Substrate processing device and position detection method

Abstract

To provide a technique capable of accurately recognizing a position of a placing part of a rotary table.SOLUTION: A substrate processing device includes: a processing container; a rotary table which is rotatably provided in the processing container and has a placing part on which a substrate is placed; an imaging apparatus which is fixed to the processing container and can image a part of the rotary table; and a control part which processes imaging information of the imaging apparatus. The rotary table includes at least two rotation-side imaging objects with a space in positions corresponding to the placing part. When imaging the rotary table, the control part rotates the rotary table so that the imaging apparatus is located between two rotation-side imaging objects in a planar view of the imaging apparatus and the rotary table. An intermediate correction lens for correcting a viewing angle direction of the imaging apparatus to a direction orthogonal to a surface of the rotary table is provided between the imaging apparatus and the rotary table in a side view of the imaging apparatus and the rotary table.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a substrate processing apparatus and a position detection method. [Background technology]

[0002] Patent Document 1 discloses a substrate processing apparatus that performs substrate processing such as film formation by placing substrates on multiple placement sections of a rotary table that serves as a susceptor. This substrate processing apparatus has a camera installed in a processing chamber, which captures images of two susceptor marks on the rotary table with the camera, corrects the positions of the placement sections based on the image information, and transports the substrate to the placement sections whose positions have been corrected. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-94814 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique that can accurately recognize the position of the mounting portion of a rotary table. [Means for solving the problem]

[0005] According to one aspect of the present disclosure, there is provided a substrate processing apparatus comprising: a processing vessel; a turntable rotatably arranged inside the processing vessel and having a mounting portion on which a substrate is placed; an imaging device fixed to the processing vessel and capable of imaging a portion of the turntable; and a control unit that processes imaging information of the imaging device, wherein the turntable has at least two rotation-side imaging targets spaced apart at positions corresponding to the mounting portions; the control unit, when imaging the turntable, rotates the turntable so that the imaging device is positioned between the two rotation-side imaging targets in a planar view of the imaging device and the turntable; and an intermediate correction lens is provided between the imaging device and the turntable in a side view of the imaging device and the turntable to correct the viewing angle direction of the imaging device in a direction perpendicular to the surface of the turntable. [Effects of the Invention]

[0006] According to one aspect, the position of the mounting portion of the rotary table can be recognized with high accuracy. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a cross-sectional view schematically showing a substrate processing apparatus according to an embodiment. [Figure 2] FIG. 2 is a plan view schematically illustrating the inside of a processing container of the substrate processing apparatus. [Figure 3] FIG. 3 is a side cross-sectional view taken along the line III-III in FIG. 2. [Figure 4] Fig. 4(A) is a schematic diagram showing the viewing angle direction of an imaging device that uses an intermediate correction lens, and Fig. 4(B) is a schematic diagram showing the viewing angle direction of an imaging device that does not include an intermediate correction lens according to a reference example. [Figure 5] 10A and 10B are diagrams illustrating a method for recognizing the position of the placement unit. [Figure 6] 10 is a flowchart showing a processing flow of a position detection method. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant explanations may be omitted.

[0009] FIG. 1 is a cross-sectional view schematically showing a substrate processing apparatus 100 according to an embodiment. FIG. 2 is a plan view schematically showing the interior of a processing chamber 1 of the substrate processing apparatus 100. As shown in FIGS. 1 and 2, the substrate processing apparatus 100 is configured as a film formation apparatus that forms a film on the surface of a substrate W by atomic layer deposition (ALD) or molecular layer deposition (MLD). Note that the substrate processing performed by the substrate processing apparatus 100 is not limited to film formation processing, and may be, for example, etching processing, cleaning processing, etc.

[0010] The substrate processing apparatus 100 includes a processing chamber 1 for accommodating a substrate W therein and performing a film forming process thereon, and a turntable 2 rotatably provided within the processing chamber 1.

[0011] The processing vessel 1 is formed in a flat, cylindrical shape and has a processing chamber therein for accommodating a substrate W. For example, the processing vessel 1 is configured by assembling a vessel body 12 having an open top and a top plate 11 disposed on top of the vessel body 12. For ease of explanation, the top plate 11 is not shown in FIG. 2. The vessel body 12 has a disk-shaped bottom 14 and side portions 13 that protrude vertically upward from the outer edge of the bottom 14. The side portions 13 of the vessel body 12 and the top plate 11 are airtightly fixed together via a sealing member 15 such as an O-ring. A position detection device 80 is also installed on the top plate 11. The configuration of the position detection device 80 will be described in detail later.

[0012] The turntable 2 is formed in an annular shape, and its inner periphery is fixed to a cylindrical core part 21. The core part 21 is fixed to the upper end of a rotation shaft 22 extending in the vertical direction. The rotation shaft 22 penetrates the bottom part 14 of the processing vessel 1, and its lower end is held by a drive part 23. The drive part 23 rotates the rotation shaft 22 about its axis. As a result, the turntable 2 rotates via the rotation shaft 22 and the core part 21, with the center of the processing vessel 1 as the rotation center.

[0013] Rotating shaft 22 and driving unit 23 are housed in a cylindrical case body 20 that is open at the top. Case body 20 has a flange portion at the top end and is airtightly fixed to bottom 14 of processing vessel 1. Therefore, the internal space of case body 20 is isolated from the outside of case body 20 and is in communication with the processing chamber of processing vessel 1.

[0014] 1 and 2, the upper surface of the turntable 2 is provided with a plurality of (five in FIG. 2) circular, concave mounting portions 24 (recesses) on which substrates W can be mounted, arranged along the direction of rotation of the turntable 2. Examples of the substrates W to be subjected to film formation include semiconductor wafers such as silicon semiconductors, compound semiconductors, and oxide semiconductors. The substrates W may have recesses and protrusions, such as trenches and vias, on their surfaces.

[0015] The mounting portion 24 has an inner diameter slightly larger than the diameter of the substrate W (for example, 300 mm), and a depth approximately equal to the thickness of the substrate W. As a result, when the substrate W is placed on the mounting portion 24, the upper surface of the turntable 2 (the area on which the substrate W is not placed) and the upper surface of the substrate W are approximately at the same height.

[0016] Each mounting portion 24 of the turntable 2 has a plurality of (e.g., three) through-holes 24h (see FIGS. 3 and 5). The processing vessel 1 is provided with a lifter (not shown) at a position adjacent to the transfer port 16 provided in the side portion 13. The lifter has a plurality of (e.g., three) lift pins that move up and down through each through-hole 24h, and receives and delivers the substrate W to and from a transfer device that has entered through the transfer port 16.

[0017] The substrate processing apparatus 100 includes a gas supply unit 30 for supplying gas into the processing vessel 1. The gas supply unit 30 is made of, for example, quartz and includes multiple linearly extending gas nozzles 30N. Each gas nozzle 30N has an inlet port 30a, which is a base end, fixed to the side portion 13 of the processing vessel 1, and extends radially inside the processing vessel 1 to near the central region. Each gas nozzle 30N extends parallel to the upper surface of the turntable 2 inside the processing vessel 1. Each gas nozzle 30N has multiple gas discharge holes (not shown) in the vertically lower wall thereof that open toward the turntable 2. The gas discharge holes are arranged, for example, at equal intervals along the axial direction (the radial direction of the processing vessel 1).

[0018] The gas supply unit 30 includes a raw material gas supply unit 31 that supplies a raw material gas, a reactive gas supply unit 32 that supplies a reactive gas, and a first separation gas supply unit 34 and a second separation gas supply unit 35 that supply a separation gas. One or more gas nozzles 30N are provided in each of the raw material gas supply unit 31, the reactive gas supply unit 32, the first separation gas supply unit 34, and the second separation gas supply unit 35. In the example of Fig. 2, the second separation gas nozzle 35N, the raw material gas nozzle 31N, the first separation gas nozzle 34N, and the reactive gas nozzle 32N are installed in this order clockwise from the transfer port 16.

[0019] The source gas nozzle 31N is connected to a source gas supply path (not shown). The source gas supply path is provided with a source gas source, an on-off valve, a flow rate controller, etc. (none of which are shown), and supplies a source gas to the source gas nozzle 31N. An appropriate gas may be used as the source gas depending on the type of film to be formed on the substrate W, etc.

[0020] The reaction gas nozzle 32N is connected to a reaction gas supply path (not shown). The reaction gas supply path is provided with a reaction gas source, an on-off valve, a flow rate controller, etc. (none of which are shown), and supplies a reaction gas to the reaction gas nozzle 32N. An appropriate gas may be used as the reaction gas depending on the type of film to be formed on the substrate W, etc.

[0021] The first separation gas nozzle 34N and the second separation gas nozzle 35N are each connected to a gas supply source of a separation gas (not shown). As the separation gas, for example, an inert gas such as nitrogen (N) gas or a noble gas may be used.

[0022] The processing vessel 1 also has two convex portions 4A and 4B attached to the underside of the top plate 11 (see also FIG. 1). The convex portions 4A and 4B are generally fan-shaped in plan view, spaced apart from each other along the circumferential direction of the processing vessel 1, and positioned above the turntable 2. The centers of the convex portions 4A and 4B are adjacent to the protrusion 5 attached to the top plate 11. The convex portions 4A and 4B are formed of a metal such as aluminum. The convex portion 4A has a radially extending groove (not shown) in its circumferentially intermediate portion, and the first separation gas nozzle 34N is accommodated in this groove. The convex portion 4B also has a radially extending groove (not shown) in its circumferentially intermediate portion, and the second separation gas nozzle 35N is accommodated in this groove. Meanwhile, the processing vessel 1 has, between the convex portions 4A and 4B along the circumferential direction, a first region 481 in which the raw material gas nozzle 31N is arranged, and a second region 482 in which the reaction gas nozzle 32N is arranged.

[0023] The convex portions 4A and 4B form a separation space H (see FIG. 1) between them and the turntable 2. When separation gas is supplied from the first separation gas nozzle 34N and the second separation gas nozzle 35N, the separation gas flows from the separation space H toward the first region 481 and the second region 482. Because the height of the separation space H is lower than the first region 481 and the second region 482, the pressure in the separation space H can be maintained higher than the pressure in the first region 481 and the second region 482. This allows the separation space H to form a pressure barrier against the first region 481 and the second region 482, making it possible to reliably separate the first region 481 and the second region 482.

[0024] 1, a separation gas supply pipe 51 is connected to the center of the top plate 11. By supplying a separation gas through the separation gas supply pipe 51, the pressure in the space between the core portion 21 and the top plate 11, the space between the outer periphery of the core portion 21 and the inner periphery of the protruding portion 5, and the space between the protruding portion 5 and the turntable 2 can be made higher than the pressure in the first region 481 and the second region 482.

[0025] A ring-shaped heater unit 7 is provided as a heating unit in the space between the turntable 2 and the bottom of the vessel body 12. The heater unit 7 heats each substrate W placed on the mounting unit 24 via the turntable 2 to a target temperature. A block member 71a is provided below and near the outer periphery of the turntable 2 to surround the heater unit 7. This separates the space in which the heater unit 7 is placed from the area outside the heater unit 7. The block member 71a is positioned to maintain a small gap between it and the underside of the turntable 2. A plurality of purge gas supply pipes 73 for supplying purge gas to the area accommodating the heater unit 7 are connected to the area through the bottom of the vessel body 12 to purge this area. A protective plate 7a is provided above the heater unit 7. The protective plate 7a is made of quartz or the like and protects the heater unit 7 even if a processing gas flows into the space in which the heater unit 7 is installed.

[0026] The bottom of the container body 12 has a raised portion R inside the annular heater unit 7. The upper surface of the raised portion R is close to the turntable 2 and the core portion 21, leaving small gaps between the upper surface of the raised portion R and the back surface of the turntable 2, and between the upper surface of the raised portion R and the back surface of the core portion 21. The bottom 14 of the container body 12 has a central hole through which the rotating shaft 22 passes. The inner diameter of this central hole is slightly larger than the diameter of the rotating shaft 22, leaving a gap that communicates with the case body 20. A purge gas supply pipe 72 is connected to the top of the case body 20.

[0027] The purge gas supply pipe 72 supplies purge gas into the case body 20. This purge gas flows into the space below the heater unit 7 through the gap between the rotating shaft 22 and the central hole of the bottom 14, the gap between the core portion 21 and the raised portion R of the bottom 14, and the gap between the raised portion R and the back surface of the turntable 2. The purge gas also flows into exhaust ports 61 and 62 (described below) through the gap between the block member 71a and the back surface of the turntable 2. As the purge gas supplied by the purge gas supply pipe 72 and the purge gas supply pipe 73, an inert gas such as nitrogen gas or a noble gas may be used, as with the separation gas.

[0028] 2, the processing vessel 1 includes an exhaust port 61 in the first region 481 and an exhaust port 62 in the second region 482. The exhaust ports 61 and 62 are connected to an exhaust system including, for example, a pressure regulator and a turbomolecular pump. The substrate processing apparatus 100 can adjust the pressure inside the processing vessel 1 by using the exhaust system. The exhaust ports 61 and 62 exhaust gas from the first region 481 and the second region 482, thereby promoting a decrease in the pressure in the first region 481 and the pressure in the second region 482. The source gas supplied from the source gas nozzle 31N is generally exhausted from the exhaust port 61, and the reactive gas supplied from the reactive gas nozzle 32N is generally exhausted from the exhaust port 62.

[0029] The substrate processing apparatus 100 also includes a control unit 90 that controls the operation of the entire apparatus. The control unit 90 is a computer having a processor, memory, input / output interface, communication interface, etc. (not shown). The processor is an electronic circuit that combines one or more of a CPU (Central Processing Unit), GPU (Graphics Processing Unit), ASIC (Application Specific Integrated Circuit), FPGA (Field-Programmable Gate Array), and circuits made of multiple discrete semiconductors, and executes and processes programs stored in memory. The memory includes a main storage device made of semiconductor memory, etc., and an auxiliary storage device made of a disk, semiconductor memory (flash memory), etc.

[0030] Fig. 3 is a cross-sectional view taken along line III-III in Fig. 2. As shown in Fig. 3, the substrate processing apparatus 100 includes a position detection device 80 for detecting the position of each mounting portion 24 when a substrate W is mounted on each mounting portion 24 of the turntable 2. The position detection device 80 is fixed to an upper portion of the top plate 11 of the processing vessel 1 (outside the processing vessel 1).

[0031] The position detection device 80 includes an imaging device 81 that images the turntable 2, a housing 82 that houses the imaging device 81, a panel 83 provided below the imaging device 81, a light source 84 that irradiates the imaged object with light, an intermediate correction lens 85 that changes the viewing angle direction of the imaging device 81, and a polarizing plate 86 that regulates reflected light. The top plate 11 of the processing vessel 1 is provided with a transmission window 11w to enable the imaging device 81 to capture an image of the turntable 2. The transmission window 11w and the position detection device 80 are disposed adjacent to the transfer port 16 (see also FIG. 2). This allows the position detection device 80 to accurately detect the position of the mounting portion 24 of the turntable 2 that has moved near the transfer port 16.

[0032] The imaging device 81 is provided at a position a set imaging distance away from the transparent window 11w in the vertical direction. The type of imaging device 81 is not particularly limited, and for example, a camera having a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor can be used. The imaging device 81 is attached to the upper part of the housing 82, with its internal lens facing vertically downward. This allows the imaging device 81 to capture an image of a part of the turntable 2 and its surrounding area through the transparent window 11w of the tabletop 11. The imaging control unit 81a connected to the imaging device 81 controls on / off switching, focusing, imaging, etc., and also processes captured imaging information. The control unit 90 may also function as the imaging control unit 81a.

[0033] The housing 82 is formed in a cylindrical shape, holds the imaging device 81 at the top, and blocks light from circumferentially surrounding the imaging direction of the imaging device 81. An opening is formed at the bottom end of the housing 82, and the housing 82 is installed on the top plate 11 with the opening facing the transmission window 11w. The housing 82 may also be provided with a cooling mechanism (not shown) that cools the imaging device 81. The cooling mechanism may, for example, be configured to blow air onto the imaging device 81 and the light source 84 using a fan (not shown), and exhaust the air from an opening (not shown).

[0034] The panel 83 is disposed between the imaging device 81 and the transmission window 11w, which are aligned vertically in a side view. The panel 83 has an aperture 83a in the center. The imaging device 81 captures an image of an imaging range F defined by the aperture 83a. Specifically, as shown in FIG. 2, the imaging range F is defined so as to capture a part of the outer periphery of the turntable 2 and a part of the container body 12. The imaging range F is also defined so as to capture the radially outer side of the mounting portion 24 that has moved due to the rotation of the turntable 2.

[0035] Here, the turntable 2 has two rotation-side imaging targets 25 corresponding to each of the multiple mounting portions 24. The position detection device 80 sets the imaging distance of the imaging device 81 and the position and size of the aperture 83a so that the two rotation-side imaging targets 25 can fit inside. The processing vessel 1 also has two fixed-side imaging targets 17 so that they are close to the two rotation-side imaging targets 25 that have moved with the rotation of the turntable 2. In other words, the position detection device 80 can capture images of the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17 using the imaging device 81, and detects the position of the turntable 2 in the rotational direction (circumferential direction) based on the imaging information.

[0036] Each rotation-side imaging target 25 and each fixed-side imaging target 17 is formed in a perfect circular shape in a plan view. However, the shapes of the rotation-side imaging target 25 and the fixed-side imaging target 17 are not particularly limited and may be polygonal, elliptical, or the like. Furthermore, each fixed-side imaging target 17 is formed to have a size (diameter) slightly larger than each rotation-side imaging target 25. This allows the imaging control unit 81a to easily identify each rotation-side imaging target 25 and each fixed-side imaging target 17 that have been imaged.

[0037] Returning to FIG. 3, each rotation-side imaging target 25 is formed in a recess 251 recessed in the thickness direction from the surface (top surface) of the turntable 2. By carving the recess 251 into the turntable 2 in this manner, a brightness difference occurs between the surface of the turntable 2 and the surface of the recess 251. The imaging control unit 81a extracts the edge of the rotation-side imaging target 25 from this brightness difference and further recognizes the circle of the recess 251 by using a Hough transform algorithm. Similarly, each fixed-side imaging target 17 is formed in a recess 171 (see FIG. 2) recessed in the thickness direction from the surface (top surface) of the bottom 14 of the container body 12. Note that the rotation-side imaging target 25 and the fixed-side imaging target 17 are not limited to being configured with only the recesses 251, 171, and may be configured, for example, to house a black marker or the like inside.

[0038] The light source 84 of the position detection device 80 is attached so as to irradiate light onto the imaging range F defined by the aperture 83a through the hole 83b and the transparent window 11w of the panel 83. The light source 84 may be, for example, an illumination device having a white light-emitting diode (LED), and its brightness is adjusted by a driver (not shown). While FIG. 3 shows a configuration including two light sources 84 to ensure brightness, the number of light sources 84 is not particularly limited and may be one, three, or more. The light source 84 may also be installed so that its angle can be changed. The light emitted by the light source 84 onto the turntable 2 properly illuminates the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17.

[0039] The intermediate correction lens 85 is provided between the imaging device 81 and the turntable 2 when viewed from the side of the imaging device 81 and the turntable 2. The intermediate correction lens 85 may be made of transparent quartz, resin, or the like. More specifically, the intermediate correction lens 85 is disposed below the panel 83 and away from the transmission window 11w. The intermediate correction lens 85 has the function of correcting the viewing angle direction of the imaging device 81 in a direction perpendicular to the surface of the turntable 2.

[0040] FIG. 4A is a schematic diagram showing the viewing angle direction VD of an imaging device 81 employing an intermediate correction lens 85. FIG. 4B is a schematic diagram showing the viewing angle direction VD of an imaging device 81 without an intermediate correction lens 85 according to a reference example. The imaging device 81 is configured such that the viewing angle direction VD becomes more obliquely horizontal as it moves toward the outside of the imaging range F, as shown in FIGS. 4A and 4B, because the angle of view is formed by the imaging lens housed inside the imaging device 81. When positioning the mounting portion 24, the imaging device 81 basically captures images at the midpoint between the two fixed-side imaging targets 17 and the two rotation-side imaging targets 25 (see also FIG. 2). Therefore, the two fixed-side imaging targets 17 and the two rotation-side imaging targets 25 are positioned near the edges of the imaging range F, respectively.

[0041] As shown in FIG. 4(B), the position detection device 80' according to the reference example captures an image of the imaging range F without correcting the viewing angle direction VD, which means that the fixed-side imaging targets 17 and the rotation-side imaging targets 25 are viewed diagonally from the side, and an image as if viewed from directly above cannot be captured. In other words, the imaging device 81 captures image information in which the opening edge and the bottom edge of the recess 171 of each fixed-side imaging target 17 and the recess 251 of each rotation-side imaging target 25 are doubled. In this case, the image processing by the imaging control unit 81a results in double circles, making it difficult for the control unit 90 to determine the exact positions of the fixed-side imaging targets 17 and the rotation-side imaging targets 25.

[0042] For this reason, as shown in FIG. 4A, the position detection device 80 according to this embodiment performs imaging using the imaging device 81 via an intermediate correction lens 85. The intermediate correction lens 85 bends the viewing angle direction VD of the imaging device 81, thereby correcting the optical path to be perpendicular to the surface of the bottom 14 of the container body 12 and the surface of the turntable 2 (in other words, each fixed-side imaging target 17 and each rotation-side imaging target 25). In other words, the intermediate correction lens 85 reduces the influence of the angle of view due to the lenses in the imaging device 81 as described above, and sets the viewing angle direction VD as if each fixed-side imaging target 17 and each rotation-side imaging target 25 were viewed from directly above. As a result, the imaging device 81 can obtain imaging information in which the recesses 171 of each fixed-side imaging target 17 and the recesses 251 of each rotation-side imaging target 25 do not appear double.

[0043] The intermediate correction lens 85 used in the position detection device 80 is not particularly limited in structure as long as it can correct the viewing angle direction VD to the vertical direction. For example, the intermediate correction lens 85 may be appropriately selected from a convex lens, a Fresnel lens, a cylindrical lens, or a combination of a convex lens and a concave lens. Furthermore, the intermediate correction lens 85 is formed in a rectangular or elliptical shape with its major axis aligned with the extension direction of the transmission window 11w in a plan view. The size of the intermediate correction lens 85 may be approximately the same as the transmission window 11w. The intermediate correction lens 85 also directs light from the light source 84 in a direction substantially parallel to the vertical direction, thereby guiding the light substantially perpendicular to each fixed-side imaging target 17 and each rotation-side imaging target 25.

[0044] The position detection device 80 refracts the optical paths of the imaging device 81 and the light source 84, thereby changing the reflection position and intensity of light that strikes the turntable 2 and the container body 12. For this reason, there is a concern that strong reflected light may occur at specific positions on the turntable 2 and the container body 12. To prevent the imaging device 81 from capturing this local reflected light, the position detection device 80 includes a polarizing plate 86 between the intermediate correction lens 85 and the turntable 2.

[0045] The polarizing plate 86 adjusts the reflected light that vibrates in all directions to light that vibrates in only a specific direction, thereby eliminating light that is locally reflected from the turntable 2 or the container body 12. A well-known configuration can be applied to this polarizing plate 86. Alternatively, the polarizing plate 86 may be arranged on the side of the light source 84 and configured to polarize the light emitted from the light source 84 in advance.

[0046] Furthermore, when the intermediate correction lens 85 or the polarizing plate 86 is applied, the imaging device 81 may acquire imaging information that is dark overall (low brightness). For this reason, the imaging device 81 may perform processing to adjust the imaging information so that the brightness is appropriate in image processing by the imaging control unit 81a. The image processing performed by the imaging control unit 81a may include, for example, HDR (High Dynamic Range) processing.

[0047] The imaging control unit 81a performs further image processing on the imaging information that has been subjected to HDR processing, thereby extracting information about each fixed-side imaging target 17 and each rotation-side imaging target 25 from the imaging information. The Hough transform, for example, can be used to extract each fixed-side imaging target 17 and each rotation-side imaging target 25. By performing the Hough transform, the circular shapes of each fixed-side imaging target 17 and each rotation-side imaging target 25 can be detected. As described above, the imaging information from the imaging device 81 is corrected by the intermediate correction lens 85, thereby preventing the openings and bottom surfaces of the recesses 171 and 251 from becoming double. Therefore, the imaging control unit 81a can easily obtain the circular shapes of each fixed-side imaging target 17 and each rotation-side imaging target 25 with fewer errors (candidates) in the Hough transform.

[0048] The control unit 90 uses information on the circle of the fixed side imaging target 17 and the circle of each rotating side imaging target 25 obtained from the imaging device 81 to recognize the position of each mounting portion 24 of the turntable 2 facing the position detection device 80.

[0049] 5 is a diagram illustrating a method for recognizing the position of the mounting unit 24. Specifically, the control unit 90 detects the position of each target from the circle of the fixed-side imaging target 17 and the circle of each rotation-side imaging target 25 acquired from the imaging device 81.

[0050] Here, the two rotation-side imaging targets 25 are arranged symmetrically with respect to a line passing through the center 24c of the mounting portion 24 and the rotation center Rc of the turntable 2. In other words, if a perpendicular line N1 is drawn from the rotation center 2c of the turntable 2 to a line segment L1 connecting the centers of the two rotation-side imaging targets 25, this perpendicular line N1 passes through the center 24c of the mounting portion 24 and intersects with the midpoint of the line segment L1. In other words, the perpendicular line N1 is the perpendicular bisector of the line segment L1.

[0051] Furthermore, if a perpendicular line N2 is drawn from the rotation center Rc of the turntable 2 to the line segment L2 connecting the centers of the two fixed-side imaging targets 17, this perpendicular line N2 intersects with the midpoint of the line segment L2. In other words, the perpendicular line N2 is the perpendicular bisector of the line segment L2.

[0052] The angle θ between the perpendicular line N1 and the perpendicular line N2 is the deviation of the mounting part 24 when the turntable 2 is rotated to place the substrate W on it. In other words, when the angle θ is approximately zero, it can be considered that the mounting part 24 is positioned in a normal position where the substrate W can be placed on it, whereas when the angle θ is greater than a predetermined value, it can be considered that the deviation of the mounting part 24 needs to be adjusted.

[0053] When adjusting the misalignment of the mounting portion 24, the control portion 90 may perform processing to rotate the turntable 2 by an amount of misalignment based on the detected angle θ and the position of the center 24c of the mounting portion 24. This makes the angle θ zero, properly positions the mounting portion 24, and enables the transfer device to accurately mount the substrate W on the mounting portion 24.

[0054] The substrate processing apparatus 100 according to the embodiment is basically configured as described above, and a method for detecting the position of the mounting part 24 when the substrate W is mounted will be described below with reference to Fig. 6. Fig. 6 is a flowchart showing a processing flow of the position detection method.

[0055] The control unit 90 and the imaging control unit 81a of the substrate processing apparatus 100 control steps S101 to S109 in the position detection method.

[0056] Specifically, in the position detection method, the substrate processing apparatus 100 rotates the turntable 2 to move the target placement unit 24 to a position adjacent to the transfer port 16 of the processing vessel 1 (step S101). This movement positions the imaging device 81 between the two rotation-side imaging targets 25 in a plan view of the imaging device 81 and the turntable 2.

[0057] Next, the control unit 90 operates the imaging device 81 of the position detection device 80 to capture an image of a part of the turntable 2 including the mounting unit 24 with the imaging device 81, thereby starting to detect the position of the mounting unit 24 (step S102). As described above, the imaging control unit 81a captures images of the two fixed-side imaging targets 17 and the two rotation-side imaging targets 25 via the intermediate correction lens 85, thereby acquiring imaging information having these imaging targets.

[0058] When the imaging information is acquired, the imaging control unit 81a performs HDR processing on the imaging information whose luminance has been reduced by passing through the intermediate correction lens 85 and the polarizing plate 86, thereby improving the luminance (step S103).

[0059] Next, the imaging control unit 81a generates an edge detection image by extracting edges of each fixed-side imaging target 17 and each rotation-side imaging target 25 based on the brightness change in the imaging information with improved brightness (step S104). For example, the edge detection image is binary image information in which areas where the brightness change is equal to or greater than a threshold are colored white and areas where the brightness change is less than the threshold are colored black.

[0060] The imaging control unit 81a then performs processing to detect the circles of each fixed-side imaging target 17 and each rotation-side imaging target 25 from the edge-detected image using a Hough transform (step S105). As a result, the imaging control unit 81a can obtain the circles of the two fixed-side imaging targets 17 and the two rotation-side imaging targets 25 (a total of four circles). The imaging control unit 81a then transmits extracted images of the circles of the two fixed-side imaging targets 17 and the two rotation-side imaging targets 25 to the control unit 90.

[0061] When the control unit 90 acquires the extracted images, it calculates the center coordinates (ie, the positions of each fixed-side imaging target 17 and each rotation-side imaging target 25) and radius of each circle from the extracted images (step S106).

[0062] Furthermore, the control unit 90 calculates the angle θ between the perpendicular lines N1 and N2 and the position of the center 24c of the mounting unit 24 based on the calculated positions of each fixed-side imaging target 17 and each rotation-side imaging target 25 (step S107). As described above, this angle θ represents the amount of displacement of the mounting unit 24.

[0063] Then, the control unit 90 determines whether the amount of deviation (angle θ) of the mounting unit 24 is within a threshold value (step S108). If the amount of deviation exceeds the threshold value (step S108: NO), the process returns to step S101, and the turntable 2 is rotated to readjust the position of the mounting unit 24. At this time, it is preferable to rotate the turntable 2 based on the angle θ detected in step S107. On the other hand, if the amount of deviation is within the threshold value (step S108: YES), the process proceeds to step S109.

[0064] In step S109, the control unit 90 controls the transfer device to load the substrate W into the processing chamber 1 and place the substrate W on the placement unit 24. At this time, the control unit 90 may fine-tune the position of the substrate W transferred by the transfer device based on the position of the center 24c of the placement unit 24 calculated in step S107. Furthermore, since the deviation amount of the rotational position of the turntable 2 is within a threshold value, the substrate processing apparatus 100 can prevent the lift pins from coming into contact with the turntable 2 when lifting the lift pins from the through-holes 24h. This allows the substrate processing apparatus 100 to stably place the substrate W on the placement unit 24.

[0065] Although the above position detection method has been described taking the process of loading the substrate W onto the receiver 24 as an example, the present invention is not limited to this. The same applies to the process of unloading the substrate W from the receiver 24.

[0066] As described above, the substrate processing apparatus 100 and the position detection method can detect the positions of the fixed-side imaging targets 17 and the rotation-side imaging targets 25 by the imaging device 81 with high accuracy using the intermediate correction lens 85. As a result, the substrate processing apparatus 100 and the position detection method can position the mounting part 24 with high accuracy.

[0067] The substrate processing apparatus 100 and the position detection method of the present disclosure are not limited to the above-described embodiment, and various modifications are possible. For example, the substrate processing apparatus 100 may not include the polarizing plate 86 if strong reflected light is not generated on the turntable 2 or the container body 12. Furthermore, the substrate processing apparatus 100 may omit HDR processing and the like if the decrease in brightness of the captured image information is small.

[0068] Furthermore, for example, if the substrate processing apparatus 100 is provided with at least two rotation-side imaging targets 25 for each mounting portion 24, the position of the mounting portion 24 can be detected based on its positional relationship with an appropriate configuration of the processing vessel 1 or its positional relationship within the imaging range. Therefore, the substrate processing apparatus 100 does not need to have the fixed-side imaging target 17. For example, when the substrate processing apparatus 100 extracts the position of the rotation-side imaging target 25 using the position of each pixel of the imaging information, the position of the rotation-side imaging target 25 may be calculated without using a Hough transform.

[0069] Furthermore, the substrate processing apparatus 100 may have an intermediate correction lens 85 located below the transmission window 11w (inside the processing chamber 1). Alternatively, the substrate processing apparatus 100 may employ the intermediate correction lens 85 instead of the transmission window 11w.

[0070] Furthermore, in the embodiment, the turntable 2 having a plurality of fixed recessed mounting portions 24 has been described, but the substrate processing apparatus 100 may be configured to rotate (spin) each mounting portion 24 separately from the rotation (revolution) of the turntable 2. In the case where each mounting portion 24 is configured to rotate, at least two imaging targets (for example, recesses) are formed on each mounting portion 24, and the mounting portion 24 can be positioned by recognizing the position of the mounting portion 24 in the rotational direction using the imaging device 81.

[0071] The technical ideas and effects of the present disclosure explained in the above embodiments will be described below.

[0072] A first aspect of the present disclosure is a substrate processing apparatus 100 comprising a processing vessel 1, a turntable 2 rotatably arranged inside the processing vessel 1 and having a mounting portion 24 on which a substrate W is placed, an imaging device 81 fixed to the processing vessel 1 and capable of imaging a portion of the turntable 2, and a control unit (imaging control unit 81a, control unit 90) that processes imaging information of the imaging device 81, wherein the turntable 2 has at least two rotation side imaging targets 25 spaced apart at positions corresponding to the mounting portion, and when imaging the turntable 2, the control unit 90 rotates the turntable 2 so that the imaging device 81 is positioned between the two rotation side imaging targets 25 in a planar view of the imaging device 81 and the turntable 2, and an intermediate correction lens 85 is provided between the imaging device 81 and the turntable 2 in a side view of the imaging device 81 and the turntable 2 to correct the viewing angle direction VD of the imaging device 81 to a direction perpendicular to the surface of the turntable 2.

[0073] As described above, the substrate processing apparatus 100 is provided with the intermediate correction lens 85, so that at least two rotation-side imaging targets 25 can be clearly captured when the imaging device 81 captures an image. The control units (imaging control unit 81a, control unit 90) can use this imaging information to accurately recognize the position of the mounting portion 24 of the turntable 2. This enables the substrate processing apparatus 100 to accurately position the mounting portion 24 by rotating the turntable 2, and to accurately mount the substrate W on the mounting portion 24.

[0074] The processing vessel 1 also includes at least two fixed-side imaging targets 17 spaced apart within an imaging range F captured by the imaging device 81, and the imaging device 81 captures images of the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17 via an intermediate correction lens 85. This allows the substrate processing apparatus 100 to recognize the misalignment of the imaging targets using information from the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17.

[0075] Furthermore, the control units (imaging control unit 81a, control unit 90) perform image processing on the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17 included in the imaging information to detect the positions of the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17. This allows the substrate processing apparatus 100 to more accurately calculate the positional deviation of the mounting unit 24 from the positions of the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17.

[0076] Furthermore, the control units (imaging control unit 81a, control unit 90) perform HDR processing to improve the brightness of the imaging information as image processing. This makes it possible to improve the brightness even when the brightness of the imaging information is reduced by applying the intermediate correction lens 85, thereby improving the accuracy of identifying the two rotation-side imaging targets 25 and the two fixed-side imaging targets 17.

[0077] Furthermore, as image processing, the control units (imaging control unit 81a, control unit 90) detect a predetermined shape by performing a Hough transform on the two rotation-side imaging targets 25. This allows the substrate processing apparatus 100 to more accurately calculate the positions of the two rotation-side imaging targets 25 based on the Hough-transformed shapes.

[0078] Furthermore, a polarizing plate 86 is provided between the intermediate correction lens 85 and the turntable 2 in a side view of the imaging device 81 and the turntable 2. This allows the substrate processing apparatus 100 to remove reflected light from the processing vessel 1 and the turntable 2 using the polarizing plate 86, and to stably extract the two rotation-side imaging targets 25.

[0079] Furthermore, the imaging device 81 is provided outside the processing vessel 1, and the processing vessel 1 has a transmission window 11w that allows the imaging device 81 to capture an image of the turntable 2, and the intermediate correction lens 85 is provided between the transmission window 11w and the imaging device 81. This allows the substrate processing apparatus 100 to prevent contamination of the intermediate correction lens 85 during substrate processing.

[0080] Furthermore, the two rotation-side imaging targets 25 are recesses 251 recessed in the thickness direction from the surface of the turntable 2. This allows the substrate processing apparatus 100 to reduce manufacturing costs and enables the imaging device 81 and the intermediate correction lens 85 to capture a straight image of the recesses 251 and accurately detect their positions.

[0081] A second aspect of the present disclosure is a position detection method for a substrate processing apparatus 100 including a processing vessel 1, a turntable 2 rotatably provided inside the processing vessel 1, having a mounting portion 24 on which a substrate W is mounted, and having at least two rotation-side imaging targets 25 spaced apart at positions corresponding to the mounting portion 24, and an imaging device 81 fixed to the processing vessel 1 and capable of imaging a portion of the turntable 2, wherein: (A) the imaging device 81 is rotated so that it is positioned between the two rotation-side imaging targets 25 in a plan view of the imaging device 81 and the turntable 2; The method includes the steps of rotating the table 2, and after steps (B) and (A), correcting the viewing angle direction VD of the imaging device 81 to a direction perpendicular to the surface of the turntable 2 through an intermediate correction lens 85 provided between the imaging device 81 and the turntable 2 in a side view of the imaging device 81 and the turntable 2, thereby capturing images of the two rotation-side imaging targets 25, and performing image processing on the imaging information captured by the imaging device 81 in steps (C) and (B) to detect the positions of the two rotation-side imaging targets 25. Even in this case, the position detection method can accurately recognize the position of the mounting portion 24 of the turntable 2.

[0082] The substrate processing apparatus 100 and the position detection method according to the presently disclosed embodiments are illustrative in all respects and are not limiting. The embodiments may be modified and improved in various ways without departing from the spirit and scope of the appended claims. The features described in the above embodiments may be configured differently and may be combined within a consistent range. [Explanation of symbols]

[0083] 1. Processing container 2 Rotating Tables 24 Placement section 81 Imaging device 81a Imaging control unit 85 Intermediate Corrective Lenses 90 Control Unit W substrate

Claims

1. A processing vessel; a rotary table rotatably provided inside the processing chamber and having a mounting portion on which a substrate is placed; an imaging device fixed to the processing vessel and capable of imaging a part of the rotary table; a control unit that processes imaging information of the imaging device, the rotary table includes at least two rotation-side imaging targets spaced apart at positions corresponding to the placement units, when capturing an image of the turntable, the control unit rotates the turntable so that the imaging device is positioned between the two rotation-side imaging targets in a plan view of the imaging device and the turntable; an intermediate correction lens that corrects the viewing angle direction of the imaging device in a direction perpendicular to the surface of the turntable is provided between the imaging device and the turntable in a side view of the imaging device and the turntable; Substrate processing equipment.

2. the processing vessel includes at least two fixed-side imaging targets spaced apart from each other within an imaging range of the imaging device; the imaging device captures images of the two rotation-side imaging targets and the two fixed-side imaging targets via the intermediate correction lens; The substrate processing apparatus according to claim 1 .

3. the control unit processes images of the two rotation-side imaging targets and the two fixed-side imaging targets included in the imaging information to detect the positions of the two rotation-side imaging targets and the positions of the two fixed-side imaging targets, respectively. The substrate processing apparatus according to claim 2 .

4. the control unit performs HDR processing to improve the luminance of the imaging information as the image processing. The substrate processing apparatus according to claim 3 .

5. the control unit detects a predetermined shape by performing a Hough transform on the two rotation-side captured objects as the image processing. The substrate processing apparatus according to claim 3 .

6. a polarizing plate is provided between the intermediate correction lens and the rotary table when viewed from the side of the imaging device and the rotary table; The substrate processing apparatus according to claim 1 .

7. the imaging device is provided outside the processing vessel, the processing vessel has a transmission window through which the imaging device can capture an image of the turntable; the intermediate correction lens is provided between the transmission window and the imaging device; The substrate processing apparatus according to claim 1 .

8. the two rotation-side imaging targets are recesses recessed from the surface of the turntable along a thickness direction; The substrate processing apparatus according to claim 1 .

9. A processing vessel; a rotary table rotatably provided inside the processing vessel, the rotary table having a mounting portion for mounting a substrate thereon, and at least two rotation-side imaging targets spaced apart at positions corresponding to the mounting portion; an imaging device fixed to the processing vessel and capable of imaging a part of the turntable, (A) rotating the turntable so that the imaging device is positioned between the two rotation-side imaging targets in a plan view of the imaging device and the turntable; (B) after the step (A), correcting the visual angle direction of the imaging device to a direction perpendicular to the surface of the turntable through an intermediate correction lens provided between the imaging device and the turntable in a side view of the imaging device and the turntable, thereby capturing images of the two rotation-side imaging targets; (C) performing image processing on the image information captured by the imaging device in the step (B) to detect the positions of the two rotation-side imaging targets. Location detection methods.

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