The invention discloses an
electron microscope imaging target accurate
movement control method based on visual
servo, and belongs to the technical field of
electron microscopic imaging and
movement control. Comprising the following steps: constructing a target
data set in a low-
magnification scene, training a fine-tuning target
tracking model, and outputting a target center point; performing real-time communication with the
electron microscope to obtain low-power image frames, identifying each target by using the ideal model, generating an online target tracking task sequence, and continuously outputting a tracking frame of a current target individual in sequence; according to the pixel error, mapping a
calibration coefficient related to multiplying power into a displacement reference quantity to execute PID
closed loop, and driving the sample table to move until the target individual meets the center; and switching to
high magnification to complete observation and returning to low
magnification to complete multi-target observation one by one. According to the method, re-search and re-calibration after rate switching are avoided through the process of'retention-
rollback recovery-
relative displacement inheritance ', the robustness is improved in combination with thread decoupling and adaptive parameters, multi-target rapid, accurate and stable high-power observation can be achieved in a
millisecond-level
control period, and the method is suitable for large-scale popularization and application. The
switching time delay is obviously shortened, the invalid range and the manual burden are reduced, and the experiment verifies that the method has effectiveness and superiority.