Semiconductor process logistics management system using power line communication

Abstract

To provide a semiconductor process logistics management system, and more specifically, a semiconductor process logistics management system using power line communication.SOLUTION: A system includes: a slave control device configured to perform control for an item storage device in which an item is stored; a power line communication line configured to transmit power and a communication signal to the slave control device; and a master control device connected to the power line communication line and configured to communicate with the slave control device through the power line communication line. The slave control device includes an identification module capable of communicating with an identification tag of the item stored in the item storage device.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a semiconductor process logistics management system, and more particularly to a semiconductor process logistics management system using power line communication. [Background technology]

[0002] An automatic logistics management system has been introduced into semiconductor process lines, and wafers are transported and loaded using mobile objects.

[0003] Along the path of travel of moving bodies in an automated logistics management system, there are buffers (item storage devices) that temporarily store wafer carriers while wafer transport vehicles transport them. By knowing which wafer carriers are in which buffer locations, the movement of wafer transport vehicles can be efficiently managed when transport vehicles attempt to load new wafer carriers into the buffers or transport wafer carriers loaded in the buffers. In addition, information about wafer carriers loaded in buffers plays an important role in managing semiconductor processes. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Korean Patent Publication No. 10-2012-0105269 (2012.09.25) Summary of the Invention [Problem to be solved by the invention]

[0005] A semiconductor process logistics management system according to an embodiment of the present invention provides a power supply and a communication line using only an existing power line for power supply, and eliminates EtherCAT communication cables for communication with an item storage device in an existing semiconductor process logistics system, thereby reducing costs and minimizing management costs. [Means for solving the problem]

[0006] A semiconductor process logistics management system according to one aspect of an embodiment of the present invention includes a slave control device that controls an item storage device in which items are stored, a power line communication line that transmits power and communication signals to the slave control device, a master control device connected to the power line communication line and communicating with the slave control device via the power line communication line, and a filter unit disposed on the power line communication line that blocks the communication signal, and based on the filter unit, the power line communication line is formed with a power application section where only the power is applied and a power-communication signal application section where the power and the communication signal are applied.

[0007] Furthermore, the slave control device and the master control device may be connected to the power-communication signal application section of the power line communication line, and the slave control device may further include a slave-side power line communication module for separating the power and the communication signal supplied from the power line communication line and transmitting and receiving the communication signal, and the master control device may include a master-side power line communication module for separating the power and the communication signal supplied from the power line communication line and transmitting and receiving the communication signal to and from the power line communication line side.

[0008] The slave control device also includes an identification module capable of communicating with the identification tag of the item stored in the item storage device, a slave-side power supply module that receives the power from the slave-side power line communication module, a gas supply control module for controlling the supply of inert gas to the item storage device, a slave-side central control module for controlling the identification module and the gas supply control module, and a slave-side sensor module for sensing the status of components, and the slave-side power line communication module includes a coupler unit that receives the power and the communication signal from the power line communication line and supplies the power to the slave-side power supply module side, and a slave-side power line communication transceiver unit that receives the communication signal from the coupler unit and transmits the communication signal to the coupler unit side, and the identification module includes at least one identification module side antenna unit for wireless communication with the identification tag, and an identification module control unit that supplies power to the identification tag via the identification module side antenna unit and transmits and receives identification signals.

[0009] The identification module control unit may also include a carrier wave generation block that generates a carrier wave and a control command, an antenna selection block that designates one of one or more connected antenna units on the identification module side and selects a port to which the antenna unit is connected, a power monitoring block that monitors the power transmitted from the antenna unit, and a capacitor selection block that matches impedance that changes due to external influences and coil value deviations of the antenna unit.

[0010] The slave control device further includes a slave-side switching unit for selectively cutting off the power and communication signals transmitted from the power line communication line side to the slave-side power line communication module side, the slave-side power supply module receiving the power from the coupler unit generating power monitoring data regarding the power state and transmitting the power monitoring data to the slave-side central control module, the slave-side power line communication transceiver unit transmitting power line communication monitoring data regarding the power line communication signals to the slave-side central control module side, the slave-side central control module determining whether the power is normal or abnormal based on the power monitoring data and determining whether the communication signals are normal or abnormal based on the power line communication monitoring data, and when it is determined that at least one of the power and the communication signals is in an abnormal state, the slave-side central control module can transmit a cutoff control signal to the slave-side switching unit so that the slave-side switching unit cuts off the power and communication signals supplied from the power line communication line side to the slave-side power line communication module side.

[0011] In addition, the slave-side power line communication modules may be provided in plurality, each independently connected to the slave-side power supply module and the slave-side central control module, and the slave control device may include a switching module that selectively connects any one of the plurality of slave-side power line communication modules to the power line communication line side.

[0012] The master control device may further include a master-side power supply module that receives the power from the master-side power line communication module, a master-side central control module for controlling the master control device, an external power supply module that selectively receives power from an external power supply unit, and a master-side sensor module for sensing the status of components, and the master-side power line communication module may include a coupler unit that receives the power and the communication signal from the power line communication line and supplies the power to the master-side power supply module, and a master-side power line communication transceiver unit that receives the communication signal from the coupler unit and transmits the communication signal to the coupler unit.

[0013] The master control device may further include a master-side communication module connected to an external server and receiving a control signal from the external server.

[0014] In addition, the master control device may further include a control signal transceiver module connected to an external server and receiving a control signal from the external server, and the control signal transceiver module may include a control signal transceiver module-side power supply unit connected to the power application section of the power line communication line and receiving the power, and a control signal transceiver module-side communication unit for transmitting and receiving the control signal, and the master control device may further include a master-side communication unit for transmitting and receiving the control signal with the control signal transceiver module.

[0015] In addition, the master-side power line communication module may be provided in plurality, each of the plurality of master-side power line communication modules independently connected to the master-side power supply module and the master-side central control module, and the master control device may further include a switching module selectively connecting any one of the plurality of master-side power line communication modules to the power line communication line side.

[0016] In addition, the master-side power line communication transceiver unit of the master-side power line communication module includes a communication unit-side switching unit for selectively blocking the communication signal transmitted from the coupler unit, and the master-side power line communication transceiver unit transmits power line communication monitoring data for the power line communication signal to the master-side central control module side, and the master-side central control module determines whether the communication signal is normal or abnormal based on the power line communication monitoring data, and when it is determined that the communication signal is in an abnormal state, the master-side central control module can transmit a communication signal blocking control signal to the master-side power line communication transceiver unit so that the communication unit-side switching unit blocks the communication signal.

[0017] The master-side power supply module further includes a power supply module-side switching unit for selectively cutting off the power transmitted from the coupler unit, and a power monitoring unit for generating power monitoring data regarding the state of the power and transmitting the power monitoring data to the master-side central control module. The master-side central control module determines whether the power is normal or abnormal based on the power monitoring data. If the power is determined to be in an abnormal state, the master-side central control module transmits a power cut-off control signal to the master-side power line power supply module, causing the power supply module-side switching unit to cut off the power. The power supply module-side switching unit and the communication unit-side switching unit can cut off the power and the communication signal independently of each other.

[0018] The master control device further includes a master-side switching unit for selectively cutting off the power and communication signals transmitted from the power line communication line side to the master-side power line communication module side, the master-side power supply module receiving the power from the coupler unit generating power monitoring data regarding the power state and transmitting the power monitoring data to the master-side central control module, the master-side power line communication transceiver unit transmitting power line communication monitoring data regarding the power line communication signals to the master-side central control module side, the master-side central control module determining whether the power is normal or abnormal based on the power monitoring data and determining whether the communication signals are normal or abnormal based on the power line communication monitoring data, and when it is determined that at least one of the power and the communication signals is in an abnormal state, the master-side central control module can transmit a cutoff control signal to the master-side switching unit so that the master-side switching unit cuts off the power and communication signals supplied from the power line communication line side to the master-side power line communication module side.

[0019] In addition, the power-communication signal application section of the power line communication line may be provided between a first power application section and a second power application section of the power application section, and the filter unit may include a first filter unit arranged at a node where the power-communication signal application section and the first power application section are connected, and a second filter unit arranged at a node where the power-communication signal application section and the second power application section are connected.

[0020] The power supply may further include an external device connected to the power line communication line of the power-communication signal application section and receiving only the power, and a third filter unit may be included between the external device and a node to which the power line communication line of the power-communication signal application section is connected.

[0021] The master control device further includes a first master control device connected to one of the nodes of the power line communication line, and a second master control device connected to a node different from the node to which the first master control device is connected, and only one of the first master control device and the second master control device communicates with the slave control device, and the other of the first master control device and the second master control device monitors whether the master control device communicating with the slave control device is operating normally, and if the master control device communicating with the slave control device is not operating normally, it disconnects the master control device communicating with the slave control device from the power line communication line, and the other master control device can start communicating with the slave control device.

[0022] A slave control device according to another aspect of an embodiment of the present invention is a slave control device that controls an item storage device in which items are stored, and includes a slave-side power line communication module that separates the power and communication signals supplied from a power line communication line and transmits and receives the communication signals, a slave-side power supply module that receives the power from the slave-side power line communication module, and a slave-side sensor module that senses the status of components, and the slave-side power line communication module includes a coupler unit that receives the power and the communication signals from the power line communication line and supplies the power to the slave-side power supply module side, and a slave-side power line communication transceiver unit that receives the communication signals from the coupler unit and transmits the communication signals to the coupler unit side.

[0023] The item storage device further includes a gas supply control module for controlling the supply of inert gas to the item storage device, an identification module capable of communicating with the identification tag of the item stored in the item storage device, and a slave side central control module for controlling the identification module and the gas supply control module, and the identification module includes at least one identification module side antenna unit for wireless communication with the identification tag, and an identification module control unit that supplies power to the identification tag via the identification module side antenna unit and sends and receives identification signals.

[0024] The identification module control unit may also include a carrier wave generation block that generates a carrier wave and a control command, an antenna selection block that designates one of one or more connected antenna units on the identification module side and selects a port to which the antenna unit is connected, a power monitoring block that monitors the power transmitted from the antenna unit, and a capacitor selection block that matches impedance that changes due to external influences and coil value deviations of the antenna unit.

[0025] According to yet another aspect of the present invention, a master control device communicates via a power line communication line with a slave control device that controls an item storage device in which items are stored, and includes a master-side power line communication module that separates the power and communication signals supplied from the power line communication line and transmits and receives the communication signals to and from the power line communication line side, a master-side power supply module that receives the power from the master-side power line communication module, a master-side central control module that controls the master control device, an external power supply module that selectively receives power from an external power supply unit, and a master-side sensor module that senses the status of components, and the master-side power line communication module includes a coupler unit that receives the power and the communication signals from the power line communication line and supplies the power to the master-side power supply module side, and a master-side power line communication transceiver unit that receives the communication signals from the coupler unit and transmits the communication signals to the coupler unit side.

[0026] The device may further include a master-side communication module connected to an external server and receiving a control signal from the external server.

[0027] The power supply may further include a control signal transmitting / receiving module connected to an external server and receiving a control signal from the external server, and a master-side communication unit for transmitting and receiving the control signal with the control signal transmitting / receiving module, and the control signal transmitting / receiving module may include a control signal transmitting / receiving module-side power supply unit connected to the power application section of the power line communication line and receiving the power, and a control signal transmitting / receiving module-side communication unit for transmitting and receiving the control signal.

[0028] In addition, the master-side power line communication module may be provided in plurality, each of the plurality of master-side power line communication modules independently connected to the master-side power supply module and the master-side central control module, and the master control device may further include a switching module selectively connecting any one of the plurality of master-side power line communication modules to the power line communication line side. [Effects of the Invention]

[0029] According to the proposed embodiment, power supply and communication are performed via power lines, which are power supply lines, eliminating the need for expensive communication cables for communication, resulting in reduced installation costs and eliminating the need for high-altitude work to install communication cables.In addition, general-purpose PCs and general-purpose controllers (such as MCUs) can be used instead of EtherCAT-specific control systems (such as BeckHoff PCs), resulting in overall cost savings. [Brief explanation of the drawings]

[0030] [Figure 1] 1 is a diagram illustrating a semiconductor manufacturing process logistics management system according to an embodiment of the present invention; [Figure 2]FIG. 2 is a diagram illustrating the semiconductor process logistics management system of FIG. 1 in more detail. [Figure 3] FIG. 2 is a diagram showing a master control device of the semiconductor process logistics management system of FIG. [Figure 4] FIG. 2 is a diagram illustrating a slave control device of the semiconductor process logistics management system of FIG. [Figure 5] 5 is a diagram showing in detail an identification module control unit of the semiconductor process logistics control system of FIG. 4. FIG. [Figure 6] FIG. 10 is a diagram illustrating a semiconductor process logistics management system according to another embodiment of the present invention. [Figure 7] FIG. 10 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention. [Figure 8] FIG. 10 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention. [Figure 9] FIG. 10 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention. [Figure 10] FIG. 10 is a diagram illustrating a semiconductor process logistics management system according to yet another embodiment of the present invention. [Figure 11] FIG. 10 is a diagram illustrating a master control device of a semiconductor process logistics management system according to still another embodiment of the present invention. [Figure 12] FIG. 10 is a diagram illustrating a master control device of a semiconductor process logistics management system according to still another embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0031] The advantages and features of the present invention, as well as methods for achieving them, will become more apparent from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and may be embodied in various different forms. These embodiments are provided solely to complete the disclosure of the present invention and to fully convey the scope of the invention to those skilled in the art. The present invention is defined solely by the scope of the claims.

[0032] Although terms such as "first," "second," etc. are used to describe various components, it is understood that these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, it is understood that the first component referred to below may also be the second component within the technical concept of the present invention.

[0033] Like reference numbers refer to like elements throughout the specification.

[0034] The features of the various embodiments of the present invention may be partially or fully combined or combined with each other, and various technical interlocking and driving mechanisms are possible, as will be readily understood by those skilled in the art, and each embodiment may be implemented independently of the others or may be implemented together in a linked relationship.

[0035] Meanwhile, provisional effects that can be expected from the technical features of the present invention that are not specifically mentioned in the specification of the present invention will be treated as described in this specification, and since the present embodiment is provided to more completely explain the present invention to those having average knowledge in the art, the contents shown in the drawings may be exaggerated compared to the actual embodiment of the invention, and detailed descriptions of the configurations that are deemed to unnecessarily obscure the gist of the present invention will be omitted or simplified.

[0036] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0037] In existing semiconductor process logistics management systems, a slave controller for monitoring and controlling an item storage unit of an item storage device and a master controller for controlling the slave controller are connected using the EtherCAT method. Separate power lines are required to supply power to the slave controller and the master controller. However, the placement of communication lines and the power lines in a limited space restricts installation space and requires excessive costs and time for installation and maintenance.

[0038] Therefore, the inventor of the present invention proposed the following configuration to solve the problems of the existing systems.

[0039] FIG. 1 is a diagram illustrating a semiconductor process logistics control system according to an embodiment of the present invention.

[0040] 1, a semiconductor process logistics management system 1 according to an embodiment of the present invention is proposed to solve the problem of existing systems that require separate communication lines and power lines, and a master control device 200 and a slave control device 300 transmit communication signals using a power line communication line 100. That is, the master control device 200 and the slave control device 300 can transmit and receive communication signals by receiving power from the power line communication line 100. In this embodiment, one or more power line communication lines 100 may be provided, and when a plurality of power line communication lines 100 are provided, the power line communication lines 100 may be connected in parallel to each other.

[0041] The slave control device 300 is supplied with power from the power line communication line 100, and transmits and receives the communication signals to perform identification control of items (e.g., FOUPs loaded with wafers) and supply control of inert gas to the item storage unit 910 of the item storage device 900.

[0042] The configuration of the semiconductor process logistics management system 1 according to the embodiment of the present invention will be described in more detail below.

[0043] Fig. 2 is a diagram showing in more detail the semiconductor process logistics control system of Fig. 1, Fig. 3 is a diagram showing a master control device of the semiconductor process logistics control system of Fig. 1, Fig. 4 is a diagram showing a slave control device of the semiconductor process logistics control system of Fig. 1, and Fig. 5 is a diagram showing in detail an identification module control unit of the semiconductor process logistics control system of Fig. 4.

[0044] 2 to 5, the semiconductor process logistics management system according to this embodiment includes a slave control device 300 that controls an item storage device 900 in which items are stored, a power line communication line 100 that transmits power and communication signals to the slave control device 300, a master control device 200 that is connected to the power line communication line 100, communicates with the slave control device 300 via the power line communication line 100, and controls and monitors the slave control device 300, and a filter unit 410 that is disposed on the power line communication line 100 and blocks the communication signal from crossing over to a power application section 110 outside a power-communication signal application section 120.

[0045] The filter unit 410 may be, for example, a low pass filter (LPF) that passes only signals of a frequency corresponding to the power, or a band stop filter (BSF) that blocks signals corresponding to a frequency band corresponding to the communication signal.

[0046] At this time, with respect to the filter unit 410, the power line communication line 100 is formed with a power application section 110 where only the power is applied and a power-communication signal application section 120 where the power and the communication signal are applied. The slave control device 300 and the master control device 200 are connected to the power-communication signal application section 120 of the power line communication line 100. In the semiconductor process logistics management system 1 according to the present embodiment, the power application section 110 where only power is supplied and the power-communication signal application section 120 are separated by the filter unit 410, so that it is possible to prevent the communication signal, in addition to the power, from flowing into a noise-sensitive external device (e.g., semiconductor process equipment) and causing the device to malfunction.

[0047] The master control device 200 receives a control signal from the external server 500 to control the slave control device 300, monitors the operating status of the slave control device 300, and transmits the monitoring data to the external server 500. In this case, the master control device 200 can be connected to the external server 500 via a communication line 600, which may be a wired communication line such as a LAN or a wireless communication line such as Wi-Fi or WLAN, but is not limited to the above examples.

[0048] More specifically, the master control device 200 includes a master-side power line communication module 210 that separates the power and the communication signal supplied from the power-communication signal application section 120 of the power line communication line 100 and transmits and receives the communication signal to and from the power line communication line 100, a master-side power supply module 220 that receives the power from the master-side power line communication module 210, a master-side central control module 260 that controls the master control device 200, and a master-side communication module 240 that is connected to an external server 500 and receives control signals from the outside. The master control device 200 also includes an external power supply module 230 and a master-side sensor module 250.

[0049] When power is not supplied to the master control device 200 from the power line communication line 100 due to an abnormality in the master-side power supply module 220 of the master control device 200 or an abnormality in the power line communication line 100 connected to the operating master-side power line communication module 210, the external power supply module 230 can supply operating power to the master control device 200 through an externally attached external power supply unit (not shown). Here, the externally attached external power supply unit may be a UPS, a BAT, etc.

[0050] The master side sensor module 250 provides an interface for processing various sensors for diagnosing abnormalities in the power supply and power line communication module 210 of the master control device 200, abnormalities in the communication module 240, and the status and fault diagnosis of components that make up the rails and logistics system, and the interface may be configured with an insulated structure or a non-insulated structure.

[0051] At this time, the master-side power line communication module 210 includes a coupler unit 211 that receives the power and the communication signal from the power line communication line 100 and supplies the power to the master-side power supply module 220 side, and a master-side power line communication transceiver unit 212 that receives the communication signal from the coupler unit 211 and transmits the communication signal to the coupler unit 211 side.

[0052] The coupler unit 211 protects the device from electrical (current, voltage) transients (surges), separates the communication signal from noise (switching noise, other communication signals) flowing in from the power supply unit, and can also prevent the communication signal from flowing directly into the master side power supply module 220.

[0053] In this case, the coupler unit 211 may include a low pass filter (LPF) for passing the power supply and a band pass filter (BPF) or a high pass filter (HPF) for passing the communication signal. In this case, the power supply and the communication signal are independently transmitted to the master side power supply module 220 and the master side power line communication transceiver unit 212, respectively.

[0054] Meanwhile, the slave control device 300 receives a control signal from the master control device 200 to be controlled, and transmits data relating to the operating state to the master control device 200 side.

[0055] More specifically, the slave control device 300 may include an identification module 330 capable of communicating with the identification tag of the item stored in the item storage device 900, a slave side power line communication module 310 for separating the power and the communication signal supplied from the power-communication signal application section 120 of the power line communication line 100 and transmitting and receiving the communication signal, a slave side power supply module 320 for receiving the power from the slave side power line communication module 310, a gas supply control module 340 for controlling the supply of inert gas to the item storage device 900, a slave side central control module 360 ​​for controlling the identification module 330 and the gas supply control module 340, and a slave side sensor module 350.

[0056] The slave side sensor module 350 provides an interface for processing various sensors for diagnosing abnormalities in the power supply and power line communication module 310 of the slave control device 300, abnormalities in the gas supply control module 340, and the status and fault diagnosis of components that make up the rails and logistics system, and the interface may be configured with an insulated structure or a non-insulated structure.

[0057] The slave-side power line communications module 310 includes a coupler unit 311 that receives the power and the communication signal from the power line communications line 100 and supplies the power to the slave-side power supply module 320, and a slave-side power line communications transceiver unit 312 that receives the communication signal from the coupler unit 311 and transmits the communication signal to the coupler unit 311. The coupler unit 311 of the slave-side power line communications module 310 is substantially the same as the coupler unit 211 of the master-side power line communications module 210, and therefore a detailed description thereof will be omitted.

[0058] The identification module 330 includes at least one identification module antenna unit 332 for wireless communication with the identification tag of the article, and an identification module control unit 331 for supplying power to the identification tag and transmitting and receiving identification signals via the identification module antenna unit 332. In this case, the identification tag may be, for example, an RFID, and the identification module control unit 331 can control the identification module antenna unit 332 to communicate with the identification tag.

[0059] The identification module control unit 331 may, for example, perform data communication and power transmission using a first frequency and power transmission using a second frequency, and may include a carrier wave generation block 333 that generates a carrier wave and control commands, an antenna selection block 336 that selects one of one or more connected antenna units on the identification module side and selects the port to which the antenna unit is connected, a power monitoring block 334 that monitors the power transmitted from the antenna unit, and a capacitor selection block 335 that matches impedance that changes due to external influences and coil value deviations of the antenna unit.

[0060] In this embodiment, the capacitor selection block 335 for impedance matching includes multiple capacitors, and can select capacitors in a way that 1) maximizes the current or resonant voltage applied to the identification module side antenna unit 332 so that maximum power is transmitted through the identification module side antenna unit 332, or 2) reduces the difference between the voltage phase and current phase of the transmitter switching circuit.

[0061] Meanwhile, the identification module control unit 331 further includes a storage unit that stores information about the capacitor selected by impedance matching and information about the antenna selected by the identification module side antenna unit 332. The storage unit may store information about the combination of the antenna and the capacitor that transmits the maximum power during impedance matching, and information about the voltage and phase measured by the combination.

[0062] In addition, the identification module control unit 331 may further include a detection unit that selects capacitors configured in combination to transmit maximum power to each of the antennas, and detects a difference between a preset voltage or phase and a voltage or phase detected during operation when transmitting power through the carrier wave generation block 333, and an abnormality determination unit that determines that there is an abnormality in the antenna or an abnormal operation when the phase deviation detected by the detection unit exceeds a preset reference deviation range.

[0063] In this embodiment, the impedance matching of the identification module control unit 331 converts the AC voltage of the resonant frequency detected in the capacitors sequentially selected from the capacitor selection block for a selected antenna among the antennas of the identification module side antenna unit 332 into a DC voltage level to find the capacitor with the highest value, and stores the combination of the selected antenna and the selected capacitor and the detected voltage.

[0064] If the antenna resonance characteristics change due to metal or other external factors, the transmission output will decrease, affecting reading performance. However, by performing a tuning process on the transmission signal during initial installation, it is possible to find the optimum transmission output for the environment and use that value to ensure maximum performance.

[0065] Based on this, it is possible to adjust the transmission power in an open loop power control form to accommodate cases where low output is required, and therefore, when there is an external device nearby that is sensitive to frequency, it is possible to adjust the carrier transmission power to a low level within the range allowed by communication.

[0066] According to the proposed embodiment, power supply and communication are performed via power lines, which are the power supply lines in the semiconductor process logistics management system, eliminating the need for high-altitude work to install expensive communication cables for existing communications. In addition, general-purpose PCs and general-purpose controllers (such as MCUs) can be used instead of EtherCAT-specific control systems (such as BeckHoff PCs), resulting in overall cost savings.

[0067] FIG. 6 is a diagram showing a semiconductor process logistics management system according to another embodiment of the present invention.

[0068] The only difference in this embodiment is the configuration of the filter section, and the other configurations are essentially the same as those of the semiconductor process logistics management system shown in Figures 1 to 4, so the following description will focus on the characteristic parts of this embodiment.

[0069] Referring to FIG. 6, a plurality of filter units 410 and 420 according to this embodiment are provided, and include a first filter unit 410 and a second filter unit 420.

[0070] More specifically, the power-communication signal application section 120 of the power line communication line 100 is provided between the first power application section 110A and the second power application section 110B of the power application section 110.

[0071] The first filter unit 410 is arranged at a node where the power-communication signal application section 120 and the first power application section 110A are connected, and the second filter unit 420 is arranged at a node where the power-communication signal application section 120 and the second power application section 110B are connected.

[0072] An external device 700 that receives only the power from the power line communication line 100 is connected to the second power application section 110B.

[0073] That is, a second filter unit 420 is arranged between the node where the external device 700 is connected to the power line communication line and the node where the master control device 200 or the slave control device 300 is connected to the power line communication line 100, thereby preventing the communication signal from flowing into the external device 700.

[0074] The second filter unit 420 has the same structure as the first filter unit 410 .

[0075] FIG. 7 is a diagram showing a semiconductor process logistics management system according to still another embodiment of the present invention.

[0076] The only difference in this embodiment is the arrangement of the filter section, and the other configurations are essentially the same as those of the semiconductor process logistics management system in Figure 6. Therefore, the following description will focus on the distinctive features of this embodiment.

[0077] Referring to FIG. 7, the semiconductor process logistics management system 1 according to this embodiment includes a first filter unit 410, a second filter unit 420, and a third filter unit 430.

[0078] The first filter unit 410 and the third filter unit 430 are symmetrically arranged at one end and the other end of the power-communication signal application section 120 of the power line communication line 100, respectively, to enable the communication signal in the power-communication signal application section 120 to be formed more stably.

[0079] The third filter unit 430 has the same structure as the first filter unit 410 .

[0080] The second filter unit 420 is arranged at a connection node between the second power application section 110B and the power and communication signal application section 120 so as to form a second power application section 110B branching within the power and communication signal application section 120 and connected to the second external device 700B. Meanwhile, the first external device 700A can be connected to the third power application section 110C.

[0081] FIG. 8 is a diagram showing a semiconductor process logistics management system according to still another embodiment of the present invention.

[0082] The only difference in this embodiment is the configuration of the master control device, and the other configurations are essentially the same as those of the semiconductor process logistics management system shown in Figures 1 to 7. Therefore, the following description will focus on the distinctive features of this embodiment.

[0083] 8, the master control device 200 of the semiconductor process logistics management system 1 according to this embodiment further includes a control signal transceiver module 270 connected to an external server 500 to receive control signals from the server and transmit monitoring signals to the external server 500. The control signal transceiver module 270 may be a commercial PC or a general-purpose controller (e.g., MCU) connected to an external communication line, for example, a wired communication line such as a LAN or a wireless communication line such as Wi-Fi. The control signal transceiver module 270 includes a control signal transceiver module-side power supply unit 271 connected to the power application section of the power line communication line to receive power, and a control signal transceiver module-side communication unit 272 for transmitting and receiving the control signal. The master control device 200 further includes a master-side communication unit 280 for transmitting and receiving the control signal to and from the control signal transceiver module 270.

[0084] The control signal transmitting / receiving module 270 may be provided inside the master control device 200 or outside the master control device 200 .

[0085] The control signal transmitting / receiving module 270 according to this embodiment may be a commercial PC or a general-purpose controller (such as an MCU) that uses an external power source, which makes it easier to install and reduces installation costs.

[0086] FIG. 9 is a diagram showing a semiconductor process logistics management system according to still another embodiment of the present invention.

[0087] This embodiment differs only in the layout configuration of the master control device, and other configurations are essentially the same as the semiconductor process logistics management system shown in Figures 1 to 8, so the following explanation will focus on the distinctive features of this embodiment.

[0088] Referring to Figures 9(A) and 9(B), the master control device 200 of the semiconductor process logistics management system 1 according to this embodiment includes a first master control device 200A connected to a first node of the power line communication line 100, and a second master control device 200B connected to a second node formed at a location different from the first node to which the first master control device 200A is connected.

[0089] Only one of the first master control device 200A and the second master control device 200B communicates with the slave control device 300, and the other monitors whether the master control device 200 communicating with the slave control device 300 is operating normally.

[0090] If the master control device 200 communicating with the slave control device 300 is not operating normally, the master control device 200 communicating with the slave control device 300 disconnects the power line communication signal switch connected to the power line communication line 100 to block communication transmission and reception, and the other master control device 200 connects the power line communication signal switch connected to the power line communication line 100 to enable communication transmission and reception and starts communication with the slave control device 300.

[0091] For example, in this embodiment, when the first master control device 200A and the second master control device 200B are all connected to the power line communication line 100 and the first master control device 200A transmits and receives signals with the slave control device 300, the second master control device 200B monitors the operating status of the first master control device 200A.

[0092] If the first master control device 200A is unable to operate normally, the first master control device 200A disconnects the first master power line communication signal switch connected to the power line communication line 100 to cut off communication transmission and reception, and the second master control device 200B, which is monitoring communication by the first master control device 200A, starts connecting the second master power line communication signal switch connected to the power line communication line 100 to start signal transmission and reception with the slave control device 300. At this time, the second master control device 200B can notify an external server of the abnormal operating state of the first master control device 200A and the disconnected state of the power line communication line.

[0093] In this embodiment, multiple master control devices 200 are provided, and if an abnormality occurs in the main master control device 200A, another master control device 200B immediately takes over the role of the main master control device 200A, thereby minimizing the occurrence of system errors and the recovery time when an error occurs.

[0094] FIG. 10 is a diagram showing a semiconductor process logistics management system according to still another embodiment of the present invention.

[0095] The only difference in this embodiment is the configuration of the master communication device, and the other configurations are essentially the same as those of the semiconductor process logistics management system shown in Figures 1 to 7. Therefore, the following description will focus on the characteristic parts of this embodiment.

[0096] Referring to FIG. 10, the master control device 200 according to this embodiment may include a plurality of master-side power line communication modules 210A and 210B.

[0097] At this time, the master control device 200 includes a switching module 283 that selectively connects any one of the plurality of master-side power line communication modules to the power line communication line side.

[0098] In this embodiment, a plurality of master-side power line communication modules are provided in the master control device 200, and if a problem occurs in a master-side power line communication module connected to the power line communication line 100, this is detected and another master-side power line communication module is connected to the power line communication line 100, thereby providing the advantage of enabling quick recovery of functionality when an error occurs.

[0099] In this embodiment, the configuration of the master control device 200 is mainly described, but it is also possible to configure the slave control device 300 to include multiple power line communication modules and to selectively cut off the power supply and the communication signal by detecting an abnormal state of any one of the power line communication modules.

[0100] FIG. 11 is a diagram showing a master control device of a semiconductor process logistics control system according to still another embodiment of the present invention.

[0101] The only difference in this embodiment is the configuration of the master control device 800, and the other configurations are essentially the same as those of the semiconductor process logistics management system shown in Figures 1 to 7. Therefore, the following description will focus on the distinctive features of this embodiment.

[0102] Referring to FIG. 11, the master-side power line communication transceiver unit 813 of the master-side power line communication module 810 includes a communication unit-side switching unit 814 for selectively blocking the communication signal transmitted from the coupler unit 811.

[0103] The master-side power line communication transceiver unit 813 then transmits power line communication monitoring data for the power line communication signal to the master-side central control module 860, and the master-side central control module 860 determines whether the communication signal is normal or abnormal based on the power line communication monitoring data. If the communication signal is determined to be abnormal, the master-side central control module 860 transmits a communication signal cutoff control signal to the master-side power line communication transceiver unit 813, causing the communication unit-side switching unit 814 to cut off the communication signal.

[0104] Meanwhile, the master side power supply module 820 includes a power supply module side switching unit 821 for selectively cutting off the power transmitted from the coupler unit 811, and a power monitoring unit 822 for generating power monitoring data regarding the power status and transmitting the power monitoring data to the master side central control module.

[0105] The master-side central control module 860 determines whether the power is normal or abnormal based on the power monitoring data. If the power is determined to be abnormal, the master-side central control module 860 transmits a power cutoff control signal to the master-side power line power supply module 820, causing the power supply module-side switching unit 821 to cut off the power.

[0106] At this time, the power supply module side switching unit 821 and the communication unit side switching unit 814 can cut off the power supply and the communication signal independently of each other.

[0107] In this embodiment, if an unexpected surge or the like occurs via the power line communication line, the master-side central control module 860 of the master control device 800 detects this and cuts off the power or communication signal, thereby protecting the internal circuit configuration and providing an advantage of being able to robustly respond to errors.

[0108] In this embodiment, the configuration of the master control device is mainly described, but it is also possible to configure the slave control device 300 to detect an abnormal state and selectively cut off the power supply and the communication signal.

[0109] In the master control device 800 of the present invention, an external power supply module may be provided that supplies operating power to the master control device 800 via an external power supply unit (not shown) when the power supply module side switching unit 821 cuts off the power supply to the master side power line power supply module 820.

[0110] FIG. 12 is a diagram showing a master control device of a semiconductor process logistics control system according to still another embodiment of the present invention.

[0111] The only difference in this embodiment is the configuration of the master control device 200, and the other configurations are essentially the same as those of the semiconductor process logistics management system shown in Figures 1 to 7. Therefore, the following description will focus on the distinctive features of this embodiment.

[0112] Referring to FIG. 12, the master control device 200 of the semiconductor process logistics management system 1 according to this embodiment further includes a master side switching unit 290 for selectively cutting off the power and communication signals transmitted from the power line communication line 100 side to the master side power line communication module 210 side.

[0113] The master side power supply module 220 that receives the power from the coupler unit 211 generates power monitoring data on the state of the power and transmits the power monitoring data to the master side central control module 260 .

[0114] The master side power line communication transceiver unit 212 transmits power line communication monitoring data for the power line communication signal to the master side central control module 260 side.

[0115] The master-side central control module 260 then determines whether the power is normal or abnormal based on the power monitoring data, and determines whether the communication signal is normal or abnormal based on the power line communication monitoring data.

[0116] In this embodiment, the configuration of the master control device 200 is mainly described, but it is also possible to configure the slave control device 300 to detect an abnormal state and selectively cut off the power supply and the communication signal.

[0117] When it is determined that at least one of the power and the communication signal is in an abnormal state, the master-side central control module 260 transmits a cutoff control signal to the master-side switching unit 290 so that the master-side switching unit 290 cuts off the power supply and communication signal supplied from the power line communication line side to the master-side power line communication module side.

[0118] On the other hand, in this embodiment, a configuration in which the master control device 200 includes a master side switching unit 290 is described, but a configuration in which the slave control device 300 includes a slave side switching unit may also be included in the embodiments of the present invention.

[0119] According to the proposed embodiment, when an unexpected surge occurs in the power line communication line 100, it is possible to detect it early and protect the circuit.

[0120] Although the preferred embodiment of the present invention has been described above, the present invention is not limited thereto, and various modifications can be made within the scope of the claims, the detailed description of the invention, and the accompanying drawings, which also fall within the scope of the present invention.

Claims

1. In the semiconductor process logistics management system, a slave control device that controls an item storage device in which an item is stored; a power line communication line for transmitting power and communication signals to the slave control device; a master control device connected to the power line communication line and communicating with the slave control device via the power line communication line; a filter unit disposed on the power line communication line and configured to block the communication signal, The semiconductor process logistics management system is characterized in that, based on the filter unit, the power line communication line has a power application section to which only the power is applied and a power-communication signal application section to which the power and the communication signal are applied.

2. the slave control device and the master control device are connected to the power-communication signal application section of the power line communication line; the slave control device further includes a slave-side power line communication module for separating the power and the communication signal supplied from the power line communication line and transmitting and receiving the communication signal; 2. The semiconductor process logistics management system according to claim 1, wherein the master control device includes a master-side power line communication module that separates the power and the communication signal supplied from the power line communication line and transmits and receives the communication signal to the power line communication line side.

3. the slave control device includes an identification module capable of communicating with an identification tag of the item stored in the item storage device, a slave-side power supply module that receives the power from the slave-side power line communication module, a gas supply control module that controls the supply of inert gas to the item storage device, a slave-side central control module that controls the identification module and the gas supply control module, and a slave-side sensor module that senses the state of a component; the slave-side power line communication module includes a coupler unit that receives the power and the communication signal from the power line communication line and supplies the power to the slave-side power supply module, and a slave-side power line communication transceiver unit that receives the communication signal from the coupler unit and transmits the communication signal to the coupler unit, 3. The semiconductor process logistics management system according to claim 2, wherein the identification module includes at least one identification module side antenna unit for wireless communication with the identification tag, and an identification module control unit for supplying power to the identification tag via the identification module side antenna unit and transmitting and receiving identification signals.

4. 4. The semiconductor process logistics management system of claim 3, wherein the identification module control unit includes: a carrier wave generation block that generates a carrier wave and a control command; an antenna selection block that designates one of one or more connected antenna units on the identification module side and selects a port to which the antenna unit is connected; a power monitoring block that monitors the power transmitted from the antenna unit; and a capacitor selection block that matches impedance that changes due to external influences and coil value deviations of the antenna unit.

5. the slave control device further includes a slave-side switching unit for selectively cutting off the power and communication signals transmitted from the power line communication line side to the slave-side power line communication module side; the slave-side power supply module receiving the power from the coupler unit generates power monitoring data regarding the state of the power and transmits the power monitoring data to the slave-side central control module; the slave-side power line communication transceiver unit transmits power line communication monitoring data for the power line communication signal to the slave-side central control module; the slave-side central control module determines whether the power is normal or abnormal based on the power monitoring data, and determines whether the communication signal is normal or abnormal based on the power line communication monitoring data; 4. The semiconductor process logistics management system according to claim 3, wherein, when it is determined that at least one of the power and the communication signal is in an abnormal state, the slave-side central control module transmits a cutoff control signal to the slave-side switching unit so that the slave-side switching unit cuts off the power and the communication signal supplied from the power line communication line side to the slave-side power line communication module side.

6. a plurality of the slave-side power line communication modules are provided, and each of the plurality of slave-side power line communication modules is independently connected to the slave-side power supply module and the slave-side central control module; 4. The semiconductor process logistics management system according to claim 3, wherein the slave control device includes a switching module that selectively connects any one of the plurality of slave-side power line communication modules to the power line communication line side.

7. the master control device further includes a master-side power supply module that receives the power from the master-side power line communication module, a master-side central control module that controls the master control device, an external power supply module that selectively receives power from an external power supply unit, and a master-side sensor module that senses the state of a component; 3. The semiconductor process logistics management system according to claim 2, wherein the master-side power line communication module includes a coupler unit that receives the power and the communication signal from the power line communication line and supplies the power to the master-side power supply module, and a master-side power line communication transceiver unit that receives the communication signal from the coupler unit and transmits the communication signal to the coupler unit.

8. 8. The semiconductor process logistics management system according to claim 7, wherein the master control device further comprises a master-side communication module connected to an external server and receiving a control signal from the external server.

9. The master control device further comprising a control signal transceiver module connected to an external server and configured to receive a control signal from the external server; the control signal transceiver module includes a control signal transceiver module-side power supply unit connected to the power application section of the power line communication line and receiving the power, and a control signal transceiver module-side communication unit for transmitting and receiving the control signal, 8. The semiconductor process logistics management system according to claim 7, wherein the master control device further comprises a master-side communication unit for transmitting and receiving the control signal to and from the control signal transmitting and receiving module.

10. a plurality of the master-side power line communication modules are provided, and each of the plurality of master-side power line communication modules is independently connected to the master-side power supply module and the master-side central control module; 10. The semiconductor process logistics management system according to claim 8, wherein the master control device further includes a switching module that selectively connects any one of the plurality of master-side power line communication modules to the power line communication line side.

11. the master-side power line communication transceiver unit of the master-side power line communication module includes a communication unit-side switching unit for selectively blocking the communication signal transmitted from the coupler unit; the master-side power line communication transceiver unit transmits power line communication monitoring data for the power line communication signal to the master-side central control module; the master-side central control module determines whether the communication signal is normal or abnormal based on the power line communication monitoring data; 8. The semiconductor process logistics management system of claim 7, wherein, when the communication signal is determined to be in an abnormal state, the master-side central control module transmits a communication signal cutoff control signal to the master-side power line communication transceiver unit, causing the communication unit-side switching unit to cut off the communication signal.

12. the master-side power supply module includes a power supply module-side switching unit for selectively cutting off the power transmitted from the coupler unit, and a power monitoring unit for generating power monitoring data regarding a state of the power and transmitting the power monitoring data to the master-side central control module; The master-side central control module determines whether the power is normal or abnormal based on the power monitoring data; When it is determined that the power is in an abnormal state, the master-side central control module transmits a power cutoff control signal to the master-side power line power module, causing the power module-side switching unit to cut off the power; 12. The semiconductor process logistics management system according to claim 11, wherein the power supply module side switching unit and the communication unit side switching unit can cut off the power and the communication signal independently of each other.

13. the master control device further includes a master-side switching unit for selectively cutting off the power and communication signals transmitted from the power line communication line side to the master-side power line communication module side; the master-side power supply module receiving the power from the coupler unit generates power monitoring data regarding the state of the power and transmits the power monitoring data to the master-side central control module; the master-side power line communication transceiver unit transmits power line communication monitoring data for the power line communication signal to the master-side central control module; the master-side central control module determines whether the power is normal or abnormal based on the power monitoring data, and determines whether the communication signal is normal or abnormal based on the power line communication monitoring data; 10. The semiconductor process logistics management system according to claim 8, wherein when it is determined that at least one of the power and the communication signal is in an abnormal state, the master-side central control module transmits a cutoff control signal to the master-side switching unit so that the master-side switching unit cuts off the power and the communication signal supplied from the power line communication line side to the master-side power line communication module side.

14. the power-communication signal application section of the power line communication line is provided between a first power application section and a second power application section of the power application section; 2. The semiconductor process logistics management system of claim 1, wherein the filter unit includes: a first filter unit disposed at a node where the power-communication signal application section and the first power application section are connected; and a second filter unit disposed at a node where the power-communication signal application section and the second power application section are connected.

15. 15. The semiconductor process logistics management system of claim 14, further comprising an external device connected to the power line communication line of the power-communication signal application section to receive only the power, and a third filter unit between the external device and a node to which the power line communication line of the power-communication signal application section is connected.

16. the master control devices include a first master control device connected to any one node of the power line communication line, and a second master control device connected to a node different from the node to which the first master control device is connected; only one of the first master control device and the second master control device communicates with the slave control device; the other of the first master control device and the second master control device monitors whether the master control device that communicates with the slave control device is operating normally; 2. The semiconductor process logistics management system according to claim 1, wherein, when the master control device that communicates with the slave control device does not operate normally, the master control device that communicates with the slave control device is disconnected from the power line communication line, and another master control device starts communication with the slave control device.

17. In a slave control device that controls an article storage device in which an article is stored, a slave-side power line communication module for separating the power and communication signals supplied from the power line communication line and transmitting and receiving the communication signals; a slave-side power supply module that receives the power from the slave-side power line communication module; a slave-side sensor module for sensing the state of the component; The slave-side power line communication module is a slave control device characterized in that it includes: a coupler unit that receives the power and the communication signal from the power line communication line and supplies the power to the slave-side power supply module side; and a slave-side power line communication transceiver unit that receives the communication signal from the coupler unit and transmits the communication signal to the coupler unit side.

18. a gas supply control module for controlling the supply of inert gas to the item storage device; and an identification module capable of communicating with an identification tag of the item stored in the item storage device; a slave-side central control module for controlling the identification module and the gas supply control module; The slave control device described in claim 17, characterized in that the identification module includes at least one identification module side antenna unit for wireless communication with the identification tag, and an identification module control unit that supplies power to the identification tag via the identification module side antenna unit and transmits and receives identification signals.

19. 20. The slave control device of claim 18, wherein the identification module control unit includes: a carrier wave generation block that generates a carrier wave and a control command; an antenna selection block that designates one of one or more connected antenna units on the identification module side and selects a port to which the antenna unit is connected; a power monitoring block that monitors the power transmitted from the antenna unit; and a capacitor selection block that matches impedance that changes due to external influences and coil value deviations of the antenna unit.

20. a master control device that communicates with a slave control device that controls an article storage device in which an article is stored via a power line communication line; a master-side power line communication module for separating the power and communication signals supplied from the power line communication line and transmitting and receiving the communication signals to the power line communication line side; a master-side power supply module that receives the power from the master-side power line communication module; a master-side central control module for controlling the master control device; and an external power supply module for selectively receiving power from an external power supply unit; a master-side sensor module for sensing the state of the component; The master control device is characterized in that the master-side power line communication module includes a coupler unit that receives the power and the communication signal from the power line communication line and supplies the power to the master-side power supply module, and a master-side power line communication transceiver unit that receives the communication signal from the coupler unit and transmits the communication signal to the coupler unit.

21. 21. The master control device according to claim 20, further comprising a master-side communication module connected to an external server to receive control signals from the external server.

22. a control signal transmitting / receiving module connected to an external server and receiving a control signal from the external server; and a master-side communication unit for transmitting and receiving the control signal to and from the control signal transmitting / receiving module; 21. The master control device of claim 20, wherein the control signal transmitting / receiving module includes a control signal transmitting / receiving module-side power supply unit connected to the power application section of the power line communication line and receiving the power, and a control signal transmitting / receiving module-side communication unit for transmitting and receiving the control signal.

23. a plurality of the master-side power line communication modules are provided, and each of the plurality of master-side power line communication modules is independently connected to the master-side power supply module and the master-side central control module; 21. The master control device according to claim 20, further comprising a switching module that selectively connects any one of the plurality of master-side power line communication modules to the power line communication line side.

Images