unit is provided so as to be tiltable with respect to the table support portion.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] It is desired to provide a better compliance unit.

[0005] An object of the present invention is to solve the above-described problems.

Means for Solving the Problems

[0006] Aspects of the present disclosure include a base member, a table support portion disposed movably with respect to the base member along an XY plane in which a direction orthogonal to the X direction is defined as the Y direction, a compliance mechanism interposed between the base member and the table support portion so as to be movable in the X direction and the Y direction with respect to the base member and the table support portion, and a table unit provided on the table support portion so as to be tiltable about an imaginary line extending along the X direction or the Y direction. The base member is provided with a first fluid pressure cylinder that returns the table support portion to an origin position with respect to the base member by pressing a first pressing portion toward the table support portion, and a second fluid pressure cylinder that returns the table unit to an origin posture in which the table plate of the table unit is along the XY plane from an inclined posture in which the table plate of the table unit is inclined with respect to the XY plane by pressing a second pressing portion toward the table unit in a state where the table support portion has been returned to the origin position with respect to the base member by the first fluid pressure cylinder. It is a compliance unit.

Advantages of the Invention

[0007] According to the present invention, a better compliance unit can be provided.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

DETAILED DESCRIPTION OF THE INVENTION

[0009] In the compliance unit, a first fluid pressure cylinder and a second fluid pressure cylinder may be provided on the base member. The first fluid pressure cylinder returns the table support portion to the origin position with respect to the base member by pressing the first pressing portion toward the table support portion. The second fluid pressure cylinder can return the table unit from the inclined posture to the origin posture by pressing the second pressing portion toward the table unit.

[0010] In such a compliance unit, the table unit is provided on the table support portion. Therefore, when the second pressing portion is pressed against the table unit by the second fluid pressure cylinder while the table support portion is displaced from the origin position with respect to the base member, there is a possibility that the table support portion cannot be returned to the origin position with respect to the base member. In the present disclosure, an object is to be able to surely return the table support portion to the origin position with respect to the base member.

[0011] The compliance unit 10 according to an embodiment of the present invention will be described with reference to the drawings. The compliance unit 10 is, for example, a device for correcting a positional deviation (core deviation) during the assembly of a workpiece. Specifically, as shown in FIG. 1, in the compliance unit 10, for example, a robot hand (not shown) is connected to the base member 12, and a chuck member (not shown) for gripping a workpiece is attached to the table unit 18.

[0012] The table unit 18 can move along the XY plane with respect to the base member 12. Further, the table unit 18 can tilt about a first axis Ax1 along the X direction with respect to the table support portion 14. Furthermore, the table unit 18 can tilt about a second axis Ax2 along the Y direction with respect to the table support portion 14.

[0013] Such a compliance unit 10 can easily correct misalignment, for example, when misalignment occurs during the assembly of a workpiece by inserting the workpiece into a predetermined hole. Note that the use of the compliance unit 10 is not limited to the example of inserting a workpiece into a hole. Hereinafter, the configuration of the compliance unit 10 will be described in detail.

[0014] As shown in FIGS. 1 to 4, the compliance unit 10 includes a base member 12, a table support portion 14, a pair of compliance mechanisms 16, a table unit 18, a first home return mechanism 20, and a second home return mechanism 22.

[0015] The base member 12 includes a first base portion 24, a second base portion 26, and a support plate 28. The first base portion 24 is a plate-like member extending in the X direction and the Y direction. The first base portion 24 is formed in a circular shape when viewed from the Z direction. The first base portion 24 is formed with mounting holes 30 for attaching the first base portion 24 to a robot hand (not shown) (see FIGS. 1 and 2). The shape, size, etc. of the first base portion 24 can be set as appropriate.

[0016] As shown in FIGS. 3 and 4, the second base portion 26 protrudes in the Z1 direction from the surface of the first base portion 24 facing the Z1 direction. The second base portion 26 includes a base central portion 32, three side protruding portions 34, and a central protruding portion 36. The base central portion 32 is connected to the central portion of the first base portion 24. The three side protruding portions 34 protrude radially outward from the base central portion 32. The three side protruding portions 34 are arranged at equal angular intervals in the circumferential direction of the base central portion 32. The second base portion 26 may have one, two, or four or more side protruding portions 34. The central protruding portion 36 protrudes in the Z1 direction from the base central portion 32. The central protruding portion 36 has a circular outer peripheral surface.

[0017] The support plate 28 is formed in an annular shape. The support plate 28 is attached to the protruding end surface of the central protruding portion 36 by a plurality of fastening members 38 together with the second cover member 120 forming the second origin return mechanism 22. In other words, the support plate 28 is sandwiched in the Z direction by the central protruding portion 36 and the second cover member 120. The fastening member 38 is, for example, a screw member.

[0018] As shown in FIGS. 2 to 4, the table support portion 14 is formed in an annular shape. That is, a through hole 40 is formed in the central portion of the table support portion 14. The central protruding portion 36 of the base member 12 is inserted into the through hole 40 (see FIG. 4). The inner diameter (hole diameter) of the through hole 40 is larger than the outer diameter of the central protruding portion 36.

[0019] The table support portion 14 has a first plate 42, a pressing member 44, an intermediate member 46, a second plate 48, and a support body 50. The first plate 42, the intermediate member 46, the second plate 48, and the support body 50 are laminated in this order in the Z1 direction. The first plate 42 is a flat plate extending along the XY plane. A plurality of receiving members 98 constituting the first origin return mechanism 20 are provided on the surface of the first plate 42 facing the Z2 direction ( (See FIGS. 2 and 4). The pressing member 44 is disposed on the surface of the first plate 42 facing the Z2 direction. The pressing member 44 fixes a plurality of receiving members 98 to the first plate 42.

[0020] The intermediate member 46 is disposed on the surface of the first plate 42 facing the Z1 direction. The thickness dimension of the intermediate member 46 along the Z direction is larger than the thickness dimension of the first plate 42 along the Z direction. The inner diameter of the intermediate member 46 is larger than the inner diameter of the first plate 42.

[0021] The second plate 48 is a flat plate extending along the XY plane. The second plate 48 is disposed on the surface of the intermediate member 46 facing the Z1 direction. The inner diameter of the second plate 48 is the same as the inner diameter of the first plate 42. That is, a space 52 for disposing the support plate 28 is formed between the first plate 42 and the second plate 48.

[0022] As shown in FIGS. 3 and 4, the support body 50 has a connection plate portion 54 and a pair of connection convex portions 56. The connection plate portion 54 is disposed on the surface of the second plate 48 facing the Z1 direction. The pair of connection convex portions 56 project in the Z1 direction from the outer peripheral portion of the surface of the connection plate portion 54 facing the Z1 direction. The pair of connection convex portions 56 are arranged at intervals in the X direction. The pair of connection convex portions 56 support the table unit 18.

[0023] As shown in FIG. 4, the pair of compliance mechanisms 16 are interposed between the base member 12 and the table support portion 14 so as to be movable in the X direction and the Y direction with respect to the base member 12 and the table support portion 14. One compliance mechanism 16 is interposed between the first plate 42 and the support plate 28. The other compliance mechanism 16 is interposed between the second plate 48 and the support plate 28. Hereinafter, one compliance mechanism 16 may be referred to as the "first compliance mechanism 16a", and the other compliance mechanism 16 may be referred to as the "second compliance mechanism 16b".

[0024] The first compliance mechanism 16a has a plurality of balls 58 and a plate-shaped retainer 60. The balls 58 are, for example, steel balls. The balls 58 are in contact with a plane facing the Z1 direction of the first plate 42 and a plane facing the Z2 direction of the support plate 28.

[0025] The retainer 60 rotatably supports the plurality of balls 58. The retainer 60 is formed in an annular shape. The outer diameter of the retainer 60 is smaller than the inner diameter of the intermediate member 46. The inner diameter of the retainer 60 is larger than the inner diameter of the first plate 42.

[0026] Movement of the first compliance mechanism 16a along the XY plane is restricted by a first stopper 62. The first stopper 62 is attached to a plane facing the Z2 direction of the support plate 28 by a fastening member (not shown). The first stopper 62 is formed in an annular shape. The first stopper 62 is located inside the retainer 60 of the first compliance mechanism 16a.

[0027] The second compliance mechanism 16b has the same configuration as the first compliance mechanism 16a. Therefore, a detailed description of the configuration of the second compliance mechanism 16b will be omitted. The plurality of balls 58 of the second compliance mechanism 16b are in contact with a plane facing the Z2 direction of the second plate 48 and a plane facing the Z1 direction of the support plate 28.

[0028] Movement of the second compliance mechanism 16b along the XY plane is restricted by a second stopper 64. The second stopper 64 is attached to a plane facing the Z1 direction of the support plate 28 by a fastening member (not shown). The second stopper 64 is formed in an annular shape. The second stopper 64 is located inside the retainer 60 of the second compliance mechanism 16b.

[0029] As shown in FIGS. 2 to 5, the table unit 18 has a first table portion 66 and a second table portion 68. The first table portion 66 is formed in an annular shape. The first table portion 66 extends in the Y direction. The first table portion 66 is disposed between a pair of connection convex portions 56 of the table support portion 14. That is, the pair of connection convex portions 56 are located on both sides in the X direction of the first table portion 66.

[0030] As shown in FIG. 5, the first table portion 66 is tiltably supported with respect to the pair of connection convex portions 56 by a pair of first pins 70. The first pin 70 is inserted so as to straddle the first connection hole 72 of the connection convex portion 56 and the first insertion hole 74 of the first table portion 66.

[0031] The first connection hole 72 penetrates the connection convex portion 56 in the X direction. The first insertion hole 74 is formed in a portion of the first table portion 66 adjacent to the first connection hole 72. The first pin 70 is fixed to the connection convex portion 56 by a first fixing member 78 (see FIG. 4). The first pin 70 is not fixed to the first table portion 66. The first table portion 66 tilts about the first axis (first virtual line) Ax1 of the first pin 70. The first axis Ax1 extends along the X direction.

[0032] The second table portion 68 has a connecting portion 80, a table plate 82, and a receiving plate 85. The connecting portion 80 is inserted inside the first table portion 66. The connecting portion 80 is tiltably supported with respect to the first table portion 66 by a pair of second pins 84. The second pin 84 is inserted so as to straddle the second insertion hole 86 of the first table portion 66 and the second connection hole 88 of the connecting portion 80.

[0033] A pair of second insertion holes 86 are provided in portions of the first table portion 66 that face each other in the Y direction (see FIG. 2). That is, the second insertion holes 86 penetrate the first table portion 66 in the Y direction. The second connection holes 88 are formed in a portion of the connecting portion 80 adjacent to the second insertion holes 86. The second pin 84 is fixed to the connecting portion 80 by a second fixing member 89 (see FIG. 3). The second pin 84 is not fixed to the first table portion 66. The second table portion 68 tilts about the second axis (second virtual line) Ax2 of the second pin 84. The second axis Ax2 extends along the Y direction. The second axis Ax2 extends in a direction orthogonal to the first axis Ax1.

[0034] As shown in FIGS. 3 and 4, the table plate 82 is provided at an end portion of the connecting portion 80 in the Z1 direction. The table plate 82 projects outward from the connecting portion 80. A plurality of mounting holes 90 (see FIG. 3) for mounting a chuck member (not shown) are formed in the table plate 82. As shown in FIGS. 2 and 4, the receiving plate 85 is disposed on a surface of the connecting portion 80 facing the Z2 direction. The receiving plate 85 is located at the center of the second table portion 68.

[0035] As shown in FIGS. 3 and 4, the first home return mechanism 20 can return the table support portion 14 to the home position and lock the table support portion 14 to the base member 12. The first home return mechanism 20 has three home return portions 92 (see FIG. 3). The three home return portions 92 are arranged at equal intervals (for example, at 120° intervals) in the circumferential direction of the base member 12.

[0036] The home return portion 92 includes a first fluid pressure cylinder 94, a first pressing portion 96, and a receiving member 98. The first fluid pressure cylinder 94 is, for example, a pneumatic cylinder that operates by pneumatic pressure. The same applies to the second fluid pressure cylinder 112 described later. The configurations of the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 can be set as appropriate.

[0037] The first fluid pressure cylinder 94 is provided for each of the three side protrusions 34. As shown in FIG. 4, the first fluid pressure cylinder 94 has a first cylinder hole 100, a first piston portion 102, a first cover member 104, and a first biasing member 106. The first cylinder hole 100 is formed in the side protrusion 34 so as to extend in the Z direction. The first cylinder hole 100 opens to the surface of the side protrusion 34 facing the Z1 direction.

[0038] The first piston portion 102 slides in the Z direction on the inner surface of the first cylinder hole 100. The first piston portion 102 divides the first cylinder hole 100 into a first chamber 108 and a second chamber 110. The first chamber 108 is located in the Z2 direction of the first piston portion 102. The second chamber 110 is located in the Z1 direction of the first piston portion 102. The first cover member 104 is attached to the side protrusion 34 so as to close the opening of the first cylinder hole 100 in the Z1 direction.

[0039] The first biasing member 106 is interposed between the first piston portion 102 and the first cover member 104. The first biasing member 106 biases the first piston portion 102 (the first pressing portion 96) in the Z2 direction. The first biasing member 106 is, for example, a compression coil spring. The first biasing member 106 may be a rubber member or the like.

[0040] The first pressing portion 96 protrudes from the first piston portion 102 in the Z1 direction. The first pressing portion 96 passes through the first cover member 104. A first pressing surface 96a is provided at the end of the first pressing portion 96 in the protruding direction (Z1 direction). The first pressing surface 96a is a conical convex surface.

[0041] The receiving member 98 is attached to the first plate 42 so as to face the first pressing portion 96. The receiving member 98 forms a part of the table support portion 14. The receiving member 98 has a concave first receiving surface 98a with which the end portion of the first pressing portion 96 in the Z1 direction can come into contact. The first receiving surface 98a is a conical concave surface.

[0042] As shown in FIGS. 3 and 4, the second home return mechanism 22 can lock the table unit 18 in a state where it is returned from the inclined posture to the home posture. The second home return mechanism 22 is provided at the central portion (base central portion 32 and central protruding portion 36) of the second base portion 26. The second home return mechanism 22 includes a second fluid pressure cylinder 112 and a second pressing portion 114.

[0043] As shown in FIG. 4, the second fluid pressure cylinder 112 has a second cylinder hole 116, a second piston portion 118, a second cover member 120, and a second biasing member 122. The second cylinder hole 116 is formed at the central portion of the second base portion 26 so as to extend in the Z direction. The second cylinder hole 116 opens at the end surface in the protruding direction (Z1 direction) of the central protruding portion 36.

[0044] The second piston portion 118 slides in the Z direction on the inner surface of the second cylinder hole 116. The second piston portion 118 divides the second cylinder hole 116 into a first chamber 124 and a second chamber 126. The first chamber 124 is located in the Z2 direction of the second piston portion 118. The second chamber 126 is located in the Z1 direction of the second piston portion 118. The second cover member 120 is attached to the central protruding portion 36 so as to close the opening in the Z1 direction of the second cylinder hole 116.

[0045] The second biasing member 122 is interposed between the second piston portion 118 and the second cover member 120. The second biasing member 122 biases the second piston portion 118 (second pressing portion 114) in the Z2 direction. The second biasing member 122 is, for example, a compression coil spring. The second biasing member 122 may be a rubber member or the like. In an initial state where no compressed fluid (fluid for driving the cylinder) is supplied to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112, the load applied by the second biasing member 122 to the second piston portion 118 (second pressing portion 114) is larger than the load applied by the first biasing member 106 to the first piston portion 102 (first pressing portion 96).

[0046] The second pressing part 114 includes a rod part 128 and a pressing body 130. The rod part 128 protrudes from the second piston part 118 in the Z1 direction. The rod part 128 penetrates the second cover member 120. The pressing body 130 is attached to the protruding end part of the rod part 128 by a fastening member 131. The fastening member 131 is, for example, a screw member. The pressing body 130 is formed in a flat plate shape. The pressing body 130 has a flat second pressing surface 114a facing the Z1 direction. The second pressing surface 114a can press the second receiving surface 85a facing the Z2 direction of the receiving plate 85 in the Z1 direction. The second receiving surface 85a is flat.

[0047] The base member 12 is provided with a first flow path 132, a second flow path 134, and an orifice 136. The first flow path 132 communicates with the first chamber 108 of each first fluid pressure cylinder 94. The first flow path 132 can introduce fluid into each of the first chambers 108 of the plurality of first fluid pressure cylinders 94. The first flow path 132 is formed in the first base part 24.

[0048] The first flow path 132 communicates with a first port 138 opened on the outer surface of the first base part 24. In the present embodiment, one first port 138 is formed in the base member 12. A tube (not shown) is connected to the first port 138. Compressed fluid (compressed air) can be supplied to the first port 138 from an air supply device (not shown). The second chamber 110 of the first fluid pressure cylinder 94 communicates with the external space of the base member 12 through a second port 140 formed in the side protruding part 34.

[0049] The second flow path 134 branches from an intermediate part of the first flow path 132. The second flow path 134 communicates with the first chamber 124 of the second fluid pressure cylinder 112. The second chamber 126 of the second fluid pressure cylinder 112 communicates with the external space through a third port 142 formed in the central protruding part 36.

[0050] The orifice 136 is provided in the second flow path 134. The orifice 136 restricts the flow rate of the fluid flowing through the second flow path 134. The flow path diameter of the orifice 136 is smaller than that of the first flow path 132. In other words, the flow path cross-sectional area of the orifice 136 is smaller than that of the first flow path 132.

[0051] Next, the operation of the compliance unit 10 will be described. As shown in FIG. 4, the compliance unit 10 can be used, for example, with the Z1 direction oriented in the direction of gravity. Note that the arrangement direction of the compliance unit 10 can be set as appropriate.

[0052] As shown in FIG. 4, in the compliance unit 10, with no compressed fluid supplied to the first port 138, the first piston portion 102 of the first fluid pressure cylinder 94 is pushed in the Z2 direction by the first biasing member 106, and thus is positioned at the Z2-direction end of the first cylinder hole 100. In this state, the first pressing surface 96a of the first pressing portion 96 is positioned at the Z2-direction end of the concave surface formed by the first receiving surface 98a of the receiving member 98. Thereby, as shown in FIG. 6, the table support portion 14 can be moved in the X direction and the Y direction (along the XY plane) with respect to the base member 12.

[0053] The table unit 18 is provided on the table support portion 14. Therefore, the table unit 18 moves along the XY plane together with the table support portion 14 with respect to the base member 12.

[0054] Also, as shown in FIG. 4, with no compressed fluid supplied to the first port 138, the second piston portion 118 of the second fluid pressure cylinder 112 is pushed in the Z2 direction by the second biasing member 122, and thus is positioned at the Z2-direction end of the second cylinder hole 116. In this state, the second pressing surface 114a of the second pressing portion 114 is positioned spaced apart in the Z2 direction from the second receiving surface 85a.

[0055] As a result, as shown in FIG. 6, the first table portion 66 of the table unit 18 can be tilted about the first axis Ax1 with respect to the table support portion 14. Further, the second table portion 68 of the table unit 18 can be tilted about the second axis Ax2 with respect to the first table portion 66. That is, the table unit 18 can be changed from the origin posture to the inclined posture. The origin posture of the table unit 18 refers to the posture of the table unit 18 such that the table board 82 is along the XY plane. The inclined posture of the table unit 18 refers to the posture of the table unit 18 such that the table board 82 is inclined with respect to the XY plane.

[0056] In the compliance unit 10, when compressed fluid is supplied to the first port 138, the compressed fluid flows into the first chamber 108 of the first fluid pressure cylinder 94 through the first flow path 132 and also flows into the first chamber 124 of the second fluid pressure cylinder 112 through the second flow path 134 and the orifice 136. In the present embodiment, a relatively large pressure difference can be obtained between the upstream side and the downstream side of the orifice 136. In other words, the pressure of the fluid on the downstream side of the orifice 136 becomes smaller than the pressure of the fluid on the upstream side of the orifice 136. Note that this pressure difference becomes larger as the flow rate (volume flow rate) of the compressed fluid passing through the orifice 136 is larger. Thereby, the operation start timing of the second fluid pressure cylinder 112 can be made later than the operation start timing of the first fluid pressure cylinder 94.

[0057] Further, in the present embodiment, in the initial state where no compressed fluid is supplied to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112, the load applied by the second biasing member 122 to the second pressing portion 114 is larger than the load applied by the first biasing member 106 to the first pressing portion 96. Therefore, even when the flow rate of the compressed fluid passing through the orifice 136 is relatively small and the pressure difference between the upstream side and the downstream side of the orifice 136 is relatively small, the operation start timing of the second piston portion 118 of the second fluid pressure cylinder 112 can be moderately delayed compared to the operation start of the first piston portion 102 of the first fluid pressure cylinder 94.

[0058] Specifically, first, the first piston portion 102 moves in the Z1 direction along the first cylinder hole 100 while pressing the first biasing member 106 by the compressed fluid supplied to the first chamber 108 of the first fluid pressure cylinder 94. Then, since the first pressing surface 96a of the first pressing portion 96 presses the first receiving surface 98a of the receiving member 98 in the Z1 direction, as shown in FIG. 7, the table support portion 14 returns to the origin position with respect to the base member 12. As a result, the central portion of the second receiving surface 85a is positioned in the Z1 direction of the central portion of the second pressing surface 114a. That is, the central portion of the second receiving surface 85a and the central portion of the second pressing surface 114a face each other.

[0059] Thereafter, the second piston portion 118 moves in the Z1 direction along the second cylinder hole 116 while pressing the second biasing member 122 by the compressed fluid supplied to the first chamber 124 of the second fluid pressure cylinder 112. Then, since the second pressing surface 114a of the second pressing portion 114 presses the second receiving surface 85a of the table unit 18 in the Z1 direction, as shown in FIG. 8, the table unit 18 returns from the inclined posture to the origin posture.

[0060] According to the present embodiment, with the table support portion 14 returned to the origin position with respect to the base member 12 by the first fluid pressure cylinder 94, the second pressing portion 114 is pressed against the table unit 18 by the second fluid pressure cylinder 112 to return the table unit 18 from the inclined posture to the origin posture. Thereby, it is possible to prevent the second pressing portion 114 from pressing against the table unit 18 in a state where the table support portion 14 is displaced from the origin position with respect to the base member 12 and the table support portion 14 cannot move with respect to the base member 12. Therefore, the table support portion 14 can be surely returned to the origin position with respect to the base member 12. Further, since the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 are provided on the base member 12, the flow paths for driving the fluid pressure cylinders can be aggregated on the base member 12. That is, the compliance unit 10 can have a simple configuration. Furthermore, since it is not necessary to attach a tube for supplying compressed fluid to the first fluid pressure cylinder 94 and the second fluid pressure cylinder 112 to the table support portion 14, the tube does not hinder the movement of the table support portion 14 with respect to the base member 12. Therefore, the table support portion 14 can be smoothly moved with respect to the base member 12. Thus, a better compliance unit 10 can be provided.

[0061] The present embodiment is not limited to the above-described configuration. The compliance unit 10 may not include the orifice 136. In this case, by making the load applied by the second biasing member 122 to the second pressing portion 114 larger than the load applied by the first biasing member 106 to the first pressing portion 96, it is possible to make the operation start timing of the second fluid pressure cylinder 112 later than the operation start timing of the first fluid pressure cylinder 94. Also, in the compliance unit 10, the load applied by the second biasing member 122 to the second pressing portion 114 may not be larger than the load applied by the first biasing member 106 to the first pressing portion 96. In this case, it is possible to make the operation start timing of the second fluid pressure cylinder 112 later than the operation start timing of the first fluid pressure cylinder 94 by means of the orifice 136.

[0062] Regarding the above embodiment, the following additional remarks are disclosed.

[0063] (Additional Remark 1) The compliance unit (10) of the present disclosure includes a base member (12), a table support portion (14) movably arranged with respect to the base member along an XY plane in which a direction orthogonal to the X direction is defined as the Y direction, a compliance mechanism (16) interposed between the base member and the table support portion so as to be movable in the X direction and the Y direction with respect to the base member and the table support portion, and a table unit (18) provided on the table support portion so as to be tiltable about a virtual line (Ax1, Ax2) extending along the X direction or the Y direction. The base member is provided with a first hydraulic cylinder (94) for returning the table support portion to the origin position with respect to the base member by pressing a first pressing portion (96) toward the table support portion, and a second hydraulic cylinder (112) for returning the table unit from an inclined posture in which a table plate (82) of the table unit is inclined with respect to the XY plane to an origin posture in which the table plate is along the XY plane by pressing a second pressing portion (114) toward the table unit in a state where the table support portion has been returned to the origin position with respect to the base member by the first hydraulic cylinder.

[0064] According to such a configuration, with the table support portion returned to the origin position with respect to the base member by the first fluid pressure cylinder, the second pressing portion is pressed against the table unit by the second fluid pressure cylinder to return the table unit from the inclined posture to the origin posture. Thereby, it is possible to prevent the second pressing portion from being pressed against the table unit in a state where the table support portion is displaced from the origin position with respect to the base member and the table support portion becomes unable to move with respect to the base member. Therefore, the table support portion can be surely returned to the origin position with respect to the base member. Further, since the first fluid pressure cylinder and the second fluid pressure cylinder are provided on the base member, the flow paths for driving the fluid pressure cylinders can be aggregated on the base member. That is, the compliance unit can be made into a simple configuration. Furthermore, since it is not necessary to attach a tube for supplying compressed fluid to the first fluid pressure cylinder and the second fluid pressure cylinder to the table support portion, the tube does not hinder the movement of the table support portion with respect to the base member. Therefore, the table support portion can be smoothly moved with respect to the base member. Thus, a better compliance unit can be provided.

[0065] (Appendix 2) The compliance unit according to Appendix 1, wherein the base member may be provided with a first flow path (132) through which fluid for driving the cylinder can be introduced into the first fluid pressure cylinder, a second flow path (134) communicating with the first flow path and through which the fluid can be introduced into the second fluid pressure cylinder, and an orifice (136) located in the second flow path.

[0066] According to such a configuration, a pressure difference can be obtained between the upstream side and the downstream side of the orifice. As a result, with a simple configuration, the operation start timing of the second fluid pressure cylinder can be made later than the operation start timing of the first fluid pressure cylinder. Therefore, with a simple configuration, the second pressing portion can be pressed against the table unit by the second fluid pressure cylinder with the table support portion returned to the origin position with respect to the base member by the first fluid pressure cylinder, and the table unit can be returned from the inclined posture to the origin posture.

[0067] (Appendix 3) The compliance unit according to Appendix 2, wherein the first flow path may communicate with a port (138) opened on the outer surface of the base member, and the second flow path may branch from an intermediate portion of the first flow path.

[0068] According to such a configuration, a compressed fluid can be supplied to both the first flow path and the second flow path from one port. As a result, the number of tubes for connecting to the port can be reduced, so that it is possible to prevent the tubes from interfering with other members or getting entangled with each other.

[0069] (Appendix 4) The compliance unit according to any one of Appendices 1 to 3, wherein the first fluid pressure cylinder may include a first biasing member (106) that biases the first pressing portion in a direction away from the table support portion, and the second fluid pressure cylinder may include a second biasing member (122) that biases the second pressing portion in a direction away from the table unit.

[0070] According to such a configuration, the configuration of the compliance unit can be further simplified.

[0071] (Appendix 5) The compliance unit described in Supplementary Note 4, in an initial state where fluid for driving the cylinders is not supplied to the first fluid pressure cylinder and the second fluid pressure cylinder, the load applied by the second biasing member to the second pressing portion may be greater than the load applied by the first biasing member to the first pressing portion.

[0072] According to such a configuration, with a simple configuration, the operation start timing of the second fluid pressure cylinder can be made later than the operation start timing of the first fluid pressure cylinder.

[0073] Although the present disclosure has been described in detail, the present disclosure is not limited to the individual embodiments described above. These embodiments can be variously added, replaced, changed, partially deleted, etc. without departing from the gist of the present disclosure or without departing from the gist of the present disclosure derived from the content described in the claims and its equivalents. Also, these embodiments can be implemented in combination. For example, in the embodiments described above, the order of each operation and the order of each process are shown as an example and are not limited thereto. The same applies when numerical values or mathematical formulas are used in the description of the above embodiments.

Explanation of Reference Numerals

[0074] 10…Compliance unit 12…Base member 14…Table support portion 16…Compliance mechanism 18…Table unit 82…Table plate 94…First fluid pressure cylinder 96…First pressing portion 106…First biasing member 112…Second fluid pressure cylinder 114…Second pressing portion 122…Second biasing member 132…First flow path 134…Second flow path 136…Orifice 138…First port Ax1…First axis Ax2…Second axis

Claims

1. A base member, a table support portion disposed movably with respect to the base member along an XY plane in which a direction orthogonal to the X direction is defined as the Y direction, a compliance mechanism interposed between the base member and the table support portion so as to be movable in the X direction and the Y direction with respect to the base member and the table support portion, a table unit provided on the table support portion so as to be tiltable about an imaginary line extending along the X direction or the Y direction, comprising: wherein the base member is provided with a first fluid pressure cylinder that returns the table support portion to an origin position with respect to the base member by pressing a first pressing portion toward the table support portion, a second fluid pressure cylinder that returns the table unit from an inclined posture in which a table plate of the table unit is inclined with respect to the XY plane to an origin posture in which the table plate is along the XY plane by pressing a second pressing portion toward the table unit in a state where the table support portion has been returned to the origin position with respect to the base member by the first fluid pressure cylinder, a compliance unit.

2. The compliance unit according to claim 1, wherein the base member is provided with a first flow path through which fluid for driving the cylinder can be introduced into the first fluid pressure cylinder, a second flow path communicating with the first flow path and through which the fluid can be introduced into the second fluid pressure cylinder, an orifice located in the second flow path, a compliance unit.

3. The compliance unit according to claim 2, wherein the first flow path communicates with a port opened on an outer surface of the base member, and the second flow path branches from an intermediate portion of the first flow path, a compliance unit.

4. The compliance unit according to claim 1, wherein the first fluid pressure cylinder has a first biasing member that biases the first pressing portion in a direction in which the first pressing portion moves away from the table support portion, and the second fluid pressure cylinder has a second biasing member that biases the second pressing portion in a direction in which the second pressing portion moves away from the table unit, a compliance unit.

5. The compliance unit according to claim 4, Compliance unit in which, in an initial state where fluid for driving the cylinders is not supplied to the first fluid pressure cylinder and the second fluid pressure cylinder, the load applied by the second biasing member to the second pressing portion is greater than the load applied by the first biasing member to the first pressing portion.

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