Recording device, system, method and program

Abstract

To provide a recording device, a system, a method and a program for recording device information for estimating an error cause of a monitoring target device.SOLUTION: A recording device 100 for recording device information for estimating an error cause of a monitoring target device 50 having a function of outputting the device information and an error signal indicating that an error occurs at the time of error occurrence includes: a device information acquisition unit 110 for acquiring a plurality of pieces of device information from the monitoring target device 50; an error signal acquisition unit 120 for acquiring the error signal from the monitoring target device 50; a holding information instruction unit 130 for instructing the device information held on the basis of the error signal; and a device information recording unit 140 for recording the device information of predetermined time including time before and after time when the error signal is output on the basis of the instruction of the holding information instruction unit.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a recording device, a system, a method, and a program for recording device information for estimating the cause of an error in a device to be monitored.

Background Art

[0002] When an abnormal situation occurs in various devices such as an X-ray analyzer, many devices display an error. For example, an error number is notified at the time of an error occurrence, and there is a method of grasping the cause of the error based on it. However, it may be difficult to specify the cause location only by the notification of the error number. In such a case, the cause of the error is investigated based on the log accumulated in the device itself or the control unit (PC or the like) of the device.

[0003] Patent Document 1 discloses a remote fault diagnosis support system in which during a measurement operation on the user side, an operation history and an error history of an operation input means of a three-dimensional measuring machine are recorded in an operation history file, a measurement screen history is recorded in a measurement screen history file, and the created history file is transmitted to a service center side via a communication line at the time of a failure occurrence. It is described that a serviceman can accurately estimate the cause of a failure occurrence by referring to the content of the history file without going to the site.

[0004] Patent Document 2 discloses an analytical apparatus for analyzing a sample, comprising: a) initialization means for performing self-diagnosis to check the initialization of each part of the apparatus and whether the operation of each part is normal immediately after power-on or in response to a predetermined instruction; b) operation history storage means for storing, as an operation history, the result of each initialization and self-diagnosis performed by the initialization means in a non-volatile storage means so that the chronological order can be identified; c) error history storage means for storing, as an error history, information capable of specifying the type of the apparatus error in the non-volatile storage means so that it can be associated with the operation history immediately before the occurrence of the apparatus error when the apparatus error occurs during analysis execution; and d) output means for reading out the error history stored in the non-volatile storage means and the operation history corresponding to the error history in response to a predetermined instruction and outputting them for display or printing.

[0005] Patent Document 3 discloses an automatic analytical apparatus having a plurality of structural elements, output means (sensors), imaging means, first storage means, second storage means, and control means. The output means (sensors) outputs a signal indicating the error when an error occurs in the structural element. The imaging means is provided corresponding to the structural element and captures the structural element in a moving image. The control means stores the captured moving image in the first storage means, and when receiving a signal from the output means, extracts stored data including the moving image captured until a predetermined time back from the reception time and stores it in the second storage means.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Patent Document 2

Patent Document 3

Summary of the Invention

Problems to be Solved by the Invention

[0007] However, in the technology of Patent Document 1, since operation history information and error history information are constantly written to the history file, it takes time to extract only the necessary error history information. Also, although the error type is written as error history information, in the case of an error caused by multiple causes, it is difficult to estimate the cause from the error type.

[0008] In addition, in the technology of Patent Document 2, since information immediately before the occurrence of a device error cannot be obtained, it is difficult to estimate the cause of the error. Also, the technology of Patent Document 3 applies the technology of a conventional drive recorder, and it is difficult to apply it to a device where the failure location is inside the device.

[0009] The present invention has been made in view of such circumstances, and an object thereof is to provide a recording device, a system, a method, and a program for recording device information for estimating the cause of an error in a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred at the time of error occurrence.

Means for Solving the Problems

[0010] (1) To achieve the above object, the analysis device of the present invention has taken the following means. That is, a recording device according to an aspect of the present invention is a recording device that records the device information for estimating the cause of an error in a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred at the time of error occurrence, and includes a device information acquisition unit that acquires a plurality of the device information from the monitoring target device, an error signal acquisition unit that acquires the error signal from the monitoring target device, a holding information instruction unit that instructs the device information to be held based on the error signal, and a device information recording unit that records the device information for a predetermined time including the time before and after the time when the error signal is output based on the instruction of the holding information instruction unit.

[0011] (2) Further, the recording apparatus according to one aspect of the present invention is characterized by further comprising an error estimation unit that estimates the cause of an error based on the apparatus information recorded by the apparatus information recording unit.

[0012] (3) Further, in the recording apparatus according to one aspect of the present invention, the error estimation unit estimates the cause of an error using a machine learning model that outputs a score indicating the possibility of the cause of an error for the input of the apparatus information recorded by the apparatus information recording unit.

[0013] (4) Further, in the recording apparatus according to one aspect of the present invention, the machine learning model is created based on teacher data having a plurality of types of the apparatus information as inputs and the cause of an error corresponding to the input as an output.

[0014] (5) Further, in the recording apparatus according to one aspect of the present invention, there are a plurality of types of the error signals, and the holding information instruction unit instructs to hold at least the apparatus information corresponding to the acquired error signal.

[0015] (6) Further, in the recording apparatus according to one aspect of the present invention, the monitored apparatus is an X-ray analyzer including an X-ray generation unit that generates X-rays, a sample stage on which a sample is placed, and a detector that detects X-rays.

[0016] (7) Further, in the recording apparatus according to one aspect of the present invention, the apparatus information includes two or more of tube voltage, tube current, degree of vacuum, filament current, number of discharges, or bias voltage.

[0017] (8) Further, a system according to one aspect of the present invention includes an analyzer having a function of analyzing a sample and outputting the apparatus information and the error signal, and the recording apparatus according to any one of (1) to (6) above, and the monitored apparatus is the analyzer.

[0018] (9) Further, the method according to one aspect of the present invention is a method applied to a recording device that records the device information for estimating the cause of an error in a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred at the time of error occurrence, the method comprising: obtaining a plurality of pieces of the device information from the monitoring target device; obtaining the error signal from the monitoring target device; instructing to hold the device information based on the error signal; and recording the device information for a predetermined time including a time before and after the time when the error signal was output based on the instruction.

[0019] (10) Further, a program according to one aspect of the present invention is a program for recording the device information for estimating the cause of an error in a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred at the time of error occurrence, the program causing a computer to execute: a process of obtaining a plurality of pieces of the device information from the monitoring target device; a process of obtaining the error signal from the monitoring target device; a process of instructing to hold the device information based on the error signal; and a process of recording the device information for a predetermined time including a time before and after the time when the error signal was output based on the instruction.

Brief Description of the Drawings

[0020]

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[0021] Next, embodiments of the present invention will be described with reference to the drawings. For ease of understanding of the description, the same reference numerals are assigned to the same components in each drawing, and duplicate descriptions are omitted.

[0022] [Embodiment 1] [Overall System] In Embodiment 1, a recording device for recording device information for estimating the cause of an error will be described. FIG. 1 is a block diagram showing an example of the configuration of system 10 in Embodiment 1. System 10 has a recording device 100 and a device 50 to be monitored.

[0023] [Device to be Monitored] The device 50 to be monitored to which the present invention can be applied may be any device as long as it has a function of outputting a plurality of pieces of device information and an error signal indicating that an error has occurred when an error occurs. Details of the device information and the error signal will be described later. The present invention can be preferably applied to a device 50 to be monitored in which the same error may be caused by a plurality of factors, and the cause of the error can be estimated by checking a plurality of pieces of device information before and after the error occurs.

[0024] [Recording device] The recording device 100 is configured by a computer in which a CPU (Central Processing Unit / Central Arithmetic and Recording Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and a memory are connected to a bus. The recording device 100 may be a PC terminal or a server on the cloud. Also, not only the entire device but also some devices or some functions within the device may be provided on the cloud. The recording device 100 may be directly connected to, for example, the monitored device 50. Also, the recording device 100 may be provided as, for example, a function inside the monitored device 50.

[0025] The recording device 100 records device information for estimating the cause of an error in a monitored device having a function of outputting device information and an error signal. The recording device 100 includes a device information acquisition unit 110, an error signal acquisition unit 120, a holding information instruction unit 130, and a device information recording unit 140. Each unit can send and receive information via the control bus L.

[0026] The input device 510 and the display device 520 are connected to the CPU of the recording device 100 via appropriate interfaces. The input device 510 is, for example, a keyboard or a mouse and inputs to the recording device 100. The display device 520 is, for example, a display and displays device information or the content of an error signal. Also, in the case where the recording device 100 has a configuration including an error estimation unit 150 described later, the display device 520 may display the estimated cause of the error.

[0027] The device information acquisition unit 110 acquires a plurality of pieces of device information from the device 50 to be monitored. The device information is information of the device 50 to be monitored necessary for estimating the cause of an error in the device 50 to be monitored. The device information is information for grasping the operating status, operation status, etc. of various functions of the device 50 to be monitored, and is output continuously or intermittently at specific timings. The device information is output for a predetermined time even after an error signal is output. The device information may be numerical information or language information. The device information may be information indicating that its value is 0.

[0028] The device information acquisition unit 110 may constantly acquire the device information. In this case, the acquired device information is temporarily stored in the device information recording unit 140 or a different storage unit. Also, the device information acquisition unit 110 may acquire the device information simultaneously with the acquisition of the error signal or after the acquisition of the error signal. In this case, the device information is temporarily stored in a storage unit within the device 50 to be monitored or a device having a storage function provided separately from these. In any configuration, it is preferable to adopt a configuration in which, so that the capacity of the device information to be stored does not become too large, the old device information is deleted in order and only the device information for a certain period of time is stored.

[0029] The error signal acquisition unit 120 acquires an error signal from the device 50 to be monitored. The error signal is a signal output when an error occurs in the device 50 to be monitored. The error signal preferably includes information on the error occurrence time or the error signal output time. The error signal may be a signal directly output from the device 50 to be monitored itself. When the device information or other information is numerical information, the error signal may be a signal indicating that its value is below or exceeds a predetermined threshold value. Also, the error signal may be a signal indicating that the device information or other information cannot be obtained. A plurality of error signals may be output simultaneously or continuously.

[0030] The holding information instruction unit 130 instructs the device information to be held based on the error signal. The holding information instruction unit 130 instructs the device information recording unit 140 to hold the device information for a predetermined time including the time before and after the time when the error signal is output.

[0031] The predetermined time including the time before and after the time when the error signal is output is the time obtained by combining the first predetermined time before the time when the error signal is output and the second predetermined time after the time when the error signal is output. The predetermined time including the time before and after the time when the error signal is output may be preset as the time required to estimate the cause of the error of the monitoring target device 50. The predetermined time including the time before and after the time when the error signal is output varies depending on the type and function of the monitoring target device 50. For example, the first predetermined time is preferably 10 seconds or more and 60 seconds or less. Also, for example, the second predetermined time is preferably 5 seconds or more and 30 seconds or less.

[0032] When there are multiple types of error signals, the holding information instruction unit 130 preferably instructs to hold at least the device information corresponding to the acquired error signals. Thereby, the time for checking the device information to estimate the error cause can be reduced. Also, the capacity of the device information recording unit 140 for recording the device information can be reduced. When there are multiple types of error signals, the holding information instruction unit 130 may determine and instruct the first predetermined time or the second predetermined time based on the type of the error signal.

[0033] The device information recording unit 140 records the device information for a predetermined time including the time before and after the time when the error signal is output based on the instruction of the holding information instruction unit 130. The device information recording unit 140 preferably includes a non-volatile memory. The device information for a predetermined time including the time before and after the time when the error signal is output is preferably recorded in the non-volatile memory. Thereby, even when the power of the recording device 100 or the monitoring target device 50 is turned off, the device information can be checked later and the error cause can be estimated. The device information recording unit 140 may record the error signals acquired by the error signal acquisition unit 120 in addition to the device information.

[0034] [Device Information Recording Method] (Explanation of the Flow until Device Information is Recorded) FIG. 2 is a flowchart showing an example of the operation of the recording device 100 according to Embodiment 1. FIG. 2 shows an example of the operation until device information is recorded. First, the recording device 100 acquires device information (step S1). Next, it acquires an error signal (step S2). Next, it instructs the device information to be held based on the error signal (step S3). Then, based on the instruction of the holding information instruction unit, it records and holds the device information for a predetermined time including the time before and after the time when the error signal is output (step S4), and then ends. The device information may be displayed as necessary. In this way, the device information for a predetermined time including the time before and after the time when the error signal is output can be recorded.

[0035] [Embodiment 2] In Embodiment 2, a recording device that records device information for estimating the cause of an error and estimates the cause of the error based on the recorded device information will be described. FIG. 3 is a block diagram showing an example of the configuration of the system 10 in Embodiment 2. In Embodiment 2, in addition to Embodiment 1, as shown in FIG. 3, the recording device 100 preferably includes an error estimation unit 150. The error estimation unit 150 estimates the cause of the error based on the device information recorded by the device information recording unit 140.

[0036] The error estimation unit 150 preferably estimates the cause of the error based on a combination of device information showing abnormal behavior among a plurality of device information and an error signal. Thereby, when the same error may be caused by a plurality of factors, it is possible to estimate a complicated cause of the error that cannot be understood only from the error signal. The cause of the error estimated for the combination of device information showing abnormal behavior among a plurality of device information and an error signal may be stored in advance as a table.

[0037] The error estimation unit 150 preferably estimates the error cause using a machine learning model that outputs a score indicating the possibility of the error cause for the input of the device information recorded by the device information recording unit 140. Thereby, the error cause can be estimated more appropriately. The score indicating the possibility of the error cause is a numerical representation of the probabilities of a plurality of presumed error causes. Based on the score indicating the possibility of the error cause output by the machine learning model, the estimated error cause may be one, or a plurality of candidates may be presented.

[0038] The machine learning model is created based on teacher data that uses a plurality of types of device information as input and outputs the error cause corresponding to the input. The machine learning for the error estimation unit 150 is performed in advance. The input of the teacher data may be all of the device information that the device information acquisition unit 110 can acquire, or a part thereof. The input of the teacher data may include an error signal in addition to a plurality of types of device information. The input of the teacher data is preferably in accordance with the data configuration recorded by the device information recording unit 140. The plurality of types of device information or error signals of the teacher data may be virtual data calculated by computation or measured data. As the error cause corresponding to the input, preset error causes may be used, or after the true error cause is identified, that cause may be used. The learning data consisting of the combination of the device information and the error cause may use not only the data of one monitoring target device 50, but also the data of a plurality of monitoring target devices 50 having the same configuration.

[0039] When the error estimation unit 150 estimates the error cause, it is preferable to record the estimated error cause together with the device information in the device information recording unit 140. Also, the estimated error cause may be displayed on the display device 520. The estimation of the error cause by the error estimation unit 150 may be performed after a lapse of time from the recording of the device information, such as after the restart of the monitoring target device 50 or the recording device 100.

[0040] (Explanation of the flow until the error cause is estimated) Figure 4 is a flowchart showing an example of the operation of the recording apparatus 100 according to Embodiment 2. Figure 4 shows an example of the operation until the error cause is estimated. In the description of this flowchart, characteristic operations will be described in detail, and the description of operations already described will be omitted. From the acquisition of device information (step T1) to the recording and holding of device information (step T4), it is the same as steps S1 to S4 described above. Next, the recording apparatus 100 estimates the error cause (step T5) and then ends. Optionally, the estimated error cause may be saved, or the device information and the error cause may be displayed. In this way, the error cause can be estimated based on the recorded device information.

[0041] As described above, the device information may be acquired at all times, or may be acquired simultaneously with the acquisition of the error signal or after the acquisition of the error signal. Therefore, in the flowchart of FIG. 2 or FIG. 4, the acquisition of the device information and the acquisition of the error signal may be in a different order or may be performed simultaneously.

[0042] [Embodiment 3] In Embodiments 1 and 2, an example in which the recording apparatus 100 is directly connected to the monitored device 50 has been described. In Embodiment 3, a system will be described in which there is a control device 300 for the monitored device 50 separately from the monitored device 50. FIG. 5 is a block diagram showing an example of the configuration of the system 10 in Embodiment 3. In FIG. 5, the control device 300 and the recording apparatus 100 are described as different devices, but they may be the same device. Also, the recording apparatus 100 in FIG. 5 does not include the error estimation unit 150, but in this embodiment, it may also be configured to include the error estimation unit 150.

[0043] The control device 300 is a device including a CPU and a memory, and may be a PC terminal or a server on the cloud. Also, not only the entire device but also some devices or some functions within the device may be provided on the cloud. The input device 510 is, for example, a keyboard or a mouse and inputs to the control device 300. The display device 520 is, for example, a display and displays measurement data and the like.

[0044] When there is a control device 300, the device information obtained by the device information acquisition unit 110 may be information obtained via the control device 300. In this case, the device information may be information based on feedback obtained by the control device 300 monitoring the monitoring target device 50. That is, the device information may be information output by the control device 300.

[0045] The device information acquisition unit 110 may constantly acquire device information. Also, the device information acquisition unit 110 may acquire device information simultaneously with the acquisition of the error signal or after the acquisition of the error signal. In this case, the device information is temporarily stored in a storage unit in the monitoring target device 50, a storage unit in the control device 300, or a device having a storage function provided separately from these.

[0046] When there is a control device 300, the error signal acquired by the error signal acquisition unit 120 may be a signal output from the control device 300. The error signal may be a signal determined from device information or other information obtained by the monitoring target device 50 itself or the control device 300 monitoring the monitoring target device 50.

[0047] Even in the system 10 including the control device 300, the operation of the recording device 100 can be performed in the same manner as the above-described flow.

[0048] [Embodiment 4] In Embodiment 4, the recording system 10, the recording device 100, and the control device 300 when the monitoring target device 50 is the X-ray analysis device 200 will be described including examples of specific device information and error signals.

[0049] [Overall System] The present invention can be configured as a system 10 including, for example, a recording device 100 and an X-ray analysis device 200. FIG. 6 is a conceptual diagram showing an example of the configuration of the system 10 including the recording device 100, the X-ray analysis device 200, and a control device 300. The system 10 has the recording device 100, the X-ray analysis device 200, and the control device 300.

[0050] By using such a system 10, when an error occurs in the X-ray analysis device 200, it is possible to record device information for estimating the cause of the error. Also, the cause of the error can be estimated.

[0051] [X-ray analysis device] The X-ray analysis device 200 constitutes an optical system that irradiates a sample with X-rays and detects scattered X-rays and fluorescent X-rays generated from the sample. The X-ray analysis device 200 includes an X-ray generation unit 210 that generates X-rays from an X-ray focus, that is, an X-ray source, an incident-side optical unit 220, a goniometer 230, a sample stage 240 on which a sample is placed, and a detector 260 that detects X-rays. The X-ray analysis device 200 may include an exit-side optical unit 250. Since the X-ray generation unit 210, the incident-side optical unit 220, the goniometer 230, the sample stage 240, the exit-side optical unit 250, and the detector 260 that constitute the X-ray analysis device 200 may be general ones, the description thereof is omitted. Note that the configuration shown in FIG. 6 is an example, and various other configurations may be adopted.

[0052] When the device to be monitored 50 is the X-ray analysis device 200, the device information preferably includes two or more of tube voltage, tube current, degree of vacuum, filament current, number of discharges, or bias voltage. Note that the degree of vacuum is the degree of vacuum in the region where the X-ray generation unit 210 is disposed. This makes it easy to estimate the cause of an error when the error occurs in the X-ray generation unit 210. Since errors in the X-ray generation unit 210 of the X-ray analysis device 200 often occur due to complex factors, the present invention can be preferably applied.

[0053] A rotor type X-ray generating unit 210 may be used as the X-ray generating unit 210 of the X-ray analyzer 200. In that case, the X-ray generating unit 210 includes a rotating anode grounded type cathode unit and an electron gun. Further, the electron gun includes an electron emitting unit and a Wehnelt electrode for electron focusing. Here, the Wehnelt electrode has a structure that applies a voltage (bias voltage) lower than the negative voltage applied to the electron emitting unit.

[0054] [Control device] FIG. 7 is a block diagram showing an example of the configuration of a system 10 including a recording device 100, an X-ray analyzer 200, and a control device 300. In FIG. 7, the recording device 100 and the control device 300 are described as an integrated device. The control device 300 is connected to the X-ray analyzer 200 and controls the X-ray analyzer 200, processes and stores the acquired data. The recording device 100 is the above-described recording device 100.

[0055] The control device 300 and the recording device 100 are devices provided with a CPU and a memory, and may be a PC terminal or a server on the cloud. Also, not only the entire device but also a part of the device or a part of the functions in the device may be provided on the cloud. The input device 510 is, for example, a keyboard or a mouse and inputs to the control device 300 or the recording device 100. The display device 520 is, for example, a display and displays measurement data, device information, the content of an error signal, or an estimated error cause.

[0056] The control device 300 includes a control unit 310, a control information storage unit 320, a measurement data storage unit 330, and a display unit 340.

[0057] The control unit 310 controls the operation of the X-ray analyzer 200. The control information storage unit 320 stores information necessary for the control or analysis of the sample obtained from the X-ray analyzer 200. The information necessary for the control or analysis of the sample includes information about the X-ray analyzer 200 such as the device name, the type of radiation source, the wavelength, and the background. In addition, necessary information among the shape, arrangement, types of constituent elements, composition, and absorption coefficient of the sample may be included. The control information storage unit 320 may temporarily store the device information.

[0058] The measurement data storage unit 330 stores the measurement data obtained from the X-ray analyzer 200. The measurement data may include necessary information among the type of radiation source, the wavelength, the background, the shape, arrangement, types of constituent elements, composition, and absorption coefficient of the sample. The display unit 340 causes the measurement data to be displayed on the display device 520. Thereby, the user can confirm the measurement data. In addition, the user can give instructions or specifications to the control device 300 based on the measurement data.

[0059] Note that in FIG. 6, the control device 300 and the recording device 100 are described as the same PC. Also, in FIG. 7, the control device 300 and the recording device 100 are described as an integrated device. However, as described above, in the method of the present invention, when device information and an error signal are output from the X-ray analyzer 200, the device information and the error signal can be acquired without going through the control device 300, and the device information can be recorded or the cause of the error can be estimated. Therefore, as shown in FIG. 8, the recording device 100 may be configured as a device different from the control device 300. Also, as shown in FIG. 9, the recording device 100 may be configured as a part of the functions included in the control device 300. FIGS. 8 and 9 are block diagrams showing modified examples of the configuration of the system 10 including the recording device 100, the X-ray analyzer 200, and the control device 300.

[0060] [Measurement method] A sample is placed in the X-ray analyzer 200, and the goniometer is driven under predetermined conditions based on the control of the control device 300. The X-ray analyzer 200 repeats the movement of the rotation axis and the projection of X-rays under predetermined conditions. Also, the sample is irradiated with X-rays, and scattered X-rays, transmitted X-rays, fluorescent X-rays, etc. generated from the sample are detected. Thereby, measurement data such as X-ray reflectivity data, X-ray small-angle scattering data, and fluorescent X-ray data is acquired. The X-ray analyzer 200 transmits the acquired measurement data to the control device 300. The X-ray analyzer 200 may transmit the device information during measurement to the control device 300. When an error occurs, the X-ray analyzer 200 transmits an error signal to the control device 300. When the recording device 100 is configured as a device different from the control device 300, the device information or the error signal may be directly transmitted to the recording device 100.

[0061] [Example of estimating error cause] (1) Consider the case where an error signal detecting an abnormality in the filament current is output. FIG. 10 is a schematic graph showing examples of two pieces of device information for a predetermined time including the time before and after the time when the error signal is output. The two pieces of device information in FIG. 10 are the feedback values (analog voltage signal outputs) of the filament current and the bias voltage. FIG. 10 shows that an error signal detecting an abnormality in the filament current is output.

[0062] When an error signal detecting an abnormality in the filament current is output, the cause of the abnormality in the filament current was unknown in the prior art. However, as in the example of the present invention, when the filament current and the bias voltage are set as device information and the device information for a predetermined time including the time before and after the time when the error signal is output is recorded, it can be estimated that the cause of the abnormality in the filament current is due to the disturbance of the bias voltage.

[0063] (2) Consider the case where an error signal is output when an increase in the tube current component other than the thermoelectrons generated from the filament, or a corresponding drop in the tube voltage, i.e., an abnormality in the tube current or tube voltage (hereinafter referred to as discharge) is detected. FIGS. 11(a) and (b) are schematic graphs showing examples of two pieces of device information for a predetermined time including the time before and after the time when the error signal is output. The two pieces of device information in FIG. 11 are the measured vacuum pressure output value inside the tube and the feedback value of the tube current (analog voltage signal output). In both FIGS. 11(a) and (b), an error signal detecting the occurrence of discharge is output.

[0064] In FIG. 11(a), at the time of error signal output, the vacuum pressure temporarily increases (the degree of vacuum deteriorates). In contrast, in FIG. 11(b), the vacuum pressure does not increase at the time of error signal output. By comprehensively evaluating the discharge and the vacuum pressure, in FIG. 11(a), it can be estimated that discharge is occurring inside the tube. Also, in FIG. 11(b), it can be estimated that discharge is occurring outside the tube such as in the power supply unit.

[0065] When an error signal detecting the occurrence of discharge is output, the cause of the discharge was unknown in the prior art. However, as in the example of the present invention, when the vacuum pressure and the tube current are set as device information and the device information for a predetermined time including the time before and after the time when the error signal is output is recorded, the cause of the error can be estimated by the above-described comprehensive evaluation. Note that in both cases of FIGS. 11(a) and 11(b), the reason for the decrease in the vacuum pressure after the error signal output is that X-rays are not generated due to the error.

[0066] As described above, the recording device, system, method, and program of the present invention can record the device information for a predetermined time including the time before and after the time when the error signal is output. Also, the cause of the error can be estimated based on the recorded device information.

[0067] Needless to say, the present invention is not limited to the above-described embodiments. The scope of the present invention extends to various modifications and equivalents included in the technical idea of the present invention. Also, the names, structures, shapes, numbers, positions, sizes, etc. of the components shown in each drawing are for convenience of explanation and can be changed as appropriate.

Explanation of Reference Numerals

[0068] 10 System 50 Device to be Monitored 100 Recording Device 110 Device Information Acquisition Unit 120 Error Signal Acquisition Unit 130 Retained Information Instruction Unit 140 Device Information Recording Unit 150 Error Estimation Unit 200 X-ray Analyzer 210 X-ray Generation Unit 220 Incident-side Optical Unit 230 Goniometer 240 Sample Stage 250 Exit-side Optical Unit 260 Detector 300 Control Device 310 Control Unit 320 Control Information Storage Unit 330 Measurement Data Storage Unit 340 Display Unit 510 Input Device 520 Display Device L Control Bus

Claims

1. A recording device for recording device information for estimating the cause of an error in a monitoring target device having a function of outputting device information and an error signal indicating that an error has occurred when an error occurs, a device information acquisition unit that acquires a plurality of pieces of the device information from the monitoring target device; an error signal acquisition unit that acquires the error signal from the monitoring target device; a holding information instruction unit that instructs to hold the device information based on the error signal; a device information recording unit that records the device information for a predetermined time including the time before and after the time when the error signal is output based on the instruction of the holding information instruction unit, and the recording device is characterized by comprising the above.

2. The recording device according to claim 1, further comprising an error estimation unit that estimates the cause of an error based on the device information recorded by the device information recording unit.

3. The error estimation unit estimates the cause of an error by using a machine learning model that outputs a score indicating the possibility of the cause of an error for the input of the device information recorded by the device information recording unit. The recording device according to claim 2 is characterized by this.

4. The machine learning model is created based on teacher data that takes a plurality of types of the device information as inputs and outputs the cause of an error corresponding to the input. The recording device according to claim 3 is characterized by this.

5. There are a plurality of types of the error signals, The holding information instruction unit instructs to hold at least the device information corresponding to the acquired error signal. The recording device according to claim 1 is characterized by this.

6. The monitoring target device is an X-ray analysis device comprising an X-ray generation unit that generates X-rays, a sample stage on which a sample is placed, and a detector that detects X-rays. The recording device according to claim 1 is characterized by this.

7. The device information includes two or more of tube voltage, tube current, degree of vacuum, filament current, number of discharges, or bias voltage. The recording device according to claim 6 is characterized by this.

8. An analyzer having a function of analyzing a sample and outputting the device information and the error signal; a recording device according to any one of claims 1 to 7, and the monitoring target device is the analyzer. A system is characterized by this.

9. A method applied to a recording device that records the device information for estimating the cause of an error in a monitored device having a function of outputting an error signal indicating that an error has occurred when the device information and the error occur, the step of obtaining a plurality of the device information from the monitored device; the step of obtaining the error signal from the monitored device; the step of instructing the device information to be held based on the error signal; the step of recording the device information for a predetermined time including the time before and after the time when the error signal is output based on the instruction, characterized in that the method comprises:

10. A program for recording the device information for estimating the cause of an error in a monitored device having a function of outputting an error signal indicating that an error has occurred when the device information and the error occur, a process of obtaining a plurality of the device information from the monitored device; a process of obtaining the error signal from the monitored device; a process of instructing the device information to be held based on the error signal; a process of recording the device information for a predetermined time including the time before and after the time when the error signal is output based on the instruction, characterized in that the program causes a computer to execute the process.

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