Substrate transfer robot and control method therefor

Abstract

To provide a substrate transfer robot capable of suppressing substrate interference when transferring the substrate.SOLUTION: A substrate transfer robot 100 is structured so that a control section 30 acquires a transfer clearance C including at least any one of a clearance between a position of a substrate retaining hand 20 in a storage part 200 and a substrate 1 and a clearance between a substrate 1 transferred to the substrate retaining hand 20 and a substrate 1 adjacent to the substrate 1 transferred to the substrate retaining hand 20 and a clearance between mutual substrates 1 stored in the storage part 200 on the basis of images photographed by a photographing section 25. A control section 30 controls operations of a robot arm 10 and the substrate retaining hand 20 to perform at least one of carrying out a substrate 1 from the storage part 200 and carrying in a substrate 1 into the storage part 200 on the basis of the magnitude of the acquired transfer clearance C.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present disclosure relates to a substrate transfer robot and a method for controlling the substrate transfer robot, and more particularly to a substrate transfer robot including a substrate holding hand for holding a substrate, and a method for controlling the substrate transfer robot. [Background technology]

[0002] BACKGROUND ART Conventionally, a substrate transport robot equipped with a substrate holding hand for holding a substrate is known (see, for example, Patent Document 1).

[0003] The above-mentioned Patent Document 1 discloses a substrate transfer robot that removes substrates from a cassette containing multiple substrates. The substrate transfer robot removes substrates from the cassette using a hand based on teaching data that has been previously taught to the robot. The above-mentioned Patent Document 1 also discloses a camera that photographs multiple substrates stored in a cassette and a control unit that processes the images photographed by the camera. The control unit then acquires the tilt angle, curvature, etc. of the multiple substrates placed in the cassette based on the images photographed by the camera. The control unit corrects the teaching data for removing the substrates based on the acquired tilt angle, curvature, etc. of the substrates. In other words, the movement path and position of the hand that enters the cassette are changed based on the acquired tilt angle, curvature, etc. of the substrates. This makes it possible to remove substrates from the cassette even if the substrates are placed in an inclined or curved state in the cassette. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6571475 Summary of the Invention [Problem to be solved by the invention]

[0005] Here, multiple substrates are stacked in the cassette at a predetermined interval. Therefore, as in Patent Document 1, if the movement path or position of the hand entering the cassette is changed based on the acquired tilt angle or curvature state of the substrate, the hand may interfere with a substrate arranged adjacent to the substrate to be removed. Furthermore, a substrate being transported by the hand may interfere with a substrate arranged adjacent to it. This poses a problem of substrate interference when transporting the substrates.

[0006] This disclosure has been made to solve the above-mentioned problems, and one object of this disclosure is to provide a substrate transport robot and a method for controlling a substrate transport robot that can suppress interference between substrates when transporting them. [Means for solving the problem]

[0007] A substrate transport robot according to a first aspect of this disclosure is a substrate transport robot that performs at least one of unloading a substrate from a storage unit for storing a plurality of substrates and loading a substrate into the storage unit, and comprises: a robot arm; a substrate holding hand attached to the tip of the robot arm and holding a substrate; a photographing unit that photographs the plurality of substrates stored in the storage unit; an optical sensor that moves along the arrangement direction in which the plurality of substrates stored in the storage unit are arranged and detects the substrate; and a control unit.The control unit obtains a transport gap including at least one of the gap between the position of the substrate holding hand and the substrate in the storage unit, the gap between the substrate being transported by the substrate holding hand and a substrate adjacent to the substrate being transported by the substrate holding hand, and the gap between the substrates stored in the storage unit based on the detection results of the optical sensor and the image photographed by the photographing unit, and controls the operation of the robot arm and the substrate holding hand to perform at least one of unloading the substrate from the storage unit and loading the substrate into the storage unit based on the size of the obtained transport gap.

[0008] In the substrate transport robot according to the first aspect of this disclosure, as described above, the control unit acquires, based on the image captured by the imaging unit, a transport gap including at least one of the gap between the position of the substrate holding hand and the substrate in the storage unit, the gap between the substrate being transported by the substrate holding hand and a substrate adjacent to the substrate being transported by the substrate holding hand, and the gap between the substrates stored in the storage unit. Based on the size of the acquired transport gap, the control unit controls the operation of the robot arm and the substrate holding hand to at least one of unloading the substrate from the storage unit and loading the substrate into the storage unit. This allows control not to unload the substrate from the storage unit or load the substrate into the storage unit if the size of the transport gap is insufficient, even if the movement path or position of the substrate holding hand entering the storage unit is changed based on the tilt angle or curvature of the substrate. This prevents the substrate holding hand from interfering with a substrate positioned adjacent to the substrate being unloaded, or prevents a substrate being transported by the substrate holding hand from interfering with a substrate positioned adjacent to the substrate being unloaded. As a result, interference between substrates can be suppressed during substrate transport.

[0009] It is also possible to obtain the transport gap by moving an optical sensor along the arrangement direction of the substrates stored in the storage unit to detect the position of the substrates. However, in this case, the optical sensor detects only a portion of the substrate, such as one side edge, making it difficult to accurately obtain the transport gap at the center and other side edges of the substrate. Therefore, by obtaining the transport gap based on an image captured by the imaging unit as described above, it is possible to obtain the transport gap not only at one side edge of the substrate but also at the center and other side edges. As a result, interference between substrates can be appropriately suppressed when transporting the substrates.

[0010] A control method for a substrate transport robot according to a second aspect of this disclosure is a control method for a substrate transport robot that performs at least one of unloading a substrate from a storage unit for storing a plurality of substrates and loading a substrate into the storage unit, the control method comprising: photographing the plurality of substrates stored in the storage unit with a photographing unit; detecting the substrates with an optical sensor that moves along an arrangement direction of the plurality of substrates stored in the storage unit; acquiring a transport gap including at least one of a gap between a position of a substrate holding hand of the substrate transport robot and the substrate within the storage unit, a gap between a substrate being transported by the substrate holding hand and a substrate adjacent to the substrate being transported by the substrate holding hand, and a gap between substrates stored in the storage unit based on the detection result of the optical sensor and the image photographed by the photographing unit; and controlling operation of a robot arm and a substrate holding hand of the substrate transport robot to perform at least one of unloading a substrate from the storage unit and loading a substrate into the storage unit based on the size of the acquired transport gap. Note that the control method for the substrate transport robot includes a method in which the substrate transport robot is taught using teaching data or control parameters.

[0011] A control method for a substrate transport robot according to a second aspect of the present disclosure includes, as described above, photographing a plurality of substrates stored in a storage unit using an imaging unit; acquiring, based on the image photographed by the imaging unit, a transport gap including at least one of a gap between the position of the substrate holding hand of the substrate transport robot and the substrate in the storage unit and a gap between the substrate being transported by the substrate holding hand and a substrate adjacent to the substrate being transported by the substrate holding hand; and controlling the operation of the robot arm and the substrate holding hand of the substrate transport robot to at least one of unloading the substrate from the storage unit and loading the substrate into the storage unit based on the size of the acquired transport gap. This makes it possible to control the substrate not to be unloaded from or loaded into the storage unit if the size of the transport gap is insufficient, even if the movement path or position of the substrate holding hand entering the storage unit is changed based on the tilt angle or curvature of the substrate. This prevents the substrate holding hand from interfering with a substrate arranged adjacent to the substrate to be unloaded, or prevents a substrate being transported by the substrate holding hand from interfering with an adjacent substrate. As a result, it is possible to provide a method for controlling a substrate transport robot that can prevent interference between substrates when transporting them.

[0012] It is also possible to obtain the transport gap by moving an optical sensor along the arrangement direction of the substrates stored in the storage unit to detect the position of the substrates. However, in this case, the optical sensor detects only a portion of the substrate, such as one side edge, making it difficult to accurately obtain the transport gap at the center and other side edges of the substrate. Therefore, by obtaining the transport gap based on an image captured by the imaging unit as described above, it is possible to obtain the transport gap not only at one side edge of the substrate but also at the center and other side edges. As a result, it is possible to provide a control method for a substrate transport robot that can suppress interference at the center and other side edges of the substrate. [Effects of the Invention]

[0013] According to the present disclosure, interference between substrates can be suppressed when the substrates are transported. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a perspective view showing a configuration of a substrate transport robot according to an embodiment. [Figure 2] FIG. 2 is a perspective view showing the configuration of a substrate transport robot and a storage unit according to an embodiment. [Figure 3] FIG. 2 is a perspective view showing a configuration of a substrate holding hand according to an embodiment. [Figure 4] FIG. 2 is a side view showing the configuration of a substrate transport robot and a storage unit according to an embodiment. [Figure 5] FIG. 1 shows a plurality of substrates stored in a storage unit according to one embodiment (1). [Figure 6] FIG. 2 shows a plurality of substrates stored in a storage unit according to one embodiment. [Figure 7] FIG. 10 is a flow diagram illustrating the operation of the substrate holding robot according to one embodiment. [Figure 8] FIG. 10 is a side view showing the configuration of a substrate transport robot and a storage unit according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, an embodiment of the present disclosure will be described with reference to the drawings.

[0016] The configuration of a substrate transport robot 100 according to this embodiment will be described with reference to FIGS.

[0017] 1 and 2, a substrate transfer robot 100 transfers a substrate 1 such as a semiconductor wafer or a printed circuit board. The substrate transfer robot 100 performs at least one of carrying out a substrate 1 from a storage unit 200 for storing a plurality of substrates 1 and carrying the substrate 1 into the storage unit 200.

[0018] The substrate transfer robot 100 includes a robot arm 10 and a substrate holding hand 20 attached to the tip of the robot arm 10 and holding a substrate 1. The substrate transfer robot 100 also includes a control unit 30 that controls the operation of the substrate transfer robot 100.

[0019] The robot arm 10 is a horizontal articulated robot arm. The robot arm 10 includes a first robot arm 11 and a second robot arm 12. The first robot arm 11 is configured to be rotatable around a lift shaft 13 (described later) with one end serving as a rotation center. Specifically, one end of the first robot arm 11 is rotatably connected to the lift shaft 13 via a first joint JT1. The second robot arm 12 is configured to be rotatable around one end of the first robot arm 11 with one end serving as a rotation center. Specifically, one end of the second robot arm 12 is rotatably connected to the other end of the first robot arm 11 via a second joint JT2. Furthermore, a substrate holding hand 20 is rotatably connected to the other end of the second robot arm 12 via a third joint JT3. A servo motor, which serves as a rotational drive source, and a rotational position sensor, which detects the rotational position of the output shaft of the servo motor, are disposed at each of the first joint JT1, the second joint JT2, and the third joint JT3.

[0020] The substrate transfer robot 100 also includes an elevator shaft 13 that raises and lowers the robot arm 10. The elevator shaft 13 is provided with a servo motor and a rotational position sensor that detects the rotational position of the output shaft of the servo motor.

[0021] The substrate holding hand 20 is provided with a blade 21. The blade 21 is a thin support plate that supports the substrate 1. The blade 21 has a bifurcated tip. A pair of support parts 22 is disposed at each tip of the bifurcated part of the blade 21. In addition, a pair of support parts 23 is disposed at the base end of the blade 21. The pair of support parts 22 and the pair of support parts 23 support the rear surface of the outer peripheral edge part of the substantially circular substrate 1 from below.

[0022] In this embodiment, as shown in FIG. 3, the substrate transfer robot 100 is equipped with an optical sensor 24 that moves along the arrangement direction of the substrates 1 stored in the storage unit 200. The optical sensor 24 is disposed at the tip of the substrate holding hand 20. Specifically, the optical sensor 24 is disposed at the tip of the forked blade 21. The optical sensor 24 is, for example, a transmissive center. The optical sensor 24 includes a light-emitting unit 24a and a light-receiving unit 24b. The light-emitting unit 24a emits detection light toward the light-receiving unit 24b. The detection light is, for example, infrared light. Note that a reflective optical sensor 24 may also be used.

[0023] In this embodiment, as shown in FIG. 4 , the optical sensor 24 is moved by the substrate holding hand 20 along the arrangement direction of the multiple substrates 1. Specifically, the optical sensor 24 moves along the arrangement direction of the multiple substrates 1 by raising and lowering the robot arm 10 using the lifting shaft 13. The arrangement direction is the up-down direction. The robot arm 10 is raised and lowered with the end of the substrate 1 positioned between the forked tips of the blade 21. As a result, when the substrate 1 is positioned between the forked tips of the blade 21, the detection light emitted toward the light receiving unit 24b is blocked, thereby detecting the presence of the substrate 1. When the substrate 1 is not positioned between the forked tips of the blade 21, the detection light emitted toward the light receiving unit 24b is received by the light receiving unit 24b, thereby detecting the absence of the substrate 1. The detection result of the light receiving unit 24b is input to the control unit 30. The presence or absence of the substrate 1 is determined by the control unit 30. The control unit 30 receives the detection results of the light receiving unit 24b as well as the detection results of a rotational position sensor that detects the rotational position of the output shaft of the servo motor of the lifting shaft 13. As a result, the control unit 30 acquires information on the position of the lifting shaft 13 and the presence or absence of the substrate 1 in association with each other. In other words, the control unit 30 acquires the vertical position where the substrate 1 is placed. The control unit 30 also acquires the shape of the substrate 1 based on the detection results of the light receiving unit 24b. The shape of the substrate 1 may be, for example, a shape that follows a horizontal plane or a curved shape.

[0024] In this embodiment, as shown in FIG. 4, the substrate transport robot 100 is equipped with a photographing unit 25 that photographs the plurality of substrates 1 stored in the storage unit 200. The photographing unit 25 is, for example, composed of a two-dimensional camera. The photographing unit 25 may also be composed of a three-dimensional camera. The photographing unit 25 cannot photograph all of the substrates 1 stored in the storage unit 200 in a single photographing operation. For this reason, in order to photograph all of the substrates 1 stored in the storage unit 200, the photographing unit 25 must photograph multiple times. The photographing unit 25 photographs the plurality of substrates 1 stored in the storage unit 200 from outside the storage unit 200.

[0025] In this embodiment, the photographing unit 25 is disposed on the robot arm 10 or the substrate holding hand 20. Specifically, in this embodiment, the photographing unit 25 is disposed on the base end side of the substrate holding hand 20. In other words, the photographing unit 25 rotates in accordance with the rotation of the substrate holding hand 20 about the JT3 axis. Furthermore, the photographing unit 25 moves up and down in accordance with the movement of the robot arm 10 and the substrate holding hand 20 by the lifting shaft 13.

[0026] In this embodiment, the substrate transport robot 100 is equipped with a notification unit 40. The notification unit 40 notifies, by sound or image, that the substrate 1 cannot be taken out of the storage unit 201, which will be described later, and that the substrate 1 cannot be carried into the storage unit 202.

[0027] As shown in FIG. 5, the storage section 200 stores a plurality of substrates 1. The plurality of substrates 1 are arranged vertically inside the storage section 200. The plurality of substrates 1 are arranged at predetermined intervals from one another. A protrusion 200a on which the substrate 1 is placed is arranged on the inner surface of the storage section 200. The protrusion 200a protrudes in the horizontal direction. The substrate 1 is placed on the protrusion 200a.

[0028] As shown in FIG. 2, the storage section 200 includes a storage section 201 in which the substrate 1 is stored in advance, and a storage section 202 into which the substrate 1 removed from the storage section 201 by the substrate transport robot 100 is transferred.

[0029] As shown in Fig. 5, a plurality of substrates 1 are arranged in the storage section 200. The first and third substrates 1 from the top in Fig. 5 have shapes that follow a horizontal plane. The second substrate 1 from the top in Fig. 5 has a shape that curves downward. The fourth substrate 1 from the top in Fig. 5 is placed on protruding portions 200a that are at different heights, and is therefore inclined relative to the horizontal plane.

[0030] Here, in this embodiment, the control unit 30 acquires a transport gap C based on the image captured by the imaging unit 25, which includes at least one of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being transported by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transported by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200. Then, based on the size of the acquired transport gap C, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so as to perform at least one of unloading the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202. Note that in this embodiment, both unloading and loading of the substrate 1 are performed based on the size of the acquired transport gap C. In addition, in this embodiment, the transport gap C includes all of the gap between the position of the substrate holding hand 20 within the storage section 200 and the substrate 1, the gap between the substrate 1 being transported by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transported by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage section 200.

[0031] In this embodiment, the transport gap C includes a gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacent to and above the substrate holding hand 20 in the storage unit 200, and a gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1 arranged adjacent to and below the substrate holding hand 20 in the storage unit 200. Here, the upper surface 20a of the substrate holding hand 20 includes the upper surface of the blade 21 and the upper surfaces of the supports 22 and 23. In other words, it is the entire area above the substrate holding hand 20. The lower surface 20b of the substrate holding hand 20 includes the lower surface of the blade 21. In other words, it is the entire area below the substrate holding hand 20. In other words, the transport gap C is the hatched area in FIG. 5. In other words, it means the gap between the substrate holding hand 20 and the adjacent substrate 1 above and the adjacent substrate 1 below when viewed from the direction in which the substrate holding hand 20 enters the storage section 200.

[0032] 6, in this embodiment, the transport gap C includes a gap C3 between the upper surface 1a of the substrate 1 being transported by the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacently above the substrate holding hand 20, and a gap C4 between the lower surface 20b of the substrate holding hand 20 transporting the substrate 1 and the upper surface 1a of the substrate 1 arranged adjacently below the substrate holding hand 20. In other words, the transport gap C includes the first and second hatched areas from the top in FIG.

[0033] The transport gap C includes a gap C5 between the substrates 1 stored in the storage unit 200. Specifically, the transport gap C includes the third hatched area from the top in Fig. 6. Note that although Fig. 6 shows only one gap C5, in reality, a gap C5 is obtained for all of the substrates 1 stored in the storage unit 200.

[0034] In this embodiment, the control unit 30 acquires at least one of the shape and position of the substrate 1 and the size of the transfer gap C based on the image captured by the photographing unit 25. Specifically, the control unit 30 acquires both the shape and position of the substrate 1 by performing image analysis on the image captured by the photographing unit 25. For example, the control unit 30 acquires the shape of the substrate 1 along the horizontal plane and the curved shape based on the image captured by the photographing unit 25. The control unit 30 also acquires the position of the substrate 1 based on the image captured by the photographing unit 25.

[0035] In this embodiment, the control unit 30 corrects at least one of the shape and position of the substrate 1 acquired based on the image captured by the imaging unit 25, based on the detection result of the optical sensor 24. Here, the detection accuracy of the optical sensor 24 is higher than the detection accuracy of the imaging unit 25. Therefore, the control unit 30 corrects at least one of the shape and position of the substrate 1 acquired by the imaging unit 25, based on the detection result of the highly accurate optical sensor 24. Note that in this embodiment, both the shape and position of the substrate 1 are corrected.

[0036] In this embodiment, as shown in FIG. 4 , the control unit 30 controls the photographing unit 25 to photograph the plurality of substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. As described above, the optical sensor 24 moves in the arrangement direction of the plurality of substrates 1 as the robot arm 10 is raised and lowered by the lifting shaft 13. For example, the optical sensor 24 rises as the robot arm 10 is raised. Then, when the substrate 1 is positioned between the forked tips of the blade 21, the detection light emitted toward the light receiving unit 24b is blocked by the substrate 1. This causes the control unit 30 to cause the photographing unit 25 to photograph. The control unit 30 causes the photographing unit 25 to photograph each time a substrate 1 is detected or each time a predetermined number of substrates 1 are detected.

[0037] In this embodiment, the control unit 30 acquires the position of the substrate holding hand 20 in the storage unit 200 based on a pre-taught movement path of the substrate holding hand 20 when transporting the substrate 1. Specifically, the substrate transport robot 100 is pre-taught with a movement path for unloading the substrate 1 from the storage unit 201 and a movement path for loading the substrate 1 into the storage unit 202. This allows the control unit 30 to acquire the position of the substrate holding hand 20 inserted in the storage unit 201 or 202 based on the pre-taught movement path. The control unit 30 also acquires gaps C1 and C2 based on the position of the substrate holding hand 20 acquired based on the pre-taught movement path and the shape and position of the substrate 1 acquired from an image captured by the imaging unit 25 and corrected based on the detection result of the optical sensor 24. The control unit 30 also acquires gaps C3 and C4 based on the pre-taught movement path of the substrate holding hand 20 when transporting the substrate 1 and the shape of the substrate 1.

[0038] For storage section 201 in which a plurality of substrates 1 are placed, before carrying out substrate 1 from storage section 201, optical sensor 24 is moved upward once and photographs of substrate 1 are taken by photographing unit 25 multiple times. In this way, control section 30 acquires the positions and shapes of all substrates 1 placed in storage section 201. For storage section 202 into which substrate 1 is carried, for example, assume that substrate 1 is placed on odd-numbered protruding section 200a before substrate 1 is carried in. In this case, optical sensor 24 is moved upward once and photographs of substrate 1 placed on odd-numbered protruding section 200a are taken multiple times by photographing unit 25. In this way, control section 30 acquires the positions and shapes of substrates 1 placed on odd-numbered protruding section 200a of storage section 202.

[0039] In this embodiment, when the control unit 30 determines that the detected size of the transport gap C is large enough to transport the substrate 1, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so that the robot arm 10 and the substrate holding hand 20 perform at least one of unloading the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202. In this embodiment, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so that the robot arm 10 and the substrate holding hand 20 perform both unloading and loading of the substrate 1. The control unit 30 determines that the detected size of the transport gap C is large enough so that the substrate holding hand 20 and the substrate 1 held by the substrate holding hand 20 do not interfere with adjacent substrates 1 when the substrate holding hand 20 unloads the substrate 1 from the storage unit 201. In this case, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so that the substrate 1 is unloaded from the storage unit 201. Furthermore, the control unit 30 determines that the size of the detected transport gap C is large enough so that when the substrate holding hand 20 carries the substrate 1 into the storage unit 202, the substrate holding hand 20 and the substrate 1 held by the substrate holding hand 20 do not interfere with adjacent substrates 1. In this case, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so as to carry the substrate 1 into the storage unit 202.

[0040] In this embodiment, when the control unit 30 determines that the detected size of the transport gap C is not large enough to transport the substrate 1, it corrects the previously taught transport path of the substrate 1 based on the detected size of the transport gap C. For example, the control unit 30 determines that the size of the gap C2 between the substrate 1 below and the substrate 1 when transporting a downwardly curved substrate 1 is not large enough to transport the substrate 1. In this case, because the substrate 1 is curved downward, if the substrate holding hand 20 is inserted into the storage unit 201 along the previously taught transport path, interference will occur between the substrate holding hand 20 and the substrate 1. Therefore, the control unit 30 corrects the transport path for the substrate holding hand 20 to enter the storage unit 201 downward. This reduces interference between the substrate holding hand 20 and the substrate 1.

[0041] In this embodiment, when the control unit 30 determines that at least one of the substrate 1 cannot be carried out from the storage unit 200 or carried into the storage unit 200 even after correcting the previously taught transport path of the substrate 1, the control unit 30 controls the notification unit 40 to notify that at least one of the substrate 1 cannot be carried in or out. In this embodiment, the control unit 30 controls the notification unit 40 to notify both that the substrate 1 cannot be carried out from the storage unit 201 and that the substrate 1 cannot be carried into the storage unit 202. Note that the substrate 1 determined to be able to be carried out is carried out. This increases the gap between the substrates 1, so that even the substrate 1 determined to be unable to be carried out may become able to be carried out. In this case, the substrate 1 that was once determined to be unable to be carried out is also carried out. Furthermore, of the substrates 1 to be carried into the storage unit 202, the substrate 1 determined to be able to be carried in is carried in.

[0042] Next, the operation of the substrate transport robot 100 will be described with reference to Fig. 7. Note that, although the operation of unloading the substrate 1 from the storage section 201 will be described below, the operation of loading the substrate 1 into the storage section 202 is performed in the same manner.

[0043] First, in step S1, the control unit 30 moves the robot arm 10 to move the substrate holding hand 20 below the substrate 1 stored in the storage unit 201, as shown in Fig. 4. Then, the control unit 30 moves the robot arm 10 upward using the lift shaft 13. Then, the control unit 30 detects the presence or absence of the substrate 1 using the optical sensor 24 arranged on the substrate holding hand 20.

[0044] In step S2, the control unit 30 controls the photographing unit 25 to photograph the plurality of substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. The control unit 30 moves the robot arm 10 upward using the lifting shaft 13, and then moves the substrate holding hand 20 toward the lifting shaft 13.

[0045] In step S3, the control unit 30 acquires the shape and position of the substrate 1 based on the image captured by the photographing unit 25. The control unit 30 also corrects the shape and position of the substrate 1 acquired based on the image captured by the photographing unit 25 based on the detection result of the optical sensor 24.

[0046] In step S4, the control unit 30 acquires, based on the image captured by the imaging unit 25, a transport gap C including at least one of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being transported by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transported by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200. Specifically, the control unit 30 acquires the transport gap C based on the shape and position of the substrate 1 corrected based on the detection result of the optical sensor 24.

[0047] In step S5, the control unit 30 determines whether the acquired size of the transport gap C is large enough to transport the substrate 1.

[0048] If the answer is yes in step S5, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so as to carry the substrate 1 out of the storage unit 200 in step S6.

[0049] If the answer is no in step S5, the control unit 30 corrects the transport path of the substrate 1 that has been taught in advance based on the size of the transport gap C that has been detected in step S7.

[0050] In step S8, the control unit 30 determines whether or not it is possible to carry out the substrate 1 from the storage unit 200 using the corrected transport path.

[0051] If the answer is yes in step S8, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so as to carry the substrate 1 out of the storage unit 200 in step S6.

[0052] If the answer is no in step S8, the control unit 30 controls the notification unit 40 to notify the fact that the substrate 1 cannot be carried out from the storage unit 200 in step S9.

[0053] [Effects of this embodiment] In this embodiment, the following effects can be obtained.

[0054] In this embodiment, as described above, the control unit 30 acquires the transport gap C, which includes at least one of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being transported by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transported by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200, based on the image captured by the imaging unit 25, and controls the operation of the robot arm 10 and the substrate holding hand 20 to at least one of unloading the substrate 1 from the storage unit 200 and loading the substrate 1 into the storage unit 200, based on the size of the acquired transport gap C. As a result, even if the movement path or position of the substrate holding hand 20 entering the storage unit 200 is changed based on the tilt angle or curvature of the substrate 1, if the size of the transport gap C is insufficient, it is possible to control the robot arm 10 not to unload the substrate 1 from the storage unit 200 or not to load the substrate 1 into the storage unit 200. This makes it possible to prevent the substrate holding hand 20 from interfering with a substrate 1 arranged adjacent to the substrate 1 to be carried out, and to prevent the substrate 1 being transported by the substrate holding hand 20 from interfering with the substrate 1 arranged adjacent to it. As a result, it is possible to prevent the substrate 1 from interfering when being transported.

[0055] It is also possible to obtain the transport gap C by moving the optical sensor 24 along the arrangement direction of the substrates 1 stored in the storage unit 200 to detect the position of the substrate 1. However, in this case, the optical sensor 24 detects only a portion of the substrate 1, such as one side end, making it difficult to accurately obtain the transport gap C at the center and other side end of the substrate 1. Therefore, by obtaining the transport gap C based on the image captured by the imaging unit 25 as described above, it is possible to obtain the transport gap C not only at one side end of the substrate 1 but also at the center and other side end. As a result, interference of the substrate 1 can be appropriately suppressed when the substrate 1 is transported.

[0056] In this embodiment, as described above, the transport gap C includes a gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacent to and above the substrate holding hand 20 in the storage unit 200, and a gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1 arranged adjacent to and below the substrate holding hand 20 in the storage unit 200. This makes it possible to prevent interference with both the substrate 1 arranged on the upper surface 20a side of the substrate holding hand 20 and the substrate 1 arranged on the lower surface 20b side. As a result, interference of the substrate 1 can be further prevented when the substrate 1 is transported.

[0057] In this embodiment, as described above, the control unit 30 acquires at least one of the shape and position of the substrate 1 based on the image captured by the imaging unit 25, and acquires the size of the transport gap C. This makes it possible to acquire the transport gap C in a state that reflects at least one of the shape and position of the substrate 1. As a result, interference of the substrate 1 can be further suppressed when the substrate 1 is transported.

[0058] In this embodiment, as described above, the control unit 30 corrects at least one of the shape and position of the substrate 1 acquired based on the image captured by the imaging unit 25, based on the detection result of the optical sensor 24. As a result, even if at least one of the shape and position of the substrate 1 cannot be acquired appropriately from the image captured by the imaging unit 25, it is possible to appropriately acquire at least one of the shape and position of the substrate 1 based on the detection result of the optical sensor 24, which has a relatively high accuracy.

[0059] In this embodiment, as described above, the control unit 30 controls the photographing unit 25 to photograph multiple substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. As a result, even if the number of substrates 1 is relatively large and it is not possible to photograph all of the substrates 1 in one photographing session by the photographing unit 25, it is possible to photograph the entire multiple substrates 1 by photographing multiple times.

[0060] In this embodiment, as described above, the photographing unit 25 is disposed on the robot arm 10 or the substrate holding hand 20, and the optical sensor 24 is disposed at the tip of the substrate holding hand 20 and is moved by the substrate holding hand 20 along the arrangement direction in which the plurality of substrates 1 are arranged. This allows the photographing unit 25 to move together with the optical sensor 24 as the substrate holding hand 20 moves.

[0061] In this embodiment, as described above, the control unit 30 acquires the position of the substrate holding hand 20 within the storage unit 200 based on the previously taught movement path of the substrate holding hand 20 when transporting the substrate 1. This makes it possible to acquire the transport gap C without actually inserting the substrate holding hand 20 into the storage unit 200 and photographing both the substrate holding hand 20 and the substrate 1 with the photographing unit 25.

[0062] In this embodiment, as described above, when the control unit 30 determines that the detected size of the transport gap C is large enough to transport the substrate 1, it controls the operation of the robot arm 10 and the substrate holding hand 20 to perform at least one of unloading the substrate 1 from the storage unit 200 and loading the substrate 1 into the storage unit 200. This makes it possible to prevent at least one of unloading and loading of the substrate 1 from occurring when the size of the transport gap C is insufficient to transport the substrate 1. As a result, it is possible to prevent damage to the substrate 1 due to interference with other substrates 1 or the substrate holding hand 20.

[0063] In this embodiment, as described above, when the control unit 30 determines that the detected size of the transport gap C is not large enough to transport the substrate 1, it corrects the transport path of the substrate 1 that was previously taught based on the size of the detected transport gap C. As a result, even if the size of the transport gap C is insufficient for transporting the substrate 1, by correcting the transport path of the substrate 1, it is possible to carry out at least one of carrying in and out the substrate 1 while suppressing interference with other substrates 1 or the substrate holding hand 20.

[0064] In this embodiment, as described above, when the control unit 30 determines that at least one of carrying the substrate 1 out of the storage unit 200 and carrying the substrate 1 into the storage unit 200 cannot be performed even after correcting the previously taught transport path of the substrate 1, the control unit 30 controls the notification unit 40 to notify that at least one of carrying the substrate 1 in and out cannot be performed. This allows the worker to recognize that at least one of carrying the substrate 1 in and out cannot be performed.

[0065] In this embodiment, as described above, the transport gap C includes the gap between the upper surface 1a of the substrate 1 being transported by the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacent to and above the substrate holding hand 20, and the gap between the lower surface 20b of the substrate holding hand 20 transporting the substrate 1 and the upper surface 1a of the substrate 1 arranged adjacent to and below the substrate holding hand 20. This allows the transport gap C while the substrate 1 is being transported by the substrate holding hand 20 to be obtained as well, thereby making it possible to further prevent interference of the substrate 1 when it is being transported.

[0066] [Variations] It should be noted that the embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present disclosure is defined by the claims, not by the description of the above embodiments, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0067] For example, in the above embodiment, the control unit 30 controls the operation of the robot arm 10 and the substrate holding hand 20 so as to both unload the substrate 1 from the storage unit 201 and load the substrate 1 into the storage unit 202 based on the acquired size of the transport gap C, but the present disclosure is not limited to this. For example, the control unit 30 may control the operation of the robot arm 10 and the substrate holding hand 20 so as to perform only one of unloading the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202 based on the acquired size of the transport gap C.

[0068] Furthermore, in the above embodiment, an example has been shown in which the transport gap C includes the gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1, and the gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1, but the present disclosure is not limited to this. For example, in cases where the distance between the substrates 1 placed in the storage section 201 is relatively large, only one of the gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1 and the gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1 may be considered as the transport gap C.

[0069] In the above embodiment, the control unit 30 acquires both the shape and the position of the substrate 1 based on the image captured by the imaging unit 25. However, the present disclosure is not limited to this. For example, the control unit 30 may acquire only either the shape or the position of the substrate 1 based on the image captured by the imaging unit 25.

[0070] Furthermore, in the above embodiment, an example has been shown in which the shape and position of the substrate 1 acquired based on the image captured by the photographing unit 25 are corrected based on the detection result of the optical sensor 24, but the present disclosure is not limited to this. For example, if the accuracy of the shape and position of the substrate 1 acquired based on the image captured by the photographing unit 25 is sufficient for obtaining the transport gap C, correction based on the detection result of the optical sensor 24 does not need to be performed.

[0071] In the above embodiment, the control unit 30 controls the photographing unit 25 to photograph multiple boards 1 at the position where the board 1 is detected by the optical sensor 24, but the present disclosure is not limited to this. For example, the control unit 30 may control the photographing unit 25 to photograph multiple boards 1 at a predetermined position. Furthermore, if the field of view of the photographing unit 25 is relatively large, the control unit 30 may control the photographing unit 25 to photograph all of the boards 1 in one photographing.

[0072] In the above embodiment, the photographing unit 25 is disposed in the substrate holding hand 20, but the present disclosure is not limited to this. For example, the photographing unit 25 may be disposed in the robot arm 10.

[0073] In addition, in the above embodiment, an example was shown in which the optical sensor 24 was disposed at the tip of the substrate holding hand 20, but the present disclosure is not limited to this. For example, the optical sensor 24 may be disposed at a location other than the tip of the substrate holding hand 20.

[0074] In the above embodiment, an example in which one blade 21 is disposed on the substrate transport robot 100 has been described, but the present disclosure is not limited to this. For example, two or more blades 21 may be disposed on the substrate transport robot 110 shown in FIG.

[0075] Furthermore, in the above embodiment, an example has been shown in which the transport gap C includes all of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being transported by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transported by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200, but the present disclosure is not limited to this. For example, the transport gap C may include only one or two of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being transported by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transported by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200. [Explanation of symbols]

[0076] 1 board 1a Top surface 1b Bottom side 10 Robotic Arm 20 Substrate holding hand 20a top side 20b Bottom side 24 Optical Sensor 25 Photography Department 30 Control Unit 40 Information Department 100, 110 Substrate transport robot 200, 201, 202 storage section C Conveying gap

Claims

1. A substrate transport robot that performs at least one of unloading a substrate from a storage unit for storing a plurality of substrates and loading the substrate into the storage unit, A robotic arm, a substrate holding hand attached to a tip of the robot arm and holding the substrate; an imaging unit that images the plurality of substrates stored in the storage unit; an optical sensor that moves along an arrangement direction of the plurality of substrates stored in the storage section and detects the substrates; a control unit, The control unit based on the detection result of the optical sensor and the image captured by the image capturing unit, acquire a transport gap including at least one of a gap between the position of the substrate holding hand and the substrate in the storage unit, a gap between the substrate being transported by the substrate holding hand and a substrate adjacent to the substrate being transported by the substrate holding hand, and a gap between the substrates stored in the storage unit; A substrate transport robot that controls the operation of the robot arm and the substrate holding hand to perform at least one of unloading the substrate from the storage section and loading the substrate into the storage section based on the size of the acquired transport gap.

2. The conveying gap is a gap between an upper surface of the substrate holding hand and a lower surface of the substrate arranged adjacent to and above the substrate holding hand in the storage section; The substrate transport robot according to claim 1 , further comprising: a gap within the storage section between a lower surface of the substrate holding hand and an upper surface of the substrate arranged adjacent to and below the substrate holding hand.

3. The control unit 3. The substrate transport robot according to claim 1, wherein at least one of the shape and the position of the substrate is obtained based on the image taken by the photographing unit, and the size of the transport gap is obtained.

4. The control unit The substrate transport robot according to claim 3 , wherein at least one of the shape and the position of the substrate acquired based on the image taken by the photographing unit is corrected based on the detection result of the optical sensor.

5. The substrate transport robot according to claim 4 , wherein the control unit controls the photographing unit to photograph the plurality of substrates at positions where the substrates are detected by the optical sensor.

6. the imaging unit is disposed on the robot arm or the substrate holding hand, 6. The substrate transport robot according to claim 4, wherein the optical sensor is disposed at a tip of the substrate holding hand and is moved by the substrate holding hand along an arrangement direction in which the plurality of substrates are arranged.

7. A substrate transport robot as described in any one of claims 1 to 6, wherein the control unit acquires the position of the substrate holding hand within the storage unit based on a previously taught movement path of the substrate holding hand when transporting the substrate.

8. A substrate transport robot as described in any one of claims 1 to 7, wherein the control unit controls the operation of the robot arm and the substrate holding hand to perform at least one of unloading the substrate from the storage unit and loading the substrate into the storage unit when it determines that the size of the detected transport gap is large enough to transport the substrate.

9. A substrate transport robot as described in any one of claims 1 to 8, wherein when the control unit determines that the size of the detected transport gap is not large enough to transport the substrate, it corrects the transport path of the substrate that was previously taught based on the size of the detected transport gap.

10. Further provided with a notification unit, 10. The substrate transport robot of claim 9, wherein, when the control unit determines that at least one of transporting the substrate from the storage unit and transporting the substrate into the storage unit cannot be performed even after correcting the previously taught transport path of the substrate, the control unit controls the notification unit to notify the notification unit that at least one of transporting the substrate into and transporting the substrate into the storage unit cannot be performed.

11. The conveying gap is a gap between an upper surface of the substrate being transported by the substrate holding hand and a lower surface of the substrate arranged adjacent to the substrate holding hand above the substrate holding hand; The substrate transport robot according to any one of claims 1 to 10, further comprising a gap between a lower surface of the substrate holding hand transporting the substrate and an upper surface of the substrate arranged adjacent to and below the substrate holding hand.

12. 1. A method for controlling a substrate transport robot that performs at least one of unloading a substrate from a storage unit for storing a plurality of substrates and loading the substrate into the storage unit, comprising: photographing the plurality of substrates stored in the storage unit by an imaging unit; detecting the substrates by an optical sensor that moves along an arrangement direction in which the plurality of substrates stored in the storage section are arranged; acquiring a transport gap including at least one of a gap between the position of the substrate holding hand of the substrate transport robot in the storage unit and the substrate, a gap between the substrate being transported by the substrate holding hand and a substrate adjacent to the substrate being transported by the substrate holding hand, and a gap between the substrates stored in the storage unit based on the detection result of the optical sensor and the image captured by the imaging unit; and controlling the operation of the robot arm and the substrate holding hand of the substrate transport robot to perform at least one of unloading the substrate from the storage section and loading the substrate into the storage section based on the size of the acquired transport gap.

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