Object-conveying system

Abstract

To provide an object-conveying system capable of making a carriage part stably approach a rail, and of reducing impact when the carriage part approaches the rail.SOLUTION: An object-conveying system comprises an object-conveying device, and a placement base. The object-conveying device comprises a travel part, a carriage part, and a transfer machine part. a rail extending in a lateral direction is arranged between the object-conveying device and the placement base. A lateral direction moving mechanism in the carriage part is reciprocated along the rail. The rail comprises a first rail and a second rail that are different in horizontal height from each other, and extend in the lateral direction. When the lateral direction moving mechanism moves in a direction separating from the object-conveying device in the lateral direction, a first roller in the lateral direction moving mechanism moves along the first rail, and a second roller in the lateral direction moving mechanism moves along the second rail.SELECTED DRAWING: Figure 1A

Description

[Technical Field]

[0001] The present invention relates to an object transport system, and more particularly to an object transport system that improves the problem of tilting of a lateral movement mechanism during movement. [Background technology]

[0002] In conventional object transport systems, an object transport device moves between different stops to transport objects. When the object transport device stops at a stop, it picks up and releases objects by moving the carriage of the object transport device to a platform located laterally. However, when the carriage approaches the platform, the rollers of the lateral movement mechanism on the carriage (the rollers closest to the platform in the horizontal direction) generate impact and vibration as they enter along the rail joint. In order to suppress the vibration, the rail is lowered to a position lower than its original position, and the carriage becomes tilted after it has completely entered the platform. Summary of the Invention [Problem to be solved by the invention]

[0003] The present invention provides an object transport system that allows a carriage to stably enter a rail and reduces the impact when entering the rail. [Means for solving the problem]

[0004] The object transport system of the present invention includes an object transport device and a mounting platform disposed adjacent to the object transport device. The object transport device includes a travel unit, a carriage unit, and a transfer machine unit. The travel unit is disposed on a travel rail and moves along a travel direction. The carriage unit is disposed below the travel unit and includes a lateral movement mechanism that moves along the lateral direction and an elevator mechanism that moves along the up-down direction. The transfer machine unit is disposed below the elevator mechanism. A rail extending along the lateral direction is disposed between the object transport device and the mounting platform. The lateral movement mechanism moves back and forth between the object transport device and the mounting platform along the rail. The lateral movement mechanism has a first roller installed on one side in the lateral direction and a second roller installed on the other side. The rail includes a first rail and a second rail that have different horizontal heights in the up-down direction and extend along the lateral direction. When the lateral movement mechanism moves laterally away from the object transport device, the first roller moves along the first rail and the second roller moves along the second rail.

[0005] In one embodiment of the present invention, the first roller and the second roller are installed adjacent to each other in the running direction when viewed from the side, and the first rail and the second rail are installed adjacent to each other in the running direction when viewed from the top to bottom.

[0006] In one embodiment of the present invention, the first rail and the second rail are formed in a stepped shape when viewed from the side.

[0007] In one embodiment of the present invention, the first roller and the second roller are positioned at the same position in the running direction when viewed horizontally, and the second rail is formed within an area overlapping the first rail when viewed vertically. When the lateral movement mechanism moves along the lateral direction on the mounting table, the first roller and the second roller are positioned between the first rail and the second rail. [Effects of the Invention]

[0008] Based on the above, in the object transport device of the object transport system of the present invention, the first rail and the second rail are at different horizontal heights, and in the lateral movement mechanism of the cart unit, the first roller moves along the first rail and the second roller moves along the second rail. As such, as the lateral movement mechanism approaches the mounting table, the lateral movement mechanism moves along the first rail via the first roller while maintaining its original tilted posture, and is supported by the first rail, without abrupt changes in angle or height. Therefore, the object transport system of the present invention allows the cart unit to enter the rails stably and reduces the impact when entering the rails. [Brief explanation of the drawings]

[0009] [Figure 1A] 1A to 1C are explanatory diagrams illustrating the object transport system of the present invention in different operating states. [Figure 1B] 1A to 1C are explanatory diagrams illustrating the object transport system of the present invention in different operating states. [Figure 2] 1 is a top view of a lateral movement mechanism of an object transport apparatus according to an embodiment of the present invention before it enters a rail. FIG. [Figure 3] 3 is a perspective explanatory view of the lateral movement mechanism of FIG. 2 after it has been activated and entered the rail. FIG. [Figure 4] 10 is a plan view of an object transport apparatus according to another embodiment of the present invention, showing a state before a lateral movement mechanism thereof enters a rail. FIG. [Figure 5A] 10A and 10B are side explanatory views showing the process in which the lateral movement mechanism is activated and enters the rail. [Figure 5B] 10A and 10B are side explanatory views showing the process in which the lateral movement mechanism is activated and enters the rail. DETAILED DESCRIPTION OF THE INVENTION

[0010] 1A and 1B are explanatory diagrams of the object transport system of the present invention in different operating states. FIG. 2 is a top view of a lateral movement mechanism of an object transport apparatus according to one embodiment of the present invention before it enters a rail. FIG. 3 is a perspective explanatory diagram of the lateral movement mechanism of FIG. 2 after it has been activated and entered a rail. In this embodiment, the object transport system 10 transports an object O (e.g., a wafer) to each stop point within a semiconductor factory, for example, to improve overall production efficiency. However, in other embodiments not shown, the object transport system 10 can be applied to other work areas suitable for transporting objects, and the present invention is not limited to the above situation. The object transport system 10 includes an object transport apparatus 100 and a mounting table 200 arranged adjacent to the object transport apparatus 100. More specifically, the object transport device 100 moves, for example, on a traveling rail TR connecting each stop point along a traveling direction TD (a direction perpendicular to the drawings in FIGS. 1A and 1B ), and stops between two mounting tables 200 in a horizontal direction HD (the left-right direction in the drawings in FIGS. 1A and 1B ). Therefore, when the object transport device 100 is stopped at the stop point, the mounting table 200 is disposed adjacent to the object transport device 100. That is, in the object transport system 10, the object transport device 100 is movably mounted, and the mounting table 200 is stationary. However, in other embodiments not shown, only one mounting table 200 may be provided depending on actual needs, and the present invention is not limited thereto. The structure and operation method of the object transport system 10 are further described below.

[0011] 1A and 1B, in this embodiment, object transport apparatus 100 includes a traveling unit 110, a carriage unit 120, and a transfer machine unit 130. Traveling rails TR are disposed above object transport apparatus 100 in the up-down direction UD (e.g., the up-down direction in the drawings of FIGS. 1A and 1B). Traveling unit 110 is disposed on traveling rails TR and moves along traveling direction TD. Movement on traveling rails TR is achieved, for example, by a drive unit (not shown). Carriage unit 120 is disposed below traveling unit 110 in the up-down direction UD and includes a lateral movement mechanism 122 that moves along the lateral direction HD and an elevator mechanism 124 that moves along the up-down direction UD. Transfer machine unit 130 is disposed below elevator mechanism 124 and moves downward along elevator mechanism 124 to load or place object O. Therefore, when object transport device 100 stops at the side of mounting table 200 due to the movement of traveling unit 110, cart unit 120 moves transfer machine unit 130 closer to mounting table 200 by movement of lateral movement mechanism 122 along the lateral direction HD and movement of lifting mechanism 124 along the up-down direction UD. Also, as shown in Figures 1A and 1B, cart unit 120 is covered with a shell, and lateral movement mechanism 122, lifting mechanism 124, transfer machine unit 130, and object O all enter and exit from the inside of the shell, but the present invention is not limited to this.

[0012] Furthermore, in this embodiment, a rail R extending along the lateral direction HD is arranged between the object transport apparatus 100 and the mounting table 200. As shown in the state change between FIGS. 1A and 1B, the lateral movement mechanism 122 of the cart unit 120 moves back and forth in the lateral direction HD along the rail R between the object transport apparatus 100 and the mounting table 200 on one side in the lateral direction HD (i.e., the left side in FIGS. 1A and 1B). In other embodiments not shown, the lateral movement mechanism 122 of the cart unit 120 may move back and forth in the lateral direction HD along the rail R between the object transport apparatus 100 and the mounting table 200 on the other side in the lateral direction HD (i.e., the right side in FIGS. 1A and 1B), and the present invention is not limited to the content shown in FIGS. 1A and 1B. That is, in the explanation of the relative position and operation between the subsequent object transport device 100 and the mounting table 200, the mounting table 200 on one side in the horizontal direction HD is used as an example, but it can also be applied to the mounting table 200 on the other side in the horizontal direction HD (if present), and its movement direction, etc. can be adjusted as necessary (as described below).

[0013] 1A to 2, in this embodiment, the lateral movement mechanism 122 has a first roller W1 installed on one side in the lateral direction HD (the side closer to the left in the drawing of the lateral movement mechanism 122), and a second roller W2 installed on the other side in the lateral direction HD (the side closer to the right in the drawing of the lateral movement mechanism 122). The reason for installing the second roller W2 is that when the lateral movement mechanism 122 is supported only by the first roller W1 or the object transport device 100, it is necessary to provide additional support by the second roller W2 to prevent the central portion of the lateral movement mechanism 122 from bending due to its weight. In other embodiments not shown, only the first roller W1 may be installed depending on actual needs, and the present invention is not limited thereto.

[0014] 2 and 3, the rail R includes a first rail R1 and a second rail R2 that are at different horizontal heights in the up-down direction UD and extend along the horizontal direction HD. When the horizontal movement mechanism 122 moves away from the object transport device 100 in the horizontal direction HD, the first roller W1 moves along the first rail R1, and the second roller W2 moves along the second rail R2. In other embodiments (not shown), the second roller W2 may hang down without contacting the second rail R2; however, the present invention is not limited to this. That is, the first rail R1 and the second rail R2 are not on the same horizontal plane, and the horizontal height position when the first roller W1 and the first rail R1 contact each other is different from the horizontal height position when the second roller W2 and the second rail R2 contact each other. In this way, when the lateral movement mechanism 122 moves in the lateral direction HD in a direction away from the object transport apparatus 100, even if one end of the lateral movement mechanism 122 in the lateral direction HD drops further due to gravity, causing the lateral movement mechanism 122 to tilt, the above arrangement allows the lateral movement mechanism 122 to maintain its original tilted posture and enter the rail R. Also, as an example, the rail R includes a connecting part RR, and by installing the connecting part RR on the side closer to the object transport apparatus 100, the difference in height when the first roller W1 and the second roller W2 enter the rail R is made gentler, thereby reducing the impact, but the present invention does not limit whether the connecting part RR is installed or not.

[0015] As can be seen from this, in the object transport device 100 of the object transport system 10 of this embodiment, the first rail R1 and the second rail R2 have different horizontal heights, and in the lateral movement mechanism 122 of the carriage unit 120, the first roller W1 moves along the first rail R1, and the second roller W2 moves along the second rail R2. In this way, as the lateral movement mechanism 122 approaches the mounting table 200, the lateral movement mechanism 122 moves along the first rail R1 via the first roller W1 while maintaining its original tilted posture, and is supported by the first rail R1 without abrupt changes in angle or height. Therefore, the object transport system 10 allows the carriage unit 120 to stably enter the rail R and reduces impact when entering the rail R. Note that, although FIG. 3 shows the first rail R1 and the second rail R2 as being completely horizontal except for the connection portion RR, the present invention does not limit the shapes of the first rail R1 and the second rail R2. For example, in another embodiment not shown, the first rail R1 and the second rail R2 may be provided as rails with inclined surfaces, and the inclination angle of the carriage section 120 may be corrected as the first roller W1 moves along the first rail R1, but the present invention is not limited to this.

[0016] More specifically, in this embodiment, when the lateral movement mechanism 122 moves in the lateral direction HD away from the object transport apparatus 100, the horizontal height in the up-down direction UD of the first roller W1 or the second roller W2 that is relatively farther from the object transport apparatus 100 (the first roller W1 in the embodiments of FIGS. 2 and 3) is smaller than the horizontal height in the up-down direction UD of the first roller W1 or the second roller W2 that is relatively closer to the object transport apparatus 100 (the second roller W2 in the embodiments of FIGS. 2 and 3) (the roller farther from the object transport apparatus 100 before entering the rail R is at a lower position because it is more susceptible to the influence of gravity). Note that the first rail R1 is installed corresponding to the horizontal height of the first roller W1, and the second rail R2 is installed corresponding to the horizontal height of the second roller W2. That is, in the embodiment of FIGS. 2 and 3, the horizontal height of the first rail R1 in the up-down direction UD is lower than the horizontal height of the second rail R2 in the up-down direction UD. In this way, the lateral movement mechanism 122 of this embodiment can enter the rail R stably while maintaining the tilted posture.

[0017] Furthermore, in this embodiment, the first roller W1 and the second roller W2 are disposed adjacent to each other in the traveling direction TD when viewed from the horizontal direction HD (as shown by the dotted line in FIG. 2, the first roller W1 and the second roller W2 are adjacent to each other), and when viewed from the vertical direction UD (i.e., the viewing angle in FIG. 2), the first roller W1 and the second roller W2 are disposed adjacent to each other in the traveling direction TD. That is, the first roller W1 and the second roller W2 are disposed alternately in the traveling direction TD and are disposed at different positions in the traveling direction TD, and the first rail R1 and the second rail R2 are disposed alternately in the traveling direction TD and are disposed at different positions in the traveling direction TD. Therefore, when the horizontal movement mechanism 122 moves in the horizontal direction HD away from the object transport device 100, the first roller W1 enters the first rail R1, and the second roller W2 enters the second rail R2. Furthermore, when viewed from a viewing angle in the lateral direction HD, the first rail R1 and the second rail R2 are formed in a stepped staircase shape with differences in level, and receive the lateral movement mechanism 122 in accordance with the inclined posture of the lateral movement mechanism 122. In this manner, the lateral movement mechanism 122 of this embodiment can stably enter the rail R while maintaining its inclined posture. For example, the first roller W1 is disposed inside the second roller W2 in the traveling direction TD, and the first rail R1 is disposed inside the second rail R2 in the traveling direction TD (see FIG. 2). In other embodiments not shown, the first rail R1 and the second rail R2 may be formed in other appropriate shapes, or their relative positions may be changed. For example, if a mounting table 200 is provided on the other side, the shape or horizontal height position of the first rail R1 and second rail R2 on the other side can be adjusted according to the arrangement of the existing first roller W1 and second roller W2 of the lateral movement mechanism 122, and it is sufficient that the original posture can be maintained in accordance with the lateral movement mechanism 122 and the rail R can be entered stably, and the present invention is not limited to this.

[0018] Further embodiments of the present invention will now be described in detail.

[0019] FIG. 4 is a plan view of an object transport device according to another embodiment of the present invention, showing the lateral movement mechanism before it enters the rails. FIGS. 5A and 5B are side views illustrating the process of the lateral movement mechanism of FIG. 4 operating and entering the rails. In this embodiment, the carriage unit 120' of the object transport device 100' can also be applied to the object transport system 10 and mounting table 200 shown in FIGS. 1A and 1B. That is, the lateral movement mechanism 122' of the carriage unit 120' has a first roller W1' installed on one side of the lateral direction HD (the side closer to the left of the lateral movement mechanism 122' in the drawing) and a second roller W2' installed on the other side of the lateral direction HD (the side closer to the right of the lateral movement mechanism 122' in the drawing). The rail R' includes a first rail R1' and a second rail R2' that extend in the lateral direction HD and have different horizontal heights in the up-down direction UD. Furthermore, when the lateral movement mechanism 122' moves in the lateral direction HD away from the object transport apparatus 100', the first roller W1' moves along the first rail R1', and the second roller W2' moves along the second rail R2', or may hang from the second rail R2' without contacting it. Here, compared to the embodiment shown in Figures 2 and 3, the arrangement of the first roller W1' and second roller W2' and the first rail R1' and second rail R2' in this embodiment is different. For other structures not described, please refer to the descriptions of the previous embodiments, and a repeated description will not be given here.

[0020] 4 to 5B, in this embodiment, in the viewing angle seen in the lateral direction HD, the positions of the first roller W1′ and the second roller W2′ in the running direction TD are the same, that is, the connection direction of the first roller W1′ and the second roller W2′ is parallel to the lateral direction HD (see FIG. 4). They are located at the same position in the traveling direction TD. Furthermore, in the viewing angle in the up-down direction UD (i.e., the viewing angle of FIG. 4), the second rail R2' is formed within an area overlapping the first rail R1', i.e., the first rail R1' and the second rail R2' correspond to each other in the up-down direction UD and are located at the same position in the traveling direction TD. Specifically, the portion of the first rail R1' close to the object transport device 100' overlaps with the second rail R2', but the present invention is not limited to this.

[0021] Furthermore, in this embodiment, when the lateral movement mechanism 122' moves in the lateral direction HD away from the object transport apparatus 100', the horizontal height in the up-down direction UD of the first roller W1' or the second roller W2' that is relatively farther from the object transport apparatus 100 (the first roller W1' in the embodiment of FIGS. 4 to 5B) is smaller than the horizontal height in the up-down direction UD of the first roller W1' or the second roller W2' that is closer to the object transport apparatus 100' (the second roller W2' in the embodiment of FIGS. 4 to 5B) (the roller that leaves the object transport apparatus 100 before entering the rail R' is at a lower position because it is more susceptible to the influence of gravity). Furthermore, the horizontal height in the up-down direction UD of the first rail R1' is lower than the horizontal height in the up-down direction UD of the second rail R2'. As an example, the first rail R1' is provided at a position corresponding to the lower side of the first roller W1', and the second rail R2' is provided at a position corresponding to the upper side of the second roller W2'.

[0022] With the above settings, as shown in FIG. 5A, when the lateral movement mechanism 122' moves in the lateral direction HD away from the object transport device 100', it first moves from the first roller W1' along the first rail R1'. Next, as shown in FIG. 5B, after the lateral movement mechanism 122' enters the mounting table 200, the second roller W2' moves along the second rail R2' (hanging down and not contacting the second rail R2'). In other words, when the lateral movement mechanism 122' moves in the lateral direction HD away from the object transport device 100' to the mounting table 200, the first roller W1' and the second roller W2' are located between the first rail R1' and the second rail R2'. Therefore, in the lateral movement mechanism 122' of this embodiment, the first roller W1', which is located relatively lower, moves along the first rail R1', which is located lower, due to the influence of gravity, and then the second roller W2', which is located relatively higher, moves along the second rail R2', which is located higher, clamping the lateral movement mechanism 122' between the first rail R1' and the second rail R2' to maintain an inclined posture and allow for stable movement. In other words, even if one end of the lateral movement mechanism 122' in the lateral direction HD further drops due to gravity as the lateral movement mechanism 122' moves in a direction away from the object transport device 100' in the lateral direction HD, causing the lateral movement mechanism 122' to tilt, the above-mentioned arrangement allows the lateral movement mechanism 122' to maintain its original inclined posture and enter the rail R'.

[0023] As can be seen from this, in the object transport device 100' of the object transport system 10 of this embodiment, as the lateral movement mechanism 122' approaches the mounting table 200', the lateral movement mechanism 122' moves along the first rail R1' via the first roller W1' while maintaining its original tilted posture and is supported by the first rail R1', without abruptly changing its angle or height. Therefore, the object transport system 10 allows the carriage unit 120' to stably enter the rail R' and reduce the impact when entering the rail R'. Preferably, the distance between the first rail R1' and the second rail R2' in the up-down direction UD is slightly larger than the size of the first roller W1' (the size of the first roller W1' is equal to the size of the second roller W2'). Thus, as the lateral movement mechanism 122' moves, the first roller W1' does not contact the second rail R2', and the second roller W2' does not contact the first rail R1'. Furthermore, after the lateral movement mechanism 122' moves to the mounting table 200, the first roller W1' stops on the first rail R1', and the second roller W2' stops on the second rail R2' (they may hang down and not be in contact with the second rail R2'). In another embodiment (not shown), the first roller W1' may move so as to contact the first rail R1' and the second rail R2' simultaneously, and only the first roller W1' may move along the first rail R1'; the present invention is not limited to this.

[0024] In summary, in the object transport device of the object transport system of the present invention, the first rail and the second rail are at different horizontal heights, and in the lateral movement mechanism of the cart unit, the first roller moves along the first rail, and the second roller moves along the second rail or can hang from the second rail without contacting it. Preferably, the first roller and the second roller in the lateral movement mechanism of the cart unit contact the rail at different horizontal heights. In this way, as the lateral movement mechanism approaches the mounting table, the lateral movement mechanism moves along the first rail via the first roller while maintaining its original tilted position, is supported by the first rail, and does not suddenly change angle or height. Therefore, the object transport system of the present invention allows the cart unit to enter the rail stably and reduces impact when entering the rail. [Explanation of symbols]

[0025] 10: Object transport system 100, 100': object transport device 110: Running part 120, 120': bogie section 122, 122': Lateral movement mechanism 124: Lifting mechanism 130: Transfer machine section 200:Placement table HD:Horizontal O: Object R, R': Rail RR: Connection R1, R1': First rail R2, R2': Second rail TD: Travel direction TR: Running rail UD: Vertical direction W1, W1': First roller W2, W2': Second roller

Claims

1. An object transport system including an object transport device and a mounting table disposed adjacent to the object transport device, The object transport device is a traveling unit disposed on the traveling rail and moving along the traveling direction; a carriage unit that is installed below the traveling unit and includes a lateral movement mechanism that moves along a lateral direction and a lifting mechanism that moves along a vertical direction; a transfer machine unit installed below the lifting mechanism; Equipped with a rail extending along the lateral direction is disposed between the object transport device and the placement table; the lateral movement mechanism reciprocates in the lateral direction along the rail between the object transport device and the placement table, The lateral movement mechanism has a first roller installed on one side in the lateral direction and a second roller installed on the other side, The rails include a first rail and a second rail that are at different horizontal heights in the up-down direction and extend along the lateral direction, An object transport system in which, when the lateral movement mechanism moves in the lateral direction away from the object transport device, the first roller moves along the first rail and the second roller moves along the second rail.

2. When viewed from the lateral direction, the first roller and the second roller are disposed adjacent to each other in the traveling direction; and The object transport system according to claim 1 , wherein the first rail and the second rail are installed adjacent to each other in the traveling direction when viewed from the vertical direction.

3. The object transport system according to claim 2 , wherein the first rail and the second rail are formed in a stepped shape with steps when viewed from the lateral direction.

4. When viewed from the lateral direction, the first roller and the second roller are positioned at the same position in the running direction, and the second rail is formed within a range overlapping with the first rail when viewed from the vertical direction; 2. The object transport system of claim 1, wherein when the lateral movement mechanism moves along the lateral direction toward the mounting table, the first roller and the second roller are positioned between the first rail and the second rail.

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