Cleaning device

Abstract

To effectively clean a cleaning target.SOLUTION: A cleaning device 1 includes: a cleaning tank 2 that has an internal space 2S storing cleaning liquid Ca, and in which a cleaning target S is immersed in the cleaning liquid Ca; a decompression device 8 that decompresses the internal space 2S to a pressure equal to or less than a steam pressure of the cleaning liquid Ca or a pressure immediately before the pressure; an air supply nozzle 23 that supplies air to the cleaning liquid Ca in a state where the pressure of the internal space 2S is reduced by the decompression device 8; and an orifice through which the air to be supplied to the air supply nozzle 23 passes.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure relates to a cleaning device.

Background Art

[0002] In the technical field related to cleaning devices, a cleaning device that causes a cleaning liquid to boil under reduced pressure, as disclosed in Patent Document 1, is known.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When air is supplied to the cleaning liquid while the cleaning liquid is boiling under reduced pressure, the cleaning liquid boils explosively (bumping). The object to be cleaned is cleaned by the violent flow of the cleaning liquid generated by bumping. However, if air is not supplied at an appropriate flow rate, it may be difficult to effectively clean the object to be cleaned.

[0005] An object of the present disclosure is to effectively clean an object to be cleaned.

Means for Solving the Problems

[0006] According to the present disclosure, there is provided a cleaning device including a cleaning tank having an internal space in which a cleaning liquid is stored, an object to be cleaned is immersed in the cleaning liquid, a decompression device that decompresses the internal space to a pressure equal to or lower than the vapor pressure of the cleaning liquid or a pressure immediately before that, an air supply nozzle disposed below the object to be cleaned and supplying air to the cleaning liquid in a state where the internal space is decompressed by the decompression device, and an orifice through which the air supplied to the air supply nozzle passes.

Effects of the Invention

[0007] According to the present disclosure, the object to be cleaned is effectively cleaned.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Modes for Carrying Out the Invention

[0009] Hereinafter, embodiments according to the present disclosure will be described with reference to the drawings, but the present disclosure is not limited to the embodiments. The components of the embodiments described below can be combined as appropriate. Also, some components may not be used.

[0010] In the embodiments, the terms left, right, up, down, front, and rear are used to describe the positional relationship of each part. These terms indicate the relative position or direction based on the center of the cleaning device 1.

[0011] [First Embodiment] The first embodiment will be described.

[0012] <Cleaning Device> FIG. 1 is a diagram schematically showing a cleaning device 1 according to the present embodiment. The cleaning device 1 cleans a cleaning target S using a cleaning liquid Ca. In the present embodiment, the cleaning device 1 is a reduced-pressure boiling type cleaning device. As the cleaning target S of the cleaning device 1, medical instruments are exemplified. As the medical instruments, scalpels or forceps are exemplified.

[0013] The cleaning device 1 includes a cleaning tank 2, a basket 3, a support member 4, a filter device 5, a drainage device 6, a heating device 7, a decompression device 8, a liquid-phase air supply device 9, a gas-phase air supply device 10, a pressure sensor 11, a temperature sensor 12, and a control device 13.

[0014] The cleaning tank 2 has an internal space 2S in which the cleaning liquid Ca is stored. The cleaning target S is immersed in the cleaning liquid Ca stored in the cleaning tank 2. An opening is provided at the upper end of the cleaning tank 2. The cleaning target S is disposed in the internal space 2S of the cleaning tank 2. The cleaning target S is carried into the internal space 2S of the cleaning tank 2 through the opening of the cleaning tank 2. The cleaning target S is carried out from the internal space 2S of the cleaning tank 2 through the opening of the cleaning tank 2. The opening of the cleaning tank 2 is closed by a lid 14. When the opening of the cleaning tank 2 is closed by the lid 14, the internal space 2S of the cleaning tank 2 is sealed.

[0015] The basket 3 houses the cleaning target S. The basket 3 is a net-like housing member. The cleaning liquid Ca can pass through the basket 3.

[0016] The support member 4 supports the basket 3 in the internal space 2S of the cleaning tank 2. The support member 4 supports the cleaning target S through the basket 3 in the internal space 2S of the cleaning tank 2. The cleaning target S is supported by the support member 4 in a state of being housed in the basket 3. The basket 3 and the cleaning target S housed in the basket 3 are disposed above the support member 4 in the internal space 2S of the cleaning tank 2. The support member 4 is a net-like member. The support member 4 is a wire mesh. The cleaning liquid Ca can pass through the support member 4.

[0017] In this embodiment, a plurality of objects S to be cleaned are arranged at intervals in the internal space 2S of the cleaning tank 2. The objects S to be cleaned are arranged in a plurality with intervals in each of the left-right direction, up-down direction, and front-back direction.

[0018] The filter device 5 collects foreign matters from the cleaning liquid Ca. The filter device 5 is arranged above the object S to be cleaned. The filter device 5 is immersed in the cleaning liquid Ca. When the object S to be cleaned is cleaned, there is a possibility that the foreign matters peeled off from the object S to be cleaned float in the cleaning liquid Ca. The filter device 5 collects the foreign matters peeled off from the object S to be cleaned. In this embodiment, the filter device 5 is arranged on each of the left end side and the right end side of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction. That is, in this embodiment, the filter device 5 includes a first filter device 5A arranged on the right end side of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction and a second filter device 5B arranged on the left end side of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction.

[0019] The drainage device 6 discharges the cleaning liquid Ca from the internal space 2S of the cleaning tank 2. The drainage device 6 has a drainage line 18 connected to the cleaning tank 2 and a drainage pump 19 arranged in the drainage line 18. By the operation of the drainage pump 19, the cleaning liquid Ca is discharged from the internal space 2S of the cleaning tank 2 through the drainage line 18.

[0020] The heating device 7 heats the cleaning liquid Ca stored in the cleaning tank 2. The heating device 7 includes a heater 20 arranged in the internal space 2S of the cleaning tank 2. The heater 20 is immersed in the cleaning liquid Ca in the internal space 2S of the cleaning tank 2. The heater 20 is arranged below the support member 4.

[0021] The decompression device 8 decompresses the internal space 2S of the cleaning tank 2. The decompression device 8 decompresses the internal space 2S of the cleaning tank 2 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or to a pressure immediately before the vapor pressure of the cleaning liquid Ca. The decompression device 8 decompresses the internal space 2S of the cleaning tank 2 by discharging gas from the internal space 2S of the cleaning tank 2. The decompression device 8 includes an exhaust line 21 connected to the cleaning tank 2 and a vacuum pump 22 disposed in the exhaust line 21. By the operation of the vacuum pump 22, gas is discharged from the internal space 2S of the cleaning tank 2, and the internal space 2S of the cleaning tank 2 is decompressed.

[0022] FIG. 2 is a plan view schematically showing the liquid-phase air supply device 9 according to the present embodiment. The liquid-phase air supply device 9 supplies air to the cleaning liquid Ca stored in the cleaning tank 2. The liquid-phase air supply device 9 includes an air supply nozzle 23 disposed in the internal space 2S of the cleaning tank 2, an orifice 40 through which the air supplied to the air supply nozzle 23 passes, and a filter 25 through which the air supplied to the orifice 40 passes.

[0023] As shown in FIG. 1, the air supply nozzle 23 is disposed below the object S to be cleaned in the internal space 2S of the cleaning tank 2. The air supply nozzle 23 is immersed in the cleaning liquid Ca in the internal space 2S of the cleaning tank 2. The air supply nozzle 23 is disposed below the support member 4. The first air supply nozzle 23A has a plurality of air supply ports 27. The air supply nozzle 23 supplies air from the air supply ports 27 to the cleaning liquid Ca in a state where the internal space 2S of the cleaning tank 2 is decompressed by the decompression device 8.

[0024] In the present embodiment, the air supply nozzle 23 includes a first air supply nozzle 23A and a second air supply nozzle 23B disposed at a position different from that of the first air supply nozzle 23A in the horizontal direction of the internal space 2S of the cleaning tank 2. Each of the first air supply nozzle 23A and the second air supply nozzle 23B is disposed below the object S to be cleaned in the internal space 2S of the cleaning tank 2. Each of the first air supply nozzle 23A and the second air supply nozzle 23B is immersed in the cleaning liquid Ca in the internal space 2S of the cleaning tank 2. Each of the first air supply nozzle 23A and the second air supply nozzle 23B is disposed below the support member 4.

[0025] The air supply ports 27 are provided in each of the first air supply nozzles 23A and the second air supply nozzles 23B. In the following description, the air supply port 27 provided in the first air supply nozzle 23A is appropriately referred to as the first air supply port 27A, and the air supply port 27 provided in the second air supply nozzle 23B is appropriately referred to as the second air supply port 27B.

[0026] A plurality of first air supply ports 27A are provided in the first air supply nozzle 23A. A plurality of second air supply ports 27B are provided in the second air supply nozzle 23B. The first air supply port 27A and the second air supply port 27B are arranged at different positions in the horizontal direction in the internal space 2S of the washing tank 2.

[0027] The first air supply nozzle 23A is arranged at a first position in the horizontal direction of the internal space 2S of the washing tank 2. The second air supply nozzle 23B is arranged at a second position different from the first position in the horizontal direction of the internal space 2S of the washing tank 2. Supplying air to the cleaning liquid Ca from the first air supply port 27A of the first air supply nozzle 23A means supplying air to the cleaning liquid Ca from the first position. Supplying air to the cleaning liquid Ca from the second air supply port 27B of the second air supply nozzle 23B means supplying air to the cleaning liquid Ca from the second position.

[0028] In the present embodiment, the first air supply nozzle 23A is arranged to the left of the second air supply nozzle 23B. The first air supply nozzle 23A is arranged on the left end side rather than the central part in the horizontal direction of the internal space 2S of the washing tank 2. The second air supply nozzle 23B is arranged on the right end side rather than the central part in the horizontal direction of the internal space 2S of the washing tank 2. In the present embodiment, the first position is a position between the central part and the left end part in the horizontal direction of the internal space 2S of the washing tank 2. Note that at least one of the first air supply ports 27A may be arranged at the left end part of the internal space 2S of the washing tank 2. The second position is a position between the central part and the right end part side in the horizontal direction of the internal space 2S of the washing tank 2. Note that at least one of the second air supply ports 27B may be arranged at the right end part of the internal space 2S of the washing tank 2.

[0029] In this embodiment, the liquid-phase air supply device 9 includes a first liquid-phase air supply line 24A communicating with the first air supply nozzle 23A, a second liquid-phase air supply line 24B communicating with the second air supply nozzle 23B, and a liquid-phase air supply line 24C communicating with each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B. The first liquid-phase air supply line 24A is connected to the first air supply nozzle 23A. The second liquid-phase air supply line 24B is connected to the second air supply nozzle 23B. The first liquid-phase air supply line 24A, the second liquid-phase air supply line 24B, and the liquid-phase air supply line 24C are connected at a connection portion 24D. The first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B are provided so as to branch from the liquid-phase air supply line 24C.

[0030] The first air supply nozzle 23A has a first inlet 41. The second air supply nozzle 23B has a second inlet 42. In the horizontal direction of the internal space 2S of the cleaning tank 2, the second inlet 42 is arranged at a position different from that of the first inlet 41.

[0031] The first liquid-phase air supply line 24A has a first outlet 43. The second liquid-phase air supply line 24B has a second outlet 44. The first inlet 41 and the first outlet 43 are connected. The second inlet 42 and the second outlet 44 are connected. The first liquid-phase air supply line 24A communicates with the first inlet 41 of the first air supply nozzle 23A. The second liquid-phase air supply line 24B communicates with the second inlet 42 of the second air supply nozzle 23B.

[0032] Further, the liquid-phase air supply device 9 includes a first liquid-phase air supply valve 26A arranged in the first liquid-phase air supply line 24A and a second liquid-phase air supply valve 26B arranged in the second liquid-phase air supply line 24B. The first liquid-phase air supply valve 26A opens and closes the first liquid-phase air supply line 24A. The second liquid-phase air supply valve 26B opens and closes the second liquid-phase air supply line 24B. Each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B is arranged in the external space of the cleaning tank 2.

[0033] The filter 25 is disposed in the liquid-phase air supply line 24C. The orifice 40 is disposed in the liquid-phase air supply line 24C. The orifice 40 is disposed in the liquid-phase air supply line 24C between the filter 25 and the connection portion 24D. The air supplied to the air supply nozzle 23 passes through the filter 25 and the orifice 40. The filter 25 collects foreign matters from the air. The air that has passed through the filter 25 is supplied to the orifice 40. The air that has passed through the orifice 40 is supplied to the air supply nozzle 23.

[0034] The orifice 40 adjusts the flow rate of the air supplied to the air supply nozzle 23. In the present embodiment, the air that has passed through the orifice 40 is distributed to the first air supply nozzle 23A and the second air supply nozzle 23B. The air that has passed through the filter 25, the orifice 40, and the first liquid-phase air supply line 24A is supplied to the first air supply nozzle 23A. The air that has passed through the filter 25, the orifice 40, and the second liquid-phase air supply line 24B is supplied to the second air supply nozzle 23B.

[0035] The liquid-phase air supply device 9 is capable of supplying air to the cleaning liquid Ca from at least one of the first air supply port 27A and the second air supply port 27B disposed in the internal space 2S of the cleaning tank 2. The internal space 2S of the cleaning tank 2 includes a first partial space on the left end side of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction and a second partial space on the right end side opposite to the left end side of the central portion of the internal space 2S of the cleaning tank 2. The liquid-phase air supply device 9 can supply air to the cleaning liquid Ca in the first partial space from the first air supply port 27A with the supply of air from the second air supply port 27B stopped. The liquid-phase air supply device 9 can supply air to the cleaning liquid Ca in the second partial space from the second air supply port 27B with the supply of air from the first air supply port 27A stopped.

[0036] The control device 13 controls each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B. In the present embodiment, when the air passing through the orifice 40 is supplied to each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B, the control device 13 closes the second liquid-phase air supply valve 26B when opening the first liquid-phase air supply valve 26A, and closes the first liquid-phase air supply valve 26A when opening the second liquid-phase air supply valve 26B.

[0037] When the internal space 2S of the cleaning tank 2 is depressurized and the first liquid-phase air supply valve 26A opens while the second liquid-phase air supply valve 26B is closed, due to the differential pressure between the internal space 2S of the cleaning tank 2 and the external space, the air in the external space of the cleaning tank 2 is supplied to the first air supply nozzle 23A through the filter 25, the orifice 40, and the first liquid-phase air supply line 24A. The filter 25 collects foreign matters from the air. The air supplied to the first air supply nozzle 23A through the orifice 40 and the first liquid-phase air supply line 24A is supplied to the cleaning liquid Ca from the first air supply port 27A provided in the first air supply nozzle 23A. When the first liquid-phase air supply valve 26A opens while the second liquid-phase air supply valve 26B is closed, air is not supplied to the cleaning liquid Ca from the second air supply port 27B, and air is supplied to the cleaning liquid Ca in the first partial space on the left side of the internal space 2S of the cleaning tank 2 from the first air supply port 27A.

[0038] When the internal space 2S of the cleaning tank 2 is depressurized and the second liquid-phase air supply valve 26B opens while the first liquid-phase air supply valve 26A is closed, due to the differential pressure between the internal space 2S of the cleaning tank 2 and the external space, the air in the external space of the cleaning tank 2 is supplied to the second air supply nozzle 23B through the filter 25, the orifice 40, and the second liquid-phase air supply line 24B. The filter 25 collects foreign matters from the air. The air supplied to the second air supply nozzle 23B through the orifice 40 and the second liquid-phase air supply line 24B is supplied to the cleaning liquid Ca from the second air supply port 27B provided in the second air supply nozzle 23B. When the second liquid-phase air supply valve 26B opens while the first liquid-phase air supply valve 26A is closed, air is not supplied to the cleaning liquid Ca from the first air supply port 27A, and air is supplied to the cleaning liquid Ca in the second partial space on the right side of the internal space 2S of the cleaning tank 2 from the second air supply port 27B.

[0039] The gas-phase air supply device 10 supplies air to the gas space of the internal space 2S of the cleaning tank 2. As shown in FIG. 1, the gas-phase air supply device 10 includes a gas-phase air supply line 28 connected to the cleaning tank 2, a filter 29 disposed in the gas-phase air supply line 28, and a gas-phase air supply valve 30 disposed in the gas-phase air supply line 28 between the filter 29 and the cleaning tank 2. When the gas-phase air supply valve 30 opens in a state where the internal space 2S of the cleaning tank 2 is depressurized, due to the differential pressure between the internal space 2S of the cleaning tank 2 and the external space, the air in the external space of the cleaning tank 2 is supplied to the internal space 2S of the cleaning tank 2 through the filter 29 and the gas-phase air supply line 28.

[0040] The pressure sensor 11 detects the pressure of the internal space 2S of the cleaning tank 2. The temperature sensor 12 detects the temperature of the cleaning liquid Ca stored in the cleaning tank 2.

[0041] The control device 13 includes a computer system. The control device 13 controls the cleaning device 1. The control device 13 can perform liquid-phase air supply pulse cleaning and gas-phase air supply pulse cleaning as cleaning processes for the object to be cleaned S. The liquid-phase air supply pulse cleaning refers to a cleaning method in which, in a state where the internal space 2S of the cleaning tank 2 in which the object to be cleaned S is disposed and the cleaning liquid Ca is stored is depressurized, air is supplied to the cleaning liquid Ca to explosively boil (bump) the cleaning liquid Ca, and the object to be cleaned S is cleaned by the violent flow of the cleaning liquid Ca generated by the bump. The gas-phase air supply pulse cleaning refers to a cleaning method in which, after the internal space 2S of the cleaning tank 2 in which the object to be cleaned S is disposed and the cleaning liquid Ca is stored is depressurized, air is supplied to the internal space 2S of the cleaning tank 2 to change the pressure of the internal space 2S of the cleaning tank 2, and the object to be cleaned S is cleaned by the violent flow of the cleaning liquid Ca generated by the change in the pressure of the internal space 2S of the cleaning tank 2.

[0042] When performing liquid-phase supply air pulse cleaning, after the object to be cleaned S is carried into the internal space 2S of the cleaning tank 2 through the opening of the cleaning tank 2, the opening of the cleaning tank 2 is closed by the lid 14. The object to be cleaned S is arranged above the support member 4 in the internal space 2S of the cleaning tank 2 while being accommodated in the basket 3. After the object to be cleaned S accommodated in the basket 3 is arranged in the internal space 2S of the cleaning tank 2 so as to be immersed in the cleaning liquid Ca, the control device 13 controls the heating device 7 so that the cleaning liquid Ca is heated to the set temperature, and controls the decompression device 8 so that the internal space 2S of the cleaning tank 2 is decompressed to the set pressure. When the cleaning liquid Ca is heated to the set temperature and the internal space 2S of the cleaning tank 2 is decompressed to the set pressure, the cleaning liquid Ca undergoes decompression boiling. For example, when the cleaning liquid Ca is heated to 50 °C, the cleaning liquid Ca undergoes decompression boiling when the pressure in the internal space 2S of the cleaning tank 2 is decompressed to about 89 kPa. The object to be cleaned S is cleaned by the stirring action caused by the boiling of the cleaning liquid Ca. The control device 13 causes a small amount of air to be supplied from the liquid-phase supply air device 9 to the cleaning liquid Ca in a state where the cleaning liquid Ca is boiling. When air is supplied from at least one of the first air supply port 27A and the second air supply port 27B to the cleaning liquid Ca in a state where the cleaning liquid Ca is undergoing decompression boiling, the supplied air becomes the nucleus of boiling, and the cleaning liquid Ca boils explosively (bumping). The surface of the object to be cleaned S is effectively cleaned by the violent flow of the cleaning liquid Ca generated by bumping.

[0043] When performing gas-phase supply pulse cleaning, similar to liquid-phase supply pulse cleaning, after the object S to be cleaned accommodated in the basket 3 is placed in the internal space 2S of the cleaning tank 2 so as to be immersed in the cleaning liquid Ca, the control device 13 controls the heating device 7 so that the cleaning liquid Ca is heated to the set temperature, and controls the decompression device 8 so that the internal space 2S of the cleaning tank 2 is decompressed to the set pressure. When the cleaning liquid Ca is heated to the set temperature and the internal space 2S of the cleaning tank 2 is decompressed to the set pressure, the cleaning liquid Ca undergoes decompression boiling. The control device 13 supplies air from the gas-phase supply device 10 to the gas space of the internal space 2S of the cleaning tank 2 in a state where the cleaning liquid Ca is undergoing decompression boiling. When air is supplied to the cleaning tank 2, the pressure in the internal space 2S of the cleaning tank 2 rises. When the pressure in the internal space 2S of the cleaning tank 2 rises, the vapor inside the object S to be cleaned condenses, and as a result, the cleaning liquid Ca vigorously flows into the inside of the object S to be cleaned. The intense flow of the cleaning liquid Ca generated by the change in the pressure in the internal space 2S of the cleaning tank 2 effectively cleans the inside of the object S to be cleaned.

[0044] When performing liquid-phase supply pulse cleaning or gas-phase supply pulse cleaning, the set pressure is a pressure below the vapor pressure of the cleaning liquid Ca or a pressure immediately before the vapor pressure of the cleaning liquid Ca.

[0045] <Cleaning Method> FIG. 3 is a diagram schematically showing an example of the operation of the cleaning device 1 in the liquid-phase air supply pulse cleaning according to the present embodiment. The control device 13 controls the heating device 7 so that the cleaning liquid Ca is heated to a set temperature, and controls the decompression device 8 so that the internal space 2S of the cleaning tank 2 is decompressed to a set pressure. When the cleaning liquid Ca is heated to the set temperature and the internal space 2S of the cleaning tank 2 is decompressed to the set pressure, the cleaning liquid Ca undergoes decompression boiling. In a state where the cleaning liquid Ca is undergoing decompression boiling, the liquid-phase air supply device 9 starts a second air supply operation after finishing the first air supply operation. The first air supply operation includes supplying air from the first air supply port 27A to the cleaning liquid Ca in the first partial space on the left side of the internal space 2S of the cleaning tank 2 with the object to be cleaned S immersed in the cleaning liquid Ca. The second air supply operation includes supplying air from the second air supply port 27B to the cleaning liquid Ca in the second partial space on the right side of the internal space 2S of the cleaning tank 2 with the object to be cleaned S immersed in the cleaning liquid Ca. In the first air supply operation, the amount of air supplied from the first air supply port 27A is larger than the amount of air supplied from the second air supply port 27B. In the second air supply operation, the amount of air supplied from the second air supply port 27B is larger than the amount of air supplied from the first air supply port 27A. In the present embodiment, in the first air supply operation, air is not supplied from the second air supply port 27B to the cleaning liquid Ca in the second partial space, and air is supplied from the first air supply port 27A to the cleaning liquid Ca in the first partial space. In the second air supply operation, air is not supplied from the first air supply port 27A to the cleaning liquid Ca in the first partial space, and air is supplied from the second air supply port 27B to the cleaning liquid Ca in the second partial space.

[0046] The filter devices 5 are arranged on the left end side and the right end side of the central part of the internal space 2S of the cleaning tank 2 in the horizontal direction, respectively. The filter devices 5 include a first filter device 5A arranged on the right end side of the central part of the internal space 2S of the cleaning tank 2 in the horizontal direction, and a second filter device 5B arranged on the left end side of the central part of the internal space 2S of the cleaning tank 2 in the horizontal direction. The first filter device 5A is arranged on the right end side of the internal space 2S of the cleaning tank 2 with respect to the first air supply port 27A. The second filter device 5B is arranged on the left end side of the internal space 2S of the cleaning tank 2 with respect to the second air supply port 27B.

[0047] In the first air supply operation, the control device 13 supplies a small amount of air to the cleaning liquid Ca in the first partial space on the left side of the internal space 2S of the cleaning tank 2 from the first air supply port 27A of the liquid-phase air supply device 9 in a state where the cleaning liquid Ca is undergoing depressurized boiling. In a state where air is being supplied from the first air supply port 27A to the cleaning liquid Ca, no air is supplied from the second air supply port 27B. The liquid-phase air supply device 9 starts supplying air from the first air supply port 27A to the cleaning liquid Ca in the first partial space with the object to be cleaned S immersed in the cleaning liquid Ca. When air is supplied from the first air supply port 27A to the cleaning liquid Ca in the first partial space in a state where the cleaning liquid Ca is undergoing depressurized boiling, the cleaning liquid Ca experiences bumping boiling. Due to the bumping boiling, a flow of the cleaning liquid Ca upward from the first air supply port 27A is generated. The first air supply port 27A is arranged horizontally to the left of the central portion of the internal space 2S of the cleaning tank 2. Also, when air is supplied from the first air supply port 27A to the cleaning liquid Ca, no air is supplied from the second air supply port 27B to the cleaning liquid Ca. Therefore, as indicated by the arrow in FIG. 3, a horizontal flow is generated in the cleaning liquid Ca. When air is supplied from the first air supply port 27A to the cleaning liquid Ca and no air is supplied from the second air supply port 27B, a flow of the cleaning liquid Ca from the left end portion to the right end portion of the cleaning tank 2 is generated. When the cleaning liquid Ca flows horizontally, not only the lower surface but also the upper surface of the object to be cleaned S is effectively cleaned with the cleaning liquid Ca.

[0048] The cleaning liquid Ca flowing horizontally passes through the first filter device 5A. Foreign matter peeled off from the object to be cleaned S passes through the first filter device 5A together with the cleaning liquid Ca. The first filter device 5A can effectively collect foreign matter peeled off from the object to be cleaned S.

[0049] The liquid-phase air supply device 9 terminates the first air supply operation after continuing it for a predetermined duration. That is, the liquid-phase air supply device 9 terminates the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space after continuing the air supply for a predetermined duration. By terminating the air supply from the first air supply port 27A to the cleaning liquid Ca, the bumping of the cleaning liquid Ca gradually subsides. After terminating the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space and the bumping of the cleaning liquid Ca has subsided, the liquid-phase air supply device 9 starts the second air supply operation. That is, the liquid-phase air supply device 9 starts the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space. When the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space is restarted while the cleaning liquid Ca is in a state of reduced-pressure boiling, the cleaning liquid Ca bumps again. Due to the bumping, a flow of the cleaning liquid Ca upward from the second air supply port 27B is generated. The second air supply port 27B is arranged to the right of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction. Also, when air is supplied to the cleaning liquid Ca from the second air supply port 27B, no air is supplied to the cleaning liquid Ca from the first air supply port 27A. Therefore, as shown by the arrow in FIG. 3, a horizontal flow is generated in the cleaning liquid Ca, and a flow of the cleaning liquid Ca from the right end portion to the left end portion of the cleaning tank 2 is generated. By the cleaning liquid Ca flowing horizontally, not only the lower surface but also the upper surface of the object to be cleaned S is effectively cleaned with the cleaning liquid.

[0050] The cleaning liquid Ca flowing horizontally passes through the second filter device 5B. Foreign matter peeled off from the object to be cleaned S passes through the second filter device 5B together with the cleaning liquid Ca. The second filter device 5B can effectively collect foreign matter peeled off from the object to be cleaned S.

[0051] The liquid-phase air supply device 9 terminates the second air supply operation after continuing the second air supply operation for a predetermined duration. That is, the liquid-phase air supply device 9 terminates the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space after continuing the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space for a predetermined duration. By terminating the air supply from the second air supply port 27B, the bumping of the cleaning liquid Ca gradually subsides. After terminating the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space and the bumping of the cleaning liquid Ca has subsided, the liquid-phase air supply device 9 starts the first air supply operation. That is, the liquid-phase air supply device 9 restarts the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space. With the cleaning liquid Ca in a state of boiling under reduced pressure, by restarting the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space, the cleaning liquid Ca boils over again.

[0052] The liquid-phase air supply device 9 alternately performs the first air supply operation and the second air supply operation. That is, the liquid-phase air supply device 9 alternately performs the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space and the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space. The liquid-phase air supply device 9 performs the first air supply operation and the second air supply operation at regular time intervals. That is, the liquid-phase air supply device 9 performs the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space and the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space at regular time intervals. The duration of the first air supply operation and the duration of the second air supply operation are equal. That is, the duration of the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space and the duration of the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space are equal. The air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space and the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space are performed, for example, at intervals of 10 seconds or more and 5 minutes or less. The duration of the air supply from the first air supply port 27A to the cleaning liquid Ca in the first partial space and the duration of the air supply from the second air supply port 27B to the cleaning liquid Ca in the second partial space are each, for example, 1 second.

[0053] When air is supplied to the cleaning liquid Ca from at least one of the first air supply port 27A and the second air supply port 27B while the cleaning liquid Ca is in a state of reduced-pressure boiling, the pressure in the internal space 2S of the cleaning tank 2 may increase. Before the start of the first air supply operation and before the start of the second air supply operation, the control device 13 controls the decompression device 8 so that the internal space 2S of the cleaning tank 2 is decompressed. That is, the control device 13 controls the decompression device 8 so that the internal space 2S of the cleaning tank 2 is decompressed before the supply of air from the first air supply port 27A starts and before the supply of air from the second air supply port 27B starts.

[0054] FIG. 4 is a flowchart showing the operation of the cleaning device 1 according to the present embodiment. As shown in FIG. 4, in the cleaning device 1, a water injection step S1, a boiling possible state generation step S2, an air supply step S3, and a drainage step S4 are sequentially executed.

[0055] (Water injection step) The water injection step S1 is a step of putting the cleaning liquid Ca into the internal space 2S of the cleaning tank 2 by a water supply means (not shown). In the water injection step S1, the entire internal space 2S of the cleaning tank 2 is not filled with the cleaning liquid Ca, but the cleaning liquid Ca is put only up to the middle of the internal space 2S of the cleaning tank 2. As a result, the internal space 2S of the cleaning tank 2 is divided into a lower liquid phase part and an upper gas phase part. When the lid 14 of the cleaning tank 2 is closed in the water injection step S1, as the cleaning liquid Ca is injected into the internal space 2S of the cleaning tank 2, the air in the internal space 2S of the cleaning tank 2 is discharged from the gas phase air supply line 28. However, the decompression device 8 may be operated as the cleaning liquid Ca is injected into the internal space 2S of the cleaning tank 2. In that case, it is possible to surely remove the air from the internal space 2S of the cleaning tank 2 while the cleaning liquid Ca is being supplied to the internal space 2S of the cleaning tank 2.

[0056] The object S to be cleaned may be placed in the internal space 2S of the cleaning tank 2 in advance before the cleaning liquid Ca is put into the internal space 2S of the cleaning tank 2, or may be placed in the internal space 2S of the cleaning tank 2 after the cleaning liquid Ca is put into the internal space 2S of the cleaning tank 2. In any case, the object S to be cleaned is immersed in the cleaning liquid Ca in the internal space 2S of the cleaning tank 2. At this time, the object S to be cleaned is disposed above the support member 4 which is a wire net. In this way, the cleaning liquid Ca is stored in the internal space 2S of the cleaning tank 2, and the object S to be cleaned is immersed in the cleaning liquid Ca. Further, the lid 14 of the cleaning tank 2 is in a closed state.

[0057] (Boiling - possible state generating step) The boiling - possible state generating step S2 is a step of bringing the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 into a boiling - possible state. Specifically, the boiling - possible state generating step S2 includes depressurizing the internal space 2S of the cleaning tank 2 in advance so that when gas is supplied from the liquid - phase gas - supply device 9 to the cleaning liquid Ca in the gas - supply step S3, the cleaning liquid Ca becomes a violently boiling state or a state close to boiling.

[0058] Bringing the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 into a boiling - possible state includes depressurizing the pressure in the gas - phase part of the internal space 2S of the cleaning tank 2. The gas - phase part of the internal space 2S of the cleaning tank 2 may be depressurized to a pressure that exceeds the vapor pressure of the cleaning liquid Ca and is lower than the atmospheric pressure. For example, even if the pressure in the gas - phase part of the internal space 2S of the cleaning tank 2 exceeds the vapor pressure of the cleaning liquid Ca, there may be a part of the cleaning liquid Ca that is overheated, so that when gas is introduced into the cleaning liquid Ca in the gas - supply step S3, boiling may occur. Also, even if the pressure in the gas - phase part of the internal space 2S of the cleaning tank 2 exceeds the vapor pressure of the cleaning liquid Ca, when gas is supplied from the first position or the second position in the gas - supply step S3, a state close to boiling may occur, and the object S to be cleaned may be effectively cleaned. In addition, in order to bring the cleaning liquid Ca into a boiling state in the gas - supply step S3, the gas - phase part of the internal space 2S of the cleaning tank 2 may be depressurized to a pressure below the vapor pressure of the cleaning liquid Ca. In the embodiment, in the boiling - possible state generating step S2, the control device 13 depressurizes the internal space 2S of the cleaning tank 2 to a pressure below the vapor pressure of the cleaning liquid Ca or the pressure immediately before it by the depressurizing device 8.

[0059] When the internal space 2S of the cleaning tank 2 is depressurized by the decompression device 8, the temperature of the internal space 2S of the cleaning tank 2 decreases. In the boiling - possible state generation step S2, the control device 13 controls the heating device 7 so that the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 reaches a predetermined temperature. In the boiling - possible state generation step S2, the control device 13 constantly operates the heating device 7 so that the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 reaches a predetermined temperature.

[0060] During the heating of the cleaning liquid Ca by the heating device 7, decompression by the decompression device 8 and pressure restoration by the liquid - phase air supply device 9 may be performed. In a state where the internal space 2S of the cleaning tank 2 is being depressurized by the decompression device 8, the pressure restoration by the liquid - phase air supply device 9 is stopped. In a state where the internal space 2S of the cleaning tank 2 is being restored to pressure by the liquid - phase air supply device 9, the decompression by the decompression device 8 is stopped. In the embodiment, the internal space 2S of the cleaning tank 2 is depressurized by the decompression device 8 to a pressure equal to or just before the vapor pressure of the cleaning liquid Ca. As described above, the internal space 2S of the cleaning tank 2 may be depressurized to a pressure that exceeds the vapor pressure of the cleaning liquid Ca and is lower than the atmospheric pressure. The internal space 2S of the cleaning tank 2 is restored to pressure near the atmospheric pressure by the liquid - phase air supply device 9. By performing the pressure restoration by the liquid - phase air supply device 9, the temperature of the internal space 2S of the cleaning tank 2 is equalized. The air supply for temperature equalization may or may not cause intense boiling. The decompression by the decompression device 8 and the pressure restoration by the liquid - phase air supply device 9 may be alternately repeated a plurality of times. By alternately repeating the decompression by the decompression device 8 and the pressure restoration by the liquid - phase air supply device 9 a plurality of times, the temperature of the internal space 2S of the cleaning tank 2 is more evenly distributed. The number of times the decompression by the decompression device 8 and the pressure restoration by the liquid - phase air supply device 9 are repeated can be arbitrarily set, and it may be once or a plurality of times.

[0061] When the control device 13 has reduced the internal space 2S of the cleaning tank 2 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure just before that, after the cleaning liquid Ca reaches a predetermined temperature, it proceeds to the air supply step S3. Note that the control device 13 may proceed to the air supply step S3 after the cleaning liquid Ca reaches a predetermined temperature while the internal space 2S of the cleaning tank 2 is reduced in pressure by the pressure reducing device 8 to a pressure exceeding the vapor pressure of the cleaning liquid Ca and lower than the atmospheric pressure. The control device 13 can determine whether the internal space 2S of the cleaning tank 2 is at a predetermined temperature based on the detection data of the temperature sensor 12. The predetermined temperature is, for example, 30°C or higher and 100°C or lower.

[0062] (Air supply step) The air supply step S3 is a step of supplying air to the cleaning liquid Ca from the liquid phase air supply device 9 while the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 is in a state where it can boil. In the embodiment, the control device 13 supplies air to the cleaning liquid Ca from the liquid phase air supply device 9 while the internal space 2S of the cleaning tank 2 is reduced in pressure by the pressure reducing device 8 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure just before that. Note that the control device 13 may supply air to the cleaning liquid Ca from the liquid phase air supply device 9 while the internal space 2S of the cleaning tank 2 is reduced in pressure by the pressure reducing device 8 to a pressure exceeding the vapor pressure of the cleaning liquid Ca and lower than the atmospheric pressure. When air is supplied to the cleaning liquid Ca from the liquid phase air supply device 9 while the cleaning liquid Ca is in a state where it can boil, the cleaning liquid Ca boils violently.

[0063] As described with reference to FIG. 3, after air is supplied from the first air supply port 27A disposed at the first position of the cleaning tank 2 to the cleaning liquid Ca in the internal space 2S of the cleaning tank 2, air is supplied from the second air supply port 27B disposed at the second position of the cleaning tank 2 to the cleaning liquid Ca in the internal space 2S of the cleaning tank 2. In the present embodiment, the control device 13 supplies air from the first position by the liquid phase air supply device 9 while the internal space 2S of the cleaning tank 2 is reduced in pressure by the pressure reducing device 8 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure just before that, and then, while again reducing the internal space 2S of the cleaning tank 2 by the pressure reducing device 8 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure just before that, supplies air from the second position by the liquid phase air supply device 9.

[0064] In the present embodiment, the control device 13 supplies air from the liquid-phase air supply device 9 after the heating device 7 has heated the cleaning liquid Ca to the above-described predetermined temperature in a state where the internal space 2S of the cleaning tank 2 has been depressurized by the depressurization device 8 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure immediately before that. Further, the control device 13 alternately performs control to depressurize the internal space 2S of the cleaning tank 2 by the depressurization device 8 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure immediately before that, and control to supply air by the liquid-phase air supply device 9.

[0065] That is, in a state where the control device 13 has depressurized the internal space 2S of the cleaning tank 2 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure immediately before it by the depressurizing device 8, after the cleaning liquid Ca has reached the above-described predetermined temperature by the heating device 7, the liquid-phase air supply device 9 supplies air from the first position. When air is supplied from the first position, intense boiling occurs in the cleaning liquid Ca, and a flow as indicated by the arrow of the first air supply operation in FIG. 3 is generated in the cleaning liquid Ca. When air is supplied from the first position, the pressure in the internal space 2S of the cleaning tank 2 rises. The control device 13 performs the air supply from the first position by the liquid-phase air supply device 9 until the internal space 2S of the cleaning tank 2 reaches a predetermined pressure. In the present embodiment, the predetermined pressure is set between a pressure exceeding the vapor pressure of the cleaning liquid Ca and the atmospheric pressure. The control device 13 performs the air supply from the first position by the liquid-phase air supply device 9 while the pressure in the internal space 2S of the cleaning tank 2 changes from a pressure exceeding the vapor pressure of the cleaning liquid Ca to the atmospheric pressure. The control device 13 can determine whether or not the pressure in the internal space 2S of the cleaning tank 2 is a predetermined pressure based on the detection data of the pressure sensor 11. While the pressure in the internal space 2S of the cleaning tank 2 changes from a pressure exceeding the vapor pressure of the cleaning liquid Ca to the atmospheric pressure, after performing the air supply from the first position, the control device 13 stops the air supply from the first position. After stopping the air supply from the first position, the control device 13 again depressurizes the internal space 2S of the cleaning tank 2 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure immediately before it by the depressurizing device 8. In a state where the control device 13 has depressurized the internal space 2S of the cleaning tank 2 to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure immediately before it by the depressurizing device 8, after the cleaning liquid Ca has reached the above-described predetermined temperature by the heating device 7, the liquid-phase air supply device 9 supplies air from the second position. When air is supplied from the second position, intense boiling occurs in the cleaning liquid Ca, and a flow as indicated by the arrow of the second air supply operation in FIG. 3 is generated in the cleaning liquid Ca.

[0066] Thus, in the air supply step S3, the control device 13 supplies air from the first position by the liquid-phase air supply device 9, and then supplies air from the second position. Note that the air supply from the first position and the air supply from the second position may be alternately repeated a plurality of times. By alternately repeating the air supply from the first position and the air supply from the second position a plurality of times, the cleaning effect of the object to be cleaned S can be further enhanced. The number of times the air supply from the first position and the air supply from the second position are repeated can be arbitrarily set, and it may be once or a plurality of times. Also, the air supply from the first position and the air supply from the second position may be performed alternately or may not be performed alternately. For example, after the air supply from the first position is performed and the internal space 2S of the cleaning tank 2 becomes in a state where it can boil, the air supply from the first position may be performed again, and then, after the internal space 2S of the cleaning tank 2 becomes in a state where it can boil, the air supply from the second position may be performed. Also, after the air supply from the first position is performed and the internal space 2S of the cleaning tank 2 becomes in a state where it can boil, the air supply from the second position may be performed, and then, after the internal space 2S of the cleaning tank 2 becomes in a state where it can boil, the air supply from the second position may be performed. The control device 13 repeats the air supply from the first position and the air supply from the second position the set number of times and then shifts to the discharge step S4.

[0067] Note that the time for performing the combined step of the boilable state generation step S2 and the air supply step S3 is set in advance, and the control device 13 may interrupt the air supply step S3 and shift to the discharge step S4 when the set time has elapsed.

[0068] (Discharge step) The drainage step S4 is a step of restoring the internal space 2S of the cleaning tank 2 to atmospheric pressure and discharging the cleaning liquid Ca in the internal space 2S of the cleaning tank 2. In order to restore the internal space 2S of the cleaning tank 2 to atmospheric pressure, outside air is introduced into the internal space 2S of the cleaning tank 2 by the gas-phase air supply device 10. After the internal space 2S of the cleaning tank 2 is restored to atmospheric pressure, the cleaning liquid Ca is discharged from the liquid discharge device 6.

[0069] <Effect> As described above, the cleaning device 1 includes a cleaning tank 2 having an internal space 2S in which the cleaning liquid Ca is stored, and the object to be cleaned S is immersed in the cleaning liquid Ca, a decompression device 8 that decompresses the internal space 2S to a pressure equal to or lower than the vapor pressure of the cleaning liquid Ca or a pressure immediately before that, an air supply nozzle 23 that is disposed below the object to be cleaned S and supplies air to the cleaning liquid Ca in the internal space 2S in a state where the internal space 2S is decompressed by the decompression device 8, and an orifice 40 through which the air supplied to the air supply nozzle 23 passes.

[0070] According to the present embodiment, when air is supplied from the air supply port 27 of the air supply nozzle 23 to the cleaning liquid Ca in the internal space 2S in a state where the cleaning liquid Ca is boiling under reduced pressure, the flow rate of the air supplied to the air supply nozzle 23 is adjusted by the orifice 40. By adjusting the flow rate of the air supplied to the air supply nozzle 23, the flow rate of the air supplied from the air supply port 27 to the cleaning liquid Ca is adjusted. For example, when the flow rate of the air supplied from the air supply port 27 to the cleaning liquid Ca is excessive, the cleaning liquid Ca may boil over excessively. If the object to be cleaned S moves in the internal space 2S due to the force of excessive boiling over, it may become difficult to effectively clean the object to be cleaned. When the flow rate of the air supplied from the air supply port 27 to the cleaning liquid Ca is too small, sufficient boiling over of the cleaning liquid Ca cannot be obtained, and it may become difficult to effectively clean the object to be cleaned. In the present embodiment, since the orifice 40 supplies air to the cleaning liquid Ca at an appropriate flow rate from the air supply port 27, the object to be cleaned S is effectively cleaned.

[0071] The cleaning device 1 includes a heating device 7 for heating the cleaning liquid Ca, a decompression device 8 for decompressing the internal space 2S of the cleaning tank 2, a first air supply port 27A disposed on the left end side of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction, and a second air supply port 27B disposed on the right end side of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction, and a liquid-phase air supply device 9 capable of supplying air to the cleaning liquid Ca from one of the first air supply port 27A and the second air supply port 27B. The internal space 2S of the cleaning tank 2 includes a first partial space on the left end side of the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction and a second partial space on the right end side opposite to the left end side of the central portion of the internal space 2S of the cleaning tank 2. The liquid-phase air supply device 9 starts supplying air from the second air supply port 27B to the cleaning liquid Ca in the second partial space after finishing supplying air from the first air supply port 27A to the cleaning liquid Ca in the first partial space with the object to be cleaned S immersed in the cleaning liquid Ca. When the cleaning liquid Ca is in a state of decompression boiling, after the supply of air from the first air supply port 27A to the cleaning liquid Ca in the first partial space is completed, the supply of air from the second air supply port 27B to the cleaning liquid Ca in the second partial space is started, whereby the cleaning liquid Ca flows in various directions in the cleaning tank 2. Since the cleaning liquid Ca flows in various directions, the cleaning liquid Ca hits various positions on the surface of the object to be cleaned S. Therefore, it is suppressed that dirt remains on a part of the surface of the object to be cleaned S, and the surface of the object to be cleaned S is effectively cleaned.

[0072] The liquid-phase air supply device 9 alternately performs air supply from the first air supply port 27A and air supply from the second air supply port 27B. Thereby, the cleaning liquid Ca is sufficiently agitated, and the surface of the object to be cleaned S is effectively cleaned with the cleaning liquid Ca.

[0073] The decompression device 8 decompresses the internal space 2S of the cleaning tank 2 before the start of air supply from the first air supply port 27A and before the start of air supply from the second air supply port 27B, respectively. Thereby, air is supplied to the cleaning liquid Ca from one of the first air supply port 27A and the second air supply port 27B in a state where the cleaning liquid Ca is in decompression boiling.

[0074] When supplying air from the first air supply port 27A and the second air supply port 27B alternately, the liquid-phase air supply device 9 supplies air from the first air supply port 27A and the second air supply port 27B at regular time intervals. Thereby, the surface of the object S to be cleaned is effectively cleaned with the cleaning liquid Ca.

[0075] When the air supply from the first air supply port 27A and the air supply from the second air supply port 27B are performed alternately, the duration of the air supply from the first air supply port 27A and the duration of the air supply from the second air supply port 27B are equal. Thereby, the surface of the object S to be cleaned is effectively cleaned with the cleaning liquid Ca.

[0076] The cleaning device 1 is disposed above the object S to be cleaned and includes a filter device 5 for collecting foreign matters from the cleaning liquid Ca. When the first air supply port 27A is disposed on the left end side rather than the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction, the filter device 5 is disposed on the right end side of the internal space 2S of the cleaning tank 2 rather than the first air supply port 27A in the horizontal direction. Thereby, when boiling occurs due to the air supply from the first air supply port 27A to the cleaning liquid Ca and a flow of the cleaning liquid Ca from the left end portion to the right end portion of the internal space 2S of the cleaning tank 2 is generated, the filter device 5 can effectively collect the foreign matters contained in the cleaning liquid Ca from the cleaning liquid Ca. When the second air supply port 27B is disposed on the right end side rather than the central portion of the internal space 2S of the cleaning tank 2 in the horizontal direction, the filter device 5 is disposed on the left end side of the internal space 2S of the cleaning tank 2 rather than the second air supply port 27B in the horizontal direction. Thereby, when boiling occurs due to the air supply from the second air supply port 27B to the cleaning liquid Ca and a flow of the cleaning liquid Ca from the right end portion to the left end portion of the internal space 2S of the cleaning tank 2 is generated, the filter device 5 can effectively collect the foreign matters contained in the cleaning liquid Ca from the cleaning liquid Ca. Since the foreign matters are collected by the filter device 5, the reattachment of the foreign matters peeled off from the object S to be cleaned to the object S is suppressed.

[0077] In the case where the air supply from the first air supply port 27A and the air supply from the second air supply port 27B are alternately performed, the filter device 5 includes a first filter device 5A disposed above the object to be cleaned S and on the right end side of the internal space 2S of the cleaning tank 2 in the horizontal direction, and a second filter device 5B disposed on the left end side of the internal space 2S of the cleaning tank 2 in the horizontal direction. Thus, the filter device 5 (5A, 5B) can effectively recover foreign matters contained in the cleaning liquid Ca from the cleaning liquid Ca.

[0078] In addition, in the first air supply operation, air may be supplied from the second air supply port 27B to the cleaning liquid Ca in the second partial space at an air supply amount less than the air supply amount from the first air supply port 27A while air is being supplied from the first air supply port 27A to the cleaning liquid Ca in the first partial space. Similarly, in the second air supply operation, air may be supplied from the first air supply port 27A to the cleaning liquid Ca in the first partial space at an air supply amount less than the air supply amount from the second air supply port 27B while air is being supplied from the second air supply port 27B to the cleaning liquid Ca in the second partial space.

[0079] In the above-described embodiment, in the liquid-phase air supply pulse cleaning, the internal space 2S of the cleaning tank 2 is depressurized, and after the cleaning liquid Ca undergoes depressurized boiling, air is supplied from the air supply port 27 to the cleaning liquid Ca. A set pressure value may be predetermined for the pressure of the cleaning tank 2, the air supply from the air supply port 27 to the cleaning liquid Ca may be started, and after the internal space 2S of the cleaning tank 2 reaches the set pressure value, the depressurization of the internal space 2S of the cleaning tank 2 may be started.

[0080] In the above-described embodiment, the air supply from the first position and the air supply from the second position are alternately performed. That is, in the above-described embodiment, it is assumed that there are two positions where air is supplied in the horizontal direction of the internal space 2S of the cleaning tank 2. There may be any plurality of three or more positions where air is supplied in the horizontal direction of the internal space 2S of the cleaning tank 2. For example, when the first air supply port is arranged at the first position, the second air supply port is arranged at a second position different from the first position, and the third air supply port is arranged at a third position different from the first position and the second position, the air supply from the first position, the air supply from the second position, and the air supply from the third position may be sequentially performed. Further, the air supply from the first position, the air supply from the second position, and the air supply from the third position may be sequentially performed one by one, or the air supply from any one of the positions may be continuously performed twice. For example, after the air supply from the first position is performed, the air supply from the first position may be performed again, and then the air supply from the second position may be performed. After the air supply from the first position is performed, the air supply from the second position may be performed, and then the air supply from the second position may be performed again. After the air supply from the first position is performed, the air supply from the first position may be performed again, then the air supply from the second position may be performed, and then the air supply from the third position may be performed. Further, when the first air supply port is arranged at the first position in the horizontal direction of the internal space 2S of the cleaning tank 2, the second air supply port is arranged at a second position different from the first position, the third air supply port is arranged at a third position different from the first position and the second position, and the fourth air supply port is arranged at a fourth position different from the first position, the second position, and the third position, the air supply from the first air supply port arranged at the first position, the air supply from the second air supply port arranged at the second position, the air supply from the third air supply port arranged at the third position, and the air supply from the fourth air supply port arranged at the fourth position may be sequentially performed. The air supply from each position may be sequentially performed one by one, or the air supply from any one of the positions may be continuously performed two or more times.

[0081] In the above-described embodiment, when air supply is performed from each of a plurality of horizontal positions in the internal space 2S of the washing tank 2, in the processes from the water injection step S1 to the drainage step S4 shown in FIG. 4, the control device 13 may control so that air supply is performed from all positions. Note that the control device 13 may control so that air supply is performed from some positions and air supply is not performed from some positions.

[0082] [Second Embodiment] The second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description of those components will be simplified or omitted.

[0083] FIG. 5 is a plan view schematically showing the liquid-phase air supply device 92 according to the present embodiment. Similar to the above-described embodiment, the liquid-phase air supply device 92 includes a first air supply nozzle 23A, a second air supply nozzle 23B disposed at a position different from the first air supply nozzle 23A, a first liquid-phase air supply line 24A communicating with the first air supply nozzle 23A, a second liquid-phase air supply line 24B communicating with the second air supply nozzle 23B, a liquid-phase air supply line 24C communicating with each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B, a first liquid-phase air supply valve 26A for opening and closing the first liquid-phase air supply line 24A, a second liquid-phase air supply valve 26B for opening and closing the second liquid-phase air supply line 24B, an orifice 40 disposed in the liquid-phase air supply line 24C, and a filter 25 disposed in the liquid-phase air supply line 24C.

[0084] In the present embodiment, the liquid-phase air supply device 92 includes a drying line 50 communicating with each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B, a heater 51 for heating the air passing through the drying line 50, a filter 52 through which the air supplied to the heater 51 passes, a first on-off valve 53 for opening and closing the liquid-phase air supply line 24C, and a second on-off valve 54 for opening and closing the drying line 50.

[0085] The drying line 50 is connected to the liquid-phase air supply line 24C at the connection part 24E. The connection part 24E is defined on the liquid-phase air supply line 24C between the orifice 40 and the connection part 24D. The drying line 50 is connected to each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B via the liquid-phase air supply line 24C between the connection part 24E and the connection part 24D. The air that has passed through the heater 51 is supplied to each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B via a part of the drying line 50 and a part of the liquid-phase air supply line 24C.

[0086] The first on-off valve 53 is arranged on the liquid-phase air supply line 24C between the filter 25 and the orifice 40. The second on-off valve 54 is arranged on the drying line 50 between the heater 51 and the connection part 24E.

[0087] The control device 13 controls the heater 51. Further, the control device 13 controls each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B. Further, the control device 13 controls each of the first on-off valve 53 and the second on-off valve 54. The control device 13 closes the second on-off valve 54 when opening the first on-off valve 53, and closes the first on-off valve 53 when opening the second on-off valve 54.

[0088] Further, the control device 13 opens each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B in a state where the air that has passed through the heater 51 is supplied to each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B.

[0089] In this embodiment, liquid-phase air supply pulse cleaning is performed. After the drainage process S4 shown in FIG. 4 is completed, a rinsing process for rinsing the object to be cleaned S is performed. After the rinsing process, a drying process for drying the object to be cleaned S is performed. The rinsing process refers to a process of cleaning the cleaning liquid Ca and the like remaining on the object to be cleaned S using another cleaning liquid. Also in the rinsing process, the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 may be boiled vigorously to clean the object to be cleaned S by introducing gas into the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 in a state where the pressure is reduced until the cleaning liquid Ca in the internal space 2S of the cleaning tank 2 can be boiled.

[0090] In the liquid-phase air supply pulse cleaning (air supply step S3 shown in FIG. 4), the control device 13 opens the first on-off valve 53, closes the second on-off valve 54, and stops the heater 51.

[0091] In the drying process, the control device 13 opens the second on-off valve 54, closes the first on-off valve 53, and operates the heater 51. Further, the control device 13 opens each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B. The control device 13 controls the pressure reducing device 8 so that the internal space 2S of the cleaning tank 2 is depressurized while the heater 51 is operating. When the internal space 2S of the cleaning tank 2 is depressurized with the second on-off valve 54, the first liquid-phase air supply valve 26A, and the second liquid-phase air supply valve 26B each being open, due to the differential pressure between the internal space 2S of the cleaning tank 2 and the external space, the air in the external space of the cleaning tank 2 is supplied to each of the first air supply nozzles 23A and the second air supply nozzles 23B through the filter 52 and the heater 51. The air heated by the heater 51 is supplied to the internal space 2S of the cleaning tank 2 through each of the first air supply ports 27A and the second air supply ports 27B. By supplying the air heated by the heater 51 to the internal space 2S of the cleaning tank 2, the cleaning target S disposed in the internal space 2S of the cleaning tank 2 is dried.

[0092] As described above, according to the present embodiment, the liquid-phase air supply device 92 can dry the cleaning target S after liquid-phase pulse cleaning.

[0093] [Third Embodiment] The third embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description of those components is simplified or omitted.

[0094] FIG. 6 is a plan view schematically showing the liquid-phase air supply device 93 according to the present embodiment. Similar to the above-described embodiment, the liquid-phase air supply device 93 includes a first air supply nozzle 23A, a second air supply nozzle 23B disposed at a position different from the first air supply nozzle 23A, a first liquid-phase air supply line 24A communicating with the first air supply nozzle 23A, a second liquid-phase air supply line 24B communicating with the second air supply nozzle 23B, a liquid-phase air supply line 24C communicating with each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B, a first liquid-phase air supply valve 26A for opening and closing the first liquid-phase air supply line 24A, a second liquid-phase air supply valve 26B for opening and closing the second liquid-phase air supply line 24B, an orifice 40, and a heater 51.

[0095] In the present embodiment, the heater 51 is disposed in the liquid-phase air supply line 24C. The air that has passed through the heater 51 is supplied to each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B.

[0096] In the present embodiment, the liquid-phase air supply device 93 includes a first supply line 61 communicating with the liquid-phase air supply line 24C, a second supply line 62 disposed in parallel with the first supply line 61 and communicating with the liquid-phase air supply line 24C, and a supply line 60 communicating with each of the first supply line 61 and the second supply line 62. The upstream end portions of the supply line 60, the first supply line 61, and the second supply line 62 are connected at a connection portion 63. The first supply line 61 and the second supply line 62 are provided so as to branch from the supply line 60. The downstream end portions of the liquid-phase air supply line 24C, the first supply line 61, and the second supply line 62 are connected at a connection portion 64. A filter 65 is disposed in the supply line 60.

[0097] The orifice 40 is disposed in the first supply line 61. An on-off valve 66 is disposed in the second supply line 62. The on-off valve 66 opens and closes the second supply line 62.

[0098] The control device 13 controls the heater 51. Further, the control device 13 controls each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B. Further, the control device 13 controls the on-off valve 66. The control device 13 operates the heater 51 when the on-off valve 66 is opened, and stops the heater 51 when the on-off valve 66 is closed.

[0099] Further, when the air that has passed through the heater 51 is supplied to each of the first liquid-phase air supply line 24A and the second liquid-phase air supply line 24B, the control device 13 opens each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B.

[0100] Similar to the above-described second embodiment, liquid-phase air supply pulse cleaning is performed. After the drainage step S4 shown in FIG. 4 is completed, a rinsing step of rinsing the object to be cleaned S is performed. After the rinsing step, a drying step of drying the object to be cleaned S is performed.

[0101] In the liquid-phase air supply pulse cleaning (air supply step S3 shown in FIG. 4), the control device 13 closes the on-off valve 66 and stops the heater 51.

[0102] In the drying step, the control device 13 opens the on-off valve 66 and operates the heater 51. Further, the control device 13 opens each of the first liquid-phase air supply valve 26A and the second liquid-phase air supply valve 26B. The control device 13 controls the decompression device 8 so that the internal space 2S of the cleaning tank 2 is decompressed while the heater 51 is operating. When the internal space 2S of the cleaning tank 2 is decompressed with each of the on-off valve 66, the first liquid-phase air supply valve 26A, and the second liquid-phase air supply valve 26B open, due to the differential pressure between the internal space 2S of the cleaning tank 2 and the external space, the air in the external space of the cleaning tank 2 passes through the filter 65, the second supply line 62, and the heater 51 and is supplied to each of the first air supply nozzles 23A and the second air supply nozzles 23B. The air heated by the heater 51 is supplied to the internal space 2S of the cleaning tank 2 through each of the first air supply ports 27A and the second air supply ports 27B. When the air heated by the heater 51 is supplied to the internal space 2S of the cleaning tank 2, the object to be cleaned S disposed in the internal space 2S of the cleaning tank 2 is dried.

[0103] As described above, also in this embodiment, the liquid-phase air supply device 93 can dry the object S to be cleaned after subjecting it to liquid-phase pulse cleaning. According to this embodiment, only one on-off valve 66 is required, and the complication and enlargement of the liquid-phase air supply device 93 are suppressed.

[0104] [Fourth Embodiment] The fourth embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiments are denoted by the same reference numerals, and the description of those components is simplified or omitted.

[0105] FIG. 7 is a plan view schematically showing a liquid-phase air supply device 94 according to the present embodiment. The liquid-phase air supply device 94 shown in FIG. 7 is a modified example of the liquid-phase air supply device 9 described with reference to FIG. 2. In the above-described embodiment, the air supply nozzle 23 includes the first air supply nozzle 23A and the second air supply nozzle 23B. As shown in FIG. 7, the first air supply nozzle 23A and the second air supply nozzle 23B may be a single member. In the example shown in FIG. 7, one air supply nozzle 23 having a plurality of bent portions is arranged so as to extend across both the first partial space and the second partial space, and a plurality of air supply ports 27 are provided in the one air supply nozzle 23. That is, in one air supply nozzle 23 including a first portion disposed in the first partial space and a second portion disposed in the second partial space, air supply ports 27 are provided in each of the first portion and the second portion. A first inlet 41 is provided at one end of the air supply nozzle 23, and a second inlet 42 is provided at the other end of the air supply nozzle 23. In the horizontal direction of the internal space 2S of the cleaning tank 2, the second inlet 42 is disposed at a position different from that of the first inlet 41. The first liquid-phase air supply line 24A communicates with the first inlet 41 of the air supply nozzle 23. The second liquid-phase air supply line 24B communicates with the second inlet 42 of the air supply nozzle 23. The air that has passed through the orifice 40 and the first liquid-phase air supply line 24A is supplied to the first inlet 41. The air that has passed through the orifice 40 and the second liquid-phase air supply line 24B is supplied to the second inlet 42. In the liquid-phase pulse cleaning, air is supplied to the first inlet 41 and not to the second inlet 42, so that air is supplied to the cleaning liquid Ca exclusively from the air supply ports 27 disposed in the first partial space. That is, in the cleaning liquid Ca, a convection substantially the same as that in the first air supply operation described with reference to FIG. 3 occurs. In the liquid-phase pulse cleaning, air is supplied to the second inlet 42 and not to the first inlet 41, so that air is supplied to the cleaning liquid Ca exclusively from the air supply ports 27 disposed in the second partial space. That is, in the cleaning liquid Ca, a convection substantially the same as that in the second air supply operation described with reference to FIG. 3 occurs.

Explanation of Signs

[0106] 1... Cleaning device, 2... Cleaning tank, 2S... Internal space, 3... Basket, 4... Support member, 5... Filter device, 5A... First filter device, 5B... Second filter device, 6... Drainage device, 7... Heating device, 8... Vacuum device, 9... Liquid-phase air supply device (air supply device), 10... Gas-phase air supply device, 11... Pressure sensor, 12... Temperature sensor, 13... Control device, 14... Lid, 18... Drainage line, 19... Drainage pump, 20... Heater, 21... Exhaust line, 22... Vacuum pump, 23... Air supply nozzle, 23A... First air supply nozzle, 23B... Second air supply nozzle, 24A... First liquid-phase air supply line, 24B... Second liquid-phase air supply line, 24C... Liquid-phase air supply line, 24D... Connection part, 24E... Connection part, 25... Filter, 26A... First liquid-phase air supply valve, 26B... Second liquid-phase air supply valve, 27... Air supply port, 27A... First air supply port, 27B... Second air supply port, 28... Gas-phase air supply line, 29... Filter, 30... Gas-phase air supply valve, 40... Orifice, 41... First inlet, 42... Second inlet, 43... First outlet, 44... Second outlet, 50... Drying line, 51... Heater, 52... Filter, 53... First on-off valve, 54... Second on-off valve, 60... Supply line, 61... First supply line, 62... Second supply line, 63... Connection part, 64... Connection part, 65... Filter, 66... On-off valve, 92... Liquid-phase air supply device, 93... Liquid-phase air supply device, 94... Liquid-phase air supply device, Ca... Cleaning liquid, S... Object to be cleaned.

Claims

1. A cleaning tank having an internal space for storing a cleaning liquid, wherein the object to be cleaned is immersed in the cleaning liquid; A decompression device for decompressing the internal space to a pressure equal to or lower than the vapor pressure of the cleaning liquid or a pressure immediately before it; An air supply nozzle disposed below the object to be cleaned, for supplying air to the cleaning liquid in a state where the internal space is decompressed by the decompression device; An orifice through which the air supplied to the air supply nozzle passes, and comprising: A cleaning device.

2. A first air supply line communicating with a first inlet of the air supply nozzle; A second air supply line communicating with a second inlet of the air supply nozzle disposed at a position different from the first inlet in the horizontal direction of the internal space, and comprising: The air passing through the orifice and the first air supply line is supplied to the first inlet; The air passing through the orifice and the second air supply line is supplied to the second inlet, The cleaning device according to Claim 1.

3. The air supply nozzle includes a first air supply nozzle and a second air supply nozzle disposed at a position different from the first air supply nozzle in the horizontal direction of the internal space; A first air supply line communicating with the first air supply nozzle; A second air supply line communicating with the second air supply nozzle, and comprising: The air passing through the orifice and the first air supply line is supplied to the first air supply nozzle; The air passing through the orifice and the second air supply line is supplied to the second air supply nozzle, The cleaning device according to Claim 1.

4. An air supply line communicating with each of the first air supply line and the second air supply line; The orifice is disposed in the air supply line, The cleaning device according to Claim 2 or Claim 3.

5. A first air supply valve for opening and closing the first air supply line; A second air supply valve for opening and closing the second air supply line; A control device for controlling each of the first air supply valve and the second air supply valve, and comprising: When the air passing through the orifice is supplied to each of the first air supply line and the second air supply line, the control device closes the second air supply valve when the first air supply valve is opened, and closes the first air supply valve when the second air supply valve is opened. The cleaning device according to Claim 2 or Claim 3.

6. A drying line communicating with each of the first air supply line and the second air supply line; A heater for heating the air passing through the drying line, and comprising: Air that has passed through the heater is supplied to each of the first air supply line and the second air supply line. The cleaning device according to claim 5.

7. In a state where air that has passed through the heater is supplied to each of the first air supply line and the second air supply line, the control device opens each of the first air supply valve and the second air supply valve. The cleaning device according to claim 6.

8. An air supply line in which the orifice is disposed and that communicates with each of the first air supply line and the second air supply line, A first on-off valve that opens and closes the air supply line, A second on-off valve that opens and closes the drying line, and includes: When the control device opens the first on-off valve, it closes the second on-off valve, and when it opens the second on-off valve, it closes the first on-off valve. The cleaning device according to claim 6 or claim 7.

9. An air supply line that communicates with each of the first air supply line and the second air supply line, A heater disposed in the air supply line, A first supply line in which the orifice is disposed and that communicates with the air supply line, A second supply line that is disposed in parallel with the first supply line and that communicates with the air supply line, An on-off valve disposed in the second supply line, and includes: Air that has passed through the heater is supplied to each of the first air supply line and the second air supply line. The cleaning device according to claim 5.

10. In a state where air that has passed through the heater is supplied to each of the first air supply line and the second air supply line, the control device opens each of the first air supply valve and the second air supply valve. The cleaning device according to claim 9.

11. When the control device opens the on-off valve, it operates the heater, and when it closes the on-off valve, it stops the heater. The cleaning device according to claim 9 or claim 10.

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